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TWI560451B - Probe card for circuit-testing - Google Patents

Probe card for circuit-testing

Info

Publication number
TWI560451B
TWI560451B TW103135303A TW103135303A TWI560451B TW I560451 B TWI560451 B TW I560451B TW 103135303 A TW103135303 A TW 103135303A TW 103135303 A TW103135303 A TW 103135303A TW I560451 B TWI560451 B TW I560451B
Authority
TW
Taiwan
Prior art keywords
testing
circuit
probe card
probe
card
Prior art date
Application number
TW103135303A
Other languages
Chinese (zh)
Other versions
TW201506409A (en
Inventor
Hungchien-Yao
Original Assignee
Hermes Epitek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hermes Epitek Corp filed Critical Hermes Epitek Corp
Priority to TW103135303A priority Critical patent/TWI560451B/en
Publication of TW201506409A publication Critical patent/TW201506409A/en
Application granted granted Critical
Publication of TWI560451B publication Critical patent/TWI560451B/en

Links

TW103135303A 2012-09-28 2012-09-28 Probe card for circuit-testing TWI560451B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103135303A TWI560451B (en) 2012-09-28 2012-09-28 Probe card for circuit-testing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103135303A TWI560451B (en) 2012-09-28 2012-09-28 Probe card for circuit-testing

Publications (2)

Publication Number Publication Date
TW201506409A TW201506409A (en) 2015-02-16
TWI560451B true TWI560451B (en) 2016-12-01

Family

ID=53019337

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103135303A TWI560451B (en) 2012-09-28 2012-09-28 Probe card for circuit-testing

Country Status (1)

Country Link
TW (1) TWI560451B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116519999A (en) * 2023-05-05 2023-08-01 苏州晶晟微纳半导体科技有限公司 A high frequency probe card

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201038949A (en) * 2009-04-27 2010-11-01 Mpi Corp Test probe apparatus for multiple chips
US20110089967A1 (en) * 2008-04-21 2011-04-21 Sanghee Kim Mems probe card and manufacturing method thereof
TWM421505U (en) * 2011-04-26 2012-01-21 Win Way Technology Co Ltd Test probe card
TWM423836U (en) * 2011-10-03 2012-03-01 Hermes Testing Solutions Inc Probe card for circuit-testing and structure of probe substrate thereof
TW201224463A (en) * 2010-08-30 2012-06-16 Advantest Corp Individuating board for testing, probe and semiconductor wafer testing apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110089967A1 (en) * 2008-04-21 2011-04-21 Sanghee Kim Mems probe card and manufacturing method thereof
TW201038949A (en) * 2009-04-27 2010-11-01 Mpi Corp Test probe apparatus for multiple chips
TW201224463A (en) * 2010-08-30 2012-06-16 Advantest Corp Individuating board for testing, probe and semiconductor wafer testing apparatus
TWM421505U (en) * 2011-04-26 2012-01-21 Win Way Technology Co Ltd Test probe card
TWM423836U (en) * 2011-10-03 2012-03-01 Hermes Testing Solutions Inc Probe card for circuit-testing and structure of probe substrate thereof

Also Published As

Publication number Publication date
TW201506409A (en) 2015-02-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees