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TWI562193B - Delamination device, delamination system, and delamination method - Google Patents

Delamination device, delamination system, and delamination method

Info

Publication number
TWI562193B
TWI562193B TW103107712A TW103107712A TWI562193B TW I562193 B TWI562193 B TW I562193B TW 103107712 A TW103107712 A TW 103107712A TW 103107712 A TW103107712 A TW 103107712A TW I562193 B TWI562193 B TW I562193B
Authority
TW
Taiwan
Prior art keywords
delamination
delamination method
delamination device
delamination system
Prior art date
Application number
TW103107712A
Other languages
English (en)
Other versions
TW201447973A (zh
Inventor
Masatoshi Deguchi
Takashi Sakaue
Kei Tashiro
Masanori Itou
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201447973A publication Critical patent/TW201447973A/zh
Application granted granted Critical
Publication of TWI562193B publication Critical patent/TWI562193B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/18—Handling of layers or the laminate
    • B32B38/1858—Handling of layers or the laminate using vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • H10P72/0428—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/14—Semiconductor wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1105—Delaminating process responsive to feed or shape at delamination
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1906—Delaminating means responsive to feed or shape at delamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW103107712A 2013-03-07 2014-03-06 Delamination device, delamination system, and delamination method TWI562193B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013045969A JP5909453B2 (ja) 2013-03-07 2013-03-07 剥離装置、剥離システムおよび剥離方法

Publications (2)

Publication Number Publication Date
TW201447973A TW201447973A (zh) 2014-12-16
TWI562193B true TWI562193B (en) 2016-12-11

Family

ID=51486370

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103107712A TWI562193B (en) 2013-03-07 2014-03-06 Delamination device, delamination system, and delamination method

Country Status (4)

Country Link
US (1) US20140251546A1 (zh)
JP (1) JP5909453B2 (zh)
KR (1) KR102066293B1 (zh)
TW (1) TWI562193B (zh)

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JP2013033925A (ja) * 2011-07-01 2013-02-14 Tokyo Electron Ltd 洗浄方法、プログラム、コンピュータ記憶媒体、洗浄装置及び剥離システム
US20140251533A1 (en) * 2013-03-11 2014-09-11 Samsung Display Co., Ltd. Substrate peeling device, method for peeling substrate, and method for fabricating flexible display device
JP5977710B2 (ja) * 2013-05-10 2016-08-24 東京エレクトロン株式会社 剥離装置、剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
KR102437535B1 (ko) 2016-11-15 2022-08-30 코닝 인코포레이티드 기판을 처리하는 방법
US11183410B2 (en) * 2017-04-24 2021-11-23 Photronics, Inc. Pellicle removal tool
WO2019059057A1 (ja) * 2017-09-20 2019-03-28 日本電気硝子株式会社 ガラス基板の製造方法
KR102067981B1 (ko) * 2017-09-29 2020-01-20 주식회사 탑 엔지니어링 기판 절단 장치
KR102014610B1 (ko) * 2017-12-27 2019-08-26 캐논 톡키 가부시키가이샤 정전척, 성막 장치, 기판 흡착/박리 방법, 성막 방법, 및 전자 디바이스의 제조 방법
KR102654506B1 (ko) * 2018-10-26 2024-04-03 세메스 주식회사 웨이퍼 분리 방법 및 웨이퍼 분리 장치
KR102823385B1 (ko) * 2018-11-21 2025-06-20 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 처리 방법
KR102720900B1 (ko) * 2019-01-21 2024-10-24 가부시끼 가이샤 도꾜 세이미쯔 웨이퍼 박리 세정 장치
FR3093715B1 (fr) * 2019-03-15 2021-03-05 Soitec Silicon On Insulator Dispositif de maintien pour un ensemble à fracturer
KR102203718B1 (ko) * 2019-07-26 2021-01-18 한국철도기술연구원 형상모방형 다중흡착시스템
KR102288929B1 (ko) * 2019-11-01 2021-08-12 세메스 주식회사 웨이퍼 분리 방법 및 웨이퍼 분리 장치
FR3103313B1 (fr) * 2019-11-14 2021-11-12 Commissariat Energie Atomique Procédé de démontage d’un empilement d’au moins trois substrats
KR20250119666A (ko) * 2020-04-20 2025-08-07 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 처리 방법
US12508479B2 (en) 2021-05-14 2025-12-30 Taylor Made Golf Company, Inc. System and method for forming a golf club head having a composite face
US11633947B2 (en) 2021-05-14 2023-04-25 Taylor Made Golf Company, Inc. Automated system and method for forming a laminated structure
JP7766480B2 (ja) * 2021-12-02 2025-11-10 東京エレクトロン株式会社 剥離システムおよび剥離方法
KR102736261B1 (ko) * 2022-11-03 2024-12-02 주식회사 제우스 기판 분리 장치
KR102811159B1 (ko) * 2023-11-24 2025-05-26 주식회사 제우스 기판 처리 장치 및 그 제어 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058869A (ja) * 2008-09-01 2010-03-18 Fujifilm Corp フイルム剥離装置及び方法
JP2010232428A (ja) * 2009-03-27 2010-10-14 Nitto Denko Corp 保護テープ剥離方法およびこれを用いた保護テープ剥離装置
JP2012069915A (ja) * 2010-08-23 2012-04-05 Tokyo Electron Ltd 剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体

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FR2834380B1 (fr) * 2002-01-03 2005-02-18 Soitec Silicon On Insulator Dispositif de coupe de couche d'un substrat, et procede associe
US7187162B2 (en) * 2002-12-16 2007-03-06 S.O.I.Tec Silicon On Insulator Technologies S.A. Tools and methods for disuniting semiconductor wafers
JP2006059861A (ja) * 2004-08-17 2006-03-02 Lintec Corp 脆質部材の転着装置
JP4869622B2 (ja) * 2005-04-19 2012-02-08 信越半導体株式会社 貼り合わせウエーハの製造方法及びそれに用いる剥離用治具
JP5291392B2 (ja) * 2008-06-18 2013-09-18 東京応化工業株式会社 支持板剥離装置
US8366873B2 (en) * 2010-04-15 2013-02-05 Suss Microtec Lithography, Gmbh Debonding equipment and methods for debonding temporary bonded wafers
EP2290679B1 (de) * 2009-09-01 2016-05-04 EV Group GmbH Vorrichtung und Verfahren zum Ablösen eines Produktsubstrats (z.B. eines Halbleiterwafers) von einem Trägersubstrat durch Verformung eines auf einem Filmrahmen montierten flexiblen Films
JP5547954B2 (ja) * 2009-12-14 2014-07-16 日東電工株式会社 粘着テープ剥離方法およびその装置
US8758552B2 (en) * 2010-06-07 2014-06-24 Skyworks Solutions, Inc. Debonders and related devices and methods for semiconductor fabrication
JP5455987B2 (ja) 2010-08-23 2014-03-26 東京エレクトロン株式会社 剥離装置、剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
JP5616205B2 (ja) * 2010-11-29 2014-10-29 東京エレクトロン株式会社 基板処理システム、基板処理方法、プログラム及びコンピュータ記憶媒体
US8470129B1 (en) * 2012-05-08 2013-06-25 Shenzhen China Star Optoelectronics Technology Co., Ltd. Method and machine for separating liquid crystal panel and liner pad

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058869A (ja) * 2008-09-01 2010-03-18 Fujifilm Corp フイルム剥離装置及び方法
JP2010232428A (ja) * 2009-03-27 2010-10-14 Nitto Denko Corp 保護テープ剥離方法およびこれを用いた保護テープ剥離装置
JP2012069915A (ja) * 2010-08-23 2012-04-05 Tokyo Electron Ltd 剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体

Also Published As

Publication number Publication date
JP5909453B2 (ja) 2016-04-26
JP2014175420A (ja) 2014-09-22
US20140251546A1 (en) 2014-09-11
KR20140110749A (ko) 2014-09-17
KR102066293B1 (ko) 2020-01-14
TW201447973A (zh) 2014-12-16

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