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TWI509646B - Laminated metal parts manufacturing apparatus and laminated type electronic parts manufacturing method - Google Patents

Laminated metal parts manufacturing apparatus and laminated type electronic parts manufacturing method Download PDF

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TWI509646B
TWI509646B TW100116219A TW100116219A TWI509646B TW I509646 B TWI509646 B TW I509646B TW 100116219 A TW100116219 A TW 100116219A TW 100116219 A TW100116219 A TW 100116219A TW I509646 B TWI509646 B TW I509646B
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ceramic sheet
electrode circuit
forming
film
ceramic
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TW201222592A (en
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Kazuhisa Hayakawa
Yoshihiro Shiroeda
Hiroshi Kuki
Tsuyoshi Nakagawa
Hiroo Nogami
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Murata Manufacturing Co
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Description

積層型電子零件製造裝置及積層型電子零件之製造方法Multilayer electronic component manufacturing apparatus and manufacturing method of laminated electronic component

本發明係有關於一種用以製造積層陶瓷電容器等積層型電子零件之積層型電子零件製造裝置及積層型電子零件之製造方法。The present invention relates to a laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component for manufacturing a laminated electronic component such as a laminated ceramic capacitor.

普通之積層陶瓷電容器之製造方法係使陶瓷膜塗佈成形於長條薄膜上之後,於其上印刷形成內部電極,再將其切割成所期望之尺寸後自薄膜上剝離進行堆疊,且反覆上述操作形成積層體塊,再將其切割成零件單位。A conventional multilayer ceramic capacitor is manufactured by coating a ceramic film on a long film, printing thereon an internal electrode, and then cutting it into a desired size, then peeling off from the film for stacking, and repeating the above The operation forms a laminated body block and then cuts it into a part unit.

相對於此,下述專利文獻1中揭示有如下積層陶瓷電子零件之製造方法,該積層陶瓷電子零件之製造方法係藉由將基材上所形成獲得之複數個陶瓷坯片積層,而形成積層體塊,並以零件單位將形成之上述積層體塊切斷,藉此,製造積層陶瓷電子零件,且,使構成同一之上述積層體塊之複數個上述陶瓷坯片中之至少2片形成於同一上述基材上之特定區域,且使各陶瓷坯片之面內方向之朝向以及各陶瓷坯片之位置實質上一致來進行積層。On the other hand, Patent Document 1 discloses a method of manufacturing a laminated ceramic electronic component in which a plurality of ceramic green sheets obtained by forming a substrate are laminated to form a laminate. Forming the laminated body block in the unit of the part, thereby forming the laminated ceramic electronic component, and forming at least two of the plurality of ceramic green sheets constituting the same laminated body block The specific region on the substrate is laminated, and the orientation of the in-plane direction of each ceramic green sheet and the position of each ceramic green sheet are substantially identical.

於下述專利文獻2中揭示有如下技術:使第1可撓性支持體循環地行進,對第2可撓性支持體之一面上塗佈陶瓷塗料,並將所得之未乾燥之陶瓷塗料層轉印至第1可撓性支持體,且於轉印後,將第2可撓性支持體自陶瓷塗料層剝離,並且於轉印至第1可撓性支持體上之陶瓷塗料層之表面上印刷電極,並使電極乾燥,且於第1可撓性支持體上反覆實施如此之步驟。Patent Document 2 discloses a technique in which a first flexible support is circulated, a ceramic coating is applied to one surface of a second flexible support, and the obtained undried ceramic coating layer is transferred. Printing onto the first flexible support, and after transfer, the second flexible support is peeled off from the ceramic coating layer and transferred onto the surface of the ceramic coating layer on the first flexible support The electrodes are printed, and the electrodes are dried, and the steps are repeated on the first flexible support.

於下述專利文獻3中揭示有如下技術,該技術係用於包含含有陶瓷及有機結合材成分且具有用於在其上形成內部電極層之特定圖案之自承性坯片的積層型電子零件之積層體製造裝置,且將預先形成有特定圖案之自承性坯片捲繞於柱狀輥上進行製造。Patent Document 3 discloses a technique for a laminated electronic component including a self-supporting green sheet containing a ceramic and an organic binder component and having a specific pattern for forming an internal electrode layer thereon. In the laminated body manufacturing apparatus, a self-supporting green sheet in which a specific pattern is formed in advance is wound around a cylindrical roll and manufactured.

下述專利文獻4中揭示有如下技術,該技術係包括開捲供給部,其用以供給坯片;積層捲筒,其將坯片捲繞於外周面,形成積層體;旋轉角度檢測裝置,其係用以檢測積層捲筒之旋轉角;以及內部電極印刷部,其係基於旋轉角度檢測裝置之資訊,一面捲繞坯片,一面在捲繞於積層捲筒之坯片上形成內部電極,藉此便可高速製造積層體。Patent Document 4 discloses a technique including an unwinding supply portion for supplying a green sheet, a laminated reel for winding a green sheet on an outer peripheral surface to form a laminated body, and a rotation angle detecting device. The method is for detecting the rotation angle of the laminated reel; and the internal electrode printing portion is configured to form an internal electrode on the green sheet wound on the laminated reel while winding the blank based on the information of the rotation angle detecting device. This makes it possible to manufacture laminates at high speed.

下述專利文獻5中揭示有如下陶瓷積層體之製造方法,該陶瓷積層體之製造方法係一面使扭轉於多稜柱形輪之環狀帶環行運動,一面於環狀帶上以特定之順序反覆利用塗佈輥進行陶瓷坯片之成形以及利用轉印裝置進行內部電極之形成。而且,於環狀帶環行運動期間內,設定為環狀帶之固定區域與多稜柱形輪之平面部分接觸,並以與上述平面部分接觸之區域範圍內之大小,藉由沖切吸頭來取出作為目標之陶瓷積層體。In the following Patent Document 5, there is disclosed a method for producing a ceramic laminate in which a ring-shaped belt is twisted and twisted on a ring-shaped belt of a polygonal prism, and the ring-shaped belt is oriented in a specific order. The formation of the ceramic green sheet is carried out by the application of the coating roller and the formation of the internal electrode by the transfer device. Moreover, during the movement of the endless belt loop, the fixed region of the endless belt is set in contact with the planar portion of the polygonal prism wheel, and the size of the region in contact with the planar portion is by the punching tip. To take out the ceramic laminate as the target.

此處,作為積層陶瓷電容器製造過程中之積層體形成方法,一般而言,採用以下方法:使陶瓷塗層膜塗佈成形於長條薄膜上之後,於其上印刷形成內部電極,並將其切割後自薄膜上剝離,進行堆疊。為有實現積層電容器之小型高電容化,而必需較薄地形成陶瓷介電層,並增加積層片數,然而,眾所周知,如此處理會導致因薄膜上之突起物引起之缺陷部之影響造成短路等品質不良之產生比例增加。因此,不斷致力於使薄膜進一步平滑之努力,但因問題在於操作性之惡化及薄膜成本之上升,而前景堪憂。Here, as a method of forming a laminate in the process of manufacturing a multilayer ceramic capacitor, generally, a method is employed in which a ceramic coating film is formed on a long film, and an internal electrode is printed thereon and formed. After cutting, the film was peeled off from the film and stacked. In order to achieve small size and high capacitance of the multilayer capacitor, it is necessary to form a ceramic dielectric layer thinner and increase the number of laminated layers. However, it is known that such a treatment may cause a short circuit due to a defect caused by a protrusion on the film. The proportion of poor quality has increased. Therefore, efforts have been made to further smooth the film, but the problem is the deterioration of the operability and the increase in the cost of the film, and the prospect is worrisome.

作為解決上述問題之方法,提出有反覆使用平板型之同一基材來形成陶瓷坯片之方法(參照專利文獻1)。因使用同一基材,而導致缺陷部集中於積層塊之1個部分,因此,即使基材上存在突起物,亦可將因該突起物之影響產生之不良晶片控制於最低限度。As a method for solving the above problems, a method of forming a ceramic green sheet by using the same substrate of a flat plate type has been proposed (see Patent Document 1). Since the defective portion is concentrated on one portion of the laminated block by using the same substrate, even if a projection is present on the substrate, the defective wafer due to the influence of the projection can be controlled to a minimum.

[先前技術文獻][Previous Technical Literature] [專利文獻][Patent Literature]

[專利文獻1] 日本專利特開2004-296641號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-296641

[專利文獻2] 日本專利特開2002-141245號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-141245

[專利文獻3] 日本專利特開2000-306766號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2000-306766

[專利文獻4] 日本專利特開2003-217992號公報[Patent Document 4] Japanese Patent Laid-Open Publication No. 2003-217992

[專利文獻5] 日本專利特開平10-32140號公報[Patent Document 5] Japanese Patent Laid-Open No. Hei 10-32140

然而,上述專利文獻1之技術中,由於必需於平板或圓筒狀之基材上使坯片間歇性成膜,因此,會於成膜開始部與結束部產生膜厚不均一區域,即使形成積層體塊,獲得所期望品質之區域亦較狹窄,故良率方面之問題較大。再者,於平板上積層坯片之步驟中,亦需要逐層之間歇性動作,從而存在生產速度無法提昇之缺點。However, in the technique of Patent Document 1, since the green sheet is required to be intermittently formed on the flat plate or the cylindrical substrate, a film thickness unevenness region is formed at the film formation start portion and the end portion, even if it is formed. In the case of laminated bodies, the area where the desired quality is obtained is also narrow, so the problem of yield is large. Furthermore, in the step of laminating the green sheets on the flat plate, intermittent operation is required layer by layer, so that there is a disadvantage that the production speed cannot be improved.

又,作為有效進行陶瓷坯片積層之方法,提出有上述專利文獻2之技術。於長條薄膜上塗佈陶瓷,並將其轉印至環狀帶上,獲得積層構造體。於該步驟中,因無需進行間歇性動作,而可實現高速化,但由於使用長條基材,因此,無法期望在基材突起物造成之陶瓷層之缺陷部抑制品質不良之效果。Moreover, as a method of efficiently laminating a ceramic green sheet, the technique of the above Patent Document 2 has been proposed. The ceramic was coated on the long film and transferred to an endless belt to obtain a laminated structure. In this step, since it is not necessary to perform an intermittent operation, the speed can be increased. However, since a long substrate is used, the effect of suppressing the quality defect in the defective portion of the ceramic layer due to the substrate protrusion cannot be expected.

又,同類發明亦記載於上述專利文獻3中。其係於圓筒狀捲筒上形成積層構造體,且可藉由連續動作進行高速積層,然而坯片僅限於無薄膜等支持體且高強度之自承性坯片。此類自承性坯片中內在之缺陷部之產生頻率尚不明確,但含有高聚合度樹脂而使強度增加之該片材難以於煅燒步驟中脫脂,從而成為阻礙煅燒後之陶瓷之緻密性之原因,因此,導致實用性低,難以用於量產。Further, the same invention is also described in the above Patent Document 3. This is a laminated structure formed on a cylindrical reel, and can be laminated at a high speed by continuous operation. However, the green sheet is limited to a self-supporting green sheet having a high strength and a support such as a film. The frequency of occurrence of the intrinsic defect in such a self-supporting green sheet is not clear, but the sheet containing a high degree of polymerization resin and increasing the strength is difficult to degrease in the calcination step, thereby hindering the compactness of the ceramic after calcination. The reason is therefore low in practicality and difficult to use for mass production.

上述專利文獻4之發明係於圓筒或多稜柱上連續進行積層,並利用噴墨法形成電極電路,但亦於該情形時,坯片需要能夠獨立搬送程度之高強度,故作為形成較薄之陶瓷層之積層構造體之課題性方法難以實用化。The invention of the above-mentioned Patent Document 4 is formed by continuously laminating a cylinder or a polygonal prism and forming an electrode circuit by an inkjet method. However, in this case, the green sheet needs to be capable of being independently conveyed to a high degree, so that it is formed thin. The subjective method of the laminated structure of the ceramic layer is difficult to put into practical use.

如上述專利文獻5所述,於經乾燥之片材上連續地以濕狀態反覆塗佈漿料之方法,會導致所塗漿料中之溶劑使下一個片材溶解,從而產生造成短路或IR不良(絕緣電阻不良)之片材缺陷。尤其目前之積層陶瓷電容器之片材厚度不斷地變薄,如此方法之塗佈並不合適。As described in the above Patent Document 5, the method of continuously coating the slurry in a wet state on the dried sheet causes the solvent in the applied slurry to dissolve the next sheet, thereby causing a short circuit or IR. Defective (poor insulation resistance) sheet defects. In particular, the thickness of the sheet of the current multilayer ceramic capacitor is continuously thinned, and the coating of such a method is not suitable.

於使片材成形為其他單獨步驟之情形時,因該步驟產生之倉儲、倉儲保管及搬運等亦耗費極大之成本,故必然存在生產期間變長之問題。又,由於將步驟劃分,因此,不僅需要積層塊所需之片材長度,而且需要搬送路徑及積層端數等之多餘片材,從而導致材料損耗。另一方面,於片材積層之後,對片材進行電極印刷之情形時,片材被電極溶劑溶解而產生之片材侵蝕不僅產生於印刷過程中之片材中,而且亦產生於其下層之電極或片材中,從而產生短路或IR不良等故障。此情況成為製造之電子零件品質不良之原因。In the case where the sheet is formed into other separate steps, the storage, storage, storage, and the like which are generated by the step also cost a great deal, so there is a problem that the production period becomes long. Further, since the steps are divided, not only the sheet length required for the laminated block but also the excess sheet such as the conveyance path and the number of laminated ends are required, resulting in material loss. On the other hand, in the case where the sheet is subjected to electrode printing after the sheet is laminated, the sheet erosion caused by the sheet solvent being dissolved by the electrode is not only generated in the sheet in the printing process but also in the lower layer thereof. In the electrode or sheet, a fault such as a short circuit or a poor IR is generated. This situation is the cause of poor quality of the manufactured electronic components.

因此,本發明之目的在於鑒於上述問題,提供一種可抑制電子零件之品質不良之產生,低成本且可提昇積層型電子零件之製造效率(生產速度)之積層型電子零件製造裝置及積層型電子零件之製造方法。In view of the above problems, it is an object of the present invention to provide a laminated electronic component manufacturing apparatus and laminated electronic type capable of suppressing generation of quality defects of electronic components and improving manufacturing efficiency (production speed) of laminated electronic components at low cost. How to manufacture parts.

本發明係一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係外周上實施脫模處理者;成膜形成部,其係對上述成膜基材塗佈陶瓷漿料並使其乾燥,連續形成陶瓷片;電極電路形成部,其係對上述成膜基材上之上述陶瓷片形成電極電路;以及積層支持體,其係介隔上述陶瓷片接觸於上述成膜基材,使上述陶瓷片自上述成膜基材中剝離,並將剝離之上述陶瓷片捲繞於外周,藉此,形成上述陶瓷片與上述電極電路之積層構造體。The present invention relates to a device for manufacturing a laminated electronic component, comprising: a film-forming substrate having a continuous annular shape, which is subjected to a mold release treatment on the outer circumference; and a film formation portion for coating the film-forming substrate The ceramic slurry is dried and continuously formed into a ceramic sheet; an electrode circuit forming portion that forms an electrode circuit on the ceramic sheet on the film forming substrate; and a build-up support that is in contact with the ceramic sheet In the film formation substrate, the ceramic sheet is peeled off from the film formation substrate, and the peeled ceramic sheet is wound around the outer circumference to form a laminated structure of the ceramic sheet and the electrode circuit.

根據本發明,即使成膜基材上存在有突起物等缺陷因素,由此產生之陶瓷片之缺陷部亦集中於積層構造體之經限定之範圍內,因此,可將切斷分割其所獲得之電子零件之品質不良之產生抑制為較低程度。According to the present invention, even if a defect such as a projection is present on the film-forming substrate, the defective portion of the ceramic sheet thus produced is concentrated in a limited range of the laminated structure, and therefore, the cut and the divided portion can be obtained. The occurrence of poor quality of electronic parts is suppressed to a low degree.

又,陶瓷片係於連續形成於成膜基材上,因此,與間歇性塗佈相比,膜厚之穩定區域擴展,從而能夠增加可自獲得之積層構造體分割成電子零件之個數。Further, since the ceramic sheet is continuously formed on the film formation substrate, the stable region of the film thickness is expanded as compared with the intermittent coating, and the number of the multilayer structure which can be obtained from the laminated body can be increased.

由於藉由連續運轉來執行於成膜基材上形成陶瓷片之步驟、及於積層支持體上形成陶瓷片之積層構造體之步驟係,因,可於更短時間內以高生產率形成陶瓷片之積層構造體。The step of forming a ceramic sheet on the film-forming substrate by continuous operation and the step of forming a laminated body of the ceramic sheet on the build-up support, because the ceramic sheet can be formed with high productivity in a shorter time. The laminated structure.

又,由於無需如先前般使用長條之薄膜基材,故可抑制中間材料成本。Moreover, since it is not necessary to use a long film substrate as before, the intermediate material cost can be suppressed.

可藉由以上述方式,抑制電子零件之品質不良之產生,並且低成本且非間歇性運轉地連續進行運轉,而提昇積層型電子零件之製造效率(生產速度)。In the above-described manner, the occurrence of quality defects in the electronic component can be suppressed, and the operation can be continuously performed at low cost and non-intermittently, thereby improving the manufacturing efficiency (production speed) of the laminated electronic component.

又,本發明係一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係外周上實施脫模處理者;成膜形成部,其係對上述成膜基材塗佈陶瓷漿料並使其乾燥,連續形成陶瓷片;電極電路形成部,其係對上述陶瓷片形成電極電路;積層支持體,其係藉由將上述陶瓷片捲繞於外周而形成上述陶瓷片與上述電極電路之積層構造體;以及搬送構件,其係設置成介隔上述陶瓷片接觸於上述成膜基材與上述積層支持體,且自上述成膜基材接收形成於上述成膜基材上之上述陶瓷片,並將該接收之上述陶瓷片搬送至上述積層支持體。Further, the present invention provides a laminated electronic component manufacturing apparatus characterized by comprising: a continuous film-forming substrate having a continuous shape, which is subjected to a mold release treatment on the outer circumference; and a film formation portion which is a film-forming substrate The ceramic slurry is coated and dried to continuously form a ceramic sheet; an electrode circuit forming portion for forming an electrode circuit for the ceramic sheet; and a build-up support for forming the ceramic by winding the ceramic sheet around the outer circumference a laminated structure of the sheet and the electrode circuit; and a conveying member that is formed to be in contact with the film forming substrate and the build-up support via the ceramic sheet, and is formed on the film forming substrate from the film forming substrate The ceramic piece on the material is conveyed to the laminated support by the received ceramic piece.

根據本發明,形成於成膜基材上之陶瓷片係暫時由搬送構件接收。其後,將陶瓷片自搬送構件搬送至積層支持體。藉此,陶瓷片自成膜基材之剝離不會受積層支持體側之狀態影響,故可進行穩定之操作。具體而言,若於積層支持體上不斷形成陶瓷片之積層構造體,則積層支持體之尺寸會不斷變大,又,於形成有電極電路之情形時,積層支持體之部位會產生凹凸等外形上之狀態變化,然而可藉由使成膜基材與積層支持體之間插入搬送構件,而避免使成膜基材與積層支持體直接接觸。而且,可結合積層支持體之狀態變化,而適當地調整積層支持體與搬送構件之位置關係與壓力等。藉此,便可防止形成於積層支持體上之陶瓷片之積層構造體之品質因積層支持體之狀態變化而劣化。又,可藉由將積層支持體設計成不與成膜基材直接接觸,而防止積層支持體之狀態變化導致形成於成膜基材之陶瓷片、乃至電子零件之品質劣化。According to the invention, the ceramic sheet formed on the film-forming substrate is temporarily received by the conveying member. Thereafter, the ceramic sheet is transferred from the conveying member to the buildup support. Thereby, the peeling of the ceramic sheet from the film formation substrate is not affected by the state of the buildup support side, so that stable operation can be performed. Specifically, when the laminated structure of the ceramic sheet is continuously formed on the laminated support, the size of the laminated support is continuously increased, and when the electrode circuit is formed, the portion of the laminated support is uneven. Although the state of the shape changes, the film-forming substrate and the build-up support member can be inserted into the transfer member to avoid direct contact between the film-forming substrate and the build-up support. Further, the positional relationship between the build-up support and the transfer member, the pressure, and the like can be appropriately adjusted in accordance with the state change of the build-up support. Thereby, the quality of the laminated structure of the ceramic sheet formed on the build-up support can be prevented from deteriorating due to the state change of the build-up support. Further, by designing the build-up support to be in direct contact with the film-forming substrate, the state of the build-up support can be prevented from being changed, and the quality of the ceramic sheet or the electronic component formed on the film-forming substrate can be deteriorated.

又,由於無需使單體之成膜基材大型化,且可使搬送至積層支持體之前陶瓷片進行移動之路徑延長,因此,可延長陶瓷片之乾燥時間。而且,由於對成膜基材連續地不斷塗佈陶瓷漿料,因此,可提高陶瓷片之製造速度(製造效率),從而可提高陶瓷片之積層構造體之製造效率,進而提高電子零件之製造效率。Further, since it is not necessary to increase the size of the single film formation substrate, and the path for moving the ceramic sheet before the conveyance of the buildup support can be extended, the drying time of the ceramic sheet can be extended. Further, since the ceramic slurry is continuously applied to the film formation substrate, the production speed (manufacturing efficiency) of the ceramic sheet can be increased, and the manufacturing efficiency of the laminated body of the ceramic sheet can be improved, and the manufacture of the electronic component can be improved. effectiveness.

進而,優選藉由電極電路形成部而於捲繞於積層支持體之前之陶瓷片上形成電極電路。藉此,於陶瓷片積層於積層支持體之前,在陶瓷片上形成電極電路。假使於陶瓷片積層於積層支持體之後,在陶瓷片上形成電極電路,則形成於下層陶瓷片之電極電路、或下層之已形成電極電路之陶瓷片會因電極溶劑而產生片材侵蝕。如本發明所述,若於單層之陶瓷片之狀態下形成電極電路,則可將片材侵蝕之影響控制於僅單層之最低限度,從而可減少短路或IR不良(絕緣電阻不良)等故障。Further, it is preferable that the electrode circuit is formed on the ceramic sheet before being wound around the buildup support by the electrode circuit forming portion. Thereby, an electrode circuit is formed on the ceramic sheet before the ceramic sheet is laminated on the buildup support. If an electrode circuit is formed on the ceramic sheet after the ceramic sheet is laminated on the build-up support, the electrode circuit formed on the lower ceramic sheet or the ceramic sheet on which the electrode circuit has been formed in the lower layer may be eroded by the electrode solvent. According to the present invention, if an electrode circuit is formed in a state of a single-layer ceramic sheet, the influence of sheet erosion can be controlled to a minimum of only a single layer, thereby reducing short circuit or IR failure (insulation resistance). malfunction.

本發明中,優選上述電極電路形成部對上述搬送構件上之上述陶瓷片形成上述電極電路。In the invention, it is preferable that the electrode circuit forming portion forms the electrode circuit on the ceramic piece on the conveying member.

據此,藉由電極電路形成部而於搬送構件上之陶瓷片形成電極電路。藉此,由於對成膜基材上經乾燥之陶瓷片形成電極電路,因此,可進一步提高電極電路之形成位置之位置精度。Thereby, the electrode circuit is formed on the ceramic piece on the conveying member by the electrode circuit forming portion. Thereby, since the electrode circuit is formed on the dried ceramic sheet on the film formation substrate, the positional accuracy of the formation position of the electrode circuit can be further improved.

又,一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係外周上實施脫模處理者;電極電路形成部,其係於上述成膜基材上形成電極電路;成膜形成部,其係對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成附有上述電極電路之陶瓷片;以及積層支持體,其係介隔附有上述電極電路之上述陶瓷片接觸於上述成膜基材,且使附有上述電極電路之上述陶瓷片自上述成膜基材中剝離,並將剝離之附有上述電極電路之上述陶瓷片捲繞於外周,藉此形成上述陶瓷片與上述電極電路之積層構造體。Further, a laminated electronic component manufacturing apparatus comprising: a film-forming substrate having a continuous annular shape, wherein a mold release process is performed on an outer circumference; and an electrode circuit forming portion for forming an electrode on the film formation substrate a film formation portion that applies a ceramic slurry to a film formation substrate on which the electrode circuit is formed and dried, continuously forms a ceramic sheet with the electrode circuit; and a build-up support, which is a spacer The ceramic sheet with the electrode circuit is in contact with the film formation substrate, and the ceramic sheet with the electrode circuit is peeled off from the film formation substrate, and the ceramic sheet with the electrode circuit is peeled off The laminated body is formed by winding the outer circumference to form the laminated body of the ceramic sheet and the electrode circuit.

又,一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係外周上實施脫模處理者;電極電路形成部,其係於上述成膜基材上形成電極電路;成膜形成部,其係對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成附有上述電極電路之陶瓷片;積層支持體,其係藉由將附有上述電極電路之上述陶瓷片捲繞於外周而形成上述陶瓷片與上述電極電路之積層構造體;以及搬送構件,其係設置成介隔附有上述電極電路之上述陶瓷片而接觸於上述成膜基材與上述積層支持體,且自上述成膜基材接收形成於上述成膜基材上之附有上述電極電路之上述陶瓷片,並將該接收之附有上述電極電路之上述陶瓷片搬送至上述積層支持體。Further, a laminated electronic component manufacturing apparatus comprising: a film-forming substrate having a continuous annular shape, wherein a mold release process is performed on an outer circumference; and an electrode circuit forming portion for forming an electrode on the film formation substrate a film forming portion that applies a ceramic slurry to a film-forming substrate on which the electrode circuit is formed and dried, and continuously forms a ceramic sheet with the electrode circuit; a build-up support by a ceramic structure in which the ceramic sheet of the electrode circuit is wound around the outer periphery to form the ceramic sheet and the electrode circuit, and a transfer member that is provided to be in contact with the ceramic sheet with the electrode circuit a film-forming substrate and the build-up support, and receiving, from the film-forming substrate, the ceramic sheet having the electrode circuit formed on the film-forming substrate, and receiving the ceramic having the electrode circuit The sheet is transferred to the above laminated support.

本發明之特徵在於,上述電極電路形成部係對上述陶瓷片進行電極印刷之無版印刷裝置。The present invention is characterized in that the electrode circuit forming portion is a plateless printing device that performs electrode printing on the ceramic sheet.

據此,便可於陶瓷片之每一層上形成不同圖案之電極電路。又,即使隨著積層支持體上進行陶瓷片積層,陶瓷片之伸縮或積層支持體之大小產生變化,亦可調整電極電路之間之間距,形成無錯位之電極電路。Accordingly, electrode circuits of different patterns can be formed on each of the ceramic sheets. Further, even if the ceramic sheet is laminated on the build-up support, the expansion or contraction of the ceramic sheet or the size of the build-up support is changed, and the distance between the electrode circuits can be adjusted to form an electrode circuit without displacement.

再者,作為無版印刷裝置,優選由噴墨印刷裝置與油墨乾燥固化裝置構成。Further, as the plateless printing device, it is preferable to comprise an inkjet printing device and an ink drying and curing device.

本發明之特徵在於,上述成膜基材之外周長與上述積層支持體之外周長為相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之其中一個外周長為另一個外周長之整數倍。The present invention is characterized in that the outer circumference of the film formation substrate is the same length as the outer circumference of the laminate support, or one of the outer circumference of the film formation substrate or the outer circumference of the laminate support is another outer circumference. An integer multiple of an outer perimeter.

藉此,便可使因成膜基材上存在突起物等缺陷因素而產生之陶瓷片之缺陷部集中於積層構造體之特定區域內。具體而言,可將積層支持體上之陶瓷片之積層構造體中產生之缺陷部集中於積層構造體之同一圓周軌道上(自輸送方向觀察陶瓷片時之積層構造體上之相同行)。進而,於積層支持體之外周長相較成膜基材之外周長長整數倍之情形時,可將積層支持體上之陶瓷片之積層構造體中產生之缺陷部集中於積層構造體之同一座標上(自輸送方向觀察陶瓷片時之積層構造體上之同一列與行)。Thereby, the defective portion of the ceramic sheet which is caused by the presence of a defect such as a projection on the film-forming substrate can be concentrated in a specific region of the laminated structure. Specifically, the defective portions generated in the laminated structure of the ceramic sheets on the build-up support can be concentrated on the same circumferential orbit of the laminated structure (the same row on the laminated structure when the ceramic sheets are viewed from the transport direction). Further, when the outer circumference of the laminated support is longer than the outer circumference of the film formation substrate, the defective portion generated in the laminated structure of the ceramic sheet on the laminated support can be concentrated on the same coordinate of the laminated structure. Upper (the same column and row on the laminated structure when the ceramic sheets are observed from the conveying direction).

本發明之特徵在於,於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片之積層構造體時,於上述成膜基材上持續形成新的上述陶瓷片。According to the present invention, when the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet, a new ceramic sheet is continuously formed on the film formation substrate.

藉此,便可藉由連續運轉而非間歇性運轉,形成陶瓷片之積層構造體,因此,可於極短之時間內形成陶瓷片之積層構造體。其結果,可提昇陶瓷片之積層構造體之製造效率。Thereby, the laminated structure of the ceramic sheet can be formed by continuous operation instead of intermittent operation, and therefore, the laminated structure of the ceramic sheet can be formed in a very short time. As a result, the manufacturing efficiency of the laminated structure of the ceramic sheet can be improved.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其係藉由成膜形成部而對外周上實施脫模處理之環形連續狀之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成陶瓷片;電極電路形成步驟,其係藉由電極電路形成部而於上述成膜基材上之上述陶瓷片形成電極電路;以及積層構造體形成步驟,其係藉由使積層支持體介隔上述陶瓷片接觸於上述成膜基材,而自上述成膜基材剝離上述陶瓷片,並將該剝離之上述陶瓷片捲繞於上述積層支持體之外周,藉此形成上述陶瓷片與上述電極電路之積層構造體。The present invention relates to a method of producing a laminated electronic component, comprising: a film forming step of coating a film of a film-forming substrate having a ring-shaped continuous shape which is subjected to a release treatment on a peripheral surface by a film forming portion. And drying the slurry to form a ceramic sheet continuously; an electrode circuit forming step of forming an electrode circuit on the ceramic sheet on the film formation substrate by an electrode circuit forming portion; and a step of forming a laminated structure The ceramic sheet is peeled from the film formation substrate by interposing the build-up support layer on the film formation substrate, and the peeled ceramic sheet is wound around the outer layer of the buildup support body. This forms a laminated structure of the above ceramic sheet and the above electrode circuit.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其係藉由成膜形成部而對外周上實施脫模處理之環形連續狀之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成陶瓷片;電極電路形成步驟,其係藉由電極電路形成部而於上述陶瓷片形成電極電路;積層構造體形成步驟,其係藉由將上述陶瓷片捲繞於積層支持體之外周而形成上述陶瓷片與上述電極電路之積層構造體;以及搬送步驟,其係於上述成膜形成步驟之後且上述積層構造體形成步驟之前執行,且搬送構件自上述成膜基材接收形成於上述成膜基材上之上述陶瓷片,藉由上述搬送構件而將該接收之上述陶瓷片搬送至上述積層支持體。The present invention relates to a method of producing a laminated electronic component, comprising: a film forming step of coating a film of a film-forming substrate having a ring-shaped continuous shape which is subjected to a release treatment on a peripheral surface by a film forming portion. And drying the slurry to form a ceramic sheet continuously; an electrode circuit forming step of forming an electrode circuit on the ceramic sheet by the electrode circuit forming portion; and a laminated structure forming step of winding the ceramic sheet a laminated structure in which the ceramic sheet and the electrode circuit are formed on the outer periphery of the build-up support; and a transfer step performed after the film formation step and before the laminated structure forming step, and the transfer member is formed from the film formation step The substrate receives the ceramic sheet formed on the film formation substrate, and the received ceramic sheet is transferred to the buildup support by the transfer member.

電極電路形成步驟,優選於上述搬送構件上之上述陶瓷片形成上述電極電路。In the electrode circuit forming step, it is preferable that the electrode piece is formed on the ceramic piece on the transfer member.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:電極電路形成步驟,其係藉由電極電路形成部而於外周上實施脫模處理之環形連續狀之成膜基材上形成電極電路;成膜形成步驟,其係藉由成膜形成部而對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成附有上述電極電路之陶瓷片;以及積層構造體形成步驟,其係藉由使積層支持體介隔附有上述電極電路之上述陶瓷片接觸於上述成膜基材,而自上述成膜基材上剝離附有上述電極電路之上述陶瓷片,並藉由將剝離之附有上述電極電路之上述陶瓷片捲繞於上述積層支持體之外周,而形成上述陶瓷片與上述電極電路之積層構造體。The present invention relates to a method of manufacturing a laminated electronic component, comprising: an electrode circuit forming step of forming an electrode on a film-formed substrate having a ring-shaped continuous shape which is subjected to a mold release treatment on an outer circumference by an electrode circuit forming portion. a film formation step of applying a ceramic slurry to a film formation substrate on which the electrode circuit is formed by a film formation portion, and drying the ceramic sheet to which the electrode circuit is attached; and laminating a structure forming step of peeling the ceramic sheet to which the electrode circuit is attached from the film formation substrate by contacting the ceramic sheet with the electrode circuit interposed therebetween with the build-up support body to the film formation substrate And the laminated body of the ceramic piece and the electrode circuit is formed by winding the peeled ceramic sheet with the electrode circuit around the outer periphery of the buildup support.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:電極電路形成步驟,其係藉由電極電路形成部而於外周上實施脫模處理之環形連續狀之成膜基材上形成電極電路;成膜形成步驟,其係藉由成膜形成部而對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,連續形成附有上述電極電路之陶瓷片;積層構造體形成步驟,其係藉由將附有上述電極電路之上述陶瓷片捲繞於上述積層支持體之外周,而形成上述陶瓷片與上述電極電路之積層構造體;以及搬送步驟,其係於上述成膜形成步驟之後且上述積層構造體形成步驟之前執行,且搬送構件自上述成膜基材接收形成於上述成膜基材上之附有上述電極電路之上述陶瓷片,並藉由上述搬送構件而將該接收之附有上述電極電路之上述陶瓷片搬送至上述積層支持體。The present invention relates to a method of manufacturing a laminated electronic component, comprising: an electrode circuit forming step of forming an electrode on a film-formed substrate having a ring-shaped continuous shape which is subjected to a mold release treatment on an outer circumference by an electrode circuit forming portion. a film formation step of applying a ceramic slurry to a film formation substrate on which the electrode circuit is formed by a film formation portion and drying the film, and continuously forming a ceramic sheet having the electrode circuit; a body forming step of forming the laminated body of the ceramic sheet and the electrode circuit by winding the ceramic sheet having the electrode circuit around the laminated support, and a transporting step of the above After the film formation step and before the laminated structure forming step, the transfer member receives the ceramic sheet with the electrode circuit formed on the film formation substrate from the film formation substrate, and the transfer member is The ceramic piece with the electrode circuit received is transferred to the laminated support.

於上述該等情形時,作為上述電極電路形成部,優選使用對上述陶瓷片進行電極印刷之無版印刷裝置。In the above case, it is preferable to use a plateless printing apparatus that performs electrode printing on the ceramic sheet as the electrode circuit forming portion.

作為上述無版印刷裝置,優選使用噴墨印刷裝置及油墨乾燥固化裝置。As the above-mentioned plateless printing device, an inkjet printing device and an ink drying and curing device are preferably used.

於上述積層構造體形成步驟中,當將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,上述成膜形成步驟優選於上述成膜基材上持續形成新的上述陶瓷片。In the laminated structure forming step, when the ceramic sheet is wound around the outer periphery of the buildup support to form the laminated body of the ceramic sheet and the electrode circuit, the film formation step is preferably performed on the film formation substrate. A new ceramic piece as described above is continuously formed.

根據本發明,可藉由抑制電子零件之品質不良之產生,並且以低成本且連續運轉而非間歇性運轉,而提昇積層型電子零件之製造效率(製造速度)。According to the present invention, it is possible to improve the manufacturing efficiency (manufacturing speed) of the laminated electronic component by suppressing the occurrence of poor quality of the electronic component and operating at low cost and continuously without intermittent operation.

參照圖式,對本發明第1實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,於作為本發明之製造對象之「積層型電子零件」中,包括積層陶瓷電容器或積層陶瓷電感器等積層型電子零件。以下,將積層陶瓷電容器作為積層型電子零件之一例進行說明。A method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to the first embodiment of the present invention will be described with reference to the drawings. Further, the "layered electronic component" which is a target of the present invention includes a laminated electronic component such as a laminated ceramic capacitor or a laminated ceramic inductor. Hereinafter, a multilayer ceramic capacitor will be described as an example of a laminated electronic component.

首先,對積層型電子零件製造裝置進行說明。First, a laminated electronic component manufacturing apparatus will be described.

如圖1所示,積層型電子零件製造裝置10係主要包括表面(外周面)上實施脫模處理而形成陶瓷片S之塗佈輥12(成膜基材)、以及捲繞自塗佈輥12剝離之陶瓷片S而形成陶瓷片S之積層構造體S'之疊層輥14、15(積層支持體)。As shown in FIG. 1, the laminated electronic component manufacturing apparatus 10 mainly includes a coating roll 12 (film forming substrate) on which a mold release process is performed on a surface (outer peripheral surface) to form a ceramic sheet S, and a winding from a coating roll. The ceramic sheet S is peeled off to form the laminated rolls 14 and 15 (layered support) of the laminated structure S' of the ceramic sheet S.

於塗佈輥12之周圍,配置有用以對塗佈輥12之表面塗佈作為陶瓷片S之材料之陶瓷漿料之成膜機構16(成膜形成部)、用以對成膜機構16供給陶瓷漿料之供液機構18;用以使塗佈輥12之表面上之陶瓷漿料乾燥固化之乾燥固化裝置20、用以於捲繞(積層)於疊層輥14、15之外周面之前之陶瓷片S上形成電極電路24(參照圖2)之電極電路形成機構22(電極電路形成部)、用以使電極電路24乾燥之乾燥固化裝置26、以及上述疊層輥14、15。A film forming mechanism 16 (film forming portion) for applying a ceramic slurry as a material of the ceramic sheet S to the surface of the coating roller 12 is disposed around the coating roller 12 to supply the film forming mechanism 16 a liquid supply mechanism 18 for ceramic slurry; a drying and curing device 20 for drying and solidifying the ceramic slurry on the surface of the coating roller 12 for winding (stacking) on the outer peripheral surface of the lamination rolls 14, 15 On the ceramic sheet S, an electrode circuit forming mechanism 22 (electrode circuit forming portion) of the electrode circuit 24 (see FIG. 2), a drying and curing device 26 for drying the electrode circuit 24, and the above-described laminating rolls 14, 15 are formed.

本實施形態之積層型電子零件製造裝置10之特徵在於,於捲繞於疊層輥14、15之外周面之前之陶瓷片S上形成電極電路24,其後,將形成有電極電路24之陶瓷片S捲繞(積層)於疊層輥14、15之外周面,形成陶瓷片S之積層構造體S'。The laminated electronic component manufacturing apparatus 10 of the present embodiment is characterized in that the electrode circuit 24 is formed on the ceramic sheet S before being wound around the outer peripheral surfaces of the laminating rolls 14, 15, and thereafter, the ceramic in which the electrode circuit 24 is formed is formed. The sheet S is wound (laminated) on the outer peripheral surfaces of the laminating rolls 14 and 15, and a laminated structure S' of the ceramic sheets S is formed.

再者,於成膜機構16之塗佈輥旋轉方向之下游側(成膜機構16與電極電路形成機構22之間),配置有用以使塗佈輥12之表面上之陶瓷漿料乾燥固化之乾燥固化裝置20。又,於電極電路形成機構22之塗佈輥旋轉方向之下游側(電極電路形成機構22與疊層輥14之間),配置有用以使電極電路24乾燥之乾燥固化裝置26。Further, on the downstream side of the coating roller 16 in the rotation direction of the coating roller (between the film forming mechanism 16 and the electrode circuit forming mechanism 22), the ceramic slurry on the surface of the coating roller 12 is disposed to be dried and solidified. The curing device 20 is dried. Further, on the downstream side of the coating roller rotation direction of the electrode circuit forming mechanism 22 (between the electrode circuit forming mechanism 22 and the lamination roller 14), a drying and curing device 26 for drying the electrode circuit 24 is disposed.

具體而言,塗佈輥12係表面實施脫模處理之金屬等剛體輥(圓柱形或圓筒形),且包含環形連續狀之基材。塗佈輥12係構成為由未圖示之驅動源來進行旋轉驅動。再者,所謂脫模處理係指例如相當於鍍敷氟系處理等。Specifically, the coating roll 12 is a rigid body roll (cylindrical or cylindrical) such as a metal which is subjected to a release treatment on the surface, and includes a ring-shaped continuous substrate. The coating roller 12 is configured to be rotationally driven by a driving source (not shown). In addition, the mold release treatment means, for example, a plating fluorine treatment or the like.

疊層輥14、15係藉由於可裝卸之金屬製圓筒夾具之外周面黏貼彈性體(例如樹脂薄膜、彈性薄膜、橡膠、黏性片等)而構成。將該圓筒夾具安裝於旋轉軸上,並使其與塗佈輥12同步旋轉。再者,疊層輥14、15既可構成為由未圖示之驅動源來進行旋轉驅動,亦可構成為受到塗佈輥12之旋轉力作用而隨動旋轉。疊層輥14、15係藉由未圖示之施壓機構,而以特定之壓力(擠壓力)擠壓塗佈輥12。疊層輥14、15可藉由未圖示之切換機構,而使疊層輥14或疊層輥15之任一個加壓接觸於塗佈輥12。The laminating rolls 14 and 15 are formed by adhering an elastic body (for example, a resin film, an elastic film, a rubber, a viscous sheet, or the like) to the peripheral surface of the detachable metal cylindrical jig. The cylinder jig is mounted on a rotating shaft and rotated in synchronization with the coating roller 12. Further, the laminating rolls 14 and 15 may be configured to be rotationally driven by a driving source (not shown), or may be configured to be rotated by the rotational force of the coating roller 12. The laminating rolls 14 and 15 press the coating roll 12 at a specific pressure (pressing force) by a pressing mechanism (not shown). The laminating rolls 14 and 15 can pressurize any one of the laminating rolls 14 or the laminating rolls 15 to the coating roll 12 by a switching mechanism (not shown).

疊層輥14之彈性體表面係藉由黏著或靜電吸附等之機構來保持陶瓷片S。再者,由疊層輥14捲繞之陶瓷片S係將疊合之片層彼此壓接而相互保持。由於該等保持力設定為大於塗佈輥12保持陶瓷片S之力,因此,陶瓷片S自塗佈輥12剝離而轉印至疊層輥14上。疊層輥15亦情況相同。The surface of the elastomer of the laminating roller 14 holds the ceramic sheet S by a mechanism such as adhesion or electrostatic adsorption. Further, the ceramic sheet S wound by the laminating rolls 14 is formed by pressing the laminated sheets to each other. Since the holding force is set to be larger than the force by which the coating roller 12 holds the ceramic sheet S, the ceramic sheet S is peeled off from the coating roller 12 and transferred onto the laminating roller 14. The laminating rolls 15 are also the same.

為了將陶瓷片S可靠地自塗佈輥12轉印至疊層輥14,優選一面將疊層輥適當地擠壓至塗佈輥12,一面進行轉印。假若塗佈輥12與疊層輥14之間存在空間,則形成有搬送過程中之陶瓷片S未受其它構件支持之區間,從而存在於該區間內導致片材破損之可能性。因此,為了不形成陶瓷片S未受支持之區間,而將疊層輥14適當地擠壓至塗佈輥12。疊層輥14之表面具有彈性,以使擠壓時不產生機械扭轉。In order to reliably transfer the ceramic sheet S from the coating roller 12 to the laminating roller 14, it is preferable to carry out the transfer while appropriately pressing the laminating roller onto the coating roller 12. If there is a space between the application roller 12 and the laminating roller 14, a section in which the ceramic sheet S during the conveyance is not supported by the other members is formed, and there is a possibility that the sheet is broken in the section. Therefore, the laminating roller 14 is appropriately pressed to the coating roller 12 so as not to form an unsupported section of the ceramic sheet S. The surface of the laminating roller 14 is elastic so that no mechanical twist is generated upon extrusion.

此處,優選塗佈輥12之外周長為與疊層輥14、15之外周長相同之長度,或者,塗佈輥12之外周長或疊層輥14、15之外周長之其中一個外周長為另一個外周長之整數倍。Here, it is preferable that the outer circumference of the coating roller 12 is the same length as the outer circumference of the laminating rolls 14, 15, or one outer circumference of the outer circumference of the coating roll 12 or the outer circumference of the lamination rolls 14, 15. It is an integer multiple of another outer perimeter.

作為成膜機構16,例如可以採用狹縫式塗佈機等之擠出塗佈方式、或者刮刀片、輥塗機、噴墨型塗佈機等。所謂擠出塗佈方式係指自模唇擠出塗佈液進行塗佈之方式。再者,為了使形成於塗佈輥12之外周面上之陶瓷片S之膜厚變得更薄,優選於狹縫式塗佈機設置上游減壓機構。由成膜機構16對塗佈輥12連續地(非間歇地)塗佈陶瓷漿料,形成陶瓷片S。以此方式,連續地對同一塗佈輥12提供陶瓷漿料。As the film forming mechanism 16, for example, an extrusion coating method such as a slit coater or a doctor blade, a roll coater, an ink jet type coater or the like can be used. The extrusion coating method refers to a method of applying a coating liquid from a lip extrusion coating. Further, in order to make the film thickness of the ceramic sheet S formed on the outer peripheral surface of the coating roll 12 thinner, it is preferable to provide an upstream pressure reducing mechanism in the slit coater. The coating slurry 12 is continuously (non-intermittently) coated with the ceramic slurry by the film forming mechanism 16 to form a ceramic sheet S. In this way, the same coating roll 12 is continuously supplied with the ceramic slurry.

作為供液機構18,例如採用齒輪泵。再者,供液機構18並不侷限於齒輪泵,亦可適當採用氣缸型點膠機、隔膜泵等。As the liquid supply mechanism 18, for example, a gear pump is used. Further, the liquid supply mechanism 18 is not limited to the gear pump, and a cylinder type dispenser, a diaphragm pump, or the like may be suitably employed.

作為電極電路形成機構22,例如可以採用噴墨印刷裝置。電極電路形成機構22優選無版印刷機構,但亦可轉印乾燥後之電極電路24,凹版印刷、凹版膠印等機構皆可。又,電極電路形成機構22中使用之電極材料油墨係使用例如使Ni粉末(鎳粉末)與樹脂溶解分散於有機溶劑者。亦可為使Ni粉末分散於UV(Ultraviolet,紫外線)固化性樹脂者。尤其對於陶瓷塗層膜,優選使用膨潤性低之溶劑。再者,溶劑亦可為水系。As the electrode circuit forming mechanism 22, for example, an inkjet printing device can be employed. The electrode circuit forming mechanism 22 is preferably a plateless printing mechanism, but may transfer the dried electrode circuit 24, such as gravure printing or gravure offset printing. Further, the electrode material ink used in the electrode circuit forming mechanism 22 is, for example, a method in which Ni powder (nickel powder) and a resin are dissolved and dispersed in an organic solvent. It is also possible to disperse the Ni powder in a UV (Ultraviolet) curable resin. In particular, for the ceramic coating film, it is preferred to use a solvent having low swelling property. Further, the solvent may be a water system.

作為乾燥固化裝置20、26係採用例如藉由熱風來進行乾燥之方法、或對塗佈輥12之外周面加熱之方法。於使用紫外線固化性樹脂之情形時,亦可照射紫外線使該紫外線固化性樹脂固化。乾燥固化裝置20、26係用以使所塗佈之陶瓷漿料或電極材料油墨乾燥或固化者。再者,用以使塗佈輥12上之陶瓷漿料乾燥之乾燥固化裝置20中亦可使用真空乾燥機構。As the drying and curing apparatuses 20 and 26, for example, a method of drying by hot air or a method of heating the outer peripheral surface of the coating roll 12 is employed. When an ultraviolet curable resin is used, the ultraviolet curable resin may be cured by irradiation with ultraviolet rays. The drying and curing devices 20, 26 are used to dry or cure the applied ceramic paste or electrode material ink. Further, a vacuum drying mechanism may be used in the drying and curing device 20 for drying the ceramic slurry on the coating roller 12.

作為陶瓷漿料係採用例如使陶瓷粉末與樹脂溶解分散於有機溶劑中者。亦可以使用使陶瓷粉末分散於紫外線固化樹脂中者。再者,溶劑亦可為水系。As the ceramic slurry, for example, a ceramic powder and a resin are dissolved and dispersed in an organic solvent. It is also possible to use a ceramic powder dispersed in an ultraviolet curable resin. Further, the solvent may be a water system.

繼而,對使用積層型電子零件製造裝置10之陶瓷片S之積層構造體S'之製造方法進行說明。Next, a method of manufacturing the laminated structure S' of the ceramic sheet S using the laminated electronic component manufacturing apparatus 10 will be described.

使實施脫模處理之塗佈輥12以特定之速度旋轉,並藉由成膜機構16對其外周面塗佈陶瓷漿料。再者,使用作為供液機構18之齒輪泵進行陶瓷漿料之供給。繼而,使用乾燥固化裝置20於塗佈輥12上使陶瓷漿料乾燥固化。此處,乾燥固化裝置20對陶瓷漿料之乾燥係使用特定溫度之熱風。另外利用溫度調節器進行加熱或冷卻來調整溫度,以使塗佈輥12之外周面之溫度達到合理溫度。再者,該等溫度係根據陶瓷片S之材料進行適當調整。藉由以此方式,利用成膜機構16及供液機構18,對塗佈輥12連續地提供陶瓷漿料,從而持續地形成陶瓷片S。利用疊層輥14將未印刷電極電路24之陶瓷片S捲繞特定層,形成積層構造體S'之外層部。The coating roller 12 subjected to the release treatment is rotated at a specific speed, and the outer peripheral surface thereof is coated with a ceramic slurry by the film forming mechanism 16. Further, the supply of the ceramic slurry is performed using a gear pump as the liquid supply mechanism 18. Then, the ceramic slurry is dried and solidified on the coating roll 12 using the drying and curing device 20. Here, the drying and curing device 20 uses a hot air of a specific temperature for drying the ceramic slurry. Further, the temperature is adjusted by heating or cooling using a temperature regulator so that the temperature of the outer peripheral surface of the coating roller 12 reaches a reasonable temperature. Further, the temperatures are appropriately adjusted in accordance with the material of the ceramic sheet S. In this manner, the coating roll 12 is continuously supplied with the ceramic slurry by the film forming mechanism 16 and the liquid supply mechanism 18, whereby the ceramic sheet S is continuously formed. The ceramic sheet S of the unprinted electrode circuit 24 is wound around a specific layer by the laminating roller 14, and a layer portion other than the laminated structure S' is formed.

其次,由電極電路形成機構22對塗佈輥12上之陶瓷片S塗佈電極材料油墨,並印刷特定之圖形圖案之電極電路(內部電極電路)24。於電極電路24印刷之後,由乾燥固化裝置26噴附特定溫度之暖風,使電極電路24乾燥。此處,電極電路之形成步驟係於在疊層輥14、15之外周面上進行捲繞時,以每一層(每一周)中電極電路24成為對向電極之方式改變圖形圖案進行電極印刷。以此方式,對塗佈輥12上之陶瓷片S形成電極電路24。Next, the electrode material forming mechanism 22 applies an electrode material ink to the ceramic sheet S on the coating roller 12, and prints an electrode circuit (internal electrode circuit) 24 of a specific pattern pattern. After the electrode circuit 24 is printed, the warm air of a specific temperature is sprayed by the drying and curing device 26 to dry the electrode circuit 24. Here, the electrode circuit is formed by performing electrode printing by changing the pattern pattern so that the electrode circuit 24 becomes a counter electrode in each layer (per week) when winding is performed on the outer peripheral surfaces of the laminating rolls 14, 15. In this way, the electrode sheet 24 is formed on the ceramic sheet S on the coating roller 12.

繼而,以特定之加壓力使疊層輥14介隔著陶瓷片S加壓接觸於塗佈輥12。再者,上述加壓力必需根據陶瓷片S之材料進行適當調整。繼之,將形成於塗佈輥12之外周面之乾燥後之陶瓷片S(已形成電極電路)自塗佈輥12之外周面剝離後,轉印並捲繞於疊層輥14之外周面上。此處,由於塗佈輥12之外周面上經實施脫模處理,且疊層輥14以特定之加壓力介隔陶瓷片S接觸於塗佈輥12,因此,形成於塗佈輥12之外周面之乾燥後之陶瓷片S容易自塗佈輥12之外周面剝離,且轉印至疊層輥14之外周面。疊層輥14係於金屬製之圓筒型夾具之外周面上捲繞有彈性樹脂薄膜,且以其外周面之溫度達到特定溫度之方式進行溫度調整。再者,外周面之溫度必需根據陶瓷片S之材料進行適當調整。Then, the laminating roller 14 is press-contacted to the coating roller 12 via the ceramic sheet S with a specific pressing force. Further, the above-described pressing force must be appropriately adjusted in accordance with the material of the ceramic sheet S. Then, the dried ceramic sheet S (formed electrode circuit) formed on the outer peripheral surface of the coating roll 12 is peeled off from the outer peripheral surface of the coating roll 12, and then transferred and wound around the outer peripheral surface of the laminating roll 14. on. Here, since the outer peripheral surface of the coating roller 12 is subjected to a mold release treatment, and the laminating roller 14 is in contact with the coating roller 12 with a specific pressing force, the ceramic sheet S is formed on the outer circumference of the coating roller 12. The dried ceramic sheet S is easily peeled off from the outer peripheral surface of the coating roll 12 and transferred to the outer peripheral surface of the laminating roll 14. The laminating roller 14 is wound with an elastic resin film on the outer peripheral surface of a cylindrical jig made of metal, and is temperature-adjusted so that the temperature of the outer peripheral surface thereof reaches a specific temperature. Further, the temperature of the outer peripheral surface must be appropriately adjusted in accordance with the material of the ceramic sheet S.

於利用疊層輥14將陶瓷片S捲繞特定層之後,電極電路形成機構22對電極電路24之印刷停止。繼而,將未印刷電極電路24之陶瓷片S捲繞特定層於疊層輥14上,形成積層構造體S'之外層部。其後,停止對塗佈輥12供給陶瓷漿料,結束陶瓷片S之積層構造體S'之形成,或者藉由切換機構而使疊層輥15加壓接觸於塗佈輥12之外周面,取代疊層輥14之加壓接觸,將陶瓷片S(形成電極電路24後之陶瓷片S)捲繞於疊層輥15之外周面。以此方式形成陶瓷片S之積層構造體S'。After the ceramic sheet S is wound around the specific layer by the laminating roller 14, the electrode circuit forming mechanism 22 stops the printing of the electrode circuit 24. Then, the ceramic sheet S of the unprinted electrode circuit 24 is wound around a specific layer on the laminating roller 14 to form a layer portion other than the laminated structure S'. Thereafter, the supply of the ceramic slurry to the coating roller 12 is stopped, the formation of the laminated structure S' of the ceramic sheet S is completed, or the laminating roller 15 is brought into pressure contact with the outer peripheral surface of the coating roller 12 by a switching mechanism. The ceramic sheet S (the ceramic sheet S after the electrode circuit 24 is formed) is wound around the outer circumferential surface of the laminating roller 15 instead of the press contact of the laminating rolls 14. In this way, the laminated structure S' of the ceramic sheet S is formed.

進而,將形成於疊層輥14之陶瓷片S之積層構造體S'與圓筒型夾具一併拆除,保持著圓筒形狀進行加壓衝壓,並藉由切割機切割而切斷成碎片狀。其後,進行煅燒,形成電極電路(外部電極電路)等,經由通常之製造製程,製造出積層陶瓷電容器。Further, the laminated structure S' of the ceramic sheet S formed on the laminating rolls 14 is removed together with the cylindrical jig, held in a cylindrical shape, pressed and pressed, and cut into pieces by cutting by a cutter. . Thereafter, firing is performed to form an electrode circuit (external electrode circuit) or the like, and a multilayer ceramic capacitor is produced through a usual manufacturing process.

根據第1實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法,當塗佈輥12之外周面存在微小之劃痕或突起物時,於塗佈後之陶瓷片S中會反覆產生缺陷部28,但可藉由反覆使用同一塗佈輥12,而於圓筒狀捲繞在疊層輥14上之積層構造體S'中,使缺陷部28集中於限定之區域。於將以此方式獲得之陶瓷片S之積層構造體S'切斷分割所得之電子零件中,可抑制品質不良之產生。According to the manufacturing method of the laminated electronic component manufacturing apparatus and the laminated electronic component of the first embodiment, when there are minute scratches or protrusions on the outer circumferential surface of the coating roller 12, the ceramic sheet S after coating is repeated. Although the defective portion 28 is produced, the defective portion 28 can be concentrated in a limited region by repeatedly applying the same coating roller 12 to the laminated structure S' which is wound around the laminated roller 14 in a cylindrical shape. In the electronic component obtained by cutting and dividing the laminated structure S' of the ceramic sheet S obtained in this manner, occurrence of quality defects can be suppressed.

又,於陶瓷片S自塗佈輥12上剝離後捲繞於疊層輥14之外周面,形成陶瓷片S之積層構造體S'時,由於塗佈輥12上持續形成新的陶瓷片S,因此,在塗佈輥12上形成陶瓷片S、與在疊層輥14上形成陶瓷片S之積層構造體S'係同時進行。藉此,可連續地形成陶瓷片S,而不會暫停塗佈輥12之旋轉驅動,又,可連續地製造陶瓷片S之積層構造體S',不會暫停疊層輥14之旋轉驅動。藉此,便可藉由連續運轉而非藉由間歇性運轉來形成陶瓷片S之積層構造體S'。其結果,可於極短之時間內形成陶瓷片S之積層構造體S',從而可提高陶瓷片S之積層構造體S'之製造效率。Moreover, when the ceramic sheet S is peeled off from the coating roll 12 and wound around the outer peripheral surface of the lamination roll 14, and the laminated structure S' of the ceramic sheet S is formed, a new ceramic sheet S continues to be formed on the coating roll 12. Therefore, the ceramic sheet S is formed on the coating roller 12, and the laminated structure S' in which the ceramic sheet S is formed on the laminating roller 14 is simultaneously performed. Thereby, the ceramic sheet S can be continuously formed without suspending the rotational driving of the coating roller 12, and the laminated structure S' of the ceramic sheet S can be continuously produced without suspending the rotational driving of the laminating roller 14. Thereby, the laminated structure S' of the ceramic sheet S can be formed by continuous operation instead of intermittent operation. As a result, the laminated structure S' of the ceramic sheet S can be formed in a very short period of time, and the manufacturing efficiency of the laminated structure S' of the ceramic sheet S can be improved.

又,陶瓷片S係形成於作為剛體之塗佈輥12上,且自片材成形直至片材積層步驟為止由塗敷搬送輥12或轉印輥14一面支持片材面一面進行搬送,因此,即使使用薄且低強度之陶瓷片S,亦可抑制陶瓷片S之破損或劃傷之產生。其結果,便可提昇薄且低強度之陶瓷片S之操作性。Further, the ceramic sheet S is formed on the application roller 12 as a rigid body, and is conveyed while the sheet is being conveyed by the application conveyance roller 12 or the transfer roller 14 from the sheet forming process to the sheet laminating step. Even if a thin and low-strength ceramic sheet S is used, the occurrence of breakage or scratching of the ceramic sheet S can be suppressed. As a result, the operability of the thin and low-strength ceramic sheet S can be improved.

又,如圖1所示,可藉由使塗佈輥12與疊層輥14之外周長相同,或者使該等中之一個外周長為另一個外周長之整數比,而如圖2所示,使缺陷部28進一步集中於特定部位。於外周長未達整數比之情形時,疊層輥14上之陶瓷片S之積層構造體S'中產生之缺陷部28將集中於疊層輥14之同一圓周軌道上(沿輸送方向觀察陶瓷片時積層構造體之同一行)。進而,於疊層輥14之外周長比塗佈輥12之外周長長整數倍之情形時,可使疊層輥14上之陶瓷片S之積層構造體S'中產生之缺陷部28集中於疊層輥14之同一座標上(沿輸送方向觀察陶瓷片時積層構造體上之同一列與行)。Further, as shown in FIG. 1, the circumference of the coating roller 12 and the laminating roller 14 may be the same, or one of the outer circumferences may be an integer ratio of the other outer circumference, as shown in FIG. The defect portion 28 is further concentrated on a specific portion. When the outer circumference is not in an integer ratio, the defective portion 28 generated in the laminated structure S' of the ceramic sheet S on the laminating roller 14 will be concentrated on the same circumferential orbit of the laminating roller 14 (the ceramic is observed in the conveying direction) The same line of the sliced layer structure). Further, when the outer circumference of the laminating roller 14 is longer than the outer circumference of the coating roller 12, the defective portion 28 generated in the laminated structure S' of the ceramic sheet S on the laminating roller 14 can be concentrated on The same row of the laminating rolls 14 (the same row and row on the laminated structure when the ceramic sheets are observed in the conveying direction).

又,與使用公知之陶瓷漿料之間歇塗佈之方法相比,可獲得陶瓷片S之膜厚之均一性、及高生產率。即,由於陶瓷片S之積層構造體S'連續地形成為圓筒形,因此,與間歇塗佈相比,膜厚之穩定區域變廣。其結果,可自陶瓷片S之積層構造體S'中獲得品質穩定之電子零件。陶瓷片S之積層構造體每一單位體積中可獲得之電子零件之個數變多。Moreover, the uniformity of the film thickness of the ceramic sheet S and the high productivity can be obtained as compared with the method of intermittent coating using a known ceramic slurry. In other words, since the laminated structure S' of the ceramic sheet S is continuously formed into a cylindrical shape, the stable region of the film thickness is wider than that of the intermittent coating. As a result, an electronic component of stable quality can be obtained from the laminated structure S' of the ceramic sheet S. The number of electronic parts available per unit volume of the laminated structure of the ceramic sheet S is increased.

又,本實施形態係無需使用拋棄式基材(PET薄膜等)之中間消耗材料,故可削減包括保管、運輸等在內之中間材料成本,因此,可大幅降低陶瓷片S之積層構造體S'之製造成本,進而大幅降低電子零件之製造成本。Further, in the present embodiment, it is not necessary to use an intermediate-consumption material of a disposable substrate (such as a PET film), so that the cost of the intermediate material including storage, transportation, and the like can be reduced, so that the laminated structure S of the ceramic sheet S can be greatly reduced. 'The manufacturing cost, which in turn significantly reduces the manufacturing costs of electronic components.

又,本實施形態係藉由連結成膜步驟、印刷步驟或積層步驟,而僅形成所需量之陶瓷片S即可,不存在先前般於積層之搬送路徑上產生損失或產生積層端數等,故可降低材料損耗。Further, in the present embodiment, it is only necessary to form the ceramic sheet S of a desired amount by connecting the film forming step, the printing step or the laminating step, and there is no loss or generation of the number of laminated ends in the transport path of the previous layer. Therefore, material loss can be reduced.

又,本實施形態係於陶瓷片S積層於疊層輥14之外周面之前形成電極電路24,因此,換言之,於陶瓷片S上形成電極電路24之後,將已形成電極電路24之陶瓷片S捲繞於疊層輥14之外周面進行積層。假若於陶瓷片S積層於疊層輥14之外周面之後,在陶瓷片S上形成電極電路24,則形成於下層陶瓷片S上之電極電路24、或下層之已形成電極電路之陶瓷片S會因電極溶劑而產生片材侵蝕。如本發明所述,若於單層之陶瓷片之狀態下形成電極電路,則可將片材侵蝕之影響抑制於僅單層之最低限度,從而可減少短路或IR不良(絕緣電阻不良)等故障。Further, in the present embodiment, the electrode circuit 24 is formed before the ceramic sheet S is laminated on the outer peripheral surface of the laminating roller 14. Therefore, in other words, after the electrode circuit 24 is formed on the ceramic sheet S, the ceramic sheet S on which the electrode circuit 24 has been formed is formed. The outer peripheral surface of the lamination roll 14 is wound and laminated. If the electrode sheet 24 is formed on the ceramic sheet S after the ceramic sheet S is laminated on the outer peripheral surface of the stacking roll 14, the electrode circuit 24 formed on the lower layer ceramic sheet S, or the underlying ceramic sheet S on which the electrode circuit has been formed Sheet erosion occurs due to electrode solvent. According to the present invention, if an electrode circuit is formed in a state of a single-layer ceramic sheet, the influence of sheet erosion can be suppressed to a minimum of a single layer, thereby reducing short-circuit or IR failure (insulation resistance). malfunction.

尤其於塗佈輥12上同時進行陶瓷片S之形成與電極電路24之形成,因此,可使一設備整體變得簡易且緊湊,從而可降低設備價格且減小面積,又,可提高設備之可靠性。In particular, the formation of the ceramic sheet S and the formation of the electrode circuit 24 are simultaneously performed on the coating roller 12, so that the entire apparatus can be made simple and compact, thereby reducing the price of the apparatus and reducing the area, and the apparatus can be improved. reliability.

又,由於在塗佈輥12上使陶瓷漿料乾燥,於另外設置之疊層輥14上積層陶瓷片S,因此,不會對乾燥後之陶瓷片S上塗佈陶瓷漿料,故不會產生再溶解造成之片材侵蝕。Further, since the ceramic slurry is dried on the coating roller 12, the ceramic sheet S is laminated on the additional laminating roller 14, so that the ceramic slurry is not applied to the dried ceramic sheet S, so that it does not Produces sheet erosion caused by redissolution.

又,可藉由使用噴墨等無版印刷法,形成電極電路24,而於陶瓷片S之每一層形成具有不同電極圖案之電極電路24。尤其,即便伴隨著陶瓷片S之積層之進行,陶瓷片S變形或疊層輥14外徑增加等導致周長增加,亦可自由地變更電極電路24之圖案或形成位置,因此,可適當調整電極電路24間之間距(間隔),形成無錯位之電極電路24。Further, the electrode circuit 24 can be formed by a plateless printing method such as inkjet, and the electrode circuit 24 having a different electrode pattern can be formed in each of the ceramic sheets S. In particular, even if the ceramic sheet S is deformed or the outer diameter of the laminating roller 14 is increased, the circumferential length is increased, and the pattern or formation position of the electrode circuit 24 can be freely changed, so that it can be appropriately adjusted. The electrode circuits 24 are spaced apart (interval) to form an electrode circuit 24 without misalignment.

再者,於第1實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。In the first embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination rolls 14 and 15 correspond to the "layered support" of the present invention.

其次,參照圖式,對本發明第2實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與第1實施形態之構成重複之構成標註相同之符號,且省略重複之構成與作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a second embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those in the first embodiment are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖3所示,第2實施形態係印刷搬送輥(搬送構件)30介隔陶瓷片S接觸於塗佈輥12。又,中間搬送輥(搬送構件)32係介隔陶瓷片S接觸於印刷搬送輥30。2個疊層輥14或疊層輥15係介隔陶瓷片S接觸於中間搬送輥32。壓輥34、36係分別介隔陶瓷片S接觸於2個疊層輥14或疊層輥15。如上所述,於塗佈輥12與各疊層輥14、15之間插入有印刷搬送輥30及中間搬送輥32。因此,塗佈輥12與各疊層輥14、15處於間接接觸之狀態(可機械性傳遞動力之狀態)。As shown in FIG. 3, in the second embodiment, the printing conveyance roller (transport member) 30 is in contact with the coating roller 12 via the ceramic sheet S. Further, the intermediate transfer roller (transport member) 32 is in contact with the printing conveyance roller 30 via the ceramic sheet S. The two lamination rollers 14 or the laminating roller 15 are in contact with the intermediate conveyance roller 32 via the ceramic sheet S. The pressure rolls 34 and 36 are in contact with the two lamination rolls 14 or the lamination rolls 15 via the ceramic sheets S, respectively. As described above, the printing conveyance roller 30 and the intermediate conveyance roller 32 are inserted between the application roller 12 and each of the lamination rollers 14 and 15. Therefore, the coating roller 12 is in indirect contact with each of the laminating rolls 14, 15 (a state in which power can be mechanically transmitted).

又,於塗佈輥12之周圍,配置有成膜機構16(成膜形成部),其係用以對塗佈輥12之表面塗佈作為陶瓷片S之材料之陶瓷漿料;供液機構18,其係用以對成膜機構16供給陶瓷漿料;以及乾燥固化裝置20,其係位於成膜機構16之塗佈輥旋轉方向下游側,且用以使塗佈輥12之表面上之陶瓷漿料乾燥固化。於印刷搬送輥30之周圍,配置有用以於捲繞(積層)於疊層輥14、15之外周面之前之陶瓷片S上形成電極電路24之電極電路形成機構22(電極電路形成部)、位於電極電路形成機構22之第1供給輥旋轉方向下游側且用以使電極電路24乾燥之乾燥固化裝置26、以及上述中間搬送輥32。Further, around the coating roller 12, a film forming mechanism 16 (film forming portion) for applying a ceramic slurry as a material of the ceramic sheet S to the surface of the coating roller 12 is disposed; a liquid supply mechanism 18, which is used to supply the ceramic slurry to the film forming mechanism 16; and a drying and curing device 20 which is located on the downstream side of the coating roller 16 in the rotation direction of the coating roller 16 and is used to make the surface of the coating roller 12 The ceramic slurry is dried and cured. An electrode circuit forming mechanism 22 (electrode circuit forming portion) for forming the electrode circuit 24 on the ceramic sheet S before being wound (laminated) on the outer peripheral surface of the lamination rolls 14 and 15 is disposed around the printing conveyance roller 30, The drying and curing device 26 for drying the electrode circuit 24 on the downstream side of the first supply roller in the rotation direction of the electrode circuit forming mechanism 22, and the intermediate transfer roller 32.

此處,印刷搬送輥30及中間搬送輥32具有如下功能,藉由黏著等方法,而自前步驟接收陶瓷片S,並將接收之陶瓷片S供給至後步驟。印刷搬送輥30及中間搬送輥32係適當地選擇金屬或樹脂之剛體輥、或表面塗敷有樹脂之輥等。Here, the printing conveyance roller 30 and the intermediate conveyance roller 32 have a function of receiving the ceramic sheet S from the previous step by a method such as adhesion, and supplying the received ceramic sheet S to the subsequent step. The printing conveyance roller 30 and the intermediate conveyance roller 32 are suitably selected as a rigid body roll of metal or resin, or a roll coated with a resin on the surface.

由於印刷搬送輥30保持陶瓷片S之力係設定為大於塗佈輥12保持陶瓷片S之力,進而設定為小於中間搬送輥32保持陶瓷片S之力,因此,陶瓷片S自塗佈輥12剝離後由印刷搬送輥30保持,其後,轉印至中間搬送輥32。由於中間搬送輥32保持陶瓷片S之力係設定為小於疊層輥14保持陶瓷片S之力,因此,陶瓷片S係自中間搬送輥32剝離後轉印至疊層輥14。疊層輥14之彈性體之表面係藉由黏著或靜電吸附等方法來保持陶瓷片S。又,由疊層輥14捲繞之陶瓷片S係將疊合之片層彼此壓接而相互進行保持。由於該等保持力係設定為大於中間搬送輥32保持陶瓷片S之力,因此,陶瓷片S係自中間搬送輥32剝離後轉印至疊層輥14上。Since the force of the printing conveyance roller 30 to hold the ceramic sheet S is set to be larger than the force of the coating roller 12 to hold the ceramic sheet S, and further set to be smaller than the force of the intermediate conveyance roller 32 to hold the ceramic sheet S, the ceramic sheet S is self-coated roller. After the peeling 12 is carried out by the printing conveyance roller 30, it is transferred to the intermediate conveyance roller 32. Since the force by which the intermediate transfer roller 32 holds the ceramic sheet S is set to be smaller than the force by which the laminated roller 14 holds the ceramic sheet S, the ceramic sheet S is peeled off from the intermediate transfer roller 32 and then transferred to the laminating roller 14. The surface of the elastic body of the laminating roller 14 holds the ceramic sheet S by adhesion or electrostatic adsorption. Further, the ceramic sheet S wound by the laminating rolls 14 presses the laminated sheets to each other and holds them together. Since the holding force is set to be larger than the force by which the intermediate transfer roller 32 holds the ceramic sheet S, the ceramic sheet S is peeled off from the intermediate transfer roller 32 and transferred to the laminating roller 14.

詳細而言,印刷搬送輥30具有將陶瓷片S自塗佈輥12剝離並轉印至中間搬送輥32之功能。又,中間搬送輥32具有將陶瓷片S自印刷搬送輥30剝離並轉印至疊層輥14之功能。印刷搬送輥30及中間搬送輥32亦可為將陶瓷片S吸附(吸引或靜電吸附)著進行剝離搬送之剝離搬送輥。此時,印刷搬送輥30及中間搬送輥32優選以對吸附陶瓷片S之部位與不吸附陶瓷片S之部位進行控制之方式構成。於自塗佈輥12接收陶瓷片S時,使與陶瓷片S接觸之印刷搬送輥30之特定部位具有吸附功能,於將接收之陶瓷片S轉印至中間搬送輥32時,使與陶瓷片S接觸之印刷搬送輥30之特定部位具有不吸附區域,藉此,便可順利地接收與轉印陶瓷片S。就上述吸附功能與不吸附區域而言,中間搬送輥32亦為相同情況。即,於自印刷搬送輥30接收陶瓷片S時,使與陶瓷片S接觸之中間搬送輥32之特定部位具有吸附功能,於將接收之陶瓷片S轉印至疊層輥14時,使與陶瓷片S接觸之中間搬送輥32之特定部位具有不吸附區域,藉此,便可順利地接收與轉印陶瓷片S。Specifically, the printing conveyance roller 30 has a function of peeling the ceramic sheet S from the application roller 12 and transferring it to the intermediate conveyance roller 32. Further, the intermediate transfer roller 32 has a function of peeling the ceramic sheet S from the transfer conveyance roller 30 and transferring it to the laminating roller 14. The printing conveyance roller 30 and the intermediate conveyance roller 32 may be a peeling conveyance roller which adsorbs (sucks or electrostatically adsorbs) the ceramic sheet S and performs peeling conveyance. At this time, it is preferable that the printing conveyance roller 30 and the intermediate conveyance roller 32 are configured to control a portion where the ceramic sheet S is adsorbed and a portion where the ceramic sheet S is not adsorbed. When the ceramic sheet S is received from the coating roller 12, the specific portion of the printing conveyance roller 30 that is in contact with the ceramic sheet S has an adsorption function, and when the received ceramic sheet S is transferred to the intermediate conveyance roller 32, the ceramic sheet is used. The specific portion of the printing conveyance roller 30 that is in contact with S has a non-adsorption region, whereby the ceramic sheet S can be smoothly received and transferred. The intermediate transfer roller 32 is also the same in the above-described adsorption function and non-adsorption region. In other words, when the ceramic sheet S is received from the printing conveyance roller 30, the specific portion of the intermediate conveyance roller 32 that is in contact with the ceramic sheet S has an adsorption function, and when the received ceramic sheet S is transferred to the laminating roller 14, The specific portion of the intermediate transfer roller 32 in contact with the ceramic sheet S has a non-adsorption region, whereby the ceramic sheet S can be smoothly received and transferred.

第2實施形態係利用成膜機構16與供液機構18來對塗佈輥12之外周面供給陶瓷漿料。繼而,於塗佈輥12上藉由乾燥固化裝置20而使陶瓷漿料乾燥固化。以此方式形成陶瓷片S。又,對自塗佈輥12移動至印刷搬送輥30上之陶瓷片S,自電極電路形成機構22(例如噴墨印刷)塗佈電極材料油墨,印刷特定之圖形圖案之電極電路24。於電極電路24之印刷後,自乾燥固化裝置26對印刷搬送輥30上之陶瓷片S噴附特定溫度之暖風,使電極電路24乾燥。以此方式,於印刷搬送輥30上之陶瓷片S形成電極電路24。其後,形成有電極電路24之陶瓷片S由中間搬送輥32接收,並捲繞於疊層輥14之外周面進行積層。藉此,形成陶瓷片S之積層構造體S'。如上所述,即便於第2實施形態中,亦於陶瓷片S上形成電極電路24後,將已形成電極電路24之陶瓷片S捲繞於疊層輥14之外周面進行積層。塗佈輥12、印刷搬送輥30、疊層輥14之外周面係以達到適當之溫度方式藉由溫度調節器來進行溫度調整。In the second embodiment, the ceramic slurry is supplied to the outer peripheral surface of the coating roller 12 by the film forming mechanism 16 and the liquid supply mechanism 18. Then, the ceramic slurry is dried and solidified by drying the curing device 20 on the coating roller 12. The ceramic sheet S is formed in this manner. Further, the ceramic sheet S moved from the coating roller 12 to the printing conveyance roller 30 is coated with the electrode material ink from the electrode circuit forming mechanism 22 (for example, inkjet printing), and the electrode circuit 24 of the specific pattern pattern is printed. After the printing of the electrode circuit 24, the ceramic sheet S on the printing conveyance roller 30 is sprayed with a warm air of a specific temperature from the drying and curing device 26, and the electrode circuit 24 is dried. In this way, the ceramic piece S on the printing conveyance roller 30 forms the electrode circuit 24. Thereafter, the ceramic sheet S on which the electrode circuit 24 is formed is received by the intermediate transfer roller 32, and wound around the outer peripheral surface of the stacking roll 14 to be laminated. Thereby, the laminated structure S' of the ceramic sheet S is formed. As described above, even in the second embodiment, after the electrode circuit 24 is formed on the ceramic sheet S, the ceramic sheet S on which the electrode circuit 24 has been formed is wound around the outer peripheral surface of the stacking roll 14 to be laminated. The outer circumferential surfaces of the coating roller 12, the printing conveyance roller 30, and the laminating roller 14 are temperature-adjusted by a temperature adjuster so as to reach an appropriate temperature.

根據第2實施形態,陶瓷片S自塗佈輥12之剝離不會受到疊層輥14側之狀態影響,故可進行穩定之操作。具體而言,若於疊層輥14不斷形成陶瓷片S之積層構造體S',則疊層輥14之包括陶瓷片在內之大小(外徑)會不斷變大,又,產生電極電路24之部位出現凹凸等外形上之狀態變化。然而,可藉由使印刷搬送輥30及中間搬送輥32插入於塗佈輥12與疊層輥14之間,而結合上述疊層輥14之狀態變化,適當地調整疊層輥14與印刷搬送輥30及中間搬送輥32之位置關係或壓力等。藉此,可防止形成於疊層輥14上之陶瓷片S之積層構造體S'之品質因疊層輥14之狀態變化而劣化。又,可藉由將疊層輥14設計成不與塗佈輥12直接接觸,而防止疊層輥14隨著自身之狀態變化,將形成於塗層輥12上之陶瓷片S劃傷,從而可防止導致陶瓷片S乃至電子零件之品質劣化。According to the second embodiment, the peeling of the ceramic sheet S from the coating roller 12 is not affected by the state of the laminating roller 14 side, so that stable operation can be performed. Specifically, when the laminated body 14 continuously forms the laminated structure S' of the ceramic sheet S, the size (outer diameter) of the laminated roll 14 including the ceramic piece is continuously increased, and the electrode circuit 24 is generated. The position changes in the shape such as unevenness. However, by inserting the printing conveyance roller 30 and the intermediate conveyance roller 32 between the application roller 12 and the laminating roller 14, the state of the laminating roller 14 is changed in accordance with the state change, and the laminating roller 14 and the printing conveyance are appropriately adjusted. The positional relationship, pressure, and the like of the roller 30 and the intermediate transfer roller 32. Thereby, the quality of the laminated structure S' of the ceramic sheet S formed on the lamination roll 14 can be prevented from deteriorating due to a change in the state of the laminating rolls 14. Further, by designing the laminating roller 14 not to be in direct contact with the coating roller 12, the laminating roller 14 is prevented from being scratched by the state of itself, and the ceramic sheet S formed on the coating roller 12 is scratched. It can prevent deterioration of the quality of the ceramic sheet S or even the electronic parts.

又,可藉由設置印刷搬送輥30及中間搬送輥32,而避免塗佈輥12大型化,使陶瓷片S移動之路徑在供給至疊層輥14之前變長,因此,可延長陶瓷片S及電極電路24之乾燥時間。而且,由於對塗層輥12連續地塗佈陶瓷漿料,因此,可連續地進行陶瓷片S自塗佈輥12經由印刷搬送輥30及中間搬送輥32供給至疊層輥14為止之移動步驟。其結果,可提高設備之生產線速度,從而可提高陶瓷片S之製造速度(製造效率),故可提高陶瓷片S之積層構造體S'乃至電子零件之製造效率。Further, by providing the printing conveyance roller 30 and the intermediate conveyance roller 32, the application roller 12 can be prevented from being increased in size, and the path in which the ceramic sheet S moves can be lengthened before being supplied to the laminating roller 14, so that the ceramic sheet S can be extended. And the drying time of the electrode circuit 24. Further, since the ceramic slurry is continuously applied to the coating roller 12, the moving step of the ceramic sheet S from the coating roller 12 to the laminating roller 14 via the printing conveyance roller 30 and the intermediate conveyance roller 32 can be continuously performed. . As a result, the production line speed of the apparatus can be increased, and the manufacturing speed (manufacturing efficiency) of the ceramic sheet S can be improved, so that the manufacturing efficiency of the laminated structure S' of the ceramic sheet S or even the electronic parts can be improved.

進而,於印刷搬送輥30上之陶瓷片S形成電極電路24。藉此,於在塗佈輥12上可靠地經乾燥之陶瓷片S形成電極電路24,因此,可進一步提高電極電路24之形成位置之位置精度。反之,若於半乾燥之陶瓷片S形成電極電路24,則由於成為底層之陶瓷片S產生變形等,而存在形成於其上之電極電路24之位置亦產生錯位之虞。為解決上述問題,第2實施形態係對在塗佈輥12上可靠地經乾燥之陶瓷片S形成電極電路24。Further, the ceramic piece S on the printing conveyance roller 30 forms the electrode circuit 24. Thereby, the electrode circuit 24 is formed on the ceramic sheet S which is reliably dried on the coating roller 12, so that the positional accuracy of the formation position of the electrode circuit 24 can be further improved. On the other hand, when the electrode circuit 24 is formed in the semi-dried ceramic sheet S, the ceramic sheet S which is the underlayer is deformed or the like, and the position of the electrode circuit 24 formed thereon is also displaced. In order to solve the above problem, in the second embodiment, the electrode circuit 24 is formed on the ceramic sheet S which is reliably dried on the coating roller 12.

再者,於第2實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。又,印刷搬送輥30及中間搬送輥32係對應於本發明之「搬送構件」。In the second embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination rolls 14 and 15 correspond to the "layered support" of the present invention. Further, the printing conveyance roller 30 and the intermediate conveyance roller 32 correspond to the "transport member" of the present invention.

繼而,參照圖式,對本發明第3實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與上述各實施形態之構成重複之構成標註相同之符號,並省略重複之構成及作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a third embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those of the above-described embodiments are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖4所示,第3實施形態係於環狀搬送帶(搬送構件)38上對陶瓷片S形成電極電路24。亦即,中間搬送輥(搬送構件)40係介隔陶瓷片S接觸於塗佈輥12。又,環狀搬送帶38係介隔陶瓷片S接觸於中間搬送輥40。又,中間搬送輥(搬送構件)42係介隔陶瓷片S接觸於環狀搬送帶38。2個疊層輥14或疊層輥15係介隔陶瓷片S接觸於中間搬送輥42。壓輥34、36係分別介隔陶瓷片S接觸於2個疊層輥14或疊層輥15。如此般,於塗佈輥12與各疊層輥14、15之間插入有中間搬送輥40、環狀搬送帶38及中間搬送輥42。因此,塗佈輥12與各疊層輥14、15成為間接接觸之狀態(可機械性傳遞動力之狀態)。As shown in FIG. 4, in the third embodiment, the electrode circuit 24 is formed on the ceramic sheet S on the endless belt (transport member) 38. That is, the intermediate transfer roller (transport member) 40 is in contact with the coating roller 12 via the ceramic sheet S. Further, the endless belt 38 is in contact with the intermediate transfer roller 40 via the ceramic sheet S. Further, the intermediate transfer roller (transport member) 42 is in contact with the annular transfer belt 38 via the ceramic sheet S. The two lamination rollers 14 or the laminating roller 15 are in contact with the intermediate transfer roller 42 via the ceramic sheet S. The pressure rolls 34 and 36 are in contact with the two lamination rolls 14 or the lamination rolls 15 via the ceramic sheets S, respectively. In this manner, the intermediate transfer roller 40, the endless conveyance belt 38, and the intermediate conveyance roller 42 are interposed between the application roller 12 and each of the lamination rollers 14 and 15. Therefore, the application roller 12 and the laminating rolls 14 and 15 are in indirect contact state (a state in which power can be mechanically transmitted).

又,於塗佈輥12之周圍,配置有成膜機構16(成膜形成部),其係用以對塗佈輥12之表面塗佈作為陶瓷片S之材料之陶瓷漿料;供液機構18,其係用以對成膜機構16供給陶瓷漿料;乾燥固化裝置20,其係位於成膜機構16之塗佈輥旋轉方向下游側,且用以使塗佈輥12之表面上之陶瓷漿料乾燥固化;以及上述中間搬送輥40。於環狀搬送帶38之周圍,配置有用以於捲繞(積層)於疊層輥14、15之外周面之前之陶瓷片S上形成電極電路24之電極電路形成機構22、位於電極電路形成機構22之環狀帶旋轉方向下游側且用以使電極電路24乾燥之乾燥固化裝置26、以及上述中間搬送輥42。Further, around the coating roller 12, a film forming mechanism 16 (film forming portion) for applying a ceramic slurry as a material of the ceramic sheet S to the surface of the coating roller 12 is disposed; a liquid supply mechanism 18, which is used to supply the ceramic slurry to the film forming mechanism 16; the drying and curing device 20 is located on the downstream side of the coating roller rotating direction of the film forming mechanism 16, and is used to make the ceramic on the surface of the coating roller 12. The slurry is dried and solidified; and the intermediate transfer roller 40 described above. An electrode circuit forming mechanism 22 for forming the electrode circuit 24 on the ceramic sheet S before being wound (laminated) on the outer peripheral surface of the lamination rolls 14 and 15 is disposed around the endless belt 38, and the electrode circuit forming mechanism is disposed. A drying and curing device 26 for drying the electrode circuit 24 on the downstream side in the direction of rotation of the annular band of 22, and the intermediate transfer roller 42 described above.

詳細而言,中間搬送輥40具有將陶瓷片S自塗佈輥12剝離且轉印至環狀搬送帶38之功能。第3實施形態中,於中間搬送輥40上之陶瓷片S未形成電極電路24。環狀搬送帶38具有將陶瓷片S自中間搬送輥40剝離且轉印至中間搬送輥42之功能。又,中間搬送輥42具有將陶瓷片S自環狀搬送帶38剝離且轉印至疊層輥14之功能。Specifically, the intermediate transfer roller 40 has a function of peeling the ceramic sheet S from the application roller 12 and transferring it to the endless conveyance belt 38. In the third embodiment, the electrode piece 24 is not formed on the ceramic sheet S on the intermediate transfer roller 40. The endless conveyance belt 38 has a function of peeling the ceramic sheet S from the intermediate conveyance roller 40 and transferring it to the intermediate conveyance roller 42. Further, the intermediate transfer roller 42 has a function of peeling the ceramic sheet S from the endless conveyance belt 38 and transferring it to the laminating roller 14.

第3實施形態係利用成膜機構16及供液機構18對塗佈輥12之外周面塗佈供給陶瓷漿料。而且,藉由乾燥固化裝置20於塗佈輥12上使陶瓷漿料乾燥固化。以此方式,形成陶瓷片S。又,對自塗佈輥12經由中間搬送輥40移動至環狀搬送帶38之陶瓷片S,自電極電路形成機構22(例如噴墨印刷)塗佈電極材料油墨,印刷特定之圖形圖案之電極電路(內部電極電路)24。於電極電路24之印刷後,自乾燥固化裝置26對環狀搬送帶38上之陶瓷片S噴附特定溫度之暖風,使電極電路24乾燥。以此方式,對環狀搬送帶38上之陶瓷片S形成電極電路24。其後,形成有電極電路24之陶瓷片S由中間搬送輥42接收,且捲繞於疊層輥14之外周面進行積層。藉此,形成陶瓷片S之積層構造體S'。如此般,即便於第3實施形態中,亦於在陶瓷片S上形成電極電路24後,將已形成電極電路24之陶瓷片S捲繞於疊層輥14之外周面進行積層。In the third embodiment, the ceramic slurry is applied to the outer circumferential surface of the coating roller 12 by the film forming mechanism 16 and the liquid supply mechanism 18. Further, the ceramic slurry is dried and solidified on the coating roller 12 by the drying and curing device 20. In this way, the ceramic sheet S is formed. Further, the ceramic sheet S which has been moved from the application roller 12 to the endless conveyance belt 38 via the intermediate conveyance roller 40, and the electrode material ink is applied from the electrode circuit formation mechanism 22 (for example, inkjet printing), and the electrode of the specific pattern pattern is printed. Circuit (internal electrode circuit) 24. After the printing of the electrode circuit 24, the ceramic sheet S on the endless belt 38 is sprayed with a warm air of a specific temperature from the drying and curing device 26 to dry the electrode circuit 24. In this way, the electrode circuit 24 is formed on the ceramic sheet S on the endless belt 38. Thereafter, the ceramic sheet S on which the electrode circuit 24 is formed is received by the intermediate transfer roller 42, and is wound around the outer peripheral surface of the stacking roller 14 to be laminated. Thereby, the laminated structure S' of the ceramic sheet S is formed. In the third embodiment, even after the electrode circuit 24 is formed on the ceramic sheet S, the ceramic sheet S on which the electrode circuit 24 has been formed is wound around the outer peripheral surface of the stacking roll 14 to be laminated.

根據第3實施形態,由於作為長條輸送帶之環狀搬送帶38之外周長長於塗佈輥12之外周長或者中間搬送輥40之外周長,因此,可擴展環狀搬送帶38上之陶瓷片S之乾燥區域(可藉由乾燥固化裝置26而乾燥之區域)。藉此,便可使位於陶瓷片S上之電極電路24之形成速度(亦包括乾燥速度)變快,進而提高電子零件之製造速度。According to the third embodiment, since the outer circumference of the endless belt conveyor 38 as the long conveyor belt is longer than the outer circumference of the application roller 12 or the outer circumference of the intermediate conveyance roller 40, the ceramic on the endless belt 38 can be expanded. The dried area of the sheet S (the area which can be dried by drying the curing unit 26). Thereby, the formation speed (including the drying speed) of the electrode circuit 24 on the ceramic piece S can be made faster, thereby increasing the manufacturing speed of the electronic component.

尤其當電極電路形成機構22採用噴墨方式時,因油墨之溶劑量較多,而導致油墨難以乾燥。因而,藉由電極電路24之印刷部中採用環狀搬送帶38,而即使不使用大直徑輥,亦可使陶瓷片S之移動距離變長,從而可增加用以使陶瓷片S上之電極電路24乾燥之時間。因此,利用噴墨方式形成之電極電路24之品質之不均一消失,從而可維持電子零件之高品質。In particular, when the electrode circuit forming mechanism 22 employs the ink jet method, the amount of solvent of the ink is large, and the ink is difficult to dry. Therefore, by using the endless belt 38 in the printing portion of the electrode circuit 24, the moving distance of the ceramic sheet S can be lengthened without using a large-diameter roller, so that the electrode for the ceramic sheet S can be increased. The time during which the circuit 24 is dry. Therefore, the unevenness of the quality of the electrode circuit 24 formed by the ink jet method disappears, and the high quality of the electronic component can be maintained.

再者,於第3實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。又,中間搬送輥40、環狀搬送帶38與中間搬送輥42係對應於本發明之「搬送構件」。In the third embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination rolls 14 and 15 correspond to the "layered support" of the present invention. Further, the intermediate transfer roller 40, the endless conveyance belt 38, and the intermediate conveyance roller 42 correspond to the "transport member" of the present invention.

其次,參照圖式,對本發明第4實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與上述各實施形態之構成重複之構成標註相同之符號,並省略重複之構成及作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a fourth embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those of the above-described embodiments are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖5所示,第4實施形態係由作為長條輸送帶之環狀成膜帶44來構成第1實施形態之塗佈輥12。即,中間搬送輥(搬送構件)46係介隔陶瓷片S接觸於形成(成膜)陶瓷片S之環狀成膜帶44。又,2個疊層輥14或疊層輥15係介隔陶瓷片S接觸於中間搬送輥46。壓輥34、36係分別介隔陶瓷片S接觸於2個疊層輥14或疊層輥15。如此般,於環狀成膜帶44與各疊層輥14、15之間插入有中間搬送輥46。因此,環狀成膜帶44與各疊層輥14、15成為間接接觸之狀態(可機械性傳遞動力之狀態)。As shown in Fig. 5, in the fourth embodiment, the coating roll 12 of the first embodiment is constituted by a ring-shaped film forming tape 44 as a long conveyor. In other words, the intermediate transfer roller (transport member) 46 is in contact with the annular film formation tape 44 that forms the (film formation) ceramic sheet S via the ceramic sheet S. Further, the two laminating rolls 14 or the laminating rolls 15 are in contact with the intermediate transfer rolls 46 via the ceramic sheets S. The pressure rolls 34 and 36 are in contact with the two lamination rolls 14 or the lamination rolls 15 via the ceramic sheets S, respectively. In this manner, the intermediate transfer roller 46 is inserted between the annular film forming tape 44 and each of the laminating rolls 14 and 15. Therefore, the annular film-forming tape 44 is brought into indirect contact with each of the laminating rolls 14, 15 (a state in which power can be mechanically transmitted).

尤其於環狀帶成膜44之周圍,配置有成膜機構16(成膜形成部),其係用以對環狀成膜帶44之表面塗佈作為陶瓷片S之材料之陶瓷漿料;供液機構18,其係用以對成膜機構16供給陶瓷漿料;乾燥固化裝置20,其係位於成膜機構16之環狀帶旋轉方向下游側,且用以使環狀成膜帶44之表面上之陶瓷漿料乾燥固化;膜厚檢查裝置(CCD照相機等)48,其係測定陶瓷片S之膜厚;電極電路形成機構22,其係用以於捲繞(積層)於疊層輥14、15之外周面之前之陶瓷片S上形成電極電路24;乾燥固化裝置26,其係位於電極電路形成機構22之環狀帶旋轉方向下游側,且用以使電極電路24乾燥;去除輥50,其將不良之陶瓷片S去除;以及上述中間搬送輥46。In particular, around the endless belt film forming film 44, a film forming mechanism 16 (film forming portion) for applying a ceramic slurry as a material of the ceramic sheet S to the surface of the annular film forming belt 44 is disposed; The liquid supply mechanism 18 is for supplying the ceramic slurry to the film forming mechanism 16; the drying and curing device 20 is located on the downstream side in the rotation direction of the annular belt of the film forming mechanism 16, and is used for the annular film forming belt 44. The ceramic slurry on the surface is dried and solidified; a film thickness inspection device (CCD camera or the like) 48 for measuring the film thickness of the ceramic sheet S; and an electrode circuit forming mechanism 22 for winding (stacking) on the laminate An electrode circuit 24 is formed on the ceramic sheet S before the outer circumferential surface of the rolls 14, 15; a drying and curing device 26 is located on the downstream side in the rotation direction of the endless belt of the electrode circuit forming mechanism 22, and is used to dry the electrode circuit 24; A roller 50 which removes the defective ceramic sheet S; and the intermediate transfer roller 46 described above.

第4實施形態係利用成膜機構16及供液機構18對環狀成膜帶44之外周面供給陶瓷漿料。繼而,於環狀成膜帶44上藉由乾燥固化裝置20而使陶瓷漿料乾燥固化。以此方式,形成陶瓷片S。進而,藉由膜厚檢查裝置(CCD照相機等)48來測定環狀成膜帶44上之陶瓷片S之膜厚。由電極電路形成機構22對陶瓷片S塗佈電極材料油墨,印刷特定之圖形圖案之電極電路24。於電極電路24之印刷後,自乾燥固化裝置26對環狀成膜帶44上之陶瓷片S噴附特定溫度之暖風,使電極電路24乾燥。以此方式,對環狀成膜帶44上之陶瓷片S形成電極電路24。其後,形成有電極電路24之陶瓷片S由中間搬送輥46接收,且捲繞於疊層輥14之外周面進行積層。藉此,形成陶瓷片S之積層構造體S'。如此般,即便於第4實施形態中,亦於在陶瓷片S上形成有電極電路24後,將已形成電極電路24之陶瓷片S捲繞於疊層輥14之外周面進行積層。In the fourth embodiment, the ceramic slurry is supplied to the outer peripheral surface of the annular film-forming tape 44 by the film forming mechanism 16 and the liquid supply mechanism 18. Then, the ceramic slurry is dried and solidified by drying the curing device 20 on the annular film-forming tape 44. In this way, the ceramic sheet S is formed. Further, the film thickness of the ceramic sheet S on the annular film-forming tape 44 is measured by a film thickness inspection device (such as a CCD camera) 48. The electrode material forming means 22 applies an electrode material ink to the ceramic sheet S to print a specific pattern pattern electrode circuit 24. After the printing of the electrode circuit 24, the ceramic sheet S on the annular film-forming tape 44 is sprayed with a warm air of a specific temperature from the drying and curing device 26 to dry the electrode circuit 24. In this way, the electrode pad 24 is formed on the ceramic sheet S on the annular film-forming tape 44. Thereafter, the ceramic sheet S on which the electrode circuit 24 is formed is received by the intermediate transfer roller 46, and wound around the outer peripheral surface of the stacking roll 14 to be laminated. Thereby, the laminated structure S' of the ceramic sheet S is formed. In the fourth embodiment, even after the electrode circuit 24 is formed on the ceramic sheet S, the ceramic sheet S on which the electrode circuit 24 has been formed is wound around the outer peripheral surface of the stacking roll 14 to be laminated.

此處,當電極電路形成機構22採用噴墨方式時,因油墨之溶劑量較多而導致油墨難以乾燥。因而,藉由印刷部中採用環狀成膜帶44,而即使不使用大直徑輥,亦可使陶瓷片S之移動距離變長,從而可增加用以使陶瓷片S上之電極電路24乾燥之時間。因此,由噴墨方式形成之電極電路24之品質之不均一消失,故可維持電子零件之高品質。Here, when the electrode circuit forming mechanism 22 employs the ink jet method, it is difficult to dry the ink due to the large amount of solvent of the ink. Therefore, by using the annular film-forming tape 44 in the printing portion, the moving distance of the ceramic sheet S can be made longer without using a large-diameter roller, so that the electrode circuit 24 on the ceramic sheet S can be increased. Time. Therefore, the unevenness of the quality of the electrode circuit 24 formed by the ink jet method disappears, so that the high quality of the electronic component can be maintained.

再者,於第4實施形態中,環狀成膜帶44係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。又,中間搬送輥46係對應於本發明之「搬送構件」。In the fourth embodiment, the annular film-forming tape 44 corresponds to the "film-forming substrate" of the present invention, and the laminating rolls 14, 15 correspond to the "layered support" of the present invention. Further, the intermediate transfer roller 46 corresponds to the "transport member" of the present invention.

繼而,參照圖式,對本發明第5實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與上述各實施形態之構成重複之構成標註相同之符號,並省略重複之構成及作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a fifth embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those of the above-described embodiments are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖6所示,第5實施形態係採用凹版膠印方式,作為電極電路24之印刷方法。亦即,中間搬送輥(搬送構件)52係介隔陶瓷片S接觸於塗佈輥12。又,於陶瓷片S上形成電極電路24時所使用之印刷搬送輥(搬送構件)54係介隔陶瓷片S接觸於中間搬送輥52。中間搬送輥(搬送構件)56係介隔陶瓷片S接觸於印刷搬送輥54。疊層輥14係介隔陶瓷片S接觸於中間搬送輥56。壓輥34、36係介隔陶瓷片S接觸於疊層輥14。如此般,於塗佈輥12與各疊層輥14之間插入有中間搬送輥52、印刷搬送輥54及中間搬送輥56。因此,塗佈輥12與各疊層輥14成為間接接觸之狀態(可機械性傳遞動力之狀態)。As shown in Fig. 6, in the fifth embodiment, a gravure offset printing method is employed as the printing method of the electrode circuit 24. That is, the intermediate transfer roller (transport member) 52 is in contact with the coating roller 12 via the ceramic sheet S. Moreover, the printing conveyance roller (transport member) 54 used when the electrode circuit 24 is formed on the ceramic sheet S is in contact with the intermediate conveyance roller 52 via the ceramic sheet S. The intermediate transfer roller (transport member) 56 is in contact with the printing conveyance roller 54 via the ceramic sheet S. The laminating roller 14 is in contact with the intermediate transfer roller 56 via the ceramic sheet S. The pressure rollers 34, 36 are in contact with the laminating roller 14 via the ceramic sheet S. In this manner, the intermediate conveyance roller 52, the conveyance conveyance roller 54, and the intermediate conveyance roller 56 are inserted between the application roller 12 and each of the lamination rollers 14. Therefore, the application roller 12 and the lamination rolls 14 are in indirect contact state (a state in which power can be mechanically transmitted).

又,於塗佈輥12之周圍,配置有成膜機構16,其係用以對塗佈輥12之表面塗佈作為陶瓷片S之材料之陶瓷漿料;供液機構18,其係用以對成膜機構16供給陶瓷漿料;乾燥固化裝置20,其係位於成膜機構16之塗佈輥旋轉方向下游側,且用以使塗佈輥12之表面上之陶瓷漿料乾燥固化;以及中間搬送輥52。又,於印刷搬送輥54之周圍,配置有用以於捲繞(積層)於疊層輥14之外周面之前之陶瓷片S上形成電極電路24之電極電路形成機構22、用以使電極電路24乾燥之乾燥固化裝置26、以及上述中間搬送輥52及中間搬送輥56。Further, around the coating roller 12, a film forming mechanism 16 for applying a ceramic slurry as a material of the ceramic sheet S to the surface of the coating roller 12, and a liquid supply mechanism 18 for the liquid supply mechanism 18 are disposed. The film forming mechanism 16 is supplied with a ceramic slurry; the drying and curing device 20 is located on the downstream side in the rotation direction of the coating roller of the film forming mechanism 16 and serves to dry and solidify the ceramic slurry on the surface of the coating roller 12; Intermediate transfer roller 52. Further, an electrode circuit forming mechanism 22 for forming the electrode circuit 24 on the ceramic sheet S before being wound (laminated) on the outer peripheral surface of the laminating roller 14 is disposed around the printing conveyance roller 54 for the electrode circuit 24 The drying and drying device 26 and the intermediate transfer roller 52 and the intermediate transfer roller 56.

此處,電極電路形成機構22係採用凹版膠印方式。即,凹版膠印方式之電極電路形成機構22係包含圖案形成輥22A,其係於外周面刻畫有與可成為電極電路24之導電膏膜之圖案對應之槽(填充有導電膏之槽);以及轉印輥22B,其係轉印形成於圖案形成輥22A上之圖案。又,轉印至轉印輥22B上之圖案由乾燥固化裝置26噴附特定溫度之暖風進行乾燥。將轉印至轉印輥22B上之電極電路24之圖案轉印至印刷搬送輥54,於印刷搬送輥54上之陶瓷片S上形成特定圖案之電極電路24。Here, the electrode circuit forming mechanism 22 is a gravure offset printing method. That is, the offset circuit type electrode circuit forming mechanism 22 includes a pattern forming roller 22A which is formed with a groove (a groove filled with a conductive paste) corresponding to a pattern of the conductive paste film which can be the electrode circuit 24 on the outer peripheral surface; The transfer roller 22B transfers a pattern formed on the pattern forming roller 22A. Further, the pattern transferred onto the transfer roller 22B is dried by the drying and curing device 26 by spraying a warm air of a specific temperature. The pattern of the electrode circuit 24 transferred onto the transfer roller 22B is transferred to the printing conveyance roller 54, and the electrode circuit 24 of a specific pattern is formed on the ceramic sheet S on the printing conveyance roller 54.

根據第5實施形態,利用成膜機構16及供液機構18對塗佈輥12之外周面供給陶瓷漿料。其後,於塗佈輥12上藉由乾燥固化裝置20而使陶瓷漿料乾燥固化。以此方式,形成陶瓷片S。於塗佈輥12上,陶瓷片S移動至中間搬送輥52及印刷搬送輥54。對印刷搬送輥54上之陶瓷片S,自轉印輥22B轉印並形成特定之圖案之電極電路24。以此方式,於印刷搬送輥54上之陶瓷片S形成電極電路24。其後,形成有電極電路24之陶瓷片S由中間搬送輥56接收,且捲繞於疊層輥14之外周面進行積層。藉此,形成陶瓷片S之積層構造體S'。如此般,即便於第5實施形態中,亦於在陶瓷片S上形成電極電路24後,將已形成電極電路24之陶瓷片S捲繞於疊層輥14之外周面進行積層。According to the fifth embodiment, the ceramic slurry is supplied to the outer circumferential surface of the coating roller 12 by the film forming mechanism 16 and the liquid supply mechanism 18. Thereafter, the ceramic slurry is dried and solidified by drying the curing device 20 on the coating roller 12. In this way, the ceramic sheet S is formed. On the coating roller 12, the ceramic sheet S moves to the intermediate conveyance roller 52 and the print conveyance roller 54. The ceramic sheet S on the printing conveyance roller 54 is transferred from the transfer roller 22B to form a specific pattern of the electrode circuit 24. In this way, the ceramic piece S on the printing conveyance roller 54 forms the electrode circuit 24. Thereafter, the ceramic sheet S on which the electrode circuit 24 is formed is received by the intermediate transfer roller 56, and is wound around the outer peripheral surface of the stacking roller 14 to be laminated. Thereby, the laminated structure S' of the ceramic sheet S is formed. In the fifth embodiment, after the electrode circuit 24 is formed on the ceramic sheet S, the ceramic sheet S on which the electrode circuit 24 has been formed is wound around the outer peripheral surface of the stacking roll 14 to be laminated.

再者,於第5實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14係對應於本發明之「積層支持體」。又,中間搬送輥52、印刷搬送輥54及中間搬送輥56係對應於本發明之「搬送構件」。Further, in the fifth embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination roller 14 corresponds to the "layered support" of the present invention. Further, the intermediate transfer roller 52, the print conveyance roller 54, and the intermediate transfer roller 56 correspond to the "transport member" of the present invention.

其次,參照圖式,對本發明第6實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與上述各實施形態之構成重複之構成標註相同之符號,並省略重複之構成及作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a sixth embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those of the above-described embodiments are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖7所示,第6實施形態係一方面基於第1實施形態之構成,一方面將其中一部分改良者,且構成為於塗佈輥12與疊層輥14或疊層輥15之間插入有中間搬送輥(搬送構件)58。As shown in Fig. 7, the sixth embodiment is based on the configuration of the first embodiment, and a part of the improvement is configured to be inserted between the coating roller 12 and the laminating roller 14 or the laminating roller 15. There is an intermediate transfer roller (transport member) 58.

第6實施形態係於塗佈輥12上對陶瓷片S形成電極電路24,且已形成電極電路24之陶瓷片S由中間搬送輥58接收。繼而,將由中間搬送輥58接收之陶瓷片S捲繞於疊層輥14之外周面進行積層,形成陶瓷片S之積層構造體S'。In the sixth embodiment, the electrode sheet 24 is formed on the ceramic sheet S on the coating roller 12, and the ceramic sheet S on which the electrode circuit 24 has been formed is received by the intermediate transfer roller 58. Then, the ceramic sheet S received by the intermediate transfer roller 58 is wound around the outer peripheral surface of the laminating roller 14 to form a laminated structure S' of the ceramic sheet S.

根據第6實施形態,由於在塗佈輥12與疊層輥14或疊層輥15之間插入有中間搬送輥58,因此,與第2實施形態之效果相同,陶瓷片S自塗佈輥12之剝離不受疊層輥14側之狀態之影響,故可穩定地進行操作。According to the sixth embodiment, since the intermediate transfer roller 58 is inserted between the application roller 12 and the laminating roller 14 or the laminating roller 15, the ceramic sheet S is self-coated roller 12 as in the second embodiment. The peeling is not affected by the state of the side of the laminating rolls 14, so that the operation can be performed stably.

再者,於第6實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。又,中間搬送輥58係對應於本發明之「搬送構件」。Further, in the sixth embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination rollers 14 and 15 correspond to the "layered support" of the present invention. Further, the intermediate transfer roller 58 corresponds to the "transport member" of the present invention.

繼而,參照圖式,對本發明第7實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。再者,對與上述各實施形態之構成重複之構成標註相同之符號,並省略重複之構成及作用效果之說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to a seventh embodiment of the present invention will be described with reference to the drawings. Incidentally, the same components as those of the above-described embodiments are denoted by the same reference numerals, and the description of the overlapping configuration and the effect of the operation will be omitted.

如圖8所示,第7實施形態係一方面基於第2實施形態之構成,一方面對其一部分改良者,且構成為於塗佈輥12與印刷搬送輥30之間插入其他供給輥即中間搬送輥(搬送構件)60。As shown in FIG. 8, the seventh embodiment is based on the configuration of the second embodiment, and is partially modified to insert another supply roller between the application roller 12 and the printing conveyance roller 30. Transfer roller (transport member) 60.

第7實施形態係於塗佈輥12上形成之陶瓷片S經由中間搬送輥60,供給至印刷搬送輥30。於供給至印刷搬送輥30之陶瓷片S上形成電極電路24,且已形成電極電路24之陶瓷片S自印刷搬送輥30由中間搬送輥32接收。繼而,將由第2供給輥即中間搬送輥32接收之陶瓷片S捲繞於疊層輥14之外周面進行積層,形成陶瓷片S之積層構造體S'。In the seventh embodiment, the ceramic sheet S formed on the coating roller 12 is supplied to the printing conveyance roller 30 via the intermediate conveyance roller 60. The electrode circuit 24 is formed on the ceramic sheet S supplied to the printing conveyance roller 30, and the ceramic sheet S on which the electrode circuit 24 has been formed is received from the printing conveyance roller 30 by the intermediate conveyance roller 32. Then, the ceramic sheet S received by the intermediate transfer roller 32, which is the second supply roller, is wound around the outer circumferential surface of the laminating roller 14 to form a laminated structure S' of the ceramic sheet S.

根據第7實施形態,由於在塗佈輥12與印刷搬送輥30之間插入有中間搬送輥60,因此,與第2實施形態之效果相同,陶瓷片S自塗佈輥12之剝離不受疊層輥14側之狀態之影響,故可穩定地進行操作。According to the seventh embodiment, since the intermediate transfer roller 60 is inserted between the application roller 12 and the printing conveyance roller 30, the peeling of the ceramic sheet S from the application roller 12 is not the same as that of the second embodiment. Since the state of the layer roll 14 is affected, the operation can be performed stably.

再者,於第7實施形態中,塗佈輥12係對應於本發明之「成膜基材」,疊層輥14、15係對應於本發明之「積層支持體」。又,中間搬送輥、印刷搬送輥30及中間搬送輥32係對應於本發明之「搬送構件」。Further, in the seventh embodiment, the application roller 12 corresponds to the "film formation substrate" of the present invention, and the lamination rollers 14 and 15 correspond to the "layered support" of the present invention. Moreover, the intermediate conveyance roller, the conveyance conveyance roller 30, and the intermediate conveyance roller 32 correspond to the "transport member" of this invention.

繼而,參照圖式,對本發明之第8實施形態~第10實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法進行說明。Next, a method of manufacturing a laminated electronic component manufacturing apparatus and a laminated electronic component according to the eighth embodiment to the tenth embodiment of the present invention will be described with reference to the drawings.

第8實施形態~第10實施形態係如圖9~圖11所示,利用電極電路形成機構22,於外周實施脫模處理之環形連續狀之塗佈輥12或環狀成膜帶44上形成電極電路24。繼而,利用成膜機構16,對形成有電極電路24之塗佈輥12或環狀成膜帶44塗佈陶瓷漿料,並使之乾燥,從而連續地形成附有電極電路之陶瓷片S。進而,將附有電極電路之陶瓷片S自塗佈輥12或環狀成膜帶44上剝離,並將剝離之附有電極電路之陶瓷片S捲繞於疊層輥14之外周。藉此,形成陶瓷片S及電極電路24之積層構造體S'。In the eighth embodiment to the tenth embodiment, as shown in FIG. 9 to FIG. 11, the electrode circuit forming mechanism 22 is formed on the circumferentially continuous coating roll 12 or the annular film forming belt 44 which is subjected to mold release treatment on the outer circumference. Electrode circuit 24. Then, the ceramic slurry is applied to the coating roller 12 or the annular film-forming tape 44 on which the electrode circuit 24 is formed by the film forming mechanism 16, and dried to continuously form the ceramic sheet S with the electrode circuit. Further, the ceramic sheet S with the electrode circuit is peeled off from the coating roll 12 or the annular film forming belt 44, and the peeled ceramic sheet S with the electrode circuit is wound around the outer circumference of the laminating roll 14. Thereby, the laminated structure S' of the ceramic sheet S and the electrode circuit 24 is formed.

10...積層型電子零件製造裝置10. . . Laminated electronic component manufacturing device

12...塗佈輥(成膜基材)12. . . Coating roll (film forming substrate)

14...疊層輥(積層支持體)14. . . Laminating roll (layered support)

15...疊層輥(積層支持體)15. . . Laminating roll (layered support)

18...供液機構18. . . Liquid supply mechanism

16...成膜機構(成膜形成部)16. . . Film forming mechanism (film forming portion)

20、26...乾燥固化裝置20, 26. . . Dry curing device

22...電極電路形成機構(電極電路形成部)twenty two. . . Electrode circuit forming mechanism (electrode circuit forming portion)

24...電極電路twenty four. . . Electrode circuit

30...印刷搬送輥(搬送構件)30. . . Printing conveyance roller (transport member)

32...中間搬送輥(搬送構件)32. . . Intermediate transfer roller (transport member)

38...環狀搬送帶(搬送構件)38. . . Annular conveyor belt (transporting member)

40...中間搬送輥(搬送構件)40. . . Intermediate transfer roller (transport member)

42...中間搬送輥(搬送構件)42. . . Intermediate transfer roller (transport member)

44...環狀成膜帶(成膜基材)44. . . Ring-forming film forming tape (film forming substrate)

46...中間搬送輥(搬送構件)46. . . Intermediate transfer roller (transport member)

52...中間搬送輥(搬送構件)52. . . Intermediate transfer roller (transport member)

54...印刷搬送輥(搬送構件)54. . . Printing conveyance roller (transport member)

56...中間搬送輥(搬送構件)56. . . Intermediate transfer roller (transport member)

58...中間搬送輥(搬送構件)58. . . Intermediate transfer roller (transport member)

60...中間搬送輥(搬送構件)60. . . Intermediate transfer roller (transport member)

S...陶瓷片S. . . Ceramics

S'...陶瓷片之積層構造體S'. . . Laminated structure of ceramic sheet

圖1係本發明第1實施形態之積層型電子零件製造裝置之說明圖;1 is an explanatory view of a multilayer electronic component manufacturing apparatus according to a first embodiment of the present invention;

圖2係表示陶瓷片上之缺陷部之位置之說明圖;Figure 2 is an explanatory view showing the position of a defective portion on a ceramic sheet;

圖3係本發明第2實施形態之積層型電子零件製造裝置之說明圖;3 is an explanatory view of a multilayer electronic component manufacturing apparatus according to a second embodiment of the present invention;

圖4係本發明第3實施形態之積層型電子零件製造裝置之說明圖;Figure 4 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a third embodiment of the present invention;

圖5係本發明第4實施形態之積層型電子零件製造裝置之說明圖;Figure 5 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a fourth embodiment of the present invention;

圖6係本發明第5實施形態之積層型電子零件製造裝置之說明圖;Figure 6 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a fifth embodiment of the present invention;

圖7係本發明第6實施形態之積層型電子零件製造裝置之說明圖;Figure 7 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a sixth embodiment of the present invention;

圖8係本發明第7實施形態之積層型電子零件製造裝置之說明圖;Figure 8 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a seventh embodiment of the present invention;

圖9係本發明第8實施形態之積層型電子零件製造裝置之說明圖;Figure 9 is an explanatory view showing a device for manufacturing a laminated electronic component according to an eighth embodiment of the present invention;

圖10係本發明第9實施形態之積層型電子零件製造裝置之說明圖;及Figure 10 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a ninth embodiment of the present invention; and

圖11係本發明第10實施形態之積層型電子零件製造裝置之說明圖。Fig. 11 is an explanatory view showing a manufacturing apparatus of a laminated electronic component according to a tenth embodiment of the present invention.

10...積層型電子零件製造裝置10. . . Laminated electronic component manufacturing device

12...塗佈輥(成膜基材)12. . . Coating roll (film forming substrate)

14...疊層輥(積層支持體)14. . . Laminating roll (layered support)

15...疊層輥(積層支持體)15. . . Laminating roll (layered support)

16...成膜機構(成膜形成部)16. . . Film forming mechanism (film forming portion)

18...供液機構18. . . Liquid supply mechanism

20、26...乾燥固化裝置20, 26. . . Dry curing device

22...電極電路形成機構(電極電路形成部)twenty two. . . Electrode circuit forming mechanism (electrode circuit forming portion)

S...陶瓷片S. . . Ceramics

S'...陶瓷片之積層構造體S'. . . Laminated structure of ceramic sheet

Claims (26)

一種積層型電子零件製造裝置,其特徵在於:包括環形連續狀之成膜基材,其係於外周表面實施有脫模處理;成膜形成部,其係對上述成膜基材之表面塗佈陶瓷漿料並使其乾燥,而連續地形成陶瓷片;電極電路形成部,其係於上述成膜基材上之自上述成膜形成部連續之上述陶瓷片形成電極電路;以及積層支持體,其係介隔上述陶瓷片接觸於上述成膜基材,使形成有電極電路之上述陶瓷片自上述成膜基材連續地剝離,並將自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於外周,藉此形成上述陶瓷片及上述電極電路之積層構造體,並於剝離上述陶瓷片之上述成膜基材之表面重複形成陶瓷片。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate which is subjected to a mold release treatment on an outer peripheral surface; and a film formation portion which coats a surface of the film formation substrate The ceramic slurry is continuously dried to form a ceramic sheet continuously; the electrode circuit forming portion is formed on the film forming substrate, and the ceramic sheet forming electrode circuit is continuous from the film forming portion; and the buildup support is The ceramic sheet is placed in contact with the film formation substrate, and the ceramic sheet on which the electrode circuit is formed is continuously peeled off from the film formation substrate, and the film formation portion is continuously dried and attached thereto. The ceramic piece of the electrode circuit is wound around the outer circumference to form a laminated structure of the ceramic piece and the electrode circuit, and the ceramic piece is repeatedly formed on the surface of the film formation substrate from which the ceramic piece is peeled off. 一種積層型電子零件製造裝置,其特徵在於:包括環形連續狀之成膜基材,其係於外周表面實施有脫模處理;成膜形成部,其係對上述成膜基材之表面塗佈陶瓷漿料並使其乾燥,而連續地形成陶瓷片;電極電路形成部,其係於自上述成膜形成部連續之上述陶瓷片形成電極電路;積層支持體,其係藉由將經由上述電極電路形成部並自上述成膜形成部連續之乾燥後且附有上述電極電路之 上述陶瓷片捲繞於外周而形成上述陶瓷片及上述電極電路之積層構造體;以及搬送構件,其係設置成介隔上述陶瓷片接觸於上述成膜基材及上述積層支持體,且自上述成膜基材接收形成於上述成膜基材上之上述陶瓷片,並將該接收之上述陶瓷片搬送至上述積層支持體,並於剝離上述陶瓷片之上述成膜基材之表面重複形成陶瓷片。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate which is subjected to a mold release treatment on an outer peripheral surface; and a film formation portion which coats a surface of the film formation substrate The ceramic slurry is continuously dried to form a ceramic sheet continuously; the electrode circuit forming portion is formed by forming the electrode circuit from the ceramic sheet continuous from the film forming portion; and the build-up support is formed by the electrode The circuit forming portion is continuously dried from the film forming portion and is attached to the electrode circuit The ceramic sheet is wound around the outer circumference to form a laminated structure of the ceramic sheet and the electrode circuit, and the conveying member is provided so as to be in contact with the film forming substrate and the laminated support via the ceramic sheet, and The film formation substrate receives the ceramic sheet formed on the film formation substrate, and conveys the received ceramic sheet to the buildup support, and repeatedly forms a ceramic on the surface of the film formation substrate from which the ceramic sheet is peeled off. sheet. 如請求項2之積層型電子零件製造裝置,其中上述電極電路形成部係對上述搬送構件上之上述陶瓷片形成上述電極電路。 The apparatus for manufacturing a laminated electronic component according to claim 2, wherein the electrode circuit forming portion forms the electrode circuit on the ceramic sheet on the conveying member. 一種積層型電子零件製造裝置,其特徵在於:包括環形連續狀之成膜基材,其係於外周表面實施有脫模處理;電極電路形成部,其係於上述成膜基材之表面形成電極電路;成膜形成部,其係對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,而連續地形成附有上述電極電路之陶瓷片;以及積層支持體,其係介隔附有上述電極電路之上述陶瓷片接觸於上述成膜基材,且使附有上述電極電路之上述陶瓷片自上述成膜基材連續地剝離,並將自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於外周,藉此形成上述陶瓷片及上述電極電路之積層 構造體,並於剝離附有上述電極電路之上述陶瓷片之上述成膜基材之表面,重複形成附有電極電路之陶瓷片。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate having a mold release treatment on an outer peripheral surface; and an electrode circuit forming portion formed on an electrode surface of the film formation substrate a film formation portion that applies a ceramic slurry to a film formation substrate on which the electrode circuit is formed and dried, and continuously forms a ceramic sheet with the electrode circuit; and a build-up support The ceramic sheet having the electrode circuit described above is in contact with the film formation substrate, and the ceramic sheet having the electrode circuit is continuously peeled off from the film formation substrate, and the film formation portion is continuous. The ceramic piece after drying and having the electrode circuit described above is wound around the outer circumference, thereby forming a laminate of the ceramic piece and the electrode circuit. The structure is formed by repeatedly forming a ceramic sheet with an electrode circuit on the surface of the film-forming substrate on which the ceramic sheet having the electrode circuit is attached. 一種積層型電子零件製造裝置,其特徵在於:包括環形連續狀之成膜基材,其係於外周表面實施有脫模處理;電極電路形成部,其係於上述成膜基材之表面形成電極電路;成膜形成部,其係對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,而連續地形成附有上述電極電路之陶瓷片;積層支持體,其係藉由將自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於外周而形成上述陶瓷片及上述電極電路之積層構造體;以及搬送構件,其係設置成介隔附有上述電極電路之上述陶瓷片接觸於上述成膜基材及上述積層支持體,且自上述成膜基材接收形成於上述成膜基材上之附有上述電極電路之上述陶瓷片,並將該接收之附有上述電極電路之上述陶瓷片搬送至上述積層支持體,並於剝離附有上述電極電路之上述陶瓷片之上述成膜基材之表面,重複形成附有電極電路之陶瓷片。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate having a mold release treatment on an outer peripheral surface; and an electrode circuit forming portion formed on an electrode surface of the film formation substrate a film forming portion that applies a ceramic slurry to a film-forming substrate on which the electrode circuit is formed and dried, and continuously forms a ceramic sheet with the electrode circuit; a build-up support a laminated structure in which the ceramic sheet and the electrode circuit are formed by winding the ceramic sheet having the electrode circuit continuously dried after the film forming portion is continuously wound, and the transfer member is disposed The ceramic sheet having the electrode circuit is in contact with the film formation substrate and the buildup support, and the ceramic sheet having the electrode circuit formed on the film formation substrate is received from the film formation substrate, and The ceramic sheet with the electrode circuit received thereon is transferred to the build-up support, and the film-forming substrate of the ceramic sheet with the electrode circuit is peeled off The surface of the ceramic sheet with an electrode formed repeatedly circuits. 如請求項1至5中任一項之積層型電子零件製造裝置,其中上述電極電路形成部係對上述陶瓷片進行電極印刷之無版印刷裝置。 The laminated electronic component manufacturing apparatus according to any one of claims 1 to 5, wherein the electrode circuit forming portion is a plateless printing device that performs electrode printing on the ceramic sheet. 如請求項6之積層型電子零件製造裝置,其中上述無版印刷裝置係由噴墨印刷裝置與油墨乾燥固化裝置構成。 The apparatus for manufacturing a laminated electronic component according to claim 6, wherein the above-described plateless printing device is composed of an inkjet printing device and an ink drying and curing device. 如請求項1至5中任一項之積層型電子零件製造裝置,其中上述成膜基材之外周長與上述積層支持體之外周長為相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之其中一個外周長為另一個外周長之整數倍。 The apparatus for manufacturing a laminated electronic component according to any one of claims 1 to 5, wherein the outer circumference of the film-forming substrate is the same length as the outer circumference of the laminated support, or the outer circumference of the film-forming substrate or the above One of the outer circumferences of the outer circumference of the laminated support is an integral multiple of the other outer circumference. 如請求項6之積層型電子零件製造裝置,其中上述成膜基材之外周長與上述積層支持體之外周長為相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之其中一個外周長為另一個外周長之整數倍。 The apparatus for manufacturing a laminated electronic component according to claim 6, wherein the outer circumference of the film formation substrate is the same length as the outer circumference of the buildup support, or the outer circumference of the film formation substrate or the outer circumference of the laminate support One of the outer perimeters is an integer multiple of the other outer perimeter. 如請求項7之積層型電子零件製造裝置,其中上述成膜基材之外周長與上述積層支持體之外周長為相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之其中一個外周長為另一個外周長之整數倍。 The apparatus for manufacturing a laminated electronic component according to claim 7, wherein the outer circumference of the film formation substrate is the same length as the outer circumference of the buildup support, or the outer circumference of the film formation substrate or the outer circumference of the laminate support One of the outer perimeters is an integer multiple of the other outer perimeter. 如請求項1至5中任一項之積層型電子零件製造裝置,其中於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The laminated electronic component manufacturing apparatus according to any one of claims 1 to 5, wherein when the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit, A new ceramic piece as described above is continuously formed on the film-forming substrate. 如請求項6之積層型電子零件製造裝置,其中於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The apparatus for manufacturing a laminated electronic component according to claim 6, wherein the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit, and continues on the film formation substrate. A new ceramic piece as described above is formed. 如請求項7之積層型電子零件製造裝置,其中於將上述 陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The apparatus for manufacturing a laminated electronic component according to claim 7, wherein When the ceramic sheet is wound around the outer periphery of the buildup support to form the laminated structure of the ceramic sheet and the electrode circuit, a new ceramic sheet is continuously formed on the film formation substrate. 如請求項8之積層型電子零件製造裝置,其中於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The apparatus for manufacturing a laminated electronic component according to claim 8, wherein the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit, and continues on the film formation substrate. A new ceramic piece as described above is formed. 如請求項9之積層型電子零件製造裝置,其中於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The apparatus for manufacturing a laminated electronic component according to claim 9, wherein the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit, and continues on the film formation substrate. A new ceramic piece as described above is formed. 如請求項10之積層型電子零件製造裝置,其中於將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,在上述成膜基材上持續形成新的上述陶瓷片。 The apparatus for manufacturing a laminated electronic component according to claim 10, wherein the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit, and continues on the film formation substrate. A new ceramic piece as described above is formed. 一種積層型電子零件之製造方法,其特徵在於:包括成膜形成步驟,其係藉由成膜形成部而對於外周表面實施有脫模處理之環形連續狀之成膜基材之表面塗佈陶瓷漿料並使其乾燥,而連續地形成陶瓷片;電極電路形成步驟,其係藉由電極電路形成部而於上述成膜基材上之自上述成膜形成部連續之上述陶瓷片形成電極電路;以及積層構造體形成步驟,其係藉由使積層支持體介隔上述陶瓷片接觸於上述成膜基材,而自上述成膜基材連續 地剝離形成有電極電路之上述陶瓷片,並將該自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於上述積層支持體之外周,藉此形成上述陶瓷片及上述電極電路之積層構造體,並於剝離上述陶瓷片之上述成膜基材之表面重複形成陶瓷片。 A method for producing a laminated electronic component, comprising: a film forming step of coating a surface of a film-forming substrate having a ring-shaped continuous shape with a release treatment on an outer peripheral surface by a film forming portion; The slurry is dried and continuously formed into a ceramic sheet; and an electrode circuit forming step of forming the electrode circuit by the ceramic sheet continuous from the film forming portion on the film forming substrate by the electrode circuit forming portion And a laminated structure forming step of continuously forming the film-forming substrate by allowing the build-up support to contact the film-forming substrate via the ceramic sheet The ceramic sheet on which the electrode circuit is formed is peeled off, and the ceramic sheet which has been continuously dried from the film formation portion and has the electrode circuit is wound around the outer periphery of the buildup support, thereby forming the ceramic sheet. And a laminated structure of the electrode circuit, wherein the ceramic sheet is repeatedly formed on the surface of the film-forming substrate from which the ceramic sheet is peeled off. 一種積層型電子零件之製造方法,其特徵在於:包括成膜形成步驟,其係藉由成膜形成部而對於外周表面實施有脫模處理之環形連續狀之成膜基材之表面塗佈陶瓷漿料並使其乾燥,而連續地形成陶瓷片;電極電路形成步驟,其係藉由電極電路形成部而於自上述成膜形成部連續之上述陶瓷片形成電極電路;積層構造體形成步驟,其係藉由將經由上述電極電路形成部並自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於積層支持體之外周而形成上述陶瓷片及上述電極電路之積層構造體;以及搬送步驟,其係於上述成膜形成步驟之後且上述積層構造體形成步驟之前執行,且搬送構件自上述成膜基材接收形成於上述成膜基材上之上述陶瓷片,並藉由上述搬送構件而將該接收之上述陶瓷片搬送至上述積層支持體,並於剝離上述陶瓷片之上述成膜基材之表面重複形成陶瓷片。 A method for producing a laminated electronic component, comprising: a film forming step of coating a surface of a film-forming substrate having a ring-shaped continuous shape with a release treatment on an outer peripheral surface by a film forming portion; a slurry is continuously formed to form a ceramic sheet continuously; an electrode circuit forming step of forming an electrode circuit on the ceramic sheet continuous from the film formation portion by an electrode circuit forming portion; and a laminated structure forming step The ceramic sheet and the electrode circuit are formed by winding the ceramic sheet which has been continuously dried from the film formation portion and the electrode forming circuit, and the ceramic sheet having the electrode circuit is wound around the outer periphery of the buildup support. a laminated structure; and a transporting step performed after the film forming step and before the laminated structure forming step, and the conveying member receives the ceramic sheet formed on the film forming substrate from the film forming substrate, And conveying the received ceramic sheet to the buildup support by the transfer member, and peeling off the ceramic sheet Formed on the surface of the substrate sheet to form a ceramic repeated. 如請求項18之積層型電子零件之製造方法,其中電極電 路形成步驟中係對上述搬送構件上之上述陶瓷片形成上述電極電路。 A method of manufacturing a laminated electronic component according to claim 18, wherein the electrode is electrically In the road forming step, the electrode circuit is formed on the ceramic sheet on the conveying member. 一種積層型電子零件之製造方法,其特徵在於:包括電極電路形成步驟,其係藉由電極電路形成部而對於外周表面實施有脫模處理之環形連續狀之成膜基材之表面形成電極電路;成膜形成步驟,其係藉由成膜形成部而對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,而連續地形成附有上述電極電路之陶瓷片;以及積層構造體形成步驟,其係藉由使積層支持體介隔附有上述電極電路之上述陶瓷片接觸於上述成膜基材,而自上述成膜基材連續地剝離附有上述電極電路之上述陶瓷片,並藉由將自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於上述積層支持體之外周,而形成上述陶瓷片及上述電極電路之積層構造體,並於剝離附有上述電極電路之上述陶瓷片之上述成膜基材之表面,重複形成附有電極電路之陶瓷片。 A method of manufacturing a laminated electronic component, comprising: an electrode circuit forming step of forming an electrode circuit on a surface of a ring-shaped continuous film-forming substrate having a release process on an outer peripheral surface by an electrode circuit forming portion; a film formation step of applying a ceramic slurry to a film formation substrate on which the electrode circuit is formed by a film formation portion and drying the ceramic sheet, and continuously forming a ceramic sheet with the electrode circuit; a laminated structure forming step of continuously contacting the above-mentioned electrode circuit from the film forming substrate by contacting the ceramic sheet with the electrode circuit in contact with the film forming substrate via a laminated support a ceramic sheet in which the ceramic sheet having the electrode circuit continuously dried and the electrode sheet having the electrode circuit is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit. Further, the ceramic sheet with the electrode circuit is repeatedly formed on the surface of the film-forming substrate on which the ceramic sheet having the electrode circuit is attached. 一種積層型電子零件之製造方法,其特徵在於:包括電極電路形成步驟,其係藉由電極電路形成部而對於外周表面實施有脫模處理之環形連續狀之成膜基材之表面形成電極電路;成膜形成步驟,其係藉由成膜形成部而對形成有上述電極電路之成膜基材塗佈陶瓷漿料並使其乾燥,而連續地形成附有上述電極電路之陶瓷片; 積層構造體形成步驟,其係藉由將自上述成膜形成部連續之乾燥後且附有上述電極電路之上述陶瓷片捲繞於積層支持體之外周,而形成上述陶瓷片及上述電極電路之積層構造體;以及搬送步驟,其係於上述成膜形成步驟之後且上述積層構造體形成步驟之前執行,且搬送構件自上述成膜基材接收形成於上述成膜基材上之附有上述電極電路之上述陶瓷片,並藉由上述搬送構件而將該接收之附有上述電極電路之上述陶瓷片搬送至上述積層支持體,並於剝離附有上述電極電路之上述陶瓷片之上述成膜基材之表面,重複形成附有電極電路之陶瓷片。 A method of manufacturing a laminated electronic component, comprising: an electrode circuit forming step of forming an electrode circuit on a surface of a ring-shaped continuous film-forming substrate having a release process on an outer peripheral surface by an electrode circuit forming portion; a film formation step of applying a ceramic slurry to a film formation substrate on which the electrode circuit is formed by a film formation portion and drying the film, and continuously forming a ceramic sheet with the electrode circuit; a laminated structure forming step of forming the ceramic sheet and the electrode circuit by winding the ceramic sheet which is continuously dried from the film forming portion and having the electrode circuit around the outer periphery of the buildup support a laminated structure; and a transporting step performed after the film forming step and before the laminated structure forming step, and the conveying member receives the electrode formed on the film forming substrate from the film forming substrate In the ceramic sheet of the circuit, the ceramic sheet with the electrode circuit received is transferred to the build-up support by the transfer member, and the film-forming substrate of the ceramic sheet with the electrode circuit is peeled off On the surface of the material, a ceramic sheet with an electrode circuit is repeatedly formed. 如請求項17至21中任一項之積層型電子零件之製造方法,其中使用對上述陶瓷片進行電極印刷之無版印刷裝置,作為上述電極電路形成部。 The method for producing a laminated electronic component according to any one of claims 17 to 21, wherein a plateless printing device that performs electrode printing on the ceramic sheet is used as the electrode circuit forming portion. 如請求項22之積層型電子零件之製造方法,其中使用噴墨印刷裝置與油墨乾燥固化裝置,作為上述無版印刷裝置。 A method of producing a laminated electronic component according to claim 22, wherein an inkjet printing device and an ink drying and curing device are used as the above-described plateless printing device. 如請求項17至21中任一項之積層型電子零件之製造方法,其中於上述積層構造體形成步驟中,將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,上述成膜形成步驟中係於上述成膜基材上持續形成新的上述陶瓷片。 The method of manufacturing a laminated electronic component according to any one of claims 17 to 21, wherein in the laminated structure forming step, the ceramic sheet is wound around the outer periphery of the buildup support to form the ceramic sheet and the electrode. In the laminated structure of the circuit, in the film formation step, a new ceramic sheet is continuously formed on the film formation substrate. 如請求項22之積層型電子零件之製造方法,其中於上述積層構造體形成步驟中,將上述陶瓷片捲繞於上述積層 支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,上述成膜形成步驟中係於上述成膜基材上持續形成新的上述陶瓷片。 The method of manufacturing a laminated electronic component according to claim 22, wherein in the step of forming the laminated structure, the ceramic sheet is wound around the laminated layer When the ceramic sheet and the laminated structure of the electrode circuit are formed in the outer periphery of the support, the new ceramic sheet is continuously formed on the film formation substrate in the film formation step. 如請求項23之積層型電子零件之製造方法,其中於上述積層構造體形成步驟中,將上述陶瓷片捲繞於上述積層支持體之外周,形成上述陶瓷片及上述電極電路之積層構造體時,上述成膜形成步驟中係於上述成膜基材上持續形成新的上述陶瓷片。The method of manufacturing a laminated electronic component according to claim 23, wherein in the step of forming the laminated structure, the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet and the electrode circuit. In the film formation step described above, a new ceramic sheet is continuously formed on the film formation substrate.
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