TWI512420B - Fluid supply adjustment device - Google Patents

Description

Fluid supply amount adjusting device

The present invention relates to a fluid supply amount adjusting device, and more particularly to a fluid supply amount adjusting device used for controlling supply flow rate when various chemical liquids of a semiconductor manufacturing device are mixed.

When a fluid such as a chemical solution for cleaning and etching of a wafer is supplied to a semiconductor or the like, the fluid is required to have a high degree of cleanliness. In the International Semiconductor Technology Development Blueprint (ITRS), the manufacturing of the wiring pitch of 32 nm has been officially (really) started in 2010, and it is planned to further narrow the wiring width in the future. Therefore, it is very important to suppress the intrusion of dust from the flow path of the fluid as much as possible.

Now, the mainstream of enamel wafer cleaning is washed by a single piece. Therefore, it is necessary to supply a very small amount of a chemical solution such as hydrofluoric acid with a correct precision and supply it with pure water and a mixture. In order to adjust such a small flow rate, for example, a regulating valve such as a needle valve (refer to Patent Document 1 or the like) and other regulating valves (refer to Patent Document 2 and the like) are used. The regulating valve of the patent document 1 and the like is mainly connected to the supply pipe of each chemical liquid in the upstream position of the mixing portion of the chemical liquid and the pure water (refer to Patent Document 3 and the like).

The existing regulating valve for the micro flow rate has a valve body and a valve seat for adjusting the opening degree of the diaphragm. Therefore, the fluid in the valve chamber of the regulator valve is affected by the pressure fluctuation occurring on the downstream side of the regulator valve (including the supply of the fluid, the supply stop, and the like). In the construction of the regulating valve, since the diaphragm faces the valve chamber, even if there is a slight pressure fluctuation, the pressure applied to the diaphragm changes, and the position of the valve body connected to the diaphragm also changes. That is, the opening of the valve seat changes.

With the method of responding to the change in the opening degree of the valve seat caused by such a pressure fluctuation, a regulating valve having a structure in which two diaphragms are disposed facing each other in the valve chamber and the two diaphragm shaft portions are connected is proposed. (Reference Patent Document 4). However, in the case of the regulating valve of Patent Document 4, since the aforementioned shaft portion in the valve chamber is inserted, it is difficult to reduce the valve chamber diameter. Therefore, it is not suitable for the adjustment of the small traffic domain. Further, if the shaft portion is processed, assembled, or swayed during operation, there is a possibility that the shaft portion comes into contact with the valve chamber hole during operation to generate dust.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-68935

[Patent Document 2] Japanese Patent No. 4365477

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2008-258437

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2007-24069

The present invention has been made in view of the above problems, and provides a flow rate adjusting valve portion including a diaphragm that can suppress a change in opening degree of a valve seat in the flow rate adjusting valve portion due to a pressure fluctuation of a controlled fluid, and can suppress dust as much as possible. A fluid supply amount adjusting device that produces and is suitable for flow regulation of a small flow field.

In other words, the invention of claim 1 is a fluid supply amount adjusting device, which is a flow rate adjusting device for adjusting a supply flow rate of a controlled fluid in a flow rate range of 150 mL/min or less, and includes a flow rate adjusting valve portion. Is connected to a fluid pipe between the supply portion of the fluid to be controlled and the fluid mixing portion to adjust the flow rate of the fluid to be controlled; and the pressure control valve portion is for suppressing pressure fluctuation occurring in the fluid to be controlled; and a flow rate sensor; Provided in the fluid pipe; and a calculation device; and the calculation device is a feedback control based on the flow rate measurement value of the flow sensor, wherein the flow rate adjustment valve portion includes: a valve chamber housing portion a first flow path portion and a second flow path portion through which the controlled fluid passes, and a valve chamber that connects the first flow path portion and the second flow path portion to allow the controlled fluid to flow; and a valve a valve chamber opening portion is formed in a flat shape, and the first flow path portion has a diameter of 1 mm or less with respect to the valve chamber in the valve chamber casing portion; and the flat valve body includes the valve seat a sealing portion that is removably sealed and formed in a flat shape; and a valve mechanism body that is formed on a side opposite to the sealing portion side and that includes a diaphragm portion that is attached to the valve chamber side; The distance between the flat valve portion and the valve seat is adjusted by the feedback control by the calculation device, and the distance between the flat valve portion and the valve seat is adjusted, and the pressure control valve portion is provided on the second flow path portion side to suppress the The pressure fluctuation that occurs when the fluid is applied to the diaphragm portion is controlled.

The invention of claim 2 is the fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, and the pressure control valve portion is A pressure control valve for fluid pressure of the fluid to be controlled on the upstream side of the pressure control valve portion can be surely held.

The fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, and the pressure control valve portion is A pressure control valve for fluid pressure of the fluid to be controlled on the upstream side of the pressure control valve portion is fixedly held, and the pressure control valve portion is formed in the flow rate adjustment valve portion.

The fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is an upstream side of the flow rate adjusting valve portion, and the pressure control valve portion is A pressure control valve for fluid pressure of the fluid to be controlled on the downstream side of the pressure control valve portion can be surely held.

The invention of claim 5 is the fluid supply amount adjusting device according to the first aspect of the invention, wherein the forward/backward means is a pressure regulating gas which is produced by an electropneumatic converter using feedback according to the calculation means.

The invention of claim 6 is the fluid supply amount adjusting device according to the first aspect of the invention, wherein the forward/backward means is a stepping motor controlled by the motor control board after being subjected to feedback control by the computing device.

The fluid supply amount adjusting device according to the invention of claim 1 is a fluid supply amount adjusting device, and is a flow rate adjusting device for adjusting a supply flow rate of a controlled fluid in a minute flow region of 150 mL/min or less. The flow regulating valve unit is connected to a fluid pipe between the supply unit and the fluid mixing unit of the controlled fluid to adjust the flow rate of the controlled fluid; and the pressure control valve unit is configured to suppress a pressure fluctuation occurring in the controlled fluid; And the flow sensor is disposed in the fluid pipe; and the calculating device; and the calculating device is a feedback control according to the flow rate measurement value of the flow sensor, wherein the flow regulating valve portion is provided The valve chamber casing portion is formed with a first flow path portion and a second flow path portion through which the controlled fluid passes, and the first flow path portion and the second flow path portion are connected to allow the controlled fluid to flow. a valve chamber opening; a valve chamber opening portion is formed in a flat shape; and the first flow path portion has a diameter of 1 mm or less with respect to the valve chamber in the valve chamber housing portion; and The valve body includes a seal portion that can seal the valve seat in a releasable manner, and the seal portion is formed in a flat shape; and the valve mechanism body is formed on the opposite side of the seal portion side and is provided in the valve chamber The side diaphragm portion and the advancing and retracting means adjust the distance between the flat valve portion and the valve seat by the forward and backward movement of the valve mechanism body by feedback control by the computing device; and on the second flow path portion side The pressure control valve portion is provided to suppress fluctuations in pressure generated when the controlled fluid is applied to the diaphragm portion, so that the flow rate adjusting valve portion including the diaphragm can be prevented from being subjected to pressure fluctuation of the controlled fluid to cause the flow rate adjusting valve The change in the opening of the valve seat in the part. Further, it is possible to suppress the generation of dust from the structure of the valve body as much as possible, and it is possible to obtain a fluid supply amount adjusting device suitable for flow rate regulation in a small flow rate region and suppressing generation of dust.

In particular, the fluid supply amount adjusting device of the present invention is intended to adjust the supply flow rate of the controlled fluid in the small flow rate range, thereby ensuring that the flow rate adjusting valve portion is affected by the fluctuation of the fluid pressure of the controlled fluid. Control the correctness of the supply of fluid.

The fluid supply amount adjusting device according to the invention of claim 2, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, the pressure The control valve portion is a pressure control valve for constantly maintaining the fluid pressure of the fluid to be controlled on the upstream side of the pressure control valve portion, so that the flow regulating valve portion can be reduced from flowing down the flow regulating valve portion of the fluid supply amount adjusting device. The influence of fluctuations in the fluid pressure of the controlled fluid occurring on the side.

The fluid supply amount adjusting device according to the invention of claim 3, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, and the pressure is The control valve portion is a pressure control valve for holding the fluid pressure of the fluid to be controlled on the upstream side of the pressure control valve portion, and the pressure control valve portion is formed in the flow rate adjusting valve portion, so that the flow rate adjusting valve portion can be reduced. The fluctuation of the fluid pressure of the fluid to be controlled on the downstream side of the flow rate adjusting valve portion in the fluid supply amount adjusting device is affected. Further, the volume of the device itself can be suppressed and the installation place can be reduced.

The fluid supply amount adjusting device according to the invention of claim 4, wherein the second flow path portion side is an upstream side of the flow rate adjusting valve portion, the pressure The control valve portion is a pressure control valve for constantly maintaining the fluid pressure of the fluid to be controlled on the downstream side of the pressure control valve portion, so that the flow regulating valve portion can be reduced from being subjected to the flow regulating valve portion of the fluid supply amount adjusting device. The influence of fluctuations in the fluid pressure of the controlled fluid occurring on the side.

The fluid supply amount adjusting device according to the invention of claim 5, which is the invention of claim 1, wherein the advance and retreat means is performed by an electropneumatic converter using feedback control according to the foregoing calculating means The gas is regulated, so that the power supply to the electropneumatic converter can be maintained in a safe position when stopped.

The fluid supply amount adjusting device according to the invention of claim 6 is the invention according to claim 1, wherein the forward/backward means is a step controlled by the motor control substrate after being subjected to feedback control by the computing device Into the motor, so it is easy to control the absolute or relative position. Moreover, the adjustment of the opening degree can be performed even in the case of no compressed air device.

The schematic view of Fig. 1 is a single-chip substrate processing apparatus that displays a single wafer W1. The fluid supply amount adjusting devices 5A, 5B, and 5C of the present invention are mainly incorporated in the disclosed substrate processing apparatus. The wafer W is a rotating disk placed on the spin disk 1. The processing liquid nozzle 2 that discharges the processing liquid is provided directly on the crucible wafer W. The processing liquid such as the cleaning of the silicon wafer is supplied to the processing liquid nozzle 2 through the fluid pipe 3 . The controlled fluid can be exemplified by a chemical solution such as hydrofluoric acid, hydrochloric acid or ammonia. In the drawing, the types of the chemical liquid are stored in the supply units 9A, 9B, and 9C, respectively, and sequentially flow through the fluid pipes 3a, 3b, and 3c. Each of the chemical liquids is stored in the supply unit 14 and mixed with pure water (including warm pure water) supplied from the fluid pipe 15 in the fluid mixing unit 4 in accordance with a predetermined ratio, and then supplied to the fluid pipe 3.

As shown in the figure, each of the chemical liquids to be controlled fluids is provided with a fluid supply amount adjusting device for controlling the flow rate of the chemical liquid, stopping the supply, or supplying the liquid. Since the fluid supply amount adjusting devices in the respective fluid pipes 3a, 3b, and 3c have the same configuration, only the fluid supply amount adjusting device 5A is representative, and the configuration of the device will be described in order. The fluid supply amount adjusting device 5A is connected to the fluid pipe 3a between the supply portion 9A of the controlled fluid (chemical liquid) and the fluid mixing portion 4. The flow rate adjusting valve portion 10A for adjusting the flow rate of the controlled fluid is connected to the fluid supply amount adjusting device 5A. The pressure control valve portion 20A for suppressing the fluctuation of the fluid pressure generated by the controlled fluid in the fluid pipe 3a is also connected to the same fluid pipe 3a. Further, a flow rate sensor 6A (flow meter) for detecting the flow rate of the controlled fluid (medicine solution) in the fluid pipe 3a is also provided.

The detection signal from the flow sensor 6A is signaled to the computing device 7A (PLC: programmable logic controller) via the signal line s. The calculation device 7A is a calculation for performing feedback control corresponding to the detection result of the flow sensor 6A described above. The flow rate adjustment of the flow rate adjusting valve portion 10A is performed in accordance with the result of the control calculation of the feedback control. Since the flow rate adjustment uses feedback control, the reaction speed is fast when the flow rate is switched, and further accurate and stable flow rate adjustment can be performed.

In the flow rate adjusting valve unit 10A or the like, when the opening degree of the valve portion is adjusted by a pressure regulating gas (see FIG. 2 and the like), the pressure regulating gas controlled by the calculating device 7A is provided. Electropneumatic converter 8A (electropneumatic regulator). In the fluid supply amount adjusting devices 5B and 5C, the flow regulating valve portions 10B and 10C, the pressure control valve portions 20B and 20C, the flow sensor sensors 6B and 6C in the fluid pipes 3b and 3c, and the calculation device 7B, The connection of 7C and electropneumatic converters 8B and 8C is also the same. Further, the flow rate adjusting valve portion 10K of Fig. 3 includes a motor control board 8R for making a drive current for each phase of the motor. The same is true in Figure 6. In Fig. 1, reference numeral 11 is a flow rate sensor in a fluid pipe 15 of pure water (including warm pure water), 12 is a flow rate control valve portion, and 13 is a pressure control valve portion.

In particular, the fluid supply amount adjusting device 5A is a fine adjustment of the supply flow rate of the controlled fluid (chemical liquid) used in a minute flow rate range of 150 mL/min or less and further 5 to 20 mL/min. Further, from the 5B and 5C shown in the drawings, the fluid supply amount adjusting device disclosed in the following embodiments is similarly used for adjusting the supply flow rate of the controlled fluid (chemical liquid) in the minute flow rate range.

The fluid supply amount adjusting device 5A (first embodiment) for adjusting the supply flow rate of the controlled fluid in the small flow rate field, the flow rate adjusting valve portion 10A and the pressure control valve portion in the same device 5A will be described using the cross-sectional view of Fig. 2 The construction of 20A.

The flow rate adjusting valve portion 10A mainly consists of three parts of the valve chamber housing portion 101, the outer casing portion 102, and the intermediate casing portion 103 that connects the valve chamber housing portion 101 and the outer casing portion 102. .

The valve chamber casing portion 101 includes a first flow path portion 111 and a second flow path portion 112 through which a controlled fluid (medicine liquid) passes. A valve chamber 110 that is connected to the first flow path portion 111 and the second flow path portion 112 and that allows the controlled fluid to flow is formed. In the flow rate adjusting valve portion 10A of the fluid supply amount adjusting device 5A of Fig. 2, the first flow path portion 111 side is the upstream side (supply portion side), and the second flow path portion 112 side is the downstream side (fluid mixing portion side). ). Reference numeral 113 in the figure is a first flow path connecting portion, and 114 is a second flow path connecting portion.

In the valve chamber casing portion 101, the first flow path portion 111 is a valve chamber opening portion 116 having a diameter of 1 mm ( Φ 1 mm) or less with respect to the valve chamber 110. The opening end toward the valve chamber 110 side of the valve chamber opening portion 116 is a valve seat 115 which is formed in a flat shape. A sealing portion 121 that can seal the valve seat 115 forward and backward on the valve seat 115 is provided. The sealing portion 121 is formed in a flat shape, and the sealing portion 121 is disposed in the flat valve body 122. In the case of a conventional needle valve, the valve body and the valve seat side are brought into contact due to the tolerance of the member itself, the deviation of the shaft during manufacture and assembly, and the valve seat, the valve body, and the like are cut to open the valve seat. The amount will change, so there is a problem that it is easy to change with this flow. At this point, in the relationship between the sealing portion 121 of the flat valve body 122 and the valve seat 115, the influence of the shaft deviation is alleviated, and as a result, it is possible to suppress the occurrence of dust as the flat valve body 122 moves forward and backward.

The diaphragm portion 123 is formed on the side opposite to the sealing portion 121 side of the flat valve body 122 so as to face the valve chamber 110 side. In the embodiment, the valve body 120 is formed such that the flat valve body 122 and the diaphragm portion 123 are integrally formed. Different from the illustration, the flat valve body and the diaphragm portion may be composed of separate components. A diaphragm edge portion 124 is formed around the diaphragm portion 123. Since the diaphragm edge portion 124 is held by the valve chamber housing portion 101 and the intermediate housing portion 103, the valve mechanism body 120 is disposed at a predetermined position of the valve chamber 110. The breathing path 105 is also formed in the intermediate casing portion 103, and the air used for the back side of the diaphragm portion 124 flows in.

The valve mechanism body 120 is connected to the piston lower portion 132 of the piston portion 131 through the valve body connecting portion 125 at the upper portion thereof. As shown in the figure, a through portion in which the piston portion 131 is slidable is formed in the intermediate casing portion 103. A piston portion 131 and a spring 135 are housed in the outer casing portion 102 of the upper portion of the intermediate casing portion 103. The spring 135 urges the piston portion 131 in the pressing direction through the piston head portion 133 of the piston portion 131.

Further, an air port 104 is formed in the outer casing portion 102, so that the pressure regulating gas by the electropneumatic converter 8A flows into the air chamber 134 in the outer casing portion 102. The outflow amount of the pressure regulating gas is that the calculating means 7A controls the adjusting electropneumatic converter 8A based on the calculation result of the feedback control of the detection result of the corresponding flow sensor 6A. Further, it is also controlled by the operator to stop the supply of the controlled fluid or to supply the reopening.

As illustrated, the space within the outer casing portion 102 is zoned by the piston head 133 into an air chamber 134 and a spring chamber 136. Therefore, if the internal pressure of the air chamber 134 rises, the piston portion 131 and the valve mechanism body 120 connected thereto can be lifted against the biasing force of the spring 135, and the distance between the sealing portion 121 of the flat valve body 122 and the valve seat 115 can be increased. Expand to increase the opening of the valve seat 115.

Conversely, when the internal pressure of the air chamber 134 is lowered, the biasing force of the spring 135 is strong, and the piston portion 131 and the valve mechanism body 120 connected thereto are lowered. That is, the distance between the sealing portion 121 of the flat valve body 122 and the valve seat 115 is narrowed, and further, the flat valve body 122 is in contact with the valve seat 115.

As is apparent from the drawings and the description, in the flow rate adjusting valve portion 10A, the valve mechanism body 120 is advanced and retracted by the feedback control by the calculating device 7A, so that the distance between the flat valve portion 122 and the valve seat 115 is adjusted. The pressure regulating gas, the piston portion 131, and the spring 135 which are made by the electro-pneumatic converter 8A are used. Here, in the flow rate adjusting valve portion 10A of the embodiment, the pressure regulating gas, the piston portion 131, and the spring 135 are the advancing and retracting means 130. When the forward/backward driving of the pressure-regulating gas is used, for example, even if the supply of the power to the electro-pneumatic converter 8A is stopped and there is no supply of the pressure-regulating gas, the state of the valve seat 115 can be maintained at a safe position.

The piston portion 131 is provided with an O-ring 137 formed of a durable material such as urethane rubber, NBR, HNBR, enamel rubber, or fluororesin rubber. Therefore, the airtightness of the air chamber 134 is ensured, and the forward and backward movement of the piston portion 131 is stabilized. The air in the spring chamber 136 flows in through the outer casing breathing path 106.

As shown in the first and second figures, the second flow path portion 112 side of the flow rate adjusting valve portion 10A is the downstream side. Here, the influence of the pressure fluctuation of the fluid to be controlled which is generated on the downstream side of the second flow path portion 112 of the flow rate adjusting valve portion 10A is transmitted to the valve chamber 110 of the flow rate adjusting valve portion 10A and the diaphragm portion 123. . In other words, the diaphragm portion 123 of the valve mechanism body 120 receives the pressure fluctuation of the controlled fluid from the second flow path portion 112 side. Since the diaphragm portion 123 is subjected to pressure fluctuation by a relatively wide area from the sealing portion 121, the distance between the sealing portion 121 of the flat valve body 122 and the valve seat 115 changes, and the opening degree of the valve seat 115 may change.

In order to cope with this, the fluid supply amount adjusting device 5A is provided with a pressure to suppress the pressure fluctuation of the controlled fluid applied to the diaphragm portion 123 on the second flow path portion 112 side of the flow rate adjusting valve portion 10A. The valve portion 20A is controlled. The pressure control valve unit 20A disclosed in FIG. 2 is a pressure control valve such as a negative pressure valve, and has a function of holding the fluid pressure of the fluid to be controlled on the upstream side of the pressure control valve unit 20A in a constant manner.

In the pressure control valve unit 20A, the valve chamber housing portion 201 includes a first flow path portion 211 and a second flow path portion 212 through which a controlled fluid (medicine solution) passes. At the same time, a valve chamber 210 that connects the first flow path portion 211 and the second flow path portion 212 and allows the controlled fluid to flow is formed. Reference numeral 213 in the figure is a first flow path connecting portion, and 214 is a second flow path connecting portion. The first flow path connecting portion 213 is connected to the second flow path connecting portion 114 of the flow rate adjusting valve portion 10A. Further, the connection form, the connection method, and the like of both of them can be appropriately changed. Further, the valve chamber casing portion 101 of the flow rate adjusting valve portion 10A and the valve chamber casing portion 201 of the pressure control valve portion 20A may be formed of an integrated package.

The connection portion between the second flow path portion 212 and the valve chamber 210 is a valve seat 215. A valve body 222 is disposed directly above the valve seat 215. The valve body 222 is provided with a sealing portion 221 that seals the valve seat 215 in a releasable manner.

On the side opposite to the sealing portion 221 side of the valve body 222, the diaphragm portion 223 is formed toward the valve chamber 210 side. In the pressure control valve portion 20A of the embodiment, the valve body 222 and the diaphragm portion 223 are integrally formed to form the valve mechanism body 220. Different from the illustration, the flat valve body and the diaphragm portion may be composed of separate components. A diaphragm edge portion 224 is formed around the diaphragm portion 223. Since the diaphragm edge portion 224 is held by the valve chamber housing portion 101 and the outer casing portion 202, the valve mechanism body 220 is disposed at a predetermined position of the valve chamber 210.

A housing chamber 228 is formed in the outer casing portion 202, and includes a spring 225 and a pressing block 226 that receives the pressing force of the spring 225. The pushing block 226 is coupled to the valve mechanism body 220. Normally, the sealing portion 221 of the valve mechanism body 220 is in contact with the valve seat 215 by the biasing force of the spring 225. When the controlled flow rate of the predetermined flow rate is supplied from the flow rate adjusting valve portion 10A on the upstream side of the pressure control valve portion 20A, and the load generated by the fluid pressure of the controlled fluid resists the pressing force of the spring 225, the sealing portion 221 The contact state with the valve seat 215 is released. Therefore, it becomes a controlled fluid that can deliver a predetermined fluid pressure. The breathing path 227 is also formed in the outer casing portion 202, and is used for the outflow of air on the back side of the diaphragm portion 223 (the pushing block 226).

Here, in the downstream side of the pressure control valve portion 20A, if the fluid pressure of the controlled fluid rapidly rises or falls, the fluctuation of the fluid pressure is directed to the valve chamber 210 of the pressure control valve portion 20A and the diaphragm portion. 223 passed. The mechanism body 220 is biased by the biasing force of the spring 225, and the diaphragm portion 223 can be transmitted to change the distance between the sealing portion 121 of the valve body 222 and the valve seat 215. Here, the pressure fluctuation on the downstream side of the pressure control valve portion 20A is adjusted by the valve mechanism body 220 controlling the change in the opening degree of the valve seat 215. In other words, the flow rate adjusting valve portion 10A is not affected by the pressure fluctuation on the downstream side of the pressure control valve portion 20A.

The cross-sectional view of Fig. 3 shows a flow rate adjusting valve portion 10K (second embodiment) which can replace the flow rate adjusting valve portions 10A, 10B, and 10C in each of the fluid supply amount adjusting devices 5A, 5B, and 5C of Fig. 1 . In the flow rate adjusting valve portion 10K of Fig. 3, the first flow path portion, the second flow path portion, the valve chamber, the valve seat, and the valve mechanism body further function, and essentially the flow regulating valve described above The same is true for the part 10A. Therefore, the same reference numerals as those of the flow rate adjusting valve portion 10A of Fig. 2 are added to the common portion.

In the flow rate adjusting valve portion 10K, the advancing and retracting means 130K for adjusting the distance between the sealing portion 121 of the flat valve portion 122 and the valve seat 115 by advancing and retracting the valve mechanism body 120 is incorporated in the feedback control by the computing device 7R. The motor control board 8R is controlled by a stepping motor 140. The illustrated stepping motor 140 is housed above the intermediate casing portion 103. The outer casing portion 102 is covered so that the cover is formed, and the stepping motor 140 is fixed to the intermediate casing portion 103 by bolts 146.

The stepping motor 140 includes a stator 144 (electromagnet) serving as a fixed side and a rotor 141 (permanent magnet) serving as a rotating side, and the rotor 141 is rotated in accordance with the correct control of the rotation angle. Further, a motor shaft 142 (rotation shaft) having a hollow cylindrical shape is provided inside the rotor 141. The lifting shaft 151 is inserted into the motor shaft 142. A lifting shaft groove 152 is formed on the surface of the lifting shaft 151, and the lifting shaft groove 152 is screwed to the inner shaft threaded mountain 143 formed in the motor shaft 142. A pressing portion 153 is provided at a lower end of the lifting shaft 151.

The feedback control signal generated by the computing device 7R is signaled toward the motor control board 8R, and the pulse is outputted on the same motor control board 8R. Here, the rotor 141 in the stepping motor 140 rotates the motor shaft 142 by a predetermined angle as the predetermined angle is rotated. The amount of rotation of the motor shaft 142 is converted into an amount of movement in the vertical direction of the lift shaft 151 that is screwed to the motor shaft 142. As a result, the amount of movement of the pressing portion 153 in the vertical direction changes. Symbol 147 is wiring.

When the pressing portion 153 is lowered, the spring portion 135 placed on the upper portion of the piston portion 131 is lowered downward by the pressing portion 153, so that the piston portion 131 is lowered. Here, the sealing portion 121 of the flat valve body 122 of the valve mechanism body 120 connected to the piston portion 131 is close to the valve seat 115 and further comes into contact with each other. Conversely, when the pressing portion 153 is raised, the downward pressing force of the pressing portion 153 of the spring 135 is reduced. Here, the sealing portion 121 of the flat valve body 122 of the valve mechanism body 120 connected to the piston portion 131 is detached from the valve seat 115.

In the stepping motor 140, the motor shaft 142 that is interlocked with the rotor 141 by the electro-pneumatic signal is rotated. As a result, the spring load of the spring 135 can be slightly changed by the lifting shaft 151 and the pressing portion 153 which are screwed to the motor shaft 142. In the figure, symbol 145 is an origin sensor. By using a stepping motor, it is easy to perform absolute or relative position control, and it is also possible to finely adjust the spring load. Moreover, the adjustment of the opening degree can be performed even in the case of no compressed air device.

In the fluid supply amount adjusting device 5D (third embodiment) of the fourth embodiment, the pressure control valve unit 20D connected to the downstream side of the second flow path portion 112 of the flow rate adjusting valve portion 10A is applied to, for example, a negative pressure control valve. Pressure control valve device. The flow rate adjusting valve portion in the fluid supply amount adjusting device 5D may be any of 10A or 10K described above. It is 10A in the illustration. Since the configuration, operation, and the like of the flow rate adjusting valve portion 10A are as described in FIG. 2, detailed description thereof will be omitted.

For the structure of the pressure control valve portion 20D, please refer to Japanese Patent No. 3467438, US Pat. The pressure control valve portion 20D is mainly composed of an upper casing portion 301a, an intermediate casing portion 301b, and a lower casing portion 301c, and a flow path portion 302 is formed in the intermediate casing portion 301b.

The controlled fluid flows from the first flow path connecting portion 303 toward the first valve chamber 306 in the pressure control valve portion 20D. The first diaphragm portion 321 is disposed at a position facing the first valve chamber 306. The diaphragm edge portion 323 provided around the first diaphragm portion 321 is held by the upper casing portion 301a and the intermediate casing portion 301b, and the first diaphragm portion 321 is fixed. A first pressurizing chamber 308 is formed on the back side of the first diaphragm portion 321 . Here, the first diaphragm portion 321 is a pressing force that receives the pressure-regulating gas that flows into the first pressurizing chamber 308 from the air supply port 312 and is held in the same first pressurizing chamber. Symbol 314 is an exhaust port for a pressure regulating gas.

A vertical through-passage is formed in a central portion of the intermediate casing portion 301b, and a valve seat 305 is provided in the middle thereof. The controlled fluid reaches the second valve chamber 307 from the first valve chamber 306 via the valve seat 305. Then, it flows out from the second flow path connecting portion 304. As is clear from the arrangement of the flow rate adjusting valve portion 10A and the pressure control valve portion 20D in Fig. 4, the first flow path connecting portion 303 is the upstream side, and the second flow path connecting portion 304 is the downstream side.

The second diaphragm portion 322 is disposed at a position facing the second valve chamber 307. The diaphragm edge portion 324 provided around the second diaphragm portion 322 is held by the intermediate housing portion 301b and the lower housing portion 301c, and the second diaphragm portion 322 is also fixed. A second pressurizing chamber 309 is formed on the back side of the second diaphragm portion 322. Here, the second diaphragm portion 322 is urged by the second spring 311. Reference numeral 313 is a breathing path for air in the second pressurizing chamber 309, and 325 is a holding member.

The first diaphragm portion 321 and the second diaphragm portion 322 are connected by the valve portion 320 to form the valve mechanism body C1. The distance (proximity, isolation, and contact) between the valve portion 320 of the valve mechanism body C1 and the valve seat 305 is adjusted by the pressing force of the pressure-regulating gas flowing into the first pressurizing chamber 308 from the air supply port 312. In this embodiment, the optimum opening degree adjustment of the valve portion 320 and the valve seat 305 can be performed in accordance with the detected flow rate of the flow rate sensor and the flow rate after the setting change. In the pressure control valve portion 20D, the first diaphragm portion 321 is pressurized by the pressure-regulating gas, and the second diaphragm portion 322 is biased by the second spring 311. However, the diaphragm is not limited thereto. For the part, the pushing by the spring or the pushing and pressing by the spring and the regulating gas can be appropriately selected.

The pressure change of the fluid to be controlled which is the downstream side of the pressure control valve portion 20D first acts on the second diaphragm portion 322. Since the first diaphragm portion 321 and the second diaphragm portion 322 are provided and connected to each other, the first diaphragm portion 321 also moves along with the valve portion 320 as the second diaphragm portion 322 side changes. As a result, the two diaphragm portions are respectively subjected to the fluid pressure of the fluid to be controlled, and the valve portion 320 is moved to a position where both of them are equalized, and the opening degree of the valve seat 305 of the pressure control valve portion 20D changes. In this case, the influence of the pressure fluctuation of the control fluid in the pressure control valve unit 20D is absorbed, and as a result, the pressure fluctuation of the controlled fluid covered by the flow rate adjustment valve unit 10A that is upflowed by the pressure control valve unit is inhibition.

In the fluid supply amount adjusting device 5E (fourth embodiment) of Fig. 5, the pressure control valve unit itself such as a safety valve is assembled to the inside of the flow rate adjusting valve portion as disclosed in Fig. 2 and the like. That is, it may be referred to as a composite regulating valve portion (5E) that combines the flow rate adjusting valve portion and the pressure control valve portion. In the fluid supply amount adjusting device 5E of Fig. 5, a flow rate adjusting valve portion 10E for adjusting the flow rate of the controlled fluid is formed on the upper side. Further, a pressure control valve portion 20E that can hold the pressure fluctuation of the controlled fluid at a constant level is also formed on the lower side. The flow rate adjusting valve portion 10E and the pressure control valve portion 20E of the fluid supply amount adjusting device 5E can be directly exchanged with the flow rate adjusting valve portion 10A and the pressure control valve portion 20A in the fluid supply amount adjusting device 5A disclosed in Fig. 2 . Since the flow rate adjusting valve portion 10E basically has the same configuration as the above-described flow rate adjusting valve portion 10A, the same reference numerals are used for the common structural portions.

The fluid supply amount adjusting device (combination regulating valve portion) 5E includes a valve chamber casing portion 101 in which a flow path for the fluid to be controlled is formed, and the advancing and retracting means 130 (piston portion 131) can be moved forward and backward. The outer casing portion 102 that is housed and the intermediate casing portion 103 that connects the valve chamber casing portion 101 and the outer casing portion 102 are further provided with a bottom outer casing portion 107 directly below the valve chamber casing portion 101. .

In the entire fluid supply amount adjusting device 5E, the first flow path connecting portion 113 is on the upstream side, and the controlled fluid flows in, and the second flow path connecting portion 114 is on the downstream side to allow the controlled fluid to flow out. In the valve chamber casing portion 101, a first flow path portion 111 and a second flow path portion 172 (control side flow path portion) through which the controlled fluid passes, and the controlled fluid from the first flow path portion 111 are formed. The first valve chamber 110 that has flowed in, and the second valve chamber 170 that allows the controlled fluid to flow out toward the second flow path portion 172.

In the valve chamber casing portion 101, the first flow path portion 111 is a valve chamber opening portion 116 having a diameter of 1 mm ( Φ 1 mm) or less with respect to the first valve chamber 110. The opening end toward the valve chamber 110 side of the valve chamber opening portion 116 is a valve seat 115 which is formed in a flat shape. Further, the valve chamber casing portion 101 is also formed in a second valve seat 175 that opens the second flow path portion 172 toward the second valve chamber 170, and connects the first valve chamber 110 and the second valve chamber 170. Internal flow path portion 171. In the configuration of the flow rate adjusting valve portion 10E, the internal flow path portion 171 is the second flow path portion 112 corresponding to the second drawing. Further, in the configuration of the pressure control valve unit 20E, the internal flow path portion 171 corresponds to the first flow path portion 211 of Fig. 2 .

The first flat valve body 122 is disposed directly above the first valve seat 115. The first flat valve body 122 is provided with a first sealing portion 121 that can seal the first valve seat 115 in a releasable manner, and the first sealing portion 121 is also formed in a flat shape. The first diaphragm portion 123 is provided on the side opposite to the first seal portion 121 side of the first flat valve body 122 so as to face the first valve chamber 110 side. In the embodiment, the first flat valve body 122 and the first diaphragm portion 123 are integrally formed to form the first valve mechanism body 120. The first diaphragm edge portion 124 is formed around the first diaphragm portion 123. Since the first diaphragm edge portion 124 is held by the valve chamber housing portion 101 and the intermediate housing portion 103, the first valve mechanism body 120 is disposed at a predetermined position of the valve chamber 110. The breathing path 105 is also formed in the intermediate casing portion 103, and the air used for the back side of the first diaphragm portion 124 flows in.

The first valve mechanism body 120 is connected to the piston lower portion 132 of the piston portion 131. A through portion in which the piston portion 131 is slidable is formed in the intermediate casing portion 103. The piston portion 131, the piston portion 131, and the first spring 135 are housed in the outer casing portion 102 of the upper portion of the intermediate casing portion 103. The first spring 135 urges the piston portion 131 in the pressing direction through the piston head portion 133 of the piston portion 131.

An air port 104 is formed in the outer casing portion 102, so that the pressure-regulating gas by the electropneumatic converter 8A flows into the air chamber 134 in the outer casing portion 102. The inflow amount of the pressure-regulating gas is controlled by the computing device 7A in accordance with the calculation result of the feedback control of the detection result of the corresponding flow sensor 6A to adjust the electro-pneumatic converter 8A. Further, it is also controlled by the operator to stop the supply of the controlled fluid or to supply the reopening. In the flow rate adjusting valve unit 10E of the fluid supply amount adjusting device 5E, the first flat valve portion 122 and the first valve are also subjected to the feedback control by the calculating device 7A by advancing and retracting the first valve mechanism body 120. The distance of the seat 115 is adjusted by the pressure regulating gas, the piston portion 131, and the first spring 135 which are made by the electropneumatic converter 8A. Here, in the flow rate adjusting valve portion 10E of the embodiment, the pressure regulating gas, the piston portion 131, and the first spring 135 constitute the advancing and retracting means 130.

In the pressure control valve portion 20E, the second flat valve body 182 is also disposed directly below the second valve seat 175. The second flat valve body 182 includes a second seal portion 181 that can seal the second valve seat 175 in a releasable manner, and the second seal portion 181 is also formed in a flat shape. The second diaphragm portion 183 is formed toward the second valve chamber 170 side on the side opposite to the second seal portion 181 side of the second flat valve body 182. In the embodiment, the second flat valve body 182 and the second diaphragm portion 183 are also integrally formed to form the second valve mechanism body 180. A second diaphragm edge portion 184 is formed around the second diaphragm portion 183. Since the second diaphragm edge portion 184 is held by the valve chamber housing portion 101 and the bottom housing case portion 107, the second valve mechanism body 180 is also disposed at a predetermined position of the second valve chamber 170. In the embodiment, the second flat valve body 182 is illustrated as being flat, but is not limited to this embodiment.

A housing chamber 176 is formed in the bottom outer casing portion 107, and includes a second spring 185 and a second urging block 186 that receives the urging force of the second spring 185. The second pressing block 186 is connected to the second valve mechanism body 180. The second seal portion 181 of the second valve mechanism body 180 is constantly in contact with the second valve seat 175 by the biasing force of the spring 185. When the fluid to be controlled is supplied from the internal flow path portion 171 of the flow rate adjusting valve portion 10E which is the upstream side of the pressure control valve portion 20E, and the fluid pressure of the controlled fluid is pressed against the biasing force of the second spring 185, The contact state of the second seal portion 181 and the second valve seat 175 is released. Therefore, it becomes a controlled fluid that can deliver a predetermined fluid pressure. A breathing passage 108 is formed in the bottom outer casing portion 107, and is used for the outflow of air on the back side of the second diaphragm portion 183 (the pushing block 186).

In the fluid supply amount adjusting device 5E, since the needle valve shape is not used, the influence of the shaft misalignment is reduced as described above, and the forward and backward movements of the first flat valve body 122 and the second flat valve body 182 can be suppressed. Dust has occurred. In the fluid supply amount adjusting device 5E of the embodiment, by combining the flow rate adjusting valve portion 10E and the pressure control valve portion 20E having different functions in one device, the volume of the device itself can be suppressed, and the installation place can be reduced.

The fluid supply amount adjusting device 5F (fifth embodiment) of Fig. 6 is also a device in which the pressure control valve unit itself such as a safety valve is incorporated in the flow regulating valve portion disclosed in Fig. 2 and the like. Similarly, it may be referred to as a composite regulating valve portion (5F) that combines the flow regulating valve portion and the pressure control valve portion. In the fluid supply amount adjusting device 5F of Fig. 6, a flow rate adjusting valve portion 10F for adjusting the flow rate of the controlled fluid is formed on the upper side. Further, a pressure control valve portion 20F for holding the pressure fluctuation of the fluid to be controlled constant is also formed on the lower side. Therefore, the flow rate adjusting valve portion 10F and the pressure control valve portion 20F have the same configuration as the above-described flow rate adjusting valve portion 10E and pressure control valve portion 20E. Therefore, the same reference numerals are used for the common structural portions, and the description is omitted.

In the fluid supply amount adjusting device 5F of Fig. 6, the advancing and retracting means (pressure regulating gas, piston portion, and first spring) in the fluid supply amount adjusting device 5E disclosed in Fig. 5 described above are changed to receive The feedback control of the computing device 7R is based on the configuration of the advance/reverse means 130L of the stepping motor 140 controlled by the motor control board 8R. Since the internal configuration and operation of the stepping motor 140 in the figure are as described in the third embodiment, the same reference numerals are used for the common structural portions, and the description thereof is omitted.

Fig. 7 is a schematic view partially showing a substrate processing apparatus in which another fluid supply amount adjusting device of the present invention is incorporated. In the same figure, the fluid to be controlled flows from the supply unit 9G in the order of the flow rate sensor 6G, the pressure control valve unit 20G, and the flow rate adjustment valve unit 10G, and is fluidly mixed in the fluid mixing unit 4 according to a predetermined ratio. Water (warm pure water) or the like is mixed and prepared, and is supplied to the fluid pipe 3. The fluid supply amount adjusting device 5G shown in the drawing has a configuration in which the flow rate adjusting valve portion and the pressure control valve portion are reversed as compared with the case of the device of the first embodiment described above.

The arrangement of the flow rate adjusting valve portion and the pressure control valve portion connected to the fluid pipe can be flexibly set corresponding to the pipe configuration. When the pressure fluctuation of the fluid to be controlled is received by the diaphragm portion, the pressure receiving area is wider than that of the sealing portion due to the pressure fluctuation of the fluid to be controlled, thereby greatly affecting the pressure fluctuation. The opening changes. Since it is necessary to suppress such a change in opening degree, the configuration of the fluid supply amount adjusting device 5G of Fig. 7 is also considered. Further, the configuration and function of the calculation device 7G and the electro-pneumatic transducer 8G (electropneumatic regulator) are the same as those of the device of the first embodiment described above.

Fig. 8 is a cross-sectional view showing a detailed pressure control valve unit 20G and a flow rate adjusting valve unit 10G of the fluid supply amount adjusting device 5G of Fig. 7 (sixth embodiment). In the flow rate adjusting valve portion 10G of the fluid supply amount adjusting device 5G, the configuration or even the action of the first flow path portion, the second flow path portion, the valve chamber, the valve seat, and the valve mechanism body is substantially the same as described above. The flow rate adjusting valve portion 10A is the same. Therefore, the same reference numerals as those of the flow rate adjusting valve portion 10A of Fig. 2 are attached to the common portions, and the details are omitted. The flow rate adjusting valve portion 10K (second embodiment) of the above-described third embodiment can also be applied to the direction of the flow path portion of the flow rate adjusting valve portion 10G as shown.

However, it is understood that the valve seat 115 is formed in the first flow path portion 111, and the valve chamber opening portion 116 having a diameter of 1 mm or less is formed in the valve chamber 110 of the flow rate adjusting valve portion 10G in a flat manner. . As described above, since the first flow path portion 111 forming the valve seat 115 is located on the side where the controlled fluid flows out from the valve chamber 110, it is the downstream side. Since the controlled fluid flows into the valve chamber 110 through the second flow path portion 112, the second flow path portion 112 side is the upstream side of the flow rate adjusting valve portion 10G in this embodiment. Here, the influence of the pressure fluctuation of the controlled fluid generated from the side of the second flow path portion 112 on the upstream side of the flow rate adjusting valve portion 10G is transmitted to the diaphragm facing the valve chamber 110 of the flow rate adjusting valve portion 10G. The portion 123 receives the pressure fluctuation of the controlled fluid from the second flow path portion 112 side of the diaphragm portion 123 of the valve mechanism body 120. In the same manner as described above, since the diaphragm portion 123 is subjected to pressure fluctuation in a relatively wide area from the sealing portion 121, the distance between the sealing portion 121 of the flat valve body 122 and the valve seat 115 is changed, and the opening degree of the valve seat 115 is possible. Variety.

Here, the fluid supply amount adjusting device 5G is provided with a pressure control valve portion 20G on the upstream side of the flow rate adjusting valve portion 10G. The pressure control valve portion 20G has a function of holding the fluid pressure of the fluid to be controlled on the downstream side thereof constant. In the fluid supply amount adjusting device 5G (sixth embodiment) of Fig. 8, a control valve such as a pressure reducing valve is applied to a pressure control valve portion connected to the upstream side of the first flow path portion 111 of the flow rate adjusting valve portion 10G. 20G device.

The configuration of the pressure control valve portion 20G that is connected to the upstream side of the flow rate adjusting valve portion 10G is, for example, Japanese Patent No. 2671831, Japanese Patent No. 3373144 (US Pat. No. 5,983,926), Japanese Patent No. 3,276,936 (US Pat. No. 6,919,582 B, EP 1014244B, DE69921434.3B). The pressure control valve disclosed herein. The pressure control valve portion 20G is mainly composed of an upper casing portion 401a, an intermediate casing portion 401b, and a lower casing portion 401c, and a flow path portion 402 is formed in the intermediate casing portion 401b.

The controlled fluid flows from the first flow path connecting portion 403 toward the first valve chamber 406 in the pressure control valve portion 20G. The first diaphragm portion 421 is disposed at a position facing the first valve chamber 406. The diaphragm edge portion 423 provided around the first diaphragm portion 421 is held by the intermediate housing portion 401b and the lower housing portion 401c, and the first diaphragm portion 421 is fixed. A first pressurizing chamber 408 is formed on the back side of the first diaphragm portion 421. Here, the first diaphragm portion 421 is urged by the first spring 410. Reference numeral 413 is a breathing path for air in the first pressurizing chamber 408.

A vertical through-passage is formed in a central portion of the intermediate casing portion 401b, and a valve seat 405 is provided in the middle thereof. The controlled fluid reaches the second valve chamber 407 from the first valve chamber 406 via the valve seat 405. Then, it flows out from the second flow path connecting portion 404. As is clear from the arrangement of the pressure control valve portion 20G and the flow rate adjusting valve portion 10G in Fig. 8, the first flow path connecting portion 403 is the upstream side, and the second flow path connecting portion 404 is the downstream side.

The second diaphragm portion 422 is disposed at a position facing the second valve chamber 407. The diaphragm edge portion 424 provided around the second diaphragm portion 422 is held by the upper case portion 401a and the intermediate case portion 401b, and the second diaphragm portion 422 is also fixed. A second pressurizing chamber 409 is formed in the back side of the second diaphragm portion 422. Here, the second diaphragm portion 422 receives a pressing force that flows into the second pressurizing chamber 409 from the air supply port 412 and is held in the same pressure chamber as the second pressurized chamber. Symbol 414 is an exhaust port for a pressure regulating gas.

The first diaphragm portion 421 and the second diaphragm portion 422 are connected to each other by the valve portion 420 to form the valve mechanism body C2. The distance (proximity, isolation, and contact) between the valve portion 420 and the valve seat 405 of the valve mechanism body C2 is adjusted by the pressing force of the pressure-regulating gas flowing into the second pressurizing chamber 409 from the air supply port 412. In this embodiment, the optimum opening degree adjustment of the valve portion 420 and the valve seat 405 can be performed in accordance with the detected flow rate of the flow rate sensor and the flow rate after the setting change. In the pressure control valve portion 20G, the first diaphragm portion 421 is biased by the first spring 410, and the second diaphragm portion 422 is formed by the pressure of the pressure-regulating gas. However, the diaphragm is not limited thereto. For the part, the pushing by the spring or the pushing and pressing by the spring and the regulating gas can be appropriately selected.

The first diaphragm portion 421 is firstly acted upon by the pressure fluctuation of the fluid to be controlled which is the upstream side of the pressure control valve portion 20G. The pressure control valve portion 20G includes the first diaphragm portion 421 and the second diaphragm portion 422. Since the two diaphragm portions are coupled to each other, the first diaphragm portion 421 also changes with the valve portion 420 along with the change of the second diaphragm portion 422 side. mobile. Since the two diaphragm portions are moved by the fluid pressure of the fluid to be controlled and the valve portion 420 is moved to the both sides, the opening degree of the valve seat 405 of the pressure control valve portion 20G changes. In this case, the influence of the pressure fluctuation of the controlled fluid in the pressure control valve unit 20G is absorbed, and as a result, the pressure fluctuation of the fluid to be controlled which is disposed in the downstream flow rate adjusting valve unit 10G of the pressure control valve unit is affected. Can be suppressed.

Up to this point, in the flow rate adjusting valve unit and the pressure control valve unit which are described in detail, the controlled fluid flowing inside is highly corrosive because it is mainly a chemical liquid. Therefore, the various casing portions of the valve chamber casing portion, the diaphragm portion and the valve portion (valve mechanism body) of each of the drawings are various fluororesins such as PTFE which are excellent in corrosion resistance and chemical resistance. It is formed and processed by cutting or the like.

1. . . Spin disk

2. . . Treatment liquid nozzle

3. . . Fluid piping

3a, 3b, 3c. . . Fluid piping

3g. . . Fluid piping

4. . . Fluid mixing department

5A, 5B, 5C. . . Fluid supply amount adjusting device

5D. . . Fluid supply amount adjusting device

5E. . . Fluid supply amount adjusting device

5F. . . Fluid supply amount adjusting device

5G. . . Fluid supply amount adjusting device

6A. . . Flow sensor

6B, 6C. . . Flow sensor

6G. . . Flow sensor

7A. . . Computing device

7B, 7C. . . Computing device

7G. . . Computing device

7R. . . Computing device

8A. . . Electric pneumatic converter

8B, 8C. . . Electric pneumatic converter

8G. . . Electric pneumatic converter

8R. . . Motor control board

9A, 9B, 9C. . . Supply department

9G. . . Supply department

10A, 10B, 10C. . . Flow regulating valve

10E. . . Flow regulating valve

10F. . . Flow regulating valve

10G. . . Flow regulating valve

10K. . . Flow regulating valve

13. . . Piston part

14. . . Supply department

15. . . Fluid piping

18. . . Push block

20A. . . Pressure control valve

20B, 20C. . . Pressure control valve

20D. . . Pressure control valve

20E. . . Pressure control valve

20F. . . Pressure control valve

20G. . . Pressure control valve

twenty two. . . Push block

101. . . Valve chamber housing

102. . . Housing part

103. . . Intermediate housing

104. . . Air port

105. . . Respiratory road

106. . . Shell breathing path

107. . . Bottom housing part

108. . . Respiratory road

110. . . Valve room

111. . . First flow path

112. . . Second flow path

113. . . First flow connection

114. . . Second flow connection

115. . . Seat

116. . . Valve chamber opening

120. . . Valve body

121. . . Sealing part

122. . . Flat valve body

123. . . Diaphragm

124. . . Diaphragm edge

125. . . Valve body connection

130. . . Advance and return means

130K. . . Advance and return means

130L. . . Advance and return means

131. . . Piston part

132. . . Lower piston

133. . . Piston head

134. . . Air room

135. . . spring

136. . . Spring chamber

137. . . O-ring

140. . . Stepper motor

141. . . Rotor

142. . . Motor shaft

143. . . Inner shaft threaded mountain

144. . . stator

146. . . bolt

151. . . Lifting shaft

152. . . Lifting shaft groove

153. . . Pushing department

170. . . Second valve chamber

171. . . Internal flow section

172. . . Second flow path

175. . . 2nd seat

176. . . Containment room

180. . . Second valve mechanism body

181. . . Second seal

182. . . Second flat valve body

183. . . Second diaphragm

184. . . Second diaphragm edge

185. . . Second spring

186. . . Second push block

201. . . Valve chamber housing

202. . . Housing part

210. . . Valve room

211. . . First flow path

212. . . Second flow path

213. . . First flow connection

214. . . Second flow connection

215. . . Seat

220. . . Valve body

221. . . Sealing part

222. . . Valve body

223. . . Diaphragm

224. . . Diaphragm edge

225. . . spring

226. . . Push block

227. . . Respiratory road

228. . . Containment room

301a. . . Upper housing

301b. . . Intermediate housing

301c. . . Lower housing

302. . . Flow path

303. . . First flow connection

304. . . Second flow connection

305. . . Seat

306. . . First valve chamber

307. . . Second valve chamber

308. . . First pressurizing chamber

309. . . Second pressurizing chamber

311. . . Second spring

312. . . Gas supply port

320. . . Valve department

321. . . First diaphragm

322. . . Second diaphragm

323. . . Diaphragm edge

324. . . Diaphragm edge

401a. . . Upper housing

401b. . . Intermediate housing

401c. . . Lower housing

402. . . Flow path

403. . . First flow connection

404. . . Second flow connection

405. . . Seat

406. . . First valve chamber

407. . . Second valve chamber

408. . . First pressurizing chamber

409. . . Second pressurizing chamber

410. . . First spring

412. . . Gas supply port

420. . . Valve department

421. . . First diaphragm

422. . . Second diaphragm

423. . . Diaphragm edge

424. . . Diaphragm edge

[Fig. 1] A schematic view of a substrate processing apparatus in which a fluid supply amount adjusting device of the present invention is incorporated.

[Fig. 2] A cross-sectional view of the fluid supply amount adjusting device of the first embodiment.

[Fig. 3] A cross-sectional view of a flow rate adjusting valve portion of the fluid supply amount adjusting device of the second embodiment.

Fig. 4 is a cross-sectional view showing the fluid supply amount adjusting device of the third embodiment.

[Fig. 5] A cross-sectional view of a flow rate adjusting valve portion of the fluid supply amount adjusting device of the fourth embodiment.

[Fig. 6] Fig. 6 is a cross-sectional view showing a flow rate adjusting valve portion of the fluid supply amount adjusting device of the fifth embodiment.

[Fig. 7] A schematic view showing a part of a substrate processing apparatus in which another fluid supply amount adjusting device of the present invention is incorporated.

Fig. 8 is a cross-sectional view showing a fluid supply amount adjusting device of a sixth embodiment.

5A. . . Fluid supply amount adjusting device

7A. . . Computing device

8A. . . Electric pneumatic converter

10A. . . Flow regulating valve

20A. . . Pressure control valve

101. . . Valve chamber housing

102. . . Housing part

103. . . Intermediate housing

104. . . Air port

105. . . Respiratory road

106. . . Shell breathing path

110. . . Valve room

111. . . First flow path

112. . . Second flow path

113. . . First flow connection

114. . . Second flow connection

115. . . Seat

116. . . Valve chamber opening

120. . . Valve body

121. . . Sealing part

122. . . Flat valve body

123. . . Diaphragm

124. . . Diaphragm edge

125. . . Valve body connection

130. . . Advance and return means

131. . . Piston part

132. . . Lower piston

133. . . Piston head

134. . . Air room

135. . . spring

136. . . Spring chamber

137. . . O-ring

201. . . Valve chamber housing

202. . . Housing part

210. . . Valve room

211. . . First flow path

212. . . Second flow path

213. . . First flow connection

214. . . Second flow connection

215. . . Seat

220. . . Valve body

221. . . Sealing part

222. . . Valve body

223. . . Diaphragm

224. . . Diaphragm edge

225. . . spring

226. . . Push block

227. . . Respiratory road

Claims (6)

A fluid supply amount adjusting device is a flow rate adjusting device for adjusting a supply flow rate of a controlled fluid in a flow rate range of 150 mL/min or less, and includes a flow rate adjusting valve portion, a supply portion for controlling a fluid, and a fluid mixing portion. a fluid pipe connection between the flow control of the controlled fluid; and a pressure control valve portion for suppressing pressure fluctuations occurring in the controlled fluid; and a flow sensor disposed in the fluid pipe; and a computing device; Further, the calculation device is feedback control based on the flow rate measurement value of the flow rate sensor, wherein the flow rate adjustment valve portion includes a valve chamber housing portion and is formed with a first passage of the controlled fluid. a flow path portion and a second flow path portion, and a valve chamber that connects the first flow path portion and the second flow path portion to allow the controlled fluid to flow; and the valve seat has a valve chamber opening portion formed in a flat shape. In the valve chamber casing portion, the first flow path portion has a diameter of 1 mm or less with respect to the valve chamber, and the flat valve body includes a sealing portion that allows the valve seat to be removably sealed. The sealing portion is formed in a flat shape; and the valve mechanism body is formed on the opposite side of the sealing portion side and includes a diaphragm portion that is disposed on the valve chamber side; and the advancing and retracting means is performed by the computing device The feedback control adjusts the distance between the flat valve portion and the valve seat by advancing and retracting the valve mechanism body, and the pressure control valve portion is provided on the second flow path portion side to prevent occurrence of a controlled fluid applied to the diaphragm portion Pressure changes. The fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, and the pressure control valve portion is capable of holding the pressure control valve portion at a certain level A pressure control valve for fluid pressure of the fluid to be controlled on the upstream side. The fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is a downstream side of the flow rate adjusting valve portion, and the pressure control valve portion is capable of holding the pressure control valve portion at a certain level A pressure control valve for fluid pressure of the fluid to be controlled on the upstream side, wherein the pressure control valve portion is formed in the flow rate adjusting valve portion. The fluid supply amount adjusting device according to the first aspect of the invention, wherein the second flow path portion side is an upstream side of the flow rate adjusting valve portion, and the pressure control valve portion is capable of holding the pressure control valve portion at a certain level A pressure control valve for fluid pressure of the fluid to be controlled on the downstream side. The fluid supply amount adjusting device according to claim 1, wherein the advancing and retracting means controls the pressure regulating gas by the electropneumatic converter according to feedback of the calculating means. The fluid supply amount adjusting device according to claim 1, wherein the forward/backward means is a stepping motor that is controlled in accordance with a motor control substrate after being subjected to feedback control by the computing device.