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TWI563586B - Substrate-separating apparatus and substrate-separating method - Google Patents

Substrate-separating apparatus and substrate-separating method

Info

Publication number
TWI563586B
TWI563586B TW104122741A TW104122741A TWI563586B TW I563586 B TWI563586 B TW I563586B TW 104122741 A TW104122741 A TW 104122741A TW 104122741 A TW104122741 A TW 104122741A TW I563586 B TWI563586 B TW I563586B
Authority
TW
Taiwan
Prior art keywords
substrate
separating
separating apparatus
separating method
Prior art date
Application number
TW104122741A
Other languages
Chinese (zh)
Other versions
TW201703168A (en
Inventor
Shih Chieh Chiang
Hon Bin Lioa
Chih Chieh Wu
Original Assignee
Motech Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motech Ind Inc filed Critical Motech Ind Inc
Priority to TW104122741A priority Critical patent/TWI563586B/en
Priority to CN201510485571.3A priority patent/CN106356422B/en
Application granted granted Critical
Publication of TWI563586B publication Critical patent/TWI563586B/en
Publication of TW201703168A publication Critical patent/TW201703168A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/137—Batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
TW104122741A 2015-07-14 2015-07-14 Substrate-separating apparatus and substrate-separating method TWI563586B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW104122741A TWI563586B (en) 2015-07-14 2015-07-14 Substrate-separating apparatus and substrate-separating method
CN201510485571.3A CN106356422B (en) 2015-07-14 2015-08-10 Substrate separation device and substrate separation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104122741A TWI563586B (en) 2015-07-14 2015-07-14 Substrate-separating apparatus and substrate-separating method

Publications (2)

Publication Number Publication Date
TWI563586B true TWI563586B (en) 2016-12-21
TW201703168A TW201703168A (en) 2017-01-16

Family

ID=57843171

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104122741A TWI563586B (en) 2015-07-14 2015-07-14 Substrate-separating apparatus and substrate-separating method

Country Status (2)

Country Link
CN (1) CN106356422B (en)
TW (1) TWI563586B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113937045B (en) * 2021-12-08 2022-05-06 晶科能源(海宁)有限公司 A feeding device and a battery chip feeding method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2934442B2 (en) * 1988-09-19 1999-08-16 株式会社日立製作所 Paper sheet separating and feeding device and sheet separating and feeding method
JPH09194062A (en) * 1996-01-19 1997-07-29 Nissan Motor Co Ltd Sheet material separating and feeding device
JPH10321714A (en) * 1997-05-20 1998-12-04 Sony Corp Closed container, atmosphere replacement device and method for closed container
JP3911405B2 (en) * 2001-11-15 2007-05-09 トヨタ自動車株式会社 Sheet take-out apparatus and sheet take-out method
JP5949119B2 (en) * 2012-05-10 2016-07-06 株式会社リコー Sheet conveying apparatus and image forming apparatus
JP6187044B2 (en) * 2012-08-30 2017-08-30 株式会社リコー Sheet conveying apparatus and image forming apparatus
KR101387519B1 (en) * 2012-11-01 2014-04-24 주식회사 유진테크 Purge chamber and substrate processing apparatus including the same
CN203218305U (en) * 2013-03-29 2013-09-25 衡水英利新能源有限公司 Radiated multilayer blowing pipe

Also Published As

Publication number Publication date
CN106356422B (en) 2018-02-09
CN106356422A (en) 2017-01-25
TW201703168A (en) 2017-01-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees