TWI512869B - Substrate processing apparatus with motors integral to chamber walls - Google Patents

Description

Substrate processing apparatus having a motor integrally formed on a chamber wall

The present invention is generally directed to substrate transfer systems, and more particularly to substrate transfer robots.

A conventional substrate processing apparatus may include one or more portions having an isolated atmosphere (e.g., vacuum or inert gas) chamber. Conventional processing devices can also include a substrate transport system disposed in an isolated atmosphere chamber for transporting substrates between different stations of the processing device. Conventional delivery devices can include one or more arms and a drive portion that is equipped with a motor that drives the arm. The motor or its components can be disposed in an isolated atmosphere chamber, and the conventional drive portion can include a conventional bearing support shaft that drives the arm. Conventional bearings can be contaminated by contact with bearings and the use of lubricating oil, such as gases released during vacuum. In addition, the conventional driving portion may be placed outside the wall of the isolation atmosphere chamber or the vacuum chamber, and connected to the chamber through the isolated portion of the driving portion to be connected to the arm in the room. Therefore, the driving portion of the conventional apparatus increases the volume of the isolation atmosphere chamber or the vacuum chamber, thereby correspondingly increasing the time for the isolation atmosphere or vacuum in the suction chamber. In addition, the arm portion of the conventional delivery device can be centrally located to facilitate full delivery of the processing device. Thus, conventional system drive components placed in the center of the isolation air chamber or the bottom of the vacuum chamber will prevent or limit the contact of other systems with the bottom of the isolation atmosphere chamber. The embodiments disclosed herein can solve the above problems of the conventional system.

1 is a schematic plan view of a substrate processing apparatus 10 incorporating various functions of the present invention. Although the embodiment is described in accordance with the examples shown in the drawings, it should be understood This embodiment is applicable to other various embodiments. In addition, any suitable size, shape or type of elements or materials may be employed.

The processing device shown in Figure 1 has a typical configuration, and in other embodiments, the processing device can include any other desired configuration. The processing device typically includes an interface area 12 referred to as a front end module (it is understood that this is only one embodiment, and that other embodiments may be used in any other embodiment, such as an interface area that may be placed on the back or side of the device). In the exemplary embodiment shown, the apparatus can include a processing zone 14 coupled to the interface zone 12. For example, the interface region 12 can be configured to allow the substrate or other desired workpiece to be loaded or unloaded by the device (the interface region can have, for example, one or more load ports 12L, and a suitable transport device 12T, which can be placed in a suitable environmentally controlled Module 12M). The transport unit 12T of the interface area 12 transports the substrate between the cassette of the loading station in the interface area and the processing area 14 in an appropriately controlled environment of the module 12M. The illustrated processing area is generally provided with a plurality of transport chambers 14T (two transport chambers as shown in FIG. 1 but two or more or less), and a plurality of processing modules 14M that communicate with the transport chamber 14T. The processing modules can be used to perform any desired processing on the substrate, such as metal deposition (copper barrier/seed layer (Cu B/S) physical vapor deposition (PVD) on the substrate or any other desired processing) . In an embodiment, the delivery chamber is configured to contain a separable gas that is isolated from the outside air. In an embodiment, the transfer chamber can hold vacuum gas (although in other embodiments, the transfer chamber can accommodate any other desired isolation atmosphere, such as inert gas N2, Ar, etc.). Thus the delivery chamber in an embodiment may include a suitable vacuum exhaust system and snorkel system. In order to keep the isolation atmosphere intact, the transfer chamber 14T of the treatment zone can be associated with the interface zone 12 via the load lock 16. It should be understood that the processing module 14M can be isolated from the delivery chamber by a suitable slot valve. In the illustrated embodiment, the delivery chambers 14T1, 14T2 can be isolated from one another. E.g, For the front end portion or interface region of the device, the transfer chambers may be arranged in series, and the intermediate loading regions between the transfer chambers 14T1 and 14T2 may be arranged as shown in FIG. Therefore, the transfer chamber can accommodate different isolation atmospheres, such as different levels of vacuum, so that the processing modules associated with the various transfer chambers can perform different treatments for different base pressures. In other embodiments, the delivery chamber may not have a different gas. In other embodiments, the intermediate chamber between the transfer chambers can also be configured as a substrate buffer, front axle locator or metrology component. In the embodiment shown in Fig. 1, the transport devices 20, 22 can be mounted in each of the transport chambers 14T1, 14T2, respectively. It will be appreciated that the transport apparatus 20 located in the chamber 14T1 can transport the substrate between the load lock 16 and the process module 14M or the intermediate loading zone 14LL connected to the transfer chamber 14T1; the transport apparatus 22 can be in the intermediate load lock 14LL and connected to the transfer chamber The substrate is transported between the processing modules of the 14T2. In other embodiments, the delivery chamber of the treatment zone may include more than two or fewer delivery devices. Substrate processing apparatus 10 and associated portions (e.g., interface area 12, processing area 14, conveyors 20 and 22) may be suitably configured to handle any desired substrate, such as 200 mm, 300 mm, 450 mm, or any other desired diameter. Substrate (such as a substrate used to fabricate a semiconductor), a wire or film, or a flat panel (such as a flat panel used to make a flat panel display).

2A-2C, which are perspective, bottom and side cross-sectional views, respectively, of the delivery chamber portion 14T. (The closed element is omitted in Fig. 2A, so that the fine parts of the room can be clearly seen). As previously mentioned, the delivery chamber components of the embodiments can include a set of delivery devices, devices 20, 22 that transport the substrates back and forth between the load lock 16 (see Figure 1) and the processing module of the processing component 14 through the delivery chamber. In an embodiment, the delivery devices 20, 22 are typically hinged or a movable connecting arm driven by a rotary drive with a plurality of independent rotating shafts to obtain the end of the delivery device The required radius (R) and rotation (T) of the actuator (for example, indicated by arrows R, T in Fig. 2A, respectively), the specific details will be explained later. For ease of illustration, the rotary actuators are referred to as ring-shaped motors with coils that can be integrated into the delivery chambers 14T1, 14T2 to isolate the coils from the indoor gases, as will be further described below. In an embodiment, arranging the drive motor allows the bottom surface of the transfer chamber to be free or easy to install the interface of the vacuum exhaust system 100 (see Figures 2B, 2C) or other desired system. In an embodiment, the arms and drive components of the delivery device arm can be magnetically suspended and centered, for example, with a bearingless motor to eliminate or substantially reduce the likelihood of particulate formation in the chamber.

2A-2C, in the embodiment, the delivery devices 20, 22 in each of the delivery chambers 14T1, 14T2 can be different. For example, delivery device 20 can include an arrangement called a bi-directional symmetric arm; delivery device 22 can include an arrangement of symmetric arms. In other embodiments, the substrate processing apparatus can include any other desired alignment, such as assembling an automated robotic arm. In other embodiments, the delivery devices in the delivery chamber can be similar. 3A-3C, which are perspective and partial perspective views, respectively, of the delivery device 20, will now be described. As noted above, in an embodiment, the delivery device 20 can have bi-directionally symmetric arms, such as two arm assemblies 24, 26 (although in other embodiments there can be more or less than two arm assemblies). The arm members 24, 26 are substantially similar, and in the embodiment they are generally arranged opposite each other as shown in Figure 3A. The arm 24 can include one (or more) end effectors on which a desired number of substrates can be processed, and a pair of arm links 30R, 30L on which a movable end effector (arm assembly 26) is mounted. Similar to the arm 24, therefore, the arm member will be described below with reference to the arm member 24 unless otherwise specified. The arm links 30R, 30L on the pivots 32L, 32R are pivotally mounted to the respective base portions 34, 36 and are pivotally coupled to the end effectors of the wrist joint. In reality In the embodiment, the arm members 24, 26 are all mounted or connected to the common base portions 34, 36 and reach the drive member 28 via these base portions. In an embodiment, the drive component 28 can include a motor that provides two independent axes of rotation (Tl, T2) and a two degree free angle of motion of the arm assemblies 24, 26 (R, T). It will be appreciated that the bidirectional symmetrical geometry of the arm links of the arm assemblies 24, 26 can affect the conventional decoupling of the R motion between the arm members (eg, the expansion and retraction of one arm member (R motion), the rotational axes T1, T2 from the battery position Starting the reverse rotation will result in a corresponding small R movement of the other arm assembly at the battery position. In other embodiments, the arm members can be independently coupled to the drive member. The base portions 34, 36 can comprise any desired shape as long as the outer ring pivots 32L, 32R of the arm links 30L, 30R can be coupled to the rotor of the drive motor (the base portion configuration shown in Figures 3A-3B only For example, in other embodiments, the base portion can be any other suitable configuration desired. As noted above, in the embodiment illustrated in Figures 3A-3C, the drive member 28 can include ring motors 40, 42 (determining independent axes of rotation T1, T2), and the base portions 34, 36 can be either shaftless or hubless Connected to the respective drive motors 40,42. Figure

3A-3B clearly shows that each base portion 34, 36 can include a common hoop member 34R, 36R and expansion members 34E, 36E such that the arm members 24, 26 correspond to the pivot joints 32L, 32R. In an embodiment, the base portion may be very flat, such as a sheet steel forming, but in other embodiments, the base portion may be fabricated from any suitable material in any other desired manner. Hoop members 34R, 36R that can be closed or opened are coupled to respective annular rotors of motors 40, 42, respectively. The hoop member of the base portion can be secured to the motor rotor (e.g., mechanical fasteners, chemical bonds, etc.) in any desired manner. In other embodiments, the motor rotor can also be integrated into the base portion (eg, the base portion can be configured as a full ring of magnetic material so that Operated as a motor rotor). The hoop member of the base portion is expandable around the loop and can be secured to the circumferential portion of the rotor of the desired length. In the illustrated embodiment, the motors 40, 42 can be placed on the same center (with their respective axes of rotation T1, T2 being coaxial), and the base portions 34, 36 can be configured to support rotation without interfering with each other. . In other embodiments, the coupling between the base portion and the base portion and the drive motors T1, T2 can be configured in any other desired manner and can include one or more shafts or hubs.

2A-2C, in the embodiment, the motors 40, 42 of the drive member 28 are integrated into the bottom plate 14B to form the transfer chambers 14T1, 14T2. In other embodiments, the drive motor can be integrated into any other wall that is connected to the delivery chamber, such as a side wall or top plate. In an embodiment, the ring motors 40, 42 of the drive portion may be arranged to create an effective or large amount of available space 44 within the motor (not obstructed by the drive system components) to configure or store other components, such as the vacuum exhaust system 100 ( See Figures 2B and 3B) and related air pressure control components (such as manometers, sensors, vent pipe systems not shown). Referring now to Figure 5, there is shown a perspective view of the drive portion 128, which is very similar to the drive portion 28 (the drive portion 28 shown in the embodiment can include a motor that defines four independent rotational axes T1-T4, as described above, The drive unit 28 can have two independent axes of rotation. In the embodiment, the motors 40, 42 (T1, T2) of the drive member 28 mounted at the concentric are substantially identical. In other embodiments, the drive portion can include different types of motors. In an embodiment, the motors 40, 42 may be synchronous motors, such as brushless DC motors. For an example of a brushless DC motor, see U.S. Application Serial No.: 11/769,688, filed on June 27, 2007, U.S. Patent Application Serial No.: 11/769,651, filed on Jun. 27, 2007, U.S. Provisional Patent Application Serial No. 60/946,687, filed on Jun. 27, 2007, the disclosure of which is hereby incorporated by reference. As described above, in the embodiment, The motors 40, 42 are similar. The following description uses the motor 40 as an example unless otherwise noted. As shown in Fig. 3B, the motor windings can be disposed in the stator 40S, and the rotor 40R can align the permanent magnets in the alternating magnetic pole sequence in a circumferential manner at a desired pitch. In an embodiment, the rotor 40R may comprise a ferromagnetic support (or a support made of any other suitable magnetic material) for use with the permanent magnets. The stator 40S may be arranged in the stator components 40S1-40S4 (eg, four stator components, see FIG. 5), while in other embodiments there may be more or less than four stator components. The stator components 40S1-40S2 may be offset in geometrical positions (e.g., spaced around the rotor) or may be electrically offset from one another to create the resultant force of the rotor. In an embodiment, the stator windings and rotor magnets are capable of generating tangential and/or radial forces in the direction of arrow τ shown in Figure 5 to provide independently controllable torque (T1, T2) and bearingless centering. The windings of one or more of the stator components 40S1-40S4 can be coupled to each other to form an independently controllable winding. In an embodiment, motor 40 has at least two independently controllable windings (and in other embodiments, there may be more than two or fewer windings). The commutation of the windings in the components 40S1-40S2 that provide the required torque and independent rotor centering force can be controlled according to a suitable algorithm of the controller (not shown). For an example of a suitable commutation procedure for commutating windings in stator components 40S1-40S4, see U.S. Patent Application Serial Nos. 11/769,688 and 11/769,651. It will be appreciated that in an embodiment, the rotor centering force (e.g., radial and/or tangential force) may be controlled to affect the rotors 40R, 42R to move the arm assemblies 24, 26 in the X, Y directions (e.g., two of the two motors) The rotation axes T1, T2 are additionally 2 degrees free angle.) In other embodiments, the rotor may include a suitable passive centering force.

In an embodiment, concentrically adjacent motors 40, 42 may be configured to use or share a common or combined stator component between the rotors. As can be seen in Figure 6, it is clear A cross-sectional view of the stator members 140S1 and the rotors 142R, 140R of the drive member 128 is described. The stator member 140S1 and the rotor members 140R, 142R are typical representatives. The rotors 40R, 42R of the drive member 28 are similar to the stator member 40S1 (see Fig. 3A). As shown in Figure 6, in an embodiment, the stator component 140S1 can include a core section 140C made of a suitable magnetic material. The configuration of the core section 140C shown in Figure 6 is that, in other embodiments, the core section can include any desired configuration. For the two windings 140W, 142W of the motors 140, 142 similar to the motors 40, 42, the core section 140C may include windings or teeth (see Figure 3B). In an embodiment, the core section may be a single structure, while in other embodiments, the core section may be a composite component. The winding slots can be respectively disposed on opposite sides of the core section and face the corresponding motor rotors 140R, 142R. For reference, the winding slots 140W, 142W in the core section 140C are shown as being generally symmetrical, while in other embodiments, the winding slots of the core section of each motor stator may be different (eg, with the configuration and operation of a given motor) The parameters vary). In other alternative embodiments, one or more slots or spacings may be formed in the core section (e.g., extending outwardly toward the core section as a center) to provide a desired magnetic configuration for the core section. For a suitable description of the stator components, see U.S. Patent Application Serial No.: 60/946, 693, filed on Jun. 27, 2007, which is incorporated herein by reference. It will be appreciated that the rotors 140R, 142R (similar to the rotors 40R, 42R of Figure 3B) that operate with the combined stator component 140S1 can be correspondingly configured in Figure 6. For example, the rotors 140R, 142R may face the respective windings on the combined core section 140C between the rotors by positioning the permanent magnets. Thus, the permanent magnets on each of the rotors 140R, 142R can face each other (it will be appreciated that the spacing between the rotors can be adjusted and/or a suitable material placed within the chamber walls to avoid magnetic effects between the rotors.) In other embodiments , The motor stator and rotor can have any other suitable configuration.

In addition to the moment and centering force, in the embodiment, the motors 40, 42 can generate a lifting force (such as a Z force) without contact. For example, proper positioning of the rotor magnet and the stator core can produce a passive lifting force to stably support the rotor and arm members that move in the Z direction by magnetic suspension. By configuring the stator components and rotors of the motors 40, 42, the desired stiffness of the rotors 40R, 42R in the Z direction, as well as the pitch and rotor stiffness of the rolls can be generated. (rotation of the rotor on the Y and Z axes, respectively). A suitable example of configuring the rotor and stator to generate a passive Z lifting force in the Z-axis direction as well as spacing and rotation is described in U.S. Provisional Patent Application Serial No. 60/946,693, the disclosure of which is hereby incorporated by reference. The drive member is capable of providing Z-axis movement of the arm member. For example, the stator components can be configured on a movable platform or bracket that can control the Z motion (not shown). In other embodiments, the motor rotor and/or stator may be configured to generate an active Z force to move the rotor along the Z axis relative to the stator and to move the arm assembly within the transfer chambers 14T1, 14T2 along the Z axis. In other alternate embodiments, the drive member is unable to move the arm member along the Z axis. Still referring to FIG. 6, stator component 140S1 (similar to stator components 40S1-40S4 of FIG. 3B) may have anti-cogging functions 140G1-140G2, 142G1, 142G2. In an embodiment, the combined stator 140S1 component may have the anti-cogging function of the two rotors of the motors 140, 142. The anti-cogging function of each stator component (eg, components 40S1-40S4), and the combination or collective effect of the anti-cogging functions of all stator components 40S1-40S4 (similar to 140G1, 140G2, 142G1, 142G2 functions) eliminates motor teeth Slot interference or reduce interference to an ideal level. Thus, during operation of the motor, the substrate can be accurately positioned by the transport device, at least in the Z direction, the radial direction (r), and the rotational direction (T1, T2 axes). For a suitable demonstration of the anti-cogging function of the motor stator components, please refer to the US Temporary Specialist. Application Serial No. 60/946,693, prior to which reference has been made.

In an embodiment, the motors 40, 42 may have suitable position feedback systems 50, 52. The position feedback systems 50, 52 do not intrude into the isolation atmosphere in the delivery chamber, as will be explained below. The feedback systems 50, 52 of the motors 40, 42 are generally similar to the feedback systems 150, 152 shown in FIG. The feedback systems 150, 152 of each rotor can be similar to each other, and sensors 150A, 150G, 150I and target indices are typically integrated to determine the absolute and incremental rotational positions and radial or center positions of the rotors 140R, 142R. For example, the sensors 150A, 150G, 150I can be electromagnetic sensors, such as Hall effect sensors, or optical or other beam sensors. The sensor can be placed outdoors, as explained later. In an embodiment, the rotor support can position a target index that is sensed or read by a corresponding sensor to determine the rotor position described above. As shown in FIG. 6, sensor 150A (only eight sensors are shown in this example, and in other cases more or less than eight) may sense a corresponding target index track for the rotor support index, The absolute rotational position of the rotor 140R is determined. A sensor 150I (2 exemplary sensors) may sense a corresponding target index track for the rotor support index to determine an incremental rotational position of the rotor; a sensor 150G (1 exemplary sensor) may A respective target track for the rotor support is sensed to detect the radial gap position and center position of the rotor. In other embodiments, there may be more than two or fewer sensors (eg, sensing data from one or more sensors may be used to establish multiple positional parameters of the rotor.) Position feedback sensor system 50, A suitable demonstration of 52 can be found in U.S. Provisional Application Serial No. 60/946,686, filed on Jun. 27, 2007, which is hereby incorporated by reference in its entirety. Sensors similar to sensors 150A, 150I, 150G can be positioned around the rotor at will, as will be further explained below.

As noted above, in an embodiment, the drive member 28 can be integrated into the bottom plate 14B of the transfer chamber (see Figure 2B for demonstration). As shown in Figures 2B-2C, the lower or outer surface of the base plate can be isolated from the drive component components. As also described above, the motor stators 40S, 42S and the feedback position systems 50, 52 (see Fig. 3C) can be isolated from the chamber gases of the delivery chamber 14T1. Furthermore, it will be appreciated from Figure 2B that the isolated motor stators 40S, 42S and feedback systems 50, 52 (and the rotors 40R, 42R in the isolated atmosphere) may be at least partially disposed within a specified SEMI height of the transfer chamber. As shown in FIG. 2B, the stator and feedback system sensor can be disposed in an isolating sleeve or cover 14H that is mounted on the chamber floor 14W and has a stator and feedback sensor in the cover plate. A wall 14P that is isolated from the interior of the delivery chamber. In an embodiment, the cover plate 14H can be divided into cover member 14H1-14H4 (as shown in Figures 3A and 5), generally conforming to the stator members 40S1-40S4. In an embodiment, the cover members may be similar to each other. As a specific reference, the cover member 14H1 will be further described later. The cover member has a unitary structure and may be made of any suitable material (such as aluminum or other non-magnetic material). The cover member 14H1 can be shaped to form a flange 14H or a support surface of the base opposite the delivery chamber wall (e.g., the bottom plate 14B) to close and isolate the interior of the delivery chamber. As with the embodiment shown in Figure 5, the cover member can include the groove portions 14SO, 14SI of the motor stator member (e.g., the stator members 40S1-40S4 can be positioned within the recess 14SO of the cover member). Figure 5 shows a portion of the cover member 14H1 showing the stator member 140S1 (similar to the stator member 40S1) mounted within the cover recess 14SO. As mentioned above, the wall 14P of the cover is located between the stator and the inner wall of the transfer chamber to isolate the stator from the isolated atmosphere of the transfer chamber. In an embodiment, the cover member may further include groove members 14FI, 14FN, 14FO as shown by the sensors of the feedback system 50, 52 (see FIG. 6, which are respectively located in respective groove portions of the cover member) The sensor portion of the feedback system 150, 152 within 14FN, 14FO). Thus, in an embodiment, the groove portion of the cover member positions the stator member and the position feedback system at the bottom plate of the transfer chamber and is isolated from the gas of the transfer chamber by the wall of the cover member between the groove portions. The sensors 150A, 150i, 150G are capable of detecting a target index through the wall of the cover. In an optical sensor embodiment, the cover plate can include a transparent portion that supports sensor reading and can maintain mutual isolation between the chamber and the sensor. The stator component and the feedback system sensor can be mounted on the cover member, and the cover stator component and the corresponding feedback system portion can be mounted as a unit module to the transfer chamber or removed from the transfer chamber. As shown in Fig. 2C, in an embodiment, the bottom plate of the transfer chamber may have an opening to allow the cover member to be mounted on the bottom plate. As also shown in Fig. 2C, the vacuum exhaust system 100 can be mounted on the outer surface of the bottom plate 14W. The vacuum exhaust system 100 can enter the room through the access space 44 defined by the drive components described above.

4A-4C, which illustrate the delivery device 22 of other embodiments. As noted above, in this example device 22 can include a symmetrical arm arrangement with two symmetric arm assemblies 22U, 22L. The arm members 22U, 22L can be coupled to the drive member 128 by a motor to produce four rotational axes (T1, T2, T3, T4) as shown in FIG. The movement of the arm assembly can be controlled independently. The arm assemblies 22U, 22L are similar to each other and are similar to the arm assemblies 24, 26 previously described. Similar features have similar numbers. The lower arm member 22L can include symmetrical arm links 130LR, 130LL that connect the end effector to the base portions 134, 136. The base portion can be coupled to the drive member 128, and the motors 140, 142 that generate the rotational axes T1, T2 that cause the arms 22L to move T and R. The motors 140, 142, 144, 146 are generally similar to one another and are similar to the motors of the drive member 28 previously described. The upper arm member can include the respective ends The tangles are coupled to the symmetrical arm links 130UL, 130UR of the base arms 122L, 122R. As shown in Figures 4A-4B, the base arm links 122L, 122R can be secured to the base portions 164, 166, respectively. 164 and 166 are in turn coupled to respective motors 144, 146 that are capable of generating rotational axes T3, T4 that cause arm 22U to perform T and R movements. The base portions 164, 166 are generally similar to the base portions 34, 36, but may include extension portions 164E, 166E that extend generally upwardly and are tightly coupled to the base arms 122R, 122L. In an embodiment, the extension may be coaxial or may be vertically offset from the motor rotor as needed to maintain a sufficient open area in the drive similar to access zone 44 shown in Figure 3B. The arm members 22U, 22L and the drive member 128 can be coupled to the bottom plate 14W of the transfer chamber in a manner similar to the previously described arm members 24, 26 and drive member 28.

7A-7C, which are perspective, side cross-sectional, and bottom views of the transfer chamber member 714T of the processing apparatus of other embodiments. The delivery device in the delivery chamber can include bi-directional symmetric arm assemblies 724, 726 and symmetric arm assemblies 722U, 722L. In an embodiment, the arm members are powered by drive members 728, 728U, 728L that may be integrated into the outer sidewall of the delivery chamber. As shown in Figures 8A, 8B, the arm links 730L, 730R of the arm assemblies 724, 726 can be pivotally coupled to a base portion that is coupled to the rotor yokes 740R, 742R of the drive member 728 motor. (Generating the rotation of T1, T2) In an embodiment, the rotor ferrules 740R, 742R can extend to the exterior of the pivots 732L, 732R of the arm links, and the base portions 734, 736 can depend on the inner surface of the rotor ferrule. In an embodiment, the rotor ferrules can be configured in a conventional stacked configuration. In an embodiment, the rotor ferrule is generally similar to the previously described rotors 40R, 42R. Figure 9 shows a cross section of a typical rotor yoke 742R. The rotor yoke 742R may generally include a permanent magnet mounted on the magnet support ring and properly track the rotor position Set the sensor target track. As shown in Figure 9, in an embodiment, the position of the permanent magnet and the sensor track is outward. In an embodiment, the rotor ferrule may be a component including a rotor support and a permanent magnet mounted on the ferrule support member 742H1, and a sensor track mounted on the ferrule support member 742H2. These hoop support members can be joined together using suitable fasteners to form the motor yoke 742R. In an embodiment, the hoop support members 741H1, 742H2 can be made of any suitable material, such as a non-magnetic metal aluminum alloy or the like. As shown in FIG. 9, similar to the previously described stator, the motor stators 740S, 742S can be arranged in the stator components (six shown) and can be configured in the isolation sleeves 714HU, 714HL and the position feedback system. In the device. Figure 11 shows a conveyor apparatus 722 in which arm members 722U, 722L are coupled to respective rotor ties 740R, 742R, 744R, 746R of the motors of the drive members 728U, 728L that generate the axes of rotation T1, T2, T3, T4. As seen in Figures 9-10, in an embodiment, the drive members 728L, 728U can be aligned with the motors 740, 742 located below the transport arm assemblies 722L, 722U and the motors 744, 746 located above the transport arm assemblies 722L, 722U. . The motor of the upper end drive member 728U (T3, T4 rotates) can supply power to the upper arm member 722U, and the motor (T1, T2 rotates) of the lower end drive member 728L can supply power to the lower arm assembly 722L. As seen in Figures 7A and 7C, the access slots may define the upper and lower surfaces of the outdoor wall to mount the stator sleeves 714HV, 714HL of the upper and lower drive members 728V, 728L, respectively.

12A-12C, which are perspective, side cross-sectional and bottom views of other embodiment transport chamber components 1114T. The delivery chamber component 1114T can be similar to the delivery chamber component 714T unless otherwise noted. Component 1114T can include a delivery device with arm members 1122U, 1122L and 1124, 1126. The arm assemblies 1124 and 1126 are generally similar to the arms 724, 726 previously shown in Figure 7A and can be coupled to and The drive member 728 is similar to the drive member 1128 previously described. In an embodiment, the arm assemblies 1122U, 1122L are generally similar to the arm assemblies 722U, 722L and are coupled to the drive member 1228 having the motors 1240, 1242, 1244, 1246 to rotate the T1, T2, T3, T4 axes (see Figure). 12D). 13B and 14, the motors of the drive member 1228 are stacked and all placed on one side of the arm members 1122U, 1122L (as follows). In an embodiment, the arm member can be coupled to the rotor ferrules 1244R, 1246R by a hinged bridge portion 1123, as shown in Figure 13A. In other embodiments, the arm members can be associated with the rotor ferrule in any other desired manner.

It should be understood that the embodiments set forth herein may be used alone or in combination. It should also be understood that the above description is directed only to the present embodiment. Those skilled in the art and those skilled in the art can propose various aspects and modifications in this embodiment. Accordingly, the present embodiments are intended to cover all such modifications, modifications, and modifications

10‧‧‧Substrate processing unit

12‧‧‧Interface area

14‧‧‧Processing area

12L‧‧‧Loading equipment

12T‧‧‧ conveying device

14T‧‧‧Transport room

14M‧‧‧Processing Module

16‧‧‧Load lock

14T1, 14T2‧‧‧ delivery room

20, 22‧‧‧Conveying equipment

24, 26‧‧‧ arm components

28‧‧‧Drive parts

30R, 30L‧‧‧ arm link

34, 36‧‧‧ base part

32L, 32R‧‧‧ external ring joint

1 is a plan view of a substrate processing apparatus according to the present invention; FIGS. 2A-2C are respectively a perspective view, a side cross-sectional view, and a bottom view of a portion of the transfer chamber; and FIGS. 3A-3C are respectively a perspective view, a partial perspective view, and a side cross-sectional view of the transport apparatus; 4A-4C respectively show a perspective view, a partial perspective view and a side cross-sectional view of the conveying device; FIG. 5 is a perspective view of the driving portion; FIG. 6 is a partial perspective view of the stator and the rotor of the driving portion of FIG. 5; FIG. 7A-7C A perspective view, a side cross-sectional view, and a bottom view of the conveying chamber portion are respectively displayed; 8A-8C are respectively a perspective view, a partial perspective view and a side cross-sectional view of the conveying apparatus; Fig. 9 is a sectional view showing a typical rotor of the conveying apparatus of Fig. 8A; Fig. 10 is a partial perspective view of the motor; Shown as a transport device, a portion of which is shown in FIG. 9; FIGS. 12A-12C respectively show a perspective view, a side cross-sectional view and a bottom view of the transport device; FIGS. 13A-13C respectively show a perspective view, a partial perspective view and a side cross-sectional view of the transport device; Fig. 14 is a perspective view showing the driving portion.

10‧‧‧Substrate processing unit

12‧‧‧Interface area

12L‧‧‧Loading equipment

12T‧‧‧ conveying device

14‧‧‧Processing area

14T‧‧‧Transport room

14M‧‧‧Processing Module

16‧‧‧Load lock

14T1, 14T2‧‧‧ delivery room

20, 22‧‧‧Conveying equipment

Claims (8)

A substrate conveying apparatus comprising: an outer wall having an inner surface defining a substrate conveying chamber capable of accommodating the insulating gas; and at least one annular motor having the inner surface and the adjacent outer side of the outer wall At least one stator module and at least one rotor that is magnetically suspended in the substrate transfer chamber without contact such that a surface of the outer wall surrounded by the ring motor is constructed to be coupled to the flow device; and at least one substrate transfer arm Connected to the at least one rotor and having at least one end effector constructed to support at least one substrate. The substrate transport apparatus of claim 1, wherein the at least one stator module is located in a side or a bottom of the outer wall. The substrate transport apparatus of claim 1, wherein the flow device comprises a vacuum system. The substrate transport apparatus of claim 1, wherein the at least one substrate transport arm comprises two transport arms that are extendable in substantially opposite directions. The substrate transport apparatus of claim 1, wherein the at least one substrate transport arm comprises two transport arms that are extendable in substantially the same direction. The substrate transport apparatus of claim 1, wherein the at least one substrate transport arm comprises two independently rotatable transport arms each rotatable about a center of rotation of each of the at least one rotor. The substrate transport apparatus of claim 1, wherein at least one set of stator modules are removably coupled to the outer wall. The substrate transfer device of claim 1, further comprising a position feedback system The position feedback system includes at least one sensor located within the at least one stator module and a sensor track located on the at least one rotor.