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TWI563663B - Semiconductor device and fabrication method thereof - Google Patents

Semiconductor device and fabrication method thereof

Info

Publication number
TWI563663B
TWI563663B TW102117265A TW102117265A TWI563663B TW I563663 B TWI563663 B TW I563663B TW 102117265 A TW102117265 A TW 102117265A TW 102117265 A TW102117265 A TW 102117265A TW I563663 B TWI563663 B TW I563663B
Authority
TW
Taiwan
Prior art keywords
semiconductor device
fabrication method
fabrication
semiconductor
Prior art date
Application number
TW102117265A
Other languages
Chinese (zh)
Other versions
TW201444086A (en
Inventor
Shih Fang Hong
Po Chao Tsao
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW102117265A priority Critical patent/TWI563663B/en
Publication of TW201444086A publication Critical patent/TW201444086A/en
Application granted granted Critical
Publication of TWI563663B publication Critical patent/TWI563663B/en

Links

TW102117265A 2013-05-15 2013-05-15 Semiconductor device and fabrication method thereof TWI563663B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102117265A TWI563663B (en) 2013-05-15 2013-05-15 Semiconductor device and fabrication method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102117265A TWI563663B (en) 2013-05-15 2013-05-15 Semiconductor device and fabrication method thereof

Publications (2)

Publication Number Publication Date
TW201444086A TW201444086A (en) 2014-11-16
TWI563663B true TWI563663B (en) 2016-12-21

Family

ID=52423425

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102117265A TWI563663B (en) 2013-05-15 2013-05-15 Semiconductor device and fabrication method thereof

Country Status (1)

Country Link
TW (1) TWI563663B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9941278B2 (en) * 2016-07-06 2018-04-10 Globalfoundries Inc. Method and apparatus for placing a gate contact inside an active region of a semiconductor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646046B2 (en) * 2006-11-14 2010-01-12 Infineon Technologies Ag Field effect transistor with a fin structure
US7700456B2 (en) * 2006-10-16 2010-04-20 Elpida Memory, Inc. Semiconductor device and manufacturing method of the same
US20110111592A1 (en) * 2009-11-09 2011-05-12 International Business Machines Corporation Angle ion implant to re-shape sidewall image transfer patterns

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7700456B2 (en) * 2006-10-16 2010-04-20 Elpida Memory, Inc. Semiconductor device and manufacturing method of the same
US7646046B2 (en) * 2006-11-14 2010-01-12 Infineon Technologies Ag Field effect transistor with a fin structure
US20110111592A1 (en) * 2009-11-09 2011-05-12 International Business Machines Corporation Angle ion implant to re-shape sidewall image transfer patterns

Also Published As

Publication number Publication date
TW201444086A (en) 2014-11-16

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