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TWI562315B - Semiconductor structure and manufacturing method for the same - Google Patents

Semiconductor structure and manufacturing method for the same

Info

Publication number
TWI562315B
TWI562315B TW103123119A TW103123119A TWI562315B TW I562315 B TWI562315 B TW I562315B TW 103123119 A TW103123119 A TW 103123119A TW 103123119 A TW103123119 A TW 103123119A TW I562315 B TWI562315 B TW I562315B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
semiconductor structure
semiconductor
Prior art date
Application number
TW103123119A
Other languages
Chinese (zh)
Other versions
TW201603225A (en
Inventor
Erh Kun Lai
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW103123119A priority Critical patent/TWI562315B/en
Publication of TW201603225A publication Critical patent/TW201603225A/en
Application granted granted Critical
Publication of TWI562315B publication Critical patent/TWI562315B/en

Links

TW103123119A 2014-07-04 2014-07-04 Semiconductor structure and manufacturing method for the same TWI562315B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103123119A TWI562315B (en) 2014-07-04 2014-07-04 Semiconductor structure and manufacturing method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103123119A TWI562315B (en) 2014-07-04 2014-07-04 Semiconductor structure and manufacturing method for the same

Publications (2)

Publication Number Publication Date
TW201603225A TW201603225A (en) 2016-01-16
TWI562315B true TWI562315B (en) 2016-12-11

Family

ID=55641674

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103123119A TWI562315B (en) 2014-07-04 2014-07-04 Semiconductor structure and manufacturing method for the same

Country Status (1)

Country Link
TW (1) TWI562315B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201034169A (en) * 2009-03-03 2010-09-16 Macronix Int Co Ltd Integrated circuit self aligned 3D memory array and manufacturing method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201034169A (en) * 2009-03-03 2010-09-16 Macronix Int Co Ltd Integrated circuit self aligned 3D memory array and manufacturing method

Also Published As

Publication number Publication date
TW201603225A (en) 2016-01-16

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