TWI501331B - - Google Patents
Info
- Publication number
- TWI501331B TWI501331B TW099133488A TW99133488A TWI501331B TW I501331 B TWI501331 B TW I501331B TW 099133488 A TW099133488 A TW 099133488A TW 99133488 A TW99133488 A TW 99133488A TW I501331 B TWI501331 B TW I501331B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99133488A TW201113969A (en) | 2010-10-01 | 2010-10-01 | Prober system capable of controlling the probing pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99133488A TW201113969A (en) | 2010-10-01 | 2010-10-01 | Prober system capable of controlling the probing pressure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201113969A TW201113969A (en) | 2011-04-16 |
| TWI501331B true TWI501331B (zh) | 2015-09-21 |
Family
ID=44909866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99133488A TW201113969A (en) | 2010-10-01 | 2010-10-01 | Prober system capable of controlling the probing pressure |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201113969A (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6273131B2 (ja) | 2013-11-27 | 2018-01-31 | 株式会社日本マイクロニクス | 検査装置、及び検査方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5920383A (en) * | 1997-12-05 | 1999-07-06 | Ford Global Technologies, Inc. | Microscopic digital imaging strain gauge |
| US7009415B2 (en) * | 1999-10-06 | 2006-03-07 | Tokyo Electron Limited | Probing method and probing apparatus |
| WO2008101657A1 (de) * | 2007-02-19 | 2008-08-28 | Hottinger Baldwin Messtechnik Gmbh | Optischer dehnungsmessstreifen |
| TWI398650B (zh) * | 2009-04-20 | 2013-06-11 | Chroma Ate Inc | 用以控制點測機之檢測電流導通的裝置及方法 |
-
2010
- 2010-10-01 TW TW99133488A patent/TW201113969A/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5920383A (en) * | 1997-12-05 | 1999-07-06 | Ford Global Technologies, Inc. | Microscopic digital imaging strain gauge |
| US7009415B2 (en) * | 1999-10-06 | 2006-03-07 | Tokyo Electron Limited | Probing method and probing apparatus |
| WO2008101657A1 (de) * | 2007-02-19 | 2008-08-28 | Hottinger Baldwin Messtechnik Gmbh | Optischer dehnungsmessstreifen |
| TWI398650B (zh) * | 2009-04-20 | 2013-06-11 | Chroma Ate Inc | 用以控制點測機之檢測電流導通的裝置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201113969A (en) | 2011-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |