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TWI562239B - Pattern forming method and heating device - Google Patents

Pattern forming method and heating device

Info

Publication number
TWI562239B
TWI562239B TW102140526A TW102140526A TWI562239B TW I562239 B TWI562239 B TW I562239B TW 102140526 A TW102140526 A TW 102140526A TW 102140526 A TW102140526 A TW 102140526A TW I562239 B TWI562239 B TW I562239B
Authority
TW
Taiwan
Prior art keywords
heating device
forming method
pattern forming
pattern
heating
Prior art date
Application number
TW102140526A
Other languages
Chinese (zh)
Other versions
TW201519320A (en
Inventor
Makoto Muramatsu
Takahiro Kitano
Tadatoshi Tomita
Keiji Tanouchi
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to TW102140526A priority Critical patent/TWI562239B/en
Publication of TW201519320A publication Critical patent/TW201519320A/en
Application granted granted Critical
Publication of TWI562239B publication Critical patent/TWI562239B/en

Links

TW102140526A 2013-11-07 2013-11-07 Pattern forming method and heating device TWI562239B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102140526A TWI562239B (en) 2013-11-07 2013-11-07 Pattern forming method and heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102140526A TWI562239B (en) 2013-11-07 2013-11-07 Pattern forming method and heating device

Publications (2)

Publication Number Publication Date
TW201519320A TW201519320A (en) 2015-05-16
TWI562239B true TWI562239B (en) 2016-12-11

Family

ID=53721037

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102140526A TWI562239B (en) 2013-11-07 2013-11-07 Pattern forming method and heating device

Country Status (1)

Country Link
TW (1) TWI562239B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013150955A1 (en) * 2012-04-06 2013-10-10 東京エレクトロン株式会社 Pattern formation method, pattern formation device, and computer-readable storage medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013150955A1 (en) * 2012-04-06 2013-10-10 東京エレクトロン株式会社 Pattern formation method, pattern formation device, and computer-readable storage medium

Also Published As

Publication number Publication date
TW201519320A (en) 2015-05-16

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