TWI582966B - Multi-cell chip - Google Patents
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本發明是有關於一種晶片,且特別是有關於一種可再切割的多晶胞晶片。This invention relates to a wafer, and more particularly to a rewritable polycrystalline wafer.
在現今資訊爆炸的時代,積體電路已與日常生活有密不可分的關係,無論在食衣住行育樂方面,通常都會使用到由積體電路元件所組成之產品。隨著半導體製程技術的不斷演進,愈來愈多的運算處理單元可被整合至單一晶片中,並可採用高階的半導體製程技術來製作。由於採用高階的半導體製程的製作成本(例如光罩)所費不貲,因此現行的方案大多是基於高運算力的考量來設計晶片。倘若使用者基於高運算力的考量來設計晶片,例如將多個運算處理單元整合至此晶片中,則此高運算力的晶片的成本會較高,也不適宜應用在低價且低運算力需求的電子產品中。也就是說,現行方案於晶片設計或製作完成之後,便無法再提供使用者在晶片運算力與晶片成本之間進行彈性地選擇。In the era of information explosion, integrated circuits have been inextricably linked to daily life. In the case of food and clothing, it is common to use products consisting of integrated circuit components. As semiconductor process technology continues to evolve, more and more arithmetic processing units can be integrated into a single wafer and fabricated using high-order semiconductor process technology. Due to the cost of manufacturing high-order semiconductor processes (such as photomasks), current solutions are mostly based on high computational considerations to design wafers. If the user designs the wafer based on high computational power considerations, for example, integrating multiple arithmetic processing units into the wafer, the cost of the high-computation wafer will be high, and it is not suitable for low-cost and low-computing power requirements. In the electronics. That is to say, after the current design or fabrication of the wafer is completed, the current scheme can no longer provide the user with an elastic choice between the wafer computing power and the wafer cost.
有鑑於此,本發明提供一種多晶胞晶片,其中多晶胞晶片接上所需電源及信號後是可使用的(可運作的)。當多晶胞晶片尚未進行再切割時,資料可在多晶胞晶片中的多個晶胞中進行分散處理。而多晶胞晶片中的不同晶胞的信號可透過晶胞之間的信號傳輸線組進行傳遞。除此之外,使用者還可視實際應用、所需運算能力或成本的考量而以晶胞為單位來對多晶胞晶片進行彈性地切割,以切割為多個子晶片,其中切割後的部份子晶片接上所需電源及信號後仍可使用(仍可運作)。如此一來,可提高多晶胞晶片在設計或製作完成之後的使用彈性。另外,當多晶胞晶片中的部份晶胞失效時,更可將多晶胞晶片切成具有較少晶胞的子晶片,以將失效的晶胞予以切除,其中切除失效的晶胞之後的子晶片仍可正常地使用。因此,可提高多晶胞晶片的可使用率(良率)。In view of this, the present invention provides a multi-cell wafer in which a multi-cell wafer is usable (operable) after being connected to a desired power source and signal. When the poly unit wafer has not been re-cut, the data can be dispersed in a plurality of unit cells in the poly unit wafer. The signals of different unit cells in the multi-cell wafer can be transmitted through the signal transmission line group between the unit cells. In addition, the user can elastically cut the polycrystalline silicon wafer in units of unit cells according to actual applications, required computing power or cost considerations, and cut into a plurality of sub-wafers, wherein the cut portions are cut. The sub-chip can still be used after it has been connected to the required power and signal (still operational). In this way, the flexibility of use of the polycrystalline wafer after design or fabrication can be improved. In addition, when a part of the unit cell in the poly unit cell fails, the poly unit wafer can be cut into sub-wafers having fewer unit cells to remove the failed unit cell, wherein the failed unit cell is removed. The sub-wafers can still be used normally. Therefore, the usability (yield) of the poly unit wafer can be improved.
本發明的多晶胞晶片接上所需電源及信號後是可使用的(可運作的),其中多晶胞晶片可包括半導體基底、多個晶胞以及多個信號傳輸線組。此些晶胞可配置在半導體基底上。此些晶胞中的任二相鄰晶胞間可具有相隔空間。此些信號傳輸線組可分別配置在至少部份此些相隔空間上,並分別用以進行至少部份相鄰晶胞間的信號傳輸。上述的多晶胞晶片可透過部份此些相隔空間進行切割以切斷部份此些信號傳輸線組,致使多晶胞晶片可被分割為多個子晶片,其中切割後的部份此些子晶片接上所需電源及信號後仍可使用(仍可運作)。The multi-cell wafer of the present invention can be used (operable) after being connected to a desired power source and signal, wherein the multi-cell wafer can include a semiconductor substrate, a plurality of unit cells, and a plurality of signal transmission line groups. Such unit cells can be disposed on a semiconductor substrate. Any two of the unit cells may have a space between them. The signal transmission line groups are respectively disposed on at least a portion of the spaced spaces, and are respectively used for signal transmission between at least some of the adjacent cells. The polycrystalline silicon wafer can be cut through a portion of the spaced spaces to cut off some of the signal transmission line groups, so that the poly unit wafer can be divided into a plurality of sub-wafers, wherein the cut portions of the sub-wafers It can still be used after connecting the required power and signal (still working).
在本發明的一實施例中,上述的多晶胞晶片的此些晶胞中的至少一者可具有多個焊墊(pad),其中此些焊墊用以耦接至外部晶片以進行信號傳輸。In an embodiment of the invention, at least one of the cells of the poly unit cell may have a plurality of pads, wherein the pads are coupled to an external chip for signal transmission.
在本發明的一實施例中,上述的此些信號傳輸線組可分別用以進行上述至少部份相鄰晶胞間的資料傳輸或電源傳輸。In an embodiment of the invention, the signal transmission line groups may be used to perform data transmission or power transmission between the at least some adjacent cells.
在本發明的一實施例中,上述的此些子晶片的每一者所具有的晶胞數量不完全相同。In an embodiment of the invention, each of the sub-wafers described above has a different number of unit cells.
在本發明的一實施例中,上述的多個晶胞的每一者可包括至少一偵測線路。偵測線路可用以自動偵測此晶胞與相鄰晶胞之間的此信號傳輸線組是否被切斷,並據以產生偵測信號。In an embodiment of the invention, each of the plurality of unit cells may include at least one detection line. The detection line can be used to automatically detect whether the signal transmission line group between the unit cell and the adjacent unit cell is cut off, and accordingly generate a detection signal.
在本發明的一實施例中,上述的偵測線路可包括緩衝器、第一電阻以及第二電阻。緩衝器的輸入端透過此晶胞與此相鄰晶胞之間的此信號傳輸線組的一信號線而耦接到電源端,且緩衝器的輸出端用以產生偵測信號。第一電阻耦接在緩衝器的輸入端與接地端之間。第二電阻耦接在緩衝器的輸入端與緩衝器的輸出端之間。In an embodiment of the invention, the detecting circuit may include a buffer, a first resistor, and a second resistor. The input end of the buffer is coupled to the power supply terminal through a signal line of the signal transmission line group between the unit cell and the adjacent unit cell, and the output end of the buffer is used to generate the detection signal. The first resistor is coupled between the input end of the buffer and the ground. The second resistor is coupled between the input of the buffer and the output of the buffer.
在本發明的一實施例中,上述的多個晶胞中的每一晶胞更包括至少一介面電路。此至少一介面電路可耦接到此晶胞與此相鄰晶胞之間的此信號傳輸線組,且可耦接到上述至少一偵測線路以接收偵測信號。當上述至少一偵測線路偵測到此信號傳輸線組被切斷時,此至少一介面電路可自動隔離此晶胞與此信號傳輸線組之間的連繫。In an embodiment of the invention, each of the plurality of unit cells further includes at least one interface circuit. The at least one interface circuit can be coupled to the signal transmission line group between the unit cell and the adjacent unit cell, and can be coupled to the at least one detection line to receive the detection signal. When the at least one detecting line detects that the signal transmission line group is cut, the at least one interface circuit can automatically isolate the connection between the unit cell and the signal transmission line group.
在本發明的一實施例中,上述的此些晶胞的每一者可包括多個電路。此些電路的每一者可具有識別碼(identification,ID),其中識別碼是唯讀的(read-only)且是唯一的,用以對此些電路的每一者進行識別。In an embodiment of the invention, each of the aforementioned unit cells may include a plurality of circuits. Each of such circuits may have an identification (ID), wherein the identification code is read-only and unique to identify each of the circuits.
在本發明的一實施例中,上述的此些晶胞的每一者可包括識別碼。識別碼是唯讀的且是唯一的,用以對此些晶胞的每一者進行識別。In an embodiment of the invention, each of the aforementioned unit cells may include an identification code. The identification code is read-only and unique to identify each of these cells.
在本發明的一實施例中,上述的此些晶胞的每一者與一軟體協同運作,且此些晶胞的每一者根據識別碼來判斷是否允許使用此軟體。In an embodiment of the invention, each of the unit cells described above cooperates with a software, and each of the unit cells determines whether the software is allowed to be used according to the identification code.
在本發明的一實施例中,上述的此些晶胞的每一者用以執行一軟體,且此些晶胞的每一者將識別碼作為金鑰(key)以對此軟體進行加密或解密。In an embodiment of the invention, each of the unit cells is configured to execute a software, and each of the unit cells uses an identification code as a key to encrypt the software or Decrypt.
在本發明的一實施例中,上述的部份晶胞用以同時執行一軟體,並以此部份晶胞的其中一者的識別碼作為金鑰以對此軟體進行加密或解密。In an embodiment of the invention, the partial unit cells are used to simultaneously execute a software, and the identification code of one of the partial unit cells is used as a key to encrypt or decrypt the software.
在本發明的一實施例中,上述的此些晶胞的功能不完全相同。In an embodiment of the invention, the functions of the cells described above are not identical.
在本發明的一實施例中,上述的此些晶胞的面積不完全相同。In an embodiment of the invention, the areas of the unit cells described above are not completely the same.
基於上述,本發明實施例的多晶胞晶片可視實際應用、效能或成本需求來進行彈性地切割,以切割為多個子晶片。如此一來,可提高多晶胞晶片在設計或製作完成之後使用上的彈性。另一方面,倘若多晶胞晶片上的部份晶胞失效時,可以將多晶胞晶片切成具有較少晶胞的子晶片,以除去失效的晶胞,而除去失效的晶胞之後的子晶片仍可使用(仍可運作),故可提高晶片的可使用率(良率)。Based on the above, the poly unit wafer of the embodiment of the present invention can be elastically cut to be cut into a plurality of sub-wafers depending on actual application, performance, or cost requirements. As a result, the flexibility of the use of the polycrystalline wafer after use in design or fabrication can be improved. On the other hand, if a part of the unit cell on the poly unit cell fails, the poly unit wafer can be cut into sub-wafers with fewer unit cells to remove the failed unit cell, and the failed unit cell is removed. The sub-wafer can still be used (still operational), thus increasing the usable rate (yield) of the wafer.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.
現將詳細參考本發明之示範性實施例,在附圖中說明所述示範性實施例之實例。另外,凡可能之處,在圖式及實施方式中使用相同標號的元件/構件代表相同或類似部分。DETAILED DESCRIPTION OF THE INVENTION Reference will now be made in detail to the exemplary embodiments embodiments In addition, wherever possible, the same reference numerals in the drawings
以下請同時參照圖1與圖2。圖1是依照本發明一實施例所繪示的晶圓(wafer) 10中的多晶胞晶片100的架構示意圖。圖2是依照本發明一實施例所繪示的多晶胞晶片100的其中一個晶胞140的放大示意圖。晶圓10可包括多個多晶胞晶片100(如圖1所示),其中多晶胞晶片100接上所需電源及信號後是可使用的(可運作的)。舉例來說,多晶胞晶片100可透過接收電源電壓及輸入信號以進行運作,並據以產生輸出信號,但本發明不限於此。Please refer to FIG. 1 and FIG. 2 at the same time. FIG. 1 is a schematic diagram of the structure of a polycrystalline silicon wafer 100 in a wafer 10 according to an embodiment of the invention. FIG. 2 is an enlarged schematic view showing one of the unit cells 140 of the poly unit cell wafer 100 according to an embodiment of the invention. Wafer 10 can include a plurality of polycell wafers 100 (shown in Figure 1) in which multi-cell wafers 100 are usable (operable) after being connected to the desired power source and signal. For example, the poly cell wafer 100 can operate by receiving a power supply voltage and an input signal, and accordingly generate an output signal, but the invention is not limited thereto.
多晶胞晶片100可包括半導體基底180、多個信號傳輸線組120(包括信號傳輸線組120_U、120_R、120_D、120_L)以及多個晶胞140(包括晶胞140_8、140_12、140_13、140_14、140_18)。晶胞140可配置在半導體基底180上。任二相鄰晶胞140之間具有相隔空間110。每一個信號傳輸線組120可配置在任二相鄰晶胞140間的相隔空間110上,並用以進行任二相鄰晶胞140之間的信號傳輸,但本發明不限於此。在本發明的其他實施例中,部份相鄰晶胞140之間的相隔空間110也可不配置信號傳輸線組120,例如圖8的多晶胞晶片100”所示,其中圖8的晶胞140_8與晶胞140_9之間的相隔空間110並不配置信號傳輸線組120,但晶胞140_8與晶胞140_9之間仍可透過其他晶胞(例如晶胞140_13與140_14)進行信號傳遞。The poly unit cell wafer 100 may include a semiconductor substrate 180, a plurality of signal transmission line groups 120 (including signal transmission line groups 120_U, 120_R, 120_D, 120_L), and a plurality of unit cells 140 (including unit cells 140_8, 140_12, 140_13, 140_14, 140_18). . The unit cell 140 can be disposed on the semiconductor substrate 180. There are spaced spaces 110 between any two adjacent cells 140. Each of the signal transmission line groups 120 may be disposed on the space 110 between any two adjacent cells 140 and used to perform signal transmission between any two adjacent cells 140, but the present invention is not limited thereto. In other embodiments of the present invention, the space 110 between the adjacent cells 140 may not be configured with the signal transmission line group 120, such as the poly unit wafer 100" of FIG. 8, wherein the cell 140_8 of FIG. The space 110 between the cell 140_9 and the cell 140_9 is not configured with the signal transmission line group 120, but the cell 140_8 and the cell 140_9 can still transmit signals through other unit cells (for example, the cells 140_13 and 140_14).
以下請再同時參照圖1與圖2。在本發明的一實施例中,信號傳輸線組120可用以進行二相鄰晶胞140之間的資料傳輸或是電源傳輸,但本發明不限於此。除此之外,如圖2所示,每一個晶胞140可具有多個焊墊(pad) 145,但本發明並不限於此。在本發明的其他實施例中,多晶胞晶片100中的部份晶胞140可具有焊墊145,而多晶胞晶片100中的其餘晶胞140則可不具有焊墊145。焊墊145可用以耦接至外部晶片(未繪示),以使晶胞140可與外部晶片進行信號傳輸。在本發明的一實施例中,可採用覆晶(flip chip)的晶片連接技術將晶胞140的焊墊145與外部晶片電性連接,但本發明並不以此為限。Please refer to FIG. 1 and FIG. 2 at the same time. In an embodiment of the invention, the signal transmission line group 120 can be used for data transmission or power transmission between two adjacent cells 140, but the invention is not limited thereto. In addition, as shown in FIG. 2, each of the unit cells 140 may have a plurality of pads 145, but the present invention is not limited thereto. In other embodiments of the present invention, a portion of the unit cells 140 in the poly unit wafer 100 may have pads 145, while the remaining unit cells 140 in the poly unit wafer 100 may have no pads 145. The pad 145 can be coupled to an external wafer (not shown) to allow the cell 140 to be signaled with an external wafer. In an embodiment of the invention, the pad 145 of the cell 140 can be electrically connected to the external chip by a flip chip wafer bonding technique, but the invention is not limited thereto.
詳細來說,在本發明圖1所示的示範性實施例中,多晶胞晶片100包括25個晶胞140,其中25個晶胞140是以5乘以5的陣列型式配置在半導體基底180上。除此之外,任二相鄰的晶胞140可透過對應的信號傳輸線組120彼此耦接以進行信號傳輸。舉例來說,如圖1所示,晶胞140_13與晶胞140_8之間可透過信號傳輸線組120_U彼此耦接以進行信號傳輸;晶胞140_13與晶胞140_12之間可透過信號傳輸線組120_L彼此耦接以進行信號傳輸;晶胞140_13與晶胞140_18之間可透過信號傳輸線組120_D彼此耦接以進行信號傳輸;晶胞140_13與晶胞140_14之間可透過信號傳輸線組120_R彼此耦接以進行信號傳輸,其餘則可依此類推。由於信號傳輸線組120(包括信號傳輸線組120_U、120_R、120_D、120_L)為多晶胞晶片100內部的訊號介面(on-chip interface,簡稱OCI),故可提高晶胞140之間的信號傳輸速度。In detail, in the exemplary embodiment shown in FIG. 1 of the present invention, the poly unit wafer 100 includes 25 unit cells 140, wherein 25 unit cells 140 are arranged in an array pattern of 5 by 5 on the semiconductor substrate 180. on. In addition, any two adjacent cells 140 may be coupled to each other through a corresponding signal transmission line group 120 for signal transmission. For example, as shown in FIG. 1, the unit cell 140_13 and the unit cell 140_8 are coupled to each other via the signal transmission line group 120_U for signal transmission; the unit cell 140_13 and the unit cell 140_12 are coupled to each other via the signal transmission line group 120_L. Signal transmission is performed; the unit cell 140_13 and the unit cell 140_18 are coupled to each other via the signal transmission line group 120_D for signal transmission; and the unit cell 140_13 and the unit cell 140_14 are coupled to each other via the signal transmission line group 120_R for signal transmission. Transmission, the rest can be deduced by analogy. Since the signal transmission line group 120 (including the signal transmission line group 120_U, 120_R, 120_D, 120_L) is an on-chip interface (OCI) inside the poly unit wafer 100, the signal transmission speed between the unit cells 140 can be improved. .
在本發明的一實施例中,使用者可視實際應用、效能或成本需求來對多晶胞晶片100進行彈性地切割,以將多晶胞晶片100切割為多個子晶片,其中,切割後的每一個子晶片可包括至少一晶胞140,且切割後的部份子晶片仍可正常地使用。舉例來說,切割後的部份子晶片可透過接收電源電壓及輸入信號以進行運作,並據以產生輸出信號,但本發明不限於此。更進一步來說,多晶胞晶片100是以至少一個晶胞140為基礎來進行切割,並可透過相隔空間110來進行切割,例如圖2所示的切割線290所示。In an embodiment of the invention, the user can elastically cut the poly unit wafer 100 according to actual application, performance or cost requirements to cut the poly unit wafer 100 into a plurality of sub-wafers, wherein each of the cut wafers A sub-wafer may include at least one unit cell 140, and a portion of the sub-wafer after cutting may still be used normally. For example, the cut partial sub-wafer can operate by receiving a power supply voltage and an input signal, and accordingly generate an output signal, but the invention is not limited thereto. Still further, the polycrystalline cell wafer 100 is cut based on at least one unit cell 140 and can be cut through the space 110, such as shown by the cutting line 290 shown in FIG.
在圖1所示的示範性實施例中,多晶胞晶片100可被切割為25種陣列型式的子晶片,切割後的子晶片中的晶胞140可為M乘以N的陣列型式,其中M、N為大於等於1且小於等於5的整數。以下請參照圖3,圖3是圖1的多晶胞晶片100的一切割示意圖。多晶胞晶片100可透過相隔空間110_1及110_2來進行切割。詳言之,可透過切割線390_1、390_2來對多晶胞晶片100進行切割,以將多晶胞晶片100分割為4個子晶片332、334、336、338,其中,切割後的4個子晶片332、334、336、338中的部份子晶片接上所需電源及信號後仍可正常使用。In the exemplary embodiment shown in FIG. 1, the poly unit wafer 100 can be cut into 25 array type sub-wafers, and the unit cell 140 in the diced sub-wafer can be an M-by-N array pattern, wherein M and N are integers greater than or equal to 1 and less than or equal to 5. Please refer to FIG. 3 below. FIG. 3 is a schematic diagram of a cutting of the poly unit wafer 100 of FIG. The poly unit wafer 100 can be cut through the spaces 110_1 and 110_2. In detail, the poly unit wafer 100 can be cut through the dicing lines 390_1, 390_2 to divide the poly unit wafer 100 into four sub-wafers 332, 334, 336, 338, wherein the diced four sub-chips 332 Some of the sub-wafers in 334, 336, and 338 can still be used normally after the required power and signal are connected.
如圖3所示,子晶片332包括4個晶胞140,4個晶胞140為2乘以2的陣列型式,且4個晶胞140中的任二相鄰者仍可透過對應的信號傳輸線組120進行信號傳輸。子晶片334包括6個晶胞140,6個晶胞140為2乘以3的陣列型式,且6個晶胞140中的任二相鄰者仍可透過對應的信號傳輸線組120進行信號傳輸。子晶片336包括6個晶胞140,6個晶胞140為3乘以2的陣列型式,且6個晶胞140中的任二相鄰者仍可透過對應的信號傳輸線組120進行信號傳輸。子晶片338包括9個晶胞140,9個晶胞140為3乘以3的陣列型式,且9個晶胞140中的任二相鄰者仍可透過對應的信號傳輸線組120進行信號傳輸。As shown in FIG. 3, the sub-wafer 332 includes four unit cells 140, and the four unit cells 140 are in an array pattern of 2 times 2, and any two of the four unit cells 140 are still permeable to corresponding signal transmission lines. Group 120 performs signal transmission. The sub-wafer 334 includes six unit cells 140, and the six unit cells 140 are in an array pattern of two times three, and any two of the six unit cells 140 can still transmit signals through the corresponding signal transmission line group 120. The sub-wafer 336 includes six unit cells 140, and the six unit cells 140 are in an array pattern of three times two, and any two of the six unit cells 140 can still transmit signals through the corresponding signal transmission line group 120. The sub-wafer 338 includes nine unit cells 140, and the nine unit cells 140 are in an array pattern of three times three, and any two of the nine unit cells 140 can still transmit signals through the corresponding signal transmission line group 120.
附帶一提的,圖1所示多晶胞晶片100的晶胞140的數量與陣列排列方式僅只是一個範例,多晶胞晶片100的晶胞140的數量與陣列排列方式可以由設計者依據實際應用或設計需求而定。除此之外,圖3所示的多晶胞晶片100的切割方式也僅只是一個範例,使用者可依實際應用或設計需求來對多晶胞晶片100進行切割,以使切割後的子晶片(例如圖3的子晶片332)中的晶胞140的數量(例如4個)符合實際所需,並具有最佳化的運算能力。如此一來,可達到降低硬體成本的效果並增加晶片使用上的彈性。Incidentally, the number and arrangement of the unit cells 140 of the polycrystalline cell wafer 100 shown in FIG. 1 are only an example. The number and arrangement of the unit cells 140 of the poly unit wafer 100 can be determined by the designer. Depending on the application or design needs. In addition, the cutting manner of the poly unit wafer 100 shown in FIG. 3 is only an example, and the user can cut the poly unit wafer 100 according to actual application or design requirements, so that the cut sub-chip can be cut. The number of unit cells 140 (e.g., four) in (e.g., sub-wafer 332 of Fig. 3) is in line with actual needs and has an optimized computing power. As a result, the effect of reducing the cost of the hardware can be achieved and the flexibility in the use of the wafer can be increased.
由於任二相鄰的晶胞(例如圖1所示的晶胞140_12與140_13)之間的信號傳輸線組(例如信號傳輸線組120_L)皆有可能在進行晶片切割時被切斷,為了避免切斷後而呈現浮接狀態的信號傳輸線組(例如信號傳輸線組120_L)會影響到晶胞(例如圖1所示的晶胞140_12與140_13)的正常運作,故每一晶胞(例如圖1所示的晶胞140_12與140_13)可具有自動偵測機制,以自動偵側信號傳輸線組(例如信號傳輸線組120_L)是否被切斷。Since any signal transmission line group (for example, the signal transmission line group 120_L) between two adjacent unit cells (for example, the unit cells 140_12 and 140_13 shown in FIG. 1) is likely to be cut during wafer cutting, in order to avoid cutting off The signal transmission line group (for example, the signal transmission line group 120_L) exhibiting a floating state affects the normal operation of the unit cell (for example, the unit cells 140_12 and 140_13 shown in FIG. 1), and thus each unit cell (for example, as shown in FIG. 1) The cells 140_12 and 140_13) may have an automatic detection mechanism to automatically detect whether the signal transmission line group (for example, the signal transmission line group 120_L) is cut off.
舉例來說,一旦晶胞140_12與140_13之間的信號傳輸線組120_L因晶片切割而被切斷之後,晶胞140_12及140_13可將來自浮接狀態的信號傳輸線組120_L的輸入信號進行隔離,以避免邏輯準位不明確(unknown)的輸入信號影響晶胞140_12及140_13的正常運作。For example, once the signal transmission line group 120_L between the cells 140_12 and 140_13 is cut due to wafer dicing, the cells 140_12 and 140_13 can isolate the input signal from the floating state signal transmission line group 120_L to avoid Unknown input signals affect the normal operation of the cells 140_12 and 140_13.
以下請參照圖1與圖4,圖4繪示圖1的晶胞140中的介面電路與偵測線路的架構示意圖。每一個晶胞140可包括至少一偵測線路447,用以自動偵測對應的信號傳輸線組120是否被切斷,並據以產生偵測信號DS。舉例來說,圖1所示的晶胞140_13可包括4個如圖4所示的偵測線路447,可分別用以自動偵測信號傳輸線組120_U、120_D、120_L、120_R是否被切斷。Please refer to FIG. 1 and FIG. 4 . FIG. 4 is a schematic structural diagram of the interface circuit and the detection circuit in the unit cell 140 of FIG. 1 . Each of the cells 140 may include at least one detection line 447 for automatically detecting whether the corresponding signal transmission line group 120 is cut off, and accordingly generating the detection signal DS. For example, the unit cell 140_13 shown in FIG. 1 can include four detection lines 447 as shown in FIG. 4, which can be used to automatically detect whether the signal transmission line groups 120_U, 120_D, 120_L, 120_R are cut off.
除此之外,每一個晶胞140還可包括至少一介面電路445。介面電路445可耦接到相鄰晶胞間的信號傳輸線組120,且可耦接到偵測線路447以接收偵測信號DS。當偵測線路447偵測到相鄰晶胞間的信號傳輸線組120被切斷時,介面電路445可自動隔離晶胞140與信號傳輸線組120之間的連繫,以避免來自信號傳輸線組120的邏輯準位不明確的輸入信號影響晶胞140的正常運作。In addition, each cell 140 can also include at least one interface circuit 445. The interface circuit 445 can be coupled to the signal transmission line group 120 between adjacent cells and can be coupled to the detection line 447 to receive the detection signal DS. When the detection circuit 447 detects that the signal transmission line group 120 between adjacent cells is cut off, the interface circuit 445 can automatically isolate the connection between the cell 140 and the signal transmission line group 120 to avoid the signal transmission line group 120. The logic level of the ambiguous input signal affects the normal operation of the unit cell 140.
在本發明的一實施例中,偵測線路447可包括緩衝器BUF以及電阻R1、R2。緩衝器BUF的輸入端可透過信號傳輸線組120的一信號線W1而耦接到一電源端VDD。緩衝器BUF的輸出端用以產生偵測信號DS。電阻R1耦接在緩衝器BUF的輸入端與接地端GND之間。電阻R2耦接在緩衝器BUF的輸入端與輸出端之間。In an embodiment of the invention, the detection line 447 can include a buffer BUF and resistors R1, R2. The input end of the buffer BUF can be coupled to a power supply terminal VDD through a signal line W1 of the signal transmission line group 120. The output of the buffer BUF is used to generate the detection signal DS. The resistor R1 is coupled between the input end of the buffer BUF and the ground GND. The resistor R2 is coupled between the input end and the output end of the buffer BUF.
舉例來說,當晶胞140_12與140_13之間的信號傳輸線組120_L未被切斷時,緩衝器BUF的輸入端可經由信號傳輸線組120_L的信號線(如圖4所示的信號線W1)而接收來自電源端VDD的電源信號,故緩衝器BUF可輸出邏輯高準位的偵測信號DS。如此一來,晶胞140_12與140_13可根據邏輯高準位的偵測信號DS而判斷信號傳輸線組120_L未被切斷,故晶胞140_12與晶胞140_13之間可透過晶胞140_12的介面電路(如圖4所示的介面電路445)、信號傳輸線組120_L以及晶胞140_13的介面電路(如圖4所示的介面電路445)來進行信號傳輸。For example, when the signal transmission line group 120_L between the cells 140_12 and 140_13 is not cut, the input end of the buffer BUF may pass through the signal line of the signal transmission line group 120_L (the signal line W1 shown in FIG. 4). The power supply signal from the power supply terminal VDD is received, so the buffer BUF can output the logic high level detection signal DS. In this way, the cells 140_12 and 140_13 can judge that the signal transmission line group 120_L is not cut according to the detection signal DS of the logic high level, so that the interface circuit between the unit cell 140_12 and the unit cell 140_13 can transmit the unit cell 140_12 ( The interface circuit 445), the signal transmission line group 120_L, and the interface circuit of the unit cell 140_13 (the interface circuit 445 shown in FIG. 4) are used for signal transmission.
相對地,一旦晶胞140_12與140_13之間的信號傳輸線組120_L因晶片切割而被切斷之後,緩衝器BUF的輸入端可透過電阻R1而被下拉至邏輯低準位,故緩衝器BUF可輸出邏輯低準位的偵測信號DS。如此一來,晶胞140_12與140_13可根據邏輯低準位的偵測信號DS而判斷信號傳輸線組120_L已被切斷。此時,晶胞140_12中的介面電路(如圖4所示的介面電路445)可根據邏輯低準位的偵測信號DS而將來自浮接狀態的信號傳輸線組120_L的輸入信號與晶胞140_12內部的電路隔離,以避免邏輯準位不明確的輸入信號影響晶胞140_12的正常運作。同樣地,晶胞140_13中的介面電路(如圖4所示的介面電路445)可根據邏輯低準位的偵測信號DS而將來自浮接狀態的信號傳輸線組120_L的輸入信號與晶胞140_13內部的電路隔離,以避免邏輯準位不明確的輸入信號影響晶胞140_13的正常運作。In contrast, once the signal transmission line group 120_L between the cells 140_12 and 140_13 is cut due to wafer dicing, the input terminal of the buffer BUF can be pulled down to the logic low level through the resistor R1, so the buffer BUF can be output. Logic low level detection signal DS. In this way, the cells 140_12 and 140_13 can judge that the signal transmission line group 120_L has been cut according to the logic low level detection signal DS. At this time, the interface circuit in the cell 140_12 (such as the interface circuit 445 shown in FIG. 4) can input the input signal of the signal transmission line group 120_L from the floating state to the unit cell 140_12 according to the logic low level detection signal DS. The internal circuit is isolated to prevent the input signal of ambiguous logic level from affecting the normal operation of the cell 140_12. Similarly, the interface circuit in the cell 140_13 (such as the interface circuit 445 shown in FIG. 4) can input the input signal of the signal transmission line group 120_L from the floating state to the unit cell 140_13 according to the logic low level detection signal DS. The internal circuit is isolated to prevent the input signal of ambiguous logic level from affecting the normal operation of the cell 140_13.
附帶一提的,上述範例的偵測信號DS的邏輯高低準位與信號傳輸線組120_L切斷與否的關係僅只是一個範例。本領域具通常知識者皆知,偵測信號DS的邏輯高低準位與信號傳輸線組120_L切斷與否的關係是可以由設計者依實際需求來進行定義的。Incidentally, the relationship between the logic high and low level of the detection signal DS of the above example and the disconnection of the signal transmission line group 120_L is only an example. It is well known in the art that the relationship between the logic level of the detection signal DS and the disconnection of the signal transmission line group 120_L can be defined by the designer according to actual needs.
在上述實施例中,圖1所示的每一晶胞140的功能可以完全相同,也可以不完全相同。事實上,本發明並不限制多晶胞晶片100中的每一個晶胞140的功能。舉例來說,圖1所示的25個晶胞140可例如都是微控制器(Microcontroller Unit,MCU)。或者是,圖1所示的10個晶胞140可例如是微控制器,而其餘15個晶胞140則為記憶體。簡單來說,使用者可依實際應用或設計需求來彈性設計每一個晶胞140的功能。In the above embodiment, the function of each unit cell 140 shown in FIG. 1 may be identical or not identical. In fact, the present invention does not limit the function of each of the unit cells 140 in the poly unit wafer 100. For example, the 25 unit cells 140 shown in FIG. 1 may be, for example, all Microcontroller Units (MCUs). Alternatively, the ten cells 140 shown in FIG. 1 may be, for example, a microcontroller, while the remaining 15 cells 140 are memories. In simple terms, the user can flexibly design the function of each unit cell 140 according to actual application or design requirements.
在圖1所示的實施例中,每一晶胞140的面積均相同,且25個晶胞140是以陣列型式配置在多晶胞晶片100,但本發明並不以此為限。以下請同時參照圖1及圖5。圖5是依照本發明另一實施例所繪示的晶圓10中的多晶胞晶片100’的架構示意圖。圖5所示的多晶胞晶片100’同樣包括半導體基底180、多個信號傳輸線組120以及多個晶胞540。然而,相較於圖1,圖5的每一晶胞540的面積不完全相同,且晶胞540的排列方式也並非是單純的陣列型式。舉例來說,圖5所示的晶胞540_8的面積為晶胞540_7的四倍,而晶胞540_14的面積則為晶胞540_7的兩倍,但本發明並不以此為限。事實上,圖5所示的每一個晶胞540的面積及晶胞540在多晶胞晶片100’上的排列方式可視實際應用或設計需求而定。另外,圖5所示的多晶胞晶片100’的其他細節可參考圖1~圖4的相關說明類推得之,故不再贅述。In the embodiment shown in FIG. 1, the area of each unit cell 140 is the same, and the 25 unit cells 140 are arranged in an array pattern on the poly unit wafer 100, but the invention is not limited thereto. Please refer to FIG. 1 and FIG. 5 at the same time. FIG. 5 is a schematic diagram of the structure of a poly unit wafer 100' in a wafer 10 according to another embodiment of the invention. The poly unit wafer 100' shown in Fig. 5 also includes a semiconductor substrate 180, a plurality of signal transmission line groups 120, and a plurality of unit cells 540. However, compared to FIG. 1, the area of each unit cell 540 of FIG. 5 is not completely the same, and the arrangement of the unit cells 540 is not a simple array pattern. For example, the area of the unit cell 540_8 shown in FIG. 5 is four times that of the unit cell 540_7, and the area of the unit cell 540_14 is twice that of the unit cell 540_7, but the invention is not limited thereto. In fact, the area of each of the unit cells 540 shown in Figure 5 and the arrangement of the unit cells 540 on the polycrystalline wafer 100' may depend on the actual application or design requirements. In addition, other details of the polycrystalline cell wafer 100' shown in FIG. 5 can be analogized with reference to the related descriptions of FIGS. 1 to 4, and therefore will not be described again.
以下請重新參照圖1及圖2。如圖2所示,每一晶胞140可包括一識別碼(identification,ID) 241。每一晶胞140中的識別碼241乃是唯讀的且是唯一的,可用來對每一個晶胞140進行識別。當晶胞140製造完成後,可採用一次燒錄的方式將識別碼241燒錄至晶胞140中,但本發明並不以此為限。晶胞140中的識別碼241可以透過晶胞140中所執行的軟體來讀取,也可以由外部晶片(未繪示)透過焊墊145來讀取。另外,燒錄至晶胞140中的識別碼241皆已通過註冊程序且是唯一的,故可透過讀取晶胞140的識別碼241,即可判斷晶胞140是否為正版。Please refer back to Figure 1 and Figure 2 below. As shown in FIG. 2, each unit cell 140 can include an identification (ID) 241. The identification code 241 in each unit cell 140 is read-only and unique and can be used to identify each unit cell 140. After the unit cell 140 is manufactured, the identification code 241 can be burned into the unit cell 140 in a single burning manner, but the invention is not limited thereto. The identification code 241 in the unit cell 140 can be read by the software executed in the unit cell 140, or can be read by the external wafer (not shown) through the pad 145. In addition, the identification code 241 burned into the unit cell 140 has passed the registration procedure and is unique. Therefore, by reading the identification code 241 of the unit cell 140, it can be determined whether the unit cell 140 is genuine.
在本發明的一實施例中,識別碼241還可用來對執行在晶胞140上的軟體進行保護,其中上述軟體可與晶胞140協同運作。舉例來說,每一個晶胞140可根據其本身的識別碼241來判斷是否允許使用此軟體。如此一來,可避免使用者僅購買一套軟體,卻將此軟體使用在不同的晶胞140上。In an embodiment of the invention, the identification code 241 can also be used to protect software implemented on the unit cell 140, wherein the software can cooperate with the unit cell 140. For example, each cell 140 can determine whether to allow the use of the software based on its own identification code 241. In this way, the user can be prevented from purchasing only one set of software, but the software is used on different unit cells 140.
在某些應用中,上述軟體可能被存放在晶胞140外部的記憶體。為了避免儲存在外部記憶體的軟體被盜取或是軟體的內容被分析,每一個晶胞140可將其本身的識別碼241作為金鑰(key)以對上述軟體進行加密,再將加密後的軟體儲存在外部記憶體。當晶胞140要執行或使用上述軟體時,僅需自外部記憶體讀取加密的軟體,再將晶胞140本身的識別碼241作為金鑰以對加密的軟體進行解密即可。在本發明的一實施例中,晶胞140的加密及解密功能可採用硬體電路的方式來實現,但本發明並不以此為限。在本發明的另一實施例中,晶胞140的加密及解密功能也可採用加密及解密軟體程式來實現,其中加密及解密軟體程式可儲放在晶胞140內部的一次性编程(One Time Program,OTP)記憶體或可多次编程(Multi Time Program,MTP)記憶體中,且加密及解密軟體程式無法從晶胞140的外部來讀取。In some applications, the above software may be stored in a memory external to the unit cell 140. In order to prevent the software stored in the external memory from being stolen or the content of the software being analyzed, each unit cell 140 may use its own identification code 241 as a key to encrypt the software, and then encrypt the software. The software is stored in external memory. When the unit cell 140 is to execute or use the above software, it is only necessary to read the encrypted software from the external memory, and then use the identification code 241 of the unit cell 140 as a key to decrypt the encrypted software. In an embodiment of the present invention, the encryption and decryption functions of the unit cell 140 can be implemented by using a hardware circuit, but the invention is not limited thereto. In another embodiment of the present invention, the encryption and decryption functions of the unit cell 140 can also be implemented using an encryption and decryption software program, wherein the encryption and decryption software program can be stored in the one-time programming inside the unit cell 140 (One Time) Program, OTP) Memory or Multi Time Program (MTP) memory, and the encryption and decryption software programs cannot be read from outside the unit cell 140.
以下請重新參照圖1及圖2。在本發明的一實施例中,圖1所示的多晶胞晶片100的多個晶胞140可用以同時執行一軟體。由於多個晶胞140具有多個不同的識別碼241,故多晶胞晶片100可將其中一個晶胞140的識別碼241作為金鑰,即可對軟體進行加密、解密、安裝或執行。舉例來說,當圖1所示的晶胞140_8、140_13用以同時執行一軟體時,可將晶胞140_8的識別碼(如圖2所示的識別碼241)作為金鑰以對軟體進行加密及解密,晶胞140_8可將解密後的軟體資料透過信號傳輸線組120_U傳輸至晶胞140_13。如此一來,軟體即可由晶胞140_8、140_13進行安裝或執行。Please refer back to Figure 1 and Figure 2 below. In an embodiment of the invention, the plurality of cells 140 of the polycrystalline wafer 100 shown in FIG. 1 can be used to simultaneously execute a soft body. Since the plurality of unit cells 140 have a plurality of different identification codes 241, the poly unit wafer 100 can encrypt, decrypt, mount, or execute the software by using the identification code 241 of one of the unit cells 140 as a key. For example, when the unit cells 140_8, 140_13 shown in FIG. 1 are used to simultaneously execute a software, the identification code of the unit cell 140_8 (the identification code 241 shown in FIG. 2) can be used as a key to encrypt the software. And decrypting, the unit cell 140_8 can transmit the decrypted software data to the unit cell 140_13 through the signal transmission line group 120_U. In this way, the software can be installed or executed by the unit cells 140_8, 140_13.
以下請重新參照圖2及圖3。在本發明的一實施例中,圖3的所示的子晶片332的4個晶胞140也可用以同時執行一軟體。由於子晶片332的4個晶胞140具有4個不同的識別碼241,故子晶片332可將其中一個晶胞140的識別碼241作為金鑰,即可對軟體進行加密、解密、安裝或執行。同樣地,其餘子晶片334、336、338可依據上述說明而類推之,故不再贅述。Please refer back to Figure 2 and Figure 3 below. In an embodiment of the invention, the four cells 140 of the illustrated sub-wafer 332 of FIG. 3 can also be used to simultaneously execute a software. Since the four cells 140 of the sub-wafer 332 have four different identification codes 241, the sub-wafer 332 can encrypt, decrypt, install or execute the software by using the identification code 241 of one of the cells 140 as a key. . Similarly, the remaining sub-wafers 334, 336, 338 can be analogized according to the above description, and therefore will not be described again.
以下請參照圖6。圖6是圖1的多晶胞晶片100的一晶胞140’的架構示意圖。圖6所示的晶胞140’可包括2個電路642、644,其中電路642可具有識別碼641,而電路644可具有識別碼643。電路642的識別碼641是唯讀的且是唯一的,可用以對電路642進行識別。同樣地,電路644的識別碼643是唯讀的且是唯一的,可用以對電路644進行識別。附帶一提的,圖6所示的晶胞140’中的電路數量僅只是一個範例,並非用以限制本發明。晶胞140’中的電路數量可以由設計者依據實際應用或設計需求而定。除此之外,電路642的識別碼641及電路644的識別碼643的功能類似於圖2所示的晶胞140的識別碼241,故電路642的識別碼641及電路644的識別碼643的功能可參考上述圖2的相關說明類推得之,在此不再贅述。Please refer to FIG. 6 below. Figure 6 is a block diagram showing the structure of a unit cell 140' of the polycrystalline cell wafer 100 of Figure 1. The cell 140' shown in Figure 6 can include two circuits 642, 644, wherein the circuit 642 can have an identification code 641 and the circuit 644 can have an identification code 643. The identification code 641 of circuit 642 is read-only and unique and can be used to identify circuit 642. Likewise, the identification code 643 of circuit 644 is read-only and unique and can be used to identify circuit 644. Incidentally, the number of circuits in the unit cell 140' shown in Fig. 6 is merely an example and is not intended to limit the present invention. The number of circuits in the cell 140' can be determined by the designer depending on the actual application or design requirements. In addition, the function of the identification code 641 of the circuit 642 and the identification code 643 of the circuit 644 is similar to the identification code 241 of the unit cell 140 shown in FIG. 2, so the identification code 641 of the circuit 642 and the identification code 643 of the circuit 644 are The function can be referred to the related description of FIG. 2 above, and will not be described here.
以下請參照圖7,圖7是圖1的多晶胞晶片100的一應用示意圖。在本實施例中,晶胞140_P可例如是處理器,而晶胞140_M可例如是四埠記憶體(quad-port memory),且晶胞140_P與晶胞140_M交錯配置在多晶胞晶片100的半導體基底180上。圖7所示的晶胞140_P、140_M的排列方式適用於精神網路或影像處理,可使交換網路或圖像邊緣參考的處理速度提昇,且讓交換網路或圖像邊緣參考更為容易實現。Please refer to FIG. 7. FIG. 7 is a schematic diagram of an application of the polycrystalline cell wafer 100 of FIG. In the present embodiment, the unit cell 140_P may be, for example, a processor, and the unit cell 140_M may be, for example, a quad-port memory, and the unit cell 140_P and the unit cell 140_M are alternately arranged on the poly unit wafer 100. On the semiconductor substrate 180. The arrangement of the cells 140_P, 140_M shown in Figure 7 is suitable for mental network or image processing, which can improve the processing speed of the switching network or image edge reference, and make the switching network or image edge reference easier. achieve.
綜上所述,本發明實施例的多晶胞晶片可視實際應用、效能或成本需求來進行彈性地切割,以切割為多個子晶片。如此一來,可提高多晶胞晶片在設計或製作完成之後使用上的彈性。另一方面,倘若多晶胞晶片上的部份晶胞失效時,可將多晶胞晶片切成具有較少晶胞的子晶片,以將失效的晶胞予以切除,其中切除失效的晶胞之後的子晶片仍可正常地使用,故可提高晶片的可使用率(良率)。In summary, the poly unit wafer of the embodiment of the present invention can be elastically cut to be cut into a plurality of sub-wafers according to actual application, performance or cost requirements. As a result, the flexibility of the use of the polycrystalline wafer after use in design or fabrication can be improved. On the other hand, if a part of the unit cell on the poly unit wafer fails, the poly unit wafer can be cut into sub-wafers with fewer unit cells to remove the failed unit cell, wherein the failed unit cell is removed. Subsequent sub-wafers can still be used normally, so that the usable rate (yield) of the wafer can be improved.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.
10‧‧‧晶圓10‧‧‧ wafer
100、100’、100”‧‧‧多晶胞晶片100, 100', 100" ‧ ‧ multi-cell wafer
110、110_1、110_2‧‧‧相隔空間110, 110_1, 110_2‧‧‧ separated spaces
120、120_D、120_L、120_R、120_U‧‧‧信號傳輸線組120, 120_D, 120_L, 120_R, 120_U‧‧‧ signal transmission line group
140、140’、140_8、140_9、140_12、140_13、140_14、140_18、140_P、140_M、540、540_7、540_8、540_14‧‧‧晶胞140, 140', 140_8, 140_9, 140_12, 140_13, 140_14, 140_18, 140_P, 140_M, 540, 540_7, 540_8, 540_14‧‧ unit cell
145‧‧‧焊墊 145‧‧‧ solder pads
180‧‧‧半導體基底 180‧‧‧Semiconductor substrate
241、ID、641、643‧‧‧識別碼 241, ID, 641, 643‧ ‧ identification code
290、390_1、390_2‧‧‧切割線 290, 390_1, 390_2‧‧‧ cutting line
332、334、336、338‧‧‧子晶片 332, 334, 336, 338‧‧‧ sub-wafer
445‧‧‧介面電路 445‧‧‧Interface circuit
447‧‧‧偵測線路 447‧‧‧Detection line
640、642、644‧‧‧電路 640, 642, 644‧‧‧ circuits
BUF‧‧‧緩衝器 BUF‧‧‧ buffer
DS‧‧‧偵測信號 DS‧‧‧Detection signal
GND‧‧‧接地端 GND‧‧‧ ground terminal
R1、R2‧‧‧電阻 R1, R2‧‧‧ resistance
VDD‧‧‧電源端 VDD‧‧‧ power terminal
W1‧‧‧信號線 W1‧‧‧ signal line
下面的所附圖式是本發明之說明書的一部分,繪示了本發明的示例實施例,所附圖式與說明書的描述一起說明本發明的原理。 圖1是依照本發明一實施例所繪示的晶圓中的多晶胞晶片的架構示意圖。 圖2是依照本發明一實施例所繪示的多晶胞晶片的一晶胞的放大示意圖。 圖3是圖1的多晶胞晶片的一切割示意圖。 圖4是圖1的晶胞中的介面電路與偵測線路的架構示意圖。 圖5是依照本發明另一實施例所繪示的晶圓中的多晶胞晶片的架構示意圖。 圖6是圖1的多晶胞晶片的一晶胞的架構示意圖。 圖7是圖1的多晶胞晶片的一應用示意圖。 圖8是依照本發明又一實施例所繪示的晶圓中的多晶胞晶片的架構示意圖。The following drawings are a part of the specification of the invention, and illustrate the embodiments of the invention FIG. 1 is a schematic diagram of the structure of a polycrystalline silicon wafer in a wafer according to an embodiment of the invention. 2 is an enlarged schematic view of a unit cell of a poly unit cell wafer according to an embodiment of the invention. 3 is a schematic view of a cut of the poly unit cell of FIG. 1. 4 is a schematic structural view of a interface circuit and a detection line in the unit cell of FIG. 1. FIG. 5 is a schematic structural diagram of a poly unit wafer in a wafer according to another embodiment of the invention. 6 is a schematic view showing the structure of a unit cell of the poly unit cell of FIG. 1. 7 is a schematic diagram of an application of the polycrystalline cell wafer of FIG. 1. FIG. 8 is a schematic structural diagram of a poly unit wafer in a wafer according to still another embodiment of the invention.
10‧‧‧晶圓 10‧‧‧ wafer
100‧‧‧多晶胞晶片 100‧‧‧Multicell wafer
110‧‧‧相隔空間 110‧‧‧ separated space
120、120_D、120_L、120_R、120_U‧‧‧信號傳輸線組 120, 120_D, 120_L, 120_R, 120_U‧‧‧ signal transmission line group
140、140_8、140_12、140_13、140_14、140_18‧‧‧晶胞 140, 140_8, 140_12, 140_13, 140_14, 140_18‧‧‧ unit cell
180‧‧‧半導體基底 180‧‧‧Semiconductor substrate
Claims (13)
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| US4864381A (en) * | 1986-06-23 | 1989-09-05 | Harris Corporation | Hierarchical variable die size gate array architecture |
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