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TWI561682B - Deposition apparatus - Google Patents

Deposition apparatus

Info

Publication number
TWI561682B
TWI561682B TW104119254A TW104119254A TWI561682B TW I561682 B TWI561682 B TW I561682B TW 104119254 A TW104119254 A TW 104119254A TW 104119254 A TW104119254 A TW 104119254A TW I561682 B TWI561682 B TW I561682B
Authority
TW
Taiwan
Prior art keywords
deposition apparatus
deposition
Prior art date
Application number
TW104119254A
Other languages
Chinese (zh)
Other versions
TW201643274A (en
Inventor
Hsin Chi Hu
Original Assignee
Unimicron Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unimicron Technology Corp filed Critical Unimicron Technology Corp
Priority to TW104119254A priority Critical patent/TWI561682B/en
Application granted granted Critical
Publication of TWI561682B publication Critical patent/TWI561682B/en
Publication of TW201643274A publication Critical patent/TW201643274A/en

Links

TW104119254A 2015-06-15 2015-06-15 Deposition apparatus TWI561682B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104119254A TWI561682B (en) 2015-06-15 2015-06-15 Deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104119254A TWI561682B (en) 2015-06-15 2015-06-15 Deposition apparatus

Publications (2)

Publication Number Publication Date
TWI561682B true TWI561682B (en) 2016-12-11
TW201643274A TW201643274A (en) 2016-12-16

Family

ID=58055850

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104119254A TWI561682B (en) 2015-06-15 2015-06-15 Deposition apparatus

Country Status (1)

Country Link
TW (1) TWI561682B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM261829U (en) * 2003-12-11 2005-04-11 Chung Shan Inst Of Science High aspect ratio microstructure electrodeposited apparatus
CN201660705U (en) * 2010-04-12 2010-12-01 上海新阳半导体材料股份有限公司 Plating device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM261829U (en) * 2003-12-11 2005-04-11 Chung Shan Inst Of Science High aspect ratio microstructure electrodeposited apparatus
CN201660705U (en) * 2010-04-12 2010-12-01 上海新阳半导体材料股份有限公司 Plating device

Also Published As

Publication number Publication date
TW201643274A (en) 2016-12-16

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