TWI431714B - The Center Structure and Method of Solar Silicon Chip Processing - Google Patents

Description

Central positioning structure of solar raft wafer processing and method thereof

The invention relates to a solar tantalum wafer processing technology; in particular to an innovative designer of a central positioning structure and method for solar tantalum wafer processing.

According to the SOLAR CELL itself, it is a material that is easily broken. In addition to its own fragile problem, the dimensional tolerance of the product is also relatively large. For example, the size of 6吋 is 1 mm (156±0.5). Mm); Due to the different size of the solar raft wafer, and the fact that the material itself is also broken, the center positioning processing work of the material, as shown in Fig. 1, usually depends on the charge coupled device (Charge Coupled Device) (referred to as CCD) for positioning and grabbing, and through the edge value of the grab to do the center calculation, as shown in Figure 1; the fixed clamping force can not be too strong, otherwise there will be cracks or sheet warping The situation arises.

In general, the processing time of laser processing is fixed, and the method of reducing the working time (TACT TIME) by various equipment manufacturers is mostly spent on the processing procedure of "CCD edge finding". If the accuracy is high, some domestic and foreign related industries use multiple sets of high-resolution CCDs to distribute the edges of the solar raft wafers on each side edge to simultaneously capture the image of each side of the solar 矽 wafer; The single-group CCD is used to capture the image through the displacement of the XY-axis table to each position. However, in terms of advantages and disadvantages, the cost of the former is high and the complexity of the related components is high, and the latter takes a lot of time. The image is captured.

Therefore, in view of the problems existing in the central positioning structure and method of the above-mentioned conventional solar silicon wafer processing, how to develop an innovative design that can achieve high operating efficiency and has low cost and more ideal practicability needs to be related. The industry is thinking about breakthroughs.

In view of this, the inventor has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation, the inventor has finally obtained the practical invention.

The main object of the present invention is to provide a central positioning structure for solar wafer processing and a method thereof, and the problem to be solved is to develop a solar germanium wafer capable of achieving high operational efficiency and low cost. The central positioning structure and method of processing are considered as a breakthrough for the object; the technical feature of the problem solving of the present invention is mainly that the central positioning structure of the solar raft wafer processing system comprises: a first bearing limiting member and a second bearing limit The positional component is disposed on the workbench to be disposed at two laterally fixed positions of the X and Y axes of the solar raft wafer placement position, so that when the solar raft wafer is placed, the solar raft wafer is adjacent to the second The side edge can be abutted against the first and second bearing limiting members; the first clamping mechanism and the second clamping mechanism are respectively disposed on the working table relative to the first and second bearing limiting members The other side X and Y axes are adjacent to the two lateral positions, and the displacement is actuated against the two sides of the solar raft wafer; the distance measuring device is attached to the first and second clamping mechanisms and works. station In one of the above positions, the distance measuring device detects the displacement distance of the clamping action of the first and second clamping mechanisms or the clamping end of the first and second clamping mechanisms and the side of the solar wafer. The relative distance, or the relative distance between the distance measuring device and the side of the solar raft wafer, is one of the ranging types; a logic operation unit is electrically connected to the distance measuring device, thereby relieving the first and second clamping The mechanism is calculated by the preset known relative distance value of the first and second bearing limit members and the distance value measured by the distance measuring device, to obtain the precise position of the center point of the positioning state of the solar raft wafer; Another main purpose is to provide a central positioning method for solar raft wafer processing, the central positioning method mainly comprising: placing a solar raft wafer on the worktable, using the first and second clamping The displacement of the mechanism acts to push the adjacent sides of the solar raft wafer, so that the other two sides of the solar raft wafer abut against the first and second bearing limit members, thereby The positive energy 矽 wafer is stably fixed; during the displacement operation of the first and second clamping mechanisms, the distance measuring device detects the displacement distance of the first and second clamping mechanisms or the first and the The distance between the clamping end of the two clamping mechanism and the solar raft wafer is any one of the ranging types; the operation of the logic operation unit is used to control the first and second clamping mechanisms according to the first and second bearing Calculating the preset relative distance value of the limiting member and the distance value measured by the distance measuring device to obtain the precise position of the center point of the positioning state of the solar raft wafer; thereby, the innovative unique design makes the present invention In the prior art, the innovative structure design of attaching the distance measuring device to the first and second clamping mechanisms is adopted, so that the first and second clamping mechanisms are in the process of clamping displacement and simultaneously pass the distance measurement. The device detects the displacement distance of the clamping action of the first and second clamping mechanisms or the relative distance between the clamping end of the first and second clamping mechanisms and the solar raft wafer, and thus, First and second gripping mechanism holding the solar silicon chip against the other of the two adjacent sides At the same time, the 中心 can obtain the precise position of the center point of the solar 矽 wafer positioning state, thereby achieving the advantages of high operating efficiency and low cost and practical progress.

Please refer to Figures 1, 2 and 3, which are preferred embodiments of the central positioning structure and method of the solar tantalum wafer processing of the present invention, but the embodiments are for illustrative purposes only and are not applicable to patent applications. The limitation of the structure; the central positioning structure of the solar raft wafer processing is to obtain a precise position of the center point of the positioning state of the solar raft wafer 06 placed on a worktable 05, including: the first bearing The limiting member 11 and the second bearing limiting member 12 are respectively disposed on the table 05 for the X and Y axes of the position where the solar raft wafer 06 is placed, adjacent to the two lateral fixed positions, thereby When the wafer 06 is placed, the adjacent sides of the solar raft wafer 06 can be abutted against the first and second bearing limiting members 11 and 12; the first clamping mechanism 21 and the second clamping mechanism 22, Disposed on the table 05 at two lateral positions opposite to the other side X and Y axes of the first and second bearing limiting members 11 and 12, thereby displacing against the solar raft wafer 06 by displacement actuation Two adjacent sides; a distance measuring device 30 attached to the first and second clamping machines 21, 22, one of the work stations 05, the distance measuring device 30 is used to detect the clamping action displacement distance of the first and second clamping mechanisms 21, 22 or the first and second clamping mechanisms 21, One of the ranging types of the relative distance between the clamping end of the 22 and the side of the solar raft wafer 06, or the relative distance between the distance measuring device 30 and the side of the solar raft wafer 06; a logic operation unit 40, Electrically coupled with the distance measuring device 30, according to the preset known relative distance values of the first and second clamping mechanisms 21, 22 and the first and second bearing limiting members 11, 12 and the distance measuring device The measured distance values are calculated to obtain the precise position of the center point of the positioning state of the solar raft wafer 06.

The first and second bearing limiting members 11 and 12 are formed by bearings that can be rotated at a fixed point.

The specific types of the ranging device 30 can be represented by a plurality of types, which are disclosed in the following examples; the following distance measuring devices 30 are attached to the first and second clamping mechanisms 21 and 22; As shown in FIGS. 3 and 4, the distance measuring device 30 is composed of a thrust meter and a contact type measuring device, respectively, for detecting the displacement distance of the clamping action of the first and second clamping mechanisms 21 and 22, The distance between the first and second clamping mechanisms 21, 22 and the side of the first and second bearing limiting members 11 and 12 before the first and second clamping mechanisms 21 and 22 are not actuated is known (eg, the third, 4), when the first clamping mechanism 21 and the second clamping mechanism 22 are displaced toward the side of the solar raft wafer 06 and are in a nip state, the illuminating device can be transmitted as a thrust meter or a contact type measuring device. The device 30 knows the displacement distance (as indicated by X1 in FIGS. 3 and 4), and then calculates the outer dimension of the solar cell wafer 06 by the logic operation unit 40 electrically connected to the distance measuring device 30, thereby enabling calculation. The distance from the side of the solar cell wafer 06 to the center (as indicated by X2 in Figures 3 and 4), so that solar energy can be obtained. Locating a center point 06 of the sheet positioning accuracy state position.

As shown in FIG. 6, the distance measuring device 30 is a control type photoelectric sensing sensor type, thereby detecting the clamping end of the first and second clamping mechanisms 21, 22 and the side of the solar energy chip 06. When the adjacent sides of the solar raft wafer 06 abut against the first and second bearing limiting members 11 and 12, the contrast photoelectric sensing sensor is in a moving state, and constitutes a contrast photoelectric sensor. The middle pair of the sensor is located on the solar raft wafer 06, because the moving distance of the contrast photoelectric sensing sensor is fixed (as indicated by X3 indicated in Fig. 6), and when the solar 矽 wafer 06 is located in the comparative photoelectric sensing sensor, The comparative photoelectric sensing sensor will display the value X5, and can further calculate the distance from the side of the solar raft wafer 06 to the center (as indicated by X4 in Fig. 6).

The distance measuring device 30 as shown in FIG. 5 is attached to the worktable 05. The distance measuring device 30 is a reflective photoelectric sensing sensor, and the distance measuring device 30 for the reflective photoelectric sensing sensor has feedback. The distance reading function, the distance between the first and second clamping mechanisms 21, 22 and the side of the first and second bearing limiting members 11, 12 before the first and second clamping mechanisms 21, 22 are not actuated is known. (As disclosed in FIG. 5), when the first and second clamping mechanisms 21, 22 are displaced, the solar raft wafer 06 is clamped, and the solar raft wafer 06 is adjacent to the first side of the solar raft wafer 06. When the second member is supported by the limiting members 11, 12, the photoelectric sensing sensor projects the emission sensing light source L1 on the other two sides of the solar cell wafer 06, so that the photoelectric sensing sensor displays the measured The distance value obtained (as indicated by X1 in Fig. 5) can further calculate the distance from the side of the solar raft wafer 06 to the center (as indicated by X2 in Fig. 5).

According to the above structural composition design, the central positioning method of the solar raft wafer processing disclosed in the present invention is as follows:

a, the solar cell wafer 06 is placed on the workbench 05;

b. Using the displacement of the first and second clamping mechanisms 21, 22 to actuate the two sides of the solar raft wafer 06, so that the two sides of the solar raft wafer 06 can be adjacent to each other. Relying on the first and second bearing limiting members 11, 12, thereby fixing the solar crucible wafer 06 to a fixed position; c, during the displacement of the first and second clamping mechanisms 21, 22, by the The distance measuring device 30 detects the clamping action displacement distance of the first and second clamping mechanisms 21, 22 or the relative distance between the clamping ends of the first and second clamping mechanisms 21, 22 and the solar raft wafer 06. Or one of the ranging types of the distance between the distance measuring device 30 and the side of the solar raft wafer 06; d, using the operation of the logic operation unit 40, according to the first and second clamping mechanisms 21, 22 and the first and second bearing limit members 11, 12 preset known relative distance values and the distance value measured by the distance measuring device 30 are calculated to obtain the center point positioning of the solar 矽 wafer 06 positioning state. Precise location.

Advantages of the invention:

The "central positioning structure of solar raft wafer processing" disclosed in the present invention is mainly designed through the innovative structure of the distance measuring device, so that the first and second clamping mechanisms are in the process of clamping displacement actuation, and simultaneously through the distance measuring device Measuring the clamping action displacement distance of the first and second clamping mechanisms or the relative distance between the clamping ends of the first and second clamping mechanisms and the solar raft wafer, or the distance measuring device and the side of the solar raft wafer The relative distance between the two is any one of the ranging types, so that when the first and second clamping mechanisms abut against the other two sides of the solar raft wafer, the 矽 can obtain the solar 矽 wafer positioning state. The center point is positioned at a precise position, thereby achieving high operational efficiency and low cost advantages and practical advancement.

05. . . Workbench

06. . . Solar germanium wafer

11. . . First bearing limit member

12. . . Second bearing limit member

twenty one. . . First clamping mechanism

twenty two. . . Second clamping mechanism

30. . . Distance measuring device

40. . . Logical unit

Figure 1: Schematic diagram of a conventional processing flow.

Figure 2 is a perspective view showing the structure of a preferred embodiment of the present invention.

Figure 3 is a schematic illustration of the actuation of a preferred embodiment of the invention.

Fig. 4 is a schematic view showing the operation of another distance measuring device of the present invention.

Fig. 5 is a schematic view showing the operation of another distance measuring device of the present invention.

Figure 6 is a schematic view showing the operation of the further distance measuring device of the present invention.

05. . . Workbench

06. . . Solar germanium wafer

11. . . First bearing limit member

12. . . Second bearing limit member

twenty one. . . First clamping mechanism

twenty two. . . Second clamping mechanism

30. . . Distance measuring device

Claims (5)

The central positioning structure of the solar raft wafer processing is to obtain a precise position of the center point of the positioning state of the solar raft wafer placed on a workbench, including: the first bearing limit member and the second bearing The limiting member is disposed on the working platform for the X-axis and the Y-axis of the solar raft wafer to be placed at two lateral fixed positions, so that when the solar raft wafer is placed, the solar raft wafer is adjacent to each other. The two side edges can abut against the first and second bearing limiting members; the first clamping mechanism and the second clamping mechanism are respectively disposed on the working table relative to the first and second bearing limiting members The other side X and Y axes are adjacent to the two lateral positions, and the displacement is actuated against the two sides of the solar raft wafer; the distance measuring device is attached to the first clamping mechanism and the second clamp One of the holding mechanism and the working table, the distance measuring device is configured to detect the clamping action displacement distance of the first and second clamping mechanisms or the clamping end of the first and second clamping mechanisms and the solar energy Relative distance between the sides of the wafer or the distance measuring device and the sun Any one of the distance measurement types of the relative distance between the sides of the wafer; a logic operation unit electrically connected to the distance measuring device, whereby the first and second clamping mechanisms are coupled to the first and second bearings The preset relative distance value of the limiting member and the distance value measured by the distance measuring device are calculated to obtain the precise position of the center point of the solar raft wafer positioning state. The central positioning structure for solar raft wafer processing according to claim 1, wherein the first and second bearing limiting members are formed by bearings capable of rotating at a fixed point. The central positioning structure of the solar tantalum wafer processing according to the first aspect of the patent application, wherein the distance measuring device is formed by any one of a thrust meter and a contact type measuring device, thereby detecting the first and second clips. The clamping action displacement distance of the holding mechanism. The central positioning structure of the solar tantalum wafer processing according to the first aspect of the patent application, wherein the distance measuring device is formed by any one of a reflective photoelectric sensing sensor and a contrast photoelectric sensing sensor, thereby detecting the first 1. The relative distance between the clamping end of the second clamping mechanism and the side of the solar wafer. A central positioning method for solar wafer processing is to adopt a central positioning method of the structure described in claim 1 to 4, comprising: placing a solar wafer on the workbench; using the first and second The displacement of the clamping mechanism acts against the adjacent sides of the solar raft wafer, so that the other two sides of the solar raft wafer abut against the first and second bearing limiting members, thereby The solar raft wafer is stably fixed; during the displacement operation of the first and second clamping mechanisms, the distance measuring device detects the displacement distance of the first and second clamping mechanisms or the first and the second The relative distance between the clamping end of the two clamping mechanism and the solar raft wafer, or the relative distance between the distance measuring device and the side of the solar raft wafer; or the operation of the logic unit Calculating according to the preset known relative distance value of the first and second clamping mechanisms and the first and second bearing limiting members and the distance value measured by the distance measuring device, to obtain the solar raft wafer positioning state Locate the exact position of the center point.