[go: up one dir, main page]

TWI560821B - Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems - Google Patents

Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems

Info

Publication number
TWI560821B
TWI560821B TW104121888A TW104121888A TWI560821B TW I560821 B TWI560821 B TW I560821B TW 104121888 A TW104121888 A TW 104121888A TW 104121888 A TW104121888 A TW 104121888A TW I560821 B TWI560821 B TW I560821B
Authority
TW
Taiwan
Prior art keywords
high efficiency
semiconductor die
stacked semiconductor
associated systems
die assemblies
Prior art date
Application number
TW104121888A
Other languages
English (en)
Other versions
TW201606956A (zh
Inventor
Sameer S Vadhavkar
Xiao Li
Steven K Groothuis
Jian Li
Jaspreet S Gandhi
James M Derderian
David R Hembree
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of TW201606956A publication Critical patent/TW201606956A/zh
Application granted granted Critical
Publication of TWI560821B publication Critical patent/TWI560821B/zh

Links

Classifications

    • H10W40/037
    • H10W40/10
    • H10W40/22
    • H10W74/01
    • H10W74/012
    • H10W74/15
    • H10W76/12
    • H10W90/00
    • H10W95/00
    • H10W72/01
    • H10W90/22
    • H10W90/28
    • H10W90/288
    • H10W90/722
TW104121888A 2014-07-14 2015-07-06 Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems TWI560821B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/330,934 US9443744B2 (en) 2014-07-14 2014-07-14 Stacked semiconductor die assemblies with high efficiency thermal paths and associated methods

Publications (2)

Publication Number Publication Date
TW201606956A TW201606956A (zh) 2016-02-16
TWI560821B true TWI560821B (en) 2016-12-01

Family

ID=55068138

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104121888A TWI560821B (en) 2014-07-14 2015-07-06 Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems

Country Status (7)

Country Link
US (2) US9443744B2 (zh)
EP (1) EP3170198B1 (zh)
JP (1) JP6626083B2 (zh)
KR (1) KR101963984B1 (zh)
CN (1) CN106663661B (zh)
TW (1) TWI560821B (zh)
WO (1) WO2016010707A1 (zh)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9735082B2 (en) 2013-12-04 2017-08-15 Taiwan Semiconductor Manufacturing Company, Ltd. 3DIC packaging with hot spot thermal management features
US9691746B2 (en) 2014-07-14 2017-06-27 Micron Technology, Inc. Methods of manufacturing stacked semiconductor die assemblies with high efficiency thermal paths
US20170094842A1 (en) * 2015-09-28 2017-03-30 Infineon Technologies Austria Ag Power Supply and Method
US9960150B2 (en) 2016-06-13 2018-05-01 Micron Technology, Inc. Semiconductor device assembly with through-mold cooling channel formed in encapsulant
US10008395B2 (en) * 2016-10-19 2018-06-26 Micron Technology, Inc. Stacked semiconductor die assemblies with high efficiency thermal paths and molded underfill
US10163750B2 (en) 2016-12-05 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure for heat dissipation
US9865570B1 (en) * 2017-02-14 2018-01-09 Globalfoundries Inc. Integrated circuit package with thermally conductive pillar
US10199356B2 (en) 2017-02-24 2019-02-05 Micron Technology, Inc. Semiconductor device assembles with electrically functional heat transfer structures
US10096576B1 (en) 2017-06-13 2018-10-09 Micron Technology, Inc. Semiconductor device assemblies with annular interposers
US10090282B1 (en) 2017-06-13 2018-10-02 Micron Technology, Inc. Semiconductor device assemblies with lids including circuit elements
US10515867B2 (en) * 2017-11-14 2019-12-24 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and manufacturing method thereof
US10748881B2 (en) * 2017-12-05 2020-08-18 Seoul Viosys Co., Ltd. Light emitting device with LED stack for display and display apparatus having the same
US10424528B2 (en) * 2018-02-07 2019-09-24 Toyota Motor Engineering & Manufacturing North America, Inc. Layered cooling structure including insulative layer and multiple metallization layers
US10529637B1 (en) 2018-10-31 2020-01-07 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit package and method of forming same
US11903168B2 (en) 2018-11-29 2024-02-13 Denka Company Limited Heat dissipation member
US10818569B2 (en) * 2018-12-04 2020-10-27 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor device and a method of manufacturing a semiconductor device
US12027496B2 (en) 2019-02-22 2024-07-02 Intel Corporation Film in substrate for releasing z stack-up constraint
KR102562315B1 (ko) * 2019-10-14 2023-08-01 삼성전자주식회사 반도체 패키지
US20240203807A1 (en) * 2019-10-31 2024-06-20 President And Fellows Of Harvard College Fluid-infused encapsulation of water-sensitive materials with replenishable, multiscale water repellency
US11217502B2 (en) * 2019-11-06 2022-01-04 Advanced Semiconductor Engineering, Inc. Semiconductor device packages and methods of manufacturing the same
KR102715474B1 (ko) * 2019-11-15 2024-10-11 삼성전자주식회사 언더 필 물질 층을 포함하는 반도체 패키지 및 그 형성방법
CN113035801A (zh) * 2019-12-25 2021-06-25 台湾积体电路制造股份有限公司 存储器装置及其制造方法
US11011449B1 (en) 2020-02-27 2021-05-18 Micron Technology, Inc. Apparatus and method for dissipating heat in multiple semiconductor device modules
KR102751333B1 (ko) * 2020-06-01 2025-01-07 삼성전자주식회사 반도체 패키지
US11804467B2 (en) * 2020-06-25 2023-10-31 Micron Technology, Inc. Radiative heat collective bonder and gangbonder
US12289871B2 (en) 2020-09-15 2025-04-29 Jetcool Technologies Inc. High temperature electronic device thermal management system
WO2022060898A1 (en) 2020-09-15 2022-03-24 Jetcool Technologies Inc. High temperature electronic device thermal management system
KR102854683B1 (ko) * 2020-12-02 2025-09-03 에스케이하이닉스 주식회사 방열층을 포함한 반도체 패키지
US11587887B2 (en) * 2021-01-14 2023-02-21 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and manufacturing method thereof
WO2022159447A1 (en) * 2021-01-20 2022-07-28 Jetcool Technologies Inc. Conformal cooling assembly with substrate fluid-proofing for multi-die electronic assemblies
US11855006B2 (en) * 2021-07-29 2023-12-26 Taiwan Semiconductor Manufacturing Company, Ltd. Memory device, package structure and fabricating method thereof
US12048118B2 (en) 2021-08-13 2024-07-23 Jetcool Technologies Inc. Flow-through, hot-spot-targeting immersion cooling assembly
US12289861B2 (en) 2021-11-12 2025-04-29 Jetcool Technologies Inc. Liquid-in-liquid cooling system for electronic components
US20230260896A1 (en) * 2022-02-17 2023-08-17 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit package and method
TW202407925A (zh) 2022-03-04 2024-02-16 美商捷控技術有限公司 用於電腦處理器及處理器組件之主動冷卻散熱蓋
KR20240071907A (ko) * 2022-11-16 2024-05-23 삼성전자주식회사 반도체 패키지 및 반도체 패키지의 제조 방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019377A1 (en) * 2008-07-22 2010-01-28 International Business Machines Corporation Segmentation of a die stack for 3d packaging thermal management
US20100044856A1 (en) * 2008-08-19 2010-02-25 International Business Machines Corporation Electronic package with a thermal interposer and method of manufacturing the same
US20120007229A1 (en) * 2010-07-08 2012-01-12 International Business Machines Corporation Enhanced thermal management of 3-d stacked die packaging
US20130016477A1 (en) * 2011-07-11 2013-01-17 Texas Instruments Incorporated Electronic Assembly Including Die on Substrate With Heat Spreader Having an Open Window on the Die
US20130119528A1 (en) * 2011-11-14 2013-05-16 Micron Technology, Inc. Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods
US20130141858A1 (en) * 2011-12-01 2013-06-06 Mosaid Technologies Incorporated Cpu with stacked memory

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4323914A (en) 1979-02-01 1982-04-06 International Business Machines Corporation Heat transfer structure for integrated circuit package
JPS6138944U (ja) * 1984-08-10 1986-03-11 イビデン株式会社 半導体装置
JPS61253843A (ja) * 1985-05-07 1986-11-11 Hitachi Ltd 半導体装置
JPH01248551A (ja) * 1988-03-30 1989-10-04 Toshiba Corp 半導体パッケージ
US5001548A (en) 1989-03-13 1991-03-19 Coriolis Corporation Multi-chip module cooling
NO911774D0 (no) * 1991-05-06 1991-05-06 Sensonor As Anordning ved innkapsling av et funksjonsorgan, samt fremgangsmaate for fremstilling av samme.
JPH0513603A (ja) * 1991-07-02 1993-01-22 Hitachi Ltd 半導体集積回路装置
US5405808A (en) 1993-08-16 1995-04-11 Lsi Logic Corporation Fluid-filled and gas-filled semiconductor packages
KR970005712B1 (ko) * 1994-01-11 1997-04-19 삼성전자 주식회사 고 열방출용 반도체 패키지
KR100236016B1 (ko) 1996-12-16 1999-12-15 구자홍 적층형 반도체 패키지 및 그의 어셈블리 방법
JPH11111898A (ja) * 1997-10-06 1999-04-23 Zojirushi Vacuum Bottle Co 半導体素子の冷却装置
US6686654B2 (en) 2001-08-31 2004-02-03 Micron Technology, Inc. Multiple chip stack structure and cooling system
SG104348A1 (en) * 2002-11-21 2004-06-21 Inst Of Microelectronics Apparatus and method for fluid-based cooling of heat-generating devices
US20050224953A1 (en) 2004-03-19 2005-10-13 Lee Michael K L Heat spreader lid cavity filled with cured molding compound
US7160758B2 (en) 2004-03-31 2007-01-09 Intel Corporation Electronic packaging apparatus and method
US20070126103A1 (en) 2005-12-01 2007-06-07 Intel Corporation Microelectronic 3-D package defining thermal through vias and method of making same
US7943431B2 (en) * 2005-12-02 2011-05-17 Unisem (Mauritius) Holdings Limited Leadless semiconductor package and method of manufacture
JP2008004688A (ja) * 2006-06-21 2008-01-10 Noda Screen:Kk 半導体パッケージ
US20100117209A1 (en) 2007-02-28 2010-05-13 Bezama Raschid J Multiple chips on a semiconductor chip with cooling means
SG146460A1 (en) * 2007-03-12 2008-10-30 Micron Technology Inc Apparatus for packaging semiconductor devices, packaged semiconductor components, methods of manufacturing apparatus for packaging semiconductor devices, and methods of manufacturing semiconductor components
KR20080114063A (ko) * 2007-06-26 2008-12-31 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
US7592697B2 (en) * 2007-08-27 2009-09-22 Intel Corporation Microelectronic package and method of cooling same
KR101038313B1 (ko) 2008-01-30 2011-06-01 주식회사 하이닉스반도체 스택 패키지
JP2009218432A (ja) * 2008-03-11 2009-09-24 Sharp Corp 高周波モジュールおよび高周波モジュールの製造方法
JP2010251427A (ja) * 2009-04-13 2010-11-04 Hitachi Ltd 半導体モジュール
US8299633B2 (en) * 2009-12-21 2012-10-30 Advanced Micro Devices, Inc. Semiconductor chip device with solder diffusion protection
US8742561B2 (en) * 2009-12-29 2014-06-03 Intel Corporation Recessed and embedded die coreless package
JP2011216818A (ja) * 2010-04-02 2011-10-27 Elpida Memory Inc 半導体装置の製造方法
KR101394205B1 (ko) * 2010-06-09 2014-05-14 에스케이하이닉스 주식회사 반도체 패키지
US20120063090A1 (en) * 2010-09-09 2012-03-15 Taiwan Semiconductor Manufacturing Company, Ltd. Cooling mechanism for stacked die package and method of manufacturing the same
US8659169B2 (en) * 2010-09-27 2014-02-25 Xilinx, Inc. Corner structure for IC die
JP2012099612A (ja) * 2010-11-01 2012-05-24 Denso Corp 半導体装置
US8648470B2 (en) * 2011-01-21 2014-02-11 Stats Chippac, Ltd. Semiconductor device and method of forming FO-WLCSP with multiple encapsulants
JP2012253104A (ja) * 2011-05-31 2012-12-20 Zycube:Kk インターポーザを用いた積層モジュールの実装構造
CN102931105A (zh) * 2011-08-10 2013-02-13 飞思卡尔半导体公司 半导体器件管芯键合
JP5867259B2 (ja) * 2012-04-17 2016-02-24 住友ベークライト株式会社 積層体の製造方法
KR101401708B1 (ko) * 2012-11-15 2014-05-30 앰코 테크놀로지 코리아 주식회사 반도체 디바이스 및 그 제조 방법
US9287240B2 (en) * 2013-12-13 2016-03-15 Micron Technology, Inc. Stacked semiconductor die assemblies with thermal spacers and associated systems and methods

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019377A1 (en) * 2008-07-22 2010-01-28 International Business Machines Corporation Segmentation of a die stack for 3d packaging thermal management
US20100044856A1 (en) * 2008-08-19 2010-02-25 International Business Machines Corporation Electronic package with a thermal interposer and method of manufacturing the same
US20120007229A1 (en) * 2010-07-08 2012-01-12 International Business Machines Corporation Enhanced thermal management of 3-d stacked die packaging
US20130016477A1 (en) * 2011-07-11 2013-01-17 Texas Instruments Incorporated Electronic Assembly Including Die on Substrate With Heat Spreader Having an Open Window on the Die
US20130119528A1 (en) * 2011-11-14 2013-05-16 Micron Technology, Inc. Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods
US20130141858A1 (en) * 2011-12-01 2013-06-06 Mosaid Technologies Incorporated Cpu with stacked memory

Also Published As

Publication number Publication date
KR101963984B1 (ko) 2019-07-31
TW201606956A (zh) 2016-02-16
CN106663661A (zh) 2017-05-10
JP6626083B2 (ja) 2019-12-25
WO2016010707A1 (en) 2016-01-21
CN106663661B (zh) 2020-10-16
US9443744B2 (en) 2016-09-13
US20160372452A1 (en) 2016-12-22
EP3170198B1 (en) 2022-11-16
JP2017520933A (ja) 2017-07-27
KR20170031735A (ko) 2017-03-21
US20160013115A1 (en) 2016-01-14
US9837396B2 (en) 2017-12-05
EP3170198A1 (en) 2017-05-24
EP3170198A4 (en) 2018-03-14

Similar Documents

Publication Publication Date Title
TWI560821B (en) Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems
EP3170201A4 (en) Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems
EP3127151A4 (en) Stacked semiconductor die assemblies with improved thermal performance and associated systems and methods
SG11201608741TA (en) Stacked semiconductor die assemblies with support members and associated systems and methods
EP3170200A4 (en) Methods of manufacturing stacked semiconductor die assemblies with high efficiency thermal paths
SG11201608016YA (en) Stacked semiconductor die assemblies with partitioned logic and associated systems and methods
SG10201913897RA (en) Systems and methods for providing cooling to a heat load
IL247583A0 (en) Photovoltaic power generation systems and methods related to them
SG10201400396WA (en) Package structure and stacked package module with the same
EP3136431A4 (en) Substrate for power modules, substrate with heat sink for power modules and power module with heat sink
HUE069883T2 (hu) Hõnyelõ és azt tartalmazó akkumulátormodul
ZA201500994B (en) Solar thermal power system
GB2540167B (en) Combined heating and cooling systems
EP3135783A4 (en) Aluminum-diamond composite, and heat dissipating component using same
GB201703612D0 (en) Heat transfer assemblies
PL3131154T3 (pl) Żebro chłodzące, moduł chłodzący zawierający żebro chłodzące i zawierający go moduł akumulatora
GB201410145D0 (en) Thermal energy storage
HUE047616T2 (hu) Hõelvezetõ
ZA201800714B (en) Heat pads comprising annular heat cells
TWM534431U (en) Improved heat sink structure
TWI560899B (en) Roll-to-roll manufacturing equipment and system thereof
GB201407367D0 (en) Heat Exchanger that makes electricity
GB201508227D0 (en) High efficiency radiator and manufacturing method thereof
TWI561157B (en) Heat dissipation structure
GB2539000B (en) Heat dissipating disk structure