TWI575180B - Gas hood for gas regulator - Google Patents
Gas hood for gas regulator Download PDFInfo
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- TWI575180B TWI575180B TW101122191A TW101122191A TWI575180B TW I575180 B TWI575180 B TW I575180B TW 101122191 A TW101122191 A TW 101122191A TW 101122191 A TW101122191 A TW 101122191A TW I575180 B TWI575180 B TW I575180B
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- regulating valve
- pressure regulating
- gas
- hood
- pressure
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- 230000001105 regulatory effect Effects 0.000 claims description 88
- 239000007789 gas Substances 0.000 claims description 79
- 238000010438 heat treatment Methods 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 2
- 238000010926 purge Methods 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 238000009833 condensation Methods 0.000 description 11
- 230000005494 condensation Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Details Of Valves (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Description
本發明大體上關於一種用於調壓閥的氣罩，更具體言之，其係關於一種可防止水氣在調壓閥上結露的氣罩。 The present invention generally relates to a hood for a pressure regulating valve, and more particularly to a hood that prevents condensation of moisture on the pressure regulating valve.
調壓閥(regulator)是高壓氣體供應系統中不可或缺的一種裝置，當氣體從高壓氣體源(如一液態鋼瓶)輸出時，其壓力可能高達500磅/每平方英吋(pounds per square inch,psi)以上，絕大部分的氣體處理設備或製程機台是無法直接使用具有如此大壓力的氣體。故此，在高壓氣體源輸出的管路上須安裝調壓閥，將輸出氣體的壓力降至正常的壓力範圍，如數十個psi，方能處理或應用所輸出之氣體。 Regulators are an indispensable device in high-pressure gas supply systems. When gas is output from a high-pressure gas source (such as a liquid cylinder), the pressure can be as high as 500 pounds per square inch (pounds per square inch). Above psi), most gas processing equipment or process machines cannot directly use gases with such high pressure. Therefore, a pressure regulating valve must be installed on the pipeline of the high-pressure gas source to reduce the pressure of the output gas to a normal pressure range, such as tens of psi, in order to process or apply the output gas.
請參照第1圖，其繪示出習知技術中一調壓閥100的截面示意圖。如第1圖所示，來自高壓氣體源的氣體會經由輸入管路103進入調壓閥100中，並在減壓後從輸出管路105輸出。在調壓閥減壓供應的過程中，經過調壓閥100的氣體會急遽地降壓，此時調壓閥100會因為氣體的焦耳-湯姆森效應(Joule-Thomson effect,J-T effect)而導致其溫度降至環境露點溫度以下，使得水氣107凝結在調壓閥的壁體109與基部111上。調壓閥上如果有水氣凝結，將會阻礙降溫中的調壓 閥與周遭環境的熱交換，終至調壓閥結冰。若無法改善調壓閥上的冷凝或結冰現象，經過調壓閥的氣體亦會產生溫降，使得輸出的氣體密度提高，此現象對於精密的半導體製程(如蝕刻製程或沉積製程)會是一大影響。 Please refer to FIG. 1 , which shows a schematic cross-sectional view of a pressure regulating valve 100 in the prior art. As shown in Fig. 1, the gas from the high pressure gas source enters the pressure regulating valve 100 via the input line 103 and is output from the output line 105 after being depressurized. During the decompression supply of the pressure regulating valve, the gas passing through the pressure regulating valve 100 is rapidly depressurized, and at this time, the pressure regulating valve 100 may be caused by the Joule-Thomson effect (JT effect) of the gas. The temperature falls below the ambient dew point temperature such that the water vapor 107 condenses on the wall 109 and the base 111 of the pressure regulating valve. If there is moisture condensation on the pressure regulating valve, it will hinder the pressure regulation in the cooling. The heat exchange between the valve and the surrounding environment ends with the pressure regulator freezing. If the condensation or icing on the pressure regulating valve cannot be improved, the gas passing through the pressure regulating valve will also produce a temperature drop, which will increase the density of the output gas. This phenomenon will be a precise semiconductor process (such as etching process or deposition process). A big impact.
故此，目前業界仍需要創新的手段來解決調壓閥上易凝結水氣的問題。 Therefore, the industry still needs innovative means to solve the problem of condensable moisture on the pressure regulating valve.
有鑒於前述習知技術之作法無法有效地解決調壓閥長久以來的結露問題，本發明特以提出了一種用於調壓閥的氣罩裝置，其運作原理係為持續通入淨化氣體來隔絕水氣靠近或接觸調壓閥，如此當調壓閥降溫時其上也不會有任何的水氣凝結現象。 In view of the above-mentioned prior art techniques, the condensation problem of the pressure regulating valve has not been effectively solved for a long time, and the present invention specifically proposes a hood device for a pressure regulating valve, which operates on the principle of continuously introducing a purge gas to isolate The water vapor is close to or in contact with the pressure regulating valve, so that when the pressure regulating valve is cooled, there is no condensation on the water.
根據本發明之一態樣，其氣罩係包含了一環形罩體環設在調壓閥周圍。氣罩的開口會與調壓閥相隔微小的間距，使得氣罩與調壓閥之間的空間盡可能地與外界隔絕，一氣體輸入端可持續通入淨化氣體至該空間中以排除該空間中的氣體。 According to one aspect of the invention, the hood includes an annular casing ring disposed about the pressure regulating valve. The opening of the hood is spaced apart from the pressure regulating valve by a small distance, so that the space between the hood and the pressure regulating valve is isolated from the outside as much as possible, and a gas input end can continuously pass the purified gas into the space to exclude the space. The gas in it.
根據本發明之另一態樣，其氣罩係包含了一罩體用以罩住一調壓閥、一開口讓調壓閥通過並使得罩體與調壓閥之間的空間呈半密封狀態、一氣體輸入端可持續地通入淨化氣體至該空間中，其中部分所通入的氣體會自開口逸出，使得該 空間維持在一微正壓狀態。 According to another aspect of the present invention, the hood includes a cover for covering a pressure regulating valve, an opening for allowing the pressure regulating valve to pass, and a space between the cover and the pressure regulating valve to be semi-sealed. a gas input end continuously enters a purge gas into the space, and a part of the gas that is introduced will escape from the opening, so that The space is maintained in a slightly positive pressure state.
無疑地，本發明的這類目的與其他目的在閱者讀過下文以多種圖示與繪圖來描述的較佳實施例細節說明後將變得更為顯見。 The objectives and other objects of the present invention will become more apparent from the written description of the appended claims.
在下文的細節描述中，元件符號會標示在隨附的圖示中成為其中的一部份，並且以可實行該實施例之特例描述方式來表示。這類實施例會說明足夠的細節俾使該領域之一般技藝人士得以具以實施。閱者須瞭解到本發明中亦可利用其他的實施例或是在不悖離所述實施例的前提下作出結構性、邏輯性、及電性上的改變。因此，下文之細節描述將不欲被視為是一種限定，反之，其中所包含的實施例將由隨附的申請專利範圍來加以界定。 In the detailed description that follows, the component symbols are marked as part of the accompanying drawings and are described in the manner in which the particular embodiments of the embodiments can be practiced. Such embodiments will be described in sufficient detail to enable those of ordinary skill in the art to practice. The reader is aware that other embodiments may be utilized and structural, logical, and electrical changes may be made without departing from the embodiments. Therefore, the following detailed description is not to be considered as a limitation, and the embodiments included herein are defined by the scope of the accompanying claims.
首先請參照第2圖，其繪示出本發明第一實施例中一用於調壓閥之氣罩210罩設在一調壓閥200上的截面示意圖。針對先前技術中水氣易冷凝在調壓閥上的問題，本發明所提供的解決原理在於隔絕水氣靠近或接觸調壓閥。如第2圖所示，本發明的作法為提供一種用於調壓閥的氣罩210，其可呈環狀殼體，環設在調壓閥200周圍。氣罩210係涵蓋了調壓閥200的壁體201與基部203的範圍，該兩處係為調壓閥中溫降效應發生的所在，也是水氣最易凝結之處。氣罩210 可從調壓閥200的旋把205端往下套合在調壓閥200的壁體201與基部203上。在完成裝設後，氣罩210上方整圈的環狀開口211及下方整圈的環狀開口213會分別與調壓閥200相隔微小的間距，使得氣罩210與調壓閥200之間的空間217盡可能地與外界隔絕。 First, please refer to FIG. 2, which is a cross-sectional view showing a hood 210 for a pressure regulating valve in a first embodiment of the present invention, which is disposed on a pressure regulating valve 200. In view of the prior art problem that water vapor is easily condensed on the pressure regulating valve, the solution provided by the present invention is to isolate the water gas from approaching or contacting the pressure regulating valve. As shown in FIG. 2, the present invention provides a hood 210 for a pressure regulating valve that can be in the form of an annular casing that is disposed around the pressure regulating valve 200. The hood 210 covers the range of the wall 201 and the base 203 of the pressure regulating valve 200, which is the place where the temperature drop effect occurs in the pressure regulating valve, and is also the place where the moisture is most easily condensed. Hood 210 The wall 201 and the base 203 of the pressure regulating valve 200 can be fitted down from the end of the knob 205 of the pressure regulating valve 200. After the installation is completed, the annular opening 211 of the full circle above the hood 210 and the annular opening 213 of the lower full circle are respectively spaced apart from the pressure regulating valve 200 by a slight distance, so that the hood 210 and the pressure regulating valve 200 are Space 217 is as isolated as possible from the outside world.
為了避免外界的水氣進入空間217中，本第一實施例的作法為在空間217中持續地通入淨化氣體(purge gas)，以將空間217中的氣體排出。如此，外界的氣體將無法進入空間217中。淨化氣體可從設在氣罩210上的氣體入口端219通入，再從上端整圈的環狀開口211或下端整圈的環狀開口213排出，如圖中的箭頭所示。如此，就算調壓閥的溫度因J-T效應降至露點溫度以下，因為其周遭缺乏水氣之故，調壓閥上也不會有任何水氣凝結或結露之現象，進而影響到調壓閥與周遭環境的熱交換效能，故可改善氣體供應系統以及所通入氣體的穩定性。在本發明中，由於要避免空間217中有水氣存在，所通入之淨化氣體須為含水量低的氣體，其中以氮氣(N2)或乾淨乾燥的空氣(cool dry air,CDA)為佳。再者，所通入之淨化氣體可以先進行預熱，如此在排氣的同時還可提供熱能給調壓閥。 In order to prevent external moisture from entering the space 217, the first embodiment is such that a purge gas is continuously introduced into the space 217 to discharge the gas in the space 217. As such, the outside air will not be able to enter the space 217. The purge gas can be passed from the gas inlet end 219 provided on the hood 210, and then discharged from the ring-shaped opening 211 of the upper end or the annular opening 213 of the lower end of the ring, as indicated by the arrows in the figure. Thus, even if the temperature of the pressure regulating valve drops below the dew point temperature due to the JT effect, there is no condensation or condensation on the pressure regulating valve due to the lack of moisture around it, which in turn affects the pressure regulating valve and The heat exchange efficiency of the surrounding environment can improve the stability of the gas supply system and the gas being introduced. In the present invention, since the presence of moisture in the space 217 is to be avoided, the purge gas to be introduced must be a gas having a low water content, wherein nitrogen (N 2 ) or clean dry air (CDA) is used. good. Furthermore, the purge gas that is introduced can be preheated first, so that heat can be supplied to the pressure regulating valve while exhausting.
除了上述的實施例，本發明亦提供了其他更佳、更具效率的實施態樣。接下來請參照第3圖，其繪示出本發明另一實施例中一用於調壓閥之氣罩300的立體示意圖。如第3圖所示，本發明的氣罩300主體為一罩體301，其呈長筒形態 樣，如一壓克力管，其中間為一空心的容置空間303。罩體301的一端，例如底端，具有一開口305，其與內部的容置空間303連通。調壓閥可經由此開口305容收進入容置空間303中。開口305上形成有數個缺口307，其係預設來讓與調壓閥連接的氣體輸出/入管路通過。在本發明實施例中，開口305處附近的罩體301的內側壁上另設有數個固定片309，其係用來將罩體301固定在調壓閥上。與開口305相對的另一端，例如頂端，的罩體301上則設有一氣體輸入端311，其與內部的容置空間303連通。氣體輸入端311可與一外部的氣體來源或氣體管線(未示於圖中)連接，藉以通入淨化氣體。 In addition to the embodiments described above, the present invention also provides other preferred and more efficient implementations. Next, please refer to FIG. 3, which is a perspective view showing a hood 300 for a pressure regulating valve in another embodiment of the present invention. As shown in FIG. 3, the main body of the hood 300 of the present invention is a cover 301 which is in the form of a long cylinder. For example, an acrylic tube has a hollow receiving space 303 in between. One end of the cover 301, such as the bottom end, has an opening 305 that communicates with the internal receiving space 303. The pressure regulating valve can be accommodated into the accommodating space 303 via the opening 305. A plurality of notches 307 are formed in the opening 305, which are preset to allow the gas output/inlet line connected to the pressure regulating valve to pass. In the embodiment of the present invention, the inner side wall of the cover 301 near the opening 305 is additionally provided with a plurality of fixing pieces 309 for fixing the cover 301 to the pressure regulating valve. The other end opposite to the opening 305, for example, the top end, is provided with a gas input end 301 which communicates with the internal accommodating space 303. The gas input 311 can be coupled to an external source of gas or gas line (not shown) for passage of purge gas.
須注意，儘管第3圖中的罩體301被繪示成長筒形態樣，然在實作中，罩體301的形狀亦可為立方體，端視調壓閥的外型與架設空間而定，只要罩體301能夠緊密地罩蓋在調壓閥上。此外，氣體輸入端311的位置不一定要位在罩體301的頂部，其亦可能設在罩體301的側壁上，數量亦可為一個以上，只要在裝設後能使空間303內的氣體均勻、穩定地排出罩體301外即可。 It should be noted that although the cover 301 in FIG. 3 is shown in the form of a growth cylinder, in practice, the shape of the cover 301 may also be a cube, depending on the appearance and the installation space of the pressure regulating valve. As long as the cover 301 can be tightly covered on the pressure regulating valve. In addition, the position of the gas input end 311 does not have to be located at the top of the cover body 301, and may be disposed on the side wall of the cover body 301, and the number may be more than one, as long as the gas in the space 303 can be made after being installed. It is sufficient to uniformly and stably discharge the outside of the cover 301.
接下來請參照第4圖，其繪示出第3圖所示之氣罩300罩設在一調壓閥320上的截面示意圖。如第4圖所示，當氣罩300裝設在調壓閥320上時，設置在罩體301開口305端附近的固定片309會與調壓閥320的基部321環接。固定片309可為彈性材料，如橡膠或泡棉，其彈性使罩體301得以卡合在調壓閥320上，並使得罩體301與調壓閥320之間的 空間303呈半密封之狀態。依本發明如此的氣罩300結構設計，其不僅安裝方便，且安裝可以在不停止供氣的狀態下進行。調壓閥320的輸出/入管路323與325可經由罩體301上的缺口307延伸出罩體301外部，其中輸入管路323會與一高壓氣體源連接，以將高壓氣體通入調壓閥320中，並在降壓後由另一端的輸出管路325輸出。對本發明而言，調壓閥所受之J-T效應的強弱係與所通入高壓氣體的壓力、種類、流量等因素有關。溫降程度明顯的氣體包含烷類、二氧化碳(CO2)、四氟化碳(CF4)等。 Next, please refer to FIG. 4, which is a cross-sectional view showing the hood 300 shown in FIG. 3 overlaid on a pressure regulating valve 320. As shown in FIG. 4, when the hood 300 is mounted on the pressure regulating valve 320, the fixing piece 309 disposed near the end of the opening 305 of the cover body 301 is looped with the base portion 321 of the pressure regulating valve 320. The fixing piece 309 may be an elastic material such as rubber or foam, and the elasticity thereof allows the cover body 301 to be engaged with the pressure regulating valve 320, and the space 303 between the cover body 301 and the pressure regulating valve 320 is semi-sealed. . According to the structural design of the hood 300 according to the present invention, it is not only easy to install, but also can be installed without stopping the supply of air. The output/inlet lines 323 and 325 of the pressure regulating valve 320 may extend outside the casing 301 via the notch 307 on the casing 301, wherein the input line 323 is connected to a high pressure gas source to pass the high pressure gas into the pressure regulating valve. In 320, and after the step-down, the output line 325 is outputted from the other end. For the present invention, the strength of the JT effect of the pressure regulating valve is related to the pressure, type, flow rate and the like of the high pressure gas. Gases with a significant degree of temperature drop include alkanes, carbon dioxide (CO 2 ), carbon tetrafluoride (CF 4 ), and the like.
本實施例與第2圖所示實施例的差別之處在於，本實施例的氣罩300係以額外設置的固定片309來抵觸罩體301，以固定在調壓閥320並得以達成半密封狀態。在本實施例中，如第4圖所示，淨化氣體(如氮氣或乾淨的乾燥空氣，CDA)可經由氣罩300的氣體輸入端311通入罩體301中，由於罩體301與調壓閥320之間的空間303呈半密封狀態，部分的淨化氣體可自罩體301缺口307與輸出/入管路323與325之間的縫隙逸出，如圖中的箭頭所示。故以此設置，本實施例所需使用的淨化氣體量較小，可控制在2公升/分鐘(standard liter per minute,slpm)以下，即可使空間303維持在一微正壓狀態，阻止外界的水氣進入罩體301之中。相較於第一實施例需要相當程度的淨化氣量體(可能高達40 slpm)，本實施例是為一相當節省成本之設計與作法。 The difference between this embodiment and the embodiment shown in FIG. 2 is that the hood 300 of the present embodiment is in contact with the cover 301 by an additional fixing piece 309 for fixing to the pressure regulating valve 320 and achieving a semi-sealing. status. In the present embodiment, as shown in FIG. 4, a purge gas (such as nitrogen or clean dry air, CDA) can be introduced into the cover 301 via the gas input end 311 of the hood 300, due to the cover 301 and the pressure regulation. The space 303 between the valves 320 is semi-sealed, and part of the purge gas can escape from the gap between the notch 307 of the cover 301 and the output/inlet lines 323 and 325, as indicated by the arrows in the figure. Therefore, in this embodiment, the amount of purge gas required in this embodiment is small, and can be controlled below 2 liters per minute (slpm), so that the space 303 can be maintained in a slightly positive pressure state, and the outside is blocked. The moisture enters the cover 301. This embodiment is a relatively cost effective design and practice compared to the first embodiment requiring a significant degree of purge volume (possibly up to 40 slpm).
另一方面，本實施例的罩體301係呈長筒態樣，僅具有 一個底部開口供以容收調壓閥320並排出氣體，其有別於第一實施例中具有上下兩開口的環狀殼體態樣。在本實施例中，如第4圖所示，淨化氣體會自頂部的氣體輸入端311通入罩體301中，淨化氣體會順著氣流方向從下方罩體301缺口307與輸出/入管路323與325之間的縫隙逸出，為一可順利排氣淨化之結構設計。而就第一實施例而言，上下兩開口且從側邊通氣之設計可能會在排氣過程中產生擾流，無法完全均勻地將所有水氣都排出罩體外。 On the other hand, the cover 301 of the present embodiment has a long tubular shape and has only A bottom opening is provided for receiving the pressure regulating valve 320 and discharging the gas, which is different from the annular casing having the upper and lower openings in the first embodiment. In the present embodiment, as shown in FIG. 4, the purge gas is introduced into the cover body 301 from the top gas input end 311, and the purge gas flows from the lower cover 301 notch 307 and the output/inlet line 323 in the direction of the air flow. The gap between the 325 and the 325 escapes, and is designed for a smooth exhaust gas purification structure. In the case of the first embodiment, the design of the upper and lower openings and venting from the side may cause turbulence during the venting process, and it is not possible to completely and completely discharge all moisture from the outside of the hood.
接下來請參照第5圖，繪示出本發明又一實施例中一用於調壓閥之氣罩罩設在一調壓閥上的截面示意圖。本發明之氣罩可配合一加熱帶來使用。調壓閥的前段可以裝設額外的預熱器，或是調壓閥上可以加裝加熱帶，藉由提供熱能之方式來蒸發水氣並使調壓閥升溫。然就實作而言，由於水氣的蒸發熱很大，加熱帶所提供之熱能僅能除去調壓閥上的部分水氣，無法根治水氣凝結之問題，且加熱帶之使用會耗費不少的能源與成本，其所導致的局部性熱量集中也容易造成所通入氣體之異變，非是有效的解決方法。如果搭配本發明之氣罩，如第5圖所示，調壓閥320的基部321周圍係環設有加熱帶327。加熱帶327可增加基部321附近的溫度，使其高於露點溫度以上，結露之情形較不易發生，而設置在周圍的氣罩300則可阻止外界的水氣進入罩體301之中。上述兩種裝置之共作將可完全避免水氣在調壓閥上凝結，並同時穩定高壓氣體之供應。另一方面，本發明之氣罩300上可另外 裝設其他裝置，如氣壓計、濕度計、或溫度計等，來監控空間303中的各項氣體參數，如氣壓、濕度、或溫度，並藉由該些氣體參數來判定是否要通入淨化氣體或是否要啟用加熱帶。 Next, referring to FIG. 5, a cross-sectional view of a hood for a pressure regulating valve disposed on a pressure regulating valve in another embodiment of the present invention is illustrated. The hood of the present invention can be used in conjunction with a heating belt. An additional preheater can be installed in the front section of the pressure regulating valve, or a heating belt can be installed on the pressure regulating valve to evaporate the water gas and heat the pressure regulating valve by providing heat energy. However, in practice, because the evaporation heat of water vapor is very large, the heat energy provided by the heating belt can only remove part of the water and gas on the pressure regulating valve, and cannot solve the problem of condensation of water and gas, and the use of the heating belt will not cost. Less energy and cost, the localized heat concentration caused by it is also easy to cause the change of the gas to be introduced, which is not an effective solution. If the hood of the present invention is used, as shown in Fig. 5, a heating belt 327 is provided around the base 321 of the pressure regulating valve 320. The heating belt 327 can increase the temperature near the base portion 321 above the dew point temperature, and the condensation can be less likely to occur, and the surrounding hood 300 can prevent the outside water from entering the cover 301. The combination of the above two devices will completely prevent the condensation of moisture on the pressure regulating valve and at the same time stabilize the supply of high pressure gas. On the other hand, the hood 300 of the present invention may additionally Other devices, such as a barometer, a hygrometer, or a thermometer, are installed to monitor various gas parameters in the space 303, such as air pressure, humidity, or temperature, and determine whether or not to pass the purge gas by using the gas parameters. Or if you want to enable the heating belt.
以上所述僅為本發明之較佳實施例，凡依本發明申請專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.
100‧‧‧調壓閥 100‧‧‧pressure regulator
103‧‧‧輸入管路 103‧‧‧Input line
105‧‧‧輸出管路 105‧‧‧Output line
107‧‧‧水氣 107‧‧‧Water and gas
109‧‧‧壁體 109‧‧‧ wall
111‧‧‧基部 111‧‧‧ base
200‧‧‧調壓閥 200‧‧‧pressure regulator
201‧‧‧壁體 201‧‧‧ wall
203‧‧‧基部 203‧‧‧ base
205‧‧‧旋把 205‧‧‧Rotary handle
210‧‧‧氣罩 210‧‧‧ hood
211‧‧‧開口 211‧‧‧ openings
213‧‧‧開口 213‧‧‧ openings
217‧‧‧空間 217‧‧‧ space
219‧‧‧氣體入口端 219‧‧‧ gas inlet end
300‧‧‧氣罩 300‧‧‧ hood
301‧‧‧罩體 301‧‧‧ Cover
303‧‧‧空間 303‧‧‧ Space
305‧‧‧開口 305‧‧‧ openings
307‧‧‧開口 307‧‧‧ openings
309‧‧‧固定片 309‧‧‧Fixed tablets
311‧‧‧氣體入口端 311‧‧‧ gas inlet end
320‧‧‧調壓閥 320‧‧‧pressure regulator
321‧‧‧基部 321‧‧‧ base
323‧‧‧輸入管路 323‧‧‧Input line
325‧‧‧輸出管路 325‧‧‧Output line
327‧‧‧加熱帶 327‧‧‧heating belt
本說明書含有附圖併於文中構成了本說明書之一部分，俾使閱者對本發明實施例有進一步的瞭解。該些圖示係描繪了本發明一些實施例並連同本文描述一起說明了其原理。在該些圖示中：第1圖繪示出習知技術中水氣因J-T效應凝結在調壓閥上的截面示意圖；第2圖繪示出本發明第一實施例中一用於調壓閥之氣罩罩設在一調壓閥上的截面示意圖；第3圖繪示出本發明另一實施例中一用於調壓閥之氣罩的立體示意圖；第4圖繪示出第3圖所示之氣罩罩設在一調壓閥上的截面示意圖；以及第5圖繪示出本發明又一實施例中一用於調壓閥之氣罩罩設在一裝設有加熱帶的調壓閥上的截面示意圖。 The present specification contains the drawings and constitutes a part of the specification in the specification, and the reader will further understand the embodiments of the invention. The drawings depict some embodiments of the invention and, together with the description herein. In the drawings: FIG. 1 is a schematic cross-sectional view showing the condensation of water and gas on the pressure regulating valve due to the JT effect in the prior art; and FIG. 2 is a view showing the pressure regulating device in the first embodiment of the present invention. FIG. 3 is a schematic perspective view of a hood of a valve provided on a pressure regulating valve; FIG. 3 is a perspective view showing a hood for a pressure regulating valve according to another embodiment of the present invention; Figure 5 is a schematic cross-sectional view of a hood provided on a pressure regulating valve; and Figure 5 illustrates a hood for a pressure regulating valve in a further embodiment of the present invention. Schematic diagram of the cross section on the pressure regulating valve.
須注意本說明書中的所有圖示皆為圖例性質。為了清楚與方便圖示說明之故，圖示中的各部件在尺寸與比例上可能會被誇大或縮小地呈現。圖中相同的參考符號一般而言會用來標示修改後或不同實施例中對應或類似的特徵。 It should be noted that all the illustrations in this specification are of the nature of the legend. For the sake of clarity and convenience of illustration, the various components in the drawings may be exaggerated or reduced in size and proportion. The same reference numbers are used in the drawings to refer to the corresponding or similar features in the modified or different embodiments.
300‧‧‧氣罩 300‧‧‧ hood
301‧‧‧罩體 301‧‧‧ Cover
303‧‧‧空間 303‧‧‧ Space
305‧‧‧開口 305‧‧‧ openings
307‧‧‧開口 307‧‧‧ openings
309‧‧‧固定片 309‧‧‧Fixed tablets
311‧‧‧氣體入口端 311‧‧‧ gas inlet end
320‧‧‧調壓閥 320‧‧‧pressure regulator
321‧‧‧基部 321‧‧‧ base
323‧‧‧輸入管路 323‧‧‧Input line
325‧‧‧輸出管路 325‧‧‧Output line
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101122191A TWI575180B (en) | 2012-06-21 | 2012-06-21 | Gas hood for gas regulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101122191A TWI575180B (en) | 2012-06-21 | 2012-06-21 | Gas hood for gas regulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201400740A TW201400740A (en) | 2014-01-01 |
| TWI575180B true TWI575180B (en) | 2017-03-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101122191A TWI575180B (en) | 2012-06-21 | 2012-06-21 | Gas hood for gas regulator |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI575180B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI251649B (en) * | 2003-10-02 | 2006-03-21 | Au Optronics Corp | An apparatus for a regulator preventing condensate water |
| CN100373083C (en) * | 2003-10-20 | 2008-03-05 | 友达光电股份有限公司 | Valve body condensation improving device |
-
2012
- 2012-06-21 TW TW101122191A patent/TWI575180B/en active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI251649B (en) * | 2003-10-02 | 2006-03-21 | Au Optronics Corp | An apparatus for a regulator preventing condensate water |
| CN100373083C (en) * | 2003-10-20 | 2008-03-05 | 友达光电股份有限公司 | Valve body condensation improving device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201400740A (en) | 2014-01-01 |
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