TWI423451B - Substrate container with fluid-tight flow channel - Google Patents

Description

Substrate container with fluid-tight flow channel

The invention relates to a substrate container. More particularly, the invention relates to a substrate container comprising a flow channel for a fluid supply.

In general, the carrier is used to transport and/or store batches of wafers or disks before, during, and after the processing of the wafer or wafer. The wafer can be processed into an integrated circuit, and the disc can be processed into a magnetic storage disc for a computer. The terms wafer, disc or substrate are used interchangeably herein, and unless otherwise indicated, any of these terms are representative of semiconductor wafers, magnetic disks, planar flat substrates, and other such substrates.

Processing a wafer into an integrated circuit wafer often involves a number of steps, and the disc is processed at a plurality of processing stations and stored and transported between processing steps. Due to the delicate nature of the disc and its vulnerability to particles or chemicals, it must be properly protected during handling. Wafer containers have been used to provide this necessary protection. Moreover, because the processing of the disks is typically automated, the disks must be accurately positioned relative to the processing equipment for mechanical removal and embedding of the wafer. The second purpose of the wafer container is to hold the wafer in place during transport. The terms such as wafer containers, carriers, cassettes, shipping/storage compartments, etc., are used interchangeably unless otherwise indicated.

The presence or generation of particles during processing of semiconductor wafers and disks represents a very important contamination problem. Pollution is the single largest cause of capacity loss in the semiconductor industry. Since the size of the integrated circuit continues to decrease, the particles that can contaminate an integrated circuit become smaller, making the reduction of pollution a major issue. Contamination in the form of particles can be generated via friction, such as carriers and wafers or discs, with carrier covers or casings, with storage shelves, with other carriers, or with processing equipment. In addition, particles such as dust may be introduced into the outer casing via openings or joints in the outer cover and/or outer casing. Thus, the important function of the wafer carrier is to protect the wafers from such contamination.

The containers are typically constructed to axially arrange wafers or discs in the slots and support the wafer or disc in the slots and support the wafer or disc at or near its periphery. Wafers or discs are conventionally removed from the container in a radial direction upward or laterally. The container can have a portion with a lower opening, a door latched into the lower opening, and a separate carrier that rests on the door. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; In addition, the wafer carrier assembly can have a front opening to latch the door to the front opening, known as FOUPs or FOSBs, as described in U.S. Patent Nos. 6,354,601, 5,788, 082, and 6, 010, 008. In some configurations, the bottom cover or door, front door or container portion has been provided with openings or passages to assist in the introduction and/or discharge of gases such as nitrogen or other purified gases into the wafer carrier assembly. To replace the surrounding air that may have contaminants.

Filter plugs have been applied to the aforementioned containers to reduce the amount of particulate contamination entering the container assembly during flushing. However, the conventional attachment and sealing methods between the working elements, such as the filter element, and the seal housing, utilize a rigid plastic outer cover and an O-ring. Known wafer containers have also used a variety of joints or coupling mechanisms to fluidly form the flow channels of the wafer container and the interface of the flow supply to the pressure or vacuum source. Such attachment and sealing requires a specific assembly of complex configurations.

An improved wafer container according to one aspect of the present invention includes a housing portion having an open side or bottom, a door that sealingly closes the open side or open bottom and defines a housing or container, and is received A plurality of wafer holders in the container. The door is coupled to the outer casing portion to form a continuous outer casing that isolates the wafer carrier or other substrate from the surrounding atmosphere. The container has at least one access structure defining a flow conduit into and out of the housing. A sealing grommet is placed in the access structure in a fluid tight bond. The outer surface of the grommet forms an integral, fluid-tight seal against the interior surface of the flow conduit. In one embodiment, the grommet defines a flow passage such as a cylindrical orifice. In a related embodiment, the grommet includes a contact surface that facilitates a fluid-tight connection between the interior volume of the wafer container and the nozzle or threaded interface for fluid or vacuum source. The inner sealing surface of the grommet defines a flow passage.

Optionally, the grommet through the flow channel contains at least one working element that is substantially or entirely contained therein. The working element can be any component, subassembly, or internal volume of the collapsible round container to the exterior or to form an interface. Examples of working elements include valves, filters, sensors, plungers, or combinations thereof. The working element is fluid-tightly bonded to the inner sealing surface.

In operation, according to a specific example, the grommet maintains a seal against the access structure to prevent unintended chemicals or particles from entering the interior of the wafer container assembly. Thus, any fluid flow between the interior and exterior of the wafer container is limited to passage through the grommet. The fluid flow form includes introducing a flushing gas, such as nitrogen, into the interior of the wafer carrier assembly.

Fluid flow can be further limited by the working element. For example, when the working element is a specific filter, the gas passing through the passage will also pass through the filter. In another exemplary case, the working element is a check valve and fluid flow through the passage is further limited to flow in a particular direction. In one embodiment, the flow passage through the grommet includes a filter and a check valve. In this particular example, the functions of both, ie, filtering and flow direction specification, are performed. In another embodiment, the working element is a removable plunger, in which case fluid is not allowed to flow through the passage when the plunger is inserted.

In another exemplary embodiment, the work element includes a sensor. Useful sensor forms include temperature sensors, flow rate sensors, pressure sensors, gas concentration sensors, material detectors, and proximity sensors. Among them, and among other sensors that can be used as working elements, some (such as flow sensors) can allow flow through, while others (such as pressure sensors) also act as plungers.

In manufacturing, the uniform access structure, the sealing grommet, and the dimensions of the working elements can be modularized. Thus, in a production line of a plurality of wafer containers each having dedicated operating elements, the wafer container assembly housing can have a limited number of identical housing components that are placed at a plurality of locations throughout the common housing. Each access structure may have a sealing grommet, some of which are of a blanking type (without passage), while other access structures may have a sealing grommet with various integrated working elements. The sealing grommet can be pre-combined with most of the working elements and stored as a work cartridge subassembly.

Advantages and Features of Preferred Embodiments of the Invention A grommets configuration provides an elastic member that is generally cylindrical in configuration and has an aperture extending therethrough, the aperture itself being a cylindrical configuration. The aperture is of sufficient length to substantially or completely accommodate the overall length of a work assembly that is embedded therein. Preferably, the grommet has at least one flat surface arranged to be perpendicular to the axis of the grommet. This surface can be used to effectively provide a seating surface for a nipple or nozzle that is part of the flushing system. The volume of the grommet is preferably larger than the working component housed therein. Preferably, the grommet has a cross-sectional area taken in an axial plane whereby the cross-sectional area of the grommet is greater than the cross-sectional area of the opening extending axially therethrough. Preferably, the grommet has an axial length that is greater than the diameter of the opening or aperture extending axially through the grommet. The O-ring generally has a circular cross section, and the grommet has a non-circular cross section and a cylindrical inner joint, a cylindrical outer joint, and a flat end surface.

FIG. 1A shows an example of a wafer container assembly 100 that includes a wafer carrier 102, a bottom section 104, and a housing portion 106. The bottom section 104 is adapted to sealingly couple the outer casing portion 106 to define an interior space that isolates the wafer carrier 102 from the ambient atmosphere 108. As shown in FIG. 1A, the wafer carrier 102 can include a plurality of components 110 that can hold and place a plurality of wafers within the wafer carrier 102. In general, component 110 holds and places the germanium wafer such that contact between adjacent wafers is minimized, which can reduce wafer damage that may occur during processing and/or transport of the wafer. FIG. 1B shows another version of a wafer container assembly 103 known as FOUP or FOSB, which includes an open front portion, a front door 105, and a housing portion 107. Wafer W is removed horizontally through the open front. The notch formed on the inner side holds the wafer. The front door 105 has a seal that sealingly engages the outer casing portion 107 to form an interior space that is isolated from the surrounding atmosphere. The structure of the wafer carrier is exemplified in, for example, U.S. Patent No. 6,428,729, the entire disclosure of which is incorporated herein by reference. In addition, a wafer carrier assembly having a front opening and having a latch to the front opening is known as a FOUP or FOSB, as exemplified in U.S. Patent Nos. 6,354,601, 5,788,082 and 6,010,008. Also included as a reference. The receiving structure for the grommet 124, 125 can be positioned in the bottom wall of the outer casing portion.

Referring to Figure 2, an exemplary wafer container section 120 is shown. In some versions of the specific example, section 120 is a side cover, bottom cover or door of the wafer container. In other types of specific examples, section 120 is a non-removable, inoperable wall section. Section 120 is illustrated as including an access structure in the form of openings 122, 123, grommetes 124, 125 located in openings 122, 123, and a plurality of state openings 126. In general, the plurality of state openings 126 can be positioned at desired locations on the cover section 120 to provide a structure for the sensor, such as a probe or other monitoring element, to enter the wafer container forming interface. For example, the interface between the sensor and the particular state opening 126 can provide information regarding the state of the wafer processing steps and the like.

In an exemplary embodiment, the opening 122 facilitates fluid transfer into the section 120, which facilitates the introduction of gas or other fluid into the interior of the wafer container. Similarly, opening 123 provides fluid to be transported out of the wafer container via section 120 such that gas or fluid within the wafer container can be expelled to the surrounding atmosphere. Thus, in this particular embodiment, the opening 122 is an inlet and the opening 123 is an outlet. Although FIG. 2 shows a specific example in which one section 120 includes two openings 122, 123, a specific example having four, five, six or more access structures positioned in the section 120 may be used, and both of them are in the present invention. Within the scope of this.

As shown in FIG. 2, a grommet 124 is placed in the opening 122 to seal the opening 122, and a grommet 125 is placed in the opening 123 to seal the opening 123. As described below, each grommet 124, 125 creates a seal against the interior of its corresponding opening 122, 123 and provides at least one aperture or passage through the grommet. In one embodiment, the body of each grommet 124, 125 has a cross-sectional shape corresponding to the internal components of the openings 122, 123 and is sized to seal and substantially close its corresponding opening 152, 153. It will be appreciated by those skilled in the art that the cross-sectional shape and size of the openings 122, 123 can be determined by the airflow size requirements and the operating pressure of the particular wafer container assembly. In a related embodiment (not shown), the grommet contains two different channels.

FIG. 3 illustrates an exemplary embodiment of the grommet 124, 125. The grommet 124, 125 of this specific example has a substantially cylindrical body 128. In a particular version of the version, the body 128 is formed from rubber, enamel, or other elastomer or polymer having the desired sealing characteristics. Alternatively, body 128 includes a sealing member 130 in the form of a toroidal projection circumferentially disposed along the exterior of the cylindrical wall. The grommet 124, 125 also includes an aperture 132 through the center of the body 128. The interior surface of the body 128 defining the aperture 132 optionally includes a sealing member (not shown) that forms a seal against the working element 134 that is at least partially disposed within the aperture 132.

In an exemplary embodiment, the working element 134 is a valve such as a check valve. In another exemplary embodiment, the working element 134 is a fluid filter. In another embodiment, the working element 134 is a sensor, such as a temperature sensor, a flow rate sensor, a pressure sensor, a gas concentration sensor, a material detector, or a proximity sensor. In another embodiment, the working element 134 is only a plunger to prevent fluid from passing through the flow passage 204.

FIG. 4 shows an exemplary outer cover section 150. The cover section 150 includes a cover housing 170, latching elements 172, 174, a cam 176, and an outer cover section 178. Cam 176 is coupled to latching elements 172, 174 such that rotation of cam 176 urges latching elements 172, 174, causing protrusion 180 to extend through opening 182 that is positioned in housing 170, and lock housing 170 to another housing section (Not shown in the figure). An outer cover 178 is assembled on the latch members 172, 174 and the cam 176. The cover section 150 also includes access structures 160,161. The access structure 160 includes an access opening 152 and a flow conduit 157. The access structure 161 includes an outlet opening 153 and a flow conduit 158. Each flow conduit 157, 158 has a generally cylindrical wall having a height that extends from the exterior of the wafer container to the interior through the thickness of the outer cover segment 150.

The flow conduits 157 and 158 each retain the work sub-assemblies 162 and 163. The work subassemblies 162 and 163 are illustrated in more detail in Figures 5A and 5B. The work subassembly 162 is an inlet subassembly and includes a grommet 154 having a body 202 and an aperture 204. The work subassembly 162 further includes a check valve 211 and a filter 210 that can be mounted into the aperture 204. Specific examples of the filter 210 include a particle filter of a suitable technique such as HEPA filtration. The work subassembly 163 is an outlet subassembly and includes a grommet 155 having a body 203 and an aperture 205. Alternatively, each of the work sub-assemblies 162, 163 is pre-assembled into a work cassette with its respective constituent components.

FIG. 5C illustrates the assembly of the work subassembly 162 into the flow conduit 157. The filter 210 is positioned and held between the bottom of the grommet 154 and the retaining surface 164 of the flow conduit 157. The grommet 154 is mated within the flow channel 157 and forms a seal with the inner wall of the flow channel 157. Check valve 211 is sealingly mated within flow passage 204 via grommet 154 and aligned to allow flow in a downward direction, as shown in Figure 5C.

As previously mentioned, the openings 152, 153 in the outer cover section 150 or in any other outer casing portion of the section 120 such as a wafer container assembly may be sealed by the grommet of the present invention. In one embodiment, the grommet includes a body having an aperture in the housing, the aperture extending along a major axis of the housing. Further, a specific example of the grommet of the present invention may include a working element located within the orifice. The working element can include a check valve that regulates the flow of gas or other fluid through the orifice, filter, sensor, or combination thereof. The check valve used in the present invention can be oriented within the orifice such that the grommet can be used to seal both the inlet and outlet openings on the wafer carrier door and/or housing. Furthermore, as described below, the design of the grommet body helps to seal the opening without the need for an additional O-ring attached to the grommet. In addition, the specific example of the grommet of the present invention can be combined with a grommet body, a check valve and/or a filter to form an integrated cassette, which can improve the sealing ability of the grommet and facilitate the manufacture of the wafer carrier. Component. In some embodiments, the grommet has an axial height of from about 1/8 inch to about 1 inch, while in other embodiments, the grommet has from about 3/8 inch to about 3/4 inch. Axial height. Further, a specific example of the grommet of the present invention may have a diameter of about 1/4 inch to about 1.5 inches, while in other embodiments, the grommet may have about 1/2 inch to about 3/4 inch. diameter of. It will be appreciated by those skilled in the art that the axial extent and diameter of the additional range of grommet can be applied and are within the scope of the present disclosure.

The grommet can be distinguished by a variety of methods from the O-ring of the technology. For example, the grommet configuration provides a resilient member that is generally cylindrical in configuration and has an aperture therethrough that has a cylindrical configuration. The aperture is of sufficient length to fully or substantially accommodate the overall length of the work assembly that is embedded therein. Preferably, the grommet has at least one flat surface arranged perpendicular to the axis of the grommet. The surface can be used to effectively provide a seating surface for the nipple or nozzle as part of the flushing system. The volume of the grommet is preferably larger than the container of the working component therein. Preferably, the grommet has a cross-sectional area taken in an axial plane whereby the cross-sectional area of the grommet is greater than the cross-sectional area of the opening extending axially therethrough. Preferably, the grommet has an axial length that is greater than the diameter of the opening or aperture extending axially through the grommet. The O-ring generally has a circular cross section, and the grommet has a non-circular cross section and a cylindrical inner joint, a cylindrical outer joint, and a planar end surface.

6A and 6B are cross-sectional views showing a gas flushing configuration of a specific example of the present invention. The example grommet 300 and 302 are located in separate access structures 304 and 306 of an exemplary wafer container having an interior 308 and an exterior 310. The access structures 304, 306 are formed in the walls or doors 312 of the wafer container and function as a rinse port. The access structure 304 includes a retention structure 314 having a geometry that is particularly suitable for sealingly engaging the grommet 300. Similarly, the access structure 306 includes a retention structure 316 having a geometry suitable for engagement with the grommet 302. Each grommet 300 and 302 has a plurality of sealing members 318, 320 for producing fluid-tight contact with portions of the interior surfaces of the retaining structures 314 and 316, respectively, as shown.

Figure 6A illustrates an inlet configuration and Figure 6B illustrates an outlet configuration. For each configuration, the direction of the flow has been indicated. The inlet configuration of FIG. 6A also includes a filter 322 that is disposed and fluidly sealed between the grommet 300 and the contact surface of the retention structure 314. The inlet configuration of Figure 6A also includes a one-way valve assembly 324 that is placed to allow only fluid to travel in the indicated flow direction. Similarly, the outlet configuration of Figure 6B also includes a one-way valve assembly 326 that is placed to allow only fluid to travel in the indicated flow direction. The valve assemblies 324, 326 are fluidly sealed within respective flow passages 328, 330 defined by the orifices of the grommet 300, 302. The grommet 300, 302 has retention members 332, 334 for fixedly holding the positioning of the valve assemblies 324, 326 within the respective flow passages 328, 330. In a particular version of the version, the one-way valve assemblies 324, 326 include valve bodies 336 and 338, outer seal rings 340 and 342, inner seal rings 344 and 346, movable pistons 348 and 350, and biasing springs 352. 354.

In operation, the inlet and outlet configurations can cooperate during the flushing event, with the existing air or gas within the interior 308 of the wafer container being replaced by newly introduced air, gas, or other fluid. In one embodiment, as shown in FIG. 6B, vacuum source 360 is coupled to interior 308 by an outlet nozzle 362. The outlet nozzle is adapted to form an interface with the contact surface 364 of the grommet 302. When downward force is applied to the grommet 302 by the outlet nozzle, the grommet 302 is compressed, but still retains its sealed internal surface to the retaining structure 316 and the sealed surface of the valve assembly 326. In one embodiment, the sealed state between the grommet 302 and the retaining structure 316 and the valve assembly 326 can be substantially improved or made more effective by the downward force exerted by the outlet nozzle 362 onto the grommet 302.

Since the vacuum 360 is coupled to the internal volume 308, the existing fluid in the volume 308 is drawn out of the wafer container via the outlet of FIG. 6B, and the replacement flow system is drawn through the inlet of FIG. 6A, via the filter 322. In a related embodiment (not shown), a replacement fluid source (not shown) couples the interior volume 308 via an inlet nozzle having a geometry similar to the outlet nozzle 362 and joins the inlet grommet 300 in the same manner. Where the outlet nozzle 362 is coupled to the outlet grommet 302. In another embodiment (not shown), no outlet nozzle is coupled to the grommet 302, and the inlet nozzle carries the pressurized replacement fluid into the interior space 308. In this particular embodiment, the replaced fluid is simply discharged via the outlet configuration of Figure 6B.

In general, the grommet 300, 302 can have the same cross-sectional shape as the grommet designed to be used for sealing. For example, in one embodiment, the grommet 300, 302 has a generally cylindrical shape with a generally circular cross section. However, it will be apparent to those skilled in the art that a variety of grommet body geometries are in accordance with the spirit of the present invention.

In one embodiment, grommet 300 and 302 are the same component. In a related embodiment, valve assemblies 324 and 326 are the same component. Thus, in a particular version of a certain version, the assembly of the present invention can be used to seal both inlet and outlet openings using the same constituent elements.

In another embodiment, the grommet of the present invention may further comprise additional retaining members (not shown) that securely hold the filter device, such as filter 322, in the same or similar manner, wherein retaining members 332, 334 remain Valve assemblies 324, 326. Thus, a pre-combined work sub-assembly can be combined with a grommet, valve and filter to form an integrated sub-assembly.

The grommet body, the flange, and other components of the grommet of the present invention may be constructed of any material suitable for use in semiconductor processing applications, including polymers and elastomers. In some embodiments, the grommet body and the flange can be constructed of a fluoroelastomer. Examples of fluoroelastomers by Vipon by Dupont Dow Elastomers The trademark is sold as a name. Moreover, in some embodiments, the elastic grommet body or grommet can have a fluoropolymer or other inert polymer applied to the surface of the grommet to isolate the elastomeric material from the interior of the substrate container. In general, the polymer or fluoropolymer coating should have some degree of flexibility to maintain the sealing properties of the elastomeric grommet body.

The foregoing specific examples are illustrative and not restrictive. The additional specific examples are still within the scope of the patent application in this case. Although the present invention has been described with reference to the specific embodiments, those skilled in the art can change the form and materials without departing from the spirit and scope of the invention.

100. . . Wafer container assembly

102. . . Wafer carrier

103. . . Wafer container assembly

104. . . Bottom section

105. . . Front door

106. . . Shell

107. . . Shell

108. . . Ambient atmosphere

109. . . Accept structure

110. . . element

120. . . Wafer container section

122. . . Opening

123. . . Opening

124. . . Grommet

125. . . Grommet

126. . . State opening

128. . . Cylindrical body

130. . . Sealing part

132. . . Orifice

134. . . Working element

150. . . Cover section

152. . . Opening

153. . . Opening

154. . . Grommet

155. . . Grommet

157. . . Flow conduit

158. . . Flow conduit

160. . . Access structure

161. . . Access structure

162. . . Job subassembly

163. . . Job subassembly

164. . . Keep the surface

170. . . Covering the outer casing

172. . . Latching element

174. . . Latching element

176. . . Cam

178. . . External coverage section

180. . . Protrusion

182. . . Opening

202. . . Ontology

203. . . Ontology

204. . . Orifice

205. . . Orifice

210. . . filter

211. . . Check valve

300. . . Grommet

302. . . Grommet

304. . . Access structure

306. . . Access structure

308. . . internal

310. . . external

312. . . door

314. . . Keep structure

316. . . Keep structure

318. . . Sealing part

320. . . Sealing part

322. . . filter

324. . . Valve assembly

326. . . Valve assembly

328. . . Flow channel

330. . . Flow channel

332. . . Holding part

334. . . Holding part

336. . . Valve body

338. . . Valve body

340. . . External seal ring

342. . . External seal ring

344. . . Internal seal ring

346. . . Internal seal ring

348. . . Movable piston

350. . . Movable piston

352. . . Bias spring

354. . . Bias spring

360. . . vacuum

362. . . Outlet nozzle

364. . . Contact surface

W. . . Wafer

1A is an exploded perspective view of a wafer container assembly including a wafer carrier, a bottom outer cover, and a housing portion.

1B is an exploded perspective view of another embodiment of a wafer container assembly including a wafer carrier, a side cover, and a housing portion.

Figure 2 is a bottom plan view of an exemplary bottom outer cover showing the structure positioned on the bottom surface of the bottom outer cover.

Figure 3 is a diagram showing an example of a grommet and an exemplary working element in one embodiment of the present invention.

4 is an exploded perspective view of an exemplary outer cover or door for a wafer container assembly including a sealing grommet and a work component.

5A, 5B show the construction of an example work subassembly, each subassembly incorporating a grommet and at least one work element.

Figure 5C shows an example assembly of a work subassembly into a flow conduit.

6A and 6B are cross-sectional views showing a gas flushing configuration of a specific example of the present invention.

100. . . Wafer container assembly

102. . . Wafer carrier

104. . . Bottom section

106. . . Shell

108. . . Ambient atmosphere

110. . . element

Claims (26)

A substrate container comprising: a housing portion having an open side or bottom; a door sealingly closing the open side or bottom; one of the housing portion and the door including a first access structure, the structure Formed in the outer casing and providing fluid to and from the outer casing to the interior of the substrate container; wherein the first access structure includes an opening from the interior of the container to the exterior of the container, and wherein the first access structure has a cylindrical orientation An inner face, and an opposite outer face, the cylindrical inward face having a height extending from the exterior of the substrate container to the interior thereof at least partially through the thickness of the outer casing portion; and the first elastic grommet, It has a cylindrical configuration as a whole and has an axial opening extending therethrough; the grommet has: an external interface that is configured to be combined with the cylindrical inwardly facing surface of the first access structure a surface, and a seating surface immediately following the orifice and the outer junction surface and exposed outwardly on the substrate container to provide a nozzle or nipple as part of the flushing system A sealing surface; this axial bore of the grommet is provided extending flow channel extending through the grommet. The substrate container of claim 1, further comprising: a second access structure formed in the outer casing and providing fluid to and from the outer casing to the inside of the substrate container; wherein the second access structure comprises a Opening from the interior of the container to the exterior of the container, and wherein the second access structure has a cylindrical inward interface; and further comprising: a second elastic grommet having a cylindrical configuration as a whole and having a An axial bore extending therethrough and a cylindrical inward interface with the second access structure Combine. The substrate container of claim 2, wherein each grommet has an axis, and wherein each of the access structures further comprises: a wall extending through the opening transversely to the axis of the respective grommet Each wall has a retaining surface and an outer exposed surface, and each wall has a plurality of flow conduits therethrough. The substrate container of claim 3, wherein each of the walls of each of the access structures at least partially retains the grommet. The substrate container of claim 1, wherein the grommet has an aperture extending therethrough, and the aperture comprises a working element. The substrate container of claim 5, wherein the working element comprises a valve. The substrate container of claim 1, wherein the grommet has a planar end face, and a working member is placed between the planar end face and the access structure and is in contact with each other. The substrate container of claim 7, wherein the working element comprises a filter. The substrate container of claim 5, wherein the working element comprises a sensor. The substrate container of claim 5, wherein the grommet has a pair of end faces, and the working element is placed between the two end faces. Such as the substrate container of claim 10, wherein the operation The component is a check valve that includes a filter, and wherein the filter is constrained to the location by the grommet. The substrate container of claim 5, wherein the grommet has an outer exposed planar end face providing a sealing surface for the nozzle or nipple as part of the flushing system. The substrate container of claim 1, wherein the grommet includes an externally exposed contact surface that facilitates a fluid-tight connection between the interior volume of the substrate container and an external irrigation system. The substrate container of claim 1, wherein the grommet includes a body having at least one sealing member that facilitates sealing with the external rinsing member. A substrate container comprising: a rinse port having: a wall having an inner surface and an opposite outer surface, and a height extending from the exterior to the interior at least partially through the thickness of the substrate container; the flexible elastic cord a ring that is sealingly disposed within the rinse port, generally cylindrical in configuration, and including an axial bore extending therethrough; the orifice providing extension from the interior of the substrate container to the exterior thereof a flow channel; the elastic grommet having a seating surface that is exposed outwardly to the substrate container to provide a sealing surface for a nozzle or nipple that is part of the flushing system; and a check valve that is sealingly disposed within the orifice. A substrate container comprising: a housing portion; An outer cover portion adapted to establish a fluid-tight connection with the outer casing portion and defining an inner volume; wherein at least one of the outer cover portion and the outer casing portion has at least one access structure, and the access structure comprises a At least one of a fluid inlet, a fluid outlet, and a fluid passage; wherein the at least one access structure maintains a flexible elastomeric grommet in sealing communication therewith; and wherein the grommet includes a fluid passageway Formed as an orifice, providing a flow passage for the inner volume of the substrate container to the exterior thereof; the grommet is generally cylindrical in configuration; the orifice has a cylindrical surface to retain at least one of them Sealing the communicating working element; further, the elastic grommet has a seating surface that is outwardly exposed on the substrate container to surround the opening to provide a nozzle or thread for sealingly connecting to a portion of the flushing station Take over, without the sealing surface of the O-ring. The substrate container of claim 16, wherein the outer cover portion has a plurality of access structures. The substrate container of claim 16, wherein the at least one access structure comprises a flow conduit having an interior surface, the grommet forming sealing communication with the interior surface. The substrate container of claim 16, wherein the at least one working element comprises a check valve. The substrate container of claim 16, wherein the at least one working element comprises a filter. The substrate container of claim 16, wherein the grommet It is suitable to create a sealed bond between a vacuum/fluid source and the internal volume of the substrate container. The substrate container of claim 16, wherein the grommet comprises a nozzle interface outer exposed surface. A work subassembly for a substrate container, comprising: a flexible elastic grommet having a cylindrical configuration as a whole having: (a) an outer surface adapted to maintain a mating surface adjacent to the substrate container a fluid-tight seal; (b) an orifice having an internal surface adapted to maintain a fluid-tight seal against an adjacent mating surface, the orifice providing a flow path from the interior volume of the substrate container to the exterior thereof And (c) a seating surface that is outwardly exposed on the grommet to surround the aperture to provide a sealing surface that can be sealingly attached to a nozzle or nipple that is part of the flushing station without the use of an O-ring And a first working component disposed within the aperture and having an outer surface that engages an inner surface of the aperture, the working element being entirely contained within the aperture. For example, the operation sub-assembly of claim 23, wherein the first working component is a valve. The work subassembly of claim 23, further comprising: a filter held by the grommet. A method of rinsing a wafer container, comprising: selecting a wafer container, the wafer container comprising: a grommet having an opening having an inner surface, the grommet An elastomeric material is formed, the orifice defining a fluid flow passage; the working element being at least partially disposed within the orifice and sealingly bonded to the elastomeric material on the interior surface of the orifice; and a grommet having an elastomeric material Exposed outwardly relative to the wafer container, the elastomeric material provides a seating surface; the seating surface of the resilient material contacts the force from the nozzle, thereby sealing the grommet to an interface with a source of irrigation; And injecting the injection gas into the wafer container.