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TWI526942B - Fingerprint sensor device - Google Patents

Fingerprint sensor device Download PDF

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Publication number
TWI526942B
TWI526942B TW103118462A TW103118462A TWI526942B TW I526942 B TWI526942 B TW I526942B TW 103118462 A TW103118462 A TW 103118462A TW 103118462 A TW103118462 A TW 103118462A TW I526942 B TWI526942 B TW I526942B
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substrate
sensing layer
layer
fingerprint
sensing
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TW103118462A
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TW201545070A (en
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李瑞倪
楊昇帆
張耀光
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奇景光電股份有限公司
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Description

指紋感測裝置 Fingerprint sensing device

本發明是有關於一種感測裝置,且特別是一種應用在指紋辨識技術上的指紋感測裝置。 The invention relates to a sensing device, and in particular to a fingerprint sensing device applied to fingerprint identification technology.

指紋辨識技術係使用指紋感測裝置感測使用者的指紋來識別個人身分。指紋感測裝置可依據所應用的技術範疇分類,例如光學式指紋感測裝置、超音波式指紋感測裝置、壓力式指紋感測裝置或電容式指紋感測裝置等。其中,電容式指紋感測裝置具有體積小的優點,其適合應用在個人電子裝置上,例如智慧型手機或平板電腦等。 The fingerprint identification technology uses a fingerprint sensing device to sense a user's fingerprint to identify an individual's identity. The fingerprint sensing device can be classified according to the applied technical category, such as an optical fingerprint sensing device, an ultrasonic fingerprint sensing device, a pressure fingerprint sensing device or a capacitive fingerprint sensing device. Among them, the capacitive fingerprint sensing device has the advantage of small size, and is suitable for application on a personal electronic device, such as a smart phone or a tablet computer.

就電容式指紋感測裝置而言,現有的電容式指紋感測裝置主要有二種型式,第一種為感測層和控制晶片設置於印刷電路板(printed circuit board;PCB)上的指紋感測裝置,而第二種為感測層和控制電路整合為指紋感測晶片的指紋感測裝置。上述第一種指紋感測裝置係使用印刷電路板製程形成感測層,此感測層藉由印刷電路板走線電性連接控制晶片。然而,受限於印刷電路板製程,上述第一種指紋感測裝置的解析度無法有效提升。另一方面,上述第二種指紋感測裝置係將感測層形成於晶片內。透過晶片製程,可縮小感測層內的感測電極間距,進而提高指紋感 測的解析度。然而,上述第二種指紋感測裝置的製造成本較高。 In the case of a capacitive fingerprint sensing device, there are two main types of capacitive fingerprint sensing devices. The first is a sense of fingerprint on the printed circuit board (PCB) of the sensing layer and the control chip. The second device is a fingerprint sensing device in which the sensing layer and the control circuit are integrated into a fingerprint sensing chip. The first type of fingerprint sensing device described above uses a printed circuit board process to form a sensing layer. The sensing layer is electrically connected to the control chip by a printed circuit board trace. However, limited by the printed circuit board process, the resolution of the first type of fingerprint sensing device described above cannot be effectively improved. In another aspect, the second fingerprint sensing device described above forms a sensing layer within the wafer. Through the wafer process, the sensing electrode spacing in the sensing layer can be reduced, thereby improving the fingerprint sense The resolution of the measurement. However, the second type of fingerprint sensing device described above is relatively expensive to manufacture.

本發明的目的即在於提供一種指紋感測裝置,其特點在於可同時具有高指紋辨識解析度、低製造成本和大指紋感測面積等優點。 An object of the present invention is to provide a fingerprint sensing device, which is characterized in that it has the advantages of high fingerprint recognition resolution, low manufacturing cost, and large fingerprint sensing area.

依據本發明之上述目的,提出一種指紋感測裝置。此指紋感測裝置包含基板、感測層、控制晶片和保護層。感測層設置於基板上,且具有彼此相對之第一側面與第二側面,其中第一側面連接於基板。控制晶片設置於感測層之第二側面上。保護層設置於感測層之第二側面上,且位於感測層與控制晶片之間。 In accordance with the above objects of the present invention, a fingerprint sensing device is proposed. The fingerprint sensing device includes a substrate, a sensing layer, a control wafer, and a protective layer. The sensing layer is disposed on the substrate and has a first side and a second side opposite to each other, wherein the first side is connected to the substrate. The control wafer is disposed on the second side of the sensing layer. The protective layer is disposed on the second side of the sensing layer and between the sensing layer and the control wafer.

依據本發明之一實施例,此指紋感測裝置更包含多個金屬走線。此些金屬走線設置於上述感測層之第二側面上,且此些金屬走線係用以使上述控制晶片電性連接於上述感測層。 According to an embodiment of the invention, the fingerprint sensing device further comprises a plurality of metal traces. The metal traces are disposed on the second side of the sensing layer, and the metal traces are used to electrically connect the control chip to the sensing layer.

依據本發明之又一實施例,上述基板為玻璃基板。 According to still another embodiment of the present invention, the substrate is a glass substrate.

依據本發明之又一實施例,上述感測層為玻璃式(glass type)感測層或薄膜式(film type)感測層。 According to still another embodiment of the present invention, the sensing layer is a glass type sensing layer or a film type sensing layer.

依據本發明之上述目的,另提出一種指紋感測裝置。此指紋感測裝置包含基板、感測層、控制晶片和保護層。基板具有彼此相對之第一側面與第二側面。感測層設置於基板之第一側面上。控制晶片設置於基板之第二側面上。保護層設置於基板之第二側面上,且位於基板與控制 晶片之間。 According to the above object of the present invention, a fingerprint sensing device is further proposed. The fingerprint sensing device includes a substrate, a sensing layer, a control wafer, and a protective layer. The substrate has a first side and a second side opposite to each other. The sensing layer is disposed on the first side of the substrate. The control wafer is disposed on the second side of the substrate. The protective layer is disposed on the second side of the substrate and is located on the substrate and the control Between wafers.

依據本發明之一實施例,此指紋感測裝置更包含多個金屬走線。此些金屬走線於基板之厚度方向上橫跨基板,且此些金屬走線係用以使上述控制晶片電性連接於上述感測層。 According to an embodiment of the invention, the fingerprint sensing device further comprises a plurality of metal traces. The metal traces straddle the substrate in the thickness direction of the substrate, and the metal traces are used to electrically connect the control wafer to the sensing layer.

依據本發明之又一實施例,上述基板為玻璃基板。 According to still another embodiment of the present invention, the substrate is a glass substrate.

依據本發明之又一實施例,上述基板之第一側面具有接觸面與非接觸面。其中,此接觸面係供手指直接接觸,且上述控制晶片係設置於此非接觸面上。 According to still another embodiment of the present invention, the first side surface of the substrate has a contact surface and a non-contact surface. Wherein, the contact surface is directly in contact with the finger, and the control chip is disposed on the non-contact surface.

依據本發明之又一實施例,此指紋感測裝置更包含遮蔽層。此遮蔽層設置於上述控制晶片上,且覆蓋上述控制晶片。 According to still another embodiment of the present invention, the fingerprint sensing device further includes a shielding layer. The shielding layer is disposed on the control wafer and covers the control wafer.

依據本發明之又一實施例,上述感測層為玻璃式感測層或薄膜式感測層。 According to still another embodiment of the present invention, the sensing layer is a glass sensing layer or a thin film sensing layer.

100、200‧‧‧指紋感測裝置 100,200‧‧‧Fingerprint sensing device

110、210‧‧‧基板 110, 210‧‧‧ substrate

120、220‧‧‧感測層 120, 220‧‧‧ Sensing layer

120A、210A‧‧‧第一側面 120A, 210A‧‧‧ first side

120B、210B‧‧‧第二側面 120B, 210B‧‧‧ second side

130、230‧‧‧控制晶片 130, 230‧‧‧Control wafer

140、240‧‧‧金屬走線 140, 240‧‧‧Metal routing

150、250‧‧‧保護層 150, 250‧‧ ‧ protective layer

212‧‧‧接觸面 212‧‧‧Contact surface

214‧‧‧非接觸面 214‧‧‧ Non-contact surface

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下:第1A圖係繪示本發明一實施例指紋感測裝置之俯視圖;第1B圖係繪示第1A圖指紋感測裝置之側視圖;以及第2圖係繪示本發明又一實施例指紋感測裝置之側視圖。 The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 1 is a side view of a fingerprint sensing device of FIG. 1A; and FIG. 2 is a side view of a fingerprint sensing device according to still another embodiment of the present invention.

以下仔細討論本發明的實施例。然而,可以理解的 是,實施例提供許多可應用的發明概念,其可實施於各式各樣的特定內容中。所討論之特定實施例僅供說明,並非用以限定本發明之範圍。 Embodiments of the invention are discussed in detail below. However, understandable Yes, the embodiments provide many applicable inventive concepts that can be implemented in a wide variety of specific content. The specific embodiments discussed are illustrative only and are not intended to limit the scope of the invention.

請參照第1A圖,其係繪示本發明一實施例指紋感測裝置100之俯視圖。指紋感測裝置100係用以取得使用者的指紋資訊,其可應用在例如筆記型電腦、平板電腦、智慧型手機、數位相機、門禁系統或車用防盜系統等電子裝置或系統,但不限於此。 Please refer to FIG. 1A, which is a top view of a fingerprint sensing device 100 according to an embodiment of the invention. The fingerprint sensing device 100 is used to obtain fingerprint information of a user, and can be applied to an electronic device or a system such as a notebook computer, a tablet computer, a smart phone, a digital camera, an access control system, or a vehicle anti-theft system, but is not limited thereto. this.

在第1A圖中,指紋感測裝置100包含基板110、感測層120、控制晶片130和金屬走線140。基板110係用以供使用者的手指直接接觸。在本發明中,基板110可以是玻璃基板或樹脂基板等。感測層120設置於基板110上,且具有彼此相對的第一側面120A與第二側面120B,其中第一側面120A連接於基板110。感測層120係用以感測使用者的手指指紋紋路,且感測層120係根據其結構類型來進行對應的感測方法。舉例而言,若感測層120為電容式感測層,則此感測層120可具有排列為矩陣狀的多個電極結構,此些電極結構分別與手指的凸脊(ringe)和凹溝(valley)作用而聚集不同電荷量,此些不同電荷量產生感測訊號,接著再藉由後端處理電路處理感測訊號,以得到指紋圖像資訊。作為電容式感測層的感測層120可以是玻璃式(glass type)感測層或薄膜式(film type)感測層,其相關實施方式為本領域具通常知識者所熟知,故在此不詳加說明。此外,在本發明中,感測層120也可以是例如 壓力式感測層或熱感式感測層等。 In FIG. 1A, the fingerprint sensing device 100 includes a substrate 110, a sensing layer 120, a control wafer 130, and a metal trace 140. The substrate 110 is used for direct contact with the user's fingers. In the present invention, the substrate 110 may be a glass substrate, a resin substrate or the like. The sensing layer 120 is disposed on the substrate 110 and has a first side surface 120A and a second side surface 120B opposite to each other, wherein the first side surface 120A is coupled to the substrate 110. The sensing layer 120 is used to sense the fingerprint pattern of the user's finger, and the sensing layer 120 performs a corresponding sensing method according to its structure type. For example, if the sensing layer 120 is a capacitive sensing layer, the sensing layer 120 may have a plurality of electrode structures arranged in a matrix, and the electrode structures are respectively associated with the ridges and grooves of the fingers. The (valley) acts to accumulate different amounts of charge, and the different amounts of charge generate a sensing signal, and then the sensing signal is processed by the back-end processing circuit to obtain fingerprint image information. The sensing layer 120 as a capacitive sensing layer may be a glass type sensing layer or a film type sensing layer, the related embodiments of which are well known to those of ordinary skill in the art, and thus Unexplained. Further, in the present invention, the sensing layer 120 may also be, for example A pressure sensing layer or a thermal sensing layer or the like.

控制晶片130設置於感測層120的第二側面120B上,且透過同樣設置於感測層120的第二側面120B上的金屬走線140而與感測層120電性連接。控制晶片130可具有多個腳位(pin),用以連接金屬走線140,以接收感測層120的感測訊號,且控制晶片130內部的控制電路可對感測訊號進行處理,以得到指紋圖像資訊。 The control chip 130 is disposed on the second side 120B of the sensing layer 120 and electrically connected to the sensing layer 120 through the metal traces 140 disposed on the second side 120B of the sensing layer 120. The control chip 130 can have a plurality of pins for connecting the metal traces 140 to receive the sensing signals of the sensing layer 120, and the control circuit inside the control wafer 130 can process the sensing signals to obtain Fingerprint image information.

此外,請同時參照第1B圖,在感測層120的第二側面120B上更設置有保護層150。如第2圖所示,保護層150設置於感測層120與控制晶片130之間,其用以防止控制晶片130直接接觸感測層120而導致控制晶片130的毀損。保護層150可包含例如非導電膠(non-conductive polymer,NCP)或是其他具有黏性的絕緣材料等。在一些實施例中,保護層150可包含異方性導電膠(anisotropic conductive film;ACF),用以使控制晶片130的腳位電性連接金屬走線140,且使控制晶片130的本體和感測層120電性絕緣。 In addition, please refer to FIG. 1B simultaneously, and a protective layer 150 is further disposed on the second side surface 120B of the sensing layer 120. As shown in FIG. 2 , the protective layer 150 is disposed between the sensing layer 120 and the control wafer 130 to prevent the control wafer 130 from directly contacting the sensing layer 120 to cause damage of the control wafer 130 . The protective layer 150 may include, for example, a non-conductive polymer (NCP) or other adhesive material having a viscosity. In some embodiments, the protective layer 150 may include an anisotropic conductive film (ACF) for electrically connecting the pads of the control wafer 130 to the metal traces 140, and controlling the body and sense of the wafer 130. The measurement layer 120 is electrically insulated.

應注意的是,在第1A圖中,控制晶片130係設置於指紋感測裝置100的中央處。在實際應用上,控制晶片130可不限於位在指紋感測裝置100的中央處。舉例而言,可依據感測層120中的電極和金屬走線140的佈局,將控制晶片130可設置於指紋感測裝置100的側邊或是角落處。 It should be noted that in FIG. 1A, the control wafer 130 is disposed at the center of the fingerprint sensing device 100. In practical applications, the control wafer 130 may not be limited to being located at the center of the fingerprint sensing device 100. For example, the control wafer 130 may be disposed at a side or a corner of the fingerprint sensing device 100 according to the layout of the electrodes and the metal traces 140 in the sensing layer 120.

本發明指紋感測裝置的特點在於其同時具有高指紋辨識解析度、低製造成本和大指紋感測面積等優點。換 言之,相較於習知薄膜覆晶型(chip on film;COF)或晶片直接封裝型(chip on board;COB)指紋感測裝置,本發明的指紋感測裝置係將感測層和控制晶片在基板的厚度方向上重疊設置,可更有效利用基板上的平面空間,且藉由適當的製程將感測層設置於玻璃基板上,可提升指紋感測的解析度。另一方面,相較於習知指紋感測晶片,本發明的指紋感測裝置可降低製造成本和增加指紋感測面積。 The fingerprint sensing device of the invention is characterized in that it has the advantages of high fingerprint recognition resolution, low manufacturing cost and large fingerprint sensing area. change In other words, the fingerprint sensing device of the present invention is a sensing layer and control compared to a conventional chip on film (COF) or chip on board (COB) fingerprint sensing device. The wafers are overlapped in the thickness direction of the substrate, and the planar space on the substrate can be more effectively utilized, and the sensing layer is disposed on the glass substrate by an appropriate process, thereby improving the resolution of the fingerprint sensing. On the other hand, the fingerprint sensing device of the present invention can reduce manufacturing costs and increase fingerprint sensing area compared to conventional fingerprint sensing wafers.

請參照第2圖,其係繪示本發明又一實施例指紋感測裝置200之側視圖。在第2圖中,指紋感測裝置200包含基板210、感測層220、控制晶片230、金屬走線240和保護層250。基板210可以是玻璃基板、樹脂基板或其他類似基板等。基板210具有彼此相對的第一側面210A與第二側面210B,其中,於基板210的第一側面210A上設置有感測層220,此感測層220係用以感測使用者的手指指紋紋路,且根據其結構類型來進行對應的感測方法。感測層220可具有的結構類型和感測層120相同,故有關感測層220的說明請參照先前段落中有關感測層120的說明,於此不再贅述。 Please refer to FIG. 2, which is a side view of a fingerprint sensing device 200 according to still another embodiment of the present invention. In FIG. 2, the fingerprint sensing device 200 includes a substrate 210, a sensing layer 220, a control wafer 230, a metal trace 240, and a protective layer 250. The substrate 210 may be a glass substrate, a resin substrate, or the like. The substrate 210 has a first side surface 210A and a second side surface 210B opposite to each other. The sensing layer 220 is disposed on the first side surface 210A of the substrate 210. The sensing layer 220 is used to sense the finger fingerprint of the user. And corresponding sensing methods are performed according to their structure types. The sensing layer 220 may have the same structure type as the sensing layer 120. For the description of the sensing layer 220, please refer to the description of the sensing layer 120 in the previous paragraph, and details are not described herein again.

控制晶片230設置於基板210的第二側面210B上,且透過在基板210的厚度方向上橫跨基板210的金屬走線240與而感測層220電性連接。在本實施例中,基板210的第二側面210B可分為接觸面212和非接觸面214,其中接觸面212係供使用者的手指直接接觸,且非接觸面214係供控制晶片230設置於其上。非接觸面214較佳位於 指紋感測裝置200的側邊,如此一來,可使基板210的第二側面210B上具有較大的接觸面212,以供使用者手指直接接觸。控制晶片230可具有多個腳位,用以連接金屬走線240,以接收感測層220的感測訊號,且控制晶片230內部的控制電路可對感測訊號進行處理,以得到指紋圖像資訊。 The control wafer 230 is disposed on the second side surface 210B of the substrate 210 and electrically connected to the sensing layer 220 through the metal traces 240 that straddle the substrate 210 in the thickness direction of the substrate 210. In this embodiment, the second side surface 210B of the substrate 210 can be divided into a contact surface 212 and a non-contact surface 214, wherein the contact surface 212 is directly in contact with the user's finger, and the non-contact surface 214 is provided for the control wafer 230 to be disposed on the control wafer 230. On it. Non-contact surface 214 is preferably located The side of the fingerprint sensing device 200, such that the second side 210B of the substrate 210 has a larger contact surface 212 for direct contact by the user's fingers. The control chip 230 can have a plurality of pins for connecting the metal traces 240 to receive the sensing signals of the sensing layer 220, and the control circuit inside the control wafer 230 can process the sensing signals to obtain fingerprint images. News.

保護層250設置於基板210與控制晶片230之間,其用以防止控制晶片230直接接觸基板210而導致控制晶片230的毀損。保護層250可包含例如非導電膠或是其他具有黏性的絕緣材料等。在一些實施例中,保護層250可包含異方性導電膠,用以使控制晶片230的腳位電性連接金屬走線240,且使控制晶片230的本體和基板210電性絕緣。 The protective layer 250 is disposed between the substrate 210 and the control wafer 230 to prevent the control wafer 230 from directly contacting the substrate 210 and causing damage to the control wafer 230. The protective layer 250 may comprise, for example, a non-conductive glue or other viscous insulating material or the like. In some embodiments, the protective layer 250 may include an anisotropic conductive paste to electrically connect the pads of the control wafer 230 to the metal traces 240 and electrically insulate the body of the control wafer 230 from the substrate 210.

此外,在一些實施例中,更可在指紋感測裝置200的控制晶片230上和/或控制晶片230的側邊處設置遮蔽層(圖未繪示),以用來覆蓋控制晶片230,進而防止使用者的手指直接接觸控制晶片230。 In addition, in some embodiments, a shielding layer (not shown) may be disposed on the control wafer 230 of the fingerprint sensing device 200 and/or at the side of the control wafer 230 to cover the control wafer 230. The user's finger is prevented from directly contacting the control wafer 230.

綜上所述,本發明的指紋感測裝置係將感測層和控制晶片在基板的厚度方向上重疊設置,且藉由適當的製程將感測層設置於玻璃基板或感測層上。依據本發明實施例所完成的指紋感測裝置,可同時具有高指紋辨識解析度、低製造成本和大指紋感測面積等優點。 In summary, the fingerprint sensing device of the present invention overlaps the sensing layer and the control wafer in the thickness direction of the substrate, and the sensing layer is disposed on the glass substrate or the sensing layer by a suitable process. The fingerprint sensing device according to the embodiment of the invention can simultaneously have the advantages of high fingerprint identification resolution, low manufacturing cost, and large fingerprint sensing area.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and those skilled in the art may, without departing from the spirit of the invention. And the scope of the invention is defined by the scope of the appended claims.

100‧‧‧指紋感測裝置 100‧‧‧Fingerprint sensing device

110‧‧‧基板 110‧‧‧Substrate

120‧‧‧感測層 120‧‧‧Sensor layer

120A‧‧‧第一側面 120A‧‧‧ first side

120B‧‧‧第二側面 120B‧‧‧ second side

130‧‧‧控制晶片 130‧‧‧Control chip

140‧‧‧金屬走線 140‧‧‧Metal routing

150‧‧‧保護層 150‧‧‧protection layer

Claims (9)

一種指紋感測裝置,包含:一基板;一感測層,設置於該基板上,該感測層具有彼此相對之一第一側面與一第二側面,其中該感測層之該第一側面連接於該基板;一控制晶片,設置於該感測層之該第二側面上;以及一保護層,設置於該感測層該第二側面上,且位於該感測層與該控制晶片之間。 A fingerprint sensing device includes: a substrate; a sensing layer disposed on the substrate, the sensing layer having a first side and a second side opposite to each other, wherein the first side of the sensing layer Connected to the substrate; a control chip disposed on the second side of the sensing layer; and a protective layer disposed on the second side of the sensing layer and located in the sensing layer and the control chip between. 如請求項1所述之指紋感測裝置,更包含複數個金屬走線,該些金屬走線設置於該感測層之該第二側面上,且該些金屬走線係用以使該控制晶片電性連接於該感測層。 The fingerprint sensing device of claim 1, further comprising a plurality of metal traces disposed on the second side of the sensing layer, and the metal traces are used to enable the control The wafer is electrically connected to the sensing layer. 如請求項1所述之指紋感測裝置,其中該基板係一玻璃基板。 The fingerprint sensing device of claim 1, wherein the substrate is a glass substrate. 如請求項1所述之指紋感測裝置,其中該感測層係一玻璃式(glass type)感測層或一薄膜式(film type)感測層。 The fingerprint sensing device of claim 1, wherein the sensing layer is a glass type sensing layer or a film type sensing layer. 一種指紋感測裝置,包含:一基板,具有彼此相對之一第一側面與一第二側面;一感測層,設置於該基板之該第一側面上;一控制晶片,設置於該基板之該第二側面上;一保護層,設置於該基板之該第二側面上,且位於該基 板與該控制晶片之間;以及複數個金屬走線,該些金屬走線於該基板之厚度方向上橫跨該基板,且該些金屬走線係用以使該控制晶片電性連接於該感測層。 A fingerprint sensing device includes: a substrate having a first side and a second side opposite to each other; a sensing layer disposed on the first side of the substrate; and a control wafer disposed on the substrate a second protective layer disposed on the second side of the substrate and located at the base Between the board and the control chip; and a plurality of metal traces, the metal traces straddle the substrate in a thickness direction of the substrate, and the metal traces are used to electrically connect the control chip to the Sensing layer. 如請求項5所述之指紋感測裝置,其中該基板係一玻璃基板。 The fingerprint sensing device of claim 5, wherein the substrate is a glass substrate. 如請求項5所述之指紋感測裝置,其中該基板之該第一側面具有一接觸面與一非接觸面,該接觸面係供一手指直接接觸,且該控制晶片係設置於該非接觸面上。 The fingerprint sensing device of claim 5, wherein the first side of the substrate has a contact surface and a non-contact surface, the contact surface is in direct contact with a finger, and the control chip is disposed on the non-contact surface on. 如請求項7所述之指紋感測裝置,更包含一遮蔽層,該遮蔽層設置於該控制晶片上,且該遮蔽層覆蓋該控制晶片。 The fingerprint sensing device of claim 7, further comprising a shielding layer disposed on the control wafer, and the shielding layer covers the control wafer. 如請求項5所述之指紋感測裝置,其中該感測層係一玻璃式(glass type)感測層或一薄膜式(film type)感測層。 The fingerprint sensing device of claim 5, wherein the sensing layer is a glass type sensing layer or a film type sensing layer.
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