TWI546173B - 線鋸及於線鋸中對齊輥子的方法 - Google Patents
線鋸及於線鋸中對齊輥子的方法 Download PDFInfo
- Publication number
- TWI546173B TWI546173B TW101110670A TW101110670A TWI546173B TW I546173 B TWI546173 B TW I546173B TW 101110670 A TW101110670 A TW 101110670A TW 101110670 A TW101110670 A TW 101110670A TW I546173 B TWI546173 B TW I546173B
- Authority
- TW
- Taiwan
- Prior art keywords
- roller
- steel wire
- rollers
- tension
- reciprocating
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 204
- 239000010959 steel Substances 0.000 claims description 204
- 238000012545 processing Methods 0.000 claims description 16
- 238000004804 winding Methods 0.000 claims description 10
- 238000012937 correction Methods 0.000 description 13
- 229910003460 diamond Inorganic materials 0.000 description 8
- 239000010432 diamond Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0061—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for guiding or feeding saw wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011074515A JP5675462B2 (ja) | 2011-03-30 | 2011-03-30 | ワイヤソー及びワイヤソーにおけるローラ位置合わせ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201238726A TW201238726A (en) | 2012-10-01 |
| TWI546173B true TWI546173B (zh) | 2016-08-21 |
Family
ID=46931241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101110670A TWI546173B (zh) | 2011-03-30 | 2012-03-28 | 線鋸及於線鋸中對齊輥子的方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5675462B2 (ja) |
| KR (1) | KR101884253B1 (ja) |
| CN (1) | CN103347651B (ja) |
| TW (1) | TWI546173B (ja) |
| WO (1) | WO2012133532A1 (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5810299B2 (ja) * | 2012-03-19 | 2015-11-11 | パナソニックIpマネジメント株式会社 | インゴットの切断装置 |
| JP6563240B2 (ja) * | 2015-04-24 | 2019-08-21 | 株式会社安永 | ワイヤソー及び該ワイヤソーを使用し、ワークから複数のスライス品を製造する製造方法 |
| JP6908386B2 (ja) * | 2017-01-27 | 2021-07-28 | コマツNtc株式会社 | ワイヤソー及びワイヤによるワークの切断加工方法 |
| JP6857509B2 (ja) * | 2017-02-15 | 2021-04-14 | コマツNtc株式会社 | ワイヤソー |
| EP3476513B1 (en) * | 2017-10-26 | 2022-02-23 | Precision Surfacing Solutions GmbH | Wire saw |
| JP7267684B2 (ja) * | 2018-05-18 | 2023-05-02 | 株式会社小松製作所 | ワイヤソーの運転パラメータの設定方法及びワイヤソー |
| IT201900022743A1 (it) * | 2019-12-02 | 2021-06-02 | Pedrini Spa Ad Unico Socio | Macchina multifilo di taglio di blocchi di pietra con controllo distanza dei fili. |
| KR102908461B1 (ko) * | 2023-12-19 | 2026-01-05 | 한화세미텍 주식회사 | 멀티와이어쏘 공정에서 스트로크 세팅을 위한 트래버스의 이송범위 설정시스템 및 이의 설정방법 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01295758A (ja) * | 1988-05-19 | 1989-11-29 | Osaka Titanium Co Ltd | スライス加工法およびワイヤソーマシン |
| JPH0264010U (ja) * | 1988-10-31 | 1990-05-14 | ||
| JPH0871909A (ja) * | 1994-09-01 | 1996-03-19 | Tokyo Seimitsu Co Ltd | ワイヤーソー |
| JPH09164524A (ja) * | 1995-12-18 | 1997-06-24 | Tokyo Seimitsu Co Ltd | ワイヤソーの運転状況判別装置 |
| CN1180328A (zh) * | 1996-02-28 | 1998-04-29 | 东京制纲株式会社 | 钢丝式切断加工装置及方法 |
| EP0827822A4 (en) * | 1996-02-28 | 2004-08-18 | Tokyo Rope Mfg Co | WIRE SAW AND WIRE SAW METHOD |
| JPH1110509A (ja) * | 1997-06-24 | 1999-01-19 | Nippei Toyama Corp | ワイヤソーの張力付与機構 |
| JPH1177510A (ja) * | 1997-09-05 | 1999-03-23 | Tokyo Seimitsu Co Ltd | 固定砥粒ワイヤソー及びその被加工物切断方法 |
| JPH11348029A (ja) | 1998-06-08 | 1999-12-21 | Tokyo Seimitsu Co Ltd | ワイヤソーのワイヤ捩じり機構 |
| JP4049900B2 (ja) | 1998-08-20 | 2008-02-20 | 株式会社スーパーシリコン研究所 | ワイヤソー切断装置 |
| JP3739603B2 (ja) | 1999-07-15 | 2006-01-25 | 株式会社日平トヤマ | ワイヤソー |
| JP4129716B2 (ja) * | 2001-03-30 | 2008-08-06 | 株式会社Sumco | ワイヤソー用ガイドローラ |
| WO2003033207A1 (fr) * | 2001-10-17 | 2003-04-24 | Neomax Co., Ltd. | Procede de decoupe au moyen d'un fil helicoidal, dispositif de decoupe a fil helicoidal, et procede de fabrication d'un aimant permanent a base de terres rares |
| JP2005186222A (ja) | 2003-12-25 | 2005-07-14 | Nippei Toyama Corp | ワイヤソーにおける切断方法 |
-
2011
- 2011-03-30 JP JP2011074515A patent/JP5675462B2/ja active Active
-
2012
- 2012-03-28 CN CN201280007331.7A patent/CN103347651B/zh active Active
- 2012-03-28 KR KR1020137021531A patent/KR101884253B1/ko active Active
- 2012-03-28 WO PCT/JP2012/058144 patent/WO2012133532A1/ja not_active Ceased
- 2012-03-28 TW TW101110670A patent/TWI546173B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012133532A1 (ja) | 2012-10-04 |
| KR101884253B1 (ko) | 2018-08-02 |
| JP5675462B2 (ja) | 2015-02-25 |
| KR20140005973A (ko) | 2014-01-15 |
| TW201238726A (en) | 2012-10-01 |
| JP2012206224A (ja) | 2012-10-25 |
| CN103347651A (zh) | 2013-10-09 |
| CN103347651B (zh) | 2016-03-23 |
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