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TWI561883B - Mems movable lens module and mems actuator thereof - Google Patents

Mems movable lens module and mems actuator thereof

Info

Publication number
TWI561883B
TWI561883B TW104101990A TW104101990A TWI561883B TW I561883 B TWI561883 B TW I561883B TW 104101990 A TW104101990 A TW 104101990A TW 104101990 A TW104101990 A TW 104101990A TW I561883 B TWI561883 B TW I561883B
Authority
TW
Taiwan
Prior art keywords
mems
lens module
movable lens
actuator
mems actuator
Prior art date
Application number
TW104101990A
Other languages
Chinese (zh)
Other versions
TW201627699A (en
Inventor
Hung Lin Shih
Original Assignee
Ultimems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultimems Inc filed Critical Ultimems Inc
Priority to TW104101990A priority Critical patent/TWI561883B/en
Publication of TW201627699A publication Critical patent/TW201627699A/en
Application granted granted Critical
Publication of TWI561883B publication Critical patent/TWI561883B/en

Links

TW104101990A 2015-01-21 2015-01-21 Mems movable lens module and mems actuator thereof TWI561883B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104101990A TWI561883B (en) 2015-01-21 2015-01-21 Mems movable lens module and mems actuator thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104101990A TWI561883B (en) 2015-01-21 2015-01-21 Mems movable lens module and mems actuator thereof

Publications (2)

Publication Number Publication Date
TW201627699A TW201627699A (en) 2016-08-01
TWI561883B true TWI561883B (en) 2016-12-11

Family

ID=57181761

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104101990A TWI561883B (en) 2015-01-21 2015-01-21 Mems movable lens module and mems actuator thereof

Country Status (1)

Country Link
TW (1) TWI561883B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6963679B1 (en) * 2000-05-24 2005-11-08 Active Optical Networks, Inc. Micro-opto-electro-mechanical switching system
US20100033835A1 (en) * 2005-03-21 2010-02-11 Artificial Muscle, Inc. Optical lens displacement systems
TW201107811A (en) * 2009-03-13 2011-03-01 Knowles Electronics Llc Lens assembly apparatus and method
US20110304914A1 (en) * 2007-11-09 2011-12-15 Gutierrez Roman C Integrated lens barrel
US20140184890A1 (en) * 2012-12-31 2014-07-03 Digitaloptics Corporation Auto-Focus Camera Module with MEMS Capacitance Estimator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6963679B1 (en) * 2000-05-24 2005-11-08 Active Optical Networks, Inc. Micro-opto-electro-mechanical switching system
US20100033835A1 (en) * 2005-03-21 2010-02-11 Artificial Muscle, Inc. Optical lens displacement systems
US20110304914A1 (en) * 2007-11-09 2011-12-15 Gutierrez Roman C Integrated lens barrel
TW201107811A (en) * 2009-03-13 2011-03-01 Knowles Electronics Llc Lens assembly apparatus and method
US20140184890A1 (en) * 2012-12-31 2014-07-03 Digitaloptics Corporation Auto-Focus Camera Module with MEMS Capacitance Estimator

Also Published As

Publication number Publication date
TW201627699A (en) 2016-08-01

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