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TWI501331B - - Google Patents

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Publication number
TWI501331B
TWI501331B TW099133488A TW99133488A TWI501331B TW I501331 B TWI501331 B TW I501331B TW 099133488 A TW099133488 A TW 099133488A TW 99133488 A TW99133488 A TW 99133488A TW I501331 B TWI501331 B TW I501331B
Authority
TW
Taiwan
Application number
TW099133488A
Other versions
TW201113969A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=44909866&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI501331(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Priority to TW99133488A priority Critical patent/TW201113969A/zh
Publication of TW201113969A publication Critical patent/TW201113969A/zh
Application granted granted Critical
Publication of TWI501331B publication Critical patent/TWI501331B/zh

Links

TW99133488A 2010-10-01 2010-10-01 Prober system capable of controlling the probing pressure TW201113969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99133488A TW201113969A (en) 2010-10-01 2010-10-01 Prober system capable of controlling the probing pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW99133488A TW201113969A (en) 2010-10-01 2010-10-01 Prober system capable of controlling the probing pressure

Publications (2)

Publication Number Publication Date
TW201113969A TW201113969A (en) 2011-04-16
TWI501331B true TWI501331B (zh) 2015-09-21

Family

ID=44909866

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99133488A TW201113969A (en) 2010-10-01 2010-10-01 Prober system capable of controlling the probing pressure

Country Status (1)

Country Link
TW (1) TW201113969A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6273131B2 (ja) 2013-11-27 2018-01-31 株式会社日本マイクロニクス 検査装置、及び検査方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920383A (en) * 1997-12-05 1999-07-06 Ford Global Technologies, Inc. Microscopic digital imaging strain gauge
US7009415B2 (en) * 1999-10-06 2006-03-07 Tokyo Electron Limited Probing method and probing apparatus
WO2008101657A1 (de) * 2007-02-19 2008-08-28 Hottinger Baldwin Messtechnik Gmbh Optischer dehnungsmessstreifen
TWI398650B (zh) * 2009-04-20 2013-06-11 Chroma Ate Inc 用以控制點測機之檢測電流導通的裝置及方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920383A (en) * 1997-12-05 1999-07-06 Ford Global Technologies, Inc. Microscopic digital imaging strain gauge
US7009415B2 (en) * 1999-10-06 2006-03-07 Tokyo Electron Limited Probing method and probing apparatus
WO2008101657A1 (de) * 2007-02-19 2008-08-28 Hottinger Baldwin Messtechnik Gmbh Optischer dehnungsmessstreifen
TWI398650B (zh) * 2009-04-20 2013-06-11 Chroma Ate Inc 用以控制點測機之檢測電流導通的裝置及方法

Also Published As

Publication number Publication date
TW201113969A (en) 2011-04-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees