TWI426232B - Inertia sensing device and using method thereof - Google Patents

Description

Inertial sensing device and method of use thereof

The present invention relates to an inertial sensing device, and more particularly to an inertial sensing device adapted to sense angular velocity and acceleration.

Acceleration sensors are now widely used in many devices in the market as motion sensors, such as game consoles, health monitoring, mobile interface control and automatic mute, inertial cursor pointing devices and the like. In addition, compared to the accelerometer used to sense acceleration, the gyro sensor is a device designed to sense angular velocity based on the theory of angular momentum conservation, which can be used for navigation, positioning and other systems.

Techniques for assembling an accelerometer and a gyroscope in the same device are disclosed in Taiwan Patent Application No. I317807 and No. I317498, and U.S. Patent Application No. 7,237,437. However, since the accelerometer and the gyroscope are separately configured, rather than integrated into a single central mass, they occupy a larger configuration space, so that the device cannot have a smaller volume.

The present invention provides an inertial sensing device that senses acceleration and angular velocity and has a small volume.

The invention provides a method for using an inertial sensing device, which can sense acceleration and angular velocity by an inertial sensing device. The invention provides an inertial sensing device, which comprises a substrate, a first mass, a second mass, a plurality of first elastic members, a plurality of second elastic members, a voltage driving unit, an acceleration sensing unit, an inertial sensing structure and Resonant frequency modulation unit. The first mass is disposed above the substrate and has an opening. The second mass is disposed within the opening. The first elastic member is coupled between the substrate and the first mass. The second elastic member is coupled between the first mass and the second mass. The voltage driving unit is disposed between the substrate and the first mass. The acceleration sensing unit is disposed between the substrate and the first mass and is adapted to sense an acceleration of the first mass in the first direction. The inertial sensing structure is disposed between the first mass and the second mass, and is adapted to sense an acceleration of the second mass in a second direction perpendicular to the first direction, and is adapted to sense the second mass Angular velocity. The resonant frequency modulation unit is disposed between the substrate and the first mass, and is adapted to modulate a resonant frequency of the first mass in the first direction.

In an embodiment of the invention, the voltage driving unit includes a plurality of first comb capacitor plates, a plurality of second comb capacitor plates, a plurality of third comb capacitor plates, and a plurality of fourth comb capacitor plates. . The first comb capacitor plate is coupled to one side of the first mass. The second comb capacitor plates are connected to the substrate and are arranged in parallel with each other and alternately with the first comb capacitor plates. The third comb capacitor plate is coupled to the other side of the first mass. The fourth comb capacitor plate is connected to the substrate and is arranged in parallel with each other and alternately with the third comb capacitor plate.

In an embodiment of the invention, the acceleration sensing unit includes a plurality of fifth comb capacitor plates, a plurality of sixth comb capacitor plates, a plurality of seventh comb capacitor plates, and a plurality of eighth comb capacitors. board. Fifth comb capacitor plate Connected to one side of the first mass. The sixth comb capacitor plate is connected to the substrate and is arranged in parallel with each other and alternately with the fifth comb capacitor plate. The seventh comb capacitor plate is coupled to the other side of the first mass. The eighth comb capacitor plate is connected to the substrate and is arranged in parallel with each other and alternately with the seventh comb capacitor plate.

In an embodiment of the present invention, the inertial sensing structure includes a plurality of ninth comb capacitor plates, a plurality of tenth comb capacitor plates, a plurality of eleventh comb capacitor plates, and a plurality of twelfth combs Capacitor plate. The ninth comb capacitor plate is coupled to one side of the second mass. The tenth comb capacitor plate is connected to the substrate and is arranged in parallel with each other and alternately with the ninth comb capacitor plate. The eleventh comb capacitor plate is connected to the other side of the second mass. The twelfth comb capacitor plate is connected to the substrate and is alternately arranged in parallel with the eleventh comb capacitor plate.

In an embodiment of the invention, the resonant frequency modulation unit includes a plurality of thirteenth comb capacitor plates, a plurality of fourteenth comb capacitor plates, a plurality of fifteenth comb capacitor plates, and a plurality of Sixteen comb capacitor plates. The thirteenth comb capacitor plate is connected to one side of the first mass. The fourteenth comb-shaped capacitor plates are connected to the substrate and are arranged in parallel with each other and alternately with the thirteenth comb-shaped capacitor plates. The fifteenth comb capacitor plate is coupled to the other side of the first mass. The sixteenth comb-shaped capacitor plates are connected to the substrate and are arranged in parallel with each other and alternately with the fifteenth comb-shaped capacitor plates.

In an embodiment of the invention, the substrate has a plurality of fixed bases, and the fixed bases respectively correspond to the first elastic members, and each of the first elastic members is connected between the corresponding fixed base and the first mass.

The invention provides a user of the above inertial sensing device law. First, the voltage driving unit is turned on to apply a DC voltage and a small AC signal to the first mass, and the first mass is driven to generate an action, and the Coriolis force generated by the external angular velocity causes the second mass to be relatively first. The oscillation of the block. If the resonant frequency of the first mass in the first direction and the second direction is not equal to the resonant frequency of the second mass in the first direction and the second direction, applying a voltage to the resonant frequency modulation unit to the first mass The resonant frequency is adjusted to be equal to the resonant frequency of the second mass. The angular velocity of the second mass is measured by the oscillation of the second mass relative to the first mass. After the angular velocity of the second mass is measured, an inverting voltage is applied to the voltage drive unit to substantially slow the actuation of the second mass. After substantially slowing down the operation of the second mass, a voltage is applied to the resonant frequency modulation unit to slightly slow down the operation of the second mass. After mitigating the operation of the second mass, the oscillations of the first mass and the second mass are sensed by the acceleration sensing unit and the inertial sensing structure to measure the accelerations of the first mass and the second mass.

The present invention provides a method of using the inertial sensing device described above. First, the oscillations of the first mass and the second mass are sensed by the acceleration sensing unit and the inertial sensing structure to measure the accelerations of the first mass and the second mass. Turning on the voltage driving unit to apply a DC voltage and a small alternating current signal to the first mass, and driving the first mass to generate an action, and generating a second mass relative to the first mass by the Coriolis force generated by the external angular velocity oscillation. If the resonant frequency of the first mass in the first direction and the second direction is not equal to the resonant frequency of the second mass in the first direction and the second direction, applying a voltage to the resonant frequency modulation unit, The resonance frequency of the first mass is adjusted to be equal to the resonance frequency of the second mass. The angular velocity of the second mass is measured by the oscillation of the second mass relative to the first mass.

Based on the above, the first mass of the present invention is used for sensing the acceleration in the first direction, and the second mass disposed in the opening of the first mass is used for sensing the acceleration of the angular velocity and the second direction. . In addition to sensing for acceleration, the first mass can be driven to act relative to the second mass to facilitate angular velocity sensing. The first mass and the second mass are integrated, and the inertial sensing structure has the configuration of the acceleration sensing function and the angular velocity sensing function, which can save the configuration space and make the overall structure have a small volume. In addition, after the sensing of the angular velocity is completed, by applying an inversion voltage to the voltage driving unit to slow down the operation of the second mass until the second mass is stationary, the sensing of the subsequent acceleration can be prevented from being affected by the second mass. Actuation interference to improve the accuracy of acceleration sensing.

The above described features and advantages of the present invention will be more apparent from the following description.

1 is a perspective view of an inertial sensing device according to an embodiment of the present invention. Referring to FIG. 1 , the inertial sensing device 100 of the present embodiment includes a substrate 110 , a first mass 120 , a second mass 130 , a plurality of first elastic members 140 (shown as four), and a plurality of second elastic layers. Piece 150 (shown as four), voltage driving unit 160, acceleration sensing unit 170, inertia The sensing structure 180 and the resonant frequency modulation unit 190.

The first mass 120 is disposed above the substrate 110 and has an opening 122. The second mass 130 is disposed within the opening 122. The first elastic members 140 are connected between the substrate 110 and the first mass 120 to make the first mass 120 suitable for oscillating on the substrate 110. The second elastic members 150 are coupled between the first mass 120 and the second mass 130 such that the second mass 130 is adapted to oscillate relative to the first mass 120.

The voltage driving unit 160 is disposed between the substrate 110 and the first mass 120. The acceleration sensing unit 170 is disposed between the substrate 110 and the first mass 120 and is adapted to sense the acceleration of the first mass 120 in the Y direction. The inertial sensing structure 180 is disposed between the first mass 120 and the second mass 130 and is adapted to sense the acceleration of the second mass 130 in the X direction perpendicular to the Y direction and is adapted to sense the second quality The angular velocity of block 130. The voltage driving unit 160 applies a DC voltage and an AC small signal to cause the first mass 120 to vibrate. When the first mass 120 vibrates, the Coriolis force generated by the external angular velocity causes oscillation of the second mass 130 relative to the first mass 120 to determine the value of the angular velocity of the overall structure. The resonant frequency modulation unit 190 is disposed between the substrate 110 and the first mass 120 and is adapted to modulate the resonant frequency of the first mass 120 in the Y direction. By fine tuning the resonant frequency of the first mass 120 to be equal to the resonant frequency of the second mass 130, the inertial sensing device 100 can be optimally responsive.

The first mass 120 and the second mass 130 are integrated by the above, and the inertial sensing structure 180 has the function of sensing acceleration and angular velocity. Yes, the configuration space can be saved, and the overall structure has a small volume. The inertial sensing device 100 of the present embodiment can be applied to a satellite positioning system, a mobile robot or other device that needs to have acceleration sensing and angular velocity sensing.

In detail, the voltage driving unit 160 of the embodiment includes a plurality of first comb capacitor plates 162, a plurality of second comb capacitor plates 164, a plurality of third comb capacitor plates 166, and a plurality of fourth comb capacitors. Board 168. The first comb capacitor plate 162 is coupled to one side of the first mass 120. The second comb capacitor plates 164 are connected to the substrate 110 and are arranged in parallel with each other and alternately with the first comb capacitor plates 162. The third comb capacitor plate 166 is connected to the other side of the first mass 120. The fourth comb capacitor plate 168 is connected to the substrate 110 and is alternately arranged in parallel with the third comb capacitor plate 166. The voltage driving unit 160 applies a DC voltage and a small AC signal through the first comb capacitor plate 162, the second comb capacitor plate 164, the third comb capacitor plate 166, and the fourth comb capacitor plate 168, so that the first mass is 120 vibrations.

The acceleration sensing unit 170 includes a plurality of fifth comb capacitor plates 172 , a plurality of sixth comb capacitor plates 174 , a plurality of seventh comb capacitor plates 176 , and a plurality of eighth comb capacitor plates 178 . The fifth comb capacitor plate 172 is connected to one side of the first mass 120. The sixth comb capacitor plate 174 is connected to the substrate 110 and is alternately arranged in parallel with the fifth comb capacitor plate 172. The seventh comb capacitor plate 176 is connected to the other side of the first mass 120. The eighth comb capacitor plate 178 is connected to the substrate 110 and is alternately arranged in parallel with the seventh comb capacitor plate 176. With the first quality The oscillation of the block 120, the fifth comb capacitor plate 172, the sixth comb capacitor plate 174, the seventh comb capacitor plate 176, and the eighth comb capacitor plate 178 of the acceleration sensing unit 170 generate a capacitance change amount, thereby The acceleration in the Y direction can be sensed.

The inertial sensing structure 180 includes a plurality of ninth comb capacitor plates 182 , a plurality of tenth comb capacitor plates 184 , a plurality of eleventh comb capacitor plates 186 , and a plurality of twelfth comb capacitor plates 188 . The ninth comb capacitor plate 182 is connected to one side of the second mass 130. The tenth comb capacitor plate 184 is connected to the first mass 120 and is parallel to and alternately arranged with the ninth comb capacitor plate 182. The eleventh comb capacitor plate 186 is connected to the other side of the second mass 130. The twelfth comb capacitor plate 188 is connected to the first mass 120 and is parallel to and alternately arranged with the eleventh comb capacitor plate 186. As the second mass 130 oscillates relative to the first mass 120, the ninth comb capacitor plate 182, the tenth comb capacitor plate 184, the eleventh comb capacitor plate 186, and the tenth of the inertial sensing structure 180 The two comb capacitor plates 188 generate a capacitance change amount, thereby sensing the angular velocity and the acceleration in the X direction.

The resonant frequency modulation unit 190 includes a plurality of thirteenth comb capacitor plates 192, a plurality of fourteenth comb capacitor plates 194, a plurality of fifteenth comb capacitor plates 196, and a plurality of sixteenth comb capacitor plates 198. . The thirteenth comb capacitor plate 192 is connected to one side of the first mass 120. The fourteenth comb capacitor plate 194 is connected to the substrate 110 and is alternately arranged in parallel with the thirteenth comb capacitor plate 192. The fifteenth comb capacitor plate 196 is connected to the other side of the first mass 120. The sixteenth comb capacitor plate 198 is connected to The substrate 110 and the fifteenth comb capacitor plate 196 are parallel to each other and alternately arranged.

2 is a partial schematic view of the resonant frequency modulation unit of FIG. 1. Referring to FIG. 1 and FIG. 2, in detail, the thirteenth comb capacitor plate 192 of the resonance frequency modulation unit 190 has a special shape, so that the resonance frequency modulation unit 190 is adapted to be applied with a DC voltage to finely adjust the body structure. Resonance frequency. In addition, the fifteenth comb capacitor plate 196 of the resonance frequency modulation unit 190 also has a special shape like the thirteenth comb capacitor plate 192, so that the resonance frequency modulation unit 190 is adapted to be applied with a DC voltage to finely adjust the body structure. The resonant frequency. Referring to FIG. 1 , in order to make the configuration of the resonant frequency modulation unit 190 relatively symmetrical in a limited configuration space, the thirteenth comb capacitor plate 192 and the fourteenth comb capacitor plate 194 of the present embodiment are divided into two parts. The first comb capacitor plate 162 and the second comb capacitor plate 164 are respectively disposed on the two sides of the first comb capacitor plate 162 and the second comb capacitor plate 164 of the voltage driving unit 160, and the fifteenth comb capacitor plate 196 and the sixteenth comb capacitor plate 198 are also divided into two. The components are respectively disposed on the two sides of the third comb capacitor plate 166 and the fourth comb capacitor plate 168 of the voltage driving unit 160.

3 is a partial schematic view of the inertial sensing structure of FIG. 1. Referring to FIG. 1 and FIG. 3, in detail, in the inertial sensing structure 180 of the embodiment, two tenth comb capacitor plates 182 are disposed between adjacent two ninth comb capacitor plates 182, and the The two tenth comb capacitor plates 184 have different potentials, so that the sensing capacitance value is doubled to facilitate the sensing of acceleration and angular velocity. In addition, two twelfth comb capacitor plates 188 are also disposed between the adjacent two eleventh comb capacitor plates 186, and the two twelfth combs are The capacitor plates 188 have different potentials to increase the sense capacitance value by a factor of two to facilitate acceleration and angular velocity sensing.

The substrate 110 of the present embodiment has a plurality of fixed pedestals 112 (shown as four), and the fixed pedestals 112 respectively correspond to the first elastic members 140, and the first elastic members 140 are connected to the corresponding fixed pedestals 112. Between the first mass 120 and the first mass 120. In addition, the first mass 120 and the second mass 130 of the embodiment respectively have a plurality of etching holes 124 and a plurality of etching holes 132. During the process of manufacturing the inertial sensing device 100, the etching liquid can pass through the etching holes 124 and The hole 132 is etched to uniformly etch a space between the first mass 120 and the substrate 110 and between the second mass 130 and the substrate 110. Hereinafter, a method of using the inertial sensing device 100 of the present embodiment will be described with reference to FIGS. 4 and 5.

4 and 5 are flow charts of a method of using the inertial sensing device of FIG. 1. Referring to FIG. 1 and FIG. 4, when the user wants to sequentially perform the sensing of the angular velocity and the sensing of the acceleration, the voltage driving unit 160 can be turned on to apply the DC voltage and the AC small signal to the first mass 120. Driving the first mass 120 to actuate (step S602), and causing oscillation of the second mass 130 relative to the first mass 120 by the Coriolis force generated by the external angular velocity. If the resonant frequency of the first mass 120 in the Y direction is not equal to the resonant frequency of the second mass 130 in the X direction, a voltage is applied to the resonant frequency modulation unit 190 to adjust the resonant frequency of the first mass 120 to The resonance frequencies of the second mass 130 are equal (step S603). If the resonance frequency of the first mass 120 in the Y direction is equal to the resonance frequency of the second mass 130 in the X direction, the step may be omitted. Step S603.

Next, the angular velocity of the second mass 130 is measured by the oscillation of the second mass 130 with respect to the first mass 120 (step S604). After the angular velocity of the second mass 130 is measured, an inverted voltage is applied to the voltage driving unit 160 to substantially slow down the actuation of the second mass 130 (step S606). After the operation of the second mass 130 is greatly slowed down, a voltage is applied to the resonant frequency modulation unit 190 to lower the electrical elastic coefficients of the first elastic members 140 (so that the oscillation frequency of the first elastic members 140 can be reduced) The operation of the second mass 130 is slightly slowed down (step S608). After the operation of the second mass 130 is slowed down, the oscillations of the first mass 120 and the second mass 130 are sensed by the acceleration sensing unit 170 and the inertial sensing structure 180 to measure the first mass 120 and the first The acceleration of the second mass 130.

The above steps S606 to S608 can be regarded as modal switching of the inertial sensing device 100 (switching from the driving mode to the sensing mode). The system is adapted to sense angular velocity when the system is in the drive mode, and is adapted to sense acceleration when the system is in the sensing mode. Thereby, after the inertial sensing device 100 senses the angular velocity, the acceleration can be sensed without being disturbed by the second mass 130 to improve the inertial sensing device 100 for the acceleration sensing. The accuracy.

In detail, the governing equation of the system of the inertial sensing device 100 of the present embodiment can be expressed as follows:

Where m _s is the mass of the second mass 130 (equivalent mass of the sensing mode), m _d is the mass of the first mass 120 and the second mass 130 (the driving mode, etc.) Effect quality). The second mass 130 is connected to the first mass 120, so when the first mass 120 is driven by the voltage driving unit 160 to generate motion (step S602 of FIG. 4), the second mass 130 will follow the first quality. The block 120 is actuated, so m _d in the formula (2) is the sum of the masses of the first mass 120 and the second mass 130. x Ω ² and y Ω ² are centripetal acceleration, y And x For angular acceleration, Ω and Ω is the Korotkoff acceleration, for The linear acceleration to be measured, B _s is the damping coefficient of the second mass, B _d is the damping coefficient of the first mass and the second mass, k _s is the mechanical elastic coefficient of the second elastic member, k _d is The mechanical elastic modulus of the first elastic member. By performing steps S606 to S610 in FIG. 2, the Korotkoff acceleration and the angular acceleration can be made zero, and the equations (1) and (2) can be simplified to the following equations (3) and (4). ):

Equations (3) and (4) are two completely independent second-order oscillating systems, forming a standard acceleration governing equation, so that the inertial sensing device 100 is adapted to sense the acceleration in the direction X and the direction Y.

It should be noted that the application of the above step S606 to the second mass 130 is performed by, for example, first measuring the direction of actuation and the degree of actuation of the second mass 130 to apply an appropriate magnitude of the reverse voltage to substantially slow down the second The operation of the mass 130. The applied voltage of the above step S608 is applied to the resonance frequency modulation unit, and the function thereof is to further slow down the residual operation amount of the second mass 130.

Referring to FIG. 1 and FIG. 5 , when the user wants to sequentially perform the sensing of the acceleration and the sensing of the angular velocity, the first mass 120 and the first mass 120 and the inertial sensing structure 180 may be first sensed by the acceleration sensing unit 170 and the inertial sensing structure 180 . The oscillation of the second mass 130 is performed to measure the acceleration of the first mass 120 and the second mass 130 (step S702). Next, the voltage driving unit 160 is turned on to apply a DC voltage and an AC small signal to the first mass 120, and the first mass 120 is driven to generate an action (step S704), and the Coriolis force generated by the external angular velocity causes the first The oscillation of the second mass 130 relative to the first mass 120.

If the resonant frequency of the first mass 120 in the Y direction is not equal to the resonant frequency of the second mass 130 in the X direction, a voltage is applied to the resonant frequency modulation unit 190 to adjust the resonant frequency of the first mass 120 to The resonance frequencies of the second mass 130 are equal (step S705). If the first mass 120 has a resonant frequency in the Y direction and the second mass 130 If the resonance frequencies in the X direction are equal, step S703 can be omitted. Finally, the angular velocity of the second mass 130 is measured by the oscillation of the second mass 130 relative to the first mass 120 (step S706).

In summary, the first mass of the present invention is used for sensing the acceleration in the first direction, and the second mass disposed in the opening of the first mass is used for the angular velocity and the acceleration in the second direction. Sensing. In addition to sensing for acceleration, the first mass can be driven to act relative to the second mass to facilitate angular velocity sensing. The first mass and the second mass are integrated, and the inertial sensing structure has the configuration of the acceleration sensing function and the angular velocity sensing function, which can save the configuration space and make the overall structure have a small volume. In addition, after the sensing of the angular velocity is completed, by applying an inversion voltage to the voltage driving unit to slow down the operation of the second mass until the second mass is stationary, the sensing of the subsequent acceleration can be prevented from being affected by the second mass. Actuation interference to improve the accuracy of acceleration sensing.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧Inertial sensing device

110‧‧‧Substrate

112‧‧‧Fixed base

120‧‧‧first mass

122‧‧‧ openings

124, 132‧‧‧ etched holes

130‧‧‧Second mass

140‧‧‧First elastic parts

150‧‧‧Second elastic parts

160‧‧‧Voltage drive unit

162‧‧‧First Comb Capacitor

164‧‧‧Second comb capacitor plate

166‧‧‧The third comb capacitor plate

168‧‧‧fourth comb capacitor plate

170‧‧‧Acoustic sensing unit

172‧‧‧ fifth comb capacitor plate

174‧‧‧ sixth comb capacitor plate

176‧‧‧ seventh comb capacitor plate

178‧‧‧ eighth comb capacitor plate

180‧‧‧Inertial sensing structure

182‧‧‧Ninth comb capacitor plate

184‧‧‧10th Comb Capacitor

186‧‧‧11th Comb Capacitor

188‧‧‧12th comb capacitor plate

190‧‧‧Resonance frequency modulation unit

192‧‧‧13th comb capacitor plate

194‧‧‧fourteenth comb capacitor plate

196‧‧‧ fifteenth comb capacitor plate

198‧‧‧16th comb capacitor plate

1 is a perspective view of an inertial sensing device according to an embodiment of the present invention.

2 is a partial schematic view of the resonant frequency modulation unit of FIG. 1.

3 is a partial schematic view of the inertial sensing structure of FIG. 1.

4 and 5 are flow charts of a method of using the inertial sensing device of FIG. 1.

100‧‧‧Inertial sensing device

110‧‧‧Substrate

112‧‧‧Fixed base

120‧‧‧first mass

122‧‧‧ openings

124, 132‧‧‧ etched holes

130‧‧‧Second mass

140‧‧‧First elastic parts

150‧‧‧Second elastic parts

160‧‧‧Voltage drive unit

162‧‧‧First Comb Capacitor

164‧‧‧Second comb capacitor plate

166‧‧‧The third comb capacitor plate

168‧‧‧fourth comb capacitor plate

170‧‧‧Acoustic sensing unit

172‧‧‧ fifth comb capacitor plate

174‧‧‧ sixth comb capacitor plate

176‧‧‧ seventh comb capacitor plate

178‧‧‧ eighth comb capacitor plate

180‧‧‧Inertial sensing structure

182‧‧‧Ninth comb capacitor plate

184‧‧‧10th Comb Capacitor

186‧‧‧11th Comb Capacitor

188‧‧‧12th comb capacitor plate

190‧‧‧Resonance frequency modulation unit

192‧‧‧13th comb capacitor plate

194‧‧‧fourteenth comb capacitor plate

196‧‧‧ fifteenth comb capacitor plate

198‧‧‧16th comb capacitor plate

Claims (8)

An inertial sensing device includes: a substrate; a first mass disposed above the substrate and having an opening, wherein the first mass has a first side, a second side, a third side, and a first a fourth side, the first side is opposite to the third side, the second side is opposite to the fourth side; a second mass is disposed in the opening; a plurality of first elastic members are connected to the substrate and Between the first masses; a plurality of second elastic members connected between the first mass and the second mass; a voltage driving unit disposed between the substrate and the first mass The first side and the third side are extended; an acceleration sensing unit is disposed between the substrate and the first mass and extends along the second side and the fourth side, and is adapted to sense the first An acceleration of the mass in a first direction, wherein a portion of the acceleration sensing unit is coupled to the first mass; an inertial sensing structure disposed between the first mass and the second mass and adapted Sensing the acceleration of the second mass in a second direction perpendicular to the first direction And adapted to sense the angular velocity of the second mass, wherein the portion of the inertia sensing mass structure coupled to the first block; and a resonant frequency modulation unit disposed on the substrate and the first mass And extending along the first side and the third side, and adapted to modulate a resonant frequency of the first mass in the first direction. The inertial sensing device of claim 1, wherein the voltage driving unit comprises: a plurality of first comb capacitor plates connected to the first side of the first mass; a plurality of second combs a capacitor plate connected to the substrate and parallel to the first comb capacitor plates and alternately arranged; a plurality of third comb capacitor plates connected to the third side of the first mass; and a plurality of fourth The comb capacitor plate is connected to the substrate and is arranged in parallel with each other and alternately with the third comb capacitor plates. The inertial sensing device of claim 1, wherein the acceleration sensing unit comprises: a plurality of fifth comb capacitor plates connected to the second side of the first mass; a plurality of sixth combs a capacitor plate connected to the substrate and parallel to the fifth comb capacitor plates and alternately arranged; a plurality of seventh comb capacitor plates connected to the fourth side of the first mass; and a plurality of The eight comb capacitor plates are connected to the substrate and are arranged in parallel with each other and alternately with the seventh comb capacitor plates. The inertial sensing device of claim 1, wherein the second mass has an opposite fifth side and a sixth side, The inertial sensing structure includes: a plurality of ninth comb capacitor plates connected to the fifth side of the second mass; a plurality of tenth comb capacitor plates connected to the first mass and the ninth The comb capacitor plates are parallel and alternately arranged; a plurality of eleventh comb capacitor plates are connected to the sixth side of the second mass; and a plurality of twelfth comb capacitor plates are connected to the first mass The block and the eleventh comb capacitor plates are parallel to each other and alternately arranged. The inertial sensing device of claim 1, wherein the resonant frequency modulation unit comprises: a plurality of thirteenth comb capacitor plates connected to the first side of the first mass; a fourteen comb capacitor plate connected to the substrate and parallel to the thirteenth comb capacitor plates and alternately arranged; a plurality of fifteenth comb capacitor plates connected to the third side of the first mass And a plurality of sixteenth comb capacitor plates connected to the substrate and arranged in parallel with each other and alternately with the fifteenth comb capacitor plates. The inertial sensing device of claim 1, wherein the substrate has a plurality of fixed bases, the fixed bases respectively corresponding to the first elastic members, and each of the first elastic members is connected to the corresponding Between the fixed base and the first mass. An inertial sensing device as described in claim 1 The method of using the method comprises: turning on the voltage driving unit to apply a DC voltage and a small alternating current signal to the first mass, and driving the first mass to generate an action, and generating a Coriolis force by an external angular velocity, thereby causing An oscillation of the second mass relative to the first mass; if the resonant frequency of the first mass in the first direction is not equal to the resonant frequency of the second mass in the second direction, applying a voltage to the resonance a frequency modulation unit configured to adjust a resonant frequency of the first mass to be equal to a resonant frequency of the second mass; the second mass is measured by oscillation of the second mass relative to the first mass An angular velocity of the block; after the angular velocity of the second mass is measured, an inverse voltage is applied to the voltage driving unit to substantially slow down the operation of the second mass; after substantially reducing the actuation of the second mass, applying a voltage in the resonant frequency modulation unit to slightly slow down the operation of the second mass; and after slowing down the operation of the second mass, the acceleration sensing unit and the inertial sensing Sensing the configuration of the first mass and the second oscillating mass to the measured acceleration of the first mass and the second mass. A method of using the inertial sensing device according to claim 1, comprising: sensing, by the acceleration sensing unit and the inertial sensing structure, the oscillation of the first mass and the second mass, To measure the first quality Acceleration of the block and the second mass; turning on the voltage driving unit to apply a DC voltage and a small AC signal to the first mass, and driving the first mass to generate an action, and the Coriolis generated by the external angular velocity a force causing oscillation of the second mass relative to the first mass; if the resonant frequency of the first mass in the first direction is not equal to the resonant frequency of the second mass in the second direction, applying a voltage And the resonance frequency modulation unit adjusts the resonance frequency of the first mass to be equal to the resonance frequency of the second mass; and the oscillation of the second mass relative to the first mass The angular velocity of the second mass.