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TWI513051B - Led wafer and manufacturing method thereof - Google Patents

Led wafer and manufacturing method thereof Download PDF

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TWI513051B
TWI513051B TW102116428A TW102116428A TWI513051B TW I513051 B TWI513051 B TW I513051B TW 102116428 A TW102116428 A TW 102116428A TW 102116428 A TW102116428 A TW 102116428A TW I513051 B TWI513051 B TW I513051B
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Taiwan
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light
emitting diode
wafer
emitting
conversion
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TW102116428A
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TW201444120A (en
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Chen Peng Hsu
Re Ching Lin
Yao Jun Tsai
Yun Sheng Ku
Shih Yi Wen
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Ind Tech Res Inst
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Description

發光二極體晶圓及其製造方法Light-emitting diode wafer and manufacturing method thereof

本揭露係關於一種發光二極體晶圓及其製造方法。The present disclosure relates to a light emitting diode wafer and a method of fabricating the same.

這些年來,發光二極體元件具有低耗電量、低發熱量、操作壽命長、耐撞擊、體積小、反應速度快、無汞以及可發出穩定波長的色光等良好光電特性,因此常應用於家電、儀表之指示燈、光電產品之應用。隨著光電科技的進步,發光二極體元件在提升發光效率、使用壽命以及亮度等方面已有長足的進步,在不久的將來將成為未來發光元件的主流。然而,發光二極體晶片之製作係採磊晶製程,其製程相當繁複,因而在同一晶圓上所製作出之發光二極體晶片無法表現出一致的光電特性,例如亮度、波長或色溫等均可能會有所差異。因此,發光二極體晶片製造商在磊晶完成後,會將不同光學規格之發光二極體晶片區分出來,也就是俗稱的區分規格範圍(Bin)。Over the years, LED components have been used for low power consumption, low heat generation, long operating life, impact resistance, small size, fast response, no mercury, and good optical properties such as stable wavelengths. Application of household appliances, instrument indicators, and optoelectronic products. With the advancement of optoelectronic technology, LED components have made great progress in improving luminous efficiency, service life and brightness, and will become the mainstream of future light-emitting components in the near future. However, the fabrication of light-emitting diode chips is performed by an epitaxial process, and the process is quite complicated. Therefore, the light-emitting diode chips fabricated on the same wafer cannot exhibit uniform photoelectric characteristics, such as brightness, wavelength, or color temperature. Both may vary. Therefore, after the completion of the epitaxial wafer, the manufacturer of the LED chip will distinguish the LEDs of different optical specifications, which is commonly known as the range of specifications (Bin).

一般而言,為了能應用於例如顯示器之背光模組並得到顏色均勻的色塊分佈,必須將每一發光二極體晶片的色度規格限制在狹小的範圍內,如此才能確定每一發光二極體晶片的色度規格保持在一定範圍之內。雖目前已有許多採用晶圓級螢光材料之塗佈以產生白光,但對於每一發光二極體晶片而言,其色度或亮度的規格範圍仍無法精準地控制。In general, in order to be able to be applied to, for example, a backlight module of a display and to obtain a uniform color patch distribution, it is necessary to limit the chromaticity specifications of each of the light-emitting diode wafers to a narrow range, so that each light-emitting second can be determined. The color specifications of the polar body wafer are kept within a certain range. Although many coatings using wafer-level phosphor materials have been used to produce white light, the range of color or brightness specifications for each light-emitting diode chip cannot be precisely controlled.

根據本揭露之一實施例,一種發光二極體之製造方法,包含提供多個發光二極體晶片位於一基板上;獲得每一該發光二極體晶片之一發光特性;形成一光學轉換部對應於每一該發光二極體晶片,以使每一該發光二極體晶片經由所對應的該光學轉換部所發出的一光線達到一目標發光特性範圍。According to an embodiment of the present disclosure, a method of fabricating a light emitting diode includes providing a plurality of light emitting diode chips on a substrate; obtaining a light emitting characteristic of each of the light emitting diode chips; and forming an optical converting portion Corresponding to each of the light emitting diode chips, each of the light emitting diode chips reaches a target light emitting characteristic range via a corresponding light emitted by the corresponding optical converting portion.

根據本揭露之一實施例,一種發光二極體晶圓包含一基板;多個發光二極體晶片,位於該基板上,每一該發光二極體晶片具有一發光特性;以及多個光學轉換部,每一該光學轉換部依據對應於該發光特性的多個轉換參數而對應配置於每一該發光二極體晶片,以使每一該發光二極體晶片經由所對應的每一該光學轉換部所發出的一光線達到一目標發光特性範圍。According to an embodiment of the present disclosure, a light emitting diode wafer includes a substrate; a plurality of light emitting diode wafers are disposed on the substrate, each of the light emitting diode chips has a light emitting characteristic; and a plurality of optical conversions Each of the optical conversion portions is correspondingly disposed on each of the light emitting diode wafers according to a plurality of conversion parameters corresponding to the light emitting characteristics, such that each of the light emitting diode wafers passes through each of the corresponding opticals A light emitted by the conversion portion reaches a range of target illumination characteristics.

本揭露藉由轉換參數與發光特性之對應關係,使得每一個發光二極體晶片所對應的光學轉換部能適當地與該發光二極體晶片匹配,因此,雖然配置於單一基板上的多個發光二極體晶片具有不同的發光特性,例如該些發光二極體晶片的色溫分佈較廣,仍能藉由具有不同轉換參數的光學轉換部而將該些發光二極體晶片的色溫分佈集中,以得到具有高色度座標集中度的白光發光二極體晶圓。According to the relationship between the conversion parameter and the illuminating characteristic, the optical conversion portion corresponding to each of the LED chips can be properly matched with the illuminating diode wafer, and thus, although disposed on a single substrate The light emitting diode chip has different light emitting characteristics. For example, the color temperature distribution of the light emitting diode chips is wide, and the color temperature distribution of the light emitting diode chips can be concentrated by the optical converting portions having different conversion parameters. To obtain a white light emitting diode wafer with high chroma coordinate concentration.

以上之關於本揭露內容之說明及以下之實施方式之說明係用以示範與解釋本揭露之精神與原理,並且提供本揭露之專利申請範圍更進一步之解釋。The above description of the disclosure and the following embodiments are intended to illustrate and explain the spirit and principles of the disclosure, and to provide further explanation of the scope of the disclosure.

10a,10b,10c,10e,10f,10g,10h‧‧‧發光二極體晶片10a, 10b, 10c, 10e, 10f, 10g, 10h‧‧‧Light Emitter Wafer

101,102,103,104,105,106‧‧‧封裝後的發光二極體101,102,103,104,105,106‧‧‧Packed LEDs

107,108,109,110‧‧‧封裝後的發光二極體107,108,109,110‧‧‧Packed LEDs

11a,11b‧‧‧焊點11a, 11b‧‧‧ solder joints

20‧‧‧基板20‧‧‧Substrate

30a,30b,30c,30e‧‧‧光學轉換部30a, 30b, 30c, 30e‧‧‧ Optical Conversion Department

32a,32b,32c,32d,32e,32f‧‧‧擋牆32a, 32b, 32c, 32d, 32e, 32f‧‧ ‧ retaining wall

34a,34b,34c,34d,34e,34f‧‧‧螢光材料部34a, 34b, 34c, 34d, 34e, 34f‧‧‧Fluorescent Materials Division

340a,340b,340c,340d‧‧‧螢光材料340a, 340b, 340c, 340d‧‧‧ fluorescent materials

340e,340f,340g,340h,340i‧‧‧螢光材料340e, 340f, 340g, 340h, 340i‧‧‧ fluorescent materials

35a,35b,35c,35d,35e,35f‧‧‧平坦化層35a, 35b, 35c, 35d, 35e, 35f‧ ‧ flattening layer

35g,35h,35i,35j‧‧‧平坦化層35g, 35h, 35i, 35j‧‧ ‧ flattening layer

36a,36b,36c,36d,36e,36f‧‧‧凹槽36a, 36b, 36c, 36d, 36e, 36f‧‧‧ grooves

36g,36h,36i,36j‧‧‧凹槽36g, 36h, 36i, 36j‧‧‧ grooves

40a,40b‧‧‧保護部40a, 40b‧‧‧Protection Department

50a,50b‧‧‧切割線50a, 50b‧‧‧ cutting line

第1圖係為根據本揭露之發光二極體之製造方法之流程示意圖。1 is a schematic flow chart of a method of manufacturing a light-emitting diode according to the present disclosure.

第2圖係為根據本揭露之發光二極體晶圓第一實施例之部分結構示意圖。2 is a partial structural view of a first embodiment of a light emitting diode wafer according to the present disclosure.

第3A圖係為根據本揭露之發光二極體晶圓第二實施例之部分結構示意圖。FIG. 3A is a partial structural diagram of a second embodiment of a light emitting diode wafer according to the present disclosure.

第3B圖係為根據本揭露之發光二極體晶圓第三實施例之部分結構示意圖。3B is a partial structural diagram of a third embodiment of a light emitting diode wafer according to the present disclosure.

第4A圖係為根據本揭露之發光二極體晶圓第四實施例之部分結構示意圖。4A is a partial structural view of a fourth embodiment of a light-emitting diode wafer according to the present disclosure.

第4B圖係為根據本揭露之發光二極體晶圓第五實施例之部分結構示意圖。FIG. 4B is a partial structural diagram of a fifth embodiment of a light emitting diode wafer according to the present disclosure.

第5圖係為根據本揭露之發光二極體晶圓第六實施例之部分結構示意圖。Figure 5 is a partial structural view of a sixth embodiment of a light-emitting diode wafer according to the present disclosure.

第6圖係為根據本揭露之發光二極體晶圓第七實施例之部分結構示意圖。Figure 6 is a partial structural view of a seventh embodiment of a light-emitting diode wafer according to the present disclosure.

以下在實施方式中詳細敘述本揭露之詳細特徵以及優點,其內容足以使任何熟習相關技藝者了解本揭露之技術內容並據以實施,且根據本說明書所揭露之內容、申請專利範圍及圖式,任何熟習相關技藝者可輕易地理解本揭露相關之目的及優點。以下之實施例係進一步詳細說明本揭露之觀點,但非以任何觀點限制本揭露之範疇。The detailed features and advantages of the present disclosure are described in detail in the following detailed description of the embodiments of the present disclosure, which are The objects and advantages associated with the present disclosure can be readily understood by those skilled in the art. The following examples are intended to further illustrate the present disclosure, but are not intended to limit the scope of the disclosure.

請同時參照「第1圖」及「第2圖」,「第1圖」為根據 本揭露之發光二極體之製造方法之流程示意圖。「第2圖」為根據本揭露之發光二極體晶圓第一實施例之結構示意圖。Please also refer to "Figure 1" and "Figure 2", "Figure 1" is based on A schematic flow chart of a method for manufacturing a light-emitting diode according to the present disclosure. FIG. 2 is a schematic structural view of a first embodiment of a light-emitting diode wafer according to the present disclosure.

首先,發光二極體之製造方法包含:S500:提供多個發光二極體晶片10a,10b位於基板20上;S510:獲得每一發光二極體晶片10a,10b之發光特性;以及S520:形成一光學轉換部30a,30b對應於每一發光二極體晶片10a,10b,以使每一發光二極體晶片10a,10b經由所對應的光學轉換部30a,30b所發出的一光線達到一目標發光特性範圍。First, the manufacturing method of the light emitting diode includes: S500: providing a plurality of light emitting diode wafers 10a, 10b on the substrate 20; S510: obtaining light emitting characteristics of each of the light emitting diode wafers 10a, 10b; and S520: forming An optical conversion portion 30a, 30b corresponds to each of the light-emitting diode wafers 10a, 10b such that each of the light-emitting diode wafers 10a, 10b reaches a target via a light emitted from the corresponding optical conversion portions 30a, 30b. The range of luminescence properties.

其中,S510獲得發光特性之步驟可以包含:S512:電性連接多個發光二極體晶片10a,10b至基板20;S514:驅動多個發光二極體晶片10a,10b;以及S516:量測每一發光二極體晶片10a,10b以獲得發光特性。The step of obtaining the illuminating characteristics of the S510 may include: S512: electrically connecting the plurality of illuminating diode chips 10a, 10b to the substrate 20; S514: driving the plurality of illuminating diode chips 10a, 10b; and S516: measuring each A light-emitting diode wafer 10a, 10b obtains light-emitting characteristics.

在S510獲得發光特性或在S500提供多個發光二極體晶片10a,10b於基板20上之前,為了要使得配置在基板20之每一發光二極體晶片10a,10b具有較接近的發光特性,可以考慮在將這些發光二極體晶片10a,10b配置於基板20前,先對所有發光二極體晶片10a,10b進行篩選,此篩選之條件為發光特性相接近的,例如但不限於具有接近的發光強度、主波長、峰值波長等。此處之發光特性指的是發光二極體晶片10a,10b本身(晶片本身)所發出之光線的特性。Before the light-emitting characteristics are obtained in S510 or before the plurality of light-emitting diode wafers 10a, 10b are provided on the substrate 20 in S500, in order to make each of the light-emitting diode wafers 10a, 10b disposed on the substrate 20 have relatively close light-emitting characteristics, It is conceivable to screen all of the light-emitting diode wafers 10a, 10b before arranging the light-emitting diode wafers 10a, 10b on the substrate 20. The screening conditions are such that the light-emitting characteristics are close, such as but not limited to Luminous intensity, dominant wavelength, peak wavelength, and the like. The luminescent property here refers to the characteristics of the light emitted by the light-emitting diode wafers 10a, 10b itself (the wafer itself).

其後,S500提供多個發光二極體晶片10a,10b等位於基板20之方式可以是採用一維陣列、二維陣列、矩陣形式、同心圓形式、放射圓形式、渦漩形式等方式配置於基板20上。基板20亦可稱為封裝基板或載 板(submount)。Thereafter, the S500 provides a plurality of LED chips 10a, 10b, etc., which are disposed on the substrate 20 in a one-dimensional array, a two-dimensional array, a matrix form, a concentric circular shape, a radial circular shape, a swirling form, or the like. On the substrate 20. The substrate 20 may also be referred to as a package substrate or Board (submount).

S512之電性連接方式,可視發光二極體晶片10a,10b之種類而定,以「第2圖」之發光二極體晶片10a,10b為例,該發光二極體晶片10a,10b為覆晶式(flip-chip)發光二極體晶片,因此,其電性連接方式則採用覆晶後利用金球或共晶之焊點11a,11b的方式與基板20形成電性連接,但並不以此為限,若發光二極體晶片10a,10b並非覆晶式發光二極體晶片,則可以採用打線或半導體導線連接的方式將發光二極體晶片10a,10b與基板20形成電性連接(圖中未示)。The electrical connection of the S512 is determined by the type of the light-emitting diode chips 10a, 10b. The light-emitting diode chips 10a, 10b of the "second drawing" are taken as an example, and the light-emitting diode chips 10a, 10b are covered. A flip-chip light-emitting diode wafer is used. Therefore, the electrical connection method is electrically connected to the substrate 20 by means of gold balls or eutectic solder joints 11a, 11b after flip chip bonding, but it is not To this end, if the LEDs 10a, 10b are not flip-chip diodes, the LEDs 10a, 10b can be electrically connected to the substrate 20 by wire bonding or semiconductor wire bonding. (not shown).

在S514驅動多個發光二極體晶片10a,10b時,可採用定電流方式或任何一種方式驅動這些發光二極體晶片10a,10b,而為了要使得在同一基板20上之發光二極體晶片10a,10b是在相同的驅動條件下被量測的,建議採用一致的驅動方式,例如採用相同的電流值或相同的調變方式驅動。When the plurality of light-emitting diode wafers 10a, 10b are driven in S514, the light-emitting diode wafers 10a, 10b may be driven by a constant current method or in any manner, in order to enable the light-emitting diode wafers on the same substrate 20. 10a, 10b are measured under the same driving conditions. It is recommended to use a consistent driving method, for example, using the same current value or the same modulation method.

S516量測每一發光二極體晶片10a,10b以獲得發光特性,此處之發光特性可以是但不限於發光強度、主波長、峰值波長、或其組合。此處所述之「其組合」可以是前述各種特性(在本例中為三者)中的二者的組合、三者的組合或全部,以下所述之「其組合」亦為相同涵意,而在本例中,「其組合」例如但不限於量測發光強度及主波長、量測主波長與峰值波長、量測發光強度與峰值波長、或量測發光強度、主波長與峰值波長。S516 measures each of the light-emitting diode wafers 10a, 10b to obtain light-emitting characteristics, which may be, but are not limited to, light-emitting intensity, dominant wavelength, peak wavelength, or a combination thereof. The "combination" of the above-mentioned various characteristics (in this example, three) may be a combination of the two, or a combination of the three, and the "combination" described below also has the same meaning. In this example, the "combination" is, for example but not limited to, measuring the luminous intensity and dominant wavelength, measuring the dominant wavelength and peak wavelength, measuring the luminous intensity and peak wavelength, or measuring the luminous intensity, the dominant wavelength and the peak wavelength. .

接著,S520形成光學轉換部30a,30b對應於每一發光二極體晶片10a,10b之步驟可以包含:S522:依據該發光特性及特性轉換查找表以獲得多個轉換 參數;S524:依據多個轉換參數於每一發光二極體晶片10a,10b形成至少一容納體,容納體具有至少一凹槽,且凹槽對應每一發光二極體晶片10a,10b而設置;以及S526:配置至少一螢光材料部34a,34b於凹槽以形成光學轉換部30a,30b。Next, the step S520 forming the optical conversion portions 30a, 30b corresponding to each of the LED substrates 10a, 10b may include: S522: converting the lookup table according to the illumination characteristics and characteristics to obtain a plurality of conversions a parameter; S524: forming at least one receiving body for each of the LED chips 10a, 10b according to a plurality of conversion parameters, the receiving body having at least one groove, and the groove is disposed corresponding to each of the LED chips 10a, 10b And S526: arranging at least one phosphor material portion 34a, 34b in the groove to form the optical conversion portions 30a, 30b.

在S522中的特性轉換查找表當中具有發光特性與轉換參數的對應關係,其中轉換參數亦可稱為塗佈參數或轉換部參數,轉換參數可以是但不限於光學轉換部30a,30b中螢光材料(螢光粉)340a,340b的濃度、轉換部容積、螢光粉材質、螢光粉層數、或其組合。如何製作特性轉換查找表及轉換參數的涵意,容後詳述。The characteristic conversion lookup table in S522 has a correspondence relationship between the light emission characteristics and the conversion parameters, wherein the conversion parameters may also be referred to as a coating parameter or a conversion portion parameter, and the conversion parameters may be, but are not limited to, the fluorescence in the optical conversion portions 30a, 30b. The concentration of the materials (fluorescent powder) 340a, 340b, the volume of the conversion portion, the material of the phosphor powder, the number of layers of the phosphor powder, or a combination thereof. How to make the feature conversion lookup table and the meaning of the conversion parameters, detailed later.

在經由S522的查找後,得以取得對應每一發光二極體晶片10a,10b的多個轉換參數,這些轉換參數是以一對一的方式與發光二極體晶片10a,10b對應的。After the search via S522, a plurality of conversion parameters corresponding to each of the light-emitting diode wafers 10a, 10b are obtained, which are corresponding to the light-emitting diode wafers 10a, 10b in a one-to-one manner.

接著,S524即依據這些轉換參數以形成至少一容納體,容納體則可具有至少一凹槽。此容納體例如可為一擋牆結構,且至少一容納體及至少一螢光材料部34a,34b可形成光學轉換部30a,30b。此外,擋牆結構可包含擋牆32a,32b。在「第2圖」的實施例中,擋牆32a,32b係配置於基板20上並個別環繞每一發光二極體晶片10a,10b,但並不以此為限,在其他實施例中,如「第3A圖」所示,「第3A圖」為根據本揭露之發光二極體晶圓第二實施例之部分結構示意圖。光學轉換部30c可以包含多個擋牆32c,32d與多個螢光材料部34c,34d,且擋牆32c,32d配置於發光二極體晶片 10c上方(在「第3A圖」中未繪製保護部40a,40b)。擋牆32a,32b,32c,32d之截面積形狀(即從「第2圖」之上方俯視之形狀)可以是但不限於正方形、矩形、圓形、任意形狀或配合發光二極體晶片10a,10b,10c頂面輪廓之形狀。Next, S524 is based on the conversion parameters to form at least one receiving body, and the receiving body may have at least one groove. The receiving body can be, for example, a retaining wall structure, and the at least one receiving body and the at least one phosphor material portion 34a, 34b can form the optical conversion portions 30a, 30b. Additionally, the retaining wall structure can include retaining walls 32a, 32b. In the embodiment of FIG. 2, the retaining walls 32a, 32b are disposed on the substrate 20 and individually surround each of the LED wafers 10a, 10b, but are not limited thereto. In other embodiments, As shown in FIG. 3A, FIG. 3A is a partial structural view of a second embodiment of a light-emitting diode wafer according to the present disclosure. The optical conversion portion 30c may include a plurality of retaining walls 32c, 32d and a plurality of fluorescent material portions 34c, 34d, and the retaining walls 32c, 32d are disposed on the light emitting diode chip Above 10c (protection portions 40a, 40b are not drawn in "Fig. 3A"). The shape of the cross-sectional area of the retaining walls 32a, 32b, 32c, and 32d (i.e., the shape viewed from above the "second drawing") may be, but not limited to, a square, a rectangle, a circle, an arbitrary shape, or a mating light-emitting diode wafer 10a. 10b, 10c The shape of the top contour.

接著,S526配置至少一螢光材料部34a,34b,34c,34d於凹槽,以形成光學轉換部30a,30b,30c。其中螢光材料部34a,34b,34c,34d具有多個螢光材料340a,340b,340c,340d,此螢光材料340a,340b,340c,340d可被發光二極體晶片10a,10b,10c所發出的光線所激發而產生另一波長,例如,當發光二極體晶片10a,10b,10c所發出的光線為藍光時,螢光材料340a,340b,340c,340d可以是能被藍光所激發的黃光螢光粉,因此,黃光螢光粉被激發後發出的黃光會與藍光混合成白光,使得封裝後的發光二極體101,102,103,104整體可以發出白光。在「第3A圖」實施例的螢光材料部34c,34d具有多個螢光材料340c,340d,螢光材料340c,340d可以包含相同或相異的螢光粉,以能夠被激發而產生相異波長之光線。Next, S526 is provided with at least one phosphor material portion 34a, 34b, 34c, 34d in the recess to form the optical conversion portions 30a, 30b, 30c. The phosphor material portions 34a, 34b, 34c, 34d have a plurality of phosphor materials 340a, 340b, 340c, 340d, which can be illuminated by the LED wafers 10a, 10b, 10c. The emitted light is excited to generate another wavelength. For example, when the light emitted by the LED wafers 10a, 10b, 10c is blue light, the fluorescent materials 340a, 340b, 340c, 340d may be excited by blue light. The yellow fluorescent powder, therefore, the yellow light emitted by the yellow fluorescent powder is mixed with the blue light to form white light, so that the encapsulated light emitting diodes 101, 102, 103, 104 can emit white light as a whole. The phosphor material portions 34c, 34d of the "Fig. 3A" embodiment have a plurality of phosphor materials 340c, 340d, and the phosphor materials 340c, 340d may contain the same or different phosphor powders to be excited to generate phases. Light of different wavelengths.

螢光材料340a,340b,340c,340d可為熱固化螢光材料或液態螢光材料。此螢光材料之選用,考量整體發光二極體使用環境,可考慮採用沸點高於攝氏100度之高沸點溶劑。液態螢光材料可以是但不限於環狀分子非共軛溶劑(cyclic molecule non-conjugated solvent)、環狀分子部分共軛溶劑(cyclic molecule conjugated solvent)、或環狀分子全共軛溶劑(cyclic molecule all-conjugated solvent)。熱固化(thermal cured)螢光材料可以是但不限於混有螢光粉之矽膠(silicone)或混有螢光粉之環氧樹脂(epoxy)。關於螢光材料部34a,34b,34c,34d的製造方法容後詳述。The phosphor material 340a, 340b, 340c, 340d can be a thermally curable phosphor material or a liquid phosphor material. The selection of this fluorescent material, considering the environment of the overall light-emitting diode, can be considered to use a high boiling point solvent with a boiling point higher than 100 degrees Celsius. The liquid fluorescent material may be, but not limited to, a cyclic molecule non-conjugated solvent, a cyclic molecule conjugated solvent, or a cyclic molecule fully conjugated solvent (cyclic molecule). All-conjugated solvent). The thermally cured fluorescent material may be, but not limited to, a silicone mixed with a fluorescent powder or an epoxy mixed with a fluorescent powder. The manufacturing method of the fluorescent material portions 34a, 34b, 34c, and 34d will be described in detail later.

此外,前述「第3A圖」之螢光材料部34c,34d的數量是以 三個為例,但不以此為限,此螢光材料部34c,34d的數量例如可為四個,如「第3B圖」所示。「第3B圖」為根據本揭露之發光二極體晶圓第三實施例之部分結構示意圖,在本實施例中,其多個擋牆32c,32d與多個螢光材料部34c,34d的相關配置以及工作特性,可參考如第二實施例所述,亦可得到具有高色度座標集中度的單一發光二極體晶圓。另外,「第3A圖」以及「第3B圖」之發光二極體晶圓所使用的基板20例如可為同一片基板20,但不以此為限。換句話說,可藉由不同數量的螢光材料部34c,34d的設計,進而使得單一發光二極體晶圓具有高色度座標集中度。Further, the number of the fluorescent material portions 34c, 34d in the above "A-3A" is For example, the number of the fluorescent material portions 34c, 34d may be four, as shown in "Fig. 3B". 3B is a partial structural view of a third embodiment of a light-emitting diode wafer according to the present disclosure. In this embodiment, a plurality of retaining walls 32c, 32d and a plurality of phosphor portions 34c, 34d are provided. For related configurations and operational characteristics, reference may be made to a single light-emitting diode wafer having high chroma coordinate concentration as described in the second embodiment. In addition, the substrate 20 used for the light-emitting diode wafers of "3A" and "3B" may be, for example, the same substrate 20, but is not limited thereto. In other words, a single luminescent diode wafer can have a high chromaticity coordinate concentration by the design of different numbers of phosphor material portions 34c, 34d.

「第2圖」之實施例的轉換參數是以轉換部容積為例,其中每一轉換部容積包含一個凹槽容積,此凹槽容積即為前述擋牆32a,32b之內部容納空間(或稱容納區),凹槽容積具有一凹槽深度(即擋牆32a,32b容納空間的深度)及一凹槽截面積(即擋牆32a,32b容納空間在水平面上的面積)。此外,在部份實施例中,每一轉換部容積亦可包含多個凹槽容積,這些凹槽容積係可為相鄰配置或重疊配置。每個凹槽容積可以包含相同或相異的螢光粉。The conversion parameter of the embodiment of "Fig. 2" is exemplified by the volume of the conversion portion, wherein each of the conversion portion volumes includes a groove volume, which is the internal accommodation space of the aforementioned retaining walls 32a, 32b (or The accommodating area) has a groove depth (i.e., a depth at which the retaining walls 32a, 32b accommodate the space) and a groove sectional area (i.e., an area in which the retaining walls 32a, 32b accommodate the space on the horizontal surface). Moreover, in some embodiments, each of the conversion volume may also include a plurality of groove volumes, which may be in an adjacent configuration or an overlapping configuration. Each groove volume can contain the same or different phosphor powder.

另外,若以「第2圖」之實施例而言,光學轉換部30a,30b容積即為凹槽容積減掉對應的發光二極體晶片10a,10b所佔的空間的體積,也可以說,光學轉換部30a,30b容積等於所對應的螢光材料部34a,34b的體積(即凹槽係以一對一方式對應光學轉換部30a,30b容積)。若以「第3A圖」之實施例而言,光學轉換部30c包含多個凹槽(即各擋牆內的容納空間),每個凹槽內都配置有螢光材料部34c,34d(即凹槽係以一對一方式對應光學轉換部30c容積),光學轉換部30c容積即等於多個對應的螢光材料部34c, 34d體積之和。Further, in the embodiment of the "second drawing", the volume of the optical conversion portions 30a, 30b is the volume of the groove minus the volume occupied by the corresponding light-emitting diode wafers 10a, 10b, and it can be said that The volume of the optical conversion portions 30a, 30b is equal to the volume of the corresponding phosphor material portions 34a, 34b (i.e., the grooves correspond to the volume of the optical conversion portions 30a, 30b in a one-to-one manner). In the embodiment of FIG. 3A, the optical conversion portion 30c includes a plurality of grooves (ie, accommodation spaces in the respective retaining walls), and each of the grooves is provided with a fluorescent material portion 34c, 34d (ie, The groove corresponds to the volume of the optical conversion portion 30c in a one-to-one manner, and the volume of the optical conversion portion 30c is equal to the plurality of corresponding fluorescent material portions 34c, The sum of the volume of 34d.

因此,若螢光材料部34a,34b,34c,34d內的螢光粉濃度相同且螢光粉種類相同時,只要將凹槽深度與凹槽截面積(即不同螢光材料部34a,34b,34c,34d體積)適當地依據發光二極體晶片10a,10b,10c之發光特性而配置,即可使得具有相異發光特性的發光二極體晶片10a,10b,10c在封裝後的整體發光光譜或色溫集中,例如但不限於落在四個麥克亞當橢圓(Mac Adam Ellipse)內。此外,如同前述,轉換參數可以採用螢光粉濃度、或螢光粉材質,在適當地對應發光二極體晶片10a,10b,10c之發光特性而設計螢光粉濃度或螢光粉材質,亦可得到高色度座標(chromaticity coordinates)集中度的白光發光二極體晶圓。其中,高色度座標集中度用以指示包括至少一目標發光特性範圍,在其他實施例中,高色度座標集中度亦可以是具有2個或2個以上的目標發光特性範圍。亦即,此白光發光二極體晶圓上可同時具有多個目標發光特性範圍,且這些目標發光特性範圍彼此可以不相同,但不以此為限,以達到高色度座標集中度。Therefore, if the phosphor powder concentrations in the phosphor material portions 34a, 34b, 34c, 34d are the same and the phosphor powder types are the same, the groove depth and the groove cross-sectional area (i.e., different phosphor material portions 34a, 34b, The 34c, 34d volume is suitably configured according to the light-emitting characteristics of the LED wafers 10a, 10b, 10c, so that the overall light-emitting spectrum of the LED wafers 10a, 10b, 10c having different light-emitting characteristics after packaging is obtained. Or color temperature concentration, such as but not limited to falling within four Mac Adam Ellipse. In addition, as described above, the conversion parameter may be a phosphor powder concentration or a phosphor powder material, and the phosphor powder concentration or the phosphor powder material is designed to appropriately correspond to the light-emitting characteristics of the LED chips 10a, 10b, and 10c. A white light emitting diode wafer with high chromaticity coordinates concentration can be obtained. The high chroma coordinate concentration is used to indicate that at least one target illumination characteristic range is included. In other embodiments, the high chroma coordinate concentration may also have two or more target illumination characteristic ranges. That is, the white light emitting diode wafer may have a plurality of target light emitting characteristic ranges at the same time, and the target light emitting characteristic ranges may be different from each other, but not limited thereto, to achieve high chroma coordinate concentration.

至於前述螢光粉層數,請參閱「第4A圖」,其為根據本揭露之白光發光二極體晶圓第四實施例之部分結構示意圖。圖中可以看出發光二極體晶片10e上配置有二層的擋牆32e,32f,擋牆32e,32f內配置有螢光材料部34e,34f,而螢光材料340e,340f可以是相同或相異的螢光粉,在此實施例中,螢光粉層數即為二層,但並不以此為限,螢光粉層數亦可三層、四層或更多層,可視發光特性及色度座標需求而定。此外,本實施例中,若採用多層疊置結構時,螢光粉發射的光譜波長從基板20往發光二極體10e方向可依序由較長的波長逐漸至較短之波長,例如但不限於紅色、橘 色、黃色、至綠色,如此一來,可以減少螢光粉被激發的光線被相互吸收的現象。For the number of the phosphor layers described above, please refer to FIG. 4A, which is a partial structural diagram of a fourth embodiment of a white light emitting diode wafer according to the present disclosure. It can be seen that the light-emitting diode wafer 10e is provided with two layers of retaining walls 32e, 32f. The retaining walls 32e, 32f are provided with fluorescent material portions 34e, 34f, and the fluorescent materials 340e, 340f may be the same or phase. In this embodiment, the number of layers of the phosphor powder is two layers, but not limited thereto, and the number of layers of the phosphor powder may be three, four or more layers, and visible light-emitting characteristics. And chromaticity coordinates depend on the needs. In addition, in the embodiment, when the multi-layer structure is adopted, the spectral wavelength of the phosphor powder emission may gradually change from the substrate 20 to the light-emitting diode 10e to a shorter wavelength, for example, but not Limited to red, orange Color, yellow, and green, in this way, the phenomenon that the light excited by the phosphor powder is absorbed by each other can be reduced.

此外,舉例來說,可調整前述「第4A圖」之二層擋牆32e,32f的高度,如「第4B圖」所示。「第4B圖」為根據本揭露之發光二極體晶圓第五實施例之部分結構示意圖,在本實施例中,其二層擋牆32e,32f的高度小於第四實施例之二層擋牆32e,32f的高度,但其相關配置以及工作特性,可參考如第四實施例所述,亦可得到具有高色度座標集中度的單一發光二極體晶圓。另外,「第4A圖」以及「第4B圖」之發光二極體晶圓所使用的基板20例如可為同一片基板20,但不以此為限。換句話說,可藉由不同高度的擋牆32e,32f(即所形成之凹槽的不同深度)的設計,進而使得單一發光二極體晶圓具有高色度座標集中度。Further, for example, the height of the two-layer retaining walls 32e, 32f of the aforementioned "Ath 4A" can be adjusted as shown in "FIG. 4B". FIG. 4B is a partial structural view of the fifth embodiment of the light-emitting diode wafer according to the present disclosure. In this embodiment, the height of the two-layer retaining wall 32e, 32f is smaller than that of the fourth embodiment. The height of the walls 32e, 32f, but its associated configuration and operational characteristics, can be referred to as described in the fourth embodiment, and a single light-emitting diode wafer having a high degree of chromaticity coordinate concentration can also be obtained. Further, the substrate 20 used in the light-emitting diode wafers of the "4A" and "4B" drawings may be, for example, the same substrate 20, but is not limited thereto. In other words, the single-emitting diode wafer can have a high degree of chromaticity coordinate concentration by the design of the different heights of the retaining walls 32e, 32f (i.e., the different depths of the formed grooves).

前述螢光粉摻雜濃度(螢光粉濃度)百分比可以是但不限於10wt%到80wt%。凹槽深度可以是但不限於5μm(微米)至1000μm。The aforementioned phosphor powder doping concentration (fluorescent powder concentration) percentage may be, but not limited to, 10% by weight to 80% by weight. The groove depth may be, but not limited to, 5 μm (micrometers) to 1000 μm.

從前述各實施例可知,S524所形成之容納體例如可為一擋牆結構。其中,擋牆32a,32b,32c,32d,32e,32f可以是「第2圖」中的每一擋牆32a,32b環繞對應的一個發光二極體晶片10a,10b,且每一擋牆32a,32b具有容納區;在「第3A圖」與「第3B圖」中,每一擋牆32c,32d係配置於對應的一個發光二極體晶片10c上,每一擋牆32c,32d具有容納區,且在同一發光二極體晶片10c上之擋牆32c,32d為相鄰配置;在「第4A圖」與「第4B圖」中,至少二個擋牆32e,32f採垂直疊置方式配置於對應的一個發光二極體晶片10e上,且每一擋牆32e,32f具有該容納區,此垂直疊置之軸向係指在圖面上由下而上的方向,也就是基板20的法線方向。擋牆32a, 32b,32c,32d,32e,32f之材質可以是透明的材質或是僅可讓發光二極體晶片10a,10b,10c,10e所發出的光線及螢光材料所發出的光線通過之材質。It can be seen from the foregoing embodiments that the receiving body formed by S524 can be, for example, a retaining wall structure. The retaining walls 32a, 32b, 32c, 32d, 32e, 32f may be each retaining wall 32a in the "second drawing", 32b surrounding a corresponding one of the light emitting diode chips 10a, 10b, and each retaining wall 32a 32b has a receiving area; in "3A" and "3B", each of the retaining walls 32c, 32d is disposed on a corresponding one of the light emitting diode chips 10c, and each of the retaining walls 32c, 32d has a housing The retaining walls 32c, 32d on the same LED array 10c are adjacently arranged; in "4A" and "4B", at least two retaining walls 32e, 32f are vertically stacked. It is disposed on a corresponding one of the LED chips 10e, and each of the retaining walls 32e, 32f has the receiving area, and the vertically stacked axial direction refers to a bottom-up direction on the drawing, that is, the substrate 20 The normal direction. Retaining wall 32a, The material of 32b, 32c, 32d, 32e, and 32f may be a transparent material or a material that allows only light emitted from the LED chips 10a, 10b, 10c, and 10e and light emitted from the fluorescent material to pass therethrough.

形成擋牆32a,32b,32c,32d,32e,32f之方法可以是但不限於直接置放管狀擋牆於對應的發光二極體晶片10a,10b,10c,10e,或是在發光二極體晶片10a,10b,10c,10e上以半導體製程形成平坦化層,之後再以蝕刻、機械加工或雷射加工以形成擋牆32a,32b,32c,32d,32e,32f(或稱蝕刻出對應的凹槽)。The method of forming the retaining walls 32a, 32b, 32c, 32d, 32e, 32f may be, but not limited to, directly placing the tubular retaining wall on the corresponding LED wafers 10a, 10b, 10c, 10e, or in the light emitting diode A planarization layer is formed on the wafers 10a, 10b, 10c, 10e by a semiconductor process, and then etched, machined or laser processed to form the barrier walls 32a, 32b, 32c, 32d, 32e, 32f (or etched correspondingly) Groove).

進一步來說,前述之以半導體製程形成平坦化層,再蝕刻出對應的凹槽之方式,可參閱如「第5圖」所示。「第5圖」為根據本揭露之白光發光二極體晶圓第六實施例之部分結構示意圖。首先,先於載有發光二極體晶片10f,10g的基板20上,藉由半導體製程方式,形成一平坦化層35a,35b,35c,35d,35e,35f於基板20與發光二極體晶片10f,10g的上方。接著,藉由半導體製程之乾式蝕刻(dry etching)或是濕式蝕刻(wet etching)的方式,以形成對應的凹槽36a,36b,36c,36d,36e,36f。接著,將螢光材料340g,340h塗佈於凹槽36a,36b,36c,36d,36e,36f與平坦化層35a,35b,35c,35d,35e,35f之上。最後,藉由半導體製程之研磨(polishing)的方式,以將平坦化層35a,35b,35c,35d,35e,35f上的螢光材料340g,340h移除,只留下位於凹槽36a,36b,36c,36d,36e,36f中的螢光材料340g,340h。如此一來,亦可得到高色度座標集中度的發光二極體晶圓。其中,對應的凹槽36a,36b,36c,36d,36e,36f可視需求而適當地調整凹槽36a,36b,36c,36d,36e,36f的深度。在本實施例中,凹槽36a,36b,36c的深度例如可大於凹槽36d,36e,36f的深度,亦可達到高色度座標集中度的單一發光二極體晶圓。換句話說,可藉由不同深度的凹 槽36a,36b,36c,36d,36e,36f的設計,進而使得單一發光二極體晶圓具有高色度座標集中度。Further, the above-mentioned method of forming a planarization layer by a semiconductor process and etching a corresponding groove can be referred to as shown in FIG. FIG. 5 is a partial structural view of a sixth embodiment of a white light emitting diode wafer according to the present disclosure. First, a planarization layer 35a, 35b, 35c, 35d, 35e, 35f is formed on the substrate 20 and the LED substrate by a semiconductor process on the substrate 20 carrying the LED chips 10f, 10g. 10f, above 10g. Then, dry etching or wet etching of the semiconductor process is performed to form corresponding recesses 36a, 36b, 36c, 36d, 36e, 36f. Next, phosphor materials 340g, 340h are applied over the grooves 36a, 36b, 36c, 36d, 36e, 36f and the planarization layers 35a, 35b, 35c, 35d, 35e, 35f. Finally, the phosphor material 340g, 340h on the planarization layers 35a, 35b, 35c, 35d, 35e, 35f is removed by polishing in a semiconductor process, leaving only the grooves 36a, 36b Fluorescent material 340g, 340h in , 36c, 36d, 36e, 36f. In this way, a light-emitting diode wafer with high chroma coordinate concentration can also be obtained. Among them, the corresponding grooves 36a, 36b, 36c, 36d, 36e, 36f can appropriately adjust the depth of the grooves 36a, 36b, 36c, 36d, 36e, 36f as needed. In this embodiment, the depth of the grooves 36a, 36b, 36c can be, for example, greater than the depth of the grooves 36d, 36e, 36f, and can also achieve a single luminescent diode wafer with high chromaticity coordinate concentration. In other words, it can be concave by different depths. The design of the grooves 36a, 36b, 36c, 36d, 36e, 36f, in turn, enables a single luminescent diode wafer to have high chromaticity coordinate concentration.

另外,前述「第5圖」之凹槽36a,36b,36c,36d,36e,36f的數量是以三個為例,但不以此為限,此凹槽36a,36b,36c,36d,36e,36f的數量例如可為四個。在其他實施例中,凹槽36a,36b,36c,36d,36e,36f的數量例如可以是一個或多個。「第6圖」為根據本揭露之發光二極體晶圓第七實施例之部分結構示意圖,在本實施例中,其平坦化層35a,35b,35c,35g,35h,35i,35j、發光二極體10f,10h、凹槽36a,36b,36c,36g,36h,36i,36j、及螢光材料340g,340i的相關配置以及工作特性,可參考如第六實施例所述,亦可得到具有高色度座標集中度的單一發光二極體晶圓。換句話說,可藉由不同數量的凹槽36a,36b,36c,36g,36h,36i,36j的設計,進而使得單一發光二極體晶圓具有高色度座標集中度。In addition, the number of the grooves 36a, 36b, 36c, 36d, 36e, 36f of the above "fifth figure" is exemplified by three, but not limited thereto, the grooves 36a, 36b, 36c, 36d, 36e The number of 36f may be, for example, four. In other embodiments, the number of grooves 36a, 36b, 36c, 36d, 36e, 36f may be, for example, one or more. FIG. 6 is a partial schematic structural view of a seventh embodiment of a light-emitting diode wafer according to the present disclosure. In this embodiment, the planarization layers 35a, 35b, 35c, 35g, 35h, 35i, 35j, and the light-emitting layer are illuminated. Related configurations and operational characteristics of the diodes 10f, 10h, the recesses 36a, 36b, 36c, 36g, 36h, 36i, 36j, and the fluorescent materials 340g, 340i can be referred to as described in the sixth embodiment, and can also be obtained. A single light-emitting diode wafer with high chroma coordinate concentration. In other words, the design of a different number of grooves 36a, 36b, 36c, 36g, 36h, 36i, 36j, such that a single light-emitting diode wafer has a high degree of chromaticity coordinate concentration.

此外,在配置螢光材料部於容納區之前另包含依據轉換參數對該些容納區進行親水性表面處理或疏水性表面處理。此親水性或疏水性表面處理可以視依塗佈容積及塗佈的螢光材料340a,340b,340c,340d,340e,340f,340g,340h,340i的親水與疏水性而做對應的親水或疏水性表面處理,目的在於讓螢光材料340a,340b,340c,340d,340e,340f,340g,340h,340i填充於擋牆32a,32b,32c,32d,32e,32f內的容納區或是凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j中,形成螢光材料部34a,34b,34c,34d,34e,34f或是形成凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j搭配螢光材料340g,340h,340i(亦即螢光材料部)。而配置螢光材料部於容納區之方法可以是將螢光材料340a,340b,340c,340d,340e,340f,340g,340h,340i以旋轉塗佈(spin coating)、狹縫塗佈(slit coating)、網板印刷(screen printing)、或沈浸法方式塗佈於擋牆32a,32b,32c,32d,32e,32f內或是凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j中。接著,可以研磨方式將多餘的螢光材料340a,340b,340c,340d,340e,340f,340g,340h,340i移除,即可形成螢光材料部34a,34b,34c,34d,34e,34f或是形成凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j搭配螢光材料340g,340h,340i(亦即螢光材料部)。In addition, before the arranging the phosphor material portion in the accommodating region, the accommodating region is subjected to hydrophilic surface treatment or hydrophobic surface treatment according to the conversion parameter. The hydrophilic or hydrophobic surface treatment may be hydrophilic or hydrophobic depending on the coating volume and the hydrophilicity and hydrophobicity of the coated fluorescent materials 340a, 340b, 340c, 340d, 340e, 340f, 340g, 340h, 340i. Surface treatment, the purpose is to fill the luminescent material 340a, 340b, 340c, 340d, 340e, 340f, 340g, 340h, 340i in the receiving area or groove in the retaining wall 32a, 32b, 32c, 32d, 32e, 32f 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j, forming phosphor portions 34a, 34b, 34c, 34d, 34e, 34f or forming grooves 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j are matched with fluorescent materials 340g, 340h, 340i (ie, the fluorescent material part). The method of arranging the fluorescent material portion in the receiving area may be to spin coating the fluorescent materials 340a, 340b, 340c, 340d, 340e, 340f, 340g, 340h, 340i (spin) Coating, slit coating, screen printing, or immersion method applied to the retaining walls 32a, 32b, 32c, 32d, 32e, 32f or grooves 36a, 36b, 36c , 36d, 36e, 36f, 36g, 36h, 36i, 36j. Then, the excess fluorescent materials 340a, 340b, 340c, 340d, 340e, 340f, 340g, 340h, 340i can be removed by grinding to form the fluorescent material portions 34a, 34b, 34c, 34d, 34e, 34f or The grooves 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j are formed with the fluorescent materials 340g, 340h, 340i (i.e., the fluorescent material portion).

在完成S520後,例如可接著形成保護部40a,40b,其為對應每個發光二極體晶片10a,10b,10c,10e,10f,10g,10h,此對應方式可以是但不限於包覆、覆蓋、環繞於發光二極體晶片10a,10b,10c,10e,10f,10g,10h等方式。而在完成形成保護部40a,40b的製程後,可以將每一封裝後的發光二極體101,102,103,104,105,106,107,108,109,110個別切割下來,切割時可參考「第2圖」之切割線50a,50b進行切割。After S520 is completed, for example, protection portions 40a, 40b may be formed, which are corresponding to each of the LED wafers 10a, 10b, 10c, 10e, 10f, 10g, 10h, which may be, but not limited to, cladding, Covering and surrounding the LED chips 10a, 10b, 10c, 10e, 10f, 10g, 10h and the like. After the process of forming the protection portions 40a, 40b is completed, each packaged light-emitting diode 101, 102, 103, 104, 105, 106, 107, 108, 109, 110 can be individually cut, and the cutting can be performed by referring to the cutting lines 50a, 50b of "Fig. 2".

接著,關於前述特性轉換查找表之製作,可以是先對多個發光二極體晶片10a,10b,10c,10e,10f,10g,10h進行發光特性(晶片的發光特性,以下簡稱晶片特性)量測,之後,再於具有相類似(接近的)晶片特性的發光二極體晶片10a,10b,10c,10e,10f,10g,10h上形成具有不同轉換參數之光學轉換部30a,30b,30c,30e,藉以得知在相同之晶片特性對應不同轉換參數之光學轉換部30a,30b,30c,30e所得到之整體發光特性(以下稱封裝後特性)之色度座標位置(即封裝後整體發光二極體的發光強度、主波長、或/及峰值波長),依相同方式,完成了多個不同晶片特性所對應的多個不同轉換參數的光學轉換部30a,30b,30c,30e之試驗後,即可製作出前述特性轉換查找表,此查找表可以是一個晶片特性對應了不同之光學轉換部30a,30b,30c, 30e後,得到不同之封裝後的發光二極體101,102,103,104,105,106,107,108,109,110的封裝特性(封裝後發光特性),在使用查找表時,可先預定一個目標封裝特性,然後,依據在同一基板20上的各個發光二極體晶片10a,10b,10c,10e,10f,10g,10h的發光特性(晶片特性)在查找表上查找對應該目標封裝特性所對應的轉換參數,例如但不限於轉換部容積,藉由取得轉換部之容積後,可以將之拆分為一個擋牆32a,32b對一個發光二極體晶片10a,10b的實施例,或是多個擋牆32c,32d,32e,32f對一個發光二極體10c,10e之實施例,或是多個凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j對一個發光二極體晶片10f,10g,10h。接著,即可進行形成擋牆32a,32b,32c,32d,32e,32f與光學轉換部30a,30b,30c,30e或是形成這些凹槽36a,36b,36c,36d,36e,36f,36g,36h,36i,36j搭配螢光材料340g,340h,340i之程序。此外,至於單層之擋牆32a,32b,32c,32d或多層之擋牆32e,32f亦除可經由查找表中獲得外,亦可視需要而設定。Next, regarding the above-described characteristic conversion lookup table, the light-emitting characteristics (light-emitting characteristics of the wafer, hereinafter referred to as wafer characteristics) of the plurality of light-emitting diode wafers 10a, 10b, 10c, 10e, 10f, 10g, and 10h may be first performed. After that, optical conversion portions 30a, 30b, 30c having different conversion parameters are formed on the LED chips 10a, 10b, 10c, 10e, 10f, 10g, 10h having similar (close to) wafer characteristics, 30e, by which the chromaticity coordinate position (ie, the post-package characteristic) obtained by the optical conversion sections 30a, 30b, 30c, and 30e having the same wafer characteristics corresponding to different conversion parameters is known (ie, the overall illumination after packaging) After the test of the optical conversion portions 30a, 30b, 30c, 30e of a plurality of different conversion parameters corresponding to a plurality of different wafer characteristics, in the same manner, the luminous intensity of the polar body, the dominant wavelength, or/and the peak wavelength) The foregoing characteristic conversion lookup table can be created. The lookup table can be a wafer characteristic corresponding to different optical conversion portions 30a, 30b, 30c. After 30e, the package characteristics (encapsulation luminescence characteristics) of the different packaged light-emitting diodes 101, 102, 103, 104, 105, 106, 107, 108, 109, 110 are obtained. When the look-up table is used, a target package characteristic can be predetermined, and then, according to each light-emitting diode on the same substrate 20. The illuminating characteristics (wafer characteristics) of the polar body wafers 10a, 10b, 10c, 10e, 10f, 10g, 10h are searched on the lookup table for conversion parameters corresponding to the target package characteristics, such as but not limited to the volume of the converter, by After the volume of the conversion portion, it can be split into a retaining wall 32a, 32b for an embodiment of a light-emitting diode wafer 10a, 10b, or a plurality of retaining walls 32c, 32d, 32e, 32f for a light-emitting diode The embodiment of the body 10c, 10e, or a plurality of recesses 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j for a light emitting diode wafer 10f, 10g, 10h. Then, the formation of the retaining walls 32a, 32b, 32c, 32d, 32e, 32f and the optical conversion portions 30a, 30b, 30c, 30e or the formation of the grooves 36a, 36b, 36c, 36d, 36e, 36f, 36g, 36h, 36i, 36j with fluorescent material 340g, 340h, 340i program. In addition, as for the single-layer retaining walls 32a, 32b, 32c, 32d or the multi-layer retaining walls 32e, 32f, in addition to being obtainable via the look-up table, it can also be set as needed.

前述的查找表可以是對應每一封裝特性產生一張二維的查找表,此二維的查找表包含晶片特性與封裝特性之對應表,此對應表可以採用趨近線(關係方程式)的方式查找、直接查找兩個接近的點後用內插或外插法取得轉換參數、或是在晶片特性的部分採用一個範圍值對應一個轉換參數。The foregoing lookup table may generate a two-dimensional lookup table corresponding to each package characteristic, and the two-dimensional lookup table includes a correspondence table between the wafer characteristics and the package characteristics, and the correspondence table may be searched by a approaching line (relational equation). Find the conversion parameters by interpolation or extrapolation directly after finding two close points, or use a range value corresponding to one conversion parameter in the part of the wafer characteristics.

由上述內容可知,以「第2圖」為例,發光二極體晶圓包含基板20、多個發光二極體晶片10a,10b及多個光學轉換部30a,30b。這些發光二極體晶片10a,10b位於基板20上,每一發光二極體晶片10a,10b具有一發光特性。每一光學轉換部30a,30b依據對應於發光特性的多個轉換參 數而對應配置於每一發光二極體晶片10a,10b,以使每一發光二極體晶片10a,10b經由所對應的每一光學轉換部30a,30b所發出的一光線達到一目標發光特性範圍。As described above, the "second diagram" is taken as an example, and the light-emitting diode wafer includes the substrate 20, the plurality of light-emitting diode wafers 10a and 10b, and the plurality of optical conversion portions 30a and 30b. These light-emitting diode wafers 10a, 10b are located on the substrate 20, and each of the light-emitting diode wafers 10a, 10b has a light-emitting characteristic. Each of the optical conversion sections 30a, 30b is responsive to a plurality of conversion parameters corresponding to the luminescence characteristics And correspondingly disposed on each of the LED wafers 10a, 10b such that each of the LED wafers 10a, 10b reaches a target illumination characteristic via a corresponding light emitted by each of the optical conversion portions 30a, 30b. range.

其中,每一光學轉換部30a,30b包含至少一容納體及至少一螢光材料部34a,34b,容納體具有至少一凹槽(即擋牆32a,32b所圍繞出的空間),凹槽係容置對應之螢光材料部34a,34b,螢光材料部34a,34b之體積係符合對應的轉換參數。轉換參數以轉換部容積為例,螢光材料部34a,34b之體積即符合對應的發光二極體晶片10a,10b所對應的轉換部容積,如此一來,在同一晶圓(基板20)上之多個發光二極體晶片10a,10b在封裝後所得之整體發光特性即可落在相當接近之區域(即整體發光特性在色度座標的位置相當接近),例如但不限於在四個麥克亞當橢圓內。Each of the optical conversion portions 30a, 30b includes at least one receiving body and at least one fluorescent material portion 34a, 34b. The receiving body has at least one groove (ie, a space surrounded by the retaining walls 32a, 32b), and the groove is The corresponding fluorescent material portions 34a, 34b are accommodated, and the volume of the fluorescent material portions 34a, 34b conforms to the corresponding conversion parameters. For example, the volume of the conversion material is 34. The overall illuminating characteristics of the plurality of illuminating diode chips 10a, 10b after encapsulation may fall within a relatively close area (ie, the overall illuminating characteristics are relatively close at the position of the chromaticity coordinates), such as but not limited to four mics. Adam inside the ellipse.

因此,前述在同一晶圓(基板20)上之發光二極體晶片10a,10b所對應的轉換部容積中至少二個會實質上相異,此相異之轉換部容積乃是因應每個發光二極體晶片10a,10b的發光特性相異而做的調整。Therefore, at least two of the conversion portion volumes corresponding to the light-emitting diode wafers 10a, 10b on the same wafer (substrate 20) are substantially different, and the different conversion portion volumes are adapted to each of the illuminations. The adjustment of the luminescent characteristics of the diode wafers 10a, 10b is different.

此外,前述的摻雜濃度(螢光粉濃度)亦可做為查找表中的一項轉換參數,也就是說,在同一晶圓上的發光二極體晶片10a,10b的螢光材料濃度可與發光特性有相依之關係。In addition, the aforementioned doping concentration (fluorescent powder concentration) can also be used as a conversion parameter in the look-up table, that is, the concentration of the fluorescent material of the LED chips 10a, 10b on the same wafer can be It has a relationship with the luminescent properties.

前述的光學轉換部30a,30b,30c,30e之體積係與具有擋牆32a,32b,32c,32d,32e,32f之容納體一致,但實施時並不以此為限,光學轉換部30a,30b,30c,30e之體積可以小於或等於具有擋牆32a,32b,32c,32d,32e,32f之容納體。The volume of the optical conversion portions 30a, 30b, 30c, and 30e is the same as that of the housings having the retaining walls 32a, 32b, 32c, 32d, 32e, and 32f. However, the optical conversion portion 30a is not limited thereto. The volume of 30b, 30c, 30e may be less than or equal to the housing having the retaining walls 32a, 32b, 32c, 32d, 32e, 32f.

綜上所述,本揭露之發光二極體製造方法與發光二極體晶 圓,係對應發光二極體晶片的發光特性而搭配不同的光學轉換部,能於單一製程中,完成在同一晶圓上所有發光二極體晶片之封裝,並使封裝後之發光二極體的個別封裝後發光特性落於四個麥克亞當橢圓內,達到高色度座標集中度之目的(色度座標規格範圍精準地落於一預定區間)。In summary, the light emitting diode manufacturing method and the light emitting diode crystal of the present disclosure The circle is matched with different optical conversion parts corresponding to the light-emitting characteristics of the light-emitting diode chip, and the package of all the light-emitting diode chips on the same wafer can be completed in a single process, and the packaged light-emitting diode is completed. The individual post-encapsulation luminescence characteristics fall within the four MacAdam ellipses for the purpose of high chromaticity coordinate concentration (the chromaticity coordinate specification range falls precisely within a predetermined interval).

雖然本揭露以前述之實施例揭露如上,然其並非用以限定本揭露。在不脫離本揭露之精神和範圍內,所為之更動與潤飾,均屬本揭露之專利保護範圍。關於本揭露所界定之保護範圍請參考所附之申請專利範圍。Although the disclosure is disclosed above in the foregoing embodiments, it is not intended to limit the disclosure. All changes and refinements are beyond the scope of this disclosure. Please refer to the attached patent application for the scope of protection defined by this disclosure.

10a,10b‧‧‧發光二極體晶片10a, 10b‧‧‧Light Emitter Wafer

101,102‧‧‧封裝後的發光二極體101,102‧‧‧Packed LEDs

11a,11b‧‧‧焊點11a, 11b‧‧‧ solder joints

20‧‧‧基板20‧‧‧Substrate

30a,30b‧‧‧光學轉換部30a, 30b‧‧‧Optical Conversion Department

32a,32b‧‧‧擋牆32a, 32b‧‧ ‧ retaining wall

34a,34b‧‧‧螢光材料部34a, 34b‧‧‧Fluorescent Materials Division

340a,340b‧‧‧螢光材料340a, 340b‧‧‧ fluorescent materials

40a,40b‧‧‧保護部40a, 40b‧‧‧Protection Department

50a,50b‧‧‧切割線50a, 50b‧‧‧ cutting line

Claims (20)

一種發光二極體之製造方法,包含:提供多個發光二極體晶片位於一基板上;電性連接該些發光二極體晶片至該基板;驅動該些發光二極體晶片;量測每一該發光二極體晶片以獲得該發光特性;依據該發光特性及一特性轉換查找表以獲得多個轉換參數;依據該些轉換參數於每一該發光二極體晶片形成至少一容納體,該容納體具有至少一凹槽,且該凹槽對應每一該發光二極體晶片而設置;以及配置至少一螢光材料部於該凹槽以形成一光學轉換部,該光學轉換部對應於每一該發光二極體晶片,以使每一該發光二極體晶片經由所對應的該光學轉換部所發出的一光線達到一目標發光特性範圍。 A method for manufacturing a light emitting diode includes: providing a plurality of light emitting diode chips on a substrate; electrically connecting the light emitting diode chips to the substrate; driving the light emitting diode chips; measuring each a light-emitting diode wafer to obtain the light-emitting characteristic; converting the look-up table according to the light-emitting characteristic and a characteristic to obtain a plurality of conversion parameters; forming at least one receiving body for each of the light-emitting diode wafers according to the conversion parameters, The receiving body has at least one groove, and the groove is disposed corresponding to each of the light emitting diode chips; and at least one fluorescent material portion is disposed on the groove to form an optical conversion portion, wherein the optical conversion portion corresponds to Each of the light-emitting diode chips is such that each of the light-emitting diode chips reaches a target light-emitting characteristic range via a corresponding light emitted by the corresponding optical conversion portion. 如申請專利範圍第1項所述之發光二極體之製造方法,其中該容納體為一擋牆結構,該擋牆結構形成該凹槽,且每一該擋牆結構環繞對應的該發光二極體晶片。 The manufacturing method of the light-emitting diode according to the first aspect of the invention, wherein the receiving body is a retaining wall structure, the retaining wall structure forms the groove, and each of the retaining wall structures surrounds the corresponding light-emitting two Polar body wafer. 如申請專利範圍第1項所述之發光二極體之製造方法,其中該容納體為一擋牆結構,該擋牆結構形成該凹槽,且每一該擋牆結構係設置於對應的該發光二極體晶片之上。 The manufacturing method of the light-emitting diode according to claim 1, wherein the receiving body is a retaining wall structure, the retaining wall structure forms the groove, and each of the retaining wall structures is disposed corresponding to the Above the light-emitting diode wafer. 如申請專利範圍第1項所述之發光二極體之製造方法,其中該容納體為一平坦化層,該平坦化層具有該凹槽,該凹槽設置於對應的該發光二極體晶片之上。 The method of manufacturing the light-emitting diode according to the first aspect of the invention, wherein the receiving body is a planarization layer, the planarization layer has the groove, and the groove is disposed on the corresponding light-emitting diode chip. Above. 如申請專利範圍第4項所述之發光二極體之製造方法,其中該形成該光學轉換部包含:形成該平坦層於該基板和該些發光二極體晶片之上;以及依據該些轉換參數於每一該發光二極體晶片之該平坦層上形成該凹槽。 The method of manufacturing the light-emitting diode of claim 4, wherein the forming the optical conversion portion comprises: forming the planar layer on the substrate and the light-emitting diode wafers; and converting according to the conversion A parameter is formed on the planar layer of each of the light emitting diode chips. 如申請專利範圍第1項所述之發光二極體之製造方法,其中該些轉換參數使具有不同該發光特性的每一該發光二極體晶片所對應的該凹槽具有不同的一凹槽容積。 The method for manufacturing a light-emitting diode according to claim 1, wherein the conversion parameters have different grooves corresponding to each of the light-emitting diode chips having different light-emitting characteristics. Volume. 如申請專利範圍第1項所述之發光二極體之製造方法,其中對應每一該發光二極體晶片的該凹槽於每一該發光二極體晶片處相鄰配置或重疊配置。 The method for manufacturing a light-emitting diode according to claim 1, wherein the groove corresponding to each of the light-emitting diode wafers is disposed adjacently or overlapped at each of the light-emitting diode wafers. 如申請專利範圍第1項所述之發光二極體之製造方法,其中在該配置該螢光材料部於該凹槽前另包含依據該些轉換參數對該容納體進行親水性表面處理或疏水性表面處理。 The method for manufacturing a light-emitting diode according to the first aspect of the invention, wherein the fluorescent material portion is further disposed on the recessed surface to perform hydrophilic surface treatment or hydrophobicity according to the conversion parameters. Sexual surface treatment. 如申請專利範圍第1項所述之發光二極體之製造方法,其中每一該轉換參數為一螢光粉濃度、一轉換部容積、一螢光粉材質、一螢光粉層數、或其組合。 The method for manufacturing a light-emitting diode according to claim 1, wherein each of the conversion parameters is a phosphor concentration, a conversion volume, a phosphor material, a phosphor layer, or Its combination. 如申請專利範圍第9項所述之發光二極體之製造方法,其中該螢光粉濃度的重量百分比為10wt%到80wt%。 The method for producing a light-emitting diode according to claim 9, wherein the concentration of the phosphor powder is from 10% by weight to 80% by weight. 如申請專利範圍第1項所述之發光二極體之製造方法,其中該發光特性為一發光強度、一主波長、一峰值波長、一色度座標、或其組合。 The method of manufacturing a light-emitting diode according to claim 1, wherein the light-emitting characteristic is a light-emitting intensity, a dominant wavelength, a peak wavelength, a chromaticity coordinate, or a combination thereof. 如申請專利範圍第1項所述之發光二極體之製造方法,其中於該形成該 光學轉換部後另包含形成一保護部以對應該光學轉換部。 The method for manufacturing a light-emitting diode according to claim 1, wherein the forming method The optical conversion portion further includes forming a protective portion to correspond to the optical conversion portion. 一種發光二極體晶圓,包含:一基板;多個發光二極體晶片,位於該基板上,每一該發光二極體晶片具有一發光特性;以及多個光學轉換部,每一該光學轉換部依據對應於該發光特性的多個轉換參數而對應配置於每一該發光二極體晶片,以使每一該發光二極體晶片經由所對應的每一該光學轉換部所發出的一光線達到一目標發光特性範圍,每一該光學轉換部包含:至少一螢光材料部;以及至少一容納體,該容納體具有至少一凹槽,該凹槽容置該螢光材料部。 A light-emitting diode wafer comprising: a substrate; a plurality of light-emitting diode chips on the substrate, each of the light-emitting diode chips having a light-emitting property; and a plurality of optical conversion portions, each of the optical The conversion unit is correspondingly disposed on each of the light emitting diode chips according to a plurality of conversion parameters corresponding to the light emission characteristics, so that each of the light emitting diode chips is sent via each of the corresponding optical conversion portions. The light reaches a range of target illuminating characteristics, each of the optical converting portions includes: at least one fluorescent material portion; and at least one accommodating body having at least one groove, the groove accommodating the fluorescent material portion. 如申請專利範圍第13項所述之發光二極體晶圓,其中該容納體為一擋牆結構,該擋牆結構形成該凹槽,該擋牆結構環繞對應的每一該發光二極體晶片而設置。 The light-emitting diode wafer of claim 13, wherein the receiving body is a retaining wall structure, the retaining wall structure forming the groove, the retaining wall structure surrounding each of the corresponding light-emitting diodes Set up for the wafer. 如申請專利範圍第13項所述之發光二極體晶圓,其中該容納體為一擋牆結構,該擋牆結構形成該凹槽,該擋牆結構設置於對應的每一該發光二極體晶片之上。 The light-emitting diode wafer according to claim 13 , wherein the receiving body is a retaining wall structure, the retaining wall structure forms the groove, and the retaining wall structure is disposed on each of the corresponding light-emitting diodes Above the body wafer. 如申請專利範圍第13項所述之發光二極體晶圓,其中該容納體為一平坦化層,該平坦化層設置於該基板和每一該發光二極體晶片之上,且該平坦化層形成該凹槽於每一該發光二極體晶片之上。 The light-emitting diode wafer of claim 13, wherein the receiving body is a planarization layer, the planarization layer is disposed on the substrate and each of the light-emitting diode wafers, and the flat The layer forms the recess over each of the light emitting diode wafers. 如申請專利範圍第13項所述之發光二極體晶圓,其中該些轉換參數使具有不同該發光特性的每一該發光二極體晶片所對應的該凹槽具有不同的一凹槽容積。 The light-emitting diode wafer of claim 13, wherein the conversion parameters have different groove volumes corresponding to each of the light-emitting diode chips having different light-emitting characteristics. . 如申請專利範圍第13項所述之發光二極體晶圓,其中每一該轉換參數為一螢光粉濃度、一轉換部容積、一螢光粉材質、一螢光粉層數、或其組合。 The light-emitting diode wafer of claim 13, wherein each of the conversion parameters is a phosphor concentration, a conversion volume, a phosphor material, a phosphor layer, or combination. 如申請專利範圍第13項所述之發光二極體晶圓,其中該發光特性為一發光強度、一主波長、一峰值波長、一色度座標、或其組合。 The illuminating diode wafer according to claim 13, wherein the illuminating characteristic is a luminous intensity, a dominant wavelength, a peak wavelength, a chromaticity coordinate, or a combination thereof. 如申請專利範圍第13項所述之發光二極體晶圓,其中該些轉換參數為依據該發光特性和一特性轉換查找表而獲得。The light-emitting diode wafer of claim 13, wherein the conversion parameters are obtained according to the light-emitting characteristics and a characteristic conversion look-up table.
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US20100207134A1 (en) * 2007-07-26 2010-08-19 Kenichiro Tanaka Led lighting device

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