TWI423375B - Roller conveying device - Google Patents
Roller conveying device Download PDFInfo
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- TWI423375B TWI423375B TW98134794A TW98134794A TWI423375B TW I423375 B TWI423375 B TW I423375B TW 98134794 A TW98134794 A TW 98134794A TW 98134794 A TW98134794 A TW 98134794A TW I423375 B TWI423375 B TW I423375B
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- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 239000011521 glass Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Description
本發明是有關於一種輸送裝置,且特別是有關於一種滾輪輸送裝置。This invention relates to a delivery device, and more particularly to a roller delivery device.
隨著光學科技與半導體技術的進步,液晶顯示裝置(Liquid Crystal Display;LCD)已廣泛的應用於電子產品顯示裝置上。液晶顯示器具有高畫質、體積小、重量輕、低電壓驅動、低消耗功率及應用範圍廣等優點,故已廣泛的應用於可攜式電視、行動電話、攝錄放影機、筆記型電腦、桌上型顯示器、以及投影電視等消費性電子或電腦產品中,成為顯示器的主流。With the advancement of optical technology and semiconductor technology, liquid crystal display (LCD) has been widely used in electronic product display devices. LCD monitors have high image quality, small size, light weight, low voltage drive, low power consumption and wide application range. They have been widely used in portable TVs, mobile phones, video recorders, and notebook computers. In consumer electronics or computer products such as desktop monitors and projection TVs, it has become the mainstream of displays.
在液晶顯示器的製作過程中,往往需要在各個製程中藉由滾輪輸送裝置運送玻璃基板。特別是在玻璃基板的清潔製程中,由於製程環境非常地潮濕且易滑,因此需要在滾輪上配置橡膠墊圈以增加滾輪與玻璃基板之間的摩擦力。然而玻璃基板在蝕刻或清洗製程中常會施加特定的化學藥劑,此舉容易讓橡膠墊圈老化且膨脹,因此在製程中常發生橡膠墊圈從滾輪上脫落,而使得玻璃基板直接接觸到滾輪產生損傷,或是因橡膠墊圈脫落而使得滾輪無法帶動玻璃基板的情形發生。In the manufacturing process of a liquid crystal display, it is often necessary to transport a glass substrate by a roller conveyor in each process. Especially in the cleaning process of the glass substrate, since the process environment is very humid and slippery, it is necessary to arrange a rubber gasket on the roller to increase the friction between the roller and the glass substrate. However, the glass substrate often applies a specific chemical in the etching or cleaning process, which easily causes the rubber gasket to age and expand. Therefore, in the process, the rubber gasket often falls off from the roller, and the glass substrate directly contacts the roller to cause damage, or It is caused by the fact that the rubber gasket is detached, so that the roller cannot drive the glass substrate.
本發明提供一種滾輪輸送裝置,其具有不易自滾輪脫落的環形墊圈,而使滾輪輸送裝置具有較長的使用壽命。The invention provides a roller conveying device which has an annular gasket which is not easy to fall off from the roller, and the roller conveying device has a long service life.
本發明的一實施例提出一種滾輪輸送裝置,包括至少一轉動軸桿、多個滾輪以及多個環形墊圈。滾輪套置於轉動軸桿上,且每一滾輪的外圓周表面環設至少一溝槽,其中每一溝槽具有兩相對側壁,此兩側壁具有粗糙表面。環形墊圈分別配置於這些滾輪的溝槽內。An embodiment of the present invention provides a roller conveyor apparatus including at least one rotating shaft, a plurality of rollers, and a plurality of annular gaskets. The roller sleeve is placed on the rotating shaft, and the outer circumferential surface of each roller is provided with at least one groove, wherein each groove has two opposite side walls, and the two side walls have a rough surface. Annular washers are respectively disposed in the grooves of the rollers.
在本發明之一實施例中,上述之每一溝槽的兩側壁具有鋸齒表面。In an embodiment of the invention, the two side walls of each of the grooves have a serrated surface.
在本發明之一實施例中,上述之每一溝槽的兩側壁上的鋸齒朝向該溝槽底部突出。In an embodiment of the invention, the serrations on the two side walls of each of the grooves project toward the bottom of the groove.
在本發明之一實施例中,上述之每一溝槽的兩側壁上的鋸齒為環繞該滾輪的一螺旋圖案。In an embodiment of the invention, the serrations on the two side walls of each of the grooves are a spiral pattern surrounding the roller.
在本發明之一實施例中,上述之每一溝槽的兩側壁上的鋸齒包括環繞該滾輪的多個同心圓圖案。In an embodiment of the invention, the serrations on the two side walls of each of the grooves include a plurality of concentric circular patterns surrounding the roller.
在本發明之一實施例中,上述之每一溝槽的該兩側壁上的鋸齒包括多個角錐體。In an embodiment of the invention, the serrations on the two side walls of each of the grooves comprise a plurality of pyramids.
在本發明之一實施例中,上述之每一溝槽的寬度由底部朝向開口處漸減。In an embodiment of the invention, the width of each of the grooves is gradually reduced from the bottom toward the opening.
在本發明之一實施例中,上述之每一環形墊圈與所對應的溝槽形狀相配。In an embodiment of the invention, each of the annular washers described above is matched to the corresponding groove shape.
在本發明之一實施例中,上述之每一環形墊圈的截面為梯形。In an embodiment of the invention, each of the annular gaskets described above has a trapezoidal cross section.
在本發明之一實施例中,上述之每一溝槽的底部具有由兩側壁向內退縮形成的一緩衝空間。In an embodiment of the invention, the bottom of each of the grooves has a buffer space formed by the inward retraction of the two side walls.
在本發明之一實施例中,上述之緩衝空間的側壁與轉動軸桿的軸心具有一夾角為θ,且0°<θ<90°。In an embodiment of the invention, the sidewall of the buffer space has an angle θ with the axis of the rotating shaft and 0° < θ < 90°.
在本發明之一實施例中,其中一對所述的轉動軸桿相互平行設置,並在該兩個轉動軸桿之間提供一傳送路徑。In an embodiment of the invention, a pair of said rotating shafts are disposed in parallel with each other and a conveying path is provided between the two rotating shafts.
在本發明之一實施例中,其中多個所述的轉動軸桿平行排列於同一平面上,以共同承載並輸送一物件。In an embodiment of the invention, a plurality of said rotating shafts are arranged in parallel on the same plane to jointly carry and transport an object.
基於上述,在本發明的滾輪輸送裝置中,由於滾輪的溝槽側壁具有粗糙表面,因而環形墊圈得以穩固地配置在溝槽內。無論是處於蝕刻或清洗製程中的藥劑浸泡,或是在長時間的使用之下,環形墊圈仍能因這些粗糙表面而嵌合在溝槽中且不易脫落。據此,本發明得以增加環形墊圈與滾輪的溝槽之間的摩擦力而提高環形墊圈的可靠度,並進一步提高滾輪輸送裝置的使用壽命。Based on the above, in the roller conveying device of the present invention, since the groove side wall of the roller has a rough surface, the annular gasket is stably disposed in the groove. Whether the agent is immersed in an etching or cleaning process, or under prolonged use, the annular gasket can be fitted into the groove due to these rough surfaces and is not easily peeled off. Accordingly, the present invention increases the friction between the annular gasket and the groove of the roller to improve the reliability of the annular gasket and further increase the service life of the roller conveyor.
為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.
圖1A是依照本發明一實施例的一種滾輪輸送裝置的俯視圖。圖1B是圖1A的滾輪輸送裝置的側視圖。請同時參考圖1A及圖1B,滾輪輸送裝置100包括多個轉動軸桿110、多個滾輪120以及多個環形墊圈130。在本實施例中,任意一對轉動軸桿110相互平行地排列在同一平面上,並在其間提供一傳送路徑P,以共同承載並輸送物件200。在本實施例中,滾輪輸送裝置100用以輸送玻璃基板,以適用於液晶面板的相關製程,惟本實施例並未對此設限,圖1C是本發明另一實施例的滾輪輸送裝置的俯視圖。圖1D是圖1C的滾輪輸送裝置的側視圖。請參考圖1C及圖1D,與上述實施例不同的是,本實施例的滾輪輸送裝置300是將物件200夾持在轉動軸桿110的滾輪120之間以進行傳送。據此,任何藉由滾輪進行物件輸送者皆可適用於本發明。1A is a top plan view of a roller conveyor in accordance with an embodiment of the present invention. Figure 1B is a side elevational view of the roller conveyor of Figure 1A. Referring to FIG. 1A and FIG. 1B simultaneously, the roller conveyor 100 includes a plurality of rotating shafts 110, a plurality of rollers 120, and a plurality of annular washers 130. In the present embodiment, any pair of rotating shafts 110 are arranged in parallel on the same plane, and a conveying path P is provided therebetween to collectively carry and convey the articles 200. In this embodiment, the roller conveyor device 100 is configured to transport a glass substrate to be applied to a related process of the liquid crystal panel, but the embodiment is not limited thereto. FIG. 1C is a roller conveyor device according to another embodiment of the present invention. Top view. Figure 1D is a side view of the roller conveyor of Figure 1C. Referring to FIG. 1C and FIG. 1D, unlike the above embodiment, the roller conveyor 300 of the present embodiment clamps the article 200 between the rollers 120 of the rotating shaft 110 for transmission. Accordingly, any object transported by a roller can be applied to the present invention.
圖2是圖1A至圖1D的滾輪輸送裝置中滾輪的局部剖面圖。由於滾輪120是沿著轉動軸桿110對稱地配置,故而在此僅繪示滾輪120的局部剖面。請同時參考圖1A及圖2,滾輪120套置於轉動軸桿110上。滾輪120的外圓周表面環設至少一溝槽122,其中溝槽122具有兩相對側壁S1、S2,且這兩側壁S1、S2具有粗糙表面。環形墊圈130則配置在這些滾輪120的溝槽122內。在此,本實施例並未限制轉動軸桿110、滾輪120以及滾輪120上的溝槽122的數量,設計者可依據欲進行輸送的物件200及相關製程條件而予以適當地變更。Figure 2 is a partial cross-sectional view of the roller of the roller conveyor of Figures 1A through 1D. Since the roller 120 is symmetrically disposed along the rotating shaft 110, only a partial cross section of the roller 120 is shown here. Referring to FIG. 1A and FIG. 2 simultaneously, the roller 120 is sleeved on the rotating shaft 110. The outer circumferential surface of the roller 120 is provided with at least one groove 122, wherein the groove 122 has two opposite side walls S1, S2, and the two side walls S1, S2 have rough surfaces. Annular washers 130 are disposed within the grooves 122 of the rollers 120. Here, the present embodiment does not limit the number of the grooves 122 on the rotating shaft 110, the roller 120, and the roller 120. The designer can appropriately change the object 200 to be conveyed and related process conditions.
基於上述,由於溝槽122內的側壁S1、S2具有粗糙表面,藉此得以增加環形墊圈130與溝槽122側壁S1、S2之間的摩擦力,因而使環形墊圈130能穩固地被嵌合於溝槽122內而無畏製程中的藥劑對環形墊圈130所造成的影響,進而間接地提升此滾輪輸送裝置100的使用壽命。Based on the above, since the side walls S1, S2 in the groove 122 have a rough surface, the friction between the annular gasket 130 and the side walls S1, S2 of the groove 122 is increased, thereby allowing the annular gasket 130 to be firmly fitted The effect of the medicament in the groove 122 and the fearless process on the annular gasket 130 indirectly enhances the service life of the roller conveyor 100.
本發明藉由側壁S1、S2的粗糙表面增加環形墊圈130與溝槽122之間的摩擦力,下述將以多個實施例說明溝槽122側壁的粗糙表面的實施方式。The present invention increases the friction between the annular gasket 130 and the groove 122 by the roughened surfaces of the side walls S1, S2, and the embodiment of the rough surface of the side wall of the groove 122 will be described below in various embodiments.
請再參考圖2,在本實施例中,溝槽122的兩側壁S1、S2的表面具有多個鋸齒124,且這些鋸齒124朝向溝槽122的底部突出,藉以形成倒勾(hook)結構,讓配置在溝槽122內的環形墊圈130被鋸齒124所咬合,以增加溝槽122對環形墊圈130的抓取(grab)力道。Referring to FIG. 2 again, in the embodiment, the surfaces of the two sidewalls S1 and S2 of the trench 122 have a plurality of saw teeth 124, and the serrations 124 protrude toward the bottom of the trench 122 to form a hook structure. The annular gasket 130 disposed within the groove 122 is engaged by the serrations 124 to increase the grasping force of the groove 122 against the annular gasket 130.
圖3是圖2的滾輪沿著A-A線的剖面圖。在此為了能清楚瞭解鋸齒124圖案,因此以滾輪120的全剖面進行繪製,另下述圖4及圖5亦以相同方式繪製。請參考圖3,在本實施例中,位於溝槽122的兩側壁S1、S2上的鋸齒124為環繞滾輪120的一螺旋圖案。惟本實施例並未限制這些鋸齒124的外型。圖4與圖5分別繪示本發明另一實施例的滾輪的剖面圖。請參考圖4及圖5,與上述實施例不同的是,在圖4的實施例中,位於溝槽122側壁S1、S2上的鋸齒124為環繞滾輪120的多個同心圓圖案。在圖5的實施例中,位於溝槽122側壁S1、S2上的鋸齒124則為多個角錐體。Figure 3 is a cross-sectional view of the roller of Figure 2 taken along line A-A. Here, in order to clearly understand the pattern of the sawtooth 124, it is drawn in the full section of the roller 120, and the following FIG. 4 and FIG. 5 are also drawn in the same manner. Referring to FIG. 3, in the present embodiment, the serrations 124 on the two side walls S1, S2 of the trench 122 are a spiral pattern surrounding the roller 120. However, this embodiment does not limit the appearance of these serrations 124. 4 and 5 are cross-sectional views showing a roller of another embodiment of the present invention, respectively. 4 and FIG. 5, in contrast to the above embodiment, in the embodiment of FIG. 4, the serrations 124 on the sidewalls S1, S2 of the trench 122 are a plurality of concentric patterns surrounding the roller 120. In the embodiment of Figure 5, the serrations 124 on the side walls S1, S2 of the groove 122 are a plurality of pyramids.
在此,無論是在圖3、圖4或圖5的實施例中的鋸齒圖案,其用意皆為提高環形墊圈130與溝槽122之間的摩擦力,使環形墊圈130得以藉由粗糙表面而牢固地嵌合在溝槽122中且不易脫落,惟本發明並未對粗糙表面的結構外型進行設限,任何能增加環形墊圈130與溝槽122之間摩擦力者皆可適用於本發明。Here, the zigzag pattern in the embodiment of FIG. 3, FIG. 4 or FIG. 5 is intended to improve the friction between the annular gasket 130 and the groove 122, so that the annular gasket 130 can be made by a rough surface. The invention is firmly embedded in the groove 122 and is not easy to fall off. However, the present invention does not limit the structural appearance of the rough surface. Any increase in the friction between the annular gasket 130 and the groove 122 can be applied to the present invention. .
此外,請再參考圖2,為了進一步提高環形墊圈嵌合於溝槽的能力,在本實施例中,滾輪120的溝槽122底部可具有由兩側壁S1、S2向內退縮而形成的一緩衝空間126,且緩衝空間126的側壁與轉動軸桿110的軸心C具有一夾角θ,且0°<θ<90°。此舉的目的即在於讓緩衝空間126大於溝槽122側壁S1、S2處的空間。當環形墊圈130受到製程中的藥劑作用而膨脹,此緩衝空間126可作為容置膨脹後的環形墊圈130之用,以使環形墊圈130不至因為體積膨脹而從溝槽122中脫落。In addition, referring to FIG. 2, in order to further improve the ability of the annular gasket to fit into the groove, in the embodiment, the bottom of the groove 122 of the roller 120 may have a buffer formed by the inward retraction of the two side walls S1 and S2. The space 126 has a side wall of the buffer space 126 having an angle θ with the axis C of the rotating shaft 110, and 0° < θ < 90°. The purpose of this is to make the buffer space 126 larger than the space at the side walls S1, S2 of the trench 122. When the annular gasket 130 is expanded by the action of the chemical in the process, the buffer space 126 can serve as the annular gasket 130 for accommodating the expansion so that the annular gasket 130 does not fall out of the groove 122 due to volume expansion.
另一方面,圖6是本發明又一實施例的滾輪與環形墊圈的組裝示意圖。請參考圖6,此實施例即用以說明另一種讓環形墊圈不易從溝槽脫落的方式。在此,即是藉由溝槽與環形墊圈的截面外型相配合而提高環形墊圈嵌合在溝槽中的能力。舉例而言,將溝槽142設計成其寬度由底部朝向開口處漸減,以形成一內部空間大但開口小的口袋式結構,其截面例如是一梯形。同樣地,環形墊圈150亦配合溝槽142的外型而為梯形。如此一來,便能藉由環形墊圈150與溝槽142外型相配的方式使環形墊圈150能更穩固地配置在溝槽142中。惟本發明並未對環形墊圈150與溝槽142的外型予以設限,任何環形墊圈與溝槽截面的外型能達到上述實施例之目的者皆可適用於本發明。On the other hand, Fig. 6 is a schematic view showing the assembly of the roller and the annular gasket according to still another embodiment of the present invention. Referring to Figure 6, this embodiment is used to illustrate another way of making the annular gasket less likely to fall out of the groove. Here, the ability of the annular gasket to fit into the groove is enhanced by the groove mating with the cross-sectional shape of the annular gasket. For example, the groove 142 is designed such that its width is gradually reduced from the bottom toward the opening to form a pocket structure having a large internal space but a small opening, the cross section of which is, for example, a trapezoid. Similarly, the annular gasket 150 is also trapezoidal in conformity with the shape of the groove 142. In this way, the annular gasket 150 can be more stably disposed in the groove 142 by the annular gasket 150 matching the shape of the groove 142. However, the present invention does not limit the appearance of the annular gasket 150 and the groove 142. Any shape of the annular gasket and the groove cross-section that can achieve the objectives of the above embodiments can be applied to the present invention.
此外,為了讓梯形的環形墊圈150能順利地配置在溝槽142內,因此在本實施例中,滾輪140從溝槽142處區分為第一構件144與第二構件146。於組裝過程中,先讓環形墊圈150配置在第一構件144或第二構件146後,再藉由鎖固件(未繪示)將第一構件144與第二構件146組裝起來,便能完成本實施例的滾輪140及配置在溝槽142中的環形墊圈150。Further, in order to allow the trapezoidal annular gasket 150 to be smoothly disposed in the groove 142, in the present embodiment, the roller 140 is divided from the groove 142 into the first member 144 and the second member 146. In the assembly process, after the annular gasket 150 is disposed on the first member 144 or the second member 146, the first member 144 and the second member 146 are assembled by a fastener (not shown). The roller 140 of the embodiment and the annular gasket 150 disposed in the groove 142.
綜上所述,在本發明的上述實施例中,溝槽藉由側壁上的粗糙表面而增加其與環形墊圈之間的摩擦力。再者,溝槽底部具有由側壁向內退縮而形成的緩衝空間。當環形墊圈膨脹時,此緩衝空間可作為容置環形墊圈之用。據此,環形墊圈不易從滾輪的溝槽中脫落而在使用上具有較佳的可靠度,進而使滾輪輸送裝置具有較長的使用壽命。In summary, in the above embodiment of the invention, the groove increases the friction between it and the annular gasket by the rough surface on the side wall. Furthermore, the bottom of the trench has a buffer space formed by the side walls receding inwardly. This buffer space can be used as a receiving annular gasket when the annular gasket expands. Accordingly, the annular gasket is less likely to fall out of the groove of the roller and has better reliability in use, thereby enabling the roller conveyor to have a longer service life.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
100、300...滾輪輸送裝置100, 300. . . Roller conveyor
110...轉動軸桿110. . . Rotating shaft
120、140...滾輪120, 140. . . Wheel
122、142...溝槽122, 142. . . Trench
124...鋸齒124. . . Sawtooth
126...緩衝空間126. . . Buffer space
130、150...環形墊圈130, 150. . . Ring washer
144...第一構件144. . . First member
146...第二構件146. . . Second member
200...物件200. . . object
A-A...剖面線A-A. . . Section line
C...軸心C. . . Axis
P...傳送路徑P. . . Transfer path
S1、S2...側壁S1, S2. . . Side wall
θ...夾角θ. . . Angle
圖1A是依照本發明一實施例的一種滾輪輸送裝置的俯視圖。1A is a top plan view of a roller conveyor in accordance with an embodiment of the present invention.
圖1B是圖1A的滾輪輸送裝置的側視圖。Figure 1B is a side elevational view of the roller conveyor of Figure 1A.
圖1C是本發明另一實施例的滾輪輸送裝置的俯視圖。Fig. 1C is a plan view of a roller conveying device according to another embodiment of the present invention.
圖1D是圖1C的滾輪輸送裝置的側視圖。Figure 1D is a side view of the roller conveyor of Figure 1C.
圖2是圖1A至圖1D的滾輪輸送裝置中滾輪的局部剖面圖。Figure 2 is a partial cross-sectional view of the roller of the roller conveyor of Figures 1A through 1D.
圖3是圖2的滾輪沿著A-A線的剖面圖。Figure 3 is a cross-sectional view of the roller of Figure 2 taken along line A-A.
圖4與圖5分別繪示本發明另一實施例的滾輪的剖面圖。4 and 5 are cross-sectional views showing a roller of another embodiment of the present invention, respectively.
圖6是本發明又一實施例的滾輪與環形墊圈的組裝示意圖。Fig. 6 is a schematic view showing the assembly of a roller and an annular gasket according to still another embodiment of the present invention.
120...滾輪120. . . Wheel
122...溝槽122. . . Trench
124...鋸齒124. . . Sawtooth
126...緩衝空間126. . . Buffer space
130...環形墊圈130. . . Ring washer
A-A...剖面線A-A. . . Section line
C...軸心C. . . Axis
S1、S2...側壁S1, S2. . . Side wall
θ...夾角θ. . . Angle
Claims (13)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98134794A TWI423375B (en) | 2009-10-14 | 2009-10-14 | Roller conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98134794A TWI423375B (en) | 2009-10-14 | 2009-10-14 | Roller conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201113971A TW201113971A (en) | 2011-04-16 |
| TWI423375B true TWI423375B (en) | 2014-01-11 |
Family
ID=44909868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98134794A TWI423375B (en) | 2009-10-14 | 2009-10-14 | Roller conveying device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI423375B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4483434A (en) * | 1981-05-12 | 1984-11-20 | Nippon Kogaku K. K. | Apparatus for conveying semiconductor substrates |
| US5609236A (en) * | 1995-03-21 | 1997-03-11 | P.E.E.M. Forderanlagen Gesellschaft m.b.H. | Roller conveying device |
| US20040007021A1 (en) * | 2002-07-11 | 2004-01-15 | Masafumi Igo | Covered roller for conveying glass |
| US20070213188A1 (en) * | 2006-03-10 | 2007-09-13 | Lin Yao | Impression wheel assembly for transferring glass substrate, roller unit for impression wheel assembly |
| US7431142B2 (en) * | 2005-02-21 | 2008-10-07 | Ferag Ag | Conveyor system with conveyor elements running along a guide-way on rollers and method for the manufacturing of the rollers |
-
2009
- 2009-10-14 TW TW98134794A patent/TWI423375B/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4483434A (en) * | 1981-05-12 | 1984-11-20 | Nippon Kogaku K. K. | Apparatus for conveying semiconductor substrates |
| US5609236A (en) * | 1995-03-21 | 1997-03-11 | P.E.E.M. Forderanlagen Gesellschaft m.b.H. | Roller conveying device |
| US20040007021A1 (en) * | 2002-07-11 | 2004-01-15 | Masafumi Igo | Covered roller for conveying glass |
| US7431142B2 (en) * | 2005-02-21 | 2008-10-07 | Ferag Ag | Conveyor system with conveyor elements running along a guide-way on rollers and method for the manufacturing of the rollers |
| US20070213188A1 (en) * | 2006-03-10 | 2007-09-13 | Lin Yao | Impression wheel assembly for transferring glass substrate, roller unit for impression wheel assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201113971A (en) | 2011-04-16 |
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