TWI416192B - Camera lens and method of manufacturing diaphragm of camera lens - Google Patents
Camera lens and method of manufacturing diaphragm of camera lens Download PDFInfo
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- TWI416192B TWI416192B TW100104264A TW100104264A TWI416192B TW I416192 B TWI416192 B TW I416192B TW 100104264 A TW100104264 A TW 100104264A TW 100104264 A TW100104264 A TW 100104264A TW I416192 B TWI416192 B TW I416192B
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 238000007373 indentation Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 210000003298 dental enamel Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
Description
本發明係關於一種相機模組與製造該相機模組之一不透光層的方法,尤指一鏡頭模組之一安裝方向指示標誌與其製造方法。The invention relates to a camera module and a method for manufacturing an opaque layer of the camera module, in particular to a mounting direction indicator of a lens module and a manufacturing method thereof.
相機包括影像感測器及鏡頭模組。影像感測器係由複數個感測單元所組成的,每個感測單元包括用來收集並轉換入射光成為電子訊號的一光敏二極體(photo diode)。影像感測器例如係形成於一矽基板上。鏡頭模組具有光圈及透鏡組,光圈係位於透鏡上方,具有一圓形開孔以讓入射光穿過。透鏡組具有一個或多個透鏡,可聚焦穿過光圈的入射光到該光敏二極體上。The camera includes an image sensor and a lens module. The image sensor is composed of a plurality of sensing units, each of which includes a photo diode for collecting and converting incident light into an electronic signal. The image sensor is formed, for example, on a substrate. The lens module has an aperture and a lens group, and the aperture is located above the lens and has a circular opening for the incident light to pass through. The lens group has one or more lenses that focus the incident light passing through the aperture onto the photodiode.
在組裝相機時,需經由一預定的安裝方向將鏡頭模組組裝到具影像感測器的矽基板上,然而,鏡頭模組與矽基板已經愈來愈小,尤其是晶圓級的相機,使得組裝難度增高。When assembling the camera, the lens module needs to be assembled to the 矽 substrate with the image sensor through a predetermined mounting direction. However, the lens module and the 矽 substrate have become smaller and smaller, especially the wafer level camera. This makes the assembly more difficult.
因此,本發明之一目的在於提供一相機模組之一安裝方向指示標誌與其製造方法。Accordingly, it is an object of the present invention to provide a mounting direction indicator of a camera module and a method of manufacturing the same.
依據本發明之一第一實施例,其係提供一種鏡頭模組,該鏡頭模組包含有一透鏡、一側壁結構以及一不透光層。該側壁結構係設置於該透鏡之四周而環繞著該透鏡。該不透光層係設置於該透鏡與該側壁結構之上方,其中該不透光層於該透鏡的正上方具有一第一缺口以使得一光線得以入射至該透鏡,以及該不透光層於該側壁結構之一特定位置的正上方具有一第二缺口。According to a first embodiment of the present invention, a lens module is provided, the lens module comprising a lens, a sidewall structure and an opaque layer. The sidewall structure is disposed around the lens to surround the lens. The opaque layer is disposed above the lens and the sidewall structure, wherein the opaque layer has a first gap directly above the lens to allow a light to be incident on the lens, and the opaque layer There is a second gap directly above a specific position of the side wall structure.
依據本發明之一第一實施例,其係提供一種製造一透鏡模組之一不透光層的方法。該方法包含有:在一透明基板上形成一不透光層;形成一光阻層於該不透光層上,其中該光組層於一第一位置與一第二位置各具有一缺口;蝕刻該不透光層上未被該光阻層所覆蓋的區域;以及去除該光阻層以使得對應該第一位置的該不透光層具有一第一缺口,以及對應該第二位置的該不透光層具有一第二缺口。According to a first embodiment of the present invention, there is provided a method of fabricating an opaque layer of a lens module. The method includes: forming a opaque layer on a transparent substrate; forming a photoresist layer on the opaque layer, wherein the photonic layer has a notch in a first position and a second position; Etching the region of the opaque layer that is not covered by the photoresist layer; and removing the photoresist layer such that the opaque layer corresponding to the first location has a first gap and corresponding to the second location The opaque layer has a second gap.
在說明書及後續的申請專利範圍當中使用了某些詞彙來指稱特定的元件。所屬領域中具有通常知識者應可理解,硬體製造商可能會用不同的名詞來稱呼同一個元件。本說明書及後續的申請專利範圍並不以名稱的差異來作為區分元件的方式,而是以元件在功能上的差異來作為區分的準則。在通篇說明書及後續的請求項當中所提及的「包含」係為一開放式的用語,故應解釋成「包含但不限定於」。此外,「耦接」一詞在此係包含任何直接及間接的電氣連接手段,因此,若文中描述一第一裝置耦接於一第二裝置,則代表該第一裝置可直接電氣連接於該第二裝置,或者透過其他裝置或連接手段間接地電氣連接至該第二裝置。Certain terms are used throughout the description and following claims to refer to particular elements. Those of ordinary skill in the art should understand that a hardware manufacturer may refer to the same component by a different noun. The scope of this specification and the subsequent patent application do not use the difference of the names as the means for distinguishing the elements, but the difference in function of the elements as the criterion for distinguishing. The term "including" as used throughout the specification and subsequent claims is an open term and should be interpreted as "including but not limited to". In addition, the term "coupled" is used herein to include any direct and indirect electrical connection means. Therefore, if a first device is coupled to a second device, it means that the first device can be directly electrically connected to the device. The second device is indirectly electrically connected to the second device through other devices or connection means.
請參考第1圖與第2圖。第1圖所示係依據本發明一種相機100所提供之一實施例對角切線剖面示意圖。第2圖所示係該較佳實施例相機100之俯視圖,其中該對角切線以虛線202表示。相機100包含有鏡頭模組及影像感測器1102。鏡頭模組包括一不透光層102、一透鏡104及一側壁結構108。影像感測器1102係形成於矽質基板110上。影像感測器1102會包含有光敏二極體、半導體電路以及其他必須的功能性電路。此外矽質基板110可另包含有複數個接腳1106。該光敏二極體用來將入射光轉換為電流訊號,而半導體電路係用來接收來自該光敏二極體的電流訊號,而複數個接腳1106用來將電流訊號傳送至下一級電路,例如一處理電路。Please refer to Figure 1 and Figure 2. 1 is a schematic cross-sectional view of an embodiment of a camera 100 in accordance with the present invention. 2 is a top plan view of the camera 100 of the preferred embodiment, wherein the diagonal tangent is indicated by dashed line 202. The camera 100 includes a lens module and an image sensor 1102. The lens module includes an opaque layer 102, a lens 104, and a sidewall structure 108. The image sensor 1102 is formed on the enamel substrate 110. The image sensor 1102 will include a photodiode, a semiconductor circuit, and other necessary functional circuitry. In addition, the enamel substrate 110 may further include a plurality of pins 1106. The photodiode is used to convert incident light into a current signal, and the semiconductor circuit is used to receive the current signal from the photodiode, and the plurality of pins 1106 are used to transmit the current signal to the next stage circuit, for example A processing circuit.
在鏡頭模組中,側壁結構108係設置於透鏡104之四周而環繞著透鏡104,且側壁結構108係由一不透光物質所構成,用以支撐透鏡104,並隔絕散射光。不透光層102係設置於透鏡104與側壁結構108之上方,其中不透光層102於透鏡104的正上方具有一第一缺口以1022使得一光線得以入射至透鏡104,以作為光圈(diaphragm)。值得注意的是,不透光層102於側壁結構108之一特定位置的正上方具有一第二缺口1024。In the lens module, the sidewall structure 108 is disposed around the lens 104 to surround the lens 104, and the sidewall structure 108 is formed of an opaque substance for supporting the lens 104 and isolating the scattered light. The opaque layer 102 is disposed above the lens 104 and the sidewall structure 108, wherein the opaque layer 102 has a first notch directly above the lens 104 to 1022 such that a light is incident on the lens 104 as a diaphragm (diaphragm) ). It should be noted that the opaque layer 102 has a second notch 1024 directly above a specific position of one of the sidewall structures 108.
在此一較佳實施例中,相機100之一俯視外觀大致上為一正方形,以及側壁結構108的該特定位置(亦即第二缺口1024)係對應該正方形的一直角處,如第2圖所示。更進一步來說,在組裝相機時,為辨識鏡頭模組與矽基板的預定組裝方向,由不透光層102所構成的光圈具有一對準標記(亦即第二缺口1024)。換句話說,可視第二缺口1024為相機100之一安裝方向指示標誌。In this preferred embodiment, one of the cameras 100 has a top view that is substantially square, and the particular position of the sidewall structure 108 (ie, the second notch 1024) corresponds to a square at a right angle, as shown in FIG. Shown. Furthermore, in assembling the camera, in order to identify the predetermined assembly direction of the lens module and the 矽 substrate, the aperture formed by the opaque layer 102 has an alignment mark (ie, a second notch 1024). In other words, the visible second notch 1024 is a direction indicator for one of the cameras 100.
第3圖係依據本發明一實施例的晶圓級透鏡的部分俯視圖。晶圓級透鏡包括排成陣列的透鏡模組,每一個透鏡模組的第二缺口 1024指向其左上角的位置。Figure 3 is a partial plan view of a wafer level lens in accordance with an embodiment of the present invention. The wafer level lens comprises an array of lens modules, and a second gap of each lens module 1024 points to the position in its upper left corner.
請注意,本發明並未限制不透光層102的材質為一特定材質,任何不透光的材料均為屬於本發明之範疇所在。在此一較佳實施例中,不透光層102係由鉻金屬所構成。此外,本發明並未限制第二缺口1024的形狀。在此一較佳實施例中,第二缺口1024的形狀係類似三角形,其亦可以係圓形或方形。Please note that the present invention does not limit the material of the opaque layer 102 to a specific material, and any opaque material belongs to the scope of the present invention. In this preferred embodiment, the opaque layer 102 is comprised of chrome metal. Moreover, the present invention does not limit the shape of the second notch 1024. In this preferred embodiment, the second notch 1024 is shaped like a triangle, which may also be circular or square.
請參考第4圖與第5A-5D圖。第4圖係本發明一種製造一透鏡模組之一不透光層的方法400之一實施例流呈圖。為讓本發明更顯而易懂,下文特舉實施例配合所附圖式(第1圖)作詳細說明,但所提供之實施例並不用以限制本發明所涵蓋的範圍。倘若大體上可達到相同的結果,並不需要一定照第4圖所示之流程中的步驟順序來進行,且第4圖所示之步驟不一定要連續進行,亦即其他步驟亦可插入其中。方法400包含有下步驟:步驟402:在一透明基板502上形成一不透光層102(第5A圖);步驟404:形成一光阻層508(第5B圖)於不透光層102上,光組層508於一第一位置504與一第二位置506具有缺口;步驟406:蝕刻不透光層102上未被光阻層508所覆蓋的區域(第5C圖);以及步驟408:去除光阻層508以使得對應第一位置504的不透光層102具有第一缺口1022,以及對應第二位置506的不透光層102具有第二缺口1024(第5D圖)。Please refer to Figure 4 and Figure 5A-5D. 4 is a flow diagram of an embodiment of a method 400 of fabricating an opaque layer of a lens module of the present invention. The present invention is described in detail with reference to the accompanying drawings (FIG. 1), but the embodiments are not intended to limit the scope of the invention. If the same result can be substantially achieved, it is not necessary to perform the sequence of steps in the process shown in FIG. 4, and the steps shown in FIG. 4 do not have to be performed continuously, that is, other steps may be inserted therein. . The method 400 includes the following steps: Step 402: forming an opaque layer 102 on a transparent substrate 502 (FIG. 5A); Step 404: Forming a photoresist layer 508 (FIG. 5B) on the opaque layer 102. The light group layer 508 has a gap at a first location 504 and a second location 506; Step 406: etching the region of the opaque layer 102 that is not covered by the photoresist layer 508 (FIG. 5C); and step 408: The photoresist layer 508 is removed such that the opaque layer 102 corresponding to the first location 504 has a first gap 1022, and the opaque layer 102 corresponding to the second location 506 has a second gap 1024 (FIG. 5D).
請注意,第5A-5D圖係製造第2圖所示的鏡頭模組的不透光層102對應對角切線202的剖面結構示意圖。第5A圖係於一透明基板502上形成一面積相當於鏡頭模組之不透光層102的該剖面結構示意圖。第5B圖係於不透光層102上形成一光阻層508的該剖面結構示意圖。第5C圖係於不透光層102上未被光阻層508所覆蓋的區域被蝕刻後的該剖面結構示意圖。第5D圖係於去除光阻層508後的不透光層102的該剖面結構示意圖。從第2圖可以得知,鏡頭模組之該俯視外觀大致上為一方形,為了方便辨識,此較佳實施例的第二位置506係對應該方形的一直角處。Please note that the 5A-5D drawings are schematic cross-sectional structures of the opaque layer 102 of the lens module shown in FIG. 2 corresponding to the diagonal tangent 202. FIG. 5A is a schematic cross-sectional view showing a structure corresponding to the opaque layer 102 of the lens module on a transparent substrate 502. FIG. 5B is a schematic cross-sectional view showing the formation of a photoresist layer 508 on the opaque layer 102. FIG. 5C is a schematic cross-sectional view showing the region of the opaque layer 102 not covered by the photoresist layer 508 being etched. FIG. 5D is a schematic cross-sectional view of the opaque layer 102 after the photoresist layer 508 is removed. As can be seen from FIG. 2, the top view of the lens module is substantially square. For convenience of identification, the second position 506 of the preferred embodiment corresponds to a square right angle.
綜上所述,上述方法400的步驟402-408係可以透過一標準的半導體製程來加以實現。換句話說,因此利用本發明的方法400所製造的安裝方向指示標誌不僅可以提高其生產效率,且其圖形亦可維持高度的一致性。此外,由於該安裝方向指示標誌係以光罩的方式來製作,因此該安裝方向指示標誌並不容易損壞或模糊。另一方面,由於本發明的不透光層102係可以透過一標準的半導體製程來製造,因此本發明的方法400並不需要增加額外的光罩成本。換句話說,利用本發明的方法400所製造出來的安裝方向指示標誌並不會增加原本不透光層102的製作成本。In summary, steps 402-408 of the above method 400 can be implemented by a standard semiconductor process. In other words, therefore, the mounting direction indicator manufactured by the method 400 of the present invention can not only improve its production efficiency, but also maintain a high degree of consistency in its pattern. Further, since the mounting direction indicator is made in the manner of a reticle, the mounting direction indicator is not easily damaged or blurred. On the other hand, since the opaque layer 102 of the present invention can be fabricated through a standard semiconductor process, the method 400 of the present invention does not require additional mask costs. In other words, the mounting direction indicator produced by the method 400 of the present invention does not increase the manufacturing cost of the otherwise opaque layer 102.
以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.
100...相機100. . . camera
102...不透光層102. . . Opaque layer
104...透鏡104. . . lens
108...側壁結構108. . . Side wall structure
110...矽質基板110. . . Tantalum substrate
202...對角切線202. . . Diagonal tangent
502...透明基板502. . . Transparent substrate
504...第一位置504. . . First position
506...第二位置506. . . Second position
508...光阻層508. . . Photoresist layer
1102...影像感測器1102. . . Image sensor
1106...複數個接腳1106. . . Multiple pins
1022‧‧‧第一缺口1022‧‧‧ first gap
1024‧‧‧第二缺口1024‧‧‧ second gap
第1圖係本發明一種相機所提供之一實施例之一剖面示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic cross-sectional view showing one embodiment of a camera provided by the present invention.
第2圖係第1圖所示的相機之一俯視圖。Fig. 2 is a top plan view of the camera shown in Fig. 1.
第3圖係本發明一實施例的晶圓級透鏡的部分俯視圖。Figure 3 is a partial plan view of a wafer level lens in accordance with an embodiment of the present invention.
第4圖係本發明一種製造一透鏡模組之一不透光層的方法之一實施例流呈圖。Figure 4 is a flow diagram showing an embodiment of a method of fabricating an opaque layer of a lens module of the present invention.
第5A圖於一透明基板上形成一不透光層的一剖面結構示意圖。FIG. 5A is a schematic cross-sectional view showing the formation of an opaque layer on a transparent substrate.
第5B圖係於該不透光層上形成一光阻層的一剖面結構示意圖。FIG. 5B is a schematic cross-sectional view showing the formation of a photoresist layer on the opaque layer.
第5C圖係於該不透光層上未被該光阻層所覆蓋的區域被蝕刻後的一剖面結構示意圖。FIG. 5C is a schematic cross-sectional view of the opaque layer after the region not covered by the photoresist layer is etched.
第5D圖係於去除該光阻層後的該不透光層的一剖面結構示意圖。FIG. 5D is a schematic cross-sectional view of the opaque layer after removing the photoresist layer.
100...相機模組100. . . Camera module
102...不透光層102. . . Opaque layer
104...透鏡104. . . lens
108...側壁結構108. . . Side wall structure
110...矽質基板110. . . Tantalum substrate
1102...影像感測器1102. . . Image sensor
1106...複數個接腳1106. . . Multiple pins
1022...第一缺口1022. . . First gap
1024...第二缺口1024. . . Second gap
Claims (9)
Priority Applications (1)
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| TW100104264A TWI416192B (en) | 2011-02-09 | 2011-02-09 | Camera lens and method of manufacturing diaphragm of camera lens |
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| TW100104264A TWI416192B (en) | 2011-02-09 | 2011-02-09 | Camera lens and method of manufacturing diaphragm of camera lens |
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| TW201234067A TW201234067A (en) | 2012-08-16 |
| TWI416192B true TWI416192B (en) | 2013-11-21 |
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| TWM368073U (en) * | 2009-04-15 | 2009-11-01 | E Pin Optical Industry Co Ltd | Rectangular stacked glass lens module with alignment fixture |
| TW201102683A (en) * | 2009-07-10 | 2011-01-16 | Chi Mei Comm Systems Inc | Color filter |
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| TW201234067A (en) | 2012-08-16 |
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