TWI569355B - Control device and control method - Google Patents

Description

Control device and control method

The present invention relates to a control device and a control method for a holding device that holds a liquid by releasing a liquid between a member and a plate-shaped member.

In recent years, a plate-shaped member such as a semiconductor wafer or a glass substrate has been developed by a device for non-contact transportation. For example, in Patent Document 1, a device in which a plate-shaped member is conveyed by non-contact using Bernoulli's theorem has been proposed. In this apparatus, a fluid is supplied to the open cylindrical chamber under the apparatus to cause a swirling flow, and the plate-like member is attracted by the negative pressure at the center of the swirling flow, and on the other hand, from the chamber such as the circle. The fluid maintains a certain distance between the device and the plate member so that the plate-like member can be conveyed in a non-contact manner. In Patent Document 1, a liquid as a fluid has also been proposed.

[Practical Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-51260

An object of the present invention is to increase a negative pressure that occurs when a liquid is discharged from a holding device that holds a held body by a negative pressure between the object and the object to be held.

The present invention provides a control device for controlling the supply of liquid to a holding device that holds the held body by a negative pressure between the object to be held by the discharge of the liquid, the holding device, The columnar body includes a flat end surface formed on the main body and facing the object to be held, a concave portion formed on the end surface, and one or more fluid passages for discharging the liquid through the discharge port in the concave portion. In the control device, the supply of the liquid is controlled such that the liquid in the recess is filled with the liquid until the discharge port of the fluid passage is covered with the liquid in a state where the swirling flow is not formed in the recess until the fluid After the discharge port of the passage is filled with the liquid in the recessed portion after being covered with the liquid, the supply of the liquid is controlled such that the swirling flow is formed by the liquid discharged from the fluid passage into the recess.

In the control device described above, the flow rate of the liquid supplied into the concave portion is set to the first amount, and the swirling flow is not formed in the concave portion until the discharge port of the fluid passage is covered with the liquid. The inside of the recess is filled with liquid until the discharge port of the aforementioned fluid passage After the liquid is filled in the concave portion, the flow rate of the liquid supplied into the concave portion is changed from the first amount to a second amount larger than the first amount, The fluid passage may form a swirling flow toward the liquid discharged in the recess.

In the above holding device, the above 1 or more fluids The passage includes a first fluid passage that discharges the liquid from the first discharge port provided on the bottom surface of the recessed portion, and a second fluid passage that discharges the liquid from the second discharge port provided on the inner peripheral side surface of the recessed portion. In the above-described control device, the liquid is supplied into the concave portion through the first fluid passage, and the swirling flow is not formed in the concave portion, and the concave portion is filled with the liquid until the second discharge port is covered with the liquid. When the second discharge port is filled with the liquid in the recessed portion after the second discharge port is covered with the liquid, the liquid is stopped from being supplied through the first fluid passage, and the liquid is supplied into the recess through the second fluid passage to form a swirling flow. can.

In the above holding device, the above 1 or more fluids The passage includes a third fluid passage that discharges the liquid from the third discharge port provided on the inner peripheral side surface of the recessed portion to form the first swirling flow, and a fourth discharge passage that is provided on the inner peripheral side surface of the recessed portion. Discharging the liquid to form a fourth fluid passage that is circulated in a direction opposite to the direction of rotation of the first swirling flow, and the control device passes through the third and fourth fluid passages into the recess In the state in which the swirling flow is not formed in the recessed portion, the supply of the liquid is controlled so that the liquid in the recessed portion is filled until the third discharge port is covered with the liquid, until the third discharge port is Covered in the aforementioned recess by the liquid After the body is filled, the supply of the liquid through the third fluid passage is maintained, the supply of the liquid through the fourth fluid passage is stopped, and the swirling flow is formed by the liquid discharged from the third fluid passage into the recess.

And the control method provided by the present invention is to control A control method for supplying a liquid to a holding device that holds a liquid between a held body and a negative pressure, and the holding device includes a columnar body and a body formed on the body a flat end surface of the object to be held, a concave portion formed on the end surface, and one or more fluid passages for discharging the liquid through the discharge port in the concave portion, wherein the control method includes that the concave portion is not formed. In the state of the swirling flow, the step of controlling the supply of the liquid so as to fill the inside of the recessed portion until the discharge port of the fluid passage is covered with the liquid; and until the discharge port of the fluid passage is covered with the liquid After the inside of the concave portion is filled with the liquid, the supply of the liquid is controlled so as to form a swirling flow by the liquid discharged from the fluid passage into the concave portion.

According to the present invention, the negative pressure can be increased by the holding means for holding the liquid to be held by the negative pressure between the held body and the held body.

1‧‧‧ whirlpool formation

2‧‧‧ solenoid valve

3‧‧‧Liquid supply pump

4‧‧‧Microcomputer

5‧‧‧ Circumfluent formation

7‧‧‧ whirlpool formation

10‧‧‧Transportation device

11‧‧‧Ontology

12‧‧‧ recess

13‧‧‧ end face

14‧‧‧Exporting

15‧‧‧Sloping surface

16‧‧‧ supply port

17‧‧‧Circular access

18‧‧‧Connected Road

19‧‧‧Supply road

20‧‧‧Transportation device

51‧‧‧Ontology

52‧‧‧ recess

53‧‧‧ end face

54‧‧‧Spit

55‧‧‧Sloping surface

56‧‧‧Spray outlet

57‧‧‧Import

58‧‧‧Introduction

59‧‧‧Circular access

60‧‧‧Connected Road

61‧‧‧ supply port

62‧‧‧Supply road

71‧‧‧Ontology

72‧‧‧ recess

73‧‧‧ end face

74‧‧‧Exporting

75‧‧‧ sloped surface

76‧‧‧Import

77‧‧‧Introduction

100‧‧‧Transportation system

101‧‧‧ base

102‧‧‧ Friction members

103‧‧‧ Hole Department

200‧‧‧Transportation system

201‧‧‧ base

300‧‧‧Transportation system

[Fig. 1] A perspective view showing an example of the swirling flow forming body 1 of the first embodiment.

[Fig. 2] A cross-sectional view taken along line A-A of Fig. 1.

[Fig. 3] A cross-sectional view taken along line B-B of Fig. 1.

[Fig. 4] A diagram showing an example of a circuit configuration of the transport system 100.

[Fig. 5] A flowchart showing an example of a control operation performed by the microcomputer 4.

[Fig. 6] A graph showing an example of the relationship between the flow rate and the suction pressure.

[Fig. 7] A perspective view showing an example of the swirling flow forming body 5 of the second embodiment.

[Fig. 8] A cross-sectional view taken along line C-C of Fig. 7.

[Fig. 9] A cross-sectional view taken along line D-D of Fig. 7.

[Fig. 10] A diagram showing an example of a circuit configuration of the transport system 200.

[Fig. 11] A flowchart showing an example of a control operation performed by the microcomputer 4A.

[12] A perspective view showing an example of the swirling flow forming body 7 of the third embodiment.

[Fig. 13] A cross-sectional view taken along line E-E of Fig. 12.

[Fig. 14] A cross-sectional view taken along line F-F of Fig. 12.

[Fig. 15] A diagram showing an example of a circuit configuration of the transport system 300.

[Fig. 16] shows one of the control actions performed by the microcomputer 4B The flow chart of the example.

[17] A diagram showing an example of the configuration of the transport device 10.

[Embodiment 18] A diagram showing an example of the configuration of the transport device 20.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1. First Embodiment

Fig. 1 is a perspective view showing an example of the swirling flow forming body 1 of the first embodiment of the present invention. Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. Fig. 3 is a cross-sectional view taken along line B-B of Fig. 1. The whirling flow forming body 1 is a device for holding a plate-shaped member such as a semiconductor wafer or a glass substrate. The swirling flow forming body 1 holds the member by discharging a liquid and generating a negative pressure between the plate member. The liquid here is, for example, pure water and carbonated water. The material of the swirling flow forming body 1 is, for example, an aluminum alloy. This swirling flow forming body 1 is an example of the "holding device" of the present invention.

The swirling flow forming body 1 includes a main body 11 , a concave portion 12 , an end surface 13 , two discharge ports 14 , and an inclined surface 15 as shown in FIGS. 1 to 3 . The body 11 has a cylindrical shape. The end surface 13 is formed in a flat shape on one surface of the main body 11 (specifically, a surface facing the object to be held, that is, a plate-like member) (hereinafter referred to as "bottom surface"). The recess 12 has a cylindrical shape and is formed on the end surface 13. The recess 12 is formed coaxially with the body 11.

Two discharge ports 14 are formed on the body 11 facing the concave The inner peripheral side of the portion 12. The two discharge ports 14 are disposed to face each other. Specifically, it is arranged to be point-symmetric about the axis of the central axis of the body 11 or the recess 12 . The liquid supplied to the swirling flow forming body 1 is discharged into the concave portion 12 through the respective discharge ports 14. The inclined surface 15 is an opening formed in the recess 12 .

The swirling flow forming body 1 is as shown in Figs. 2 and 3, The supply port 16 and the annular passage 17, the communication passage 18, and the two supply passages 19 are provided. The supply port 16 has a circular shape and is provided at the center of the upper surface of the body 11 (i.e., the surface opposite to the bottom surface). The supply port 16 is connected to a liquid supply pump 3, which will be described later, through a pipe, for example, and the liquid is supplied into the body 11 through the supply port 16. The annular passage 17 has a cylindrical shape and is formed inside the body 11 so as to surround the recess 12 . The annular passage 17 is formed coaxially with the recess 12. The annular passage 17 supplies the liquid supplied from the communication passage 18 to the supply passage 19. The communication path 18 is provided inside the main body 11, and extends linearly in the radial direction of the bottom surface or the upper surface of the main body 11.

The communication path 18 is connected to the annular passage 17 at both ends thereof. through. The communication passage 18 supplies the liquid supplied into the main body 11 through the supply port 16 to the annular passage 17. The two supply passages 19 discharge the liquid into the recess 12 through the respective discharge outlets 14 in the recess 12 A swirling flow is formed inside. Specifically, each of the supply passages 19 is formed substantially parallel to the end surface 13 and extends in the tangential direction with respect to the outer circumference of the recessed portion 12, and one end thereof communicates with the annular passage 17 and the other end thereof communicates with the discharge port 14. supply The path 19 is an example of the "fluid passage" of the present invention.

The liquid is permeated through the swirling flow forming body 1 described above. When the supply port 16 is supplied, the liquid is discharged from the discharge port 14 into the recess 12 through the communication passage 18, the annular passage 17, and the supply passage 19. The liquid discharged into the concave portion 12 is rectified as a swirling flow in the concave portion 12, and then flows out from the opening portion of the concave portion 12. At this time, when the plate-like member exists in contact with the end surface 13, the inflow of the external fluid (for example, air) toward the recessed portion 12 is restricted, and the center of the swirling flow is made by the centrifugal force of the swirling flow and the effect of the entrainment. The density of fluid molecules per unit volume becomes small, and a negative pressure occurs between the swirling flow forming body 1 and the plate-like member. As a result, the plate-like member is moved toward the end surface 13 side by the surrounding fluid being pushed. On the other hand, as the distance between the end surface 13 and the plate-like member approaches, the amount of liquid flowing out of the recessed portion 12 is restricted, and the velocity of the liquid discharged from the discharge port 14 into the recessed portion 12 becomes slow, and the center of the swirling flow is slowed. The pressure will rise. As a result, the plate member does not come into contact with the end face 13, and is kept at a certain distance between the plate member and the end face 13.

Figure 4 is a view showing the conveyance including the swirling flow forming body 1. A diagram of an example of the circuit configuration of the system 100. As shown in Fig. 4, the supply port 16 of the swirling flow forming body 1 is connected to the liquid supply pump 3 through a solenoid valve 2 by, for example, a tube. The solenoid valve 2 is connected to the microcomputer 4.

Solenoid valve 2, specifically a proportional solenoid valve, based on micro The control signal outputted by the computer 4 is adjusted so that the opening degree is adjusted. The microcomputer 4 outputs a control signal to the solenoid valve 2 in accordance with a prescribed program, and controls the flow rate of the liquid supplied to the swirling flow forming body 1 (more specifically, each The amount of liquid supplied to the swirling flow forming body 1 per unit time). This microcomputer 4 is an example of the "control device" of the present invention.

Fig. 5 is a flowchart showing an example of a control operation performed by the microcomputer 4. This control operation is carried out while the conveyance is being held by the swirling flow formation body 1 in the atmosphere while sucking the plate-shaped member. In the description of the operation, it is assumed that the opening portion of the concave portion 12 of the swirling flow forming body 1 is in the skyward direction (in other words, the concave portion 12 is open in a direction opposite to the vertical direction). The situation of handling.

In step Sa1 of this control operation, the microcomputer 4 controls the solenoid valve 2 to start supply of the liquid to the swirling flow forming body 1. At this time, the liquid is supplied to the swirling flow forming body 1 by the first flow rate. Here, the first flow rate is a flow rate in which the swirling flow is not formed in the concave portion 12 of the swirling flow forming body 1. When the swirling flow is formed in the recessed portion 12, since the liquid flows out of the recessed portion 12 by the centrifugal force of the swirling flow, the liquid does not stay in the recessed portion 12.

Next, the microcomputer 4 starts counting by the timer (step Sa2). Further, the microcomputer 4 determines whether or not a predetermined time has elapsed (step Sa3). The predetermined time is the time required for the concave portion 12 of the swirling flow forming body 1 to become full, and the time is measured in advance and stored in the microcomputer 4.

When the predetermined time has not elapsed (step Sa3: NO), the microcomputer 4 stands by, and when the predetermined time has elapsed (that is, when the concave portion 12 of the swirling flow forming body 1 is full) (step Sa3: YES), the solenoid valve 2 is placed. Control, for the swirling flow forming body 1 to start the liquid in the second flow rate Supply (step Sa4). Here, the second flow rate is a flow rate larger than the first flow rate described above, and a flow rate of the swirling flow can be formed in the concave portion 12 of the swirling flow formation body 1. In this state, when the end surface 13 of the swirling flow forming body 1 faces, if a plate-like member exists, a negative pressure occurs between the swirling flow forming body 1 and the plate-shaped member, and the plate is formed by the negative pressure. The member is held in attraction by the swirling flow forming body 1.

The control operation that is performed by the microcomputer 4 is explained above.

Fig. 6 is a view showing a case where a swirling flow is formed from an empty state in the concave portion 12 of the swirling flow forming body 1, and a flow rate and suction pressure when the concave portion 12 starts to form a swirling flow in a state of full water. A chart of an example of the relationship. The horizontal axis of the graph is the display flow rate (unit: L/min), and the vertical axis is the display suction pressure (unit: kPa). According to the same graph, the concave portion 12 is the suction pressure when the formation of the swirling flow starts in the state of full water, and the suction in the concave portion 12 from the state of the empty swirling flow. Compared with the pressure phase, it is more than twice.

In addition, the suction pressure shown in the same chart is measured using KUMADE (Japanese registered trademark) Cup (model: KMCP-60CW) manufactured by HARMOTEC Co., Ltd.

According to the control operation of the present embodiment described above, since the concave portion 12 is filled with water before the swirling flow is formed in the concave portion 12, and then the swirling flow is formed, as shown in Fig. 6, it is empty in the concave portion 12. A higher suction pressure can be obtained as compared with the case where the state begins to form a swirling flow. Moreover, according to the control action of the embodiment, the movement of the plate member In operation, since the inside of the concave portion 12 of the swirling flow forming body 1 is filled with liquid, the surface of the plate-like member can be prevented from being formed by watermarking (alias, water dyeing) which occurs by drying. Further, the plate member is a semiconductor wafer, and the watermark is generally composed of an oxide.

2. Second Embodiment

Fig. 7 is a perspective view showing an example of the swirling flow forming body 5 of the second embodiment of the present invention. Fig. 8 is a cross-sectional view taken along line C-C of Fig. 7. Fig. 9 is a cross-sectional view taken along line D-D of Fig. 7. The whirling flow forming body 5 is a device for holding a plate-shaped member such as a semiconductor wafer or a glass substrate. The swirling flow forming body 5 holds the member by discharging a liquid and generating a negative pressure between the plate member. The liquid here is, for example, pure water and carbonated water. The material of the swirling flow forming body 5 is, for example, an aluminum alloy. This swirling flow forming body 5 is an example of the "holding device" of the present invention.

As shown in FIGS. 7 to 9 , the swirling flow forming body 5 includes a main body 51 , a concave portion 52 , an end surface 53 , two discharge ports 54 , an inclined surface 55 , and a discharge port 56 . The body 51 has a cylindrical shape. The end surface 53 is formed in a flat shape on one surface of the main body 51 (specifically, a surface facing the object to be held, that is, a plate-like member) (hereinafter referred to as "bottom surface"). The recess 52 has a cylindrical shape and is formed on the end surface 53. The recess 52 is formed coaxially with the body 51.

The two discharge ports 54 are formed on the inner peripheral side surface of the body 51 facing the recess 52. The two discharge ports 54 are disposed to face each other. Specifically, it is configured to be the center axis of the body 51 or the recess 52 The axis is symmetrical at the center point. The liquid supplied to the swirling flow forming body 5 is discharged into the concave portion 52 through the respective discharge ports 54. The inclined surface 55 is an opening formed in the recess 52. The discharge port 56 has a circular shape and is provided at the center of the bottom surface of the recess 52. This discharge port 56 communicates with an introduction path 58 which will be described later, and discharges the liquid.

The swirling flow forming body 5 is as shown in Figs. 8 and 9. The inlet port 57, the introduction path 58, and the annular passage 59, the communication passage 60, the supply port 61, and the two supply passages 62 are provided. The inlet 57 has a circular shape and is provided at the center of the upper surface of the body 51 (i.e., the surface opposite to the bottom surface). The inlet 57 is connected to the liquid supply pump 3A through, for example, a tube through which the liquid is supplied into the body 51. The introduction path 58 is provided inside the body 51 and extends linearly along the central axis of the body 51. The introduction path 58 has one end that communicates with the introduction port 57 and the other end that communicates with the aforementioned discharge port 56. The introduction path 58 is an example of the "fluid passage" of the present invention, and is particularly an example of the "first fluid passage".

The annular passage 59 has a cylindrical shape and includes a recess 52 The surrounding manner is formed inside the body 51. The annular passage 59 is formed coaxially with the recess 52. The annular passage 59 supplies the liquid supplied from the communication passage 60 to the supply passage 62. The communication passage 60 is provided inside the main body 51 and extends linearly in parallel with the central axis of the main body 51. The communication path 60 has one end that communicates with the annular passage 59 and the other end that communicates with the supply port 61. The supply port 61 has a circular shape and is provided on the upper surface of the body 51. The supply port 61 is connected to the liquid supply pump 3A through, for example, a tube, and the fluid is supplied into the body 51 through the supply port 61.

The two supply paths 62 are respectively recessed through the discharge port 54 The liquid is discharged from the portion 52, and a swirling flow is formed in the recess 52. Specifically, each of the supply passages 62 is substantially parallel to the end surface 53 and extends in the tangential direction with respect to the outer circumference of the recessed portion 52. One end thereof communicates with the annular passage 59 and the other end communicates with the discharge port 54. The supply path 62 is an example of the "fluid passage" of the present invention, and particularly an example of the "second fluid passage".

The liquid is permeated through the swirling flow forming body 5 described above. When the supply port 61 is supplied, the liquid is discharged from the discharge port 54 into the recess 52 through the communication passage 60, the annular passage 59, and the supply passage 62. The liquid discharged into the concave portion 52 is rectified as a swirling flow in the concave portion 52, and then flows out from the opening portion of the concave portion 52. At this time, when the plate-like member exists in contact with the end surface 53, the inflow of the external fluid (for example, air) in the recess 52 is restricted, and the centrifugal force and the entrainment effect of the swirling flow are at the center of the swirling flow. The density of fluid molecules per unit volume becomes small, and a negative pressure occurs between the swirling flow forming body 1 and the plate-like member. As a result, the plate-like member is moved toward the end surface 53 side by the surrounding fluid being pushed. On the other hand, as the distance between the end surface 53 and the plate-like member approaches, the amount of liquid flowing out from the recess 52 is restricted, and the velocity of the liquid discharged from the discharge port 54 into the recess 52 is slowed, and the center of the swirling flow is slowed. The pressure will rise. As a result, the plate member does not come into contact with the end face 53, and is kept at a constant distance between the plate member and the end face 53.

Figure 10 is a view showing the conveyance including the swirling flow forming body 5. A diagram of an example of the circuit configuration of the system 200. As shown in Figure 10, the maneuver The introduction port 57 of the flow forming body 5 is connected to the liquid supply pump 3A through a solenoid valve 2A by, for example, a tube. Further, the supply port 61 of the swirling flow forming body 5 is connected to the liquid supply pump 3A through a solenoid valve 2B by, for example, a tube. The solenoid valves 2A and 2B are connected to the microcomputer 4A.

Solenoid valves 2A and 2B are individually based on the slave computer 4A The output of the on-off control signal permits or interrupts the passage of the liquid supplied from the liquid supply pump 3A. The microcomputer 4A controls the supply of the liquid to the swirling flow forming body 5 by the ON/OFF control signal output to the solenoid valves 2A and 2B in accordance with a predetermined program. This microcomputer 4A is an example of the "control device" of the present invention.

Figure 11 shows the control that is implemented by the microcomputer 4A. A flowchart of an example of a system operation. This control operation is carried out while holding and transporting the plate-shaped member by the swirling flow forming body 5 in the atmosphere. In the description of the operation, it is assumed that the opening of the concave portion 52 of the swirling flow forming body 5 is in the direction of the sky (in other words, the concave portion 52 is open in a direction opposite to the vertical direction). Case.

In step Sb1 of this control action, the microcomputer 4 is The solenoid valve 2A controls the supply of the liquid to the swirling flow forming body 5 through the introduction port 57. That is, the supply of the liquid into the concave portion 52 from the discharge port 56 provided in the bottom surface of the concave portion 52 is started. At this time, the solenoid valve 2B is maintained in a closed state, and the liquid is not supplied into the recess 52 from the discharge port 54 provided on the inner peripheral side surface of the recess 52. Therefore, no swirling flow is formed in the recess 52.

Then, the microcomputer 4A is started by the timer (step) Step Sb2). Moreover, the microcomputer 4A determines whether or not the specified time has elapsed. (Step Sb3). The predetermined time is the time required for the concave portion 52 of the swirling flow forming body 5 to become full, and the time is measured in advance and stored in the microcomputer 4A.

When the predetermined time has not elapsed (step Sb3: NO), the microcomputer 4A waits for a predetermined period of time (that is, when the concave portion 52 of the swirling flow forming body 5 is full) (step Sb3: YES), the solenoid valve 2A is used. Control, the supply of the liquid to the swirling flow forming body 5 is stopped through the introduction port 57, and the solenoid valve 2B is controlled to start the supply of the liquid to the swirling flow forming body 5 through the supply port 61 (step Sb4). As a result, the liquid is supplied from the discharge port 54 provided on the inner peripheral side surface of the recess 52 into the recess 52, and a swirling flow is formed in the recess 52. In this state, if the plate-like member is present in contact with the end surface 53 of the swirling flow forming body 5, a negative pressure occurs between the swirling flow forming body 5 and the plate-like member, whereby the plate-like member is caused by the negative pressure. The swirling flow forming body 5 is held by suction.

The control operation performed by the microcomputer 4A is explained above.

According to the control operation of the present embodiment described above, since the recessed portion 52 is filled with water before the swirling flow is formed in the recess 52, and then the swirling flow is formed, it is empty in the recess 52 as in the first embodiment. In comparison with the case where the state begins to form a swirling flow, a higher suction pressure can be obtained. Further, in the conveyance of the plate-shaped member, since the inside of the concave portion 52 of the swirling flow forming body 5 is filled with liquid, the formation of the watermark is prevented as in the first embodiment.

3. Third Embodiment

Fig. 12 is a perspective view showing an example of the swirling flow forming body 7 of the third embodiment of the present invention. Fig. 13 is a sectional view taken along line E-E of Fig. 12. Fig. 14 is a cross-sectional view taken along line F-F of Fig. 12. The whirling flow forming body 7 is a device for holding a plate-shaped member such as a semiconductor wafer or a glass substrate. The swirling flow forming body 7 holds the member by discharging a liquid and generating a negative pressure between the plate member. The liquid here is, for example, pure water and carbonated water. The material of the swirling flow forming body 7 is, for example, an aluminum alloy. This swirling flow forming body 7 is an example of the "holding device" of the present invention.

The swirling flow forming body 7 is as shown in Fig. 12 to Fig. 14 The main body 71, the concave portion 72, the end surface 73, and the four discharge ports 74a, 74b, 74c, and 74d (hereinafter collectively referred to as "discharge port 74"), the inclined surface 75, and the four introduction ports 76a are provided. 76b, 76c, and 76d (hereinafter, collectively referred to as "introduction port 76"), and four introduction paths 77a, 77b, 77c, and 77d (hereinafter, collectively referred to as "introduction path 77").

The body 71 has a cylindrical shape. End face 73, is in this The surface of one of the bodies 71 (specifically, the surface facing the object to be held, that is, the plate-like member) (hereinafter referred to as "bottom surface") is formed in a flat shape. The recess 72 has a cylindrical shape and is formed on the end surface 73. The recess 72 is formed coaxially with the body 71.

4 discharge outlets 74, each having a round shape, formed in this The body 71 faces the inner peripheral side surface of the recess 72. The four discharge ports 74 are arranged in the axial center portion on the inner circumferential side surface. The discharge ports 74a and 74c are disposed to face each other. Specifically, it is arranged to be point-symmetric about the axis of the central axis of the body 71 or the recess 72. Spit outlet 74b and 74d, is configured to face each other. Specifically, it is arranged to be point-symmetric about the axis of the central axis of the body 71 or the recess 72. The liquid supplied to the swirling flow forming body 7 is discharged into the concave portion 72 through the respective discharge ports 74.

The inclined surface 75 is an opening formed in the concave portion 72. 4 The inlets 76 are each formed in a circular shape and formed on the outer peripheral side surface of the body 71. The four introduction ports 76 are connected by a liquid supply pump 3B to be described later, for example, a pipe, and the liquid is supplied into the body 71 through the introduction port 76.

The four introduction paths 77 are substantially parallel to the end faces 73, and The outer circumference of the concave portion 72 is formed to extend in the tangential direction. Each of the introduction paths 77 connects the discharge port 74 and the introduction port 76. Specifically, the introduction path 77a is connected to the discharge port 74a and the introduction port 76a, and the introduction path 77b is connected to the discharge port 74b and the introduction port 76b, and the introduction path 77c is connected to the discharge port 74c and the introduction port 76c. The path 77 connects the discharge port 74d and the introduction port 76d.

Each of the introduction paths 77 is arranged to extend in parallel with each other. Import The road 77a and the introduction path 77d are arranged on the same straight line, and the introduction path 77b and the introduction path 77d are arranged on the same straight line. The introduction paths 77a and 77c discharge the liquid in the concave portion 72, and in the concave portion 72, a swirling flow which is rotated counterclockwise as seen from the bottom surface side of the swirling flow formation body 7 is formed. The introduction paths 77b and 77d discharge the liquid in the concave portion 72, and in the concave portion 72, a swirling flow which is rotated clockwise from the bottom surface side of the swirling flow formation body 7 is formed. Each of the introduction paths 77 is an example of the "liquid passage" of the present invention. In particular, the introduction paths 77a and 77c are the "third stream" of the present invention. In the example of the body passage, the introduction paths 77b and 77d are examples of the "fourth fluid passage" of the present invention.

For the swirling flow forming body 7 described above, the liquid is permeated For example, when the inlets 76a and 76c are supplied, the liquid is discharged from the discharge ports 74a and 74c into the recess 72 through the introduction path 77. The liquid discharged into the concave portion 72 is rectified as a swirling flow in the concave portion 72, and then flows out from the opening portion of the concave portion 72. At this time, when the plate-like member exists in contact with the end surface 73, the inflow of the external fluid (for example, air) into the recess 72 is restricted, and the centrifugal force and the entrainment effect of the swirling flow are at the center of the swirling flow. The density of fluid molecules per unit volume becomes smaller and negative pressure occurs. As a result, the plate-like member is moved toward the end surface 73 side by the surrounding fluid being pushed. On the other hand, as the distance between the end surface 73 and the plate-like member approaches, the amount of liquid flowing out from the concave portion 72 is restricted, and the velocity of the liquid discharged from the discharge ports 74a and 74c toward the concave portion 72 becomes slow, and the swirling flow The pressure in the center will rise. As a result, the plate member does not come into contact with the end surface 73, and is held at a constant distance between the plate member and the end surface 73.

Figure 15 is a view showing the conveyance including the swirling flow forming body 7. A diagram of an example of the circuit configuration of the system 300. As shown in Fig. 15, the introduction ports 76a and 76c of the swirling flow forming body 7 are connected to the liquid supply pump 3B through a solenoid valve 2C by, for example, a tube. On the other hand, the introduction ports 76b and 76d are connected to the liquid supply pump 3B through the electromagnetic valve 2D by, for example, a tube. The solenoid valves 2C and 2D are individually connected to the microcomputer 4B.

Solenoid valves 2C and 2D are output from the microcomputer 4B The conduction of the disconnection control signal permits or interrupts the passage of the liquid supplied from the liquid supply pump 3B. The microcomputer 4B controls the supply of the liquid to the swirling flow forming body 7 by outputting the on/off control signal to the solenoid valves 2C and 2D in accordance with a predetermined program. This microcomputer 4B is an example of the "control device" of the present invention.

Figure 16 shows the control that is implemented by the microcomputer 4B. A flowchart of an example of a system operation. This control operation is carried out while holding and transporting the plate-shaped member by the swirling flow forming body 7 in the atmosphere. In the description of the operation, it is assumed that the opening of the concave portion 72 of the swirling flow forming body 7 is in the direction of the sky (in other words, the concave portion 72 is opened in a direction opposite to the vertical direction). Case.

In step Sc1 of this control action, the microcomputer 4B is The solenoid valves 2C and 2D control the supply of the liquid to the swirling flow forming body 7 through the introduction ports 76a to 76d. As a result, the liquid supplied into the concave portion 72 through the introduction ports 76a and 76c is a swirling flow that is formed to be reversed from the bottom surface side of the swirling flow forming body 7, and the through-inlet ports 76b and 76d are The liquid supplied into the recessed portion 72 is a swirling flow which is formed to be formed clockwise around the bottom surface side of the swirling flow forming body 7. As a result, the flows of the two cancel each other out, and no swirling flow is formed in the concave portion 72.

Then, the microcomputer 4B is started by the timer (step) Step Sc2). Further, the microcomputer 4B determines whether or not a predetermined time has elapsed (step Sc3). The predetermined time is the time required for the concave portion 72 of the swirling flow forming body 7 to become full, and the time is measured in advance and is memorized. On the microcomputer 4B.

Microcomputer 4B, when the specified time has not passed (step When the predetermined time elapses (ie, the concave portion 72 of the swirling flow forming body 7 is full) (step Sc3: YES), the solenoid valve 2C is maintained in the open state, and the solenoid valve 2D is controlled. The supply of the liquid to the swirling flow forming body 7 is stopped through the introduction ports 76b and 76d (step Sc4). As a result, the liquid is supplied into the concave portion 72 only through the introduction ports 76a and 76c, and a swirling flow is formed in the concave portion 72. In this state, if the plate-like member is present in contact with the end surface 73 of the swirling flow forming body 7, a negative pressure is generated between the swirling flow forming body 7 and the plate-like member, whereby the plate-like member is caused by the negative pressure. The swirling flow forming body 7 is held by suction.

The control operation performed by the microcomputer 4B is explained above.

According to the control action of the embodiment described above, In the case where the concave portion 72 is filled with water before the swirling flow is formed in the concave portion 72, and the swirling flow is formed thereafter, similarly to the first and second embodiments, the formation of the swirling flow is started in a state where the concave portion 72 is empty. In comparison, a higher suction pressure can be obtained. Further, in the conveyance of the plate-shaped member, since the inside of the concave portion 72 of the swirling flow forming body 7 is filled with liquid, the watermark is formed in the same manner as in the first and second embodiments. Being prevented.

4. Modifications

Each of the above embodiments may be modified as follows. Further, the following two or more modifications may be combined with each other.

4-1. Modification 1

The swirling flow forming body 1 of the above-described first embodiment may be used in a plurality of plate-shaped frames depending on the size of the plate-shaped member. FIG. 17 is a view showing an example of the configuration of the conveying device 10 of the present modification. Specifically, Fig. 17(a) is a bottom view of the transport device 10, and Fig. 17(b) is a side view of the transport device 10. As shown in Fig. 17, the conveying device 10 includes a base body 101, twelve swirling flow forming bodies 1, twelve friction members 102, and six hole portions 103.

The base 101 has a circular plate shape. Substrate 101 The quality is, for example, an aluminum alloy. The twelve swirling flow forming bodies 1 are provided on one surface of the base body 101 (specifically, a surface facing the held body, that is, the plate-shaped member W) (hereinafter referred to as "bottom surface"). The twelve swirling flow forming bodies 1 are arranged on the bottom surface of the same circle. The twelve swirling flow forming bodies 1 are arranged at equal intervals along the outer circumference of the base body 101.

12 friction members 102 each having a cylindrical shape and On the bottom surface of the base 101. The twelve friction members 102 are disposed on the bottom surface at equal intervals on the circumference of the same circle as the swirling flow formation body 1 disposed. One friction member 102 is disposed between the two swirling flow formation bodies 1. Each of the friction members 102 is a member that comes into contact with the surface of the body to be held, that is, the plate member W, and prevents the movement of the plate member W by the frictional force generated between the friction members 102. The material of each friction member 102 is, for example, fluororubber. The six hole portions 103 are through holes having a substantially rectangular shape and a rectangular shape provided in the base body 101. The six hole portions 103 are arranged on the circumference of the same circle on the base 101. Set at equal intervals. The hole 103 is disposed on a circumference of the circle, and is concentric with a circle on which the swirling flow forming body 1 is disposed. The hole portion 103 is disposed closer to the center of the surface of the base 101 than the swirling flow forming body 1.

Further, in the conveying device 10, the swirling flow forming body 5 of the second embodiment or the swirling flow forming body 7 of the third embodiment may be attached instead of the swirling flow forming body 1.

4-2. Modification 2

In the first modification described above, the shape of the conveying device 10 may be changed. FIG. 18 is a view showing an example of the configuration of the conveying device 20 of the present modification. Specifically, Fig. 18(a) is a bottom view of the conveying device 20, and Fig. 18(b) is a side view of the conveying device 20. As shown in Fig. 18, the conveying device 20 includes a base body 201, ten swirling flow forming bodies 1, and twelve friction members 102A.

The base 201 is a bifurcated plate-shaped member, and is composed of a rectangular grip portion 2011 and two wrist portions 2012 branched from the grip portion 2011. The material of the base 201 is, for example, an aluminum alloy. The ten swirling flow forming bodies 1 are provided on one surface of the two wrist portions 2012 constituting the base body 201 (specifically, a surface facing the held body, that is, the plate-shaped member W) (hereinafter, referred to as "Bottom"). The ten swirling flow forming bodies 1 are arranged on the circumference of the same circle in the two wrists 2012. The five swirling flow formation bodies 1 of the respective wrist portions 2012 are arranged at equal intervals.

The twelve friction members 102A are plate-shaped members and are provided on the bottom surfaces of the two wrist portions 2012. 12 friction members 102A are on the bottom surface, It is disposed on the circumference of the same circle as the swirling flow forming body 1 is disposed. In each of the wrist portions 2012, one of the swirling flow formation bodies 1 is held by the two friction members 102A. Each of the friction members 102A is in contact with the surface of the object to be conveyed, that is, the plate member W, and the movement of the plate member is prevented by the frictional force generated between the friction members 102A. The material of each friction member 102A is, for example, fluororubber.

Moreover, in the conveying device 20, the swirling flow forming body can be replaced 1. The swirling flow forming body 5 of the second embodiment or the swirling flow forming body 7 of the third embodiment may be attached.

4-3. Modification 3

In the control operation of each of the above-described embodiments, the plate-shaped member is conveyed so that the opening of the concave portion of the swirling flow forming body is oriented in the sky direction. However, the posture of the swirling flow forming body when the plate-shaped member is conveyed is not Limited to this. For example, the plate-shaped member may be conveyed in a state where the concave portion of the swirling flow forming body is opened in the vertical direction. Alternatively, the plate-shaped member may be conveyed in a state in which the concave portion of the swirling flow forming body is opened in a direction in which the vertical direction is inclined at a predetermined angle. In the case where the concave portion of the swirling flow forming body is full, the distance between the end portion of the swirling flow forming body and the surface of the plate-like member is smaller than the sectional area of the discharge port 14, for example. The member may be arranged for the swirling flow forming body. Alternatively, the plate-like member may be disposed on the swirling flow forming body such that the volume of the gap between the end portion of the swirling flow forming body and the surface of the plate-like member is smaller than the flow rate.

4-4. Modification 4

In the control operation of each of the above-described embodiments, the swirling flow is formed in the concave portion of the swirling flow forming body, and the swirling flow is not necessarily formed in the concave portion. For example, it is also possible to form a swirling flow by filling one half of the recess with a liquid. Alternatively, at least the discharge port of the fluid passage may be filled with liquid by the degree of liquid coverage to form a swirling flow. According to the experiment of the inventors of the present invention, it has been confirmed that even if a certain amount of liquid is filled in the concave portion, the amount of suction pressure becomes high.

4-5. Modification 5

In the control operation of each of the above-described embodiments, the time required for the inside of the concave portion of the swirling flow forming body to be full of water is measured in advance, and when the time passes, it is judged that the inside of the concave portion is full, but the actual value is detected by the sensor. When the height of the liquid surface in the recess is a predetermined amount, it is judged that the inside of the recess is full. For example, it is also possible to detect whether or not the inside of the concave portion is full of water by using an ultrasonic liquid level detecting sensor.

4-6. Modification 6

In the above embodiments, the program executed by the microcomputer 4, 4A or 4B is memorized in a magnetic tape, a magnetic disk, a floppy disk (FD), a compact disk, a magnetic disk (MO), a memory. It is also possible to provide the state of the memory medium. Moreover, the program can be downloaded through a communication route such as the Internet.

4-7. Modification 7

The shape of the body 11 of the swirling flow forming body 1 of the above-described first embodiment is not limited to the cylindrical corner post and the elliptical cylinder. The position of the discharge port 14 provided in the swirling flow forming body 1 is not limited to the axial center portion of the inner circumferential side surface of the concave portion 12. Further, the number of supply passages 19 provided in the swirling flow forming body 1 is not limited to two, and one or three or more may be used. Further, the supply path 19 is not limited to the tangential direction in the direction in which the outer periphery of the concave portion 12 is formed. Further, the inclined surface 15 may not be provided (that is, the end portion of the end surface 13 may not be chamfered). The above-described modifications are the swirling flow forming body 5 of the second embodiment and the swirling flow forming body 7 of the third embodiment.

The position of the discharge port 56 of the swirling flow forming body 5 of the second embodiment is not limited to the center of the bottom surface of the recess 52.

4-8. Modification 8

The configuration of the base 101 of the above-described conveyance device 10 is not limited to the example shown in the above-described modification 1. The number, shape, and arrangement of the friction member 102 and the hole portion 103 provided in the base 101 of the conveying device 10 are not limited to the examples shown in the above-described first modification. These elements can be determined in accordance with the size, shape, and material of the plate-shaped member W conveyed by the conveyance device 10. The friction member 102 and the hole portion 103 may not be provided in the base body 101 of the original conveying device 10. In the case where the friction member 102 is not provided in the base 101 of the conveying device 10, in the base 101, in order to position the plate-like member W, a well-known centering guide may be provided (for example, JP-A-2005- Reference No. 51260). Similarly, the configuration of the base 201 of the above-described conveying device 20 is not limited to the example shown in the above-described modification 2.

4-9. Modification 9

The number, configuration, and arrangement of the swirling flow forming bodies 1 provided in the base body 101 of the above-described conveying device 10 are not limited to the examples shown in the above-described first modification. These elements can be determined in accordance with the size, shape, and material of the plate-shaped member W conveyed by the conveyance device 10. For example, the number of the swirling flow forming bodies 1 may be 12 or less or 13 or more. Further, the swirling flow forming body 1 may be arranged in two or more rows along the outer circumference of the base body 101. Similarly, the number, configuration, and arrangement of the swirling flow forming bodies 5 provided in the base body 201 of the above-described conveying device 20 are not limited to the examples shown in the above-described second modification.

4-10. Modification 10

In the control operation of the second embodiment described above, the flow rate of the liquid supplied to the swirling flow forming body 5 in the step Sb1 may be the first flow rate of the first embodiment. Further, the flow rate of the liquid supplied to the swirling flow forming body 5 in the step Sb4 may be the second flow rate of the first embodiment.

In the control operation of the third embodiment described above, the flow rate of the liquid supplied to the swirling flow forming body 7 through the introduction ports 76a and 76c in the step Sc1 may be the first flow rate of the first embodiment. Further, the flow rate of the liquid supplied to the swirling flow forming body 7 through the introduction ports 76a and 76c in the step Sc4 may be the second flow rate of the first embodiment.

4-11. Modification 11

In the swirling flow forming body 1 of the above-described first embodiment, a well-known electric fan may be used (for the electric fan, for example, Japanese Laid-Open Patent Publication No. 2011-138948). Specifically, the electric fan is disposed in the concave portion 12 of the swirling flow forming body 1 such that the rotating shaft and the concave portion 12 are coaxial with each other, and the driving is stopped in the step Sa1 of the control operation, and the driving may be started in the step Sa4. That is, the electric fan may be driven when the swirling flow is formed. In the case of using an electric fan, the discharge port 14 of the first embodiment may be provided on the bottom surface of the recessed portion 12.

Further, the electric fan may be used in the same manner as the swirling flow forming body 5 of the second embodiment and the swirling flow forming body 7 of the third embodiment.

1‧‧‧ whirlpool formation

11‧‧‧Ontology

12‧‧‧ recess

14‧‧‧Exporting

17‧‧‧Circular access

19‧‧‧Supply road

Claims (5)

A control device for controlling the supply of liquid to a holding device that holds the held body by a negative pressure between the object and the object to be held by the discharge device, wherein the holding device includes a columnar body, And a flat end surface formed on the main body and facing the object to be held, a concave portion formed on the end surface, and one or more fluid passages for discharging the liquid through the discharge port in the concave portion, wherein the control device is In a state where the swirling flow is not formed in the recess, the supply of the liquid is controlled so that the discharge in the recess is filled with the liquid until the discharge port of the fluid passage is covered with the liquid until the discharge port of the fluid passage is covered with the liquid. After the liquid is filled in the concave portion, the supply of the liquid is controlled such that the swirling flow is formed by the liquid discharged from the fluid passage into the concave portion. The control device according to claim 1, wherein the control device sets a flow rate of the liquid supplied into the concave portion to a first amount, and a swirling flow is not formed in the concave portion. Until the discharge port of the fluid passage is covered by the liquid, the liquid is filled in the recess. After the discharge port of the fluid passage is filled with the liquid in the recessed portion until the discharge port of the fluid passage is covered with the liquid, the flow rate of the liquid supplied into the recessed portion is from the first amount to the second amount larger than the first amount. The amount is changed, and a swirling flow is formed by the liquid discharged from the fluid passage toward the inside of the recess. The control device according to the first aspect of the invention, wherein the one or more fluid passages include a first fluid passage that discharges liquid from a first discharge port provided on a bottom surface of the recessed portion, and a second fluid passage that discharges the liquid from the second discharge port on the inner circumferential side surface of the concave portion, and the control device supplies the liquid into the concave portion through the first fluid passage, and the swirling flow is not formed in the concave portion. Until the second discharge port is covered with the liquid, the inside of the recess is filled with the liquid, and after the second discharge port is covered with the liquid, the liquid is filled in the recess, and then the first fluid passage is stopped. The liquid is supplied into the recess through the second fluid passage to form a swirling flow. The control device according to the first aspect of the invention, wherein the one or more fluid passages include discharging liquid from a third discharge port provided on an inner circumferential side surface of the concave portion The third fluid passage that forms the first swirling flow and the fourth discharge port that is provided on the inner circumferential side surface of the recessed portion discharge the liquid to form a direction that is reversed in a direction opposite to the winding direction of the first swirling flow. In the fourth fluid passage of the swirling flow, the control device supplies the liquid into the concave portion through the third and fourth fluid passages, and the swirling flow is not formed in the concave portion until the third discharge port The supply of the liquid is controlled such that the liquid is filled in the recessed portion by the liquid, and the third discharge port is filled with the liquid in the recessed portion after the third discharge port is covered with the liquid, and then the third fluid passage is continuously supplied through the third fluid passage. In the state of the liquid, the supply of the liquid through the fourth fluid passage is stopped, and the swirling flow is formed by the liquid discharged from the third fluid passage into the recess. A control method for controlling supply of a liquid to a holding device that holds the liquid to be held by the holding body by a negative pressure between the liquid and the object to be held, wherein the holding device includes a columnar shape a main body and a flat end surface formed on the main body and facing the held body, a concave portion formed on the end surface, and one or more fluids that discharge the liquid through the discharge port in the concave portion In the above-described control method, the supply of the liquid is controlled such that the inside of the recess is filled with the liquid until the discharge port of the fluid passage is covered with the liquid in a state in which the swirling flow is not formed in the recess. And a step of controlling the supply of the liquid so as to form a swirling flow by the liquid discharged from the fluid passage into the concave portion until the discharge port of the fluid passage is filled with the liquid in the recessed portion; .