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TWI563550B - Substrate processing method and substrate processing apparatus - Google Patents

Substrate processing method and substrate processing apparatus

Info

Publication number
TWI563550B
TWI563550B TW104106981A TW104106981A TWI563550B TW I563550 B TWI563550 B TW I563550B TW 104106981 A TW104106981 A TW 104106981A TW 104106981 A TW104106981 A TW 104106981A TW I563550 B TWI563550 B TW I563550B
Authority
TW
Taiwan
Prior art keywords
substrate processing
processing apparatus
processing method
substrate
processing
Prior art date
Application number
TW104106981A
Other languages
Chinese (zh)
Other versions
TW201523712A (en
Inventor
Katsuhiko Miya
Naozumi Fujiwara
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2011001367A external-priority patent/JP5701068B2/en
Priority claimed from JP2011222634A external-priority patent/JP5801678B2/en
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Publication of TW201523712A publication Critical patent/TW201523712A/en
Application granted granted Critical
Publication of TWI563550B publication Critical patent/TWI563550B/en

Links

TW104106981A 2011-01-06 2011-11-11 Substrate processing method and substrate processing apparatus TWI563550B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011001367A JP5701068B2 (en) 2011-01-06 2011-01-06 Substrate processing apparatus and substrate processing method
JP2011016178 2011-01-28
JP2011222634A JP5801678B2 (en) 2011-01-28 2011-10-07 Substrate processing method and substrate processing apparatus

Publications (2)

Publication Number Publication Date
TW201523712A TW201523712A (en) 2015-06-16
TWI563550B true TWI563550B (en) 2016-12-21

Family

ID=53935775

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104106981A TWI563550B (en) 2011-01-06 2011-11-11 Substrate processing method and substrate processing apparatus

Country Status (1)

Country Link
TW (1) TWI563550B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9964863B1 (en) 2016-12-20 2018-05-08 Applied Materials, Inc. Post exposure processing apparatus
JP6896474B2 (en) * 2017-03-27 2021-06-30 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing equipment and substrate processing method
CN114121715B (en) * 2020-08-31 2025-10-24 芝浦机械电子株式会社 Substrate processing device and substrate processing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101145502A (en) * 2006-09-13 2008-03-19 大日本网目版制造株式会社 Substrate processing apparatus, liquid film freezing method, and substrate processing method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101145502A (en) * 2006-09-13 2008-03-19 大日本网目版制造株式会社 Substrate processing apparatus, liquid film freezing method, and substrate processing method

Also Published As

Publication number Publication date
TW201523712A (en) 2015-06-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees