TWI503923B - - Google Patents
Info
- Publication number
- TWI503923B TWI503923B TW102130662A TW102130662A TWI503923B TW I503923 B TWI503923 B TW I503923B TW 102130662 A TW102130662 A TW 102130662A TW 102130662 A TW102130662 A TW 102130662A TW I503923 B TWI503923 B TW I503923B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H10P72/72—
-
- H10P72/722—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210310949.2A CN103633003B (en) | 2012-08-28 | 2012-08-28 | A kind of electrostatic chuck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201419442A TW201419442A (en) | 2014-05-16 |
| TWI503923B true TWI503923B (en) | 2015-10-11 |
Family
ID=50213888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102130662A TW201419442A (en) | 2012-08-28 | 2013-08-27 | Electrostatic chuck |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103633003B (en) |
| TW (1) | TW201419442A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104952682A (en) * | 2014-03-25 | 2015-09-30 | 中微半导体设备(上海)有限公司 | Plasma treatment chamber and base station thereof |
| KR20190114216A (en) * | 2018-03-29 | 2019-10-10 | 어플라이드 머티어리얼스, 인코포레이티드 | Electrostatic Chuck and Substrate Processing Apparatus |
| CN110911332B (en) * | 2018-09-14 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Electrostatic chuck |
| CN112289732B (en) * | 2020-10-19 | 2022-11-08 | Tcl华星光电技术有限公司 | Substrate processing apparatus |
| TWI796780B (en) * | 2021-09-07 | 2023-03-21 | 南韓商自適應等離子體技術公司 | An electrostatic chuck with multi heating areas |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW546984B (en) * | 2001-05-02 | 2003-08-11 | Saint Gobain Ceramics | Ceramic heater with heater element and method for use thereof |
| TW200822281A (en) * | 2006-08-29 | 2008-05-16 | Lam Res Corp | Method of tuning thermal conductivity of electrostatic chuck support assembly |
| TW201138019A (en) * | 2010-03-24 | 2011-11-01 | Toto Ltd | Electrostatic chuck |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3980187B2 (en) * | 1998-07-24 | 2007-09-26 | 日本碍子株式会社 | Semiconductor holding device, its manufacturing method and its use |
| JP2001144167A (en) * | 1999-11-12 | 2001-05-25 | Ngk Insulators Ltd | Semiconductor holder |
| JP2008205415A (en) * | 2007-02-16 | 2008-09-04 | Creative Technology:Kk | Electrostatic chuck |
| JP2009152475A (en) * | 2007-12-21 | 2009-07-09 | Shinko Electric Ind Co Ltd | Substrate temperature adjusting-fixing device |
| US8637794B2 (en) * | 2009-10-21 | 2014-01-28 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
-
2012
- 2012-08-28 CN CN201210310949.2A patent/CN103633003B/en active Active
-
2013
- 2013-08-27 TW TW102130662A patent/TW201419442A/en unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW546984B (en) * | 2001-05-02 | 2003-08-11 | Saint Gobain Ceramics | Ceramic heater with heater element and method for use thereof |
| TW200822281A (en) * | 2006-08-29 | 2008-05-16 | Lam Res Corp | Method of tuning thermal conductivity of electrostatic chuck support assembly |
| US7501605B2 (en) * | 2006-08-29 | 2009-03-10 | Lam Research Corporation | Method of tuning thermal conductivity of electrostatic chuck support assembly |
| TW201138019A (en) * | 2010-03-24 | 2011-11-01 | Toto Ltd | Electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103633003A (en) | 2014-03-12 |
| TW201419442A (en) | 2014-05-16 |
| CN103633003B (en) | 2016-12-21 |