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TWI581060B - A photosensitive resin composition and a cured product thereof, and a hardened product thereof, a printed circuit board having a solder resist layer - Google Patents

A photosensitive resin composition and a cured product thereof, and a hardened product thereof, a printed circuit board having a solder resist layer Download PDF

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Publication number
TWI581060B
TWI581060B TW103122640A TW103122640A TWI581060B TW I581060 B TWI581060 B TW I581060B TW 103122640 A TW103122640 A TW 103122640A TW 103122640 A TW103122640 A TW 103122640A TW I581060 B TWI581060 B TW I581060B
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photosensitive resin
coloring agent
pigment
resin composition
manufactured
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TW103122640A
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Chinese (zh)
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TW201439677A (en
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Yoko Shibasaki
Masao Arima
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Taiyo Holdings Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Description

感光性樹脂組成物及其硬化物,及其硬化物所形成之具有抗焊阻劑層之印刷電路基板 Printed circuit substrate having a solder resist layer formed of a photosensitive resin composition, a cured product thereof, and a cured product thereof

本發明為有關一種著色感光性樹脂組成物。更詳細言之,本發明為可提供一種具有可遮蔽電路不良外觀等之優良隱蔽性,且具有高解析性之抗焊阻劑層的具有優良著色力與解析性之感光性樹脂組成物。 The present invention relates to a colored photosensitive resin composition. More specifically, the present invention provides a photosensitive resin composition having excellent coloring power and resolution, which has excellent releasability to mask a poor appearance of a circuit and the like, and has a high-resistance solder resist layer.

鹼顯影性感光性組成物被大量作為印刷配線板用之抗焊阻劑使用。抗焊阻劑為具有保護印刷基板之電路等之目的,但其著色力為造成印刷配線板之外觀或電路之隱蔽性產生極大影響之重要特性。 The alkali-developable photosensitive composition is used in a large amount as a solder resist for a printed wiring board. The solder resist is an object having a circuit for protecting a printed substrate, etc., but its coloring power is an important characteristic that greatly affects the appearance of the printed wiring board or the concealability of the circuit.

即,抗焊阻劑之著色力不充分時,將會汙染形成於印刷配線板上之銅電路,或因極顯著之變色而造成印刷配線板之良品率顯著降低。此外,近來於印刷配線板之後製程之實裝步驟已形成自動化,而由機械進行對構件之裝設,故於辨識畫像之際將會產生不易辨識抗焊阻劑與銅電路等不佳狀況。該現象於印刷配線板之最後檢查之AOI(Automatic Optical Inspection)之際也會產生相同之問 題。 That is, when the coloring power of the solder resist is insufficient, the copper circuit formed on the printed wiring board is contaminated, or the yield of the printed wiring board is remarkably lowered due to extremely remarkable discoloration. In addition, the mounting steps of the process after the recent printing of the wiring board have been automated, and the components are mounted by the machine, so that it is difficult to identify the solder resist and the copper circuit when the image is recognized. This phenomenon also causes the same problem at the time of the final inspection of the AOI (Automatic Optical Inspection) of the printed wiring board. question.

目前市售之抗焊阻劑,雖依膜厚或基材之銅的前處理而有所不同,但以CIE L*a*b*顯示系表示時,綠色之L*值為40至60、a*值為-10至-28、b*值為6至18,藍色之L*值為40至60、a*值為-10至-28、b*值為-6至-18,特別是綠色、藍色之L*值同時為40~50時,就AOI之觀點而言為較佳,一般必須具有此程度之著色力。 Currently, the commercially available solder resists vary depending on the film thickness or the pretreatment of the copper of the substrate, but when expressed by the CIE L*a*b* display, the green L* value is 40 to 60. a* value is -10 to -28, b* value is 6 to 18, blue L* value is 40 to 60, a* value is -10 to -28, b* value is -6 to -18, special When the L* value of green and blue is 40 to 50 at the same time, it is preferable from the viewpoint of AOI, and it is generally necessary to have the coloring power of this degree.

又,光抗焊阻劑之感光特性,一般而言,市面上已有售售膜厚約20μm,且具有30μm至50μm左右解析性之阻劑。但是,最近該些抗焊阻劑對於具有高電路厚度之印刷基板並無法達到充分之硬化深度,故仍存在無法形成微小線路之問題。一般而言,抗焊阻劑因塗佈於形成有電路之基板上,故該阻劑之厚度與電路厚度具有對應性。例如,電路厚度為35μm時,將抗焊阻劑之厚度於電路上塗佈20μm時,其於電路間可形成約30~35μm,電路厚度為70μm時,為約60~70μm。其中,即使電路厚度於35μm之基板上可形成50μm之阻劑線路,但仍會存在於電路厚度為70μm之基板上無法形成100μm之影像等問題。 Further, in general, a photosensitive resist having a film thickness of about 20 μm and having a resolution of about 30 μm to 50 μm is commercially available. However, recently, these solder resists have not been able to achieve a sufficient hardening depth for a printed substrate having a high circuit thickness, so there is still a problem that a minute line cannot be formed. In general, since the solder resist is applied to a substrate on which a circuit is formed, the thickness of the resist has a correspondence with the thickness of the circuit. For example, when the thickness of the circuit is 35 μm, when the thickness of the solder resist is applied to the circuit by 20 μm, it can be formed between the circuits by about 30 to 35 μm, and when the thickness of the circuit is 70 μm, it is about 60 to 70 μm. Among them, even if a 50 μm resist line can be formed on a substrate having a circuit thickness of 35 μm, there is still a problem that an image of 100 μm cannot be formed on a substrate having a circuit thickness of 70 μm.

最近,使用於以高電壓驅動之構件之配線板以日漸高電路厚度化、高密度化,而有要求可適應於該基板之高解析性的抗焊阻劑。 Recently, a wiring board for a member driven by a high voltage has an increasing thickness and a high density, and a solder resist which is suitable for high resolution of the substrate is required.

但是,抗焊阻劑一般為使用酞菁系之綠與藍及作為輔助使用的黃色之著色劑,但因該些著色劑無論任一者於紫 外線區域皆具有較大之吸收,故該添加量過多時,將會影響紫外線之透過性而無法得到良好之解析性。因此,欲提供一種可形成同時滿足良好之隱蔽性與高解析性之抗焊阻劑層的感光性樹脂組成物仍存在實際困難性。 However, the anti-solder resist is generally a green coloring agent using phthalocyanine green and blue as an auxiliary color, but either of these coloring agents is used in purple. Since the outer region has a large absorption, when the amount is too large, the ultraviolet ray permeability is affected and good resolution cannot be obtained. Therefore, there is still practical difficulty in providing a photosensitive resin composition which can form a solder resist layer which satisfies both good concealability and high resolution.

[專利文獻1]特開2000-7974號公報,申請專利範圍 [Patent Document 1] JP-A-2000-7974, the scope of application of the patent

本發明為提供一種可形成具有高度著色力與優良隱蔽性,且具有高長徑比之解析性的抗焊阻劑層之感光性樹脂組成物為目的。 The present invention has an object of providing a photosensitive resin composition capable of forming a solder resist layer having a high coloring power and excellent concealability and having a high aspect ratio.

本發明者等經過深入研究結果,得知著色劑至少使用苝系著色劑所得之感光性樹脂組成物時,可使以往抗焊阻劑中有關解析性之上述問題得到解決,且可得到充分著色力之效果,因而完成本發明。 As a result of intensive research, the present inventors have found that when the coloring agent is at least a photosensitive resin composition obtained by using an anthraquinone coloring agent, the above problems relating to analyzability in the conventional solder resist can be solved, and sufficient coloring can be obtained. The effect of force, thus completing the present invention.

即,本發明為有關含有(A-1)苝系著色劑,及(B)含羧酸之樹脂為特徵之感光性樹脂組成物。 That is, the present invention relates to a photosensitive resin composition characterized by containing (A-1) an anthraquinone-based coloring agent and (B) a carboxylic acid-containing resin.

本發明之感光性樹脂組成物之一實施態樣為,含有至少為苝系著色劑(A-1)之染料者。 One embodiment of the photosensitive resin composition of the present invention is a dye containing at least an anthraquinone coloring agent (A-1).

又,本發明之感光性樹脂組成物之一實施態樣為,含有至少為苝系著色劑(A-1)之顏料者。 Further, in one embodiment of the photosensitive resin composition of the present invention, the pigment containing at least the anthraquinone coloring agent (A-1) is contained.

又,本發明之感光性樹脂組成物之一實施態樣為,其色調為綠色或橙色。 Further, in one embodiment of the photosensitive resin composition of the present invention, the color tone is green or orange.

又,本發明之感光性樹脂組成物之一實施態樣為,除苝系著色劑(A-1)以外,尚含有酞菁系著色劑(A-2)及 /或其他之著色劑所得者。 Further, in one embodiment of the photosensitive resin composition of the present invention, the phthalocyanine-based coloring agent (A-2) is contained in addition to the lanthanoid coloring agent (A-1). / or other coloring agent.

又,本發明之感光性樹脂組成物之一實施態樣為,鹼顯影性光抗焊阻劑。 Further, one embodiment of the photosensitive resin composition of the present invention is an alkali developable photoresist.

又,本發明中,其他之實施樣態為,將上述感光性樹脂組成物塗佈於負載薄膜上,經乾燥所得之乾薄膜。 Further, in the present invention, in another embodiment, the photosensitive resin composition is applied onto a supported film and dried to obtain a dry film.

又,本發明中,其他之實施樣態為,使上述感光性樹脂組成物或上述乾薄膜於形成電路之基板上硬化所得之硬化物。 Further, in the present invention, the other embodiment is a cured product obtained by curing the photosensitive resin composition or the dry film on a substrate on which a circuit is formed.

又,本發明中,其他之實施樣態為,於形成電路之基板上,具有由上述硬化物所得之抗焊阻劑層之印刷電路基板。 Further, in the present invention, another embodiment is a printed circuit board having a solder resist layer obtained from the cured material on a substrate on which a circuit is formed.

本發明之兼具高度著色力且具有優良解析性之感光性樹脂組成物,可提供同時滿足作為邁向高電路厚度化、高密度化之印刷配線板用的抗焊阻劑層所要求之具有高度解析性與優良隱蔽性之抗焊阻劑層。 The photosensitive resin composition having a high coloring power and excellent resolvability of the present invention can provide a solder resist layer which is required for a printed wiring board which is high in thickness and high in density. Highly analytical and excellent concealed solder resist layer.

以下,將對本發明作詳細說明。 Hereinafter, the present invention will be described in detail.

本發明之感光性樹脂組成物,其著色劑為使用含有(A-1)苝系著色劑為第一之特徵,其一實施態樣中,可為尚含有酞菁系著色劑所得之該色調呈現綠色或橙色之感光性樹脂組成物。如此,首先將對本發明之著色劑進行說明。 In the photosensitive resin composition of the present invention, the coloring agent is characterized in that the (A-1) anthraquinone-based coloring agent is used as the first component, and in one embodiment, the coloring matter obtained from the phthalocyanine-based coloring agent may be used. A green or orange photosensitive resin composition is present. Thus, the coloring agent of the present invention will first be described.

(A-1)苝系著色劑 (A-1) lanthanide colorant

本發明含有苝系著色劑(A-1)之感光性樹脂組成 物,對於以往著色系之光阻劑,特別是印刷配線板用之抗焊阻劑可賦予其高解析性。其理由乃因為以往使用之著色劑為酞菁綠、酞菁藍等酞菁系顏料與,蒽醌與異吲哚啉(Isoindoline)系黃色顏料所得者。即,酞菁系於300nm至400nm之間具有較大吸收,因黃色顏料系於具有相對高透過性之長波長區域(380nm-450nm)具有較大之吸收,故無法使光源產生之光線充分到達阻劑底部,而會造成硬化深度降低。 The photosensitive resin composition containing the lanthanide coloring agent (A-1) of the present invention The material can be imparted with high resolution to the conventional coloring photoresist, particularly the solder resist for printed wiring boards. The reason for this is that the conventionally used coloring agents are phthalocyanine-based pigments such as phthalocyanine green and phthalocyanine blue, and those obtained from ruthenium and Isoindoline-based yellow pigments. That is, the phthalocyanine system has a large absorption between 300 nm and 400 nm, and the yellow pigment has a large absorption in a long wavelength region (380 nm to 450 nm) having a relatively high permeability, so that the light generated by the light source cannot be sufficiently obtained. The bottom of the resist will cause a reduction in the depth of hardening.

又,苝系著色劑與上述著色劑相比較時,其紫外線區域之吸收較少,且具有充分之著色力,因而具有高解析力,故可提供抗焊阻劑等之阻劑材料兼具有必要之耐熱性、電氣絕緣性之感光性樹脂組成物。 Further, when the lanthanoid coloring agent is compared with the above coloring agent, it has less absorption in the ultraviolet ray region and has sufficient coloring power, and thus has high resolving power, so that a resist material such as a solder resist can be provided. A photosensitive resin composition which is required for heat resistance and electrical insulation.

本發明中,著色劑可使用慣用公知之物質,其可為顏料、染料、色素中任一者皆可,或將2種以上混合使用亦可。尚、本發明中,顏料係指色彩索引(C.I.;The Society of Dyers and Colourists公司發行)中,被分類為顏料(Pigment)之化合物,染料為被分類Solvent等(Solvent等)之化合物,或Lumogen(登錄商標)等之物質。 In the present invention, a conventionally known substance may be used as the coloring agent, and any one of a pigment, a dye, and a coloring agent may be used, or two or more types may be used in combination. In the present invention, the term "pigment" refers to a compound classified as a pigment in a color index (CI; issued by The Society of Dyers and Colourists), and the dye is a compound classified as Solvent et al. (Solvent et al.), or Lumogen. (registered trademark) and other substances.

苝系著色劑中,標示為綠色、黃色、橙色、紅色、紫色、黒色等之物質,例如下所示般,標記有色彩索引(C.I.;The Society of Dyers and Colourists公司發行)編號之物質。 Among the lanthanide coloring agents, those indicated as green, yellow, orange, red, purple, ochre, etc., are marked with a color index (C.I.; The Society of Dyers and Colourists, Inc.) numbered as shown below.

-綠色:Solvent Green 5 - Green: Solvent Green 5

-橙色:Solvent Orange 55 - Orange: Solvent Orange 55

-紅色:Solvent Red 135,179;Pigment Red 123,149,166,178,179,190,194,224; - red: Solvent Red 135, 179; Pigment Red 123, 149, 166, 178, 179, 190, 194, 224;

-紫色:Pigment Violet 29 - Purple: Pigment Violet 29

-黒色:Pigment Black 31,32 - Twilight: Pigment Black 31, 32

亦可使用上述以外之苝系著色劑,例如,已知不具有色彩索引編號之集光性螢光染料之BASF公司之Lumogen(登錄商標)F Yellow 083、Lumogen F Orange 240、Lumogen F Red305、Lumogen F Green850等,其與其他之苝系化合物相同般,於紫外線區域具有較少之吸收,且具有高著色力,故亦可配合使用。 It is also possible to use an anthraquinone-based coloring agent other than the above, for example, Lumogen (registered trademark) F Yellow 083, Lumogen F Orange 240, Lumogen F Red305, Lumogen of BASF Corporation, which is known to have a color indexing number. F Green 850, etc., which has the same absorption in the ultraviolet region as the other lanthanide compounds and has high coloring power, can also be used in combination.

苝系著色劑之添加率,於考慮著色性與紫外線吸收量時,以相對於後述(B)含羧酸之樹脂100質量份,較佳為使用0.01~5.0質量份,更佳為0.05~3.0質量份。 In the case of considering the coloring property and the ultraviolet ray absorption amount, the addition ratio of the oxime coloring agent is preferably 0.01 to 5.0 parts by mass, more preferably 0.05 to 3.0, based on 100 parts by mass of the carboxylic acid-containing resin described later. Parts by mass.

其中,作為苝系著色劑較佳者為Solvent Green 5、Solvent Orange 55、Solvent Red135、Solvent Red179、Lumogen(登錄商標)等之染料系,特佳為Solvent Green 5。顏料系以Pigment Black31為佳。 Among them, preferred as the lanthanoid coloring agent are Solvent Green 5, Solvent Orange 55, Solvent Red 135, Solvent Red 179, Lumogen (registered trademark), and the like, and particularly preferred is Solvent Green 5. The pigment is preferably Pigment Black31.

於不阻礙本發明之目的範圍內,苝系以外之其他之著色劑(顏料、染料、色素中任一者皆可)可含有所需要之份量,該些著色劑例如以下之例示。其中又以酞菁系著色劑(A-2)與苝系著色劑(A-1)之混合為佳。 In the range which does not inhibit the object of the present invention, other coloring agents (any one of a pigment, a dye, and a coloring matter) other than the lanthanide may be contained in a desired amount, and the coloring agents are exemplified below. Among them, a mixture of a phthalocyanine coloring agent (A-2) and an anthraquinone coloring agent (A-1) is preferred.

(1)藍色著色劑 (1) Blue colorant

藍色著色劑例如有酞菁系、蒽醌系著色劑,顏料系中為分類為顏料(Pigment)之化合物,具體而言,例如下述內容般,附有色彩索引(C.I.;The Society of Dyers and Colourists公司發行)編號之化合物等。 The blue coloring agent is, for example, a phthalocyanine-based or an anthraquinone-based coloring agent, and a pigment is classified into a pigment (Pigment), and specifically, for example, a color index (CI; The Society of Dyers) And Colourists issued a number of compounds, etc.

Pigment Blue 15、Pigment Blue 15:1、Pigment Blue 15:2、Pigment Blue 15:3、Pigment Blue 15:4、Pigment Blue 15:6、Pigment Blue 16、Pigment Blue 60。 Pigment Blue 15, Pigment Blue 15:1, Pigment Blue 15:2, Pigment Blue 15:3, Pigment Blue 15:4, Pigment Blue 15:6, Pigment Blue 16, Pigment Blue 60.

染料系例如可使用 Dye systems can be used, for example

Solvent Blue 35、Solvent Blue 45、Solvent Blue 63、Solvent Blue 68、Solvent Blue 70、Solvent Blue 83、Solvent Blue 87、Solvent Blue 94、Solvent Blue 97、Solvent Blue 101、Solvent Blue 104、Solvent Blue 122、Solvent Blue 136、Solvent Blue 67、Solvent Blue 70等。上述以外亦可使用被金屬取代或無取代之酞菁系著色劑。 Solvent Blue 35, Solvent Blue 45, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 101, Solvent Blue 104, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70, etc. A phthalocyanine coloring agent substituted with or without a metal may be used in addition to the above.

(2)綠色著色劑 (2) Green colorant

綠色著色劑,同樣的具有酞菁系、蒽醌系,具體而言,其可使用Pigment Green 7、Pigment Green 36、Solvent Green 3、Solvent Green 20、Solvent Green 28等。上述以外,亦可使用金屬取代或無取代之酞菁系著色劑。 The green coloring agent has the same phthalocyanine system or lanthanide system. Specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 20, Solvent Green 28, or the like can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine-based coloring agent can also be used.

(3)黃色著色劑 (3) yellow colorant

黃色著色劑具有蒽醌系、異吲哚啉酮系、縮合偶氮系、苯併咪唑酮(Benzimidazolone)系、單偶氮系、雙偶氮系等,其具體之例示係如以下所列舉之內容。 The yellow coloring agent has an anthraquinone, an isoindolinone type, a condensed azo type, a benzimidazolone type, a monoazo type, a bisazo type, etc., and a specific example is as follows. content.

(蒽醌系) (蒽醌系)

Solvent Yellow 163、Pigment Yellow 24、Pigment Yellow 108、Pigment Yellow 193、Pigment Yellow 147、Pigment Yellow 199、Pigment Yellow 202; Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202;

(異吲哚啉酮系) (isoguanolinone)

Pigment Yellow 110、Pigment Yellow 109、Pigment Yellow 139、Pigment Yellow 179、Pigment Yellow 185; Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185;

(縮合偶氮系) (condensed azo)

Pigment Yellow 93、Pigment Yellow 94、Pigment Yellow 95、Pigment Yellow 128、Pigment Yellow 155、Pigment Yellow 166、Pigment Yellow 180; Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180;

(苯併咪唑酮系) (benzimidazolone)

Pigment Yellow 120、Pigment Yellow 151、Pigment Yellow 154、Pigment Yellow 156、Pigment Yellow 175、Pigment Yellow 181; Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181;

(單偶氮系) (monoazo)

Pigment Yellow1,2,3,4,5,6,9,10,12,61,62,62:1,65,73,74,75,97,100,104,105,111,116,167,168,169,182,183; Pigment Yellow1,2,3,4,5,6,9,10,12,61,62,62:1,65,73,74,75,97,100,104,105,111,116,167,168,169,182,183;

(雙偶氮系) (double azo)

Pigment Yellow12,13,14,16,17,55,63,81,83,87,126,127,152,170,172,174,176,188,198。 Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.

(4)紅色著色劑 (4) Red colorant

紅色著色劑,例如單偶氮系、雙偶氮系、單偶氮色澱系、苯併咪唑酮系、二酮吡咯併吡咯系、縮合偶氮系、蒽醌系、喹吖酮系等,具體而言,例如以下所例示之內容。 The red coloring agent is, for example, a monoazo type, a bisazo type, a monoazo lake type, a benzimidazolone type, a diketopyrrolopyrrole type, a condensed azo type, an anthraquinone type, a quinophthalone type, etc. Specifically, for example, the contents exemplified below.

(單偶氮系) (monoazo)

Pigment Red 1,2,3,4,5,6,8,9,12,14,15,16,17,21,22,23,31,32,112,114,146,147,151,170,184,187,188,193,210,245,253,258,266,267,268,269; Pigment Red 1,2,3,4,5,6,8,9,12,14,15,16,17,21,22,23,31,32,112,114,146,147,151,170,184,187,188,193,210,245,253,258,266,267,268,269;

(雙偶氮系) (double azo)

Pigment Red 37,38,41; Pigment Red 37,38,41;

(單偶氮色澱系) (single azo lake system)

Pigment Red 48:1,48:2,48:3,48:4,49:1,49:2,50:1,52:1,52:2,53:1,53:2,57:1,58:4,63:1,63:2,64:1,68; Pigment Red 48:1,48:2,48:3,48:4,49:1,49:2,50:1,52:1,52:2,53:1,53:2,57:1, 58:4, 63:1, 63:2, 64:1, 68;

(苯併咪唑酮系) (benzimidazolone)

Pigment Red 171、Pigment Red 175、Pigment Red 176、Pigment Red 185、Pigment Red 208; Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208;

(二酮吡咯併吡咯系) (diketopyrrolopyrrole)

Pigment Red 254、Pigment Red 255、Pigment Red 264、Pigment Red 270、Pigment Red 272; Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272;

(縮合偶氮系) (condensed azo)

Pigment Red 220、Pigment Red 144、Pigment Red 166、Pigment Red 214、Pigment Red 220、Pigment Red 221、Pigment Red 242; Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221, Pigment Red 242;

(蒽醌系) (蒽醌系)

Pigment Red 168、Pigment Red 177、Pigment Red 216、Solvent Red 149、Solvent Red 150、Solvent Red 52、Solvent Red 207; Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207;

(喹吖酮系) (quinacridone)

Pigment Red 122、Pigment Red 202、Pigment Red 206、Pigment Red 207、Pigment Red 209。 Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.

就調整其他色調為目的時,可添加紫、橙、褐色、黒等之著色劑。 For the purpose of adjusting other color tones, a coloring agent such as purple, orange, brown, or enamel may be added.

具體之例示如,Pigment Violet 19、23、32、36、38、42、Solvent Violet 13、36、C.I.顏料橙1、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙14、C.I.顏料橙16、C.I.顏料橙17、C.I.顏料橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙40、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙49、C.I.顏料橙51、C.I.顏料橙61、C.I.顏料橙63、C.I.顏料橙64、C.I.顏料橙71、C.I.顏料橙73、C.I.顏料褐23、C.I.顏料褐25;C.I.顏料黑1、C.I.顏料黑7等。 Specific examples are, for example, Pigment Violet 19, 23, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25; CI Pigment Black 1, CI Pigment Black 7, and the like.

本發明中,著色劑之添加率,可配合所得之感光性樹脂組成物或其硬化被膜所形成之抗焊阻劑層所需要之色調,具體而言,需添加至可呈現的綠色或橙色之充分比例。 In the present invention, the addition ratio of the coloring agent may be added to the color tone required for the resistive resist layer formed by the obtained photosensitive resin composition or the cured film thereof, and specifically, it may be added to the green or orange color which can be exhibited. Full proportion.

本發明中,感光性樹脂組成物或其硬化被膜所呈現之綠色與橙色,係指由觀察者經由肉眼觀察時,具有可被辨識出綠色與橙色程度之色調之意。具體而言,係指經由JISZ8721規定之方法測定、顯示該感光性樹脂組成物與其硬化被膜之外觀色調時,屬於孟塞爾色相環(Munsell color hue ring)色相環(財團法人 日本色彩研究所監修新基本色表系列2孟塞爾系統 日本色研事業股份有限公司發行;參考圖1)上,10Y至10BG(綠色)、10R至10YR(橙色)之色相範圍,更佳為彩度為2以上、未達16,亮度為2以上、未達9,更佳為彩度為3以上、未達15,亮度為3以上、未達9未滿之綠色系、橙色系等可呈 現彩色之內容。 In the present invention, the green and orange colors exhibited by the photosensitive resin composition or the cured film thereof mean that the color of the green and orange colors can be recognized by the observer when observed by the naked eye. Specifically, it is a Munsell color hue ring hue ring which is measured and displayed by the method specified in JIS Z8721 and shows the appearance color tone of the photosensitive resin composition and the cured film thereof. New basic color table series 2 Munsell system Japan Color Research Co., Ltd. issued; refer to Figure 1), 10Y to 10BG (green), 10R to 10YR (orange) hue range, more preferably chroma 2 or more , not up to 16, the brightness is 2 or more, less than 9, more preferably the chroma is 3 or more, less than 15, the brightness is 3 or more, less than 9 is less than the green, orange, etc. The color of the content.

苝系著色劑(A-1)與其他之著色劑之添加比例,因受到所使用之著色劑的種類或其他之添加劑等的種類所影響,故無法統一規範,但可予以適當設定,例如,與酞菁系著色劑(A-2)之添加比,就質量比而言,以苝系著色劑(A-1):酞菁系著色劑(A-2)=1:0~1:20之比例添加為佳。 The addition ratio of the quinone-based coloring agent (A-1) to other coloring agents is affected by the type of the coloring agent to be used or the type of other additives, and thus cannot be uniformly standardized, but can be appropriately set, for example, In comparison with the addition ratio of the phthalocyanine coloring agent (A-2), the oxime coloring agent (A-1): phthalocyanine coloring agent (A-2) = 1:0 to 1:20 in terms of mass ratio The ratio is added as well.

其次,將對本發明之感光性樹脂組成物之著色劑以外的各構成成份進行詳細說明。 Next, each constituent component other than the coloring agent of the photosensitive resin composition of the present invention will be described in detail.

本發明之感光性樹脂組成物可使用如下述內容般之材料。 As the photosensitive resin composition of the present invention, a material as described below can be used.

(B)含羧酸之樹脂 (B) carboxylic acid-containing resin

本發明之組成物中,就賦予鹼顯影性等目的時,可使用分子中具有羧基之含羧酸之樹脂(B),其可使用以往公知之各種樹脂化合物。特別是,分子中具有乙烯性不飽和雙鍵之含羧酸感光性樹脂(B’),就光硬化性或耐顯影性等觀點而言為更佳。又,該不飽和雙鍵以由丙烯酸或甲基丙烯酸或其衍生物所產生者為佳。 In the composition of the present invention, when a purpose such as alkali developability is imparted, a carboxylic acid-containing resin (B) having a carboxyl group in a molecule can be used, and various conventionally known resin compounds can be used. In particular, the carboxylic acid-containing photosensitive resin (B') having an ethylenically unsaturated double bond in the molecule is more preferable from the viewpoints of photocurability and development resistance. Further, the unsaturated double bond is preferably produced from acrylic acid or methacrylic acid or a derivative thereof.

含羧酸之樹脂(B)之具體例,以以下所列舉之化合物為佳。 Specific examples of the carboxylic acid-containing resin (B) are preferably the compounds listed below.

(1)(甲基)丙烯酸與含不飽和基之物經共聚合所得之含羧酸之樹脂。 (1) A carboxylic acid-containing resin obtained by copolymerizing (meth)acrylic acid with an unsaturated group-containing material.

(2)二異氰酸酯與含羧酸之二醇(dialcohol)化合 物及二醇(diol)化合物之聚加成反應所得之含羧酸脂胺基甲酸酯樹脂。 (2) combination of diisocyanate and dialohol containing carboxylic acid A carboxylic acid ester-containing urethane resin obtained by a polyaddition reaction of a compound and a diol compound.

(3)二異氰酸酯與2官能環氧(甲基)丙烯酸酯或其部份酸酐改質物及含羧酸之二醇化合物及二醇化合物之聚加成反應所得之感光性含羧酸之胺基甲酸酯樹脂。 (3) Photosensitive carboxylic acid-containing amine group obtained by polyaddition reaction of a diisocyanate with a bifunctional epoxy (meth) acrylate or a partial acid anhydride modified product thereof, a carboxylic acid-containing diol compound and a diol compound Formate resin.

(4)前述(2)或(3)之樹脂的合成中,於分子內加入1個之羥基與1個以上之具有(甲基)丙烯酸基之化合物所得之末端(甲基)丙烯酸化之含羧酸之胺基甲酸酯樹脂。 (4) In the synthesis of the resin of the above (2) or (3), a terminal (meth)acrylated product obtained by adding one hydroxyl group to one or more compounds having a (meth)acryl group in the molecule A carboxylic acid urethane resin.

(5)前述(2)或(3)之樹脂的合成中,於分子內加入1個之異氰酸酯基與1個以上之具有(甲基)丙烯酸基之化合物所得之末端(甲基)丙烯酸化之含羧酸之胺基甲酸酯樹脂。 (5) In the synthesis of the resin of the above (2) or (3), a terminal (meth)acrylated product obtained by adding one isocyanate group to one or more compounds having a (meth)acryl group in the molecule A carboxylic acid-containing urethane resin.

(6)2官能與多官能(固形)環氧樹脂與(甲基)丙烯酸反應,於側鏈所存在之羥基附加二質子酸酐所得感光性含羧酸之樹脂。 (6) A photosensitive carboxylic acid-containing resin obtained by reacting a bifunctional and polyfunctional (solid) epoxy resin with (meth)acrylic acid and adding a diproton anhydride to a hydroxyl group present in a side chain.

(7)2官能(固形)環氧樹脂之羥基再經表氯醇(epichlorohydrin)環氧化所得之多官能環氧樹脂再與(甲基)丙烯酸反應,所生成之羥基再加成二質子酸酐所得之感光性含羧酸之樹脂。 (7) The polyfunctional epoxy resin obtained by epoxidation of the hydroxyl group of the bifunctional (solid) epoxy resin with epichlorohydrin is further reacted with (meth)acrylic acid, and the resulting hydroxyl group is further added to the diproton anhydride. Photosensitive carboxylic acid containing resin.

(8)2官能環氧丙烷樹脂與二羧酸反應,所生成之1級之羥基再加成二元酸酐所得之含羧酸之聚酯樹脂。 (8) A carboxylic acid-containing polyester resin obtained by reacting a bifunctional propylene oxide resin with a dicarboxylic acid to form a hydroxy group of a first-stage hydroxy group.

(9)上述樹脂再加成1分子內具有1個之環氧基與1個以上之(甲基)丙烯酸基之化合物所得之感光性含羧 酸之樹脂。 (9) The photosensitive resin-containing carboxy group obtained by further adding the above-mentioned resin to a compound having one epoxy group and one or more (meth)acrylic groups in one molecule Acid resin.

又,本說明書中,(甲基)丙烯酸酯係為丙烯酸酯、甲基丙烯酸酯及該些混合物之統稱用語,其他之類似表現亦為相同之內容。 Further, in the present specification, the (meth) acrylate is an acryl, a methacrylate, and a collective term for these mixtures, and other similar expressions are also the same.

上述含羧酸之樹脂(B),因於骨架‧聚合物之側鏈上具有多數游離之羧基,故可經由稀鹼水溶液顯影。 The carboxylic acid-containing resin (B) can be developed via a dilute aqueous alkali solution because the skeleton ‧ polymer has a plurality of free carboxyl groups in its side chain.

又,上述含羧酸之樹脂(B)之酸價以40~200mgKOH/g之範圍為佳,更佳為45~120mgKOH/g之範圍。含羧酸之樹脂的酸價未達40mgKOH/g時,則造成鹼顯影之困難性,又,超過200mgKOH/g時,因顯影液會促進曝光部之溶解,故超過必要以上之線路狹窄化,或可能會造成無法區別曝光部與未曝光部而同時被顯影液溶解剝離,無法形成正常之阻劑圖型之描繪等,而為不佳。 Further, the acid value of the carboxylic acid-containing resin (B) is preferably in the range of 40 to 200 mgKOH/g, more preferably 45 to 120 mgKOH/g. When the acid value of the carboxylic acid-containing resin is less than 40 mgKOH/g, it is difficult to develop the alkali, and when it exceeds 200 mgKOH/g, since the developer promotes dissolution of the exposed portion, the line exceeding the necessity is narrowed. There is a possibility that the exposed portion and the unexposed portion cannot be distinguished and the developer is dissolved and peeled off at the same time, and the formation of a normal resist pattern cannot be formed, which is not preferable.

又,上述含羧酸之樹脂(B)之重量平均分子量,依樹脂骨架而有所不同,一般為約2,000~150,000,更佳為5,000~100,000之範圍為佳。重量平均分子量未達2,000時,因去黏著(tackfree)性能劣化,故會造成曝光後之塗膜的耐濕性惡化,顯影時產生膜削減,解析度大幅劣化等情形。又,重量平均分子量超過150,000時,造成顯影性顯著惡化,貯藏安定性劣化等情形。 Further, the weight average molecular weight of the carboxylic acid-containing resin (B) varies depending on the resin skeleton, and is usually about 2,000 to 150,000, more preferably 5,000 to 100,000. When the weight average molecular weight is less than 2,000, the tackfree performance is deteriorated, so that the moisture resistance of the coating film after exposure is deteriorated, the film is reduced during development, and the resolution is largely deteriorated. Moreover, when the weight average molecular weight exceeds 150,000, the developability is remarkably deteriorated, and the storage stability is deteriorated.

該些含羧酸之樹脂(B)之添加率,於全組成物中,較佳為20~60質量%,更佳為30~50質量%。少於上述範圍之情形,因塗膜強度會有降低情形而為不佳。又,多於上述範圍時,因黏性過高,故會有塗佈性等降低之情 形,而為不佳。 The addition ratio of the carboxylic acid-containing resin (B) is preferably from 20 to 60% by mass, more preferably from 30 to 50% by mass, based on the total composition. When it is less than the above range, it is not preferable because the film strength is lowered. Moreover, when it is more than the above range, since the viscosity is too high, the coating property may be lowered. Shape, but not good.

該些含羧酸之樹脂並不限於上述用途皆可使用,其可使用1種或將多數混合使用亦可。 These carboxylic acid-containing resins are not limited to the above-mentioned uses, and they may be used alone or in combination of a plurality of them.

(C)光聚合引發劑 (C) Photopolymerization initiator

本發明之感光性樹脂組成物,為含有光聚合引發劑(C)所得者。 The photosensitive resin composition of the present invention is obtained by containing a photopolymerization initiator (C).

光聚合引發劑(C),以使用由肟酯系光聚合引發劑、α-胺基乙醯苯系光聚合引發劑,及醯基膦氧化物系光聚合引發劑所成群中所選出之1種以上之光聚合引發劑為佳。 The photopolymerization initiator (C) is selected from the group consisting of an oxime ester photopolymerization initiator, an α-aminoethylbenzene photopolymerization initiator, and a mercaptophosphine oxide photopolymerization initiator. One or more kinds of photopolymerization initiators are preferred.

肟酯系光聚合引發劑,就市售品例如汽巴‧特用化學公司製之CGI-325、IRGACURE OXE01、IRGACURE OXE02等,ADEKA公司製N-1919等。該些肟酯系光聚合引發劑,可單獨或將2種以上組合使用皆可。 The oxime ester photopolymerization initiator is commercially available, for example, CGI-325, IRGACURE OXE01, IRGACURE OXE02 manufactured by Ciba Specialty Chemicals Co., Ltd., N-1919 manufactured by ADEKA Co., Ltd., and the like. These oxime ester-based photopolymerization initiators may be used alone or in combination of two or more.

α-胺基乙醯苯系光聚合引發劑例如,2-甲基-1-〔4-(甲基硫)苯基〕-2-嗎啉代丙酮-1、2-苄基-2-二甲基胺基-1-(4-嗎啉代苯基)-丁烷-1-酮、2-(二甲基胺基)-2-〔(4-甲基苯基)甲基〕-1-〔4-(4-嗎啉基)苯基〕-1-丁酮、N,N-二甲基胺基乙醯苯等。市售品例如汽巴‧特用化學公司製之IRGACURE907、IRGACURE369、IRGACURE379等。 α-Aminoethyl benzene-based photopolymerization initiator, for example, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinoacetone-1, 2-benzyl-2-di Methylamino-1-(4-morpholinophenyl)-butan-1-one, 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1 -[4-(4-morpholinyl)phenyl]-1-butanone, N,N-dimethylaminoethyl benzene, and the like. Commercially available products include IRGACURE 907, IRGACURE 369, IRGACURE 379, etc., manufactured by Ciba Specialty Chemicals.

醯基膦氧化物系光聚合引發劑,例如2,4,6-三甲基苯醯二苯基膦氧化物、雙(2,4,6-三甲基苯醯)-苯基膦氧化 物、雙(2,6-二甲氧基苯醯)-2,4,4-三甲基-戊基膦氧化物等。市售品例如BASF公司製之RUSIRIN TPO(商品名)、汽巴‧特用化學公司製之IRGACURE819等。 Mercaptophosphine oxide photopolymerization initiator, for example, 2,4,6-trimethylphenylhydrazine diphenylphosphine oxide, bis(2,4,6-trimethylphenylhydrazine)-phenylphosphine oxide , bis(2,6-dimethoxybenzoquinone)-2,4,4-trimethyl-pentylphosphine oxide, and the like. Commercially available products are, for example, RUSIRIN TPO (trade name) manufactured by BASF Corporation, IRGACURE 819 manufactured by Ciba Specialty Chemicals Co., Ltd., and the like.

該些光聚合引發劑(C)之添加率,相對於前述含羧酸之樹脂(B)100質量份,較佳為0.01~30質量份,更佳為0.5~15質量份之範圍。未達0.01質量份時,於銅上之光硬化性不足,會造成塗膜剝離,耐藥品性等塗膜特性降低等,而為不佳。又,超過30質量份時,將因光聚合引發劑(C)之抗焊阻劑塗膜表面具有劇烈之光吸收,故會有深部硬化性降低之傾向,而為不佳。 The addition ratio of the photopolymerization initiator (C) is preferably 0.01 to 30 parts by mass, more preferably 0.5 to 15 parts by mass, per 100 parts by mass of the carboxylic acid-containing resin (B). When the amount is less than 0.01 parts by mass, the photocurability on copper is insufficient, and the coating film is peeled off, and the coating properties such as chemical resistance are deteriorated, which is not preferable. When the amount is more than 30 parts by mass, the surface of the anti-solder resist coating film of the photopolymerization initiator (C) has a strong light absorption, so that the deep hardenability tends to be lowered, which is not preferable.

又,肟酯系光聚合引發劑之情形,其添加率,相對於前述含羧酸之樹脂(B)100質量份,較佳為0.01~20質量份,更佳為0.01~5質量份之範圍為佳。 In addition, in the case of the oxime ester-based photopolymerization initiator, the addition ratio is preferably 0.01 to 20 parts by mass, more preferably 0.01 to 5 parts by mass, per 100 parts by mass of the carboxylic acid-containing resin (B). It is better.

又本發明之感光性樹脂組成物中,可使用上述化合物以外之光聚合引發劑,或光引發輔劑及增感劑,例如,苯偶因化合物、乙醯苯化合物、蒽醌化合物、噻噸酮(thioxanthone)化合物、縮酮化合物、二苯甲酮化合物、呫噸酮(thioxanthone)化合物、與3級胺化合物等。 Further, in the photosensitive resin composition of the present invention, a photopolymerization initiator other than the above compounds, or a photoinitiator auxiliary agent and a sensitizer, for example, a benzoin compound, an acetophenone compound, an anthraquinone compound, and a thioxantane can be used. A thioxanthone compound, a ketal compound, a benzophenone compound, a thioxanthone compound, a tertiary amine compound, and the like.

苯偶因化合物之具體例,例如,苯偶因、苯偶因甲基醚、苯偶因乙基醚、苯偶因異丙基醚。 Specific examples of the benzoin compound are, for example, benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.

乙醯苯化合物之具體例,例如,乙醯苯、2,2-二甲氧基-2-苯基乙醯苯、2,2-二乙氧基-2-苯基乙醯苯、1,1-二氯基乙醯苯。 Specific examples of the acetophenone compound, for example, acetophenone, 2,2-dimethoxy-2-phenylethyl benzene, 2,2-diethoxy-2-phenyl acetophenone, 1, 1-Dichloroethyl benzene benzene.

蒽醌化合物之具體例,例如,2-甲基蒽醌、2-乙基蒽醌、2-t-丁基蒽醌、1-氯基蒽醌。 Specific examples of the hydrazine compound include, for example, 2-methylhydrazine, 2-ethylhydrazine, 2-t-butylhydrazine, and 1-chlorohydrazine.

噻噸酮化合物之具體例,例如,2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯基噻噸酮、2,4-二異丙基噻噸酮。 Specific examples of the thioxanthone compound, for example, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthene ketone.

縮酮化合物之具體例,例如,乙醯苯二甲基縮酮、苄基二甲基縮酮。 Specific examples of the ketal compound are, for example, acetophenone ketal and benzyl dimethyl ketal.

二苯甲酮化合物之具體例,例如,二苯甲酮、4-苯醯二苯基硫醚、4-苯醯-4’-甲基二苯基硫醚、4-苯醯-4’-乙基二苯基硫醚、4-苯醯-4’-丙基二苯基硫醚。 Specific examples of the benzophenone compound, for example, benzophenone, 4-phenylindole diphenyl sulfide, 4-benzoquinone-4'-methyldiphenyl sulfide, 4-benzoquinone-4'- Ethyl diphenyl sulfide, 4-phenylhydrazine-4'-propyl diphenyl sulfide.

3級胺化合物之具體例,例如,乙醇胺化合物、具有二烷基胺基苯構造之化合物、例如,4,4’-二甲基胺基二苯甲酮(日本曹達公司製NISOKIYUA MABP(商品名))、4,4’-二乙基胺基二苯甲酮(保土之谷化學公司製EAB)等之二烷基胺基二苯甲酮、7-(二乙基胺基)-4-甲基-2H-1-苯併吡喃-2-酮(7-(二乙基胺基)-4-甲基薰草素)等之含有二烷基胺基之薰草素化合物、4-二甲基胺基安息香酸乙酯(日本化藥公司製KAYAKIYU EPA)、2-二甲基胺基安息香酸乙酯(國際微生物科技公司製Quantacure DMB)、4-二甲基胺基安息香酸(n-丁氧基)乙基(國際微生物科技公司製Quantacure BEA)、p-二甲基胺基安息香酸異戊乙基酯(日本化藥公司製KAYAKIYU DMBI)、4-二甲基胺基安息香酸2-乙基己酯(Van Dyk公司製Esolol 507)、4,4’-二乙基胺基二苯甲 酮(保土之谷化學公司製EAB)。 Specific examples of the tertiary amine compound, for example, an ethanolamine compound, a compound having a dialkylaminobenzene structure, for example, 4,4'-dimethylaminobenzophenone (NISOKIYUA MABP, manufactured by Nippon Soda Co., Ltd.) )), 4,4'-diethylaminobenzophenone (EAB, manufactured by Hodogaya Chemical Co., Ltd.), etc., dialkylaminobenzophenone, 7-(diethylamino)-4 a 2-alkylamino group-containing oxalicin compound such as methyl-2H-1-benzopyran-2-one (7-(diethylamino)-4-methylloxacin), 4 -Ethyl dimethylamino benzoate (KAYAKIYU EPA, manufactured by Nippon Kayaku Co., Ltd.), 2-dimethylamino benzoic acid ethyl ester (Quantacure DMB, manufactured by International Microbiological Technology Co., Ltd.), 4-dimethylamino benzoic acid (n-butoxy)ethyl (Quantacure BEA, manufactured by International Microbiological Technology Co., Ltd.), p-dimethylamino benzoic acid isoamyl ethyl ester (KAYAKIYU DMBI, manufactured by Nippon Kayaku Co., Ltd.), 4-dimethylamino group 2-ethylhexyl benzoate (Esolol 507, manufactured by Van Dyk), 4,4'-diethylaminobiphenyl Ketone (EAB made by Baotu Valley Chemical Co., Ltd.).

上述內容之中,以使用噻噸酮化合物與3級胺化合物為佳。含有噻噸酮化合物時,就深部硬化性等觀點而言為較佳,其中又以2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯基噻噸酮、2,4-二異丙基噻噸酮等之噻噸酮化合物為佳。 Among the above, it is preferred to use a thioxanthone compound and a tertiary amine compound. When the thioxanthone compound is contained, it is preferable from the viewpoint of deep hardenability and the like, among which 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthene A thioxanthone compound such as a ketone or a 2,4-diisopropylthioxanthone is preferred.

該些噻噸酮化合物之添加率,相對於上述含羧酸之樹脂(B)100質量份,較佳為20質量份以下,更佳為10質量份以下。噻噸酮化合物之添加率過多時,會造成厚膜硬化性降低,其因會造成成本升高,故亦為不佳。 The addition ratio of the thioxanthone compound is preferably 20 parts by mass or less, and more preferably 10 parts by mass or less based on 100 parts by mass of the carboxylic acid-containing resin (B). When the addition ratio of the thioxanthone compound is too large, the thick film hardenability is lowered, which is also disadvantageous because it causes an increase in cost.

3級胺化合物,以具有二烷基胺基苯構造之化合物為佳,其中又以,二烷基胺基二苯甲酮化合物,最大吸收波長為350~410nm之含有二烷基胺基之薰草素化合物為最佳。二烷基胺基二苯甲酮化合物,例如4,4’-二乙基胺基二苯甲酮以其毒性亦較低,而為較佳。最大吸收波長為350~410nm之含有二烷基胺基之薰草素化合物,因其最大吸收波長為紫外線區域,故其著色較少,而形成具有無色透明之感光性組成物,其於使用著色劑時,可反應著色劑本體之顏色,而可提供著色抗焊阻劑膜。特別是,7-(二乙基胺基)-4-甲基-2H-1-苯併吡喃-2-酮相對於波長400~410nm之雷射光顯示出優良之增感效果而為較佳。 a tertiary amine compound, preferably a compound having a dialkylaminobenzene structure, wherein a dialkylaminobenzophenone compound having a maximum absorption wavelength of 350 to 410 nm contains a dialkylamine group The oxalin compound is optimal. The dialkylaminobenzophenone compound, for example, 4,4'-diethylaminobenzophenone, is preferred because it is also less toxic. The herbicidal compound containing a dialkylamine group having a maximum absorption wavelength of 350 to 410 nm has a color absorption of less color, and forms a photosensitive composition having colorless transparency, which is colored for use. In the case of the agent, the color of the body of the colorant can be reacted, and a colored solder resist film can be provided. In particular, 7-(diethylamino)-4-methyl-2H-1-benzopyran-2-one exhibits an excellent sensitizing effect with respect to laser light having a wavelength of 400 to 410 nm. .

該些3級胺化合物之添加率,相對於前述含羧酸之樹脂(B)100質量份,較佳為0.1~20質量份,更佳為0.1~10質量份之比例。3級胺化合物之添加率未達0.1質量 份時,會有未能得到充分之增感效果的傾向。超過20質量份時,將因3級胺化合物而會於乾燥抗焊阻劑塗膜之表面形成劇烈之光吸收,而會有深部硬化性降低之傾向。 The addition ratio of the third-grade amine compound is preferably 0.1 to 20 parts by mass, more preferably 0.1 to 10 parts by mass, per 100 parts by mass of the carboxylic acid-containing resin (B). The addition rate of the tertiary amine compound is less than 0.1 mass. In the case of a portion, there is a tendency that a sufficient sensitizing effect is not obtained. When the amount is more than 20 parts by mass, a strong light absorption is formed on the surface of the dry solder resist coating film due to the tertiary amine compound, and the deep hardenability tends to be lowered.

該些光聚合引發劑、光引發輔劑與增感劑,可單獨使用或使用2種類以上之混合物。 These photopolymerization initiators, photoinitiator adjuvants, and sensitizers may be used singly or in combination of two or more types.

(D)分子中具有2個以上之乙烯性不飽和基之化合物 (D) a compound having two or more ethylenically unsaturated groups in the molecule

本發明之感光性樹脂組成物,為含有分子中具有2個以上之乙烯性不飽和基之化合物(D)所得者。 The photosensitive resin composition of the present invention is obtained by containing the compound (D) having two or more ethylenically unsaturated groups in the molecule.

分子中具有2個以上之乙烯性不飽和基之化合物(D)為,經由活性能量線照射結果,形成光硬化,可幫助前述含羧酸之樹脂(B)形成對鹼水溶液不溶化,或不溶化之化合物。該些化合物,例如乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等之甘醇的二丙烯酸酯類;己烷二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、三-羥基乙基三聚異氰酸酯等多元醇或該些之乙烯氧化物加成物或丙烯氧化物加成物等多元丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯,及該些之酚類的乙烯氧化物加成物或丙烯氧化物加成物等之多元丙烯酸酯類;丙三醇二縮水甘油醚、丙三醇三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油三聚異氰酸酯等之縮水甘油醚等多元丙烯酸酯類;及三聚氰胺丙烯酸酯,及/或對應於上述丙烯酸酯之各甲基丙烯酸酯類等。 The compound (D) having two or more ethylenically unsaturated groups in the molecule is photohardened by irradiation with an active energy ray to help the formation of the carboxylic acid-containing resin (B) insolubilize or insolubilize the aqueous alkali solution. Compound. Such compounds, such as diacrylates of glycols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, propylene glycol, etc.; hexane diol, trimethylolpropane, pentaerythritol, dipentaerythritol, three a polyhydric alcohol such as a hydroxyethyl tripolyisocyanate or a polyvalent acrylate such as an ethylene oxide adduct or a propylene oxide adduct; a phenoxy acrylate, a bisphenol A diacrylate, and the like Polyol acrylates such as phenolic ethylene oxide adducts or propylene oxide adducts; glycerol diglycidyl ether, glycerol triglycidyl ether, trimethylolpropane triglycidyl ether, three a polyvalent acrylate such as glycidyl ether such as glycidyl tripolyisocyanate; and melamine acrylate; and/or each methacrylate corresponding to the above acrylate.

此外,例如甲酚酚醛清漆型環氧樹脂等之多官能環氧 樹脂,與丙烯酸反應所得之環氧丙烯酸酯樹脂,或,再於該些環氧丙烯酸酯樹脂之羥基上,與季戊四醇三丙烯酸酯等之羥基丙烯酸酯與異佛爾酮二異氰酸酯等之二異氰酸酯之半胺基甲酸酯化合物反應所得之環氧胺基甲酸酯丙烯酸酯化合物等。該些環氧丙烯酸酯系樹脂,不會造成指觸乾燥性降低,而可提高光硬化性。 In addition, a polyfunctional epoxy such as a cresol novolak type epoxy resin a resin, an epoxy acrylate resin obtained by reacting with acrylic acid, or a hydroxyl group of the epoxy acrylate resin, a hydroxy acrylate such as pentaerythritol triacrylate or a diisocyanate such as isophorone diisocyanate. The epoxy urethane acrylate compound obtained by reacting a carbamide compound or the like. These epoxy acrylate-based resins can improve photocurability without causing a decrease in finger-drying property.

該些分子中具有2個以上之乙烯性不飽和基之化合物(D)的添加率,相對於前述(B)含羧酸之樹脂100質量份,較佳為5~100質量份,更佳為1~70質量份之比例。前述添加率未達5質量份時,其光硬化性會降低,且經由活性能量線照射後之鹼顯影,亦不容易形成圖型,而為不佳。又,超過100質量份時,因會降低對鹼水溶液之溶解性,而使塗膜脆化,故亦為不佳。 The addition ratio of the compound (D) having two or more ethylenically unsaturated groups in the above-mentioned molecules is preferably from 5 to 100 parts by mass, more preferably from 100 to 100 parts by mass, based on 100 parts by mass of the above-mentioned (B) carboxylic acid-containing resin. The ratio of 1 to 70 parts by mass. When the addition ratio is less than 5 parts by mass, the photocurability is lowered, and the alkali development after irradiation with the active energy ray is not easy to form a pattern, which is not preferable. On the other hand, when it exceeds 100 parts by mass, the solubility in the aqueous alkali solution is lowered, and the coating film is brittle, which is also undesirable.

(E)熱硬化性成份 (E) thermosetting ingredients

本發明之感光性樹脂組成物中,為賦予其耐熱性,可添加(E)熱硬化性成份。特佳者為分子中具有2個以上之環狀醚基及/或環狀硫醚基(以下,簡稱為環狀(硫)醚基)之熱硬化性成份(E)。 In the photosensitive resin composition of the present invention, (E) a thermosetting component can be added in order to impart heat resistance. Particularly preferred is a thermosetting component (E) having two or more cyclic ether groups and/or cyclic thioether groups (hereinafter, simply referred to as cyclic (thio)ether groups) in the molecule.

該些分子中具有2個以上之環狀(硫)醚基之熱硬化性成份(F),以分子中具有3、4或5員環之環狀醚基,或環狀硫醚基中任一者或具有2個以上2種類之基的化合物為佳,例如,分子內具有至少2個以上之環氧基的化合物,即,多官能環氧化合物(E-1),分子內至少具有2 個以上之環氧丙烷基之化合物,即,多官能環氧丙烷化合物(E-2)、分子內具有2個以上之環狀硫醚基之化合物,即,環氧硫化合物(episulfide)(E-3)等。 The thermosetting component (F) having two or more cyclic (thio)ether groups in the molecule, a cyclic ether group having a ring of 3, 4 or 5 members in the molecule, or a cyclic thioether group One or a compound having two or more kinds of two types of groups, for example, a compound having at least two or more epoxy groups in the molecule, that is, a polyfunctional epoxy compound (E-1) having at least 2 in the molecule More than one propylene oxide-based compound, that is, a polyfunctional propylene oxide compound (E-2), a compound having two or more cyclic thioether groups in the molecule, that is, an episulfide compound (E) -3) Wait.

前述多官能環氧化合物(E-1),例如,日本環氧樹脂公司製之Epikote828、Epikote834、Epikote1001、Epikote1004,大日本油墨化學工業公司製之Epiclon840、Epiclon850、Epiclon1050、Epiclon2055,東都化成公司製之EpotootoYD-011、YD-013、YD-127、YD-128,道化學公司製之D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、汽巴‧特用化學公司之Araldite6071、Araldite6084、AralditeGY250、AralditeGY260,住友化學工業公司製之斯密-環氧ESA-011、ESA-014、ELA-115、ELA-128,旭化成工業公司製之A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(皆為商品名)之雙酚A型環氧樹脂;日本環氧樹脂公司製之EpikoteYL903、大日本油墨化學工業公司製之Epiclon152、Epiclon165、東都化成公司製之EpotootoYDB-400、YDB-500、道化學公司製之D.E.R.542、汽巴‧特用化學公司製之Araldite8011、住友化學工業公司製之斯密-環氧ESB-400、ESB-700、旭化成工業公司製之A.E.R.711、A.E.R.714等(皆為商品名)之溴化環氧樹脂;日本環氧樹脂公司製之Epikote152、Epikote154、道化學公司製之D.E.N.431、D.E.N.438、大日本油墨化學工業公司製之EpiclonN-730、EpiclonN-770、EpiclonN-865、東都化成 公司製之EpotootoYDCN-701、YDCN-704、汽巴‧特用化學公司製之AralditeECN1235、AralditeECN1273、AralditeECN1299、AralditeXPY307、日本化藥公司製之EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306、住友化學工業公司製之斯密-環氧ESCN-195X、ESCN-220、旭化成工業公司製之A.E.R.ECN-235、ECN-299等(皆為商品名)之酚醛清漆型環氧樹脂;大日本油墨化學工業公司製之Epiclon830、日本環氧樹脂公司製Epikote807、東都化成公司製之EpotootoYDF-170、YDF-175、YDF-2004、汽巴‧特用化學公司製之AralditeXPY306等(皆為商品名)之雙酚F型環氧樹脂;東都化成公司製之EpotootoST-2004、ST-2007、ST-3000(商品名)等氫化雙酚A型環氧樹脂;日本環氧樹脂公司製之Epikote604、東都化成公司製之EpotootoYH-434、汽巴‧特用化學公司製之AralditeMY720、住友化學工業公司製之斯密-環氧ELM-120等(皆為商品名)之縮水甘油胺型環氧樹脂;汽巴‧特用化學公司製之AralditeCY-350(商品名)等之乙內醯脲(Hydantoin)型環氧樹脂;DAICEL化學工業公司製之Cerokisaito2021、汽巴‧特用化學公司製之AralditeCY175、CY179等(皆為商品名)之脂環式環氧樹脂;日本環氧樹脂公司製之YL-933、道化學公司製之T.E.N.、EPPN-501、EPPN-502等(皆為商品名)之三羥基苯基甲烷型環氧樹脂;日本環氧樹脂公司製之YL-6056、YX-4000、YL-6121(皆為商品名)等 之聯二甲苯醇(bixylenol)型或雙酚型環氧樹脂或該些混合物;日本化藥公司製EBPS-200、旭電化工業公司製EPX-30、大日本油墨化學工業公司製之EXA-1514(商品名)等之雙酚S型環氧樹脂;日本環氧樹脂公司製之Epikote157S(商品名)等之雙酚A酚醛清漆型環氧樹脂;日本環氧樹脂公司製之EpikoteYL-931、汽巴‧特用化學公司製之Araldite163等(皆為商品名)之四酚乙烷型環氧樹脂;汽巴‧特用化學公司製之AralditePT810、日產化學工業公司製之TEPIC等(皆為商品名)之雜環式環氧樹脂;日本油脂公司製Blemmer DGT等之二縮水甘油苯甲酸酯樹脂;東都化成公司製ZX-1063等之四縮水甘油二甲苯醯乙烷樹脂;新日鐵化學公司製ESN-190、ESN-360、大日本油墨化學工業公司製HP-4032、EXA-4750、EXA-4700等之含萘基之環氧樹脂;大日本油墨化學工業公司製HP-7200、HP-7200H等之具有二環戊二烯骨架之環氧樹脂;日本油脂公司製CP-50S、CP-50M等之縮水甘油甲基丙烯酸酯共聚合系環氧樹脂;此外,例如環己基馬來醯亞胺與縮水甘油甲基丙烯酸酯之共聚合環氧樹脂;環氧改質之聚丁二烯橡膠衍生物(例如DAICEL化學工業製PB-3600等)、CTBN改質環氧樹脂(例如東都化成公司製之YR-102、YR-450等)等,但並未限定於該些內容。該些環氧樹脂,可單獨或將2種以上組合使用。其中,特別是以酚醛清漆型環氧樹脂、雜環式環氧樹脂、雙酚A型環氧樹脂或其之混合物為佳。 The above-mentioned polyfunctional epoxy compound (E-1), for example, Epikote 828, Epikote 834, Epikote 1001, Epikote 1004 manufactured by Nippon Epoxy Co., Ltd., Epiclon 840, Epiclon 850, Epiclon 1050, and Epiclon 2055 manufactured by Dainippon Ink and Chemicals Co., Ltd., manufactured by Toho Chemical Co., Ltd. EpotootoYD-011, YD-013, YD-127, YD-128, DER317, DER331, DER661, DER664, made by Dow Chemical Company, Araldite 6071, Araldite6084, AralditeGY250, AralditeGY260, Sumitomo Chemical Industry Co., Ltd. - Epoxy ESA-011, ESA-014, ELA-115, ELA-128, AER330, AER331, AER661, AER664, etc. by Asahi Kasei Industrial Co., Ltd. (all are trade names) Bisphenol A type epoxy resin; Epikote YL903 manufactured by Japan Epoxy Resin Co., Ltd., Epiclon 152 manufactured by Dainippon Ink Chemical Industry Co., Ltd., Epiclon 165, Epotooto YDB-400 manufactured by Dongdu Chemical Co., Ltd., YDB-500, DER542 manufactured by Dow Chemical Co., Ltd. Araldite 8011 manufactured by Ciba Specialty Chemical Company, Smith-Epoxy ESB-400 manufactured by Sumitomo Chemical Industries Co., Ltd., ESB-700, AER711 manufactured by Asahi Kasei Industrial Co., Ltd. Brominated epoxy resin such as AER714 (both trade names); Epikote 152, Epikote 154 manufactured by Japan Epoxy Resin Co., Ltd., DEN431, DEN438 manufactured by Dow Chemical Co., Ltd., and Epiclon N-730 manufactured by Dainippon Ink Chemical Industry Co., Ltd. Epiclon N-770, Epiclon N-865, Dongdu Huacheng The company's Epotooto YDCN-701, YDCN-704, Ciba Specialty Chemicals' Araldite ECN1235, AralditeECN1273, AralditeECN1299, AralditeXPY307, Nippon Chemical Co., Ltd. EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, ST-Epoxy ESCN-195X manufactured by Sumitomo Chemical Industries Co., Ltd., ESCN-220, AERECN-235, ECN-299 manufactured by Asahi Kasei Kogyo Co., Ltd. (all are trade names), novolak-type epoxy resin Epiclon 830 manufactured by Dainippon Ink Chemical Industry Co., Ltd., Epikote 807 manufactured by Japan Epoxy Resin Co., Ltd., Epotooto YDF-170, YDF-175, YDF-2004 manufactured by Dongdu Chemical Co., Ltd., Araldite XPY306 manufactured by Ciba Specialty Chemicals Co., Ltd. Product name) bisphenol F type epoxy resin; hydrogenated bisphenol A type epoxy resin such as Epotooto ST-2004, ST-2007, ST-3000 (trade name) manufactured by Dongdu Chemical Co., Ltd.; Epikote 604 manufactured by Japan Epoxy Resin Co., Ltd. EpotootoYH-434 manufactured by Dongdu Chemical Co., Ltd., AralditeMY720 manufactured by Ciba Specialty Chemicals Co., Ltd., and Schmidt Epoxy ELM-120 manufactured by Sumitomo Chemical Industries Co., Ltd. (all are trade names) Ciba ‧ special Hydantoin type epoxy resin such as Araldite CY-350 (trade name) manufactured by Chemical Co., Ltd.; Cerokisaito 2021 manufactured by DAICEL Chemical Industry Co., Ltd., Araldite CY175, CY179 manufactured by Ciba Specialty Chemicals Co., Ltd., etc. Aliphatic epoxy resin of the product name; YL-933 manufactured by Japan Epoxy Resin Co., Ltd., TEN, EPPN-501, EPPN-502, etc. (all trade names) manufactured by Dow Chemical Co., Ltd. Epoxy resin; YL-6056, YX-4000, YL-6121 (all are trade names) manufactured by Nippon Epoxy Co., Ltd. Bixylenol type or bisphenol type epoxy resin or a mixture thereof; EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by Asahi Kasei Kogyo Co., Ltd., EXA-1514 manufactured by Dainippon Ink Chemical Industry Co., Ltd. Bisphenol S type epoxy resin such as (product name); bisphenol A novolac type epoxy resin such as Epikote 157S (trade name) manufactured by Japan Epoxy Resin Co., Ltd.; Epikote YL-931, steam manufactured by Japan Epoxy Resin Co., Ltd. Argentite 163, which is manufactured by Baxter Chemical Co., Ltd. (all of which are trade names), tetraphenolate type epoxy resin; Araldite PT810 manufactured by Ciba Specialty Chemicals Co., Ltd., TEPIC manufactured by Nissan Chemical Industries Co., Ltd. (all are trade names) Heterocyclic epoxy resin; diglycidyl benzoate resin such as Blemmer DGT manufactured by Nippon Oil Co., Ltd.; tetraglycidyl xylene oxirane resin such as ZX-1063 manufactured by Dongdu Chemical Co., Ltd.; Nippon Steel Chemical Co., Ltd. Ethylene-based epoxy resin such as ESN-190, ESN-360, HP-4032, EXA-4750, EXA-4700, etc. manufactured by Dainippon Ink Chemical Industry Co., Ltd.; HP-7200, HP-made by Dainippon Ink Chemical Industry Co., Ltd. Epoxy resin having a dicyclopentadiene skeleton such as 7200H; a glycidyl methacrylate copolymerized epoxy resin of CP-50S, CP-50M, etc. manufactured by the company of the company of the present invention; in addition, a copolymerized epoxy resin such as cyclohexylmaleimide and glycidyl methacrylate; Epoxy-modified polybutadiene rubber derivative (for example, PB-3600 manufactured by DAICEL Chemical Industry Co., Ltd.), CTBN modified epoxy resin (for example, YR-102, YR-450 manufactured by Tosho Kasei Co., Ltd.), etc. Not limited to this content. These epoxy resins may be used alone or in combination of two or more. Among them, a novolak type epoxy resin, a heterocyclic epoxy resin, a bisphenol A type epoxy resin or a mixture thereof is particularly preferable.

前述多官能環氧丙烷化合物(E-2),例如雙〔(3-甲基-3-環氧丙烷甲氧基)甲基〕醚、雙〔(3-乙基-3-環氧丙烷甲氧基)甲基〕醚、1,4-雙〔(3-甲基-3-環氧丙烷甲氧基)甲基〕苯、1,4-雙〔(3-乙基-3-環氧丙烷甲氧基)甲基〕苯、(3-甲基-3-環氧丙烷)甲基丙烯酸酯、(3-乙基-3-環氧丙烷)甲基丙烯酸酯、(3-甲基-3-環氧丙烷)甲基丙烯酸甲酯、(3-乙基-3-環氧丙烷)甲基丙烯酸甲酯或該些低聚物或共聚合體等多官能環氧丙烷類以外,例如環氧丙烷醇與酚醛清漆樹脂、聚(p-羥基苯乙烯)、籠型雙酚類、杯芳烴類、杯間苯二酚芳烴類、或倍半噁烷等具有羥基之樹脂之醚化物等。其他,例如具有環氧丙烷環之不飽和單體與(甲基)丙烯酸烷基酯之共聚物等。 The above polyfunctional propylene oxide compound (E-2), for example, bis[(3-methyl-3-epoxypropane methoxy)methyl]ether, bis[(3-ethyl-3-epoxypropane A) Oxy)methyl]ether, 1,4-bis[(3-methyl-3-epoxypropanemethoxy)methyl]benzene, 1,4-bis[(3-ethyl-3-epoxy) Propane methoxy)methyl]benzene, (3-methyl-3-epoxypropane) methacrylate, (3-ethyl-3-epoxypropane) methacrylate, (3-methyl- 3-propylene oxide) methyl methacrylate, (3-ethyl-3-epoxypropane) methyl methacrylate or polyfunctional propylene oxides such as these oligomers or copolymers, such as epoxy An etherified product of a resin having a hydroxyl group such as propanol, a novolak resin, a poly(p-hydroxystyrene), a caged bisphenol, a calixarene, a cup-resorcinol aromatic hydrocarbon, or a sesquioxane. Other examples include, for example, a copolymer of an unsaturated monomer having a propylene oxide ring and an alkyl (meth)acrylate.

環氧硫化合物(E-3),例如,日本環氧樹脂公司製之雙酚A型環氧硫樹脂YL7000等。又,亦可使用依相同之合成方法,將酚醛清漆型環氧樹脂之環氧基的氧原子以硫原子取代所得之環氧硫樹脂等。 The epoxy sulfur compound (E-3) is, for example, a bisphenol A type epoxy resin YL7000 manufactured by Nippon Epoxy Co., Ltd., or the like. Further, an epoxy epoxide or the like obtained by substituting an oxygen atom of an epoxy group of a novolac type epoxy resin with a sulfur atom by the same synthesis method may be used.

前述分子中,具有2個以上之環狀(硫)醚基之熱硬化性成份(E)之添加率,相對於前述(B)含羧酸之樹脂之羧基1當量,較佳為0.6~2.5當量,更佳為0.8~2.0當量之範圍。分子中具有2個以上之環狀(硫)醚基之熱硬化性成份(E)之添加率未達0.6當量時,抗焊阻劑膜中將殘留羧基,而會造成耐熱性、耐鹼性、電氣絕緣性等降低,而為不佳。又,超過2.5當量時,低分子量之環狀 (硫)醚基將會殘留於乾燥塗膜上,而會造成塗膜之強度等降低,而為不佳。 In the above molecule, the addition ratio of the thermosetting component (E) having two or more cyclic (thio)ether groups is preferably from 0.6 to 2.5 based on 1 equivalent of the carboxyl group of the (B) carboxylic acid-containing resin. The equivalent weight is more preferably in the range of 0.8 to 2.0 equivalents. When the addition ratio of the thermosetting component (E) having two or more cyclic (thio)ether groups in the molecule is less than 0.6 equivalent, the carboxyl group remains in the solder resist film, and heat resistance and alkali resistance are caused. , electrical insulation, etc. are reduced, but not good. Moreover, when it exceeds 2.5 equivalents, the ring of low molecular weight The (thio)ether group will remain on the dried coating film, which may cause a decrease in the strength of the coating film or the like, which is not preferable.

本發明之感光性樹脂組成物中,使用含有上述分子中具有2個以上之環狀(硫)醚基的熱硬化性成份(E)之情形,以含有(F)熱硬化觸媒為佳。該些熱硬化觸媒(F),例如,咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;二氰二醯胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等之胺化合物、己二酸二醯肼、癸二酸二醯肼等肼化合物;三苯基膦等之磷化合物等,或市售之產品,例如四國化成工業公司製之2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(任一者皆為咪唑系化合物之商品名)、SAN-APRO公司製之U-CAT3503N、U-CAT3502T(任一者皆為二甲基胺之嵌段異氰酸酯化合物之商品名)、DBU、DBN、U-CATSA102、U-CAT5002(任一者皆為二環式脒化合物及其鹽)等。 In the photosensitive resin composition of the present invention, a thermosetting component (E) having two or more cyclic (thio)ether groups in the above molecule is used, and it is preferred to contain (F) a thermosetting catalyst. The thermosetting catalyst (F), for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1 -Imidazole derivatives such as cyanoethyl-2-phenylimidazole and 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyanodiamide, benzyldimethylamine , 4-(Dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethyl An amine compound such as a benzylamine, a hydrazine compound such as diammonium adipate or a bismuth sebacate; a phosphorus compound such as triphenylphosphine or the like, or a commercially available product such as a product manufactured by Shikoku Chemicals Co., Ltd. 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (any of which is a trade name of an imidazole compound), U-CAT3503N, U-CAT3502T manufactured by SAN-APRO Co., Ltd. (either of them is dimethylamine) The trade name of the blocked isocyanate compound), DBU, DBN, U-CATSA102, and U-CAT5002 (either of which is a bicyclic hydrazine compound and a salt thereof).

特別是,並未限定於該範圍之中,只要可促進環氧樹脂或環氧丙烷化合物之熱硬化觸媒,或環氧基及/或環氧丙烷基與羧基之反應者皆可使用,其可單獨或將2種以上混合使用皆可。又,可使用胍、甲基胍胺、苯併胍、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪‧三 聚異氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧乙基-S-三嗪‧三聚異氰酸加成物等之S-三嗪衍生物,較佳為將其作為密著性增強劑之機能化合物而與前述熱硬化觸媒合併使用。 In particular, it is not limited to this range, as long as it can promote a thermosetting catalyst of an epoxy resin or a propylene oxide compound, or a reactor of an epoxy group and/or an oxypropylene group and a carboxyl group, These may be used alone or in combination of two or more. Further, hydrazine, methyl decylamine, benzopyrene, melamine, 2,4-diamino-6-methylpropenyloxyethyl-S-triazine, 2-vinyl-2,4-di can be used. Amino-S-triazine, 2-vinyl-4,6-diamino-S-triazine ‧ three An S-triazine derivative such as a polyisocyanate adduct or a 2,4-diamino-6-methylpropenyloxyethyl-S-triazine/trimeric isocyanate addition product, preferably It is used in combination with the aforementioned thermosetting catalyst in order to use it as a functional compound of an adhesion enhancer.

該些熱硬化觸媒(F)之添加率,以通常量之比例即可,例如相對於(B)含羧酸之樹脂或分子中具有2個以上之環狀(硫)醚基之熱硬化性成份(E)100質量份,較佳為0.1~20質量份,更佳為0.5~15.0質量份。 The addition ratio of the thermosetting catalyst (F) may be a ratio of a normal amount, for example, to (B) a carboxylic acid-containing resin or a thermosetting hardening having two or more cyclic (thio)ether groups in a molecule. The component (E) is 100 parts by mass, preferably 0.1 to 20 parts by mass, more preferably 0.5 to 15.0 parts by mass.

本發明之感光性樹脂組成物,為提高該塗膜之物理性強度等目的時,可配合其必要性,添加填料。該些填料,可使用公知慣用之無機或有機填料,特別是以使用硫酸鋇、球狀二氧化矽與滑石為佳。此外,可使用酸化鈦或金屬氧化物、氫氧化鋁等之金屬氫氧化物作為體質顏料之填料使用。填料之添加率,較佳為組成物全體量之75質量%以下,更佳為0.1~60質量%之比例。填料之添加率,超過組成物全體量之75質量%時,會增高絕緣組成物之黏度,降低塗佈、成形性,使硬化物脆化等,而為不佳。 In order to improve the physical strength of the coating film, the photosensitive resin composition of the present invention may be added with a filler in accordance with the necessity thereof. As the filler, a conventionally known inorganic or organic filler can be used, and in particular, barium sulfate, spherical cerium oxide and talc are preferably used. Further, a metal hydroxide such as titanium oxide or a metal oxide or aluminum hydroxide can be used as a filler for the extender pigment. The addition ratio of the filler is preferably 75 mass% or less, more preferably 0.1 to 60 mass%, based on the total amount of the composition. When the addition ratio of the filler exceeds 75% by mass of the total amount of the composition, the viscosity of the insulating composition is increased, coating and formability are lowered, and the cured product is embrittled, which is not preferable.

此外,本發明之感光性樹脂組成物,於上述(B)含羧酸之樹脂之合成或製作組成物等目的,或塗佈基板或負載薄膜時所進行之黏度調整等目的,可使用有機溶劑。 Further, in the photosensitive resin composition of the present invention, an organic solvent can be used for the purpose of synthesizing or preparing a composition of the above-mentioned (B) carboxylic acid-containing resin, or for adjusting the viscosity of the substrate or the supported film. .

該些有機溶劑,例如酮類、芳香族烴類、甘醇醚類、甘醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體而言,例如甲基乙基酮、環己酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;溶纖劑、甲基溶纖 劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三乙二醇單乙基醚等甘醇醚類;乙酸乙酯、乙酸丁酯、二丙二醇甲基醚乙酸酯、丙二醇甲基醚乙酸酯、丙二醇乙基醚乙酸酯、丙二醇丁基醚乙酸酯、乳酸甲酯、乳酸乙酯、乳酸丁酯等酯類;乙醇、丙醇、乙二醇、丙二醇等醇類;辛烷、癸烷等脂肪族烴;石油醚、石油腦、氫化石油腦、Solvent石油腦等石油系溶劑等。該些有機溶劑,可單獨或以2種以上之混合物方式使用。 These organic solvents are, for example, ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. More specifically, for example, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve and methylcellulose Agent, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether Ethylene glycol ethers; ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol butyl ether acetate, methyl lactate Ethyl lactate, butyl lactate and other esters; alcohols such as ethanol, propanol, ethylene glycol and propylene glycol; aliphatic hydrocarbons such as octane and decane; petroleum ether, petroleum brain, hydrogenated petroleum brain, Solvent petroleum brain, etc. Petroleum solvent, etc. These organic solvents may be used singly or in combination of two or more.

本發明之感光性性樹脂組成物,更必要時,可添加氫醌、氫醌單甲基醚、t-丁基兒茶酚、五倍子酚、吩噻等公知慣用之熱聚合阻礙劑、微粉二氧化矽、有機膨潤土、蒙脫土等公知慣用之增黏劑、聚矽氧系、氟系、高分子系等之消泡劑及/或整平劑、咪唑系、噻唑系、三唑系等之矽烷偶合劑、抗氧化劑、抗鏽劑等公知慣用之添加劑類。 The photosensitive resin composition of the present invention may further contain hydroquinone, hydroquinone monomethyl ether, t-butylcatechol, gallic phenol, phenothiphenyl, if necessary. A known conventionally used tackifier, fine powder of cerium oxide, organic bentonite, montmorillonite, or the like, a defoaming agent such as polyfluorene, a fluorine, or a polymer, and/or a leveling agent. A known and customary additive such as a decane coupling agent such as an imidazole system, a thiazole system or a triazole system, an antioxidant or a rust inhibitor.

[圖1]顯示孟塞爾色相環之圖。 [Fig. 1] A diagram showing a Munsell hue circle.

[圖2]顯示感光性樹脂組成物之硬化塗膜所形成之圖型的截面形狀圖。 Fig. 2 is a cross-sectional view showing a pattern formed by a cured coating film of a photosensitive resin composition.

[實施例] [Examples]

以下將以實施例與比較例對本發明作具體之說明,但 本發明並不受下述實施例所限定。又,以下所稱之「份」,於無特別限定下,為表示「質量份」之意。 Hereinafter, the present invention will be specifically described by way of examples and comparative examples, but The invention is not limited by the following examples. In addition, the "parts" referred to below are intended to mean "parts by mass" unless otherwise specified.

〔實施例1〕 [Example 1] <含羧酸之樹脂之合成> <Synthesis of carboxylic acid-containing resin>

本發明之含羧酸之樹脂(B)係依下述合成例所製作者。 The carboxylic acid-containing resin (B) of the present invention is produced according to the following synthesis examples.

將甲酚酚醛清漆型環氧樹脂(大日本油墨化學工業(株)製、“Epiclon”(登錄商標)N-695、環氧當量:220)220份加入附有攪拌機及迴流冷卻器之四口燒瓶中,加入卡必醇乙酸酯214份,加熱溶解。 220 parts of cresol novolac type epoxy resin ("Epiclon" (registered trademark) N-695, epoxy equivalent: 220) manufactured by Dainippon Ink and Chemicals Co., Ltd. was added to four ports with a blender and a reflux cooler. In the flask, 214 parts of carbitol acetate was added and dissolved by heating.

其次,加入作為聚合阻礙劑之氫醌0.46份,與作為反應觸媒之三苯基膦1.38份。將該混合物加熱至95~105℃,將丙烯酸72份緩緩滴下,進行16小時之反應。將該反應產物冷卻至80~90℃,加入四氫苯甲酸酐106份,進行8小時之反應,冷卻後,取出反應溶液(亦稱為蠟(B-1))。依前述方式所得之含羧酸之樹脂,其固形物之酸價為100mgKOH/g,不揮發成份為65%。 Next, 0.46 parts of hydroquinone as a polymerization inhibitor and 1.38 parts of triphenylphosphine as a reaction catalyst were added. The mixture was heated to 95 to 105 ° C, and 72 parts of acrylic acid was gradually dropped, and the reaction was carried out for 16 hours. The reaction product was cooled to 80 to 90 ° C, and 106 parts of tetrahydrobenzoic anhydride was added thereto, and the reaction was carried out for 8 hours. After cooling, the reaction solution (also referred to as wax (B-1)) was taken out. The carboxylic acid-containing resin obtained in the above manner had a solid content of an acid value of 100 mgKOH/g and a nonvolatile content of 65%.

<添加例> <Additional example>

將下述成份以下述添加量於攪拌機中進行預混合後,使用3輥滾筒研磨機混練以製作各抗焊阻劑用感光性樹脂組成物(組成物例1~8)。其中,所得之感光性樹脂組成物的分散度使用Erichsen公司製粒度測試器(Grind Meter)進行粒度測定並進行評估結果,得知其為15μm以下。組成物例6~8中,無論任一例皆未添加本發明之苝系著色劑(A-1)之例。 The following components were pre-mixed in a blender with the following addition amounts, and then kneaded by a three-roll mill mill to prepare photosensitive resin compositions for respective solder resists (composition examples 1 to 8). Among them, the dispersion degree of the obtained photosensitive resin composition was measured using a particle size tester (Grind) manufactured by Erichsen Co., Ltd. Meter) The particle size measurement was carried out and the evaluation result was carried out, and it was found to be 15 μm or less. In the composition examples 6 to 8, the lanthanide coloring agent (A-1) of the present invention was not added in any of the examples.

[表1] [Table 1]

阻劑性能評估: Receptor performance evaluation: 〔評估基板之製作方法〕 [Method of Making Evaluation Substrate]

將依上述方法所得之例1~8之組成物,於形成有圖型之銅箔基板使用網版印刷進行全面塗佈,於80℃下乾燥20分鐘,放冷至室溫。對該基板使用設置有金屬鹵化物燈之曝光裝置(股份有限公司-奧科製作所製)以最佳 曝光量對抗焊阻劑圖型進行曝光,以30℃之1% Na2CO3水溶液、噴壓0.2MPa之條件下進行60秒鐘之顯影,得阻劑圖型。將該基板於UV輸送爐中,以合計曝光量為1000mJ/cm2之條件照射紫外線後,於150℃、60分鐘之條件下加熱使其硬化。對所得之印刷基板(評估基板)進行以下之特性評估。 The composition of Examples 1 to 8 obtained by the above method was applied to the copper foil substrate on which the pattern was formed by screen printing, and dried at 80 ° C for 20 minutes, and allowed to cool to room temperature. The substrate was exposed to a solder resist pattern at an optimum exposure amount using an exposure apparatus (manufactured by AOKO Co., Ltd.) provided with a metal halide lamp, and a 1% Na 2 CO 3 aqueous solution at 30 ° C was sprayed. The development was carried out for 60 seconds under the conditions of a pressure of 0.2 MPa to obtain a resist pattern. This substrate was irradiated with ultraviolet rays under the conditions of a total exposure amount of 1000 mJ/cm 2 in a UV transfer furnace, and then heated and cured at 150 ° C for 60 minutes. The following characteristics were evaluated on the obtained printed substrate (evaluation substrate).

<色調‧L*a*b*值> <hue ‧L*a*b* value>

依上述評估基板之製作方法,製作例1~8之感光性樹脂組成物之硬化塗膜。膜厚以乾燥後之膜厚為25±2μm之厚度進行製作。所得之硬化塗膜以目視方式確認辨別色調,此外,於例2、3、4、7及8中,則使用分光測色計進行測色。分光測色計為使用KONICA MINOLTA公司製CM-2600d,表色系為使用CIE L*a*b*。銅箔基板上之均勻塗膜表面上,使用SCI模式所測定之值作為測色值。其評估結果係如表2所示。 According to the above-described method for producing a substrate, the cured coating film of the photosensitive resin compositions of Examples 1 to 8 was produced. The film thickness was prepared to have a thickness of 25 ± 2 μm after drying. The obtained hardened coating film was visually confirmed to distinguish the color tone, and in Examples 2, 3, 4, 7, and 8, the color measurement was performed using a spectrophotometer. The spectrophotometer was a CM-2600d manufactured by KONICA MINOLTA Co., Ltd., and the color was CIE L*a*b*. On the surface of the uniform coating film on the copper foil substrate, the value measured by the SCI mode was used as the color measurement value. The evaluation results are shown in Table 2.

此外,為進行比較,而對具有良好色調之作為抗焊阻劑之市售品的太陽油墨製造公司製PSR-4000之各種產品,依相同方法評估色調及L*a*b*值。其結果係如表3所示。又,確認PSR-4000中任一者皆未使用苝系著色劑。 Further, for comparison, the color tone and the L*a*b* value were evaluated in the same manner for various products of PSR-4000 manufactured by Sun Ink Manufacturing Co., Ltd., which is a commercially available product having a good color tone. The results are shown in Table 3. Further, it was confirmed that none of the PSR-4000 used an anthraquinone coloring agent.

<最佳曝光量> <Optimum exposure>

將鋪銅層合基板使用拋光滾筒研磨後,經水洗、乾 燥,將例1~8之感光性樹脂組成物使用網版印刷法進行塗佈,於80℃之熱風循環式乾燥爐乾燥30分鐘。乾燥後,藉由光遮罩(柯達‧伊士曼公司製,步進平台No.2),以高壓水銀燈曝光裝置進行曝光。照射後之基板做為測試顆粒,以噴壓2kg/cm2之顯影液(碳酸鈉水溶液)進行60秒鐘之顯影後,以目視判定殘存塗膜之段數。以殘存塗膜之段數為6段之曝光量為最佳曝光量。其評估結果係如表2所示。 The copper-clad laminate substrate was polished with a polishing drum, washed with water, and dried. The photosensitive resin compositions of Examples 1 to 8 were applied by screen printing, and dried in a hot air circulating drying oven at 80 ° C for 30 minutes. After drying, exposure was carried out by a high-pressure mercury lamp exposure apparatus by a light mask (manufactured by Kodak Eastman Co., Ltd., stepping platform No. 2). The substrate after the irradiation was used as a test pellet, and after developing for 20 seconds by spraying a developing solution (aqueous sodium carbonate solution) of 2 kg/cm 2 , the number of remaining coating films was visually determined. The exposure amount in which the number of segments of the remaining coating film is 6 is the optimum exposure amount. The evaluation results are shown in Table 2.

<解析性‧線路截面形狀> <Resolve ‧ line section shape>

基板,為使用銅厚度分別為35μm、50μm、70μm之鋪銅層合板上形成有線路/空間為300/300之電路圖型之基板上,於進行前處理之拋光滾筒研磨後,經水洗、乾燥所得者。將例1~8之感光性樹脂組成物,於施有前處理之上述基板上以網版印刷法進行塗佈,再使用80℃之熱風循環式乾燥爐乾燥30分鐘。乾燥後,使用高壓水銀燈曝光裝置進行曝光。曝光圖型,為使用於空間部描繪有50/60/70/80/90/100μm之線路的圖型。曝光量,為使用最佳曝光量評估所得之曝光量。曝光後,以碳酸鈉水溶液進行顯影形成圖型,使殘留之最小線路之寬度作為解析性。此外,經150℃、60分鐘熱硬化以製得硬化塗膜後,觀察硬化塗膜之設計值100μm之線路部的截面。 The substrate is formed on a substrate having a circuit pattern of 300/300 lines formed on a copper-clad laminate having copper thicknesses of 35 μm, 50 μm, and 70 μm, and is subjected to pre-treatment polishing drum polishing, washed with water, and dried. By. The photosensitive resin compositions of Examples 1 to 8 were applied by screen printing on the substrate subjected to the pretreatment, and dried in a hot air circulating drying oven at 80 ° C for 30 minutes. After drying, exposure was carried out using a high pressure mercury lamp exposure apparatus. The exposure pattern is a pattern in which a line of 50/60/70/80/90/100 μm is drawn for use in the space portion. The amount of exposure is the amount of exposure that is evaluated using the optimum amount of exposure. After the exposure, development was carried out with an aqueous solution of sodium carbonate to form a pattern, and the width of the remaining minimum line was made analytical. Further, after hard curing at 150 ° C for 60 minutes to obtain a cured coating film, a cross section of a line portion having a design value of 100 μm of the cured coating film was observed.

該截面係如圖2所記載之模式圖,將分別評價為A~ E等5階段。圖示為表示發生以下現象時之模式圖。特別是,於A評價之情形中,設計值所產生之偏移無論於線路上部、下部皆為5μm以內之偏移。其結果如表2所示。其中最佳之評價為A,最差之評價為E,C評價為作為抗焊阻劑時仍有改善之空間,但為可使用之程度。 This section is a pattern diagram as shown in Fig. 2, and will be evaluated as A~. E and other five stages. The figure shows a pattern diagram showing the following phenomenon. In particular, in the case of the A evaluation, the offset generated by the design value is within 5 μm of the upper and lower portions of the line. The results are shown in Table 2. Among them, the best evaluation is A, the worst evaluation is E, and C is evaluated as a space for improvement as a solder resist, but it is usable.

此外,為進行比較,對於色調良好之抗焊阻劑之作為市售品之太陽油墨製造公司製PSR-4000的各種產品,同樣的進行70μm之電路厚度基板所進行之截面評估。其結果如表3所示。 In addition, for the comparison, a variety of products of the PSR-4000 manufactured by Sun Ink Manufacturing Co., Ltd., which is a commercially available product, were subjected to cross-sectional evaluation of a 70 μm circuit thickness substrate. The results are shown in Table 3.

A評價:如設計寬度所示般之理想狀態 A evaluation: ideal state as shown by design width

B評價:耐顯影性不足等而造成表面層侵蝕 B evaluation: surface layer erosion caused by insufficient developability

C評價:底部削減狀態 C evaluation: bottom cut state

D評價:因暈開等而發生線路過於擴張 D evaluation: the line is too expanded due to fading

E評價:表面層之線過於擴張與發生底部削減狀態 E evaluation: the surface layer is too broad and the bottom cut state occurs.

[表2] [Table 2]

<焊料耐熱性> <Solder heat resistance>

依上述評估基板之製作方法,製作例1~8之感光性 樹脂組成物之硬化塗膜。膜厚為以乾燥後之膜厚為25±2μm之方式製作。將其浸漬於加熱至260℃之焊浴10秒鐘,重複3次,以目視方式確認塗膜是否發生剝離或變色。其結果,確認使用例1~8所製作之評估基板,無論任一個皆未發生剝離或變色。 The photosensitivity of the examples 1 to 8 were prepared according to the above-mentioned method for producing the substrate. A hardened coating film of a resin composition. The film thickness was produced so that the film thickness after drying was 25 ± 2 μm. This was immersed in a solder bath heated to 260 ° C for 10 seconds, and was repeated three times to visually confirm whether or not the coating film was peeled off or discolored. As a result, it was confirmed that the evaluation substrates produced in Examples 1 to 8 were not peeled or discolored in any of them.

〔實施例2〕 [Example 2]

將例2及例7之感光性樹脂組成物使用甲基乙基酮稀釋,塗佈於負載薄膜上。將其加熱乾燥後形成厚度20μm之感光性樹脂組成物層,使用80℃之熱風乾燥器乾燥30分鐘。隨後,於所得之塗膜上貼合包覆薄膜(CoverFilm)而得乾薄膜。隨後,將包覆薄膜剝離,於形成圖型之銅箔基板熱層合所得之薄膜,其次,同樣使用設置有金屬鹵化物燈之曝光裝置(股份有限公司-奧科製作所製)進行曝光。曝光後,剝離負載薄膜,以150℃之熱風乾燥器進行60分鐘加熱硬化,以製作試驗基板。對於具有所得硬化被膜之試驗基板,依實施例1之試驗方法及評估方法,進行各種特性之評估試驗。其結果,於實施例1中,例2與例7係為相同。 The photosensitive resin compositions of Examples 2 and 7 were diluted with methyl ethyl ketone and applied onto a supported film. This was heated and dried to form a photosensitive resin composition layer having a thickness of 20 μm, and dried by a hot air dryer at 80 ° C for 30 minutes. Subsequently, a cover film (CoverFilm) was attached to the obtained coating film to obtain a dry film. Subsequently, the cover film was peeled off, and the film obtained by thermal lamination of the patterned copper foil substrate was used, and secondly, exposure was performed using an exposure apparatus (manufactured by AOKO Co., Ltd.) provided with a metal halide lamp. After the exposure, the load film was peeled off and heat-hardened by a hot air dryer at 150 ° C for 60 minutes to prepare a test substrate. For the test substrate having the obtained cured film, the evaluation test of various characteristics was carried out in accordance with the test method and evaluation method of Example 1. As a result, in Example 1, Example 2 and Example 7 were the same.

Claims (7)

一種感光性樹脂組成物,其特徵係含有(A-1)苝系著色劑、(A-2)酞菁系著色劑及(B)含羧酸之樹脂,相對於前述(B)含羧酸之樹脂100質量份,含有前述(A-1)苝系著色劑0.05~3.0質量份,前述(A-1)苝系著色劑與(A-2)酞菁系著色劑之添加比以質量比為(A-1)苝系著色劑:(A-2)酞菁系著色劑=1:0.5~1:20,且係鹼顯影性光抗焊阻劑。 A photosensitive resin composition comprising (A-1) an anthraquinone coloring agent, (A-2) a phthalocyanine coloring agent, and (B) a carboxylic acid-containing resin, and a carboxylic acid containing the (B) 100 parts by mass of the resin, containing 0.05 to 3.0 parts by mass of the above (A-1) anthraquinone-based coloring agent, and the addition ratio of the (A-1) anthraquinone-based coloring agent to the (A-2) phthalocyanine-based coloring agent by mass ratio (A-1) anthraquinone coloring agent: (A-2) phthalocyanine coloring agent = 1:0.5 to 1:20, and is an alkali-developable photo-resistance resist. 如申請專利範圍第1項之感光性樹脂組成物,其中苝系著色劑(A-1)至少含有染料。 The photosensitive resin composition of claim 1, wherein the anthraquinone coloring agent (A-1) contains at least a dye. 如申請專利範圍第1項之感光性樹脂組成物,其中苝系著色劑(A-1)至少含有顏料。 The photosensitive resin composition of claim 1, wherein the anthraquinone coloring agent (A-1) contains at least a pigment. 如申請專利範圍第1項之感光性樹脂組成物,其中苝系著色劑(A-1)至少含有顏料及染料。 The photosensitive resin composition of claim 1, wherein the anthraquinone coloring agent (A-1) contains at least a pigment and a dye. 一種乾薄膜,其係將如申請專利範圍第1項至第4項中任一項之感光性樹脂組成物於負載薄膜上塗佈、乾燥而製得。 A dry film obtained by coating and drying a photosensitive resin composition according to any one of claims 1 to 4 on a supported film. 一種硬化物,其係將如申請專利範圍第1項至第4項中任一項之感光性樹脂組成物或將該感光性樹脂組成物於負載薄膜上經塗佈乾燥所得之乾薄膜,於形成有電路之基板上硬化而製得。 A cured product obtained by applying a photosensitive resin composition according to any one of claims 1 to 4, or a dry film obtained by coating and drying the photosensitive resin composition on a supported film, It is obtained by hardening a substrate on which a circuit is formed. 一種印刷電路基板,其係於形成有電路之基板上,具有由如申請專利範圍第6項之硬化物所構成之抗焊阻劑層。 A printed circuit board having a solder resist layer composed of a cured material as claimed in claim 6 of the invention, on a substrate on which a circuit is formed.
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