TWI577736B - Polyimide/zro2 hybrid material, its use and preparation thereof - Google Patents
Polyimide/zro2 hybrid material, its use and preparation thereof Download PDFInfo
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- TWI577736B TWI577736B TW105105836A TW105105836A TWI577736B TW I577736 B TWI577736 B TW I577736B TW 105105836 A TW105105836 A TW 105105836A TW 105105836 A TW105105836 A TW 105105836A TW I577736 B TWI577736 B TW I577736B
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- dianhydride
- bis
- aromatic
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- polyimine
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- 239000000463 material Substances 0.000 title claims description 51
- 238000002360 preparation method Methods 0.000 title description 8
- 239000004642 Polyimide Substances 0.000 title description 3
- 229920001721 polyimide Polymers 0.000 title description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 96
- 239000010408 film Substances 0.000 claims description 69
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 42
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 35
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 27
- 125000003118 aryl group Chemical group 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 19
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 claims description 14
- -1 naphthalenedioxy group Chemical group 0.000 claims description 14
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 13
- 125000005843 halogen group Chemical group 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 10
- 125000000524 functional group Chemical group 0.000 claims description 9
- 239000002243 precursor Substances 0.000 claims description 9
- 150000004984 aromatic diamines Chemical class 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000012788 optical film Substances 0.000 claims description 6
- OAXARSVKYJPDPA-UHFFFAOYSA-N tert-butyl 4-prop-2-ynylpiperazine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCN(CC#C)CC1 OAXARSVKYJPDPA-UHFFFAOYSA-N 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- DLFTXHQGYLRIPJ-UHFFFAOYSA-N 2-amino-5-[3-(4-amino-3-hydroxyphenoxy)naphthalen-2-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC1=CC2=CC=CC=C2C=C1OC1=CC=C(N)C(O)=C1 DLFTXHQGYLRIPJ-UHFFFAOYSA-N 0.000 claims description 2
- LUZIFKRALMZZMK-UHFFFAOYSA-N 2-amino-5-[4-(4-amino-3-hydroxyphenoxy)naphthalen-1-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC(C1=CC=CC=C11)=CC=C1OC1=CC=C(N)C(O)=C1 LUZIFKRALMZZMK-UHFFFAOYSA-N 0.000 claims description 2
- WVFPYWGUCQYBAQ-UHFFFAOYSA-N 2-amino-5-[5-(4-amino-3-hydroxyphenoxy)naphthalen-2-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC1=CC=C(C(OC=2C=C(O)C(N)=CC=2)=CC=C2)C2=C1 WVFPYWGUCQYBAQ-UHFFFAOYSA-N 0.000 claims description 2
- DIKFGSDAFLGRQQ-UHFFFAOYSA-N 2-amino-5-[7-(4-amino-3-hydroxyphenoxy)naphthalen-2-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC1=CC=C(C=CC(OC=2C=C(O)C(N)=CC=2)=C2)C2=C1 DIKFGSDAFLGRQQ-UHFFFAOYSA-N 0.000 claims description 2
- XFAJURDZYUCAEM-UHFFFAOYSA-N 2-amino-5-[8-(4-amino-3-hydroxyphenoxy)naphthalen-2-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC1=CC=C(C=CC=C2OC=3C=C(O)C(N)=CC=3)C2=C1 XFAJURDZYUCAEM-UHFFFAOYSA-N 0.000 claims description 2
- GWHLJVMSZRKEAQ-UHFFFAOYSA-N 3-(2,3-dicarboxyphenyl)phthalic acid Chemical compound OC(=O)C1=CC=CC(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O GWHLJVMSZRKEAQ-UHFFFAOYSA-N 0.000 claims description 2
- UCFMKTNJZCYBBJ-UHFFFAOYSA-N 3-[1-(2,3-dicarboxyphenyl)ethyl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)C1=CC=CC(C(O)=O)=C1C(O)=O UCFMKTNJZCYBBJ-UHFFFAOYSA-N 0.000 claims description 2
- PAHZZOIHRHCHTH-UHFFFAOYSA-N 3-[2-(2,3-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=CC(C(O)=O)=C(C(O)=O)C=1C(C)(C)C1=CC=CC(C(O)=O)=C1C(O)=O PAHZZOIHRHCHTH-UHFFFAOYSA-N 0.000 claims description 2
- IBFJDBNISOJRCW-UHFFFAOYSA-N 3-methylphthalic acid Chemical compound CC1=CC=CC(C(O)=O)=C1C(O)=O IBFJDBNISOJRCW-UHFFFAOYSA-N 0.000 claims description 2
- LJMPOXUWPWEILS-UHFFFAOYSA-N 3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1C2C(=O)OC(=O)C2CC2C(=O)OC(=O)C21 LJMPOXUWPWEILS-UHFFFAOYSA-N 0.000 claims description 2
- AIVVXPSKEVWKMY-UHFFFAOYSA-N 4-(3,4-dicarboxyphenoxy)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=C(C(O)=O)C(C(O)=O)=C1 AIVVXPSKEVWKMY-UHFFFAOYSA-N 0.000 claims description 2
- IWXCYYWDGDDPAC-UHFFFAOYSA-N 4-[(3,4-dicarboxyphenyl)methyl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1CC1=CC=C(C(O)=O)C(C(O)=O)=C1 IWXCYYWDGDDPAC-UHFFFAOYSA-N 0.000 claims description 2
- GEYAGBVEAJGCFB-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 GEYAGBVEAJGCFB-UHFFFAOYSA-N 0.000 claims description 2
- YGYCECQIOXZODZ-UHFFFAOYSA-N 4415-87-6 Chemical compound O=C1OC(=O)C2C1C1C(=O)OC(=O)C12 YGYCECQIOXZODZ-UHFFFAOYSA-N 0.000 claims description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 claims description 2
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 claims description 2
- RZDQZBKFRAYVDJ-UHFFFAOYSA-N NC1=C(C=C(OC2=C(C=CC3=CC=CC=C23)OC2=CC(=C(C=C2)N)O)C=C1)O Chemical compound NC1=C(C=C(OC2=C(C=CC3=CC=CC=C23)OC2=CC(=C(C=C2)N)O)C=C1)O RZDQZBKFRAYVDJ-UHFFFAOYSA-N 0.000 claims description 2
- JCYOICXLTURKMK-UHFFFAOYSA-N NC1=C(C=C(OC2=CC(=CC3=CC=CC=C23)OC2=CC(=C(C=C2)N)O)C=C1)O Chemical compound NC1=C(C=C(OC2=CC(=CC3=CC=CC=C23)OC2=CC(=C(C=C2)N)O)C=C1)O JCYOICXLTURKMK-UHFFFAOYSA-N 0.000 claims description 2
- FFYFXUJQYPWXOG-UHFFFAOYSA-N NC1=C(C=C(OC2=CC=CC3=CC=CC(=C23)OC2=CC(=C(C=C2)N)O)C=C1)O Chemical compound NC1=C(C=C(OC2=CC=CC3=CC=CC(=C23)OC2=CC(=C(C=C2)N)O)C=C1)O FFYFXUJQYPWXOG-UHFFFAOYSA-N 0.000 claims description 2
- 239000003377 acid catalyst Substances 0.000 claims description 2
- 125000001931 aliphatic group Chemical group 0.000 claims description 2
- CJYIPJMCGHGFNN-UHFFFAOYSA-N bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic acid Chemical compound C1C2C(C(O)=O)C(C(=O)O)C1C(C(O)=O)C2C(O)=O CJYIPJMCGHGFNN-UHFFFAOYSA-N 0.000 claims description 2
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 2
- 238000009833 condensation Methods 0.000 claims description 2
- WOSVXXBNNCUXMT-UHFFFAOYSA-N cyclopentane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1CC(C(O)=O)C(C(O)=O)C1C(O)=O WOSVXXBNNCUXMT-UHFFFAOYSA-N 0.000 claims description 2
- 239000012456 homogeneous solution Substances 0.000 claims description 2
- 238000006116 polymerization reaction Methods 0.000 claims description 2
- KOGUBMFIVMBXMN-UHFFFAOYSA-N 2-amino-5-[5-(4-amino-3-hydroxyphenoxy)naphthalen-1-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC(C1=CC=C2)=CC=CC1=C2OC1=CC=C(N)C(O)=C1 KOGUBMFIVMBXMN-UHFFFAOYSA-N 0.000 claims 1
- VVLNVHRJYJDBTK-UHFFFAOYSA-N 2-amino-5-[6-(4-amino-3-hydroxyphenoxy)naphthalen-2-yl]oxyphenol Chemical compound C1=C(O)C(N)=CC=C1OC1=CC=C(C=C(OC=2C=C(O)C(N)=CC=2)C=C2)C2=C1 VVLNVHRJYJDBTK-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 24
- 229910010413 TiO 2 Inorganic materials 0.000 description 13
- 238000010521 absorption reaction Methods 0.000 description 12
- 239000004408 titanium dioxide Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 239000006117 anti-reflective coating Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical group CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 4
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 4
- 238000000255 optical extinction spectrum Methods 0.000 description 4
- 150000004060 quinone imines Chemical class 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000002411 thermogravimetry Methods 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 3
- 150000004985 diamines Chemical class 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- 101710095395 Histidine decarboxylase proenzyme Proteins 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- BSDOQSMQCZQLDV-UHFFFAOYSA-N butan-1-olate;zirconium(4+) Chemical group [Zr+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] BSDOQSMQCZQLDV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000571 coke Substances 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000004736 wide-angle X-ray diffraction Methods 0.000 description 2
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- IANXAXNUNBAWBA-UHFFFAOYSA-N 2,2,3-trimethylundecane Chemical compound CCCCCCCCC(C)C(C)(C)C IANXAXNUNBAWBA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241001432959 Chernes Species 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical group [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 206010027146 Melanoderma Diseases 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009830 intercalation Methods 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 239000003880 polar aprotic solvent Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 1
- 238000001757 thermogravimetry curve Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000005809 transesterification reaction Methods 0.000 description 1
- 238000001392 ultraviolet--visible--near infrared spectroscopy Methods 0.000 description 1
- 238000002061 vacuum sublimation Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Description
本發明關於一種新穎的聚醯亞胺/二氧化鋯混成材料。特別係關於一種具有透過增加二氧化鋯含量而可調控折射率及阿貝數(Abbe’s number)之聚醯亞胺/二氧化鋯混成材料,其用途及其製備方法。 This invention relates to a novel polyamidiene/zirconia hybrid material. In particular, it relates to a polyimine/zirconium oxide mixed material having a refractive index and an Abbe's number which can be adjusted by increasing the content of zirconium dioxide, and the use thereof and a preparation method thereof.
近幾年來已有許多具有高折射率之聚合物已被廣泛的提出,以促進光電應用的進步。除了折射率之基礎參數以外,其他特徵例如雙折射率、阿貝數、光學透明度、加工性、熱穩定性等皆亦重要,且在實際光學應用時亦需要將其納入考慮。因此,達成上述的需求為一重要且持續存在的議題。聚醯亞胺(PIs)由於其優良的熱穩定性、化學耐受性及其優越的機械性能,使其為最有機會可應用於光學設備的候選物。此外,藉由分子結構的設計以及合成,可同時獲得優良加工性及光學性兼具的聚醯亞胺,使得聚醯亞胺光學材料成為值得深入探討的研究領域。當摻入聚合物主鏈時,芴及其衍生物具有龐大的體積及剛性結構,係為一種廣為人知可用於光學材料的候選物,並可減少PI鏈分子間的交互作用以及堆積密度,以增加相應PIs之透明度以及加工性。 Many polymers having a high refractive index have been widely proposed in recent years to promote advancement in photovoltaic applications. In addition to the basic parameters of the refractive index, other characteristics such as birefringence, Abbe number, optical transparency, processability, thermal stability, etc. are also important, and they need to be considered in practical optical applications. Therefore, achieving the above needs is an important and persistent issue. Polyimine (PIs), due to its excellent thermal stability, chemical resistance and superior mechanical properties, make it the most promising candidate for applications in optical devices. In addition, by designing and synthesizing the molecular structure, it is possible to simultaneously obtain a polyimine with excellent processability and optical properties, making the polyimide optical material a research field worthy of further investigation. When incorporated into the polymer backbone, ruthenium and its derivatives have a bulky and rigid structure, which is a well-known candidate for optical materials, and can reduce the interaction between the PI chain molecules and the bulk density to increase Correspondence and processability of the corresponding PIs.
近來,聚合物-無機物混合材料由於其相對於該單一聚合物或無機成分相比,具有優良的力學、熱學、磁學、光學、電子和光電性能, 因此亦吸引了大量的關注。於光學材料應用中,該無機物之無機域之直徑需控制在直徑小於40nm,以減少散射損失並維持其光學透明度。藉由溶膠-凝膠法使得其化學鍵結可藉由操作在各種分子及奈米尺度的有機/無機相互作用以克服奈米粒子之團聚現象,於先前的研究中,可藉由增加二氧化鈦之含量來達成具有高折射率之聚醯亞胺/二氧化鈦(TiO2)之混成物,然而,因為二氧化鈦的低能隙(3.2電子伏特)使其光學透明度於接近400nm波長範圍顯著減少,導致所獲得的聚醯亞胺/二氧化鈦混合膜呈現淺黃色。此外,PI/二氧化鈦混成材料之阿貝數亦隨著二氧化鈦含量降低而減少。因此,藉由選擇混成物中的無機材料種類,來增加折射率而不因此犧牲於阿貝數及可見光波長區間之光學透明度,是一項重要的議題。 Recently, polymer-inorganic hybrid materials have attracted a great deal of attention because of their excellent mechanical, thermal, magnetic, optical, electronic, and optoelectronic properties compared to the single polymer or inorganic component. In optical material applications, the inorganic domains of the inorganic material are controlled to have a diameter of less than 40 nm to reduce scattering losses and maintain their optical clarity. By sol-gel method, the chemical bonding can overcome the agglomeration of nanoparticle by operating organic/inorganic interactions at various molecular and nanometer scales. In previous studies, the content of titanium dioxide can be increased. To achieve a mixture of polythenimine/titanium dioxide (TiO 2 ) having a high refractive index, however, because the low energy gap (3.2 electron volts) of titanium dioxide causes its optical transparency to be significantly reduced in the wavelength range of approximately 400 nm, resulting in the obtained poly The quinone imine/titanium dioxide mixed film exhibited a pale yellow color. In addition, the Abbe number of the PI/titanium dioxide hybrid material also decreases as the titanium dioxide content decreases. Therefore, it is an important issue to increase the refractive index by selecting the kind of inorganic material in the mixture without sacrificing the optical transparency in the Abbe number and the visible wavelength range.
為解決上述問題,申請人意外發現二氧化鋯(ZrO2)由於其於5.0至5.85eV範圍之能隙(band gap)大,而使得其具有優越的組合性光學性質,例如高折射指數、阿貝數及於廣泛光譜範圍下的透明度。因此,本發明提供一種利用簡易的原位溶膠-凝膠法以製備光學透明聚醯亞胺/二氧化鋯(PI/ZrO2)混成物。該PI鏈之側氫氧基(pendent hydroxyl groups)可提供一有機-無機鍵結位點與正丁醇鋯(Zr(OBu)4)鍵結。因此,可成功地製備含有不同ZrO2含量之PI/ZrO2混成薄膜,使用於進階的光學之應用上。 In order to solve the above problems, the applicant unexpectedly discovered that zirconium dioxide (ZrO 2 ) has superior combined optical properties due to its large band gap in the range of 5.0 to 5.85 eV, such as high refractive index, Bayesian and transparency over a wide spectral range. Accordingly, the present invention provides a simple in situ sol-gel process for the preparation of optically clear polyimine/zirconium dioxide (PI/ZrO2) blends. The pendent hydroxyl groups of the PI chain provide an organic-inorganic bonding site bonded to zirconium n-butoxide (Zr(OBu) 4 ). Therefore, a PI/ZrO 2 mixed film containing different ZrO 2 contents can be successfully prepared for use in advanced optical applications.
因此,本發明之一主要目的在於提供一種由下述式(I)表示之聚醯亞胺/二氧化鋯混成材料,
於一較佳實施例中,其中該二氧化鋯係藉由聚醯亞胺之氫氧基與該聚醯亞胺鍵結,且其中該二氧化鋯之重量係佔該聚醯亞胺/二氧化鋯混成材料總重之至多60%。 In a preferred embodiment, the zirconium dioxide is bonded to the polyimine by a hydroxyl group of the polyimine, and wherein the weight of the zirconium dioxide accounts for the polyimine/two The total weight of the zirconia mixed material is at most 60%.
於另一較佳實施例中,其中該二氧化鋯之重量百分比係佔該聚醯亞胺/二氧化鋯混成材料總重之10%至50%。 In another preferred embodiment, the weight percentage of the zirconium dioxide is from 10% to 50% by weight based on the total weight of the polyamidene/zirconia mixed material.
於另一較佳實施例中,其在633nm波長下具有1.673至1.804範圍之折射率(refractive index)。 In another preferred embodiment, it has a refractive index ranging from 1.673 to 1.804 at a wavelength of 633 nm.
於另一較佳實施例中,其具有一阿貝數(Abbe’s number)介於20.65至32.18。 In another preferred embodiment, it has an Abbe's number between 20.65 and 32.18.
於另一較佳實施例中,其具有一雙折射率(birefringence)介於0.0071至0.0118。 In another preferred embodiment, it has a birefringence between 0.0071 and 0.0118.
本發明之另一主要目的在於提供一種製備聚醯亞胺/二氧化鋯混成材料之方法,其係包含一種如下列式(IX)之聚醯亞胺,
於一較佳實施例中,該方法包括下列步驟:(a)使含羥基之芳香族二胺與芳香族二酸酐在室溫至250℃之溫度範圍內進行反應,製備主鏈上含羥基之可溶性芳香族聚醯亞胺,其中該芳香族二胺及芳香族二酸酐之當量比(芳香族二胺/芳香族二酸酐)介於0.5至2.0之範圍;(b)接著使步驟(a)所得之主鏈上含羥基之可溶性芳香族聚醯亞胺與通式Zr(OR)4之烷氧化鋯(其中R為相同或不同且代表C1-6直鏈或分支鏈烷基)在酸催化劑及水存在下進行水解縮合反應(hydrolysis-condensation),獲得芳香 族或半芳香族聚醯亞胺-奈米氧化鋯混成材料均勻溶液,其中烷氧化鋯相對於主鏈上含羥基之可溶性芳香族或半芳香族聚醯亞胺所含之羥基之莫耳比(烷氧化鋯/羥基)在1~10之範圍內;及(c)將該芳香族或半芳香族聚醯亞胺-奈米氧化鋯混成材料均勻溶液塗佈成薄膜,獲得本發明之芳香族或半芳香族聚醯亞胺-奈米氧化鋯混成薄膜;其中該具有羥基之芳香族二胺係選自下列所組成組群之至少一種化合物:1,2-雙(4-胺基-3-羥基苯氧基)萘、1,3-雙(4-胺基-3-羥基苯氧基)萘、1,4-雙(4-胺基-3-羥基苯氧基)萘、1,5-雙(4-胺基-3-羥基苯氧基)萘、1,6-雙(4-胺基-3-羥基苯氧基)萘、1,7-雙(4-胺基-3-羥基苯氧基)萘、1,8-雙(4-胺基-3-羥基苯氧基)萘、2,3-雙(4-胺基-3-羥基苯氧基)萘、2,6-雙(4-胺基-3-羥基苯氧基)萘、2,7-雙(4-胺基-3-羥基苯氧基)萘、雙(3-胺基-4-羥基苯基)異全氟丙烷;其中該芳香族二酸酐係選自下列所組成之組群之至少一種化合物:4,4’-氧基二苯二甲酸酐、3,3’,4,4’-聯苯四羧酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、2,2’,3,3’-二苯甲酮四羧酸二酐、2,2’,3,3’-聯苯四羧酸二酐、2,2-雙(3,4-二羧基苯基)丙烷二酐、2,2-雙(2,3-二羧基苯基)丙烷二酐、2,2-雙(3,4-二羧基苯基)六氟異丙烷二酐、雙(3,4-二羧基苯基)醚二酐、雙(3,4-二羧基苯基)碸二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐、雙(2,3-二羧基苯基)甲烷二酐、雙(3,4-二羧基苯基)甲烷二酐;其中該脂肪族二酸酐係選自下列所組成之組群之至少一種化合物:1,2,3,4-環丁烷四甲酸二酐、1,2,3,4-環戊四羧酸二酐、1,2,4,5-環己烷四甲酸二酐、雙環[2.2.1]庚烷-2,3,5,6-四2,3:5,6-二酐(Bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic 2,3:5,6-dianhydrides)、雙環[2.2.2]辛烷-2,3-:5,6-四甲酸二酐(Bicyclo[2.2.2]octane-2,3:5,6-tetracarboxylic dianhydride)、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐 (Bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride)。 In a preferred embodiment, the method comprises the steps of: (a) reacting a hydroxyl group-containing aromatic diamine with an aromatic dianhydride at a temperature ranging from room temperature to 250 ° C to prepare a hydroxyl group in the main chain. a soluble aromatic polyimine wherein the equivalent ratio of the aromatic diamine to the aromatic dianhydride (aromatic diamine/aromatic dianhydride) is in the range of 0.5 to 2.0; (b) subsequently step (a) a hydroxyl-containing soluble aromatic polyimine on the obtained main chain and an alkoxy zirconium oxide of the formula Zr(OR) 4 (wherein R is the same or different and represents a C1-6 linear or branched alkyl group) in an acid catalyst Hydrolysis-condensation is carried out in the presence of water to obtain a homogeneous solution of an aromatic or semi-aromatic polyimine-nano-zirconia mixed material, wherein the zirconium alkoxide is soluble in a hydroxyl group-containing soluble aromatic group in the main chain. Or a semi-aromatic polyimine containing a molar ratio of hydroxyl groups (zirconium oxide/hydroxyl) in the range of 1 to 10; and (c) the aromatic or semi-aromatic polyimine-nano The zirconia mixed material is uniformly coated into a film to obtain the aromatic or semi-aromatic polymerization of the present invention. a quinone imine-nano zirconia mixed film; wherein the aromatic diamine having a hydroxyl group is at least one compound selected from the group consisting of 1,2-bis(4-amino-3-hydroxyphenoxy) Naphthalene, 1,3-bis(4-amino-3-hydroxyphenoxy)naphthalene, 1,4-bis(4-amino-3-hydroxyphenoxy)naphthalene, 1,5-bis (4) -amino-3-hydroxyphenoxy)naphthalene, 1,6-bis(4-amino-3-hydroxyphenoxy)naphthalene, 1,7-bis(4-amino-3-hydroxyphenoxy) Naphthalene, 1,8-bis(4-amino-3-hydroxyphenoxy)naphthalene, 2,3-bis(4-amino-3-hydroxyphenoxy)naphthalene, 2,6-bis (4) -amino-3-hydroxyphenoxy)naphthalene, 2,7-bis(4-amino-3-hydroxyphenoxy)naphthalene, bis(3-amino-4-hydroxyphenyl)isoperfluoropropane Wherein the aromatic dianhydride is at least one compound selected from the group consisting of 4,4'-oxydiphthalic anhydride, 3,3',4,4'-biphenyltetracarboxylic acid Anhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 2,2',3,3'-benzophenonetetracarboxylic dianhydride, 2,2',3,3 '-biphenyltetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)propane dianhydride, 2,2-bis(2,3-dicarboxyphenyl)propane dianhydride, 2, 2-bis(3,4-dicarboxyphenyl)hexafluoroisopropane dianhydride, double (3,4-dicarboxyphenyl)ether dianhydride, bis(3,4-dicarboxyphenyl)ruthenium anhydride, 1,1-bis(2,3-dicarboxyphenyl)ethane dianhydride, double (2,3-dicarboxyphenyl)methane dianhydride, bis(3,4-dicarboxyphenyl)methane dianhydride; wherein the aliphatic dianhydride is at least one compound selected from the group consisting of: 1 , 2,3,4-cyclobutane tetracarboxylic dianhydride, 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, bicyclo[2.2 .1] heptane-2,3,5,6-tetra-2,3:5,6-dianhydride (Bicyclo[2.2.1]heptane-2,3,5,6-tetracarboxylic 2,3:5,6 -dianhydrides), bicyclo[2.2.2]octane-2,3-:5,6-tetracarboxylic dianhydride (Bicyclo[2.2.2]octane-2,3:5,6-tetracarboxylic dianhydride), bicyclo[2.2 .2] Oct-7-ene-2,3,5,6-tetracarboxylic dianhydride (Bicyclo[2.2.2] oct-7-ene-2,3,5,6-tetracarboxylic dianhydride).
於一較佳實施例中,其中該二氧化鋯之前驅物為Zr(OY)4,其中該Y係為C1-4烷基。 In a preferred embodiment, wherein the zirconium dioxide precursor is Zr(OY) 4 , wherein the Y is a C 1-4 alkyl group.
本發明之另一主要目的在於提供一種聚醯亞胺/二氧化鋯混成材料之用途,其係用於作為一光學膜。 Another main object of the present invention is to provide a use of a polyamidene/zirconia hybrid material for use as an optical film.
根據本發明之內容,該無色且可撓聚醯亞胺可簡易地由含有芴之二胺及商業化二酐6FDA及CHDA製備而成。溶膠-凝膠反應中,聚醯亞胺鏈之氫氧基可提供一有機-無機鍵結位點與正丁醇鋯(Zr(OBu)4)鍵結。所得之PI/ZrO2混成材料之折射率及阿貝數係可藉由增加二氧化鋯之含量而調整,並且可分別提高至1.804及32.18。除此之外,這些PI/ZrO2混成薄膜由於ZrO2之大能隙使得其與相應的PI-TiO2系統相比,具有更高的光學透明度。更且,於該混成薄膜上以三層抗反射塗層,可於可見光範圍具有小於0.5%之反射率,因此此新穎的PI/ZrO2混成薄膜有極大的潛力可使用於進階光學之應用。 According to the present invention, the colorless and flexible polyimine can be easily prepared from a diamine containing hydrazine and a commercial dianhydride 6FDA and CHDA. In the sol-gel reaction, the hydroxyl group of the polyamidene chain provides an organic-inorganic bonding site bonded to zirconium n-butoxide (Zr(OBu) 4 ). The refractive index and Abbe number of the obtained PI/ZrO 2 mixed material can be adjusted by increasing the content of zirconium dioxide, and can be increased to 1.804 and 32.18, respectively. In addition, these PI/ZrO 2 mixed films have higher optical transparency than the corresponding PI-TiO 2 system due to the large energy gap of ZrO 2 . Moreover, the three-layer anti-reflective coating on the hybrid film can have a reflectance of less than 0.5% in the visible light range, so the novel PI/ZrO 2 mixed film has great potential for application in advanced optics. .
圖1為代表性可撓且高透明PI薄膜FOH-6FPI以及混成薄膜sF-6FZr30及F-6FZr50(厚度19±3μm)。 Figure 1 shows a representative flexible and highly transparent PI film FOH-6FPI and mixed films sF-6FZr30 and F-6FZr50 (thickness 19 ± 3 μm).
圖2為代表性可撓且高透明PI薄膜FOH-CHPI以及混成薄膜F-CHZr50(厚度19±3μm)。 2 is a representative flexible and highly transparent PI film FOH-CHPI and a mixed film F-CHZr50 (thickness 19±3 μm).
圖3為PI及混成薄膜(a)FOH-6FPI、(b)FOH-CHPI、(c)F-6FZr50及(d)F-CHZr50之傅氏紅外線光譜(FTIR spectra)。 3 is a FTIR spectrum of PI and mixed films (a) FOH-6FPI, (b) FOH-CHPI, (c) F-6FZr50, and (d) F-CHZr50.
圖4為FOH-6FPI及該混成薄膜分別於(a)氮氣、(b)空氣之 TGA溫度記錄圖。 Figure 4 shows FOH-6FPI and the mixed film in (a) nitrogen, (b) air TGA temperature record.
圖5為FOH-6FPI混成薄膜於加熱速率10℃/min狀態下之TMA曲線。 Fig. 5 is a TMA curve of a FOH-6FPI mixed film at a heating rate of 10 ° C/min.
圖6分別為F-6FTiX及F-6FZrX混成厚膜(a)、(b)(厚度:19±3μm);及薄膜(c)、(d)(厚度:500至600nm)之光學透射光譜。 Fig. 6 is an optical transmission spectrum of a thick film (a), (b) (thickness: 19 ± 3 μm), and a film (c), (d) (thickness: 500 to 600 nm) of F-6FTiX and F-6FZrX, respectively.
圖7為(a)ZrO2及TiO2(厚度:200至300nm)之UV-可見光吸收光譜,(b)ZrO2及TiO2薄膜(厚度:100±15nm)之光學透射光譜(100wt%之ZrO2及TiO2係分別由Zr(OBu)4及Ti(OBu)4藉溶膠-凝膠反應加熱至300℃而形成)。 Figure 7 is a (a) UV-visible absorption spectrum of ZrO 2 and TiO 2 (thickness: 200 to 300 nm), and (b) optical transmission spectrum of ZrO 2 and TiO 2 film (thickness: 100 ± 15 nm) (100 wt% of ZrO2) And the TiO2 system is formed by heating Zr(OBu) 4 and Ti(OBu) 4 by a sol-gel reaction to 300 ° C, respectively.
圖8為F-CHZrX混成(a)厚膜(厚度:19±3μm)、(b)薄膜(厚度:500-600nm)之光學透射光譜。 Figure 8 is an optical transmission spectrum of F-CHZrX mixed (a) thick film (thickness: 19 ± 3 μm), (b) film (thickness: 500 - 600 nm).
圖9為(a)F-6FTiX及(b)F-6FZrX混成薄膜在不同波長下之折射率差異。其中該插入圖示為在633nm波長下,折射率隨二氧化鈦含量隨之變化情形。 Figure 9 is a graph showing the difference in refractive index of (a) F-6FTiX and (b) F-6FZrX mixed films at different wavelengths. The insertion is shown in the case where the refractive index changes with the titanium dioxide content at a wavelength of 633 nm.
圖10為F-6FZr50之混成薄膜之TEM影像。 Figure 10 is a TEM image of a mixed film of F-6FZr50.
圖11為具有三層抗反射塗層之玻璃片在各種不同波長下之反射率變化。 Figure 11 is a graph showing the change in reflectance of a glass sheet having a three-layer anti-reflective coating at various wavelengths.
本發明之聚醯亞胺/二氧化鋯混成材料Polyimine/zirconium dioxide mixed material of the invention
本發明之一主要目的在於提供一種由下述式(I)表示之聚醯亞胺/二氧化鋯混成材料,
本發明之聚醯亞胺/二氧化鋯混成材料之折射率及阿貝數係可藉由增加其中二氧化鋯之含量而調整,並且可分別提高至1.804及32.18。 The refractive index and Abbe number of the polyamidene/zirconia mixed material of the present invention can be adjusted by increasing the content of zirconium dioxide therein, and can be increased to 1.804 and 32.18, respectively.
本發明之製備聚醯亞胺/二氧化鋯混成材料之方法Method for preparing polyimine/zirconium oxide mixed material of the invention
本發明之另一主要目的在於提供一種製備聚醯亞胺/二氧化鋯混成材料之方法,其係包含一種如下列式(IX)之聚醯亞胺,
於一較佳實施例中,其中該二氧化鋯之前驅物為Zr(OY)4,其中該Y係為C1-4烷基,且各該複數個Y可為相同或不同。ZrO2之前驅物作為範例可包含但不限制為四甲氧化鋯、四乙氧化鋯、四丙氧化鋯、四異丙氧化鋯、四丁氧化鋯、四異丁氧化鋯。然而,基於容易獲得之觀點,各該Y較佳為相同。為了避免酯交換反應,Zr(OY)4較佳係溶解於相應於Y之碳數之醇類作為溶劑,例如,當R為甲基時,係使用甲醇作為溶劑;若R為丁基時,使用丁醇作為溶劑。 In a preferred embodiment, wherein the zirconium dioxide precursor is Zr(OY) 4 , wherein the Y is C 1-4 alkyl, and each of the plurality Y may be the same or different. Examples of the ZrO 2 precursor may include, but are not limited to, tetramethyl zirconia, tetraethylene zirconia, tetrapropoxide zirconia, tetraisopropoxide zirconia, tetrabutyl zirconia, and tetraisobutyl zirconia. However, each Y is preferably the same based on the viewpoint of easy availability. In order to avoid the transesterification reaction, Zr(OY) 4 is preferably dissolved in an alcohol corresponding to the carbon number of Y as a solvent, for example, when R is a methyl group, methanol is used as a solvent; and if R is a butyl group, Butanol was used as a solvent.
於本發明之混成材料之製備方法中,該可進行水解-縮合反應之酸性條件係指pH範圍為4至7,並可藉由加入酸,例如乙酸或HCl進行調整。 In the preparation method of the mixed material of the present invention, the acidic condition which can carry out the hydrolysis-condensation reaction means a pH in the range of 4 to 7, and can be adjusted by adding an acid such as acetic acid or HCl.
本發明之聚醯亞胺/二氧化鋯混成材料之用途Use of the polyamidene/zirconia mixed material of the present invention
本發明之另一主要目的在於提供一種聚醯亞胺/二氧化鋯混成材料之用途,其係用於作為一光學膜。該聚醯亞胺/ZrO2混成薄膜由於ZrO2 之大能隙而具有高透明度。除此之外,該聚醯亞胺/ZrO2混成薄膜可用於做為多層抗反射塗層,其係於可見光範圍內具有小於0.5%之反射率。因此,該聚醯亞胺/ZrO2混成薄膜具有極大的潛力可使用於進階光學之應用。 Another main object of the present invention is to provide a use of a polyamidene/zirconia hybrid material for use as an optical film. The polyimine/ZrO 2 mixed film has high transparency due to the large energy gap of ZrO 2 . In addition, the polyimine/ZrO 2 mixed film can be used as a multilayer anti-reflective coating having a reflectance of less than 0.5% in the visible range. Therefore, the polyimine/ZrO 2 mixed film has great potential for use in advanced optics applications.
欲由聚醯亞胺/二氧化鋯混成材料製備聚醯亞胺/ZrO2混成薄膜,可於真空狀態下使用溶膠-凝膠法進行階段性加熱。術語「階段性加熱」意即用於固化該混成材料於兩種或兩種以上溫度並且皆維持一段時間之過程(例如,加熱至300℃)。舉例而言,該混成材料係在60℃下進行1至8小時之第一預烘烤階段,隨後於150℃下進行60至180分鐘之烘烤,接下來以250℃烘烤60至120分鐘,最後,於300℃下烘烤60至120分鐘。所獲得的固化混成材料可選擇更進一步於100℃水中進行一水熱製程(hydrothermal process),取決於該無機奈米顆粒前驅物的類型。最後,將該所得之材料於真空烘箱中以100℃乾燥5至8小時。 To prepare a polyimine/ZrO 2 mixed film from a polyimine/zirconium oxide mixed material, the sol-gel method can be used for stepwise heating under vacuum. The term "stage heating" means a process for curing the mixed material at two or more temperatures and for a period of time (for example, heating to 300 ° C). For example, the mixed material is subjected to a first prebaking stage of 1 to 8 hours at 60 ° C, followed by baking at 150 ° C for 60 to 180 minutes, followed by baking at 250 ° C for 60 to 120 minutes. Finally, bake at 300 ° C for 60 to 120 minutes. The solidified hybrid material obtained may optionally be subjected to a hydrothermal process in water at 100 ° C depending on the type of the inorganic nanoparticle precursor. Finally, the obtained material was dried in a vacuum oven at 100 ° C for 5 to 8 hours.
此外,本發明之聚醯亞胺/二氧化鋯混成材料系可溶於各種溶劑,例如:一極性非質子溶劑,例如,N-甲基-2-吡咯烷酮(N-methyl-2-pyrrolidone(NMP))、二甲基乙醯胺(dimethylacetamide(DMAc))、N,N-二甲基甲醯胺(N,N-dimethylformamide(DMF))和二甲基亞碸(dimethyl sulfoxide(DMSO)),並且可使用各種方法製造該聚醯亞胺/二氧化鋯混成薄膜,例如旋塗或噴墨等。 Further, the polyimine/zirconium oxide mixed material of the present invention is soluble in various solvents such as a polar aprotic solvent such as N-methyl-2-pyrrolidone (NMP). )), dimethylacetamide (DMAc), N,N-dimethylformamide (DMF) and dimethyl sulfoxide (DMSO), Further, the polyimine/zirconium oxide mixed film can be produced by various methods, such as spin coating or ink jet.
以下實施例不應視為過度地限制本發明。本發明所屬技術領域中具有通常知識者可在不背離本發明之精神或範疇的情況下對本文所討論之實施利進行修改及變化,而仍屬於本發明之範疇。 The following examples are not to be construed as limiting the invention in any way. Modifications and variations of the embodiments discussed herein may be made without departing from the spirit and scope of the invention, and still fall within the scope of the invention.
實施例Example
材料material
9,9-雙(4-(4-胺基-3-苄氧基苯氧基)苯基)芴係由先前技術文獻所揭示之方法(Chern,Y.T.U.S.Patent 20060241187,2006)製備。2,2-雙(3,4-二羧基苯基)六氟亞異丙基二甲酸酐(6FDA)(Chriskev)係由真空昇華法純化。其他所使用之試劑來源皆為商業化產品。聚(o-羥基-醯亞胺)s,FOH-6FPI及FOH-CHPI係由先前技術所揭示之方法製備(Yen,H.J.;Tsai,C.L.;Wang,P.H.;Lin,J.J.;Liou,G.S.RSC Adv.,2013,3,17048-17056;Tsai,C.L.;Chen,C.J.;Wang,P.H.;Lin,J.J.;Liou,G.S.Polym.Chem.,2013,4,4570-4573),其流程如下列流程圖1所示:
利用合成FOH-6FPI作為一範例說明一般製備聚醯亞胺之流程(流程圖1)。該二胺F-DA(1.12g,2.00mmol)、二酐6FDA(0.89g,2.00mmol)之化學劑量混合物以及數滴於間甲酚(m-cresol)之異奎林(isoquinoline)(7mL)在氮氣環境下於室溫攪拌5小時,然後將混合物升溫至170至180℃並保持於該溫度16小時。在這個期間,於該醯亞胺化過程中所產生的水可與間甲酚共同移除。溶液冷卻至室溫後,將該黏性溶液緩慢倒入300mL之甲醇溶液 中,並同時攪拌。藉由過濾收集沉澱的聚合物,並以熱甲醇充分清洗,再於真空環境下以150℃烘乾15小時。所獲得之聚醯亞胺FOH-6FPI之固有黏度為0.71dL/g(於30℃、DMAc之濃度為0.5g/dL狀態下測量)。FOH-6FPI(薄膜狀態)之紅外線光譜於3000至3700cm-1(O-H拉伸)具有廣泛的吸收帶,且醯亞胺之特徵吸收峰係於1782(非對稱C=O)、1718(對稱C=O)、1388(C-N)、1357(C-F)及747cm-1(醯亞胺環形變);產率:98%。 The general procedure for the preparation of polyimine is illustrated using synthetic FOH-6FPI as an example (Scheme 1). A chemical dose mixture of the diamine F-DA (1.12 g, 2.00 mmol), dianhydride 6FDA (0.89 g, 2.00 mmol) and a few drops of isoquinoline (7 mL) of m-cresol The mixture was stirred at room temperature for 5 hours under a nitrogen atmosphere, and then the mixture was heated to 170 to 180 ° C and maintained at this temperature for 16 hours. During this period, the water produced during the imidization can be removed together with m-cresol. After the solution was cooled to room temperature, the viscous solution was slowly poured into 300 mL of a methanol solution while stirring. The precipitated polymer was collected by filtration, washed thoroughly with hot methanol, and dried at 150 ° C for 15 hours under vacuum. The intrinsic viscosity of the obtained polyimine FOH-6FPI was 0.71 dL/g (measured at 30 ° C and the concentration of DMAc was 0.5 g/dL). The infrared spectrum of FOH-6FPI (thin film state) has a broad absorption band at 3000 to 3700 cm -1 (OH stretching), and the characteristic absorption peak of quinone imine is 1782 (asymmetric C=O), 1718 (symmetric C) =O), 1388 (CN), 1357 (CF) and 747 cm -1 (rhodium imine ring); Yield: 98%.
實施例1:製備PI/ZrO2混成材料 Example 1: Preparation of PI/ZrO 2 mixed material
製備PI/ZrO2混成材料,以F-6FZr50為例,來描述製備混成材料F-6FZrX的一般合成路徑(流程圖2)。 A PI/ZrO 2 mixed material was prepared, and a general synthetic route for preparing the mixed material F-6FZrX was described using F-6FZr 50 as an example (Scheme 2).
首先,將0.05g(0.050mmole)之FOH-6FPI溶於3ml DMAc,而後將0.10ml之乙酸非常緩慢地加入PI溶液,並進一步於室溫環境下攪拌30分鐘。接著,將0.21ml(0.62mmole)之Zr(OBu)4溶於丁醇並以注射器逐滴加入上述溶液中,並於室溫下攪拌30分鐘。最後,將所得之F-6FZr50前驅溶液 經由0.45mm之PTFE過濾並倒入6cm之玻璃培養皿。 First, 0.05 g (0.050 mmole) of FOH-6FPI was dissolved in 3 ml of DMAc, and then 0.10 ml of acetic acid was added to the PI solution very slowly, and further stirred at room temperature for 30 minutes. Next, 0.21 ml (0.62 mmole) of Zr(OBu) 4 was dissolved in butanol and added dropwise to the above solution with a syringe, and stirred at room temperature for 30 minutes. Finally, the obtained F-6FZr50 precursor solution was filtered through 0.45 mm of PTFE and poured into a 6 cm glass petri dish.
實驗例1:製備PI/ZrO2混成薄膜 Experimental Example 1: Preparation of PI/ZrO 2 mixed film
由實例1所製備而成之PI/ZrO2混成材料更進一步加工製程PI/ZrO2混成薄膜。厚度19±3μm之混成薄膜可由在真空狀態下以隨後的加熱程序,於室溫6小時、60℃進行6小時、150℃進行3小時、250℃進行1小時以及300℃進行1小時處理而獲得。具有不同二氧化鋯含量之可撓且透明之PI/ZrO2混成光學薄膜皆可成功製備。此外,該薄混成薄膜(厚度:500-600nm)亦可藉由旋塗法以1000-3000rpm進行30秒塗佈於玻璃板或矽晶片上以,並以上述隨後加熱程序方法製備。 The PI/ZrO 2 mixed material prepared in Example 1 was further processed into a process PI/ZrO 2 mixed film. The mixed film having a thickness of 19 ± 3 μm can be obtained by subjecting to a subsequent heating procedure at room temperature for 6 hours, 60 ° C for 6 hours, 150 ° C for 3 hours, 250 ° C for 1 hour, and 300 ° C for 1 hour. . Flexible and transparent PI/ZrO 2 hybrid optical films with different zirconium oxide contents can be successfully prepared. Further, the thin mixed film (thickness: 500-600 nm) can also be applied to a glass plate or a tantalum wafer by spin coating at 1000-3000 rpm for 30 seconds, and is prepared by the above-described subsequent heating procedure.
比較例1:製備100wt%二氧化鋯及二氧化鈦薄膜 Comparative Example 1: Preparation of 100 wt% zirconium dioxide and titanium dioxide film
利用下列步驟製備純二氧化鋯膜:將7.7g(0.02mole)之Zr(OBu)4以及15ml丁醇加入50ml圓底燒瓶中。接著,將乙酸緩慢加入上述Zr(OBu)4溶液中並於室溫下攪拌1小時。為製備二氧化鋯薄膜,係先將該前驅溶液利用0.2mm之PTFE過濾器過濾,再以1000rpm旋轉塗佈方式於玻璃板或矽晶片上塗佈30秒。最後,該塗層薄膜更進一步利用多步驟加熱程序,分別以60℃處理30分鐘、150℃處理30分鐘、250℃處理30分鐘以及300℃處理60分鐘,以獲得無機薄膜。此外,二氧化鈦薄膜之製備使用如同先前技術所揭示之方法(Su,H.W.;Chen,W.C.J.Mater.Chem.,2008,18,1139-1145),但於此例中僅加熱至300℃。 A pure zirconium dioxide film was prepared by the following procedure: 7.7 g (0.02 mole) of Zr(OBu) 4 and 15 ml of butanol were placed in a 50 ml round bottom flask. Next, acetic acid was slowly added to the above Zr(OBu) 4 solution and stirred at room temperature for 1 hour. To prepare a zirconium dioxide film, the precursor solution was first filtered through a 0.2 mm PTFE filter, and then coated on a glass plate or a tantalum wafer by spin coating at 1000 rpm for 30 seconds. Finally, the coated film was further processed by a multi-step heating process at 60 ° C for 30 minutes, 150 ° C for 30 minutes, 250 ° C for 30 minutes, and 300 ° C for 60 minutes to obtain an inorganic film. Further, the titanium dioxide film was prepared using the method disclosed in the prior art (Su, HW; Chen, WC J Mater. Chem., 2008, 18, 1139-1145), but in this case only heated to 300 °C.
量測Measure
以珀金埃爾默(PerkinElmer)光譜100光譜儀紀錄傅立葉轉換紅外線光譜(FT-IR)。利用JEOL JNM-AL 300MHz光譜儀測量於DMSO-d 6 之 1H光譜,使用四甲基矽烷作為內部基準,波峰的多重性以下列方式表示:d,雙重;m,多重。使用Tamson TV-2000黏度計於30℃下濃度0.5g/dl以測試其之固有黏度。以TA裝置Q50進行熱重分析(TGA)。實驗的進行係將約6至8mg之薄膜樣品於流動的氮氣或空氣中加熱(流速20cm3/min),加熱速率為20℃/min。以膨脹計(TA儀器TMA Q400EM)測量熱膨脹係數(CTE)與玻璃化轉化溫度(Tg)。該TMA實驗之實施係施以50mN之恆定負載量於以可拉伸探針,在50至450℃下以10℃/min之掃描速率進行。Tg為TMA軌跡中探針位移之起始溫度。CTE之數據係由可拉伸探針於張力模式下以50至200℃之溫度範圍測量所獲得。聚合物薄膜之紫外光-可見光(UV-Vis)光譜係以日立U4100 UV-Vis-NIR分光光度計紀錄。以橢圓偏光儀(SOPRA,GES-5E)以波長範圍300至800nm來測量所製備膜的折射率(n)。亦同時確定所製備膜之厚度(h)。於二氧化矽基底形成之膜之面內(n TE)及面外(n TM)折射率係利用一棱鏡耦合器(Metricon,PC-2000)以波長632.8nm於室溫下測量。該面內/面外雙折射率(△n)係以△n=n TE-n TM方式計算。廣角X射線衍射(WAXD)之測量係於室溫(25℃)使用石墨-單色化Cu-Kα射線,以PANalytical-X’Pert PRO MPD X-射線衍射儀進行測量(40kV,20mA)。利用JOEL JEM-1230透射電子顯微鏡(TEM)檢查所製備之膜的微結構。 Fourier transform infrared spectroscopy (FT-IR) was recorded on a PerkinElmer Spectrometer 100 spectrometer. The 1 H spectrum of DMSO- d 6 was measured using a JEOL JNM-AL 300 MHz spectrometer using tetramethyl decane as an internal reference, and the multiplicity of peaks was expressed in the following manner: d, double; m, multiple. The intrinsic viscosity was tested using a Tamson TV-2000 viscometer at a concentration of 0.5 g/dl at 30 °C. Thermogravimetric analysis (TGA) was performed with TA device Q50. The experiment was carried out by heating about 6 to 8 mg of the film sample in flowing nitrogen or air (flow rate 20 cm 3 /min) at a heating rate of 20 ° C/min. The coefficient of thermal expansion (CTE) and the glass transition temperature (Tg) were measured by a dilatometer (TA Instruments TMA Q400EM). The TMA experiment was carried out at a constant loading of 50 mN on a stretchable probe at 50 to 450 °C at a scan rate of 10 °C/min. Tg is the onset temperature of the probe displacement in the TMA trace. The CTE data is obtained from a tensile probe in a tensile mode at a temperature range of 50 to 200 °C. The ultraviolet-visible (UV-Vis) spectrum of the polymer film was recorded on a Hitachi U4100 UV-Vis-NIR spectrophotometer. The refractive index (n) of the prepared film was measured with an ellipsometer (SOPRA, GES-5E) at a wavelength range of 300 to 800 nm. The thickness (h) of the prepared film was also determined at the same time. The in-plane ( n TE ) and out-of-plane ( n TM ) refractive indices of the film formed on the ceria substrate were measured using a prism coupler (Metricon, PC-2000) at a wavelength of 632.8 nm at room temperature. The in-plane/out-of-plane birefringence (? n ) is calculated as Δ n = n TE - n TM . Wide-angle X-ray diffraction (WAXD) was measured at room temperature (25 ° C) using graphite-monochromated Cu-Kα ray and measured with a PANalytical-X'Pert PRO MPD X-ray diffractometer (40 kV, 20 mA). The microstructure of the prepared film was examined using a JOEL JEM-1230 transmission electron microscope (TEM).
結果result
基本特徵Basic Features
FOH-6FPI的合成係以單步驟法,藉由羥基取代之二胺單體F-DA及芳香四羧酸二酐6FDA並以異喹啉作為催化劑存在的情況下以170-180℃合成,如流程圖1所示。藉由FTIR及NMR確認FOH-6FPI的形成。 FOH-6FPI膜之FTIR光譜顯示其於3000至3700cm-1(O-H拉伸)具有寬廣的吸收帶、醯亞胺特徵吸收峰於1782(非對稱C=O)、1718(對稱C=O)、1388(C-N)、1357(C-F)以及747cm-1(醯亞胺環變形),顯示於圖3(a)。此外,混成薄膜F-6FZr50之IR光譜(圖3(c))於600至650cm-1顯示額外的吸收帶(Zr-O-Zr)。該1H NMR之結果(DMSO-d 6 ,δ,ppm):FOH-6FPI 6.51(d,4H),7.01(d,4H),7.20(m,6H),7.40(m,6H),7.73(S,2H),7.93(d,4H),8.12(d,2H),10.03(s,2H,OH)。所獲得之聚醯亞胺之固有黏度及溶解度表現總結於表1。FOH-6FPI於一般有機溶劑中顯示其具有良好的溶解度。因此,FOH-6FPI可作為溶劑澆鑄形成可撓、透明且強韌的薄膜(圖1)。 The synthesis of FOH-6FPI is carried out in a single-step process by using a hydroxy-substituted diamine monomer F-DA and an aromatic tetracarboxylic dianhydride 6FDA and using isoquinoline as a catalyst in the presence of 170-180 ° C, such as Flow chart 1 is shown. The formation of FOH-6FPI was confirmed by FTIR and NMR. The FTIR spectrum of FOH-6FPI film shows that it has a broad absorption band at 3000 to 3700 cm -1 (OH stretching), and the characteristic absorption peak of quinone imine is 1782 (asymmetric C=O), 1718 (symmetric C=O), 1388 (CN), 1357 (CF), and 747 cm -1 (deuterium ring deformation) are shown in Fig. 3(a). Further, the IR spectrum of the mixed film F-6FZr50 (Fig. 3(c)) showed an additional absorption band (Zr-O-Zr) at 600 to 650 cm -1 . The result of the 1H NMR (DMSO- d 6 , δ, ppm): FOH-6FPI 6.51 (d, 4H), 7.01 (d, 4H), 7.20 (m, 6H), 7.40 (m, 6H), 7.73 (S) , 2H), 7.93 (d, 4H), 8.12 (d, 2H), 10.03 (s, 2H, OH). The intrinsic viscosity and solubility properties of the obtained polyimine are summarized in Table 1. FOH-6FPI has been shown to have good solubility in common organic solvents. Therefore, FOH-6FPI can be cast as a solvent to form a flexible, transparent and strong film (Fig. 1).
混成薄膜由PI及二氧化鋯前驅物之製造過程描繪於流程圖2中。可成功製備出具有不同二氧化鋯含量之可撓、透明及同質的PI-奈米-二氧化鋯(F-6FZrX)混成光學薄膜。F-6FZr50厚光學混成薄膜之外觀顯示於圖1。 The hybrid film is depicted in Flowchart 2 by the manufacturing process of PI and zirconia precursors. A flexible, transparent and homogeneous PI-nano-zirconia (F-6FZrX) hybrid optical film having different zirconium oxide contents can be successfully prepared. The appearance of the F-6FZr50 thick optical hybrid film is shown in Figure 1.
除此之外,可成功製備具有不同二氧化鋯含量之該可撓、透明且同質PI/ZrO2(F-CHZrX)混成光學薄膜,且該F-CHZr50厚光學混成薄膜之外觀亦顯示於圖2。該FOH-CHPI及F-CHZr50薄膜之FTIR光譜(圖3(b)、3(d))顯示其具有於3000-3700cm-1(O-H官能基)之一寬廣的吸收帶,以及醯 亞胺特徵吸收峰分別於1779cm-1(非對稱C=O官能基)、1719cm-1(對稱C=O官能基)、1388cm-1(C-N)、748cm-1(醯亞胺環變形)。該PI/ZrO2薄膜,F-CHZr50於2750-3700cm-1之吸收峰可能係由於二氧化鋯之氫氧基團所貢獻。此外,無機Zr-O-Zr鍵結亦可於600-650cm-1觀察到,與先前之研究報導相同(Lo'pez,E.F.;Escribano,V.S.;Panizza,M.;Carnascialic,M.M.;Busca,G.,J.Mater.Chem.,2001,11,1891-1897;Bansal,V.;Rautaray,D.;Ahmad,A.;Sastry,M.J.Mater.Chem.,2004,14,3303-3305.)。 In addition, the flexible, transparent and homogeneous PI/ZrO 2 (F-CHZrX) hybrid optical film having different zirconium oxide contents can be successfully prepared, and the appearance of the F-CHZr50 thick optical hybrid film is also shown in the figure. 2. The FTIR spectra of the FOH-CHPI and F-CHZr50 films (Fig. 3(b), 3(d)) show that they have a broad absorption band of 3000-3700 cm -1 (OH functional group), and the quinone imine characteristics. absorption peaks at 1779cm -1 (C = O asymmetric functional group), 1719cm -1 (C = O functional group symmetry), 1388cm -1 (CN), 748cm -1 ( deformation ring (PEI)). The PI/ZrO 2 film, the absorption peak of F-CHZr50 at 2750-3700 cm -1 may be contributed by the hydroxyl group of zirconium dioxide. In addition, inorganic Zr-O-Zr linkages can also be observed at 600-650 cm -1 , as reported in previous studies (Lo ' pez, EF; Escribano, VS; Panizza, M.; Carnascialic, MM; Busca, G J. Mater. Chem. , 2001, 11, 1891-1897; Bansal, V.; Rautaray, D.; Ahmad, A.; Sastry, M. J. Mater. Chem. , 2004, 14, 3303-3305 .).
熱性能Thermal performance
經TGA、TMA評估聚醯亞胺-二氧化鋯混成物((F-6FZrX,F-CHZrX)及聚醯亞胺-二氧化鈦(F-6FTiX)之結果列於表2。於氮氣及空氣中,F-6FZrX典型的TGA曲線(圖4)皆展現優良的熱穩定性且碳化殘餘物量(焦炭產率)亦隨著二氧化鋯的含量增加而增加。混成材料中的二氧化鋯含量可藉由在空氣流中的焦炭產率來估計,與理論相符且成功的確保該二氧化鋯的摻入。另一方面,低於400℃前,這些PI/ZrO2混成材料不會有初始重量的降低的情形,更進一步提供了有機-無機完全鍵結的證據。FOH-6FPI的典型TMA溫度記錄圖及該相應的混成材料顯示該玻璃轉化溫度隨著二氧化鋯的含量由257℃增加至358℃(圖5)。同時,熱膨脹係數(CTE)為將聚合物膜應用於微電子領域的一項種重要的指數。測量純PI薄膜以及PI/ZrO2或PI/TiO2混成薄膜之CTE並總結於表2。一般來說,無機增強組成分相較於有機基質,經常展現較低的CTE值,其抑制了所獲得之混成材料的CTE值。因此,有機-無機混成物之CTE值隨該無機增強物的容積率增加而降低。此外,在此實驗中,當同一聚醯亞胺混成薄膜加入相同含量但不同種類的無機奈 米粒子,該混成薄膜亦具有相似的熱特性。 The results of evaluation of polyimine-zirconium oxide mixture ((F-6FZrX, F-CHZrX) and polyamidino-titanium dioxide (F-6FTiX) by TGA and TMA are shown in Table 2. In nitrogen and air, The typical TGA curve of F-6FZrX (Fig. 4) shows excellent thermal stability and the amount of carbonized residue (coke yield) also increases with the increase of the content of zirconium dioxide. The content of zirconium dioxide in the mixed material can be The coke yield in the air stream is estimated to be consistent with the theory and successfully ensured the incorporation of the zirconium dioxide. On the other hand, these PI/ZrO 2 blends do not have an initial weight reduction before 400 ° C. The case further provides evidence of organic-inorganic complete bonding. A typical TMA temperature record of FOH-6FPI and the corresponding hybrid material show that the glass transition temperature increases from 257 ° C to 358 ° C with the zirconium dioxide content. (Fig. 5). At the same time, the coefficient of thermal expansion (CTE) is an important index for the application of polymer films in the field of microelectronics. The CTE of pure PI film and PI/ZrO 2 or PI/TiO 2 mixed film is measured and summarized. In Table 2. In general, the inorganic reinforcing component is more phase-separated than the organic matrix, often The lower CTE value, which suppresses the CTE value of the obtained mixed material. Therefore, the CTE value of the organic-inorganic hybrid decreases as the volume ratio of the inorganic reinforcement increases. Further, in this experiment, when the same The polyimine mixed film is added with the same amount of different kinds of inorganic nanoparticles, and the mixed film also has similar thermal characteristics.
光學特性Optical properties
亦測量混合TiO2及ZrO2之混成厚膜(厚度:19±3μm)及薄膜(厚度:500nm至600nm)之UV-可見光(UV-Vis)光譜,且結果總結於圖6與表3。這些混成薄膜於UV波長區域展現足夠高的光學透明度以及低截止波長,表示已獲得高度均勻分散的PI/TiO2混成材料。截止波長及相對應之頻帶邊緣亦隨著二氧化鈦含量的上升而產生紅位移現象。這樣的現象通常亦可在二氧化鈦小於10nm時觀察得到。 The UV-visible (UV-Vis) spectrum of the mixed thick film (thickness: 19±3 μm) and film (thickness: 500 nm to 600 nm) of the mixed TiO 2 and ZrO 2 was also measured, and the results are summarized in FIG. 6 and Table 3. These hybrid films exhibit a sufficiently high optical transparency and a low cutoff wavelength in the UV wavelength region, indicating that a highly uniform dispersed PI/TiO 2 hybrid material has been obtained. The cutoff wavelength and the corresponding band edge also cause red shift as the titanium dioxide content increases. Such a phenomenon can usually also be observed when the titanium dioxide is less than 10 nm.
根據TiO2混成系統之光學透射光譜,該混成薄膜之透明度於 波長400nm時隨著TiO2含量之增加而顯著的降低。於ZrO2混成系統中,該混成薄膜之透明度於400nm時透明度稍微降低。圖7(a)顯示TiO2及ZrO2之不同的吸收波長。TiO2之設置吸收峰(on-set absorption peak)接近400nm波長,因此可顯著的影響該混成聚合物之光學透明度。於ZrO2吸收光譜中,該設置吸收峰之吸收波長約為230nm。根據圖7(b),ZrO2混成薄膜於450nm波長時,相較於TiO2系統(88%),具有較優異的光學透明度(96%)。最主要的原因是由於聚醯亞胺之透明度沒有明顯的受到ZrO2混成系統的影響。因此,含有二氧化鋯之FOH-CHPI混成薄膜(F-CHZrX)相較於其他混成系統顯現較高的透明度,該結果總結於圖8及表3。 According to the optical transmission spectrum of the TiO 2 hybrid system, the transparency of the mixed film is remarkably lowered as the TiO 2 content increases at a wavelength of 400 nm. In the ZrO 2 mixing system, the transparency of the mixed film was slightly lowered at 400 nm. Fig. 7(a) shows different absorption wavelengths of TiO 2 and ZrO 2 . The on-set absorption peak of TiO 2 is close to the wavelength of 400 nm, and thus the optical transparency of the mixed polymer can be significantly affected. In the ZrO 2 absorption spectrum, the absorption peak of the set absorption peak is about 230 nm. According to Fig. 7(b), the ZrO 2 mixed film has a superior optical transparency (96%) at a wavelength of 450 nm as compared with the TiO 2 system (88%). The main reason is that the transparency of the polyimide is not significantly affected by the ZrO 2 mixing system. Therefore, the FOH-CHPI mixed film containing zirconia (F-CHZrX) exhibited higher transparency than the other mixed systems, and the results are summarized in Fig. 8 and Table 3.
所獲得之膜於波長350-800nm之折射率分佈顯示於圖9,其中該插入圖分別顯示二氧化鈦及二氧化鋯含量於633nm波長之折射率差異。折射率隨著二氧化鋯之含量線性增加,暗示該水解化前驅物之Zr-OH基團漸進地縮合以形成該Zr-O-Zr結構,並增加折射率。此外,該ZrO2混成系統不僅增加折射率,相較於TiO2混成系統還同時更有效率的增加了阿貝數。該結果總結於表3。 The refractive index profile of the obtained film at a wavelength of 350 to 800 nm is shown in Fig. 9, wherein the intercalation chart shows the difference in refractive index between the titanium dioxide and the zirconium dioxide content at a wavelength of 633 nm, respectively. The refractive index increases linearly with the content of zirconium dioxide, suggesting that the Zr-OH group of the hydrolyzed precursor gradually condenses to form the Zr-O-Zr structure and increases the refractive index. In addition, the ZrO 2 hybrid system not only increases the refractive index, but also increases the Abbe number more efficiently than the TiO 2 hybrid system. The results are summarized in Table 3.
綜合厚度、可撓性及光學透明度,該Pi/ZrO2混成光學厚膜F-6FZr50(19±3μm in thickness)相較於PI/TiO2混成薄膜展現更高度光學透明度。 Combining thickness, flexibility, and optical transparency, the Pi/ZrO 2 mixed optical thick film F-6FZr50 (19 ± 3 μm in thickness) exhibits a higher degree of optical transparency than the PI/TiO 2 mixed film.
形態分析Morphological analysis
F-6FZr50膜之TEM影像顯示於圖10。其中該黑點為ZrO2顆粒。由於聚醯亞胺中包含羥基,使得其與無機材料之有機-無機鍵結,於混成薄膜中呈現均勻分散狀態。該二氧化鋯之平均粒徑大小為6nm。 The TEM image of the F-6FZr50 film is shown in Figure 10. Wherein the black spot is ZrO 2 particles. Since the polyimine contains a hydroxyl group, it is organic-inorganic bonded to the inorganic material, and exhibits a uniform dispersion state in the mixed film. The zirconium dioxide had an average particle size of 6 nm.
多層抗反射塗層Multi-layer anti-reflective coating
圖11顯示玻璃基材上之三層抗反射塗層結構以及其反射光譜。該玻璃基材具有高於空氣(n=1.0)之折射率(n=1.52),且於可見光範圍內 具有4.5%之平均反射率。反射率因分別包含第一層膠體SiO2、第二層F-6Zr50及第三層F-69FZr10之三層抗反射塗層而顯著的降低。為了經由光之相位調整減少反射,所獲得之分別含有膠體SiO2、F-6FZr50及F-6FZr10薄膜之厚度於三層結構中應分別控制在38nm(1.29)、92nm(1.80)及70nm(1.69)。如圖11所示,由抗反射塗層製備所得之反射率於可見光範圍(400nm至700nm)少於0.5%,係顯著的減少且遠小於玻璃之4.5%。本發明所製備之PI/ZrO2混成薄膜具有相當大的潛力可使用於光學裝置之應用中。 Figure 11 shows the three-layer anti-reflective coating structure on the glass substrate and its reflection spectrum. The glass substrate had a refractive index higher than air (n = 1.0) (n = 1.52) and an average reflectance of 4.5% in the visible range. The reflectance is significantly reduced by the three-layer anti-reflective coating comprising the first layer of colloidal SiO 2 , the second layer of F-6Zr50 and the third layer of F-69FZr10, respectively. In order to reduce the reflection by the phase adjustment of the light, the thicknesses of the obtained colloidal SiO 2 , F-6FZr50 and F-6FZr10 films respectively should be controlled at 38 nm (1.29), 92 nm (1.80) and 70 nm (1.69) in the three-layer structure, respectively. ). As shown in Figure 11, the reflectance prepared from the antireflective coating was less than 0.5% in the visible range (400 nm to 700 nm), a significant decrease and much less than 4.5% of the glass. The PI/ZrO 2 hybrid film prepared by the present invention has considerable potential for use in optical device applications.
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