TWI577993B - Probe Apparatus?and Coaxial Probe thereof - Google Patents

Description

Probe device and coaxial probe

The present invention relates to a probe device and a coaxial probe and probe mount therefor.

In recent years, the application of integrated circuits has become more and more popular. After the integrated circuit is completed, in order to screen out defective products, the test signals are usually transmitted to the integrated circuits through the test device to test their functions. Whether it meets expectations to control the factory yield of the integrated circuit. Here, the conventional testing technique can directly contact the pad or the I/O pad on the circuit to be tested (such as the integrated circuit described above) by the probe device, and the test device passes through the test device. The probe sends a test signal to the circuit under test for detection, and then the probe sends the test result back to the test device for analysis.

FIG. 1 is a conventional probe device. When the probe 31 is in contact with the circuit to be tested for detection, the probe 31 can contact the circuit to be tested from top to bottom to complete the detection. However, as can be seen from FIG. 1, the probe 31 is connected to the fixing base 32 from one end thereof, and the fixing base 32 stops the probe 31 only in the vertical direction. When the probe 31 is pressed down the circuit to be tested, the test piece is to be tested. The reaction force applied to the probe 31 by the circuit may cause the probe 31 to rotate in the horizontal direction with respect to the fixed seat 32. If the tip end of the probe 31 is rotated and the deviation from the pad causes the detection to be inaccurate, it may be impossible to screen out the defective product.

In addition, the probes 31 are connected to the test device via the two signal interfaces 33 and 34 via the signal lines 35, and the conventional signal interfaces 33 and 34 are disposed in the same column on the top surface of the fixed base 32, and the signal interface 33, 34 is upwards, and the outgoing direction of the signal line 35 of the self-test device is usually at an angle of ninety degrees to the direction of the signal interfaces 33, 34, so that the signal line 35 needs to be bent to connect to the two signal interfaces 33. 34. Therefore, when a plurality of probe devices are required to simultaneously contact a small-sized integrated circuit, the space may be insufficient to accommodate the signal line 35 having a large angle of bending and the contact pad may not be contacted for detection. Moreover, the bent signal line 35 may cause leakage current when transmitting the test signal or the test result, thereby causing the detection result to be of no reference value.

In view of this, the present invention provides a probe device and a coaxial probe and probe mount.

In one embodiment, the probe device includes a coaxial probe and a fixing base; the coaxial probe includes a probe body, the probe body includes a first extension portion, a second extension portion, and a needle tip portion, and the second extension portion is located at the first extension Between the portion and the tip portion, the first extension portion and the second extension portion have a first angle; the fixing seat includes a first end surface, a second end surface opposite to the first end surface, a slot and a hole connected to the slot The slot is formed on the first end surface and the second extension portion is received in the slot. The slot extends from the first end surface toward the second end surface, and the first extension portion is inserted in the slot.

In an embodiment, the inner diameter of the slot is equal to the diameter of the first extension, and the inner diameter of the slot is equal to the diameter of the second extension.

In an embodiment, the depth of the slot is greater than the radius of the second extension.

In one embodiment, the coaxial probe further includes a third extending portion, wherein the two ends of the third extending portion are respectively connected to the needle tip portion and the second extending portion, and the second extending portion and the second extending portion have a second angle. And a third angle between the third extension and the tip portion.

In one embodiment, the fixing base further includes a hollow portion, and the hollow portion is located between the first end surface and the second end surface, and the two ends of the hole groove communicate with the slit and the hollow portion, respectively.

In one embodiment, the fixing base further comprises a side surface, the side surface is provided with a second signal interface, the second end surface is provided with a first signal interface, and the first signal interface and the second signal interface are connected to the hollow portion.

In one embodiment, the coaxial probe further includes a dielectric layer and a ground layer disposed on the outer surface of the probe body and not completely shielding the tip end portion of the probe body from the first extension portion.

In one embodiment, the fixing base further includes a base connected to the side surface of the fixing base, the base includes an outlet port, and the first signal interface and the second signal interface face the outlet port.

In one embodiment, the coaxial probe is composed of two consecutive N-shaped shapes, and the first extension portion, the second extension portion and the third extension portion constitute a first one that is first turned upside down by 180 degrees and then turned rightward by 90 degrees. The N-shaped, second extension, third extension and tip portion form a second N-shape.

In one embodiment, a coaxial probe includes a first extension portion, a second extension portion, a third extension portion and a needle tip portion, and the two ends of the second extension portion are respectively connected to the first extension portion and the third extension portion; The portion includes a needle tip and a needle end, the needle end being connected to the third extension; wherein the second extension has a first angle between the first extension and the second extension has a second angle between the third extension and the second extension a third angle is formed between the needle tip and the third extension.

In one embodiment, the coaxial probe further includes a dielectric layer and a ground layer disposed on the outer surface of the probe body and not completely shielding the tip portion and the first extension.

In summary, the coaxial probe of the probe device according to the present invention is coupled to the fixed seat through the first extension portion and the second extension portion, so that the coaxial probe can be more firmly coupled into the fixed seat without being subjected to an external force. The action causes the coaxial probe to rotate away from the fixed circuit and deviates from the circuit to be tested, and the ground layer of the coaxial probe can be extended into the fixed seat to prevent the test signal and the test result from being disturbed by noise. Furthermore, the two signal interfaces of the probe device are located on different surfaces of the fixed seat. When the coaxial probe contacts the circuit to be tested for testing, the test line of the self-test device is not bent at a large angle and can be connected to the coaxial probe. Improve inspection quality.

Referring to Figure 2, there is shown an exploded perspective view of an embodiment of a probe device in accordance with the present invention, which discloses a probe device 1. The probe device 1 is electrically connected to the circuit to be tested and the test device. The probe device 1 mainly includes a fixing base 10 and a coaxial probe 12. As shown in FIG. 3 and FIG. 4, the coaxial probe 12 includes a probe body 120 and a dielectric layer L1 and a ground layer L2 which are sequentially coated on the outer surface of the probe body 120, and the dielectric layer in FIG. The diameters of L1, ground layer L2 and first extension 121 of probe body 120 are not drawn to scale. The probe body 120 includes a first extension portion 121, a second extension portion 122, a third extension portion 123, and a needle tip portion 124. The two ends of the second extension portion 122 are respectively connected to the first extension portion 121 and the third extension portion 123. The third extension portion 123 is connected to the needle tip portion 124 (ie, the first extension portion 121, the second extension portion 122, the third extension portion 123, and the needle tip portion 124 are sequentially connected), and the first extension portion 121 and the third extension portion 123 are connected. Located at two ends of the second extension portion 122, the needle tip portion 124 and the second extension portion 122 are located at both ends of the third extension portion 123. The tip portion 124 includes a needle tip 124b and a needle end 124a. The needle end 124a is located between the needle tip 124b and the third extension 123 and the needle end 124a is coupled to the third extension 123. The first extension portion 121 can be electrically connected to the testing device, and the needle tip end 124b of the needle tip portion 124 can contact the contact of the circuit to be tested.

FIG. 3 is an enlarged schematic view of the coaxial probe 12 of FIG. 2 . Referring to FIG. 3 , in the embodiment, the first extension 121 and the second extension 122 have a first angle θ1 and a second extension. The portion 122 has a second angle θ2 between the third extension portion 123, the third extension portion 123 and the needle tip portion 124 have a third angle θ3, and the coaxial probe 12 is stepped. In detail, the coaxial probe 12 is The first extension portion 121, the second extension portion 122 and the third extension portion 123 form a first N-shaped and second extension that is first turned upside down by 180 degrees and then turned right by 90 degrees. The portion 122, the third extending portion 123, and the tip portion 124 constitute a second N-shape. Preferably, the first angle θ1, the second angle θ2, and the third angle θ3 are 120 degrees. Further, each of the extending portions 121 to 123 and the tip portion 124 is a cylindrical body, and the tip portion 124 is tapered, that is, the cross-sectional area of the needle tip 124b is smaller than the cross-sectional area of the needle end 124a, so that the needle end 124a of the needle tip portion 124 is easily contacted. The circuit to be tested.

In some implementations, the designer can design the shape and size of the coaxial probe 12 according to the size of the circuit to be tested, the relative position of the circuit to be tested and the probe device, and the first angle θ1, the second angle θ2, and the first The three angles θ3 may also be 90 degrees or other angles.

As shown in FIG. 2, the fixing base 10 includes a first end surface 101, a second end surface 102 opposite to the first end surface 101, a slit 107 and a hole 106. The slit 107 is formed on the first end surface 101 and the slit 107 is formed. Connected to one end of the slot 106, the slot 106 extends from the first end face 101 toward the second end face 102. Therefore, the coaxial probe 12 can be coupled to the fixing base 10. The first extension portion 121 of the coaxial probe 12 can be inserted into the slot 106, and the second extending portion 122 can be engaged with the slot 107 to be accommodated. In the slit 107, the coaxial probe 12 is detachably coupled to the mount 10.

In some embodiments, the mount 10 further includes a base 11 that can be coupled to the test device, and one end of the base 11 is a wire end, that is, the outlet end of the base 11 includes an outlet. 110, and the test line of the self-test device can pass through the outlet port 110 of the base 11, so that the test line of the self-test device can be connected to the test device via the outlet port 110 of the base 11 and the coaxial probe 12. And the circuit to be tested, for transmitting the test signal from the test device and returning the test result of the circuit to be tested to the test device.

The probe body of the coaxial probe 12 can be made of a conductive material (for example, copper, silver, iron, aluminum, tantalum, tungsten or an alloy thereof). Preferably, the probe body can be made of tungsten or tungsten alloy. It has better hardness and wear resistance. The mount 10 can be made of a conductive material to connect to the ground of the test device to provide a ground potential.

4 is a cross-sectional view of the coaxial probe 12 along the section line AA in FIG. 2, please refer to FIG. 3 and FIG. 4 simultaneously. In this embodiment, the plurality of outer layers of the coaxial probe 12 include the dielectric layer L1 and The ground layer L2 is located on the outer surfaces of the first extending portion 121, the second extending portion 122, the third extending portion 123, and the tip portion 124. As shown in FIG. 3 and FIG. 4, the outer layer is sequentially grounded. L2 and dielectric layer L1, and the ground layer L2 and the dielectric layer L1 do not completely cover the first extension portion 121 and the needle tip portion 124 (for convenience of description, the portion of the first extension portion 121 that is not covered is referred to as the first The conductive segment, and the portion of the tip portion 124 that is not covered is referred to as a second conductive segment). In this case, when the probe body is coupled to the fixing base 10, the grounding layer L2 located outside the first extending portion 121 and the second extending portion 122 can contact the fixing base 10, and further electrically connected to the ground potential to avoid the aforementioned test signal. The test result is affected by noise interference and affects the detection accuracy, and the dielectric layer L1 located in the ground layer L2 cooperates with the ground layer L2 to provide impedance matching. In other implementations, in order to avoid the high temperature effect of the coaxial probe 12 when detecting the circuit under test, the surface of the coaxial probe 12 may also add a heat resistant layer to increase its heat resistance.

Fig. 5 is an enlarged schematic view of the coaxial probe 12 and the mount 10 of Fig. 2. FIG. 6 is a schematic view of the coaxial probe 12 of FIG. 2 received in the slot 107 and the slot 106 of the mount 10. Referring to FIG. 5 and FIG. 6 simultaneously, the slit 107 and the groove 106 correspond to the first extending portion 121 and the second extending portion 122 of the coaxial probe 12, and the extending direction of the slit 107 corresponds to the second In the longitudinal direction of the extending portion 122, the extending direction of the hole groove 106 corresponds to the longitudinal direction of the first extending portion 121. Preferably, the slot 107 and the slot 106 are cylindrical, the inner diameter of the slot 107 is equal to the diameter of the second extension 122, the inner diameter of the slot 106 is equal to the diameter of the first extension 121, and the slot The depth of 107 may be greater than the radius of the second extension 122 such that the second extension 122 fits more securely into the slot 107. Here, the user of the probe device can align the first extension portion 121 of the coaxial probe 12 with the aperture groove 106 and apply the force to the coaxial probe 12 to combine the first extension portion 121 with the aperture groove 106. The second extension 122 is combined with the slot 107. In some embodiments, the slots 107 and the slots 106 may also be rectangular columns.

As shown in FIG. 6, when the first extension portion 121 and the second extension portion 122 of the coaxial probe 12 are respectively received in the slot 107 and the slot 106, the first extension is seen by the appearance of the probe device. The portion 121 and a portion of the second extending portion 122 are shielded by being respectively received in the hole groove 106 and the slit 107, and the other portion of the second extending portion 122, the third extending portion 123 and the needle tip portion 124 are exposed to the fixing seat. 10 outside. Here, the first extending portion 121 and the second extending portion 122 are respectively blocked by the hole groove 106 and the slit 107, so that the coaxial probe 12 can be more tightly coupled to the fixing base 10 when the needle tip portion 124 of the coaxial probe 12 is closed. When the circuit to be tested is touched for detection, the coaxial probe 12 is not rotated relative to the fixed base 10 by an external force.

FIG. 6 is an example in which a portion of the second extending portion 122 is received in the slot 107. However, the present invention is not limited thereto, and the portion of the second extending portion 122 received in the slot 107 may be a second extension. Between 1/3 and 1/2 of the portion 122, 1/3 or less, or 1/2 or more; or the second extending portion 122 may be entirely accommodated in the slit 107.

As shown in FIG. 5, the fixing base 10 further includes a three-sided surface 103, a first signal interface 108 and a second signal interface 109. The first signal interface 108 and the second signal interface 109 are located on different surfaces of the fixed base 10. The first signal interface 108 is disposed on the second end surface 102 of the fixed base 10, and the second signal interface 109 is disposed on one of the side surfaces 103. The second signal interface 109 in this embodiment is exemplified by the side surface 103 disposed above the fixed base 10. However, the present invention is not limited thereto. In some implementations, the second signal interface 109 may also be connected to the second signal interface 109. Either of the other side surfaces 103 of the mount 10.

As shown in FIG. 5, the fixing base 10 further includes a hollow portion 104. The hollow portion 104 is located between the first end surface 101 and the second end surface 102, and the hollow portion 104 is composed of a first end surface 101, a second end surface 102, and side surfaces. 103 is formed around, one end of the hole groove 106 (away from one end of the first end surface 101) communicates with the hollow portion 104, in other words, the hole groove 106 extends from the first end surface 101 to the hollow portion 104, and the first extension portion 121 of the coaxial probe 12 The hollow portion 104 can be inserted through the slot 106, and the first signal interface 108 and the second signal interface 109 are also connected to the hollow portion 104. The test line 20 of the self-test device can be electrically connected to the coaxial probe 12 via the first signal interface 108 and the second signal interface 109. In some implementations, the first signal interface 108 and the second signal interface 109 can be implemented by a Sub-Miniature connector, and the ultra-small connector can provide different corners and heights, for example: SMP (Sub- Miniature version P) Connector, SMC (Sub-Miniature version C) or SMA (Sub-Miniature version A) connector.

As shown in FIG. 6, when detecting the circuit to be tested, the test device and the circuit to be tested are often detected by a Kelvin-connected test line 20, for example, the test line 20 may include a supply ( Force) line and sense line, the supply line is used to provide the transmission path of the test signal, and the sensing line is used to provide the transmission path of the test result. When testing the circuit to be tested, take four probes as an example (for convenience) The description is referred to as a first probe, a second probe, a third probe, and a fourth probe, respectively, and the first probe, the second probe, the third probe, and the fourth probe are respectively coupled to the first probe a fixing base, a second fixing base, a third fixing base and a fourth fixing base), the first conductive section of the first probe is connected to the supply line via the second signal interface of the first fixing seat, and the first one of the second probe The conductive segment is connected to a voltage detecting line via the second signal interface of the second fixing base, and the second conductive segment of the first probe and the second probe are commonly connected to the input pad of the circuit to be tested, and the third probe The first conductive segment of the pin is connected to the second signal interface of the third fixed seat Connected to the sensing line, the first conductive segment of the fourth probe is connected to another voltage detecting line via the second signal interface of the fourth fixed seat, and the second conductive portion of the third probe and the fourth probe are connected to each other Measuring the output pad of the circuit, so that the test signal can be transmitted to the circuit under test via the supply line and the first probe, and the test result can be sent back to the test device via the third probe, and the test device is to be tested The voltage loss between the circuits can be eliminated by the voltage value detected by the two voltage detection lines.

Alternatively, two probes are taken as an example (for convenience of description, they are referred to as a fifth probe and a sixth probe, respectively, and the fifth probe and the sixth probe are respectively coupled to the fifth fixed seat and the sixth fixed seat. The first conductive segment of the fifth probe is respectively connected to the supply line and the voltage detecting line via the first signal interface and the second signal interface of the fifth fixed seat, and the first conductive segment of the sixth probe is respectively passed through the sixth The first signal interface and the second signal interface of the fixed base are connected to the sensing line and another voltage detecting line, and the second conductive segments of the fifth probe and the sixth probe are respectively connected to the input pad and the output pad of the circuit to be tested In this way, the test signal can be transmitted to the circuit under test via the supply line and the fifth probe, and the test result can be sent back to the test device via the sixth probe and the sensing line, and the voltage between the test device and the first conductive segment is detected. The loss, that is, the voltage loss caused by the sensing line and the supply line itself can be eliminated by the voltage value detected by the two voltage detecting lines. Accordingly, the first signal interface 108 and the second signal interface 109 are aligned with the outlet port 110 of the susceptor 11 so that the test line 20 does not need to be bent, and the user of the probe device adjusts any of the test lines 20, Since the first signal interface 108 and the second signal interface 109 are located on the signal interfaces of different surfaces, the user does not easily touch the other of the test lines 20.

The main difference between using two probes or using four probes for needle testing is that using four probes for needle testing eliminates the voltage loss between the test device and the first conductive segment, and eliminates the need for additional probes. The voltage loss caused by the body itself. If two probes are used for the needle side, only the voltage loss between the test device and the first conductive segment can be eliminated, and the voltage loss caused by the probe body itself cannot be eliminated.

In summary, the coaxial probe of the probe device according to the present invention is coupled to the fixed seat through the first extension portion and the second extension portion, so that the coaxial probe can be more firmly coupled into the fixed seat without being subjected to an external force. The action causes the coaxial probe to rotate away from the fixed circuit and deviates from the circuit to be tested, and the ground layer of the coaxial probe can be extended into the fixed seat to prevent the test signal and the test result from being disturbed by noise. Furthermore, the two signal interfaces of the probe device are located on different surfaces of the fixed seat. When the coaxial probe contacts the circuit to be tested for testing, the test line of the self-test device is not bent at a large angle and can be connected to the coaxial probe. Improve inspection quality.

The present invention has been disclosed in the above embodiments, and it is not intended to limit the present invention. Any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended patent application.

1 Probe device 10 Fixing seat 101 First end face 102 Second end face 103 Side surface 104 Hollow portion 106 Hole slot 107 Groove 108 First signal interface 109 Second signal interface 11 Base 110 Outlet port 12 Coaxial probe 120 Needle body 121 first extension portion 122 second extension portion 123 third extension portion 124 needle tip portion 124a needle end 124b needle tip 20 test line 31 probe 32 mount 33, 34 signal interface 35 signal line L1 dielectric layer L2 ground layer Θ1 first angle θ2 second angle θ3 third angle AA hatching

[Fig. 1] is a side view of a conventional probe device. [Fig. 2] is an exploded perspective view showing an embodiment of a probe device according to the present invention. [Fig. 3] is an enlarged schematic view of the coaxial probe of Fig. 2. [Fig. 4] is a cross-sectional view of the coaxial probe taken along section line A-A in Fig. 2. [Fig. 5] is an enlarged schematic view of the coaxial probe and the fixing base of Fig. 2. [Fig. 6] is a schematic view showing the coaxial probe of Fig. 2 accommodated in the slot and the slot of the fixing base.

1 Probe device 10 Fixing block 101 First end face 102 Second end face 106 Hole slot 107 Groove 108 First signal interface 109 Second signal interface 11 Base 110 Outlet port 12 Coaxial probe 120 Probe body 121 First extension Portion 122 second extension portion 123 third extension portion 124 needle tip portion 124a needle end 124b needle tip AA hatching

Claims (14)

A probe device for electrically connecting a circuit to be tested and a test device, comprising: a coaxial probe, comprising a probe body, the probe body comprising a first extension, a second extension, a first a third extension portion and a needle tip portion, wherein the two ends of the second extension portion are respectively connected to the first extension portion and the third extension portion; the needle tip portion includes a needle tip end and a needle tail end, and the needle end portion is connected to the first end portion a third extension portion having a first angle between the second extension portion and the first extension portion, a second angle between the third extension portion and the second extension portion, the needle tip portion and the third extension portion a third angle between the portions; and a fixing base comprising a first end surface, a second end surface opposite to the first end surface, all the slots and a slot connected to the slot, the slot is formed in the slot The first end surface and the second extension portion are received in the slot, the slot extends from the first end surface toward the second end surface, and the first extension portion is inserted into the slot, so that The coaxial probe is detachably coupled to the mount. The probe device of claim 1, wherein an inner diameter of the slot is equal to a diameter of the first extension, and an inner diameter of the slot is equal to a diameter of the second extension. The probe device of claim 1, wherein the depth of the slot is greater than the radius of the second extension. The probe device of claim 1, wherein the fixing base further comprises a hollow portion, the hollow portion is located between the first end surface and the second end surface, and the two ends of the hole are respectively connected to the slit With the hollow portion. The probe device of claim 4, wherein the fixing base further comprises a side surface, the side surface is provided with a second signal interface, the second end surface is provided with a first signal interface, the first signal interface and the first The two signal interface is connected to the hollow portion. The probe device of claim 5, wherein the coaxial probe further comprises a dielectric layer and a ground layer, sequentially covering the outer surface of the probe body, and not completely shielding the tip portion and the first Extension. The probe device of claim 6, wherein the fixing base further comprises a base connected to the side surface of the fixing base, the base comprises an outlet port, the first signal interface and the second signal The interface faces the outlet. The probe device of claim 1, wherein the coaxial probe is composed of two consecutive N-shaped shapes, and the first extending portion, the second extending portion and the third extending portion constitute a first one The N-shaped portion is flipped 180 degrees and then turned 90 degrees to the right. The second extending portion, the third extending portion and the tip portion form a second N-shape. A coaxial probe includes a probe body, the probe body includes a dielectric layer, a ground layer, a first extension, a second extension, a third extension and a tip, the second The two ends of the extension are respectively connected to the first extension portion and the third extension portion; the needle tip portion includes a needle tip end and a needle tail end, the needle tail end is connected to the third extension portion; wherein the second extension portion Between the first extension and the second extension, a second angle is formed between the third extension and the third extension, and a third angle is formed between the tip and the third extension. The dielectric layer and the ground layer sequentially cover the outer surface of the probe body, and the needle tip portion and the first extension portion are not completely shielded. A probe device for electrically connecting a circuit to be tested and a test device, comprising: a coaxial probe, comprising a probe body, the probe body comprising a first extension, a second extension, a first a third extension portion and a needle tip portion, wherein the two ends of the second extension portion are respectively connected to the first extension portion and the third extension portion; the needle tip portion includes a needle tip end and a needle tail end, and the needle end portion is connected to the first end portion a third extension portion having a first angle between the second extension portion and the first extension portion, a second angle between the third extension portion and the second extension portion, the needle tip portion and the third extension portion a third angle between the portions; and a fixing base comprising a first end surface, a second end surface opposite to the first end surface, all the slots and a slot connected to the slot, the slot is formed in the slot The second end portion of the first end surface is received in the slot, the depth of the slot is greater than the radius of the second extension portion, and the slot extends from the first end surface toward the second end surface. The first extension is inserted into the slot. A probe device for electrically connecting a circuit to be tested and a test device, comprising: a coaxial probe, comprising a probe body, the probe body comprising a first extension, a second extension, a first a third extension portion and a needle tip portion, wherein the two ends of the second extension portion are respectively connected to the first extension portion and the third extension portion; the needle tip portion includes a needle tip end and a needle tail end, and the needle end portion is connected to the first end portion a third extension portion having a first angle between the second extension portion and the first extension portion, a second angle between the third extension portion and the second extension portion, the needle tip portion and the third extension portion a third angle between the portions; and a fixing base comprising a hollow portion, a first end surface, a second end surface opposite to the first end surface, all the slots, and a slot connected to the slot a groove is formed on the first end surface and the The second extension portion is received in the slot, the slot extends from the first end surface toward the second end surface, the first extension portion is inserted into the slot, and the hollow portion is located at the first slot Between the end surface and the second end surface, the two ends of the hole are respectively communicated with the slit and the hollow portion. The probe device of claim 11, wherein the fixing base further comprises a side surface, the side surface is provided with a second signal interface, the second end surface is provided with a first signal interface, the first signal interface and the first The two signal interface is connected to the hollow portion. The probe device of claim 12, wherein the coaxial probe further comprises a dielectric layer and a ground layer, sequentially covering the outer surface of the probe body, and not completely shielding the needle tip and the first Extension. The probe device of claim 13, wherein the fixing base further comprises a base connected to the side surface of the fixing base, the base comprises an outlet port, the first signal interface and the second signal The interface faces the outlet.