TWI545999B - Printed circuit board and fabrication thereof - Google Patents
Printed circuit board and fabrication thereof Download PDFInfo
- Publication number
- TWI545999B TWI545999B TW104100192A TW104100192A TWI545999B TW I545999 B TWI545999 B TW I545999B TW 104100192 A TW104100192 A TW 104100192A TW 104100192 A TW104100192 A TW 104100192A TW I545999 B TWI545999 B TW I545999B
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- Prior art keywords
- layer
- insulating layer
- printed circuit
- circuit board
- pad
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 31
- 239000010410 layer Substances 0.000 claims description 834
- 238000000034 method Methods 0.000 claims description 61
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 56
- 229910052802 copper Inorganic materials 0.000 claims description 56
- 239000010949 copper Substances 0.000 claims description 56
- 238000005553 drilling Methods 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 66
- 238000007747 plating Methods 0.000 description 41
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 33
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 33
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 33
- 229910052782 aluminium Inorganic materials 0.000 description 33
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 33
- 229910052804 chromium Inorganic materials 0.000 description 33
- 239000011651 chromium Substances 0.000 description 33
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 33
- 229910052737 gold Inorganic materials 0.000 description 33
- 239000010931 gold Substances 0.000 description 33
- 230000000977 initiatory effect Effects 0.000 description 33
- 239000011133 lead Substances 0.000 description 33
- 229910052759 nickel Inorganic materials 0.000 description 33
- 229910052709 silver Inorganic materials 0.000 description 33
- 239000004332 silver Substances 0.000 description 33
- 229910052718 tin Inorganic materials 0.000 description 33
- 239000011135 tin Substances 0.000 description 33
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 33
- 229910052721 tungsten Inorganic materials 0.000 description 33
- 239000010937 tungsten Substances 0.000 description 33
- 229910045601 alloy Inorganic materials 0.000 description 30
- 239000000956 alloy Substances 0.000 description 30
- -1 polypropylene Polymers 0.000 description 30
- 238000000576 coating method Methods 0.000 description 27
- 238000009713 electroplating Methods 0.000 description 24
- 229920001721 polyimide Polymers 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 22
- 239000004743 Polypropylene Substances 0.000 description 21
- 229920001155 polypropylene Polymers 0.000 description 21
- 239000004721 Polyphenylene oxide Substances 0.000 description 20
- 239000010408 film Substances 0.000 description 20
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 20
- 239000004926 polymethyl methacrylate Substances 0.000 description 20
- 229920006380 polyphenylene oxide Polymers 0.000 description 20
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 20
- 239000004642 Polyimide Substances 0.000 description 19
- 238000009413 insulation Methods 0.000 description 13
- 238000001459 lithography Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000003822 epoxy resin Substances 0.000 description 10
- 238000010030 laminating Methods 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- 238000005530 etching Methods 0.000 description 8
- 238000007772 electroless plating Methods 0.000 description 6
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 5
- 239000004593 Epoxy Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000003365 glass fiber Substances 0.000 description 5
- 239000005011 phenolic resin Substances 0.000 description 5
- 229920001568 phenolic resin Polymers 0.000 description 5
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- 238000003486 chemical etching Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
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Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Description
本發明係有關於一種印刷電路板及其製作方法,特別是關於一種不包括核心板之印刷電路板及其製作方法。 The present invention relates to a printed circuit board and a method of fabricating the same, and more particularly to a printed circuit board that does not include a core board and a method of fabricating the same.
印刷電路板(Printed circuit board,PCB)係廣泛的使用於各種電子設備當中,例如行動電話、個人數位助理、薄膜電晶體液晶顯示器(TFT-LCD)。印刷電路板用來固定各種電子零件外,且其主要功能是提供各電子零件的相互電流連接。 Printed circuit boards (PCBs) are widely used in various electronic devices, such as mobile phones, personal digital assistants, and thin film transistor liquid crystal displays (TFT-LCDs). The printed circuit board is used to fix various electronic components, and its main function is to provide mutual current connection of each electronic component.
隨著技術的演進,印刷電路板之佈線密度越來越高,印刷電路板之結構和製程需持續的改善,使其密度越來越高時,能解決因為佈線密度高所產生的問題。 With the evolution of technology, the wiring density of printed circuit boards is getting higher and higher, and the structure and process of printed circuit boards need to be continuously improved to make the density higher and higher, which can solve the problems caused by high wiring density.
根據上述,業界需要一具有更高佈線密度之印刷電路板及相關製作方法。 In light of the above, there is a need in the industry for a printed circuit board having a higher wiring density and associated fabrication methods.
根據上述,本發明於一實施例提供一種印刷電路板,包括:一絕緣層,包括一第一側及與第一側相對之一第二側;一第一墊層,鑲嵌於絕緣層中,且鄰近第一側;一第二墊層,位於絕緣層之第二側上;一導電孔,位於絕 緣層中,且連接第一墊層和第二墊層;及數個導線,其中至少一導線位於絕緣層之第一側上。 According to an embodiment of the present invention, a printed circuit board includes: an insulating layer including a first side and a second side opposite to the first side; a first pad layer embedded in the insulating layer, And adjacent to the first side; a second pad layer on the second side of the insulating layer; a conductive hole, located at the In the edge layer, and connecting the first pad layer and the second pad layer; and a plurality of wires, wherein at least one of the wires is located on the first side of the insulating layer.
本發明於一實施例提供一種印刷電路板之製作方法,包括:提供一核心板;形成一第一絕緣層於核心板上;形成一第一導電層於第一絕緣層上;形成一第二絕緣層於第一導電層和第一絕緣層上;將第二絕緣層與第一絕緣層分離;將分離後之第二絕緣層倒置,其中倒置後之第二絕緣層包括一第一側及與第一側相對之第二側;根據第一導電層形成鑲嵌於第二絕緣層之一第一墊層,且第一墊層鄰近第二絕緣層之第一側;及在第二絕緣層與第一絕緣層分離之後,形成複數個導線,其中上述導線之至少一者位於第二絕緣層之第一側上。 An embodiment of the present invention provides a method of fabricating a printed circuit board, comprising: providing a core board; forming a first insulating layer on the core board; forming a first conductive layer on the first insulating layer; forming a second An insulating layer is disposed on the first conductive layer and the first insulating layer; separating the second insulating layer from the first insulating layer; and inverting the separated second insulating layer, wherein the inverted second insulating layer includes a first side and a second side opposite to the first side; forming a first pad layer embedded in the second insulating layer according to the first conductive layer, and the first pad layer is adjacent to the first side of the second insulating layer; and the second insulating layer After being separated from the first insulating layer, a plurality of wires are formed, wherein at least one of the wires is on the first side of the second insulating layer.
本發明於一實施例提供一種印刷電路板,包括:一絕緣層,包括一第一側及與第一側相對之一第二側;一第一墊層及一導線,分別鑲嵌於絕緣層中,且鄰近第一側;一第二墊層,位於絕緣層之第二側上;一導電孔,位於絕緣層中,且連接第一墊層和第二墊層;及一銅凸塊,位於第一墊層上。 An embodiment of the invention provides a printed circuit board comprising: an insulating layer comprising a first side and a second side opposite to the first side; a first pad layer and a wire respectively embedded in the insulating layer And adjacent to the first side; a second pad layer on the second side of the insulating layer; a conductive hole in the insulating layer, and connecting the first pad layer and the second pad layer; and a copper bump, located at On the first cushion.
本發明於一實施例提供一種印刷電路板之製作方法,包括:提供一核心板;形成一第一絕緣層於核心板上;形成一第一導電層於第一絕緣層上;形成一第二絕緣層於第一導電層和第一絕緣層上;將第二絕緣層與第一絕緣層分離;將分離後之第二絕緣層倒置,其中倒置後之第二絕緣層包括一第一側及與第一側相對之第二側;根據第一導電層形成鑲嵌於第二絕緣層之一第一墊層及一導線,且第一墊層及導線鄰近第二絕緣層之第一側;及形成 一銅凸塊於第一墊層上。 An embodiment of the present invention provides a method of fabricating a printed circuit board, comprising: providing a core board; forming a first insulating layer on the core board; forming a first conductive layer on the first insulating layer; forming a second An insulating layer is disposed on the first conductive layer and the first insulating layer; separating the second insulating layer from the first insulating layer; and inverting the separated second insulating layer, wherein the inverted second insulating layer includes a first side and a second side opposite to the first side; forming a first pad layer and a wire embedded in the second insulating layer according to the first conductive layer, and the first pad layer and the wire are adjacent to the first side of the second insulating layer; form A copper bump is on the first underlayer.
102‧‧‧絕緣層 102‧‧‧Insulation
104‧‧‧第二側 104‧‧‧ second side
106‧‧‧第一側 106‧‧‧ first side
108‧‧‧導電孔 108‧‧‧Electrical hole
110‧‧‧第一墊層 110‧‧‧First cushion
112‧‧‧導線 112‧‧‧Wire
302‧‧‧核心板 302‧‧‧ core board
304‧‧‧第一導電層 304‧‧‧First conductive layer
306‧‧‧第一絕緣層 306‧‧‧First insulation
308‧‧‧第二導電層 308‧‧‧Second conductive layer
310‧‧‧第三導電層 310‧‧‧ Third conductive layer
312‧‧‧感光層 312‧‧‧Photosensitive layer
314‧‧‧開口 314‧‧‧ openings
316‧‧‧第四導電層 316‧‧‧4th conductive layer
318‧‧‧第二絕緣層 318‧‧‧Second insulation
320‧‧‧第五導電層 320‧‧‧ fifth conductive layer
322‧‧‧電鍍起始層 322‧‧‧ plating initiation layer
324‧‧‧盲孔 324‧‧ ‧ blind holes
326‧‧‧第二感光層 326‧‧‧Second photosensitive layer
328‧‧‧開口 328‧‧‧ openings
330‧‧‧第六導電層 330‧‧‧ sixth conductive layer
333‧‧‧導電孔 333‧‧‧Electrical hole
334‧‧‧墊層 334‧‧‧ cushion
336‧‧‧第三感光層 336‧‧‧third photosensitive layer
337‧‧‧第四感光層 337‧‧‧4th photosensitive layer
338‧‧‧開口 338‧‧‧ openings
340‧‧‧第七導電層 340‧‧‧ seventh conductive layer
342‧‧‧第一側 342‧‧‧ first side
344‧‧‧第二側 344‧‧‧ second side
346‧‧‧導線 346‧‧‧Wire
350‧‧‧第二墊層 350‧‧‧Second cushion
352‧‧‧印刷電路板 352‧‧‧Printed circuit board
356‧‧‧第五感光層 356‧‧‧ Fifth photosensitive layer
358‧‧‧開口 358‧‧‧ openings
360‧‧‧第八導電層 360‧‧‧8th conductive layer
362‧‧‧印刷電路板 362‧‧‧Printed circuit board
364‧‧‧導線 364‧‧‧Wire
366‧‧‧保護層 366‧‧‧Protective layer
368‧‧‧開口 368‧‧‧ openings
370‧‧‧電鍍起始層 370‧‧‧ plating initiation layer
372‧‧‧銅凸塊 372‧‧‧ copper bumps
402‧‧‧核心板 402‧‧‧ core board
404‧‧‧第一導電層 404‧‧‧First conductive layer
406‧‧‧第一絕緣層 406‧‧‧First insulation
408‧‧‧第二導電層 408‧‧‧Second conductive layer
410‧‧‧第三導電 410‧‧‧3rd conductive
412‧‧‧第一感光層 412‧‧‧First photosensitive layer
414‧‧‧第四導電層 414‧‧‧4th conductive layer
416‧‧‧第二絕緣層 416‧‧‧Second insulation
418‧‧‧第五導電層 418‧‧‧ fifth conductive layer
420‧‧‧第一側 420‧‧‧ first side
422‧‧‧第二側 422‧‧‧ second side
424‧‧‧電鍍起始層 424‧‧‧ plating initiation layer
426‧‧‧盲孔 426‧‧ ‧ blind holes
428‧‧‧第二感光層 428‧‧‧Second photosensitive layer
430‧‧‧第三感光層 430‧‧‧ third photosensitive layer
432‧‧‧開口 432‧‧‧ openings
434‧‧‧開口 434‧‧‧ openings
436‧‧‧第六導電層 436‧‧‧ sixth conductive layer
438‧‧‧導電孔 438‧‧‧Electrical hole
440‧‧‧第二墊層 440‧‧‧Second cushion
442‧‧‧導線 442‧‧‧ wire
450‧‧‧印刷電路板 450‧‧‧Printed circuit board
502‧‧‧核心板 502‧‧‧ core board
504‧‧‧第一導電層 504‧‧‧First conductive layer
506‧‧‧第一絕緣層 506‧‧‧First insulation
508‧‧‧第二導電層 508‧‧‧Second conductive layer
510‧‧‧第三導電層 510‧‧‧ Third conductive layer
512‧‧‧第一感光層 512‧‧‧first photosensitive layer
514‧‧‧開口 514‧‧‧ openings
516‧‧‧第四導電層 516‧‧‧fourth conductive layer
518‧‧‧第二絕緣層 518‧‧‧Second insulation
520‧‧‧第五導電層 520‧‧‧ fifth conductive layer
522‧‧‧第一側 522‧‧‧ first side
524‧‧‧第二側 524‧‧‧ second side
526‧‧‧電鍍起始層 526‧‧‧ plating initiation layer
528‧‧‧通孔 528‧‧‧through hole
530‧‧‧第二感光層 530‧‧‧Second photosensitive layer
532‧‧‧第三感光層 532‧‧‧ Third photosensitive layer
534‧‧‧開口 534‧‧‧ openings
536‧‧‧開口 536‧‧‧ openings
538‧‧‧第六導電層 538‧‧‧6th conductive layer
539‧‧‧導電孔 539‧‧‧Electrical hole
540‧‧‧導線 540‧‧‧Wire
542‧‧‧墊層 542‧‧‧ cushion
544‧‧‧第一墊層 544‧‧‧First cushion
550‧‧‧印刷電路板 550‧‧‧Printed circuit board
602‧‧‧核心板 602‧‧‧ core board
604‧‧‧第一導電層 604‧‧‧First conductive layer
606‧‧‧第一絕緣層 606‧‧‧First insulation
608‧‧‧第二導電層 608‧‧‧Second conductive layer
610‧‧‧第三導電層 610‧‧‧ Third conductive layer
612‧‧‧第一感光層 612‧‧‧First photosensitive layer
614‧‧‧第四導電層 614‧‧‧4th conductive layer
616‧‧‧第二絕緣層 616‧‧‧Second insulation
618‧‧‧第五導電層 618‧‧‧ fifth conductive layer
620‧‧‧通孔 620‧‧‧through hole
622‧‧‧電鍍起始層 622‧‧‧ plating initiation layer
624‧‧‧第一側 624‧‧‧ first side
626‧‧‧第二側 626‧‧‧ second side
628‧‧‧第二感光層 628‧‧‧Second photosensitive layer
630‧‧‧第三感光層 630‧‧‧ Third photosensitive layer
632‧‧‧第六導電層 632‧‧‧ sixth conductive layer
633‧‧‧導電孔 633‧‧‧Electrical hole
634‧‧‧導線 634‧‧‧Wire
636‧‧‧墊層 636‧‧‧ cushion
638‧‧‧第一墊層 638‧‧‧First cushion
650‧‧‧印刷電路板 650‧‧‧Printed circuit board
702‧‧‧核心板 702‧‧‧ core board
704‧‧‧第一導電層 704‧‧‧First conductive layer
706‧‧‧第一絕緣層 706‧‧‧First insulation
708‧‧‧第二導電層 708‧‧‧Second conductive layer
710‧‧‧第三導電層 710‧‧‧ Third conductive layer
712‧‧‧第一感光層 712‧‧‧First photosensitive layer
714‧‧‧開口 714‧‧‧ openings
715‧‧‧開口 715‧‧‧ openings
716‧‧‧第四導電層 716‧‧‧fourth conductive layer
717‧‧‧導線 717‧‧‧Wire
718‧‧‧第二絕緣層 718‧‧‧Second insulation
720‧‧‧第五導電層 720‧‧‧ fifth conductive layer
722‧‧‧電鍍起始層 722‧‧‧ plating initiation layer
724‧‧‧盲孔 724‧‧‧Blind hole
726‧‧‧第二感光層 726‧‧‧Second photosensitive layer
728‧‧‧開口 728‧‧‧ openings
730‧‧‧第六導電層 730‧‧‧6th conductive layer
733‧‧‧導電孔 733‧‧‧Electrical hole
734‧‧‧墊層 734‧‧‧ cushion
736‧‧‧第三感光層 736‧‧‧ Third photosensitive layer
737‧‧‧第四感光層 737‧‧‧4th photosensitive layer
738‧‧‧開口 738‧‧‧ openings
740‧‧‧銅凸塊 740‧‧‧ copper bumps
742‧‧‧第一側 742‧‧‧ first side
744‧‧‧第二側 744‧‧‧ second side
752‧‧‧印刷電路板 752‧‧‧Printed circuit board
第1圖顯示一印刷電路板之平面圖。 Figure 1 shows a plan view of a printed circuit board.
第2圖顯示一印刷電路板之剖面圖。 Figure 2 shows a cross-sectional view of a printed circuit board.
第3A圖~第3K圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 3A to 3K are cross-sectional views showing respective stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
第3J-1圖、第3K-1圖、第3L圖以及第3M圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 3J-1, 3K-1, 3L, and 3M are cross-sectional views showing stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
第4A圖~第4J圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 4A to 4J are cross-sectional views showing respective stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
第5A圖~第5J圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 5A to 5J are cross-sectional views showing respective stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
第6A圖~第6J圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 6A to 6J are cross-sectional views showing respective stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
第7A圖~第7K圖顯示本發明一實施例印刷電路板之製作方法各階段的剖面圖。 7A to 7K are cross-sectional views showing respective stages of a method of fabricating a printed circuit board according to an embodiment of the present invention.
以下詳細討論實施本發明之實施例。可以理解的是,實施例提供許多可應用的發明概念,其可以較廣的變化實施。所討論之特定實施例僅用來發明使用實施例的特定方法,而不用來限定發明的範疇。為讓本發明之特徵能更明顯易懂,下文特舉實施例,並配合所附圖式,作詳細說明如下:第1圖顯示一印刷電路板之平面圖,第2圖顯示一印刷電路板之剖面圖。請參照第1圖和第2圖,一絕緣層 102用作印刷電路板之主體,一第一墊層110位於絕緣層102之第一側106,一第二墊層114位於絕緣層102之第二側104,第一墊層110經由導電孔108連接第二墊層114。一導線112位於絕緣層102之第一側106。 Embodiments embodying the invention are discussed in detail below. It will be appreciated that the embodiments provide many applicable inventive concepts that can be implemented in a wide variety of variations. The specific embodiments discussed are merely illustrative of specific ways to use the embodiments and are not intended to limit the scope of the invention. In order to make the features of the present invention more comprehensible, the following detailed description and the accompanying drawings are described in detail as follows: FIG. 1 shows a plan view of a printed circuit board, and FIG. 2 shows a printed circuit board. Sectional view. Please refer to Figure 1 and Figure 2 for an insulation layer. The first pad layer 110 is located on the first side 106 of the insulating layer 102, and the second pad layer 114 is located on the second side 104 of the insulating layer 102. The first pad layer 110 passes through the conductive hole 108. The second pad layer 114 is connected. A wire 112 is located on the first side 106 of the insulating layer 102.
如第1圖和第2圖所示,第一墊層110與導線112間的距離d受限於製程的能力或材料的限制,需間隔一特定的距離。根據此特定的距離限制,印刷電路板之佈線密度受到侷限。 As shown in Figures 1 and 2, the distance d between the first underlayer 110 and the wire 112 is limited by the ability of the process or the material, and is spaced a specific distance. According to this particular distance limitation, the wiring density of printed circuit boards is limited.
根據上述,以下提供一印刷電路板及其相關製作方法,使墊層與導線位於不同層,因此,墊層與導線間之距離不受限於影像轉移之製程能力,以提高佈線密度。 According to the above, a printed circuit board and related manufacturing method are provided below, so that the pad layer and the wires are located in different layers. Therefore, the distance between the pad layer and the wires is not limited to the process capability of image transfer to increase the wiring density.
以下根據第3A圖~第3K圖描述本發明一實施例印刷電路板之製作方法。請參照第3A圖,提供一核心板302。在一些實施例中,核心板302包括紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。 Hereinafter, a method of fabricating a printed circuit board according to an embodiment of the present invention will be described based on FIGS. 3A to 3K. Please refer to FIG. 3A to provide a core board 302. In some embodiments, the core sheet 302 comprises a paper phenolic resin, a composite epoxy, a polyimide resin, or a glass fiber.
後續,於核心板302上形成一第一導電層304。在一些實施例中,第一導電層304包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第一導電層304的形成方式包括沉積、壓合或塗佈製程。接著,於第一導電層304上形成第一絕緣層306,第一絕緣層306可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯 (polytetrafluorethylene,PTFE)。在一些實施例中,第一絕緣層306可以壓合或塗佈之方式形成於第一導電層304上。 Subsequently, a first conductive layer 304 is formed on the core board 302. In some embodiments, the first conductive layer 304 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The manner in which the first conductive layer 304 is formed includes a deposition, press bonding, or coating process. Next, a first insulating layer 306 is formed on the first conductive layer 304. The first insulating layer 306 may be an epoxy resin, a bismaleimie triacine (BT), or a poly Polyimide (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) Teflon (polytetrafluorethylene, PTFE). In some embodiments, the first insulating layer 306 may be formed on the first conductive layer 304 by press bonding or coating.
其後,於第一絕緣層306上形成一第二導電層308和一第三導電層310。在一些實施例中,第二導電層308和第三導電層310可包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第二導電層308和第三導電層310可包括相同的材料,或於另一實施例中包括不同的材料。例如,第二導電層308可以為厚度較厚之銅層,以供作承載第三導電層310,而第三導電層310可以為厚度較薄之銅層。在一些實施例中,第二導電層308之厚度可以為12μm~36μm,第三導電層310之厚度可以為1μm~6μm。在一些實施例中,第二導電層308和第三導電層310可以壓合或電鍍之方式形成於第一絕緣層306上。 Thereafter, a second conductive layer 308 and a third conductive layer 310 are formed on the first insulating layer 306. In some embodiments, the second conductive layer 308 and the third conductive layer 310 may comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. The second conductive layer 308 and the third conductive layer 310 may comprise the same material or, in another embodiment, comprise a different material. For example, the second conductive layer 308 may be a thick copper layer for carrying the third conductive layer 310, and the third conductive layer 310 may be a thin copper layer. In some embodiments, the second conductive layer 308 may have a thickness of 12 μm to 36 μm, and the third conductive layer 310 may have a thickness of 1 μm to 6 μm. In some embodiments, the second conductive layer 308 and the third conductive layer 310 may be formed on the first insulating layer 306 by press bonding or electroplating.
請參照第3B圖,形成包括複數個開口314之第一感光層312於於第三導電層310上。第一感光層312之形成方式可以為貼覆乾膜或塗佈及後續的微影製程。 Referring to FIG. 3B, a first photosensitive layer 312 including a plurality of openings 314 is formed on the third conductive layer 310. The first photosensitive layer 312 can be formed by laminating dry film or coating and subsequent lithography processes.
請參照第3C圖,於第三導電層310上未被第一感光層312覆蓋的區域(亦即開口314中),形成一第四導電層316。在一些實施例中,第四導電層316包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第四導電層316可以使用電鍍之方式成長於第一感光層312之開口314中。後續,移除第一感光層312。 Referring to FIG. 3C, a fourth conductive layer 316 is formed on a region of the third conductive layer 310 that is not covered by the first photosensitive layer 312 (ie, in the opening 314). In some embodiments, the fourth conductive layer 316 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The fourth conductive layer 316 may be grown in the opening 314 of the first photosensitive layer 312 by electroplating. Subsequently, the first photosensitive layer 312 is removed.
請參照第3D圖,形成一第二絕緣層318於第三導電層310、第四導電層316和第一絕緣層306上。在一些實施例中,第二絕緣層318可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞 胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。第二絕緣層318可以壓合或塗佈之方式形成於第三和第四導電層310、316上。 Referring to FIG. 3D, a second insulating layer 318 is formed on the third conductive layer 310, the fourth conductive layer 316, and the first insulating layer 306. In some embodiments, the second insulating layer 318 may be an epoxy resin, a bismaleimie triacine (BT), or a polyaluminum. Amine (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) or poly Polytetrafluorethylene (PTFE). The second insulating layer 318 may be formed on the third and fourth conductive layers 310, 316 by press bonding or coating.
接著,形成一第五導電層320於第二絕緣層318上。在一些實施例中,第五導電層320包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。請參照第3E圖,進行一鑽孔製程,於第五導電層320和第二絕緣層318中形成一盲孔324,暴露第四導電層316。在一些實施例中,形成盲孔324之方法包括雷射鑽孔製程。其後,形成一電鍍起始層322於盲孔324中和第二絕緣層318上。在一些實施例中,電鍍起始層322包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層322可以化學鍍之方式製作。 Next, a fifth conductive layer 320 is formed on the second insulating layer 318. In some embodiments, the fifth conductive layer 320 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. Referring to FIG. 3E, a drilling process is performed to form a blind via 324 in the fifth conductive layer 320 and the second insulating layer 318 to expose the fourth conductive layer 316. In some embodiments, the method of forming the blind holes 324 includes a laser drilling process. Thereafter, an electroplated starting layer 322 is formed in the blind vias 324 and on the second insulating layer 318. In some embodiments, the plating initiation layer 322 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The plating starting layer 322 can be formed by electroless plating.
請參照第3F圖,形成包括複數個開口328之第二感光層326於電鍍起始層322上。第二感光層326之形成方式可以為網印、貼覆乾膜或塗佈及後續的微影製程。 Referring to FIG. 3F, a second photosensitive layer 326 including a plurality of openings 328 is formed on the plating initiation layer 322. The second photosensitive layer 326 can be formed by screen printing, dry film coating or coating, and subsequent lithography processes.
後續,以電鍍起始層322作為電鍍之晶種層,進行一電鍍製程,於電鍍起始層322未被第二感光層326覆蓋之區域(亦即開口328中)成長一第六導電層330。第六導電層330可填入上述盲孔中,形成一導電孔333,及/或於開口328中形成一墊層334。在一些實施例中,第六導電層330包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。 Subsequently, the electroplating process is performed by using the electroplating starting layer 322 as a seed layer for electroplating, and a sixth conductive layer 330 is grown in a region (ie, the opening 328) where the electroplating starting layer 322 is not covered by the second photosensitive layer 326. . The sixth conductive layer 330 may be filled into the blind vias to form a conductive via 333, and/or a pad layer 334 may be formed in the opening 328. In some embodiments, the sixth conductive layer 330 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof.
請參照第3G圖,移除第二感光層326並去除覆蓋於第二感光層326下的電鍍起始層322和第五導電層320。在一些實施例中,上述去除覆蓋於第二感光層326下的電鍍起始層322和第五導電層320之步驟可採用化學蝕刻法。請參照第3H圖,進行一切割製程,切除第一絕緣層306和第二絕緣層318貼合之部分,使得在後續步驟得以將第二導電層308可與第三導電層310分離。 Referring to FIG. 3G, the second photosensitive layer 326 is removed and the plating starting layer 322 and the fifth conductive layer 320 covering the second photosensitive layer 326 are removed. In some embodiments, the step of removing the plating start layer 322 and the fifth conductive layer 320 covering the second photosensitive layer 326 may be performed by chemical etching. Referring to FIG. 3H, a dicing process is performed to cut off portions of the first insulating layer 306 and the second insulating layer 318 so that the second conductive layer 308 can be separated from the third conductive layer 310 in a subsequent step.
請參照第3I圖,將第二導電層308與第三導電層310分離,使得核心板302與第二絕緣層318分開。並對分開之第二絕緣層318與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下,如第3J圖所示。 Referring to FIG. 3I, the second conductive layer 308 is separated from the third conductive layer 310 such that the core plate 302 is separated from the second insulating layer 318. And a step of turning over the separated second insulating layer 318 and the conductive layers thereon so that the bottom of the original is facing upward and the top is facing downward, as shown in FIG. 3J.
請參照第3J圖,在翻轉後,第二絕緣層318包括第一側342及與第一側342相對之一第二側344。於第二絕緣層318之第一側342上形成包括複數個開口338之第三感光層336。於第二絕緣層318之第二側344上形成一第四感光層337。在一些實施例中,第四感光層337完全將第二絕緣層318之第二側344和其上的第六導電層330覆蓋。第三感光層336與第四感光層337之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。後續,於第三感光層336之開口338中成長一第七導電層340。在一些實施例中,第七導電層340包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金,而第七導電層340可以電鍍之方式製作。其後請參照第3K圖,移除第三感光層336和第四感光層337,並進行一蝕刻製程,移除沒有被第七導電層340覆蓋之第三導電層310,形成如第3K圖所示之印刷電路板352。在一些實施例中,此印刷電路板352不包括核心板。 Referring to FIG. 3J, after inversion, the second insulating layer 318 includes a first side 342 and a second side 344 opposite the first side 342. A third photosensitive layer 336 including a plurality of openings 338 is formed on the first side 342 of the second insulating layer 318. A fourth photosensitive layer 337 is formed on the second side 344 of the second insulating layer 318. In some embodiments, the fourth photosensitive layer 337 completely covers the second side 344 of the second insulating layer 318 and the sixth conductive layer 330 thereon. The third photosensitive layer 336 and the fourth photosensitive layer 337 may be formed by laminating a dry film, or coating and subsequent lithography processes. Subsequently, a seventh conductive layer 340 is grown in the opening 338 of the third photosensitive layer 336. In some embodiments, the seventh conductive layer 340 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or the like, and the seventh conductive layer 340 can be fabricated by electroplating. Thereafter, referring to FIG. 3K, the third photosensitive layer 336 and the fourth photosensitive layer 337 are removed, and an etching process is performed to remove the third conductive layer 310 not covered by the seventh conductive layer 340 to form a pattern as shown in FIG. 3K. Printed circuit board 352 is shown. In some embodiments, the printed circuit board 352 does not include a core board.
在第3K圖中,一絕緣層318包括一第一側342和於第一側342相對之一第二側344。數個第一墊層316鑲嵌於絕緣層318中,且鄰近絕緣層318之第一側342。數個第二墊層350位於絕緣層318之第二側344上。一導電孔333位於絕緣層318中,且連接第一墊層316和第二墊層350。在一些實施例中,導電孔333包括傾斜之側壁,且更甚者,導電孔333鄰近第二墊層350之部分相較於鄰近第一墊層316之部分具有較大的尺寸。 In FIG. 3K, an insulating layer 318 includes a first side 342 and a second side 344 opposite the first side 342. A plurality of first pad layers 316 are embedded in the insulating layer 318 adjacent to the first side 342 of the insulating layer 318. A plurality of second pad layers 350 are on the second side 344 of the insulating layer 318. A conductive via 333 is located in the insulating layer 318 and connects the first pad layer 316 and the second pad layer 350. In some embodiments, the conductive via 333 includes a sloped sidewall, and more particularly, the portion of the conductive via 333 adjacent the second pad layer 350 has a larger dimension than the portion adjacent the first pad layer 316.
數個導線346,其中一些導線346位於第一墊層316上,一些導線346位於絕緣層318之第一側342上。在一些實施例中,導線346與第一墊層316位於不同的層,因此,導線346與第一墊層316之距離不受限於影像轉移的製程能力,例如位於絕緣層318上之導線346與相鄰之第一墊層316的最小距離可以為10μm以下。 A plurality of wires 346, some of which are located on the first pad layer 316, and some of the wires 346 are located on the first side 342 of the insulating layer 318. In some embodiments, the wire 346 is in a different layer than the first pad layer 316. Therefore, the distance between the wire 346 and the first pad layer 316 is not limited by the process capability of image transfer, such as the wire 346 on the insulating layer 318. The minimum distance from the adjacent first pad layer 316 may be 10 μm or less.
以下根據第3J-1圖、第3K-1圖、第3L圖以及第3M圖描述本發明另一實施例印刷電路板之製作方法,其中相同於第3A圖~第3K圖之部件,係使用相同之標號並省略其說明。請參照第3J-1圖,提供一相同於第3H圖之結構,將第二導電層308與第三導電層310分離,使得核心板302與第二絕緣層318分開,如第3I圖所示。之後,對分開之第二絕緣層318與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下。在翻轉後,進行類似於第3J圖之步驟,不同的是於第二絕緣層318之第一側342上形成包括一開口358之第五感光層356,開口358位於第一墊層316以外的第二絕緣層318上的第一側342上。於第二絕緣層318之第二側344上形成一第四感光層337,以完全覆蓋第二絕 緣層318之第二側344以及其上的第六導電層330及第二墊層350。後續,於第五感光層356之開口358中成長一第八導電層360。在一些實施例中,第八導電層360包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金,而第八導電層360可以電鍍之方式製作。其後,請參照第3K-1圖,移除第五感光層356,並進行一蝕刻製程,移除沒有被第八導電層360覆蓋之第三導電層310,形成如第3K-1圖所示之印刷電路板362,其中第二絕緣層318之第一側342上具有一導線364。在一些實施例中,此印刷電路板362不包括核心板。 Hereinafter, a method of fabricating a printed circuit board according to another embodiment of the present invention will be described based on the 3J-1, 3K-1, 3L, and 3M, wherein the components of the third to third embodiments are used. The same reference numerals are used and the description thereof is omitted. Referring to FIG. 3J-1, a structure similar to that of FIG. 3H is provided, and the second conductive layer 308 is separated from the third conductive layer 310 such that the core plate 302 is separated from the second insulating layer 318, as shown in FIG. . Thereafter, a step of inverting the separated second insulating layer 318 and each of the conductive layers thereon is performed such that the bottom portion faces upward and the top portion faces downward. After the flipping, a step similar to that of FIG. 3J is performed, except that a fifth photosensitive layer 356 including an opening 358 is formed on the first side 342 of the second insulating layer 318, and the opening 358 is located outside the first pad layer 316. The first insulating layer 318 is on the first side 342. Forming a fourth photosensitive layer 337 on the second side 344 of the second insulating layer 318 to completely cover the second The second side 344 of the edge layer 318 and the sixth conductive layer 330 and the second pad layer 350 thereon. Subsequently, an eighth conductive layer 360 is grown in the opening 358 of the fifth photosensitive layer 356. In some embodiments, the eighth conductive layer 360 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or the like, and the eighth conductive layer 360 can be fabricated by electroplating. Thereafter, referring to FIG. 3K-1, the fifth photosensitive layer 356 is removed, and an etching process is performed to remove the third conductive layer 310 not covered by the eighth conductive layer 360, and formed as shown in FIG. 3K-1. A printed circuit board 362 is shown with a conductor 364 on the first side 342 of the second insulating layer 318. In some embodiments, the printed circuit board 362 does not include a core board.
請參照3L圖,於第二絕緣層318之第一側342及導線364上形成包括開口368之保護層366,其中開口368對應暴露出的第一墊層316。 Referring to FIG. 3L, a protective layer 366 including an opening 368 is formed on the first side 342 of the second insulating layer 318 and the wire 364, wherein the opening 368 corresponds to the exposed first pad layer 316.
請參照第3M圖,形成一電鍍起始層370於開口368中。電鍍起始層370包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層370可以化學鍍之方式製作。以電鍍起始層370作為電鍍之晶種層,進行一電鍍製程,於電鍍起始層370之區域(亦即開口368中)成長至少一銅凸塊372。其後,移除第二絕緣層318之第二側344上的第四感光層337。 Referring to FIG. 3M, a plating initiation layer 370 is formed in the opening 368. The plating initiation layer 370 includes a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or the like. The plating starting layer 370 can be formed by electroless plating. The plating starting layer 370 is used as a seeding layer for electroplating, and an electroplating process is performed to grow at least one copper bump 372 in the region of the plating starting layer 370 (that is, in the opening 368). Thereafter, the fourth photosensitive layer 337 on the second side 344 of the second insulating layer 318 is removed.
以下根據第4A圖~第4J圖描述本發明另一實施例印刷電路板之製作方法。請參照第4A圖,提供一核心板402。在一些實施例中,核心板402包括紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。 Hereinafter, a method of fabricating a printed circuit board according to another embodiment of the present invention will be described based on FIGS. 4A to 4J. Referring to FIG. 4A, a core board 402 is provided. In some embodiments, the core sheet 402 comprises a paper phenolic resin, a composite epoxy, a polyimide resin, or a glass fiber.
後續,於核心板402上形成一第一導電層404。 在一些實施例中,第一導電層404包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第一導電層404的形成方式包括沉積、壓合或塗佈製程。接著,於第一導電層404上形成第一絕緣層406,第一絕緣層406可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。在一些實施例中,第一絕緣層406可以壓合或塗佈之方式形成於第一導電層404上。 Subsequently, a first conductive layer 404 is formed on the core board 402. In some embodiments, the first conductive layer 404 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The manner in which the first conductive layer 404 is formed includes a deposition, press or coating process. Next, a first insulating layer 406 is formed on the first conductive layer 404. The first insulating layer 406 may be an epoxy resin, a bismaleimie triacine (BT), or a poly Polyimide (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) Or polytetrafluorethylene (PTFE). In some embodiments, the first insulating layer 406 may be formed on the first conductive layer 404 by press bonding or coating.
其後,於第一絕緣層406上形成一第二導電層408和一第三導電層410。在一些實施例中,第二導電層408和第三導電層410可包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第二導電層408和第三導電層410可包括相同的材料,或於另一實施例中包括不同的材料。例如,第二導電層408可以為厚度較厚之銅層,以供作承載第三導電層410,而第三導電層410可以為厚度較薄之銅層。在一些實施例中,第二導電層408之厚度可以為12μm~36μm,第三導電層410之厚度可以為1μm~6μm。在一些實施例中,第二導電層408和第三導電層410可以壓合或電鍍之方式形成於第一絕緣層406上。 Thereafter, a second conductive layer 408 and a third conductive layer 410 are formed on the first insulating layer 406. In some embodiments, the second conductive layer 408 and the third conductive layer 410 may comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The second conductive layer 408 and the third conductive layer 410 may comprise the same material or, in another embodiment, comprise a different material. For example, the second conductive layer 408 may be a thick copper layer for carrying the third conductive layer 410, and the third conductive layer 410 may be a thin copper layer. In some embodiments, the second conductive layer 408 may have a thickness of 12 μm to 36 μm, and the third conductive layer 410 may have a thickness of 1 μm to 6 μm. In some embodiments, the second conductive layer 408 and the third conductive layer 410 may be formed on the first insulating layer 406 by press bonding or electroplating.
請參照第4B圖,形成包括複數個開口之第一感光層412於第三導電層410上。第一感光層412之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。 Referring to FIG. 4B, a first photosensitive layer 412 including a plurality of openings is formed on the third conductive layer 410. The first photosensitive layer 412 can be formed by laminating a dry film, or by coating and subsequent lithography.
請參照第4C圖,於第三導電層410上未被第一 感光層412覆蓋的區域(亦即開口中),形成一第四導電層414。在一些實施例中,第四導電層414包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第四導電層414可以使用電鍍之方式成長於第一感光412之開口中。後續,移除第一感光層412。 Please refer to FIG. 4C, which is not the first on the third conductive layer 410. The region covered by the photosensitive layer 412 (that is, in the opening) forms a fourth conductive layer 414. In some embodiments, the fourth conductive layer 414 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. The fourth conductive layer 414 can be grown in the opening of the first photosensitive layer 412 by electroplating. Subsequently, the first photosensitive layer 412 is removed.
請參照第4D圖,形成一第二絕緣層416於第三導電層410、第四導電層414和第一絕緣層406上。在一些實施例中,第二絕緣層416可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。第二絕緣層416可以壓合或塗佈之方式形成於第三和第四導電層410、414上。 Referring to FIG. 4D, a second insulating layer 416 is formed on the third conductive layer 410, the fourth conductive layer 414, and the first insulating layer 406. In some embodiments, the second insulating layer 416 may be an epoxy resin, a bismaleimie triacine (BT), a polyimide (PI), or an increase. Ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) or polytetrafluorethylene (PTFE) . The second insulating layer 416 may be formed on the third and fourth conductive layers 410, 414 by press bonding or coating.
接著,形成一第五導電層418於第二絕緣層416上。在一些實施例中,第五導電層418包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。 Next, a fifth conductive layer 418 is formed on the second insulating layer 416. In some embodiments, the fifth conductive layer 418 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof.
請參照第4E圖,進行一切割製程,切除第一絕緣層406和第二絕緣層416貼合之部分,使得在後續步驟得以將第二導電層408可與第三導電層410分離。 Referring to FIG. 4E, a dicing process is performed to cut off portions of the first insulating layer 406 and the second insulating layer 416, so that the second conductive layer 408 can be separated from the third conductive layer 410 in a subsequent step.
請參照第4F圖,將第二導電層408與第三導電層410分離,使得核心板402與第二絕緣層416分開。並對分開之第二絕緣層416與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下,如第4G圖所示。 Referring to FIG. 4F, the second conductive layer 408 is separated from the third conductive layer 410 such that the core plate 402 is separated from the second insulating layer 416. The step of turning over the separated second insulating layer 416 and the conductive layers thereon is such that the bottom portion faces upward and the top portion faces downward, as shown in FIG. 4G.
請參照第4G圖,在翻轉後,第二絕緣層416包 括第一側420及與第一側420相對之一第二側422。從第二絕緣層416之第二側422進行一鑽孔製程,於第五導電層418和第二絕緣層416中形成一盲孔426,暴露第四導電層414。在一些實施例中,形成盲孔426之方法包括雷射鑽孔製程。其後,形成電鍍起始層424於盲孔426中和第五導電層418上。在一些實施例中,電鍍起始層424包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層424可以化學鍍之方式製作。 Please refer to FIG. 4G. After the flipping, the second insulating layer 416 is wrapped. A first side 420 and a second side 422 opposite the first side 420 are included. A drilling process is performed from the second side 422 of the second insulating layer 416 to form a blind via 426 in the fifth conductive layer 418 and the second insulating layer 416 to expose the fourth conductive layer 414. In some embodiments, the method of forming blind holes 426 includes a laser drilling process. Thereafter, a plating initiation layer 424 is formed in the blind vias 426 and on the fifth conductive layer 418. In some embodiments, the plating initiation layer 424 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. The plating initiation layer 424 can be formed by electroless plating.
請參照第4H圖,形成一包括複數個開口432之第二感光層428於第三導電層410上方。形成一包括複數個開口434之第三感光層430於電鍍起始層424下方。第二感光層428和第三感光層430之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。後續,請參照第4I圖,進行一電鍍製程,於第二感光層428之開口432中和第三感光層430之開口434中成長一第六導電層436。第六導電層436可填入上述盲孔426中,形成一導電孔438,及/或於開口434中形成一墊層440。在一些實施例中,第六導電層436包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。其後請參照第4J圖,移除第二感光層428和第三感光層430,並進行一蝕刻製程,移除沒有被第六導電層436覆蓋的第三導電層410和電鍍起始層424以及第五導電層418,形成如第4J圖所示之印刷電路板450。在一些實施例中,此印刷電路板不包括核心板。 Referring to FIG. 4H, a second photosensitive layer 428 including a plurality of openings 432 is formed over the third conductive layer 410. A third photosensitive layer 430 including a plurality of openings 434 is formed under the plating initiation layer 424. The second photosensitive layer 428 and the third photosensitive layer 430 may be formed by laminating dry film, or coating and subsequent lithography processes. Subsequently, referring to FIG. 4I, an electroplating process is performed to form a sixth conductive layer 436 in the opening 432 of the second photosensitive layer 428 and the opening 434 of the third photosensitive layer 430. The sixth conductive layer 436 can be filled into the blind vias 426 to form a conductive via 438, and/or a pad layer 440 can be formed in the opening 434. In some embodiments, the sixth conductive layer 436 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. Thereafter, referring to FIG. 4J, the second photosensitive layer 428 and the third photosensitive layer 430 are removed, and an etching process is performed to remove the third conductive layer 410 and the plating initiation layer 424 that are not covered by the sixth conductive layer 436. And a fifth conductive layer 418, forming a printed circuit board 450 as shown in FIG. 4J. In some embodiments, the printed circuit board does not include a core board.
在第4J圖中,絕緣層416包括第一側420和第二側422。數個第一墊層414鑲嵌於絕緣層416中,且鄰近絕緣層416之第一側420。數個第二墊層440位於絕緣層416之第 二側422上。數個導電孔438位於絕緣層416中,且連接第一墊層414和第二墊層440。在一些實施例中,導電孔438包括傾斜之側壁,且更甚者,導電孔438鄰近第二墊層440之部分相較於鄰近第一墊層414之部分具有較大的直徑。 In FIG. 4J, the insulating layer 416 includes a first side 420 and a second side 422. A plurality of first pad layers 414 are embedded in the insulating layer 416 adjacent to the first side 420 of the insulating layer 416. A plurality of second pad layers 440 are located at the first of the insulating layer 416 On the two sides 422. A plurality of conductive vias 438 are located in the insulating layer 416 and connect the first pad layer 414 and the second pad layer 440. In some embodiments, the conductive vias 438 include sloped sidewalls, and more particularly, portions of the conductive vias 438 adjacent the second underlayer 440 have a larger diameter than portions adjacent the first underlayer 414.
數個導線442位於第一墊層414和絕緣層416之第一側420上。在一些實施例中,導線442與第一墊層414位於不同的層,因此,導線442與第一墊層414之距離不受限於影像轉移的製程能力,例如位於絕緣層416上之導線442與相鄰之第一墊層414的最小距離可以為10μm以下。 A plurality of wires 442 are located on the first side 420 of the first pad layer 414 and the insulating layer 416. In some embodiments, the wire 442 is in a different layer than the first pad layer 414. Therefore, the distance between the wire 442 and the first pad layer 414 is not limited to the process capability of image transfer, such as the wire 442 on the insulating layer 416. The minimum distance from the adjacent first pad layer 414 may be 10 μm or less.
以下根據第5A圖~第5J圖描述本發明另一實施例印刷電路板之製作方法。請參照第5A圖,提供一核心板502。在一些實施例中,核心板502包括紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。 Hereinafter, a method of fabricating a printed circuit board according to another embodiment of the present invention will be described based on FIGS. 5A to 5J. Referring to FIG. 5A, a core board 502 is provided. In some embodiments, the core sheet 502 comprises a paper phenolic resin, a composite epoxy, a polyimide resin, or a glass fiber.
後續,於核心板502上形成一第一導電層504。在一些實施例中,第一導電層504包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第一導電層504的形成方式包括沉積、壓合或塗佈製程。接著,於第一導電層504上形成第一絕緣層506,第一絕緣層506可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。在一些實施例中,第一絕緣層506可以壓合或塗佈之方式形成於第一導電層504上。 Subsequently, a first conductive layer 504 is formed on the core board 502. In some embodiments, the first conductive layer 504 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The manner in which the first conductive layer 504 is formed includes a deposition, press or coating process. Next, a first insulating layer 506 is formed on the first conductive layer 504. The first insulating layer 506 may be an epoxy resin, a bismaleimie triacine (BT), or a poly Polyimide (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) Or polytetrafluorethylene (PTFE). In some embodiments, the first insulating layer 506 can be formed on the first conductive layer 504 by press bonding or coating.
其後,於第一絕緣層506上形成一第二導電層508和一第三導電層510。在一些實施例中,第二導電層508和第三導電層510可包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第二導電層508和第三導電層510可包括相同的材料,或於另一實施例中包括不同的材料。例如,第二導電層508可以為厚度較厚之銅層,以供作承載第三導電層510,而第三導電層510可以為厚度較薄之銅層。在一些實施例中,第二導電層508之厚度可以為12μm~36μm,第三導電層510之厚度可以為1μm~6μm。在一些實施例中,第二導電層508和第三導電層510可以壓合或電鍍之方式形成於第一絕緣層506上。 Thereafter, a second conductive layer 508 and a third conductive layer 510 are formed on the first insulating layer 506. In some embodiments, the second conductive layer 508 and the third conductive layer 510 may comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The second conductive layer 508 and the third conductive layer 510 may comprise the same material or, in another embodiment, comprise a different material. For example, the second conductive layer 508 may be a thick copper layer for carrying the third conductive layer 510, and the third conductive layer 510 may be a thin copper layer. In some embodiments, the second conductive layer 508 may have a thickness of 12 μm to 36 μm, and the third conductive layer 510 may have a thickness of 1 μm to 6 μm. In some embodiments, the second conductive layer 508 and the third conductive layer 510 may be formed on the first insulating layer 506 by press bonding or electroplating.
請參照第5B圖,形成包括複數個開口514之第一感光層512於於第三導電層510上。第一感光層512之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。 Referring to FIG. 5B, a first photosensitive layer 512 including a plurality of openings 514 is formed on the third conductive layer 510. The first photosensitive layer 512 can be formed by laminating a dry film, or by coating and subsequent lithography.
請參照第5C圖,於第三導電層510上未被第一感光層512覆蓋的區域(亦即開口514中),形成一第四導電層516。在一些實施例中,第四導電層516包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第四導電層516可以使用電鍍之方式成長於第一感光層512之開口514中。後續,移除第一感光層512。 Referring to FIG. 5C, a fourth conductive layer 516 is formed on a region of the third conductive layer 510 that is not covered by the first photosensitive layer 512 (ie, in the opening 514). In some embodiments, the fourth conductive layer 516 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. The fourth conductive layer 516 can be grown in the opening 514 of the first photosensitive layer 512 by electroplating. Subsequently, the first photosensitive layer 512 is removed.
請參照第5D圖,形成一第二絕緣層518於第三導電層510、第四導電層516和第一絕緣層506上。在一些實施例中,第二絕緣層518可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯 (polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。第二絕緣層518可以壓合或塗佈之方式形成。 Referring to FIG. 5D, a second insulating layer 518 is formed on the third conductive layer 510, the fourth conductive layer 516, and the first insulating layer 506. In some embodiments, the second insulating layer 518 may be an epoxy resin, a bismaleimie triacine (BT), a polyimide (PI), or an increase. Ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (polypropylene, PP), polymethyl methacrylate (PMMA) or polytetrafluoroethylene (PTFE). The second insulating layer 518 can be formed by pressing or coating.
接著,形成一第五導電層520於第二絕緣層518上。在一些實施例中,第五導電層520包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。 Next, a fifth conductive layer 520 is formed on the second insulating layer 518. In some embodiments, the fifth conductive layer 520 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof.
請參照第5E圖,進行一切割製程,切除第一絕緣層506和第二絕緣層518貼合之部分,使得在後續步驟得以將第二導電層508可與第三導電層510分離。 Referring to FIG. 5E, a dicing process is performed to cut off portions of the first insulating layer 506 and the second insulating layer 518 so that the second conductive layer 508 can be separated from the third conductive layer 510 in a subsequent step.
請參照第5F圖,將第二導電層508與第三導電層510分離,使得核心板502與第二絕緣層518分開。並對分開之第二絕緣層518與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下,如第5G圖所示。 Referring to FIG. 5F, the second conductive layer 508 is separated from the third conductive layer 510 such that the core plate 502 is separated from the second insulating layer 518. The step of turning over the separated second insulating layer 518 and the conductive layers thereon is such that the bottom is facing upward and the top is facing downward, as shown in FIG. 5G.
請參照第5G圖,在翻轉後,第二絕緣層518包括第一側522及與第一側522相對之一第二側524。對第二絕緣層518進行一鑽孔製程,形成貫穿第二絕緣層518中之通孔528。在一些實施例中,形成通孔528之方法包括機械鑽孔製程。其後,形成電鍍起始層526於通孔528中、第三導電層510及第五導電層520上。在一些實施例中,電鍍起始層526包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層526可以化學鍍之方式製作。 Referring to FIG. 5G, after inversion, the second insulating layer 518 includes a first side 522 and a second side 524 opposite the first side 522. A second drilling process is performed on the second insulating layer 518 to form a via 528 extending through the second insulating layer 518. In some embodiments, the method of forming vias 528 includes a mechanical drilling process. Thereafter, a plating initiation layer 526 is formed in the via 528, the third conductive layer 510, and the fifth conductive layer 520. In some embodiments, the plating initiation layer 526 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The plating initiation layer 526 can be formed by electroless plating.
請參照第5H圖,形成一包括複數個開口534之第二感光層530於第二絕緣層518之第一側522的電鍍起始層526上方。形成一包括複數個開口536之第三感光層532於第二絕緣層518之第二側524的電鍍起始層526下方。第二感光層530和第三感光層532之形成方式可以為貼覆乾膜, 或塗佈及後續的微影製程。在一些實施例中,第二感光層530之開口534的尺寸小於第三感光層532之開口536的尺寸。 Referring to FIG. 5H, a second photosensitive layer 530 including a plurality of openings 534 is formed over the plating initiation layer 526 of the first side 522 of the second insulating layer 518. A third photosensitive layer 532 including a plurality of openings 536 is formed under the plating initiation layer 526 of the second side 524 of the second insulating layer 518. The second photosensitive layer 530 and the third photosensitive layer 532 may be formed by laminating a dry film. Or coating and subsequent lithography processes. In some embodiments, the size of the opening 534 of the second photosensitive layer 530 is smaller than the size of the opening 536 of the third photosensitive layer 532.
後續,進行一電鍍製程,於第二感光層530之開口534中、第三感光層532之開口536和通孔528中成長一第六導電層538。第六導電層538填入上述通孔528中,形成一導電孔539,於第二感光層530之開口534中形成導線540,於第三感光層532之開口536中形成墊層542。在一些實施例中,第六導電層538包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。其後請參照第5J圖,移除第二感光層530和第三感光層532,並進行一蝕刻製程,移除沒有被第六導電層538覆蓋的第三導電層510、第五導電層520和電鍍起始層526,形成如第5J圖所示之印刷電路板550。在一些實施例中,此印刷電路板550不包括核心板。 Subsequently, an electroplating process is performed to form a sixth conductive layer 538 in the opening 534 of the second photosensitive layer 530, the opening 536 of the third photosensitive layer 532, and the via 528. The sixth conductive layer 538 is filled in the through hole 528 to form a conductive hole 539. The wire 540 is formed in the opening 534 of the second photosensitive layer 530, and the pad layer 542 is formed in the opening 536 of the third photosensitive layer 532. In some embodiments, the sixth conductive layer 538 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. Thereafter, referring to FIG. 5J, the second photosensitive layer 530 and the third photosensitive layer 532 are removed, and an etching process is performed to remove the third conductive layer 510 and the fifth conductive layer 520 which are not covered by the sixth conductive layer 538. And the plating start layer 526, forming a printed circuit board 550 as shown in Fig. 5J. In some embodiments, this printed circuit board 550 does not include a core board.
值得注意的是,在本實施例中,經由上述蝕刻步驟之後,第四導電層516與部分的導電孔539一起構成第一墊層544。 It should be noted that in the present embodiment, after the above etching step, the fourth conductive layer 516 and the portion of the conductive holes 539 together constitute the first pad layer 544.
在第5J圖中,絕緣層518包括第一側522和第二側524。數個第一墊層544鑲嵌於絕緣層518中,且鄰近絕緣層518之第一側522。數個第二墊層542位於絕緣層518之第二側524上。數個導電孔539位於絕緣層518中,且連接第一墊層544和第二墊層542。在一些實施例中,導電孔539包括垂直之側壁,亦即,導電孔539鄰近第二墊層542之部分相較於鄰近第一墊層544之部分具有大體上相同的尺寸。 In FIG. 5J, insulating layer 518 includes a first side 522 and a second side 524. A plurality of first pad layers 544 are embedded in the insulating layer 518 adjacent to the first side 522 of the insulating layer 518. A plurality of second pad layers 542 are located on the second side 524 of the insulating layer 518. A plurality of conductive vias 539 are located in the insulating layer 518 and connect the first pad layer 544 and the second pad layer 542. In some embodiments, the conductive vias 539 include vertical sidewalls, that is, portions of the conductive vias 539 adjacent the second underlayer 542 have substantially the same dimensions as portions adjacent the first underlayer 544.
數個導線540位於第一墊層544和絕緣層518之 第一側522上。在一些實施例中,導線540與第一墊層544位於不同的層,因此,導線540與第一墊層544之距離不受限於影像轉移的製程能力,例如位於絕緣層518上之導線540與相鄰之第一墊層544的最小距離可以為10μm以下。 A plurality of wires 540 are located in the first pad layer 544 and the insulating layer 518 On the first side 522. In some embodiments, the wire 540 is in a different layer than the first pad layer 544. Therefore, the distance between the wire 540 and the first pad layer 544 is not limited to the process capability of image transfer, such as the wire 540 on the insulating layer 518. The minimum distance from the adjacent first pad layer 544 may be 10 μm or less.
以下根據第6A圖~第6J圖描述本發明另一實施例印刷電路板之製作方法。請參照第6A圖,提供一核心板602。在一些實施例中,核心板包括紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。 Hereinafter, a method of fabricating a printed circuit board according to another embodiment of the present invention will be described based on FIGS. 6A to 6J. Please refer to FIG. 6A to provide a core board 602. In some embodiments, the core sheet comprises a paper phenolic resin, a composite epoxy, a polyimide resin, or a glass fiber.
後續,於核心板602上形成一第一導電層604。在一些實施例中,第一導電層604包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第一導電層604的形成方式包括沉積、壓合或塗佈製程。接著,於第一導電層604上形成第一絕緣層606,第一絕緣層606可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。在一些實施例中,第一絕緣層606可以壓合或塗佈之方式形成於第一導電層604上。 Subsequently, a first conductive layer 604 is formed on the core board 602. In some embodiments, the first conductive layer 604 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The manner in which the first conductive layer 604 is formed includes a deposition, press or coating process. Next, a first insulating layer 606 is formed on the first conductive layer 604. The first insulating layer 606 may be an epoxy resin, a bismaleimie triacine (BT), or a poly Polyimide (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) Or polytetrafluorethylene (PTFE). In some embodiments, the first insulating layer 606 can be formed on the first conductive layer 604 by press bonding or coating.
其後,於第一絕緣層606上形成一第二導電層608和一第三導電層610。在一些實施例中,第二導電層608和第三導電層610可包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第二導電層608和第三導電層610可包括相同的材料,或於另一實施例中包括不同的材 料。例如,第二導電層608可以為厚度較厚之銅層,以供作承載第三導電層610,而第三導電層610可以為厚度較薄之銅層。在一些實施例中,第二導電層608之厚度可以為12μm~36μm,第三導電層610之厚度可以為1μm~6μm。在一些實施例中,第二導電層608和第三導電層610可以壓合或電鍍之方式形成於第一絕緣層606上。 Thereafter, a second conductive layer 608 and a third conductive layer 610 are formed on the first insulating layer 606. In some embodiments, the second conductive layer 608 and the third conductive layer 610 may comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The second conductive layer 608 and the third conductive layer 610 may comprise the same material or, in another embodiment, comprise different materials material. For example, the second conductive layer 608 may be a thick copper layer for carrying the third conductive layer 610, and the third conductive layer 610 may be a thin copper layer. In some embodiments, the second conductive layer 608 may have a thickness of 12 μm to 36 μm, and the third conductive layer 610 may have a thickness of 1 μm to 6 μm. In some embodiments, the second conductive layer 608 and the third conductive layer 610 may be formed on the first insulating layer 606 by press bonding or electroplating.
請參照第6B圖,形成包括複數個開口之第一感光層612於第三導電層610上。第一感光層612之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。值得注意的是,本實施例第一感光層612之開口的尺寸小於第5B圖第一感光層512之開口的尺寸,例如本第6B圖實施例第一感光層612之開口的尺寸可以為20μm~110μm,而第5B圖第一感光層512之開口的尺寸可以為100μm~300μm。 Referring to FIG. 6B, a first photosensitive layer 612 including a plurality of openings is formed on the third conductive layer 610. The first photosensitive layer 612 can be formed by laminating a dry film, or by coating and subsequent lithography. It should be noted that the size of the opening of the first photosensitive layer 612 in this embodiment is smaller than the size of the opening of the first photosensitive layer 512 in FIG. 5B. For example, the size of the opening of the first photosensitive layer 612 in the embodiment of FIG. 6B may be 20 μm. ~110 μm, and the opening of the first photosensitive layer 512 of FIG. 5B may have a size of 100 μm to 300 μm.
請參照第6C圖,於第三導電層610上未被第一感光層612覆蓋的區域(亦即開口中),形成一第四導電層614。在一些實施例中,第四導電層614包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第四導電層614可以使用電鍍之方式成長於第一感光層612之開口中。後續,移除第一感光層612。 Referring to FIG. 6C, a fourth conductive layer 614 is formed on a region of the third conductive layer 610 that is not covered by the first photosensitive layer 612 (that is, in the opening). In some embodiments, the fourth conductive layer 614 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. The fourth conductive layer 614 may be grown in the opening of the first photosensitive layer 612 by electroplating. Subsequently, the first photosensitive layer 612 is removed.
請參照第6D圖,形成一第二絕緣層616於第三導電層610、第四導電層614和第一絕緣層606上。在一些實施例中,第二絕緣層616可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。第二絕緣層616可以壓合或塗佈之方式形成。 Referring to FIG. 6D, a second insulating layer 616 is formed on the third conductive layer 610, the fourth conductive layer 614, and the first insulating layer 606. In some embodiments, the second insulating layer 616 may be an epoxy resin, a bismaleimie triacine (BT), a polyimide (PI), or an increase. Ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl acrylate (polymethyl methacrylate) Methacrylate, PMMA) or polytetrafluorethylene (PTFE). The second insulating layer 616 can be formed by pressing or coating.
接著,形成一第五導電層618於第二絕緣層616上。在一些實施例中,第五導電層618包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。 Next, a fifth conductive layer 618 is formed on the second insulating layer 616. In some embodiments, the fifth conductive layer 618 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof.
請參照第6E圖,進行一切割製程,切除第一絕緣層606和第二絕緣層616貼合之部分,使得在後續步驟得以將第二導電層608可與第三導電層610分離。 Referring to FIG. 6E, a dicing process is performed to cut off portions of the first insulating layer 606 and the second insulating layer 616, so that the second conductive layer 608 can be separated from the third conductive layer 610 in a subsequent step.
請參照第6F圖,將第二導電層608與第三導電層610分離,使得核心板602與第二絕緣層616分開。並對分開之第二絕緣層616與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下,如第6F圖所示。 Referring to FIG. 6F, the second conductive layer 608 is separated from the third conductive layer 610 such that the core plate 602 is separated from the second insulating layer 616. The step of turning over the separated second insulating layer 616 and the conductive layers thereon is such that the bottom portion faces upward and the top portion faces downward, as shown in FIG. 6F.
請參照第6G圖,在翻轉後,第二絕緣層616包括第一側624及與第一側624相對之一第二側626。對第二絕緣616層進行一鑽孔製程,形成貫穿第二絕緣層616中之通孔620。在一些實施例中,形成通孔620之方法包括一雷射雙面對鑽,亦即從第一絕緣層606之第一側624和第二側626以雷射進行鑽孔製程。值得注意的是,以此雷射雙面對鑽製程形成的通孔620具有一漏斗形,亦即通孔620鄰近第二絕緣層616之第一側624和第二側626的開口部分有較大的尺寸,而位於第二絕緣層616中之中央部分有較小的尺寸。 Referring to FIG. 6G, after inversion, the second insulating layer 616 includes a first side 624 and a second side 626 opposite the first side 624. A second drilling process is performed on the second insulating layer 616 to form a through hole 620 through the second insulating layer 616. In some embodiments, the method of forming the via 620 includes a laser double sided pair drill, that is, a laser drilling process from the first side 624 and the second side 626 of the first insulating layer 606. It should be noted that the through hole 620 formed by the laser double-sided drilling process has a funnel shape, that is, the through hole 620 is adjacent to the opening portion of the first side 624 and the second side 626 of the second insulating layer 616. The large size, while the central portion of the second insulating layer 616 has a smaller size.
其後,形成電鍍起始層622於通孔620中、第三導電層610及第五導電層618上。在一些實施例中,電鍍起始層622包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層622可以化學鍍之方式製作。 Thereafter, a plating initiation layer 622 is formed in the via 620, the third conductive layer 610, and the fifth conductive layer 618. In some embodiments, the plating initiation layer 622 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. The plating initiation layer 622 can be fabricated by electroless plating.
請參照第6H圖,形成一包括複數個開口之第二感光層628於第二絕緣層616之第一側624的電鍍起始層622上方。形成一包括複數個開口之第三感光層630於第二絕緣層616之第二側626的電鍍起始層622下方。第二感光層628和第三感光層630之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。在一些實施例中,第二感光層628之開口的尺寸小於第三感光層630之開口的尺寸。 Referring to FIG. 6H, a second photosensitive layer 628 including a plurality of openings is formed over the plating initiation layer 622 of the first side 624 of the second insulating layer 616. A third photosensitive layer 630 including a plurality of openings is formed under the plating initiation layer 622 of the second side 626 of the second insulating layer 616. The second photosensitive layer 628 and the third photosensitive layer 630 may be formed by laminating a dry film, or coating and subsequent lithography processes. In some embodiments, the size of the opening of the second photosensitive layer 628 is smaller than the size of the opening of the third photosensitive layer 630.
後續,進行一電鍍製程,於第二感光層628之開口中、第三感光層630之開口和通孔620中成長一第六導電層632。第六導電層632填入上述通孔620中,形成一導電孔633,於第二感光層628之開口中形成導線634,於第三感光層630之開口中形成墊層636。在一些實施例中,第六導電層632包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。其後請參照第6J圖,移除第二感光層628和第三感光層630,並進行一蝕刻製程,移除未被第六導電層632覆蓋的第三導電層610、第五導電層618和電鍍起始層622,形成如第6J圖所示之印刷電路板650。在一些實施例中,此印刷電路板650不包括核心板。 Subsequently, an electroplating process is performed to form a sixth conductive layer 632 in the opening of the second photosensitive layer 628, the opening of the third photosensitive layer 630, and the via 620. The sixth conductive layer 632 is filled in the through hole 620 to form a conductive hole 633. The wire 634 is formed in the opening of the second photosensitive layer 628, and the pad layer 636 is formed in the opening of the third photosensitive layer 630. In some embodiments, the sixth conductive layer 632 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. Thereafter, referring to FIG. 6J, the second photosensitive layer 628 and the third photosensitive layer 630 are removed, and an etching process is performed to remove the third conductive layer 610 and the fifth conductive layer 618 that are not covered by the sixth conductive layer 632. And the plating start layer 622, forming a printed circuit board 650 as shown in Fig. 6J. In some embodiments, the printed circuit board 650 does not include a core board.
值得注意的是,在本實施例中,在上述蝕刻步驟之後,第四導電層614與部分的導電孔633一起構成一墊層638。 It should be noted that in the present embodiment, after the above etching step, the fourth conductive layer 614 together with a portion of the conductive vias 633 constitute a pad layer 638.
在第6J圖中,絕緣層616包括第一側624和第二側626。數個第一墊層638鑲嵌於絕緣層616中,且鄰近絕緣層616第一側624。數個第二墊層636位於絕緣層616之第二側626上。數個導電孔633位於絕緣層616中,且連接第一墊層638和第二墊層636。在一些實施例中,導電孔633具有漏 斗形,亦即,導電孔633鄰近第一墊層638與第二墊層636之部分相較於鄰近第二絕緣層616中央之部分具有較大的尺寸。 In FIG. 6J, insulating layer 616 includes a first side 624 and a second side 626. A plurality of first pad layers 638 are embedded in the insulating layer 616 adjacent to the first side 624 of the insulating layer 616. A plurality of second pad layers 636 are located on the second side 626 of the insulating layer 616. A plurality of conductive vias 633 are located in the insulating layer 616 and connect the first pad layer 638 and the second pad layer 636. In some embodiments, the conductive via 633 has a drain The bucket shape, that is, the portion of the conductive via 633 adjacent to the first pad layer 638 and the second pad layer 636 has a larger size than the portion adjacent to the center of the second insulating layer 616.
數個導線634位於第一墊層638和絕緣層616之第一側624上。在一些實施例中,導線634與第一墊層638位於不同的層,因此,導線634與第一墊層638之距離不受限於影像轉移的製程能力,例如位於絕緣層616上之導線634與相鄰之第一墊層638的最小距離可以為10μm以下。 A plurality of wires 634 are located on the first side 624 of the first pad layer 638 and the insulating layer 616. In some embodiments, the wire 634 is in a different layer than the first pad layer 638. Therefore, the distance between the wire 634 and the first pad layer 638 is not limited by the process capability of image transfer, such as the wire 634 on the insulating layer 616. The minimum distance from the adjacent first pad layer 638 may be 10 μm or less.
以下根據第7A圖~第7K圖描述本發明一實施例印刷電路板之製作方法。請參照第7A圖,提供一核心板702。在一些實施例中,核心板702包括紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。 Hereinafter, a method of fabricating a printed circuit board according to an embodiment of the present invention will be described based on FIGS. 7A to 7K. Referring to Figure 7A, a core board 702 is provided. In some embodiments, the core sheet 702 comprises a paper phenolic resin, a composite epoxy, a polyimide resin, or a glass fiber.
後續,於核心板702上形成一第一導電層704。在一些實施例中,第一導電層704包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第一導電層304的形成方式包括沉積、壓合或塗佈製程。接著,於第一導電層704上形成第一絕緣層706,第一絕緣層706可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。在一些實施例中,第一絕緣層706可以壓合或塗佈之方式形成於第一導電層704上。 Subsequently, a first conductive layer 704 is formed on the core board 702. In some embodiments, the first conductive layer 704 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. The manner in which the first conductive layer 304 is formed includes a deposition, press bonding, or coating process. Next, a first insulating layer 706 is formed on the first conductive layer 704. The first insulating layer 706 may be an epoxy resin, a bismaleimie triacine (BT), or a poly Polyimide (PI), ajinomoto build-up film, polyphenylene oxide (PPO), polypropylene (PP), polymethyl methacrylate (PMMA) Or polytetrafluorethylene (PTFE). In some embodiments, the first insulating layer 706 can be formed on the first conductive layer 704 by press bonding or coating.
其後,於第一絕緣層706上形成一第二導電層 708和一第三導電層710。在一些實施例中,第二導電層708和第三導電層710可包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第二導電層708和第三導電層710可包括相同的材料,或於另一實施例中包括不同的材料。例如,第二導電層708可以為厚度較厚之銅層,以供作承載第三導電層710,而第三導電層710可以為厚度較薄之銅層。在一些實施例中,第二導電層708之厚度可以為12μm~36μm,第三導電層710之厚度可以為1μm~6μm。在一些實施例中,第二導電層708和第三導電層710可以壓合或電鍍之方式形成於第一絕緣層706上。 Thereafter, a second conductive layer is formed on the first insulating layer 706. 708 and a third conductive layer 710. In some embodiments, the second conductive layer 708 and the third conductive layer 710 may comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof. The second conductive layer 708 and the third conductive layer 710 may comprise the same material or, in another embodiment, comprise a different material. For example, the second conductive layer 708 can be a thicker copper layer for carrying the third conductive layer 710, and the third conductive layer 710 can be a thinner copper layer. In some embodiments, the second conductive layer 708 may have a thickness of 12 μm to 36 μm, and the third conductive layer 710 may have a thickness of 1 μm to 6 μm. In some embodiments, the second conductive layer 708 and the third conductive layer 710 may be formed on the first insulating layer 706 by press bonding or electroplating.
請參照第7B圖,形成包括開口714及開口715之第一感光層712於於第三導電層710上。第一感光層712之形成方式可以為貼覆乾膜或塗佈及後續的微影製程。 Referring to FIG. 7B, a first photosensitive layer 712 including an opening 714 and an opening 715 is formed on the third conductive layer 710. The first photosensitive layer 712 can be formed by laminating dry film or coating and subsequent lithography processes.
請參照第7C圖,於第三導電層710上未被第一感光層712覆蓋的區域(亦即開口714及開口715中),形成一第四導電層716及導線717。在一些實施例中,第四導電層716及導線717包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。第四導電層716及導線717可以使用電鍍之方式成長於第一感光層712之開口714及開口715中。後續,移除第一感光層712。 Referring to FIG. 7C, a fourth conductive layer 716 and a wire 717 are formed on a region of the third conductive layer 710 that is not covered by the first photosensitive layer 712 (ie, in the opening 714 and the opening 715). In some embodiments, the fourth conductive layer 716 and the wires 717 comprise nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. The fourth conductive layer 716 and the wires 717 can be grown in the opening 714 and the opening 715 of the first photosensitive layer 712 by electroplating. Subsequently, the first photosensitive layer 712 is removed.
請參照第7D圖,形成一第二絕緣層718於第三導電層710、第四導電層716、導線717和第一絕緣層706上。在一些實施例中,第二絕緣層718可以是環氧樹脂(epoxy resin)、雙馬來醯亞胺-三氮雜苯(bismaleimie triacine,BT)、聚醯亞胺(polyimide,PI)、增層絕緣膜(ajinomoto build-up film)、聚苯醚(poly phenylene oxide,PPO)、聚丙 烯(polypropylene,PP)、聚丙烯酸甲酯(polymethyl methacrylate,PMMA)或聚四氟乙烯(polytetrafluorethylene,PTFE)。第二絕緣層718可以壓合或塗佈之方式形成於第三和第四導電層710、716以及導線717上。 Referring to FIG. 7D, a second insulating layer 718 is formed on the third conductive layer 710, the fourth conductive layer 716, the wires 717, and the first insulating layer 706. In some embodiments, the second insulating layer 718 may be an epoxy resin, a bismaleimie triacine (BT), a polyimide (PI), or an increase. Aginomoto build-up film, polyphenylene oxide (PPO), polyacrylic acid Polypropylene (PP), polymethyl methacrylate (PMMA) or polytetrafluorethylene (PTFE). The second insulating layer 718 may be formed on the third and fourth conductive layers 710, 716 and the wires 717 by press bonding or coating.
接著,請參照第7E圖,形成一第五導電層720於第二絕緣層718上。在一些實施例中,第五導電層720包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。進行一鑽孔製程,於第五導電層720和第二絕緣層718中形成一盲孔724,暴露第四導電層716。在一些實施例中,形成盲孔724之方法包括雷射鑽孔製程。其後,形成一電鍍起始層722於盲孔724中和第二絕緣層718上。在一些實施例中,電鍍起始層722包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。電鍍起始層722可以化學鍍之方式製作。 Next, referring to FIG. 7E, a fifth conductive layer 720 is formed on the second insulating layer 718. In some embodiments, the fifth conductive layer 720 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations thereof, or alloys thereof. A hole drilling process is performed to form a blind via 724 in the fifth conductive layer 720 and the second insulating layer 718 to expose the fourth conductive layer 716. In some embodiments, the method of forming the blind holes 724 includes a laser drilling process. Thereafter, a plating initiation layer 722 is formed in the blind vias 724 and on the second insulating layer 718. In some embodiments, the plating initiation layer 722 comprises a combination of nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, or alloys thereof. The plating initiation layer 722 can be formed by electroless plating.
請參照第7F圖,形成包括複數個開口728之第二感光層726於電鍍起始層722上。第二感光層726之形成方式可以為網印、貼覆乾膜或塗佈及後續的微影製程。 Referring to FIG. 7F, a second photosensitive layer 726 including a plurality of openings 728 is formed on the plating initiation layer 722. The second photosensitive layer 726 can be formed by screen printing, dry film coating or coating, and subsequent lithography processes.
後續,以電鍍起始層722作為電鍍之晶種層,進行一電鍍製程,於電鍍起始層722未被第二感光層726覆蓋之區域(亦即開口728中)成長一第六導電層730。第六導電層730可填入上述盲孔中,形成一導電孔733,及/或於另一開口728中形成一墊層734。在一些實施例中,第六導電層730包括鎳、金、錫、鉛、銅、鋁、銀、鉻、鎢上述之組合或上述之合金。 Subsequently, the plating initiation layer 722 is used as a seed layer for electroplating, and an electroplating process is performed to grow a sixth conductive layer 730 in a region (ie, opening 728) where the electroplating initiation layer 722 is not covered by the second photosensitive layer 726. . The sixth conductive layer 730 can be filled into the blind vias to form a conductive via 733, and/or a pad layer 734 can be formed in the other opening 728. In some embodiments, the sixth conductive layer 730 comprises nickel, gold, tin, lead, copper, aluminum, silver, chromium, tungsten, combinations of the foregoing, or alloys thereof.
請參照第7G圖,移除第二感光層726並去除覆蓋於第二感光層726下的電鍍起始層722和第五導電層 720。在一些實施例中,上述去除覆蓋於第二感光層726下的電鍍起始層722和第五導電層720之步驟可採用化學蝕刻法。請參照第7H圖,進行一切割製程,切除第一絕緣層706和第二絕緣層718貼合之部分,使得在後續步驟得以將第二導電層708可與第三導電層710分離。 Referring to FIG. 7G, the second photosensitive layer 726 is removed and the plating initiation layer 722 and the fifth conductive layer covering the second photosensitive layer 726 are removed. 720. In some embodiments, the step of removing the plating start layer 722 and the fifth conductive layer 720 over the second photosensitive layer 726 may be performed by chemical etching. Referring to FIG. 7H, a dicing process is performed to cut off portions of the first insulating layer 706 and the second insulating layer 718, so that the second conductive layer 708 can be separated from the third conductive layer 710 in a subsequent step.
請參照第7I圖,將第二導電層708與第三導電層710分離,使得核心板702與第二絕緣層718分開。並對分開之第二絕緣層718與其上之各導電層進行一翻轉步驟,使得原本之底部朝上,頂部朝下,如第7J圖所示。 Referring to FIG. 7I, the second conductive layer 708 is separated from the third conductive layer 710 such that the core plate 702 is separated from the second insulating layer 718. The step of turning over the separated second insulating layer 718 and the conductive layers thereon is such that the bottom is facing upward and the top is facing downward, as shown in Fig. 7J.
請參照第7J圖,在翻轉後,第二絕緣層718包括第一側742及與第一側742相對之一第二側744。於第二絕緣層718之第一側742上形成包括一開口738之第三感光層736,其中開口738對應於第四導電層716。於第二絕緣層718之第二側744上形成一第四感光層737。在一些實施例中,第四感光層737完全將第二絕緣層718之第二側744和其上的第六導電層730及墊層734覆蓋。第三感光層736與第四感光層737之形成方式可以為貼覆乾膜,或塗佈及後續的微影製程。 Referring to FIG. 7J, after inversion, the second insulating layer 718 includes a first side 742 and a second side 744 opposite the first side 742. A third photosensitive layer 736 including an opening 738 is formed on the first side 742 of the second insulating layer 718, wherein the opening 738 corresponds to the fourth conductive layer 716. A fourth photosensitive layer 737 is formed on the second side 744 of the second insulating layer 718. In some embodiments, the fourth photosensitive layer 737 completely covers the second side 744 of the second insulating layer 718 and the sixth conductive layer 730 and the pad layer 734 thereon. The third photosensitive layer 736 and the fourth photosensitive layer 737 may be formed by laminating dry film, or coating and subsequent lithography processes.
後續,請參照第7K圖,於第三感光層736之開口738中成長一銅凸塊740。之後,移除第三感光層736和第四感光層737,並進行一蝕刻製程,移除沒有被銅凸塊740覆蓋之第三導電層710,形成如第7K圖所示之印刷電路板752。在一些實施例中,此印刷電路板752不包括核心板。 Subsequently, referring to FIG. 7K, a copper bump 740 is grown in the opening 738 of the third photosensitive layer 736. Thereafter, the third photosensitive layer 736 and the fourth photosensitive layer 737 are removed, and an etching process is performed to remove the third conductive layer 710 not covered by the copper bumps 740 to form the printed circuit board 752 as shown in FIG. 7K. . In some embodiments, the printed circuit board 752 does not include a core board.
本發明於一實施例提供一種印刷電路板,包括:一絕緣層,包括一第一側及與第一側相對之一第二側;一第一墊層,鑲嵌於絕緣層中,且鄰近第一側;一第二墊 層,位於絕緣層之第二側上;一導電孔,位於絕緣層中,且連接第一墊層和第二墊層;及數個導線,其中至少一導線位於絕緣層之第一側上。 An embodiment of the present invention provides a printed circuit board comprising: an insulating layer including a first side and a second side opposite to the first side; a first pad layer embedded in the insulating layer and adjacent to the first One side; one second pad a layer on the second side of the insulating layer; a conductive hole in the insulating layer and connecting the first pad layer and the second pad layer; and a plurality of wires, wherein at least one of the wires is on the first side of the insulating layer.
本發明於一實施例提供一種印刷電路板之製作方法,包括:提供一核心板;形成一第一絕緣層於核心板上;形成一第一導電層於第一絕緣層上;形成一第二絕緣層於第一導電層和第一絕緣層上;將第二絕緣層與第一絕緣層分離;將分離後之第二絕緣層倒置,其中倒置後之第二絕緣層包括一第一側及與第一側相對之第二側;根據第一導電層形成鑲嵌於第二絕緣層之一第一墊層,且第一墊層鄰近第二絕緣層之第一側;及在第二絕緣層與第一絕緣層分離之後,形成複數個導線,其中上述導線之至少一者位於第二絕緣層之第一側上。 An embodiment of the present invention provides a method of fabricating a printed circuit board, comprising: providing a core board; forming a first insulating layer on the core board; forming a first conductive layer on the first insulating layer; forming a second An insulating layer is disposed on the first conductive layer and the first insulating layer; separating the second insulating layer from the first insulating layer; and inverting the separated second insulating layer, wherein the inverted second insulating layer includes a first side and a second side opposite to the first side; forming a first pad layer embedded in the second insulating layer according to the first conductive layer, and the first pad layer is adjacent to the first side of the second insulating layer; and the second insulating layer After being separated from the first insulating layer, a plurality of wires are formed, wherein at least one of the wires is on the first side of the second insulating layer.
一種印刷電路板,包括:一絕緣層,包括一第一側及與第一側相對之一第二側;一第一墊層及一導線,分別鑲嵌於絕緣層中,且鄰近第一側;一第二墊層,位於絕緣層之第二側上;一導電孔,位於絕緣層中,且連接第一墊層和第二墊層;及一銅凸塊,位於第一墊層上。 A printed circuit board comprising: an insulating layer comprising a first side and a second side opposite to the first side; a first pad layer and a wire respectively embedded in the insulating layer and adjacent to the first side; a second pad layer on the second side of the insulating layer; a conductive hole in the insulating layer and connecting the first pad layer and the second pad layer; and a copper bump on the first pad layer.
一種印刷電路板之製作方法,包括:提供一核心板;形成一第一絕緣層於核心板上;形成一第一導電層於第一絕緣層上;形成一第二絕緣層於第一導電層和第一絕緣層上;將第二絕緣層與第一絕緣層分離;將分離後之第二絕緣層倒置,其中倒置後之第二絕緣層包括一第一側及與第一側相對之第二側;根據第一導電層形成鑲嵌於第二絕緣層之一第一墊層及一導線,且第一墊層及導線鄰近第二絕緣層之第一側;及形成一銅凸塊於第一墊層上。 A manufacturing method of a printed circuit board, comprising: providing a core board; forming a first insulating layer on the core board; forming a first conductive layer on the first insulating layer; forming a second insulating layer on the first conductive layer And separating the second insulating layer from the first insulating layer; inverting the separated second insulating layer, wherein the inverted second insulating layer comprises a first side and a first side opposite to the first side Forming a first pad layer and a wire embedded in the second insulating layer according to the first conductive layer, and the first pad layer and the wire are adjacent to the first side of the second insulating layer; and forming a copper bump in the first On a mat.
雖然本發明之較佳實施例說明如上,然其並非用以限定本發明,任何熟習此技術領域之士,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the preferred embodiments of the present invention are described above, it is not intended to limit the present invention, and any person skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.
310‧‧‧第三導電層 310‧‧‧ Third conductive layer
316‧‧‧第四導電層 316‧‧‧4th conductive layer
318‧‧‧第二絕緣層 318‧‧‧Second insulation
320‧‧‧第五導電層 320‧‧‧ fifth conductive layer
322‧‧‧電鍍起始層 322‧‧‧ plating initiation layer
330‧‧‧第六導電層 330‧‧‧ sixth conductive layer
333‧‧‧導電孔 333‧‧‧Electrical hole
334‧‧‧墊層 334‧‧‧ cushion
336‧‧‧第三感光層 336‧‧‧third photosensitive layer
342‧‧‧第一側 342‧‧‧ first side
344‧‧‧第二側 344‧‧‧ second side
346‧‧‧導線 346‧‧‧Wire
350‧‧‧第二墊層 350‧‧‧Second cushion
352‧‧‧印刷電路板 352‧‧‧Printed circuit board
Claims (34)
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