TWI429501B - Pre-stressed air bearing - Google Patents

Description

Preload air bearing

The present invention relates to a platform adjustment component, and more particularly to a preload air bearing.

According to the trend of precision and miniaturization of high-tech products, the positioning accuracy of the working platform is relatively high. In order to achieve high precision, a working platform is directly driven by a linear motor to improve machining accuracy and achieve positioning quickly. However, when the linear motor drives the displacement of the working platform, the frictional force is disturbed between the working platform and a rail joint surface during the operation, and the overall stability and precision are lowered.

Referring to the first figure, the conventional technology is to set an air bearing (1) on a working platform (2), and then directly cooperate with a linear motor, wherein the air bearing (1) and a rail joint surface ( 3) An air gap (4) is provided to float the air bearing (1) on the shaft, and the working platform (2) and the rail joint surface (3) do not need to be in direct contact, so as to effectively reduce the work. The friction between the platform (2) and the rail joint surface (3). Moreover, since there is no direct contact between the air bearing (1) and the rail joint surface (4), no lubrication is required, the surface is not worn, the service life is increased, and the vibration and noise generated during the operation are small. It can also greatly improve the stability of use.

Although the use of air bearings has several of the above advantages, it is necessary to stabilize the air gap spacing to increase the rigidity. Therefore, the air bearing design must control the air gap in combination with the preloading method, and then adjust the air gap vertically through the air bearing to achieve an optimum value. At present, the method of controlling the air gap is conventionally provided by an external magnet to provide pre-compression, and combined with a ball-type air bearing for rotational adjustment. However, the above-mentioned conventional methods still have the following drawbacks: First, it is necessary to provide additional space for designing the magnet pre-compression, which makes the overall manufacturing more complicated; and second, the pre-compressed magnet forms a moment when the air bearing pre-pressure is provided. And reduce the overall stability.

Accordingly, it is a primary object of the present invention to provide a pre-compressed air bearing that directly provides pre-compression to an air bearing without forming a torque.

Another object of the present invention is to provide a pre-press air bearing that provides a preload without the need for additional space for the magnet to simplify the manufacturing process.

In order to achieve the above object, a pre-press air bearing according to the present invention has a piece having a body and an adjusting portion connected from the side of the seat along the geometric central axis of the seat. The end surface extends outwardly for a predetermined length, and the extending end is slidably connected to the platform, at least one air passage is disposed inside the seat body, and at least one air outlet is formed on the working end surface of the seat body opposite to the connecting end surface At least one accommodating portion is recessed on the working end surface; at least one magnetic member is received in the accommodating portion; and an elastic portion is slidably disposed on the adjusting portion and interposed between the body and the body The platform is provided to provide an elastic force to maintain a buffering distance between the body and the platform.

Hereinafter, the present invention provides a preferred embodiment, and further explains the following with the drawings, wherein:

The first figure is a cross-sectional view of a conventional technique.

The second drawing is a top view of a preferred embodiment of the invention.

The third figure is a cross-sectional view along the direction of the second Figure 3-3.

The fourth drawing is a schematic view of the use of the preferred embodiment of the present invention.

Referring to the second to third figures, in a preferred embodiment of the present invention, a pre-press air bearing (10) is provided for being disposed on a platform (not shown), mainly by A piece (20), a receiving portion (30), a magnetic member (40) and a resilient portion (50), wherein:

The seat member (20) has a square seat (21), and an adjusting portion (22) composed of a screw, so that the long axis of the shaft coaxially corresponds to the geometric central axis of the seat body (21), and is long One end of the shaft is screwed into a screw hole (212) recessed in the connecting end surface (211) on the bottom side of the seat body (21), and the other end of the long shaft of the shaft is connected from the side of the seat body (21). The end surface (211) extends outwardly for a predetermined length, and the extension end is slidably connected to the platform, at least one air passage (23) is disposed inside the seat body (21), and the seat body (21) is opposite to the seat body (21) At least one air outlet (231) is formed on one of the working end faces (213) of the connecting end faces (211).

The accommodating portion (30) is a screw hole recessed on the working end surface (213) of the seat body (21), and is appropriately recessed downwardly along the geometric central axis of the seat body (21). .

The magnetic member (40) has a circular receiving pocket (41) with a top end, and a circumferential side is provided with a thread, and a coaxial screw is disposed in the receiving portion (30), and a magnet (42) is embedded. It is accommodated inside the container (41).

The elastic portion (50) is slidably disposed on the adjusting portion (22) and interposed between the seat body (21) and the platform, and comprises two disc springs (51) coaxial with each other and The discs are respectively slidably disposed on the adjusting portion (22), and a spacer (52) of a suitable thickness is slidably disposed on the adjusting portion and interposed between the disc springs (51). Therefore, the elastic portion (50) can provide an elastic force to maintain a buffering distance between the seat (21) and the platform.

Further, the seat member (20) further includes at least one first positioning portion (24) and at least one second positioning portion (25), wherein each of the first positioning portions (24) is set to two predetermined a length-fixing screw, the long shaft is disposed in the seat body (21) perpendicular to the geometric center axis of the seat body (21), and abuts the rod of the adjusting portion (22) with one end of the long shaft The positioning portion (22) is positioned in the seat body (21).

Each of the second positioning portions (25) is set as a predetermined length of a set screw, and the long axis is perpendicular to the geometric central axis of the seat body (21) and is disposed in the seat body (21) and is long. One end of the shaft abuts on the circumferential side of the barrel (41) of the magnetic member (40) for positioning the magnetic member (40) in the receiving portion (30).

The pre-pressurized air bearing (10) provided by the present invention can be applied to various high-precision machines by the composition of the above components, as shown in the fourth figure, wherein a guide rail platform (60), The sliding portion is slidably connected to the other end of the shaft of the adjusting portion (22), and an actuating platform (70) is disposed above the seat member (20) with respect to the linear displacement of the rail platform (60). Since the gas is continuously released from each of the air outlets (231), an air gap (80) is provided between the operating member and the seat member (20), and the operating platform (70) is suspended in the air gap (80). Upper displacement.

The magnetic force provided by the magnetic member (40) acts as a pre-pressure between the seat member (20) and the actuating platform (70) opposite to the buoyancy force for controlling the air gap (80), and by the The elastic force provided by the elastic portion (50) adjusts the rotational freedom of the air bearing to maintain the stability of the actuation platform (70) when displaced. In addition, the user can change the position of the magnetic member (40) according to different requirements to control the pre-pressure, for example, adjusting the depth position of the magnetic member (40) in the receiving portion (30); or by Rotating the adjusting portion (22) to change the position of the seat body (21); and changing the buffering distance by changing the depth of the adjusting portion (22) screwed to the seat body (21) ) to adjust the range of elastic cushioning provided by the elastic portion (50).

The pre-pressurized air bearing (10) provided by the present invention is mainly characterized in that the magnetic member (40) is directly installed in the seat member (20) for providing a controllable pre-pressure. And adjusting the rotational freedom of the air bearing by the elastic portion (50), and has the following advantages:

First, it is not necessary to design a space outside the air bearing for placing the magnetic piece providing the pre-pressure;

Second, since the magnetic member is directly disposed in the seat body, the manufacturing process is simplified;

Third, since the magnetic bearing directly contains the magnetic member, the pre-pressure provided is perpendicular to the horizontal plane without forming a moment.

Fourth, the user can directly adjust the position of the seat to the adjusting portion or the position of the magnetic member in the receiving portion to control the pre-pressure.

In addition, it must be additionally explained that the pre-press air bearing provided by the present invention can slide the adjusting portion with the operating platform in addition to the sliding portion of the adjusting portion in the above embodiment. The air gap is interposed between the rail platform and the seat member, and the effect of the creation can also be achieved.

The above is only the detailed description of the present invention by way of a preferred embodiment, and any simple modification or change made to the embodiment, such as the adjustment portion or the disc spring type, etc., should be the patent application scope of the present application. The resulting hunter.

(1). . . Air bearing

(2). . . Work platform

(3). . . Rail joint surface

(4). . . Air gap

(10). . . Preload air bearing

(20). . . Seat

(twenty one). . . Seat

(211). . . Connecting end face

(212). . . Screw hole

(213). . . Working end face

(twenty two). . . Adjustment department

(twenty three). . . airway

(231). . . Air outlet

(twenty four). . . First positioning part

(25). . . Second positioning part

(30). . . Housing

(40). . . Magnetic parts

(41). . . Tolerance

(42). . . magnet

(50). . . Elastic part

(51). . . Disc spring

(52). . . Compartment

(60). . . Rail platform

(70). . . Actuation platform

(80). . . Air gap

The first figure is a cross-sectional view of a conventional technique.

The second drawing is a top view of a preferred embodiment of the invention.

The third figure is a cross-sectional view along the direction of the second Figure 3-3.

The fourth drawing is a schematic view of the use of the preferred embodiment of the present invention.

(10). . . Preload air bearing

(20). . . Seat

(twenty one). . . Seat

(211). . . Connecting end face

(213). . . Working end face

(twenty two). . . Adjustment department

(twenty three). . . airway

(231). . . Air outlet

(twenty four). . . First positioning part

(25). . . Second positioning part

(30). . . Housing

(40). . . Magnetic parts

(41). . . Tolerance

(42). . . magnet

(50). . . Elastic part

(51). . . Disc spring

(52). . . Compartment

Claims (9)

A pre-press air bearing is disposed on a platform and comprises: a piece having a body and an adjusting portion, the connecting end face of the seat body along a geometric central axis of the seat body Extending the predetermined length and extending the end of the extension end to the platform, at least one air passage is disposed inside the seat body, and at least one air outlet is formed on the working end surface of the seat body opposite to the connecting end surface; At least one accommodating portion is recessed on the working end surface; at least one magnetic member is received in the accommodating portion; an elastic portion is slidably disposed on the adjusting portion and interposed between the seat and the body Between the platforms, the elastic force is used to maintain a buffering distance between the body and the platform. The pre-press air bearing according to claim 1, wherein the adjusting portion is a screw, and one end of the long shaft of the shaft is screwed to the seat. The pre-press air bearing according to claim 1, wherein the geometric central axis of the receiving portion is coaxial with the geometric central axis of the seat. The pre-pressed air bearing according to claim 2, wherein the seat member further comprises at least one first positioning portion for positioning the adjustment portion on the seat body, at least one second positioning portion, The magnetic body is positioned in the accommodating portion. The pre-press air bearing according to claim 4, wherein each of the first positioning portions is a set screw. The pre-press air bearing according to claim 4, wherein each of the second positioning portions is a set screw. The pre-press air bearing according to claim 1, wherein the elastic system is a disc spring. The pre-press air bearing according to the first aspect of the invention, wherein the accommodating portion is a screw hole and is screwed to the magnetic member. According to the pre-pressed air bearing of claim 8, wherein the magnetic member further includes a receiving sleeve, the screw is disposed in the receiving portion, and a magnet is embedded in the receiving sleeve. .