TWI559433B - Desiccant adhering apparatus - Google Patents

Description

Desiccant sticking device

The invention relates to a desiccant sticking device, in particular to a desiccant sticking device for adhering a desiccant to a surface of a body to be attached with a tape.

In the semiconductor industry, a front opening unified pod (FOUP) is generally used as a container for carrying, transporting, and protecting wafers. For example, in a fab, between the machine and the machine, or between the process and the process, the wafer is held in the boat. When the wafer is to be loaded into the process equipment, the lid of the boat is opened and the wafer is taken by the robot arm. In the controlled environment of the factory, the cleanliness inside the boat can be maintained. However, when the wafer is transported between the factory and the factory, the dust and moisture in the outside air may enter the inside of the boat and contaminate the wafer. Once the wafer is slightly erroneous or contaminated during shipment, it may cause damage or scrappage of the wafer, which is costly.

In general, the solution to the above problem is to manually place the boat into a bag and vacuum it, and a desiccant is placed inside the bag. Thereby, it is possible to reduce oxidation and contamination of the wafer surface caused by oxygen, moisture and dust particles in the air. However, manual handling of the boat, bagging, drying bag placement, vacuuming and heat sealing are not only slow but also costly labor. In particular, the wafer boat filled with wafers is heavy and prone to human error. Wafer damage or scrap.

In view of this, the main object of the present invention is to provide a desiccant sticking device for desiccant placement, and the desiccant sticking device can quickly adhere a tape to the desiccant and the body to be attached in a standardized process, thereby achieving a desiccant. High output attached to the surface of a body to be attached Features.

In one embodiment of the invention, the present invention provides a desiccant applicator for attaching a desiccant to the surface of a body to be attached. The desiccant pasting device comprises a picking mechanism, a pasting mechanism and an attaching mechanism. The picking mechanism has a picking device and a receiving seat. The picking device places the desiccant on the receiving seat, wherein the receiving seat has a high side wall and a low side wall. The glue applicator has a tape grip and a pressing device. The tape gripper is used to clamp the front end of one of the tapes to pull the tape out a predetermined length. The pressing device pushes the tape from the lower side wall side to the side of the desiccant so that the tape and the desiccant are sandwiched between the pressing device and the high side wall of the receiving seat to adhere the tape to the side of the desiccant. The attachment mechanism has an adsorption group and a sticker attachment. The adsorption group is used to adsorb the desiccant that has been applied to the tape. The attachment is used to apply a portion of the tape beyond the desiccant to the surface of the object to be attached to adhere the desiccant to the surface of the object to be attached.

In a preferred embodiment derived from the above-mentioned technical means, the clamping mechanism further comprises a detecting module for detecting which of the plurality of placement slots of the placement box are provided with a desiccant, and the clamping member The device picks up the desiccant one by one according to the detection result to the socket.

In a preferred embodiment derived from the above-mentioned technical means, the applicator mechanism further comprises a knife for cutting the tape at a tape cutting position after the tape is adhered to the side of the desiccant, wherein the tape front end is dry. The first predetermined adhesive length of the agent, the tape cutting position exceeds the desiccant by a second predetermined pasting length.

In a preferred embodiment derived from the above-mentioned technical means, the applicator mechanism further comprises a tape holder and a positioning rod, wherein the tape holder is configured to rotatably pass a tape roll thereon, and the positioning rod is used for One of the newly formed tape front ends after the adhesive tape is cut by the cutter.

In a preferred embodiment derived from the above-mentioned technical means, the applicator mechanism further comprises a driving device for providing a driving force for moving the pressing device to push the tape to the side of the desiccant, wherein the pressing device comprises An elastic element to cushion the driving force.

In a preferred embodiment derived from the above-described technical means, the adsorption group comprises at least two nozzles which contact the tape and generate suction to adsorb the desiccant to which the tape has been applied.

In a preferred embodiment derived from the above-mentioned technical means, the attachment of the attachment mechanism has two walls, the two walls are opened at an angle with a point and an elastic member is connected to the two walls, each The front end of the wall has a roller.

In a preferred embodiment derived from the above-mentioned necessary technical means, the attaching machine The structure further comprises an attaching driving device for moving the adsorption group and the attachment, so that the adsorption group is pushed against the surface of the to-be-attached body.

In a preferred embodiment derived from the above-mentioned technical means, the tape chuck has a roller, a clamping seat and an elastic member. The clamping seat has a curved surface corresponding to one of the rollers, and the elastic member provides an elastic force to the roller. The arc surface of the clamp.

In a preferred embodiment derived from the above-mentioned technical means, the applicator mechanism further comprises a swash plate and a chuck driving device, and the chuck driving device is used for driving the tape chuck to move to the front end of the tape and the swash plate is simultaneously supported. The elastic member separates the roller and the holder and causes the elastic member to accumulate an elastic force, and the elastic member releases the elastic force to cause the roller and the holder to clamp the front end of the tape.

The above described features and advantages of the invention will be apparent from the following description.

1‧‧‧Placement box

11‧‧‧Place slot

2‧‧‧Clamping device

21‧‧‧First mobile agency

211‧‧‧rails

212‧‧‧Racks

213‧‧‧ Gears

214‧‧‧Motor

215, 216‧‧‧ slider

22‧‧‧Second mobile agency

221‧‧‧Leather slide

224‧‧ ‧motor

225‧‧‧ first platform

226‧‧‧second platform

23‧‧‧Capture main structure

231‧‧‧ jaw cylinder

232‧‧‧Catch platform

241‧‧‧Motor

242‧‧‧ Slider

243‧‧‧rails

244‧‧‧ Gears

245‧‧‧racks

3‧‧‧ socket

31‧‧‧First axial drive

311‧‧‧rails

312‧‧‧ drive belt

313a, 313b‧‧‧ slider

314‧‧‧Motor

32‧‧‧Second axial drive

321‧‧‧rails

322‧‧‧Leather slide

323‧‧‧Motor

324‧‧‧Cylinder

33‧‧‧Seat

331‧‧‧low side wall

332‧‧‧ notch

333‧‧‧ Ribs

334‧‧‧high side wall

4‧‧‧Gluing mechanism

411‧‧‧ Tape

412‧‧‧Roller

413‧‧‧After the area

414‧‧‧ Positioning rod

416‧‧‧ Tape dispenser

421‧‧‧ Tape Chuck

421a‧‧‧Roller

421b‧‧‧Clip seat

423‧‧‧ sloping plate

424‧‧‧Flexible components

425‧‧‧ drive belt

425a‧‧‧rails

427a‧‧‧First bracket

427b‧‧‧second bracket

428‧‧‧Motor

429‧‧‧Auxiliary shaft

431‧‧‧Pneumatic components

432‧‧‧

432a‧‧ plane

433‧‧‧Flexible components

435‧‧‧ Attachment

442‧‧‧Cutter

443‧‧‧Cutter drive

445‧‧‧rails

451‧‧‧Motor

452‧‧‧Vertical rails

5‧‧‧ Attachment

511‧‧ ‧ nozzle

512‧‧‧Roller

513‧‧‧ frame

515‧‧ ‧ wall

516‧‧‧Flexible components

517‧‧‧ fulcrum

518‧‧‧ pneumatic cylinder

521‧‧‧Motor

522‧‧‧Horizontal platform

523‧‧‧ Slider

524‧‧‧rails

531‧‧‧ Attached drive

6‧‧‧Drying agent

61‧‧‧ Tape

a‧‧‧Glue position

b‧‧‧Gluing position

C‧‧‧ Tape cutting position

The first figure is a schematic perspective view of a desiccant sticking device according to a preferred embodiment of the present invention.

The second figure is a schematic perspective view of a clipping device according to a preferred embodiment of the present invention.

2A is a schematic perspective view showing the vertical movement mechanism of the main structure of the clip according to a preferred embodiment of the present invention.

The third figure is a schematic perspective view of a receiving frame of a preferred embodiment of the present invention.

Figure 3A is a side elevational view of a socket of a preferred embodiment of the present invention.

The fourth figure is a schematic perspective view of a glue applicator according to a preferred embodiment of the present invention.

FIG. 4A is a perspective view showing another perspective view of the applicator mechanism according to a preferred embodiment of the present invention.

Fig. 5 is a perspective view showing the structure of an attachment mechanism according to a preferred embodiment of the present invention.

Figure 5A is a side elevational view of the attachment mechanism of one of the preferred embodiments of the present invention.

Please refer to the first figure, which is a schematic perspective view of a desiccant sticking device according to a preferred embodiment of the present invention. The desiccant sticking device comprises a picking mechanism and a glue applying mechanism 4 And an attaching mechanism 5 for attaching a desiccant (not shown) to the surface of a body to be attached (not shown). The body to be attached may be any item such as a wafer boat (FOUP). The gripping mechanism comprises a gripping device 2 and a receiving seat 3, and the gripping device 2 places the desiccant on the receiving seat 3. In a preferred embodiment, the desiccant can be placed in the placement bin 1. The placement box 1 has a plurality of placement slots 11 arranged in a matrix for placing a plurality of desiccants. A detection module (not shown) detects each of the placement slots 11 to confirm which of the placement slots 11 have been placed with desiccant and which are not. According to the detection result, the gripping mechanism controls the gripping device 2 to take out the desiccant one by one from the placing groove 11, and move it to the receiving seat 3.

Please refer to the second figure, which is a schematic perspective view of a clipping device according to a preferred embodiment of the present invention. The picking device 2 comprises a gantry and a picking main structure 23, wherein the gantry comprises a first moving mechanism 21 and a second moving mechanism 22. The chucking main structure 23 includes a jaw cylinder 231 and a gripping platform 232, and the jaw cylinder 231 is fixed to the gripping platform 232. The first moving mechanism 21 includes parallel two slide rails 211, a rack 212, a gear 213, a motor 214, and sliders 215, 216. The slider 216 is movably mounted on the two slide rails 211. The motor 214 is fixed to the pickup main structure 23. Gear 213 meshes with rack 212 and motor 214 controls the rotation of gear 213. Therefore, the motor 214 can control the pick-up main structure 23 to move left and right along the slide rail 211. The second moving mechanism 22 includes a belt slide 221 and a motor 224. The first moving mechanism 21 is movably mounted on the belt sliding table 221 of the second moving mechanism 22 via the slider 215, and is fixed to a belt (not shown) in the second moving mechanism 22. The motor 224 drives the belt to rotate, causing the first moving mechanism 21 to move back and forth along the belt slide 221.

Referring to FIG. 2A, a schematic perspective view of a main structure of a pick-up main structure according to a preferred embodiment of the present invention is shown. In this embodiment, the main structure of the clip has a vertical moving mechanism. The vertical movement mechanism includes a motor 241, four sliders 242, two slide rails 243, a gear 244, and a rack 245. The motor 241 slider 242 is coupled to the first moving mechanism 21, and the slider 242 is movably disposed on the slide rail 243. A gear 244 is provided on the drive shaft of the motor 241, and the gear 244 meshes with the rack 245. The rack 245 is fixed to the gripping platform 232. Therefore, when the motor 241 rotates, the vertical movement of the grip main structure 23 with respect to the first moving mechanism 21 can be driven. The gripping device can move the gripping main structure 23 in three different axial directions by the first moving mechanism 21 and the second moving mechanism 22 and the vertical moving mechanism, so as to take the main structure 23 to the placement box 1 The tank 11 takes the desiccant and moves it to the desiccant in which the holder is placed. The clamping device further includes a first platform 225 and a second platform 226. The glue applying mechanism 4 and the attaching mechanism 5 shown in the first figure can be They are respectively fixed to the first platform 225 and the second platform 226.

Please refer to the third figure, which is a perspective view of a receiving structure of a socket according to a preferred embodiment of the present invention. The socket 3 includes a first axial driving device 31, a second axial driving device 32 and a slot seat 33. The first axial driving device 31 has two parallel sliding rails 311, a driving belt 312, two sliding blocks 313a and 313b and a motor 314 on both sides. The slot seat 33 is movably mounted on the two slide rails 311 and is movable along a first axial direction. The drive shaft of the motor 314 is coupled to one end of the belt 312, and the housing 33 grips the belt 312. The inside of the belt 312 has a toothed surface that engages the gear of the drive shaft of the motor 314. Therefore, when the drive shaft of the motor 314 is rotated, the belt 312 can be moved and the sleeve 33 can be moved along the two slide rails 311. The second axial drive unit 32 has a slide rail 321, a belt slide 322, a motor 323, and a cylinder 324. The slide rail 321 and the belt slide 322 are parallel to each other. The two sliding blocks 313a and 313b of the first axial driving device 31 are movably disposed on the sliding rail 321 and the belt sliding table 322, respectively, so that the first axial driving device 31 and the slot 33 thereon can be along a second Axial movement. The first axial direction and the second axial direction are not parallel to each other. In a preferred embodiment, the first axial direction and the second axial direction are perpendicular to each other. Inside the cylinder 324 is a belt (not shown) that is above the cylinder 324 and is secured to the belt. Motor 323 is fixed to one side of cylinder 324 and its drive shaft extends into cylinder 324 and has a gear (not shown) that engages the toothed surface of the belt. Therefore, when the motor 323 is rotated, the first axial driving device 31 and the seat 33 thereon can be driven to move along the sliding rail 321 and the belt sliding table 322.

Please also refer to FIG. 3A, which is a side view of a socket according to a preferred embodiment of the present invention. The housing 33 has a lower side wall 331 and a high side wall 334 to define a recess therebetween, and the desiccant 6 is placed between the lower side wall 331 and the high side wall 334. The left and right sides of the outer side of the high side wall 334 have ribs 333 for supporting the high side walls 334 against one of the thrusts of the adhesive tape 61 at the desiccant 6. The upper end of the high side wall 334 has a notch 332 in the middle. In a preferred embodiment, the socket 3 can have a photodetector through which the desiccant 6 is detected to have been properly placed in the housing 33. When the detection result is that no desiccant is placed, the clamping mechanism can be notified to pick up a new desiccant 6 and place it in the housing 33.

Please refer to the fourth figure, which is a schematic perspective view of a glue sticking mechanism according to a preferred embodiment of the present invention. The glue applicator has a tape collet 421 and a pressing device. The tape collet 421 includes a roller 421a, a clamping seat 421b, and an elastic member 424 for clamping a tape front end of a tape 411 at a laminating position a and moving to a pasting position b, so that the tape 411 is pulled. Out one The predetermined length. The predetermined length is longer than the width of the side to which the desiccant is adhered. Preferably, when the tape is adhered to the side of the desiccant, both ends thereof exceed the desiccant. The holder 421b has a curved surface corresponding to one of the rollers 421a. The elastic member 424 provides an elastic force to cause the roller 421a to abut against the arcuate curved surface of the holder 421b, so that the roller 421a and the holder 421b can clamp the front end of the tape. In a preferred embodiment, the roller 421a is rollably disposed on a first bracket 427a, and the clip 421b is disposed on a second bracket 427b, and one end of the elastic member 424 is connected to the first bracket 427a, and the other end is connected. The second bracket 427b is connected.

The glue applicator further includes a chuck driving device and a slanting plate 423. Please refer to FIG. 4A at the same time, which is a perspective view of another perspective view of the glue applying mechanism according to a preferred embodiment of the present invention. The collet drive has a motor 428, a slide rail 425a, and a drive belt 425. The drive belt 425 is mounted between the drive shaft of the motor 428 and an auxiliary shaft 429, and the tape clamp 421 is movably mounted on the slide rail 425a while clamping the belt 425. When the motor 428 is rotated, the belt 425 is driven and the tape collet 421 is moved forward or backward along the rail 425a. In a preferred embodiment, when the tape chuck 421 is moved forward (ie, moved from the glue application position b to the glue position a), the swash plate 423 will abut against the first bracket 427a, causing the tape chuck 421 to advance forward. While moving, the first bracket 427a moves outward. At this time, the roller 421a is relatively separated from the holder 421b, so that the elastic member 424 accumulates an elastic force. When the first bracket 427a is no longer slanted by the slanting plate 423, that is, when the tape collet 421 reaches the laminating position a, the elastic member 424 releases the elastic force, so that the roller 421a returns to the clamping seat 421b and clamps the tape 411. Tape front end. Then, the chuck driving device drives the tape cartridge 421 to return to the pasting position b, so that the tape is pulled out by a predetermined length.

The tape 411 can be from a roll of tape that is rotatably threaded over a tape seat 416. The applicator mechanism may further include a roller 412 and a positioning rod 414, and the roller 412 and the positioning rod 414 together define a region to be clamped 413 corresponding to the above-mentioned lamination position a. When the tape end of the tape 411 has not been pinched by the tape chuck 421, it is adhered to the positioning rod 414. When the tape cartridge 421 comes to the pinch position a, the leading end of the tape exposed to the region 413 to be clamped is caught. When the tape gripping head 421 grips the leading end of the tape and moves to the pasting position b, the roller 412 can guide the pulling out of the tape 411.

Referring to FIG. 4 and FIG. 4A at the same time, the pressing device comprises a pneumatic component 431, a force applying rod 432, two elastic members 433 and an attaching frame 435. The applicator 435 is movably mounted on the cylinder slide of the pneumatic component 431. A guide rod is fixed to each end of the urging rod 432 433a, the other end of the guiding rod 433a is disposed on the attaching frame 435, and the elastic member 433 is sleeved on the guiding rod 433a. In this embodiment, the elastic member 433 is a spring, and its two ends respectively abut the opposite inner side of the attaching frame 435 and the urging rod 432, and the other side of the urging rod 432 is a flat surface 432a. When the desiccant placed in the housing 33 shown in the third figure moves to the front of the glue applying mechanism, the pneumatic component 431 pushes the attaching frame 435 to move the force applying rod 432 forward to push the adhesive tape 411 to contact the desiccant. On the side, the resilient member 433 can now cushion the force of compression between the force bar 432 and the high side wall 334. At this time, the flat surface 432a and the high side wall 334 of the urging rod 432 sandwich the tape 411 and the desiccant therebetween, and the tape 411 is adhered to the side of the desiccant. In addition, when the flat surface 432a of the attachment 432 and the high side wall 334 sandwich the tape 411 and the desiccant therebetween, the motor 428 will move the tape clamp 421 back. At this time, since the tape 411 is caught and cannot be moved, the front end of the tape will drive the roller 421a to roll away from the tape holder 421, at which time the front end of the tape exceeds the first predetermined adhesive length of the desiccant. Then, the pneumatic element 431 moves the urging rod 432 backward to complete the adhesive tape on the side of the desiccant. The glue applicator further includes all the knives 442 and all the knife driving devices 443 for cutting the tape 411 at a tape cutting position c after the tape 411 is adhered to the side of the desiccant. The cutter driving device 443 is a small pneumatic cylinder having one end fixed to the attachment frame 435 and the other end connected to the cutter 442. When the flat surface 432a of the attachment 432 and the high side wall 334 sandwich the tape 411 and the desiccant therebetween, the cutter driving device 443 pushes the cutter 442 forward, and the cutter 442 cuts the tape 411 at the tape cutting position c. The tape adhered to the desiccant exceeds the second predetermined adhesion length of the desiccant. At the same time, the newly formed tape end is cut and attached to the positioning rod 414 for the tape chuck 421 to be clamped and pulled out next time.

Referring to FIG. 4A again, the glue applicator has a motor 451 and a vertical slide 452. The motor 451 is fixed to the first platform 225 shown in the second figure, and drives the screw to adjust the vertical position of the pasting mechanism along the vertical slide 452 with respect to the gripping device 2.

Please refer to FIG. 5 and FIG. 5A for a perspective structural view and a side view of the attaching mechanism according to a preferred embodiment of the present invention. The attachment mechanism 5 has an adsorption group and a sticker attachment. In this embodiment, the adsorption group has at least two nozzles 511 fixed on a frame 513 for adsorbing the desiccant to which the tape has been attached. The attachment has two rollers 512, a slide rail 514, two walls 515, an elastic member 516, and a pneumatic cylinder 518. The rear ends of the two walls 515 are pivotally connected by a point 517 and are opened at an angle to each other. The elastic member 516 is connected to the two walls 515. When the two walls 515 are further extended relative to each other, an elastic force is accumulated to pull the support wall 515 back relative to each other. near. The front ends of the two walls 515 each have a roller 512 rotatably mounted thereon.

When the socket moves the desiccant to which the tape has been applied to the attachment mechanism 5, the nozzle of the attachment mechanism 5 contacts the desiccant to which the tape has been applied and generates suction for adsorption. Then, the body to be attached is moved to the front of the attaching mechanism 5 by a conveying device. Subsequently, the pneumatic cylinder 518 generates a driving force to urge the attachment to the front. At this time, the roller 512 of the attachment is rolled along the surface of the object to be attached due to the pushing of the surface of the object to be attached, and is relatively far away from the surface of the tape beyond the desiccant, so that the tape is simultaneously adhered to the surface of the object to be attached. At the same time, the elastic member 516 accumulates an elastic force due to the elongation, so that the support wall 515 and the roller 512 are relatively pulled back when the attachment is moved backward.

The attachment mechanism further includes a motor 521, a lateral platform 522, a slider 523, and a slide rail 524. The adsorption group and the attachment attachment are mounted on the lateral platform 522. The transverse platform 522 is fixed to the slider 523, and the slider 523 is movably mounted on the slide rail 524. The motor 521 is fixed to the second platform 226 shown in the second figure, and drives the screw to adjust the vertical position of the attaching mechanism along the slide rail 524 relative to the gripping device 2 to adjust the height corresponding to the desiccant and the body to be attached.

In a preferred embodiment, the nozzle 511 contacts the tape in the desiccant that has been applied to the tape and creates a suction force on the tape to adsorb the desiccant. Thus, it is possible to prevent the surface of the desiccant itself from being permeable, causing the suction nozzle 511 to be unable to attract the desiccant and causing the desiccant to fall. In this embodiment, the roller 512 and the nozzle 511 are at the same level (as shown in FIG. 5A), so that the roller 512 is also horizontally aligned with the tape to achieve the subsequent roll-on tape to the surface to be attached.

In another preferred embodiment, the attachment mechanism further includes an attachment drive 531. The attachment driving device 531 may be an electric cylinder, one end of which is fixed to the horizontal platform 522 and the other end of which is connected to the pneumatic cylinder 518. When the body to be attached is moved by the conveying device to the attaching mechanism 5, the attaching driving device 531 can further move the pneumatic cylinder 518 and the adsorption group and the attachment thereon to advance the adsorption group to the desiccant of the tape. On the surface of the body to be attached. The pneumatic cylinder 518 then drives the attachment to roll forward the tape. In this way, it is further ensured that the tape is more firmly adhered to the surface to be attached.

In any event, anyone can obtain sufficient teaching from the description of the above examples, and it is understood that the present invention is indeed different from the prior art, and is industrially usable and progressive. It is the invention that has indeed met the patent requirements and has filed an application in accordance with the law.

1‧‧‧Placement box

11‧‧‧Place slot

2‧‧‧Clamping device

3‧‧‧ socket

4‧‧‧Gluing mechanism

5‧‧‧ Attachment

Claims (10)

A desiccant sticking device for attaching a desiccant to a surface of a body to be attached, comprising: a picking mechanism having a picking device and a receiving seat, the picking device placing the desiccant a receiving seat, wherein the receiving seat has a high side wall and a low side wall; a glue applicator having a tape collet and a pressing device for clamping a tape front end of the tape to the tape Pulling out a predetermined length, and the pressing device pushes the tape from the low side wall side to the side of the desiccant so that the tape and the desiccant are sandwiched between the pressing device and the high side wall of the receiving seat Adhesing the tape on the side of the desiccant; and an attaching mechanism having an adsorption group for attaching the desiccant to which the tape has been attached, and a sticker attachment for attaching the tape to the tape A portion of the desiccant is applied to the surface of the body to be attached to adhere the desiccant to the surface of the body to be attached. The desiccant sticking device of claim 1, wherein the picking mechanism further comprises a detecting module for detecting which of the plurality of placing slots of the placing box are provided with a desiccant, The picking device picks up the desiccant one by one according to the detection result to the receiving seat. The desiccant applicator of claim 1, wherein the applicator further comprises a knife for cutting the tape at a tape cutting position after the tape is adhered to the side of the desiccant, wherein The front end of the tape extends beyond the first predetermined adhesive length of the desiccant, and the tape cut position exceeds the second predetermined adhesive length of the desiccant. The desiccant applicator of claim 3, wherein the applicator further comprises a tape holder and a positioning rod, wherein the tape holder is configured to rotatably pass a tape roll thereon, the positioning The rod is used to adhere the tape to the front end of the tape which is newly formed by the cutter. The desiccant applicator of claim 1, wherein the applicator further comprises a driving device for providing a driving force to move the pressing device to push the tape to the side of the desiccant, wherein The pressing device includes a resilient member to buffer the driving force. The desiccant applicator of claim 1, wherein the adsorption group comprises at least two nozzles that contact the tape and generate suction to adsorb the desiccant to which the tape has been applied. The desiccant sticking device of claim 1, wherein the attaching attachment of the attaching mechanism has two walls, the two walls are opened at an angle of a point and an elastic element is connected to the two branches. The wall has a roller at the front end of each wall. The desiccant sticking device of claim 7, wherein the attaching mechanism further comprises an attaching driving device for moving the adsorption group and the attaching attachment, so that the adsorbing group pushes the adhesive tape The desiccant is on the surface of the body to be attached. The desiccant sticking device of claim 1, wherein the tape collet has a roller, a clamping seat and an elastic member, the clamping seat has a circular arc surface corresponding to the roller, and the elastic component provides a The elastic force causes the roller to abut against the curved surface of the holder. The desiccant applicator of claim 9, wherein the applicator further comprises a swash plate and a chuck driving device, wherein the chuck driving device drives the tape collet to move toward the front end of the tape The swash plate simultaneously supports the elastic member to separate the roller from the holder and to accumulate an elastic force of the elastic member, and the elastic member releases the elastic force to clamp the roller and the holder to the front end of the tape.