[go: up one dir, main page]

TWI540015B - Lead free solder ball - Google Patents

Lead free solder ball Download PDF

Info

Publication number
TWI540015B
TWI540015B TW102109029A TW102109029A TWI540015B TW I540015 B TWI540015 B TW I540015B TW 102109029 A TW102109029 A TW 102109029A TW 102109029 A TW102109029 A TW 102109029A TW I540015 B TWI540015 B TW I540015B
Authority
TW
Taiwan
Prior art keywords
solder
mass
solder ball
ball
electrode
Prior art date
Application number
TW102109029A
Other languages
Chinese (zh)
Other versions
TW201343311A (en
Inventor
Tsukasa Ohnishi
Yoshie Yamanaka
Ken Tachibana
Original Assignee
Senju Metal Industry Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2012/058271 external-priority patent/WO2012133598A1/en
Application filed by Senju Metal Industry Co filed Critical Senju Metal Industry Co
Publication of TW201343311A publication Critical patent/TW201343311A/en
Application granted granted Critical
Publication of TWI540015B publication Critical patent/TWI540015B/en

Links

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

無鉛焊料錫球 Lead-free solder balls

本發明係關於用於半導體等電子零件之電極之無鉛銲料錫球。特別是在Au鍍敷等Ni電極部與Cu上,可同時使用塗佈有水溶性預助熔劑之Cu電極部,關於搭載有電極之電子零件落下時之低故障模式的無鉛銲料錫球。 The present invention relates to a lead-free solder ball for use in an electrode of an electronic component such as a semiconductor. In particular, in the Ni electrode portion such as Au plating and Cu, a Cu electrode portion coated with a water-soluble preflux can be used at the same time, and a lead-free solder ball having a low failure mode when the electronic component on which the electrode is mounted can be used.

近來,由於電子機器之小型化、電子信號之高速化等,因此使用於電子機器之電子零件亦小型化、多功能化。小型化、多功能化之電子零件係具有BGA(Ball Grid Array)、CSP(Chip Size Package)、MCM(Multi Chip Module)(以下以BGA為代表)。BGA係在BGA基板背面,於基板格狀位置設置有多數電極。將BGA安裝於印刷基板時,藉由以銲錫接合BGA電極及印刷基板之銲墊予以進行。對BGA之印刷基板進行安裝時,不止是將銲錫供給至每電極且銲接時很費工,並且無法由外部供給銲錫至基板中間之電極。在此,為了將BGA安裝於印刷基板,而進行事先將銲錫置放於BGA電極上之方法。將此稱為焊錫凸塊形成。 Recently, electronic devices used in electronic devices have been miniaturized and multi-functionalized due to miniaturization of electronic devices and speeding up of electronic signals. The electronic components that are miniaturized and multi-functional are BGA (Ball Grid Array), CSP (Chip Size Package), and MCM (Multi Chip Module) (hereinafter referred to as BGA). The BGA is on the back surface of the BGA substrate, and a plurality of electrodes are provided on the substrate in a lattice position. When the BGA is mounted on a printed circuit board, it is performed by soldering a BGA electrode and a solder pad of the printed circuit board. When the printed circuit board of the BGA is mounted, not only the solder is supplied to each electrode but also the welding is laborious, and the solder is not supplied from the outside to the electrode in the middle of the substrate. Here, in order to mount the BGA on the printed circuit board, a method of placing the solder on the BGA electrode in advance is performed. This is referred to as solder bump formation.

對BGA之焊錫凸塊形成係使用錫球、焊膏等。以錫球形成焊錫凸塊時,將黏著性之助焊劑塗佈於BGA電極,且將錫球載置於塗佈有該助焊劑之電極上。之後,以像回流爐之加熱裝置加熱該BGA基板,藉由熔融錫球將焊錫凸塊形成於電極上者。BGA基板或CSP基板等之半導體基板總稱為模組基板。又,以焊膏將焊錫凸塊形成於晶圓銲墊時,將鑽有與銲墊約相同大小的孔之金屬光罩設置於與晶圓銲墊一致的位置,將來自金屬光罩上焊膏以刮漿板耙平,並將焊膏印刷塗佈於晶圓銲墊。之後,以回流爐對晶圓進行加熱,藉由使焊膏熔融形成焊錫凸塊。 Solder balls, solder paste, etc. are used for the solder bump formation of the BGA. When a solder bump is formed by solder balls, an adhesive flux is applied to the BGA electrode, and the solder ball is placed on the electrode coated with the flux. Thereafter, the BGA substrate is heated by a heating device such as a reflow furnace, and solder bumps are formed on the electrodes by melting the solder balls. A semiconductor substrate such as a BGA substrate or a CSP substrate is collectively referred to as a module substrate. Further, when solder bumps are formed on the wafer pads by solder paste, a metal mask having holes of about the same size as the pads is placed at a position corresponding to the wafer pads, and the metal mask is soldered. The paste is flattened with a squeegee and the solder paste is applied to the wafer pads. Thereafter, the wafer is heated in a reflow furnace to melt the solder paste to form solder bumps.

話說,在以往的BGA係使用Sn-Pb合金之錫球來作為焊錫凸塊形成用。該Sn-Pb錫球係不止對BGA電極具有良好銲接性,特別是,Sn-Pb之共晶組成係在銲接時具有不會對BGA元件或基板等造成熱影響之熔點並具有柔軟之Pb,所以即使使用之電子零件或電子機器等落下亦可吸收衝擊,對於電子零件或電子機器等之壽命提供重大貢獻。目前在全球規模中,Pb之使用係被規範的,當然,藉由以往銲接,所使用之Sn-Pb共晶組成亦被規範。 In other words, in the conventional BGA system, a tin ball of a Sn-Pb alloy is used as a solder bump. The Sn-Pb solder ball not only has good solderability to the BGA electrode, but particularly, the eutectic composition of the Sn-Pb has a melting point which does not cause thermal influence on the BGA element or the substrate during soldering, and has a soft Pb. Therefore, even if an electronic component or an electronic device is used, the impact can be absorbed, and the life of the electronic component or the electronic device can be greatly contributed. At present, the use of Pb is regulated on a global scale. Of course, the Sn-Pb eutectic composition used is also regulated by conventional soldering.

以往,使用Sn-3.0Ag-0.5Cu或Sn-4.0Ag-0.5Cu等之Sn-Ag-Cu系的銲錫合金作為BGA用之無鉛銲料錫球之組成。雖然該些無鉛銲料合金係具有良好溫度循環特性,但使用該些銲錫合金組成之錫球的可攜式電子設備落下時,容易發生由錫球連接界面脫落之界面剝離,因此被認為具有較差之落下衝擊性。 Conventionally, a Sn-Ag-Cu-based solder alloy such as Sn-3.0Ag-0.5Cu or Sn-4.0Ag-0.5Cu has been used as a composition of lead-free solder balls for BGA. Although the lead-free solder alloys have good temperature cycling characteristics, when the portable electronic device using the solder balls composed of the solder alloys is dropped, the interface peeling off from the solder ball connection interface is liable to occur, and thus it is considered to be inferior. Falling impact.

作為防止可攜式電子設備落下衝擊之無鉛銲料錫球用之銲錫合金組成,其特徵係以質量%由來自(1)Ag:0.8~2.0%、(2)Cu:0.05~0.3%、及(3)In:0.01%以上、未超過0.1%、Ni:0.01~0.04%、Co:0.01~0.05%、及Pt:0.01~0.1%中所選擇之1種或2種以上、剩餘部份Sn構成之無鉛銲料合金(WO2006/129713A公報、專利文獻1),由包含Ag:1.0~2.0質量%、Cu:0.3~1.5質量%、剩餘部份Sn及偶發不純物構成之無鉛銲料合金。且,包含Sb:0.005~1.5質量%、Zn:0.05~1.5質量%、Ni:0.05~1.5質量%、Fe:0.005~0.5質量%之1種或2種以上,Sb、Zn、Ni、Fe之合計含有量為1.5質量%以下之無鉛銲料合金(特開2002-239780號公報、專利文獻2),以mass%由滿足0.1~1.5%之Ag、0.5~0.75%之Cu、12.5≦Cu/Ni≦100關係之Ni、剩餘部份Sn以及偶發不純物構成之無鉛銲料合金(WO2007/081006A公報、專利文獻3)、由含有Ag:1.0~2.0質量%、Cu:0.3~1.0質量%、Ni:0.005~0.10質量%、剩餘部份Sn及偶發不純物構成之無鉛銲料合金(WO2007/102588A公報、專利文獻4)。又,揭示有作為發生於如BGA基板之模組與印刷基板接合時之未融合解決方法,係將助焊劑塗佈於模組基板之電極部之方法(WO2006-134891A公報、專利文獻5)。 The composition of the solder alloy for lead-free solder balls for preventing the impact of portable electronic devices is characterized by mass% from (1) Ag: 0.8 to 2.0%, (2) Cu: 0.05 to 0.3%, and 3) In: 0.01% or more, not more than 0.1%, Ni: 0.01 to 0.04%, Co: 0.01 to 0.05%, and Pt: 0.01 to 0.1%, one or more selected from the group, and the remaining part of Sn. The lead-free solder alloy (WO2006/129713A, Patent Document 1) is a lead-free solder alloy comprising Ag: 1.0 to 2.0% by mass, Cu: 0.3 to 1.5% by mass, and the remaining portion of Sn and incidental impurities. Further, it includes one or two or more kinds of Sb: 0.005 to 1.5% by mass, Zn: 0.05 to 1.5% by mass, Ni: 0.05 to 1.5% by mass, and Fe: 0.005 to 0.5% by mass, and Sb, Zn, Ni, and Fe. A lead-free solder alloy having a total content of 1.5% by mass or less (JP-A-2002-239780, Patent Document 2), which satisfies 0.1 to 1.5% of Ag, 0.5 to 0.75% of Cu, and 12.5 ≦Cu/Ni by mass%. A lead-free solder alloy composed of Ni, a remaining portion of Sn, and an incidental impurity of ≦100 (WO2007/081006A, Patent Document 3), containing Ag: 1.0 to 2.0% by mass, Cu: 0.3 to 1.0% by mass, and Ni: 0.005 ~0.10% by mass, a remaining portion of Sn, and a lead-free solder alloy composed of incidental impurities (WO2007/102588A, Patent Document 4). In addition, a method of applying a flux to an electrode portion of a module substrate as a method of unbonding when a module such as a BGA substrate is bonded to a printed circuit board is disclosed (WO2006-134891A, Patent Document 5).

〔先前技術文獻〕 [Previous Technical Literature]

〔專利文獻〕 [Patent Document]

〔專利文獻1〕 WO2006/129713A公報 [Patent Document 1] WO2006/129713A

〔專利文獻2〕 特開2002-239780號公報 [Patent Document 2] JP-A-2002-239780

〔專利文獻3〕 WO2007/081006A公報 [Patent Document 3] WO2007/081006A Bulletin

〔專利文獻4〕 WO2007/102588A公報 [Patent Document 4] WO2007/102588A Bulletin

〔專利文獻5〕 WO2006/134891A公報 [Patent Document 5] WO2006/134891A

該些專利文獻1~4係為了改善Sn-Ag-Cu系錫球之耐落下衝擊性,減少Ag之含有量並使銲錫之硬度下降使衝擊吸收量提高,減少Cu之含有量,使發生於銲墊與銲錫之接合面之Cu6Sn5等的金屬間化合物層變薄,防止在接合界面脫落者,藉由減少Ag與Cu之含有量,以添加Ni、Fe、Co等鐵族元素,對發生之銲錫本身強度進行改善。 In order to improve the drop impact resistance of the Sn-Ag-Cu type solder ball, the patent documents 1 to 4 reduce the content of Ag and lower the hardness of the solder, thereby increasing the amount of impact absorption and reducing the content of Cu. The intermetallic compound layer such as Cu6Sn5 on the joint surface of the solder pad and the solder is thinned to prevent the loss of the content of Ag and Cu by adding the iron group element such as Ni, Fe, Co, etc. The strength of the solder itself is improved.

但,即使採用如專利文獻1~4之耐落下衝擊性對策之錫球,亦會發生無法減少電子機器落下所引起之故障此問題點。解析該點時,與以往之Sn-Pb銲錫做比較,可了解因增加中之電子機器落下所引起之故障係不僅發生在如專利文獻1~5之錫球與基板之接合界面。接合於BGA基板等之模組基板與印刷基板時,被稱為用於BGA電極之錫球的銲錫成份與用於印刷基板銲接之焊膏的銲錫成份不混合(圖1)之「未融合」缺陷,係因隨著由以往之Sn-Pb銲錫向無鉛銲料之轉移而產生新的缺陷。 However, even if a solder ball which is resistant to falling impact measures of Patent Documents 1 to 4 is used, there is a problem that the malfunction caused by the falling of the electronic device cannot be reduced. When this point is analyzed, it is understood that the failure caused by the falling of the electronic device in the increase is not only caused by the bonding interface between the solder ball and the substrate as disclosed in Patent Documents 1 to 5, as compared with the conventional Sn-Pb solder. When bonding to a module substrate such as a BGA substrate or a printed circuit board, the solder component called the solder ball for the BGA electrode is not mixed with the solder component of the solder paste for soldering the printed circuit board (Fig. 1). Defects are new defects due to the transfer of conventional Sn-Pb solder to lead-free solder.

然而,可了解未融合發生係大多發生在隨著由Sn-3.0Ag-0.5Cu組成之錫球,轉移至作為耐落下衝擊性對策所被開發之Sn-Ag-Cu-Ni組成之錫球之問題。未融合的原因多半係為了改善錫球之落下衝擊,因此添加之Ni形成Sn與金屬間化合物,並藉由在錫球表面之析出,妨礙混合有錫球之銲錫成份與焊膏與銲錫成份。 However, it can be understood that the unfused generation system mostly occurs in a tin ball composed of Sn-Ag-Cu-Ni which is developed as a countermeasure against drop impact by the solder ball composed of Sn-3.0Ag-0.5Cu. problem. Most of the reasons for the unfusion are to improve the impact of the solder ball. Therefore, the added Ni forms Sn and the intermetallic compound, and the precipitation of the solder ball surface interferes with the solder composition of the solder ball and the solder paste and solder composition.

又,以下也可能是未融合之發生原因。印刷基板被加熱且彎曲嚴重時,錫球與焊膏會分離。當維持分離錫球與焊膏進行加熱時,錫球將因高溫而表面產生氧化。當由焊膏滲出之助焊劑覆蓋錫球表面且該助焊劑喪失活性力,在冷卻過程中彎曲回復時、即使焊膏與錫球接觸,也無法去除錫球表面之氧化膜,因此會成為未融合。作為該對策,專利文獻5的方法係有效的。 Also, the following may also be the cause of unfusion. When the printed substrate is heated and the bending is severe, the solder balls are separated from the solder paste. When the separation solder ball and the solder paste are maintained for heating, the solder ball will be oxidized due to high temperature. When the flux exuded by the solder paste covers the surface of the solder ball and the flux loses its active force, the oxide film on the surface of the solder ball cannot be removed even when the solder paste is in contact with the solder ball during the cooling process during the cooling process, so Fusion. As this countermeasure, the method of Patent Document 5 is effective.

接下來由實施例來弄清楚未融合係藉由錫球之組成,起因於形成在錫球內部之化合物、Cu6Sn5或(Cu、Ni)6Sn5。將接合有錫球之零件搭載於安裝基板時,對印刷塗佈有焊膏之安裝基板,使接合有錫球之電極側朝下並進行搭載。之後進行加熱,焊膏熔融的同時錫球也熔融,直到融合為止。但是,產生許多形成於錫球內部之化合物Cu6Sn5或(Cu、Ni)6Sn5的情況下,在錫球熔融時化合物沈降球內部,於凸塊最表面附近處發生了析出之現象。藉由該現象,確認了阻礙焊膏之融合、成為引起融合不良之主要原因(圖2、圖3)。 Next, it is clarified from the examples that the unfused system is composed of a composition of a solder ball, resulting from a compound formed inside the solder ball, Cu6Sn5 or (Cu, Ni)6Sn5. When the component to which the solder ball is bonded is mounted on the mounting substrate, the mounting substrate on which the solder paste is applied is printed, and the electrode side to which the solder ball is bonded is placed downward. After that, heating is performed, and the solder ball is melted while the solder ball is melted until it is fused. However, when a large amount of the compound Cu6Sn5 or (Cu, Ni)6Sn5 formed inside the solder ball is generated, the inside of the compound sinks the ball when the solder ball is melted, and precipitation occurs in the vicinity of the outermost surface of the bump. By this phenomenon, it was confirmed that the fusion of the solder paste was hindered and the cause of the fusion failure was caused (Fig. 2, Fig. 3).

對於用於BGA或CSP之錫球,耐落下衝擊是必要 的。對耐落下衝擊之有效手段之一,界面化合物之改質,如專利文獻1~4所揭示,添加Ni成為改善之手段。但,在未融合之觀點中,Ni亦成為產生化合物之元素,因此能夠添加的量是有限的。考慮未融合並抑制Cu或Ni添加時,由於會喪失耐落下衝擊特性,因此不適合大量搭載於BGA或CSP等可携式設備之錫球。 For solder balls for BGA or CSP, drop resistance is necessary of. One of the effective means for resisting the impact of falling, the modification of the interface compound, as disclosed in Patent Documents 1 to 4, the addition of Ni is a means of improvement. However, in the unfused viewpoint, Ni also becomes an element which produces a compound, and thus the amount which can be added is limited. When it is considered that it is not fused and inhibits the addition of Cu or Ni, it is not suitable for the solder ball which is mounted on a portable device such as a BGA or a CSP because it loses the drop impact resistance.

本發明所欲解決之課題係即使是提高耐落下衝擊性等之銲錫強度之Sn-Ag-Cu-Ni組成的錫球,仍開發未發生未融合之錫球用的銲錫合金,抑制錫球之接合界面中的界面剝離,且藉由抑制在錫球與焊膏之間產生之未融合,電子零件落下時之故障模式為低,所接合之印刷基板即使在Cu電極、對於Ni底層即使在施行Au鍍敷或Au/Pd鍍敷表面處理之電解Ni/Au及無電解Ni/Pd/Au電解上,亦能夠得到具有其效果之BGA或CSP用之錫球。 The problem to be solved by the present invention is to develop a solder ball of a Sn-Ag-Cu-Ni composition which is improved in solder strength such as drop impact resistance, and to develop a solder alloy for solder balls which does not undergo unfusion, and to suppress the solder ball. The interface in the bonding interface is peeled off, and by suppressing the unfusion caused between the solder ball and the solder paste, the failure mode when the electronic component is dropped is low, and the bonded printed substrate is even in the implementation of the Cu electrode and the Ni underlayer. On the Au plating or Au/Pd plating surface treatment of electrolytic Ni/Au and electroless Ni/Pd/Au electrolysis, it is also possible to obtain a solder ball for BGA or CSP having an effect.

本發明者們發現耐落下衝擊性與未融合發生率皆為低錫球用銲錫合金由可攜式電子設備之落下所引起之故障較少、在落下衝擊性銲錫合金含有Ni等之鐵系金屬於錫球表面析出時,未融合發生率將變高且由可攜式電子設備之落下所引起之故障會經常發生、以規定添加於銲錫合金中之Ni的量,使未融合、由可攜式電子設備之落下所引起之故障變少,進而完成本發明。 The present inventors have found that the drop impact resistance and the unintegrated incidence rate are low iron ball solder alloys caused by the fall of the portable electronic device, and the iron alloy gold containing the Ni in the impact solder alloy is dropped. When the surface of the solder ball is deposited, the incidence of unfusion will become high and the failure caused by the falling of the portable electronic device will often occur, so as to specify the amount of Ni added to the solder alloy, so that the unfused, portable The problem caused by the fall of the electronic device is reduced, and the present invention is completed.

在本發明中,將Ag設為0.5~1.1質量%、Cu設為 0.7~0.8質量%、剩餘部份為Sn作為Sn-Ag-Cu基底之銲錫。作為該理由,本發明之錫球係藉由使Sn-Ag-Cu3元組成之銲錫合金中的Cu含有量減少,與抑制形成於Cu電極界面之Cu6Sn5的金屬間化合物之專利文獻1~4中的技術不同,Sn-Ag-Cu3元組成之銲錫合金中的Cu含有量係在共晶點為0.75質量%附近,即使藉由添加Ni而不減少銲錫中的Cu含有量,亦可抑制形成於Cu電極界面之Cu6Sn5的金屬間化合物。 In the present invention, Ag is set to 0.5 to 1.1% by mass, and Cu is set to 0.7 to 0.8% by mass, and the remainder is Sn as a Sn-Ag-Cu base solder. For this reason, the tin ball of the present invention is reduced in the amount of Cu in the solder alloy composed of the Sn-Ag-Cu3 element, and in the patent documents 1 to 4 in which the intermetallic compound of Cu6Sn5 formed at the interface of the Cu electrode is suppressed. The difference in the technique is that the Cu content in the Sn-Ag-Cu3 element solder alloy is in the vicinity of the eutectic point of 0.75 mass%, and the addition of Ni does not reduce the Cu content in the solder, thereby inhibiting the formation of Intermetallic compound of Cu6Sn5 at the interface of Cu electrode.

此為藉由將本發明之Sn-Ag-Cu3元組成之銲錫合金中的Cu含有量限制於共晶點為0.75質量%附近,Cu在飽和狀態之Sn-Ag-Cu3元組成之銲錫合金中,由Cu電極抑制Cu擴散。 This is because the Cu content in the solder alloy composed of the Sn-Ag-Cu3 element of the present invention is limited to the vicinity of the eutectic point of 0.75 mass%, and the Cu is in the solder alloy of the Sn-Ag-Cu3 element in a saturated state. Cu diffusion is suppressed by the Cu electrode.

本發明之錫球之另一個特徵係藉由將Sn-Ag-Cu3元組成之銲錫合金中的Cu含有量設成為共晶點為0.75質量%附近,不止是抑制來自Cu電極之Cu擴散,為了對在Cu與完全固溶體關係之Ni也能夠得到相同效果,因此即使在Ni電極亦具有抑制Ni擴散之作用。且,藉由將Ni事先添加於銲錫中,來自零件電極及基板電極之Ni與Cu的擴散抑制效果提高的同時,藉由細微金屬間化合物所引起接合界面之形成,即使係對Ni電極,耐落下衝擊性亦提高。 Another feature of the tin ball of the present invention is that the Cu content in the solder alloy composed of the Sn-Ag-Cu3 element is set to be about 0.75 mass% in the vicinity of the eutectic point, not only suppressing Cu diffusion from the Cu electrode, but also The same effect can be obtained also for Ni in the relationship between Cu and a completely solid solution, and therefore has an effect of suppressing Ni diffusion even at the Ni electrode. Further, by adding Ni in advance to the solder, the effect of suppressing the diffusion of Ni and Cu from the component electrode and the substrate electrode is improved, and the formation of the joint interface by the fine intermetallic compound is resistant to the Ni electrode. The impact of falling is also improved.

本發明之Ag為0.5~1.1質量%、Cu為0.7~0.8質量%、添加於剩餘部份為Sn之錫球用銲錫組成之Ni的量為0.05~0.08質量%。在本發明中,以將添加於Sn-Ag-Cu 之銲錫合金中的Ni量設為0.05~0.08質量%,Ni亦沒有在Sn-Ag-Cu錫球表面集中析出,能夠得到較佳溫度循環特性與耐落下衝擊性之BGA用電極用之錫球。 The Ag of the present invention is 0.5 to 1.1% by mass, Cu is 0.7 to 0.8% by mass, and the amount of Ni added to the tin solder for the remaining portion of Sn is 0.05 to 0.08% by mass. In the present invention, it will be added to Sn-Ag-Cu The amount of Ni in the solder alloy is 0.05 to 0.08 mass%, and Ni is not concentrated on the surface of the Sn-Ag-Cu solder ball, and the solder ball for the BGA electrode having better temperature cycle characteristics and drop impact resistance can be obtained. .

在本發明中,Sn-Ag-Cu3元組成之銲錫合金中的Cu含有量係在共晶點為0.75質量%附近,即使藉由添加Ni而不減少銲錫中的Cu含有量亦抑制形成於Cu電極界面之Cu6Sn5的金屬間化合物。且,藉由將本發明之少量Ni量添加於Sn-Ag-Cu3元組成之銲錫合金中,銲錫中的SnCu化合物:Cu6Sn5細微化,形成於零件及基板電極界面之金屬間化合物的粒子也變小,且形成不易引起破壞之接合界面。 In the present invention, the Cu content in the Sn-Ag-Cu3 element solder alloy is in the vicinity of the eutectic point of 0.75 mass%, and the formation of Cu is suppressed even if the Cu content in the solder is not reduced by adding Ni. Intermetallic compound of Cu6Sn5 at the electrode interface. Further, by adding a small amount of Ni of the present invention to the Sn-Ag-Cu3 element solder alloy, the SnCu compound: Cu6Sn5 in the solder is fine, and the particles of the intermetallic compound formed at the interface between the part and the substrate electrode are also changed. It is small and forms a joint interface that is not easily damaged.

Ni添加量變成為小於0.05質量%且過少時,不易得到前述之效果,且無法實現提高耐落下衝擊性。又,當添加量超過0.08質量%且過多時,接合界面化合物中的Ni濃度上昇,形成脆弱且易壞之接合界面,因此耐落下衝擊性減小。又,過多的Ni添加係無法避免銲錫硬度之上昇,不適合於耐落下衝擊。如此,Ni添加量不足夠時,耐落下衝擊性有下降的趨勢。 When the amount of Ni added is less than 0.05% by mass and is too small, the above-described effects are not easily obtained, and the drop impact resistance cannot be improved. In addition, when the amount of addition exceeds 0.08 mass% and is excessive, the concentration of Ni in the joint interface compound increases, and a weak and fragile joint interface is formed, so that the drop impact resistance is reduced. Moreover, excessive addition of Ni cannot avoid an increase in solder hardness and is not suitable for impact resistance. Thus, when the amount of Ni added is insufficient, the drop impact resistance tends to decrease.

藉由使用本發明之錫球,在Cu電極與Ni電極雙方,具有耐落下衝擊性,且,藉由未融合抑制之效果,可使用搭載有電極之電子零件落下時之故障模式變低之錫球係具有能夠靈活對應頻繁進行設計變更電極之優點。 By using the tin ball of the present invention, the Cu electrode and the Ni electrode have the drop impact resistance, and the effect of the non-fusion suppression can be used to reduce the failure mode when the electronic component on which the electrode is mounted is lowered. The ball system has the advantage of being able to flexibly respond to frequently changing electrodes.

藉由本發明之錫球,即使在將水溶性預助熔劑(亦稱做OSP、Organic Solderbility Preservatives)塗佈於Cu銲墊之Cu電極亦包含將Au鍍敷或Pd/Au鍍敷等Ni使用於基底之電極的Ni電極中,亦能夠得到電子零件落下時之低故障模式的BGA或CSP之電極與印刷基板之接合。 According to the solder ball of the present invention, even if a water-soluble preflux (also referred to as OSP or Organic Solderbility Preservatives) is applied to the Cu electrode of the Cu pad, Ni plating such as Au plating or Pd/Au plating is used. In the Ni electrode of the electrode of the substrate, it is also possible to obtain the bonding of the electrode of the BGA or CSP in the low failure mode when the electronic component is dropped to the printed substrate.

1‧‧‧BGA零件 1‧‧‧BGA parts

2‧‧‧安裝基板 2‧‧‧Installation substrate

3‧‧‧焊錫凸塊融合 3‧‧‧ solder bump fusion

4‧‧‧焊錫凸塊未融合 4‧‧‧ solder bumps are not fused

5‧‧‧安裝加熱後之錫球 5‧‧‧Installing heated solder balls

6‧‧‧安裝加熱後之焊膏 6‧‧‧Installing heated solder paste

7‧‧‧未融合處 7‧‧‧Unfused

8‧‧‧融合阻礙之化合物 8‧‧‧ Compounds that are hindered by fusion

9‧‧‧BGA側電極 9‧‧‧BGA side electrode

10‧‧‧具有耐落下特性之接合界面化合物 10‧‧‧ joint interface compound with drop resistance

11‧‧‧焊錫凸塊 11‧‧‧ solder bumps

12‧‧‧不具有因Cu含量不足所引起耐落下特性之接合界面化合物 12‧‧‧ Joint interface compounds that do not have drop-resistant properties due to insufficient Cu content

13‧‧‧不具有因Ni含量不足而所引起耐落下特性之接 合界面化合物 13‧‧‧ Does not have the resistance to falling due to insufficient Ni content Interface compound

14‧‧‧銲墊 14‧‧‧ solder pads

〔圖1〕未融合現象之一例 [Fig. 1] An example of unfused phenomenon

〔圖2〕因錫球內部之化合物所引起之焊膏的融合阻礙例 [Fig. 2] Example of fusion of solder paste caused by compounds inside the solder ball

〔圖3〕因錫球內部之化合物所引起之焊膏的融合阻礙例擴大圖 [Fig. 3] An enlarged view of the fusion of the solder paste caused by the compound inside the solder ball

〔圖4〕實施例2中的接合界面化合物層 [Fig. 4] The joint interface compound layer in Example 2

〔圖5〕比較例9中的接合界面化合物層 [Fig. 5] The bonding interface compound layer in Comparative Example 9

〔圖6〕比較例10中的接合界面化合物層 [Fig. 6] The bonding interface compound layer in Comparative Example 10

〔圖7〕界面剝離之模式圖 [Fig. 7] Mode diagram of interface peeling

〔圖8〕未融合之模式圖 [Fig. 8] Unfused mode diagram

〔實施形態〕 [Embodiment]

本發明之Cu層電極與Ni電極同樣具有耐落下衝擊性之錫球係用於對具有下面電極之BGA或CSP等PKG零件之凸塊形成為較佳。 The Cu layer electrode of the present invention has a drop ball impact resistance similar to that of the Ni electrode, and is preferably used for forming a bump of a PKG member such as a BGA or a CSP having a lower electrode.

以本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金,在Ag 的含有量小於0.5質量%銲錫強度會下降,使承擔因落下等所引起之衝擊應力時,會變得有容易引起銲錫破壞之問題。Ag之含有量超過1.1質量%時,銲錫之硬度會變高,衝擊吸收將下降,因此會引起界面之脫落。因此,本發明之錫球用合金,其Ag之含有量必須為0.5~1.1質量%,而0.9~1.1質量%為較佳。 The Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention, in Ag When the content is less than 0.5% by mass, the solder strength is lowered, and when the impact stress due to dropping or the like is taken, there is a problem that the solder is easily broken. When the content of Ag exceeds 1.1% by mass, the hardness of the solder becomes high, and the impact absorption is lowered, so that the interface is peeled off. Therefore, in the alloy for a solder ball of the present invention, the content of Ag must be 0.5 to 1.1% by mass, and 0.9 to 1.1% by mass is preferable.

又,本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金,在Cu含有量小於0.7質量%,會由Sn-Ag-Cu之共晶點分離,因此用於Cu電極時,藉由從Cu電極Cu擴散至銲錫中,在Cu電極界面之Cu6Sn5的金屬間化合物將變厚,耐落下衝擊性會變差。Sn-Ag-Cu-Ni系銲錫合金的Cu之含有量超過0.8質量%時,由於從Sn-Ag-Cu之共晶點進行分離,因此在銲錫合金與Cu電極的反應層中,會變得容易產生Cu6Sn5之金屬間化合物,作為結果,於Cu電極與銲錫接合界面部界面所形成之Cu6Sn5的金屬間化合物將變厚。因此,於本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金所含有之Cu之含有量必須係0.7~0.8質量%。 Further, the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention has a Cu content of less than 0.7% by mass and is separated by a eutectic point of Sn-Ag-Cu, so that it is used for a Cu electrode. When the Cu electrode Cu is diffused into the solder, the intermetallic compound of Cu6Sn5 at the interface of the Cu electrode becomes thick, and the drop impact resistance is deteriorated. When the content of Cu in the Sn-Ag-Cu-Ni solder alloy exceeds 0.8% by mass, since it is separated from the eutectic point of Sn-Ag-Cu, it becomes in the reaction layer between the solder alloy and the Cu electrode. As a result, the intermetallic compound of Cu6Sn5 is likely to be generated, and as a result, the intermetallic compound of Cu6Sn5 formed at the interface between the Cu electrode and the solder joint interface portion becomes thick. Therefore, the content of Cu contained in the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention must be 0.7 to 0.8% by mass.

此外,本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金係,Ni之含有量小於0.05質量%,不會出現添加Ni後之效果,由Ni電極Ni會變得容易擴散,在界面容易形成有金屬間化合物,因此Sn-Ag-Cu-Ni系銲錫合金中的Ni含有量必須為0.05質量%以上。相同的,Ni之含有量超過0.08質量%時,除了形成於接合界面之金屬間化合物中的Ni濃度上昇且接合強度下降之外,隨著銲錫硬度的上升 而承擔衝擊之情況下,界面剝離將變得容易發生。又,Ni之含有量超過0.08質量%時,未融合發生率會變高。因此,本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金之Ni含有量必須為0.05~0.08質量%。 Further, in the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention, the content of Ni is less than 0.05% by mass, and the effect of adding Ni does not occur, and the Ni electrode Ni is easily diffused at the interface. Since the intermetallic compound is easily formed, the Ni content in the Sn-Ag-Cu-Ni solder alloy must be 0.05% by mass or more. In the same manner, when the content of Ni exceeds 0.08 mass%, the hardness of the solder increases as the concentration of Ni in the intermetallic compound formed at the joint interface increases and the joint strength decreases. In the case of an impact, the interface peeling will become easy to occur. Further, when the content of Ni exceeds 0.08% by mass, the rate of non-fusion is increased. Therefore, the Ni content of the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention must be 0.05 to 0.08% by mass.

於本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金,亦可再添加由Fe、Co、Pt中選擇的一種以上元素,合計0.003~0.1質量%。對Fe、Co、Pt元素之錫球用合金之添加係由於將形成於接合界面之金屬間化合物進行細微化且抑制厚度,因此有改善落下之效果。由Fe、Co、Pt所選擇之元素係小於0.003質量%,極難獲得上述效果,超過0.1質量%進行添加時,焊錫凸塊硬度上升且對於衝擊會發生界面剝離之負面影響。 In the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention, one or more elements selected from the group consisting of Fe, Co, and Pt may be further added in a total amount of 0.003 to 0.1% by mass. The addition of an alloy for solder balls of Fe, Co, and Pt elements has an effect of improving the drop because the intermetallic compound formed at the joint interface is made finer and the thickness is suppressed. The element selected from Fe, Co, and Pt is less than 0.003 mass%, and it is extremely difficult to obtain the above effect. When the addition is more than 0.1 mass%, the solder bump hardness increases and the interface peeling adversely affects the impact.

於本發明之錫球的Sn-Ag-Cu-Ni系銲錫合金,亦可再添加由Bi、In、Sb、P、Ge中選擇的一種以上元素,合計0.003~0.1質量%。 In the Sn-Ag-Cu-Ni solder alloy of the solder ball of the present invention, one or more elements selected from the group consisting of Bi, In, Sb, P, and Ge may be further added in a total amount of 0.003 to 0.1% by mass.

錫球搭載於模組基板後,藉由畫像辨識來進行是否銲接之判定。若在錫球變色為黃色等時,將在畫像辨識中判定為故障。因此,錫球係藉由回流不變色為較佳。 After the solder ball is mounted on the module substrate, the determination of whether or not to solder is performed by image recognition. If the tin ball is discolored to yellow or the like, it is determined to be a malfunction in the image recognition. Therefore, it is preferred that the solder balls are not discolored by reflow.

因添加Bi、In、Sb、P、Ge所引起之效果係藉由防止因熱等所引起之變色,能夠避開凸塊品質檢查中的錯誤。 由Bi、In、Sb、P、Ge所選擇之元素係小於0.003質量%,極難獲得上述效果,超過0.1質量%進行添加時,焊錫凸塊硬度上升且恐怕會損失落下改善之效果。 The effect caused by the addition of Bi, In, Sb, P, and Ge is such that it is possible to avoid errors in the bump quality inspection by preventing discoloration due to heat or the like. The element selected from Bi, In, Sb, P, and Ge is less than 0.003 mass%, and it is extremely difficult to obtain the above effect. When the addition is more than 0.1 mass%, the solder bump hardness increases and the effect of the drop improvement may be lost.

本發明之錫球係作為電極用來使用。錫球的直徑為 0.1mm以上、0.3mm以上為較佳、0.5mm以上為最佳。近年來,電子機器之小型化進展,使得搭載於電子零件之錫球也繼續細微化。對於覆晶之接合,0.1mm以下之錫球被廣泛的使用,將內藏如本發明錫球之覆晶的CSP或BGA作為對象之電極用錫球成為主流0.1mm以上。 The tin ball of the present invention is used as an electrode. The diameter of the solder ball is 0.1 mm or more and 0.3 mm or more are preferable, and 0.5 mm or more is preferable. In recent years, the miniaturization of electronic devices has progressed, and the solder balls mounted on electronic components have continued to be miniaturized. For the bonding of the flip chip, a solder ball of 0.1 mm or less is widely used, and the solder ball for the electrode containing the CSP or the BGA of the solder ball of the present invention is 0.1 mm or more in the mainstream.

〔實施例〕 [Examples]

製作下表格組成之銲錫合金,以氣中造球法(氣相法)製造直徑0.3mm之錫球。使用該錫球,透過以下步驟來製造CSP基板。 A solder alloy composed of the following table was produced, and a solder ball having a diameter of 0.3 mm was produced by a gas ball formation method (gas phase method). Using this solder ball, a CSP substrate was manufactured by the following procedure.

1.於CSP用模組基板,使用千住金屬工業股份有限公司製助焊劑WF-6400進行回流銲接,將各組成之銲錫作為電極用,製造使用之CSP,其中前述CSP用模組基板具有在尺寸12×12mm之電解Ni/Au、電解Ni/Pd/Au、Cu銲墊,以OSP對製造之各組成之錫球進行處理之電極。 1. In the CSP module substrate, reflow soldering is performed using flux WF-6400 manufactured by Senju Metal Industry Co., Ltd., and each component of the solder is used as an electrode to manufacture a CSP, wherein the CSP module substrate has a size. Electrolytic Ni/Au, electrolyzed Ni/Pd/Au, Cu pads of 12×12 mm, electrodes treated with OSP for solder balls of various compositions.

2.於尺寸30×120mm、厚度0.8mm玻璃環氧基板(FR-4),按照電極圖案並以焊膏來進行印刷,搭載以1製造之CSP,以220℃以上40秒、尖峰溫度245℃之條件來進行回流。 2. A glass epoxy substrate (FR-4) having a size of 30 × 120 mm and a thickness of 0.8 mm was printed in accordance with an electrode pattern and solder paste. The CSP manufactured in 1 was mounted at 220 ° C for 40 seconds and the peak temperature was 245 ° C. The conditions are to be refluxed.

3.藉由以下條件,實施落下衝擊試驗。試驗方法係使用以2製造之CSP搭載玻璃環氧基板,使用專用治具使基板兩端固定於離開台座10mm的位置。根據JEDEC規格,反覆施加加速度1500G之衝擊,將由初期電阻值上升1.5倍後之期間看作為斷裂,記錄落下次數。 3. The drop impact test was carried out by the following conditions. In the test method, a glass epoxy substrate was mounted on a CSP manufactured in 2, and the both ends of the substrate were fixed at a position of 10 mm from the pedestal using a special jig. According to the JEDEC standard, an impact of an acceleration of 1500 G was repeatedly applied, and a period in which the initial resistance value was increased by 1.5 times was regarded as a fracture, and the number of drops was recorded.

在使用許多含有如專利文獻2之Ni之Sn-Ag-Cu-Ni系銲錫合金的錫球中,可了解即使在Ni電極與銲接時亦無法得到耐落下衝擊性。 In many solder balls using a Sn-Ag-Cu-Ni-based solder alloy containing Ni as in Patent Document 2, it is understood that the drop impact resistance cannot be obtained even when the Ni electrode is welded.

即使未融合發生率亦使用相同的錫球,藉由以下步驟來製造CSP基板。 The same solder balls were used even if the fusion rate was not used, and the CSP substrate was fabricated by the following procedure.

1.對製造之各組成的錫球施行溫度110℃、濕度85%,時間24小時之處理。 1. The solder balls of each composition were subjected to a treatment at a temperature of 110 ° C and a humidity of 85% for 24 hours.

2.於尺寸36×50mm、厚度1.2mm玻璃環氧基板(FR-4),按照電極圖案並以焊膏來進行印刷,搭載以1製造之錫球,以220℃以上40秒、尖峰溫度245℃之條件來進 行回流。 2. A glass epoxy substrate (FR-4) having a size of 36 × 50 mm and a thickness of 1.2 mm was printed with a solder paste according to an electrode pattern, and a solder ball manufactured by 1 was mounted, and the solder ball was made at a temperature of 220 ° C or more and 40 seconds. °C conditions to enter Line backflow.

3.使用立體顯微鏡,記錄錫球與焊膏之未融合數,計算未融合發生率。 3. Using a stereomicroscope, record the unfused number of solder balls and solder paste, and calculate the incidence of unfusion.

接下來,使用製造之錫球,以下述步驟實施濕潤擴大之試驗。使用之基板材質係使用與調查未融合發生率之基板相同者。 Next, using the manufactured solder balls, the wet expansion test was carried out in the following procedure. The substrate material used was the same as the substrate on which the incidence of fusion was investigated.

1.使用形成0.24mm×16mm狹縫狀電極之厚度1.2mm玻璃環氧基板(FR-4),印刷0.24mm ×厚度0.1mm之千住金屬工業股份有限公司製助焊劑WF-6400,搭載錫球並以220℃以上40秒、尖峰溫度245℃之條件,進行回流。 1. Using a 1.2 mm thick glass epoxy substrate (FR-4) forming a 0.24 mm × 16 mm slit electrode, printing 0.24 mm The flux WF-6400 manufactured by Senju Metal Industry Co., Ltd. with a thickness of 0.1 mm was placed on a solder ball and refluxed at 220 ° C for 40 seconds and a peak temperature of 245 ° C.

2.使用立體顯微鏡,測定濕潤擴大之面積。 2. Using a stereomicroscope, measure the area of the wet enlargement.

比較例7、9、10、11、13,Cu層含有量大於0.8質量%或Ni層含有量大於0.07質量%,為含有之錫球合金組成,因此未融合發生率超過8%,無法得到抑制效果。 In Comparative Examples 7, 9, 10, 11, and 13, the content of the Cu layer is more than 0.8% by mass or the content of the Ni layer is more than 0.07% by mass, which is a composition of the tin-ball alloy contained therein. Therefore, the rate of non-fusion is more than 8%, and the suppression cannot be suppressed. effect.

特別是,比較例13中的專利文獻2記載之銲錫組成Sn-1.5Ag0.5Cu-0.5Ni之未融合發生率顯著增加。這是因為銲錫中的Ni含有量過多,當生成化合物變得過多,會阻礙了焊膏之融合性,其結果將使得未融合發生率增加。 In particular, the incidence of unfusion of the solder composition Sn-1.5Ag0.5Cu-0.5Ni described in Patent Document 2 of Comparative Example 13 was remarkably increased. This is because the amount of Ni contained in the solder is excessive, and when the generated compound becomes excessive, the fusion property of the solder paste is hindered, and as a result, the rate of unfusion is increased.

同樣的比較例10、11,Cu含有量過多,因此生成化合物變的過多,而引誘未融合發生。 In the same Comparative Examples 10 and 11, the Cu content was too large, so that the generated compound became excessively large, and the induced fusion did not occur.

此外,在比較例1~2中,由於Ag量較少,因此能夠看出濕潤擴大顯著下降。當實際與實施例1比較時,濕潤擴大之面積下降了約20%以上。濕潤擴大不充份時,有無 法得到良好接合且無法充份保持接合強度之可能性。 Further, in Comparative Examples 1 and 2, since the amount of Ag was small, it was found that the wet expansion was remarkably lowered. When actually compared with Example 1, the area of wet expansion decreased by about 20% or more. When there is insufficient expansion of moisture, is there any The method is well joined and does not fully maintain the strength of the joint.

在比較例3~6、8、12、14、15中,未融合發生率雖然小於5%且確保充份之濕潤擴大,但Ag、Cu、Ni含有量並未最佳化,因此將變得無法得到落下改善效果。 In Comparative Examples 3 to 6, 8, 12, 14, and 15, the non-fusion occurrence rate was less than 5%, and the moisture content of the sufficient portion was ensured to be enlarged, but the contents of Ag, Cu, and Ni were not optimized, and thus the ratio was changed. Can't get the drop improvement effect.

在此,使Sn1Ag中的Cu含有量固定於0.7質量%,著眼於Ni含有量。Ni含有量超過0.08質量%且選擇0.1質量%時,未融合發生率會顯著增加。相反的,小於0.05質量%且選擇0.02質量%時,雖具有對未融合之抑制效果,但無法得到落下特性之耐性。綜合上述,藉由以0.05~0.08質量%選擇Ni含有量,能夠得到兼具未融合抑制與耐落下改善之銲錫合金。 Here, the Cu content in the Sn1Ag is fixed to 0.7% by mass, and the Ni content is focused on. When the Ni content is more than 0.08% by mass and 0.1% by mass is selected, the rate of non-fusion is remarkably increased. On the other hand, when it is less than 0.05% by mass and 0.02% by mass is selected, the effect of suppressing unfusion is obtained, but the resistance to fall characteristics cannot be obtained. In general, by selecting the Ni content in an amount of 0.05 to 0.08% by mass, it is possible to obtain a solder alloy having both unmated suppression and drop resistance.

接下來,關於將Sn1Ag中的Ni含有量固定於0.05質量%下的Cu層含有量,確認隨著未融合抑制及耐落下改善之範圍。Cu含有量超過0.8質量%且選擇1質量%時,未融合發生率會顯著增加。此外,小於0.7質量%且選擇0.5質量%時,不會伴隨落下改善效果,作為兼具兩者之銲錫合金,判定Cu含有量0.7~0.8質量%為最佳。 Next, the content of the Cu layer in which the Ni content in Sn1Ag was fixed to 0.05% by mass was confirmed, and the range of improvement with no fusion inhibition and drop resistance was confirmed. When the Cu content exceeds 0.8% by mass and 1% by mass is selected, the rate of unfusion is remarkably increased. In addition, when it is less than 0.7% by mass and 0.5% by mass is selected, the effect of improving the drop is not accompanied, and it is preferable to determine the Cu content of 0.7 to 0.8% by mass as the solder alloy having both of them.

其結論,在由Ag0.5~1.1質量%、Cu0.7~0.8質量%、Ni0.05~0.08質量%、剩餘部份Sn構成之組成中,於Au鍍敷等之Ni電極部與Cu,可共同使用塗佈有水溶性預助熔劑之Cu電極部,由於兼具界面剝離抑制效果與未融合抑制效果兩者,因此可得到搭載有電極之電子零件落下時之低故障模式之銲錫合金。 It is concluded that in the composition consisting of Ag 0.5 to 1.1% by mass, Cu 0.7 to 0.8% by mass, Ni 0.05 to 0.08% by mass, and the remaining portion of Sn, the Ni electrode portion such as Au plating and Cu, The Cu electrode portion coated with the water-soluble preflux can be used in combination, and both the interface peeling suppressing effect and the non-fusion suppressing effect can be obtained, so that a solder alloy having a low failure mode when the electronic component of the electrode is dropped can be obtained.

〔產業上之可利用性〕 [Industrial Applicability]

藉由本發明,提供有不論在Cu電極還是Ni電極,具有耐落下衝擊性之電極用錫球。當添加於Sn-Ag-Cu之3元組成之銲錫合金的Ni量超過0.1質量%且過多時,在錫球表面含有Ni之化合物會變得容易析出且容易引起安裝焊膏之融合不良。本發明之錫球係將Ni量抑制在0.05~0.08質量%,因此難以出現化合物對錫球表面析出之現象,也具有抑制未融合現象之效果。 According to the present invention, there is provided a solder ball for an electrode which is resistant to drop impact regardless of a Cu electrode or a Ni electrode. When the amount of Ni added to the solder alloy of the ternary composition of the Sn-Ag-Cu is more than 0.1% by mass and is too large, the compound containing Ni on the surface of the solder ball is likely to be precipitated and the fusion of the solder paste is likely to occur. In the tin ball system of the present invention, the amount of Ni is suppressed to 0.05 to 0.08% by mass. Therefore, the phenomenon that the compound precipitates on the surface of the solder ball is less likely to occur, and the effect of suppressing the unfusion phenomenon is also exhibited.

Claims (13)

一種無鉛銲料錫球,其特徵係,被安裝於BGA、CSP用之模組基板,作為電極用使用之錫球,由Ag0.5~1.1質量%、Cu0.7~0.8質量%、Ni0.05~0.08質量%、剩餘部份Sn構成之銲錫組成。 A lead-free solder solder ball characterized in that it is mounted on a module substrate for BGA and CSP, and is used as a solder ball for an electrode, and is composed of Ag 0.5 to 1.1% by mass, Cu 0.7 to 0.8% by mass, and Ni0.05. ~0.08 mass%, and the remaining part of Sn constitutes a solder composition. 如請求項1之無鉛銲料錫球,其中,前述銲錫組成係由Ag0.9~1.1質量%、Cu0.7~0.8質量%、Ni0.05~0.08質量%、剩餘部份Sn構成之銲錫組成。 The lead-free solder ball of claim 1, wherein the solder composition is composed of a solder composed of Ag 0.9 to 1.1% by mass, Cu 0.7 to 0.8% by mass, Ni 0.05 to 0.08% by mass, and a remaining portion of Sn. 如請求項1之無鉛銲料錫球,其中,前述銲錫組成係由Ag1.0質量%、Cu0.75質量%、Ni0.07質量%、剩餘部份Sn構成之銲錫組成。 The lead-free solder solder ball of claim 1, wherein the solder composition is composed of a solder composed of Ag 1.0% by mass, Cu 0.75% by mass, Ni 0.07% by mass, and the remaining portion Sn. 如請求項1之無鉛銲料錫球,其中,在前述銲錫組成添加由Fe、Co、Pt中選擇的一種以上元素,合計0.003~0.1質量%。 The lead-free solder ball of claim 1, wherein one or more elements selected from the group consisting of Fe, Co, and Pt are added to the solder composition in a total amount of 0.003 to 0.1% by mass. 如請求項1之無鉛銲料錫球,其中,在前述銲錫組成添加由Bi、In、Sb、P、Ge中選擇的一種以上元素,合計0.003~0.1質量%。 The lead-free solder ball of claim 1, wherein one or more elements selected from the group consisting of Bi, In, Sb, P, and Ge are added to the solder composition in a total amount of 0.003 to 0.1% by mass. 如請求項1之無鉛銲料錫球,其中,前述銲錫組成係由Ag0.9~1.1質量%、Cu0.7~0.8質量%、Ni0.05~0.08質量%、剩餘部份Sn構成,進一步在前述銲錫組成添加由Fe、Co、Pt中選擇的一種以上元素,合計0.003~0.1質量%。 The lead-free solder solder ball of claim 1, wherein the solder composition is composed of Ag 0.9 to 1.1% by mass, Cu 0.7 to 0.8% by mass, Ni 0.05 to 0.08% by mass, and remaining portion Sn, further in the foregoing One or more elements selected from Fe, Co, and Pt are added to the solder composition, and the total amount is 0.003 to 0.1% by mass. 如請求項1之無鉛銲料錫球,其中, 前述銲錫組成係由Ag1.0質量%、Cu0.75質量%、Ni0.07質量%、剩餘部份Sn構成,進一步在前述銲錫組成添加由Fe、Co、Pt中選擇的一種以上元素,合計0.003~0.1質量%。 A lead-free solder solder ball of claim 1, wherein The solder composition is composed of Ag 1.0% by mass, Cu 0.75% by mass, Ni 0.07% by mass, and remaining portion Sn, and further adds one or more elements selected from Fe, Co, and Pt to the solder composition, for a total of 0.003. ~0.1% by mass. 如請求項1之無鉛銲料錫球,其中,前述銲錫組成係由Ag0.9~1.1質量%、Cu0.7~0.8質量%、Ni0.05~0.08質量%、剩餘部份Sn構成,進一步在前述銲錫組成添加由Bi、In、Sb、P、Ge中選擇的一種以上元素,合計0.003~0.1質量%。 The lead-free solder solder ball of claim 1, wherein the solder composition is composed of Ag 0.9 to 1.1% by mass, Cu 0.7 to 0.8% by mass, Ni 0.05 to 0.08% by mass, and remaining portion Sn, further in the foregoing One or more elements selected from Bi, In, Sb, P, and Ge are added to the solder composition, and the total amount is 0.003 to 0.1% by mass. 如請求項1之無鉛銲料錫球,其中,前述銲錫組成係由Ag1.0質量%、Cu0.75質量%、Ni0.07質量%、剩餘部份Sn構成,進一步在前述銲錫組成添加由Bi、In、Sb、P、Ge中選擇的一種以上元素,合計0.003~0.1質量%。 The lead-free solder solder ball of claim 1, wherein the solder composition is composed of Ag 1.0% by mass, Cu 0.75% by mass, Ni 0.07% by mass, and a remaining portion of Sn, and further added to the solder composition by Bi, One or more elements selected from In, Sb, P, and Ge are 0.003 to 0.1% by mass in total. 如請求項1~9任一項之無鉛銲料錫球,其中,前述錫球係具有直徑為0.1mm以上之徑。 The lead-free solder ball of any one of claims 1 to 9, wherein the solder ball has a diameter of 0.1 mm or more. 如請求項1~9任一項之無鉛銲料錫球,其中,前述錫球係具有直徑為0.3mm以上之徑。 The lead-free solder ball of any one of claims 1 to 9, wherein the solder ball has a diameter of 0.3 mm or more. 如請求項1~9任一項之無鉛銲料錫球,其中,前述錫球係具有直徑為0.5以上之徑。 The lead-free solder ball of any one of claims 1 to 9, wherein the solder ball has a diameter of 0.5 or more. 一種模組基板的焊錫凸塊形成方法,其係對具有由電解Ni/Au電極、無電解Ni/Pd/Au電極、Cu-OSP電極所選擇之電極之模組基板,形成焊錫凸塊之方法,使用請求項1~9任一項之錫球進行銲接。 Method for forming solder bumps of module substrate, which is a method for forming solder bumps on a module substrate having electrodes selected by electrolyzing Ni/Au electrodes, electroless Ni/Pd/Au electrodes, and Cu-OSP electrodes Use solder balls of any of claims 1 to 9 for soldering.
TW102109029A 2012-03-28 2013-03-14 Lead free solder ball TWI540015B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/058271 WO2012133598A1 (en) 2011-03-28 2012-03-28 Lead-free solder ball

Publications (2)

Publication Number Publication Date
TW201343311A TW201343311A (en) 2013-11-01
TWI540015B true TWI540015B (en) 2016-07-01

Family

ID=49993387

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102109029A TWI540015B (en) 2012-03-28 2013-03-14 Lead free solder ball

Country Status (1)

Country Link
TW (1) TWI540015B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI778965B (en) * 2016-07-04 2022-10-01 日商弘輝股份有限公司 Solder alloy and resin flux cored solder

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11251145B2 (en) 2017-11-16 2022-02-15 Jx Nippon Mining & Metals Corporation Semiconductor substrate and manufacturing method therefor
CN111315918B (en) * 2017-11-16 2022-07-08 Jx金属株式会社 Semiconductor substrate and method for manufacturing the same
JP6680992B1 (en) * 2019-05-27 2020-04-15 千住金属工業株式会社 Solder alloys, solder powders, solder pastes, solder balls, solder preforms, and solder joints

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI778965B (en) * 2016-07-04 2022-10-01 日商弘輝股份有限公司 Solder alloy and resin flux cored solder

Also Published As

Publication number Publication date
TW201343311A (en) 2013-11-01

Similar Documents

Publication Publication Date Title
CN103547408B (en) Lead-free solder ball
US20240363571A1 (en) Lead-Free Solder Ball
CN101208174B (en) Lead-free solder alloy
JP5724411B2 (en) Solder, soldering method and semiconductor device
TWI540015B (en) Lead free solder ball
HK1204779B (en) Lead-free solder ball