TWI412095B - Solder ball presses - Google Patents
Solder ball presses Download PDFInfo
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- TWI412095B TWI412095B TW098140374A TW98140374A TWI412095B TW I412095 B TWI412095 B TW I412095B TW 098140374 A TW098140374 A TW 098140374A TW 98140374 A TW98140374 A TW 98140374A TW I412095 B TWI412095 B TW I412095B
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- ball supply
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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- H10W72/0112—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H10W72/01225—
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
本發明係關於用以藉由印刷法在半導體基板之電極上形成焊料之印刷裝置,尤其關於使用焊球進行印刷之焊球印刷機。The present invention relates to a printing apparatus for forming solder on an electrode of a semiconductor substrate by a printing method, and more particularly to a solder ball printing machine that performs printing using a solder ball.
在以往之焊球印刷機中,如專利文獻1所記載般,有對遮罩面上供給焊球之焊球供給部,和為了將被供給至遮罩面上之焊球從設置在遮罩上之開口部推入至基板面上,一面將設置在振入治具之多數線狀構件推壓至遮罩面一面在水平方向移動之構成的印刷裝置。In the conventional solder ball printing machine, as described in Patent Document 1, there is a solder ball supply unit that supplies a solder ball to the mask surface, and a solder ball that is supplied to the mask surface is provided in the mask. A printing device having a configuration in which the upper opening portion is pushed onto the substrate surface while the plurality of linear members provided in the vibrating jig are pressed against the mask surface to move in the horizontal direction.
再者,如專利文獻2記載般,對於使壓擠頭旋轉一面水平移動而將焊球撒入至遮罩開口部者,揭示的有自設置在壓擠頭上部之計量部將特定量之焊球供給至壓擠頭之旋轉桿柄部,並自旋轉桿柄將焊球供給至遮罩面上者。Further, as described in Patent Document 2, when the pressing head is horizontally moved and the solder ball is sprinkled into the opening of the mask, a specific amount of welding is disclosed from the measuring portion provided at the upper portion of the pressing head. The ball is supplied to the rotating lever handle of the pressing head, and the solder ball is supplied to the mask surface from the rotating lever.
[專利文獻1]日本特開2005-101502號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-101502
[專利文獻2]日本特開2008-142775號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2008-142775
在上述專利文獻1之構成中,當將遮罩載置在工作台上時,在遮罩之搬入側之入口設置有焊球供給裝置,一面自供給裝置對遮罩面供給焊球,一面在工作台上使遮罩移 動。依此,可以將焊球均勻分散配置在遮罩面上。之後。使振入治具水平移動而對遮罩開口部供給焊球。在該方式,於在遮罩上分散配置焊球時,由於遮罩之移動側之變動或遮罩停止時之振動,分散配置之焊球有產生偏置之可能性。再者,於將遮罩設置在印刷機之前因供給焊球,故產生每一次印刷,則必須使遮罩移動,有產距時間延長之課題。In the configuration of Patent Document 1, when the mask is placed on the table, the solder ball supply device is provided at the entrance of the cover side, and the solder ball is supplied to the mask surface from the supply device. Move the mask on the workbench move. Accordingly, the solder balls can be uniformly dispersed and disposed on the mask surface. after that. The vibrating jig is horizontally moved to supply a solder ball to the opening of the mask. In this manner, when the solder balls are dispersedly disposed on the mask, the solder balls scattered and disposed may be biased due to fluctuations in the moving side of the mask or vibrations when the mask is stopped. Further, since the solder ball is supplied before the mask is placed in the printing machine, each time the printing is performed, the mask must be moved, and the production time is prolonged.
再者,如引用文獻2般,自旋轉桿柄部將焊球供給至遮罩面之方式,為了隨著壓擠頭之旋轉使焊球分散配置在遮罩面,焊球不一定均勻分散配置而產生印刷缺陷,有必須要有修理工程之課題。Furthermore, as described in the literature 2, the solder balls are supplied to the mask surface from the shank of the rotating rod, and the solder balls are not necessarily uniformly dispersed in order to disperse the solder balls on the mask surface as the pressing head rotates. In the case of printing defects, there is a need to have a repair project.
在此,本發明之目的在於提供可以解決上述課題,謀求裝置之小型化,並且精度佳印刷焊球之焊球印刷機。Accordingly, an object of the present invention is to provide a solder ball printing machine which can solve the above problems and which is capable of miniaturizing the device and which is excellent in printing solder balls.
為了達成上述目的,提供一種將事先印刷焊劑之印刷基板或晶圓等工件固定於印刷台,以工件之電極圖案與遮罩之電極圖案一致之方式,利用上下兩視野攝影機辨識定位印刷台,印刷台上之工件上升成與遮罩接觸,且在工件之電極圖案或電極墊上自焊球供給頭將焊球供給至遮罩面,通過遮罩執行轉印、印刷的焊球印刷機,其特徵為:焊球供給頭之構成為設置有貯留焊球之焊球貯留部,和用以在焊球貯留部之下方將特定量之焊球供給至遮罩面之焊球供給部,和夾著焊球供給部在焊球供給頭之移動方向將焊球壓入遮罩面之開口部,並且為了刮取多餘之焊球,在與遮罩面接觸之側以半螺旋狀之多數線材形成的焊球填充構件。In order to achieve the above object, a workpiece such as a printed circuit board or a wafer in which a flux is printed in advance is fixed to a printing table, and the electrode pattern of the workpiece is aligned with the electrode pattern of the mask, and the positioning and printing table is recognized by the upper and lower two-view cameras, and printing is performed. The workpiece on the stage rises into contact with the mask, and the solder ball is supplied to the mask surface from the solder ball supply head on the electrode pattern or the electrode pad of the workpiece, and the solder ball printing machine that performs transfer and printing through the mask is characterized. The solder ball supply head is configured by a solder ball storage portion provided with a storage solder ball, and a solder ball supply portion for supplying a specific amount of solder balls to the mask surface under the solder ball storage portion, and sandwiching The solder ball supply unit presses the solder ball into the opening of the mask surface in the moving direction of the solder ball supply head, and is formed by a plurality of wires of a semi-helical shape on the side in contact with the mask surface in order to scrape the excess solder ball. Solder ball filling member.
藉由上述構成,可以將焊球均勻供給至遮罩上,並且焊球之供給亦只看焊球貯留部之焊球殘量交換焊球貯留部或從外部對焊球貯留部供給即可,有無需因焊球過多不足而中斷作業等之效果。再者,因夾著焊球供給部配置有由半螺旋線材所構成之焊球填充構件,故可以具有在半螺旋之空間對焊球施加旋轉力,將焊球均勻分散,並且在遮罩開口部亦可以流暢填充之效果。According to the above configuration, the solder ball can be uniformly supplied to the mask, and the supply of the solder ball can be obtained only by the solder ball remaining portion of the solder ball storage portion being exchanged with the solder ball storage portion or externally supplied to the solder ball storage portion. There is no need to interrupt the operation due to insufficient solder balls. Further, since the solder ball filling member composed of the semi-spiral wire is disposed between the solder ball supply portions, it is possible to apply a rotational force to the solder balls in the space of the half spiral, to uniformly disperse the solder balls, and to open the solder mask. The department can also smoothly fill the effect.
使用以下圖面說明本發明。第1圖表示本發明之焊球印刷機用焊球供給頭之一例。The invention is illustrated using the following figures. Fig. 1 shows an example of a solder ball supply head for a solder ball printer of the present invention.
焊球供給頭3係在供給頭移動台2安裝有用以使供給頭在上下方向移動之供給頭驅動馬達4。供給頭移動台2係藉由設置在裝置本體側之馬達2g和由滾珠螺桿2b所構成之水平方向移動機構在水平方向移動。在供給頭移動台2設置有安裝焊球貯留部60之焊球供給台61。配置成用以供給焊球至遮罩面之焊球供給部62相對於焊球貯留部60位於下側。焊球貯留部60安裝成可以對焊球供給台61旋轉。並且,焊球貯留部60可以在上下移動,當將焊球24供給至焊球供給部62之時,移動至下方(焊球供給部側)而使焊球自構成焊球貯留部60之容器(注入器)內抖落。再者,焊球供給台61成為可以在焊球供給部62之長邊方向移動,一面使容器移動,一面將焊球24供給至焊球供給部62。焊球貯留部之詳細如後述。The solder ball supply head 3 is provided with a supply head drive motor 4 for moving the supply head in the vertical direction on the supply head moving table 2. The supply head moving table 2 is moved in the horizontal direction by a motor 2g provided on the apparatus main body side and a horizontal direction moving mechanism constituted by the ball screw 2b. A solder ball supply stage 61 on which the solder ball storage unit 60 is mounted is provided in the supply head moving table 2. The solder ball supply portion 62 configured to supply the solder ball to the mask surface is located on the lower side with respect to the solder ball storage portion 60. The solder ball storage portion 60 is mounted to be rotatable to the solder ball supply table 61. Further, the solder ball storage portion 60 can be moved up and down. When the solder ball 24 is supplied to the solder ball supply portion 62, the solder ball 24 is moved downward (on the solder ball supply portion side) to cause the solder ball to be self-contained from the container constituting the solder ball storage portion 60. Shake off inside (injector). In addition, the solder ball supply stage 61 can supply the solder ball 24 to the solder ball supply part 62 while moving the container while moving in the longitudinal direction of the solder ball supply part 62. The details of the solder ball storage portion will be described later.
焊球供給部62安裝於蓋64,在相當於蓋64之焊球供給部62之上部之處,以可以供給焊球24之方式,對應於焊球供給部62之長邊方向設置開口部。在蓋64設置有用以安裝焊球供給部62及焊球填充構件63之安裝框69。並且,設置有水平高頻加振焊球填充構件63或焊球供給部62的加振機5。The solder ball supply unit 62 is attached to the cover 64, and an opening portion is provided corresponding to the longitudinal direction of the solder ball supply unit 62 so that the solder ball 24 can be supplied to the upper portion of the solder ball supply unit 62 corresponding to the cover 64. A mounting frame 69 for mounting the solder ball supply portion 62 and the solder ball filling member 63 is provided on the cover 64. Further, a vibration machine 5 that horizontally vibrates the ball filling member 63 or the ball supply unit 62 is provided.
再者,蓋64安裝於加振框70,在加振框70之上部設置有滑件67。該滑件67被設置在直線導軌67R,且該直線導軌67R設置在供給頭安裝框71,且該供給頭安裝框71設置在加振框上部。在加振框70之一端部設置有凸輪66,藉由設置在供給頭安裝框之凸輪驅動馬達68而旋轉驅動,依此成為以較先前所述之加振機之頻率低之頻率在水平方向(直線導軌之方向)搖動加振框70之構成。如此一來,藉由設置兩個不同之加振手段,使自焊球供給部供給焊球至遮罩面之加振頻率之選擇範圍變寬。供給頭安裝框71係藉由屬於供給頭驅動手段之馬達4可以在上下移動。並且,在此,雖然記載成藉由馬達4執行供給頭安裝框71之上下驅動,但是即使代替馬達4使用空壓汽缸亦可。Further, the cover 64 is attached to the vibration frame 70, and a slider 67 is provided on the upper portion of the vibration frame 70. The slider 67 is provided on the linear guide 67R, and the linear guide 67R is provided in the supply head mounting frame 71, and the supply head mounting frame 71 is provided on the upper portion of the vibration frame. A cam 66 is provided at one end of the vibration frame 70, and is rotationally driven by a cam drive motor 68 provided in the supply head mounting frame, thereby becoming a horizontal direction at a frequency lower than the frequency of the previously described vibration machine. (The direction of the linear guide) Shakes the configuration of the vibration frame 70. In this way, by providing two different vibration means, the selection range of the vibration frequency for supplying the solder ball from the solder ball supply portion to the mask surface is widened. The supply head mounting frame 71 is movable up and down by the motor 4 belonging to the supply head driving means. Further, here, it is described that the feed head mounting frame 71 is driven up and down by the motor 4, but a pneumatic cylinder may be used instead of the motor 4.
第2圖表示用以印刷焊球之焊球印刷機之概略構成。第2圖(a)表示執行遮罩和基板之定位的狀態,第2圖(b)表示在基板上印刷焊球之狀態。Fig. 2 shows a schematic configuration of a solder ball printing machine for printing solder balls. Fig. 2(a) shows a state in which the positioning of the mask and the substrate is performed, and Fig. 2(b) shows a state in which the solder balls are printed on the substrate.
焊球印刷機1以可以在上下移動之方式設置有具備驅動部11之印刷台10。在該印刷台10上載置基板21,在遮罩20之面和基板21之面使用攝影機15,驅動無圖示之設置在印刷台10之下側之水平方向移動機構的XY台而執行定位。之後,使定位用之攝影機15退避,如第2圖(b)所示般,使印刷台10上昇,並使設置在工作台上部之遮罩20面接觸於基板21之面,而驅動供給頭上下驅動機構4,使焊球供給頭3上下移動而使焊球填充構件63接觸於遮罩面。然後,藉由驅動供給頭驅動部2g使滾珠螺桿2b旋轉,並使焊球供給頭3在水平方向(箭頭方向)移動。於焊球供給頭3移動時,藉由加振器65使焊球供給部62於水平方向(供給頭移動方向)振動,並且凸輪66也驅動凸輪軸驅動馬達68而旋轉,依此在水平方向振動,搖出焊球供給部62內之焊球24。並且,雖然對焊球之搖出係以同時驅動加振器和凸輪而予以說明,但是即使藉由驅動任一方而執行焊球之搖出亦可。並且,與焊球之搖出同時,藉由夾著焊球供給部62而設置在焊球供給頭3之移動方向之焊球填充構件63,將焊球填充於設置在遮罩20之開口部。再者,在本裝置於攝影機移動框設置有用以清掃遮罩背面之清掃機構45,與攝影機15相同,一面在水平方向移動,一面進行遮罩清掃。The solder ball printing machine 1 is provided with a printing table 10 including a driving unit 11 so as to be movable up and down. The substrate 21 is placed on the printing table 10, and the camera 15 is used on the surface of the mask 20 and the surface of the substrate 21, and the XY table of the horizontal movement mechanism provided on the lower side of the printing table 10 (not shown) is driven to perform positioning. Thereafter, the camera 15 for positioning is retracted, and as shown in FIG. 2(b), the printing table 10 is raised, and the surface of the mask 20 provided on the upper portion of the table is brought into contact with the surface of the substrate 21 to drive the supply head. The upper and lower drive mechanism 4 moves the solder ball supply head 3 up and down to bring the solder ball filling member 63 into contact with the mask surface. Then, the ball screw 2b is rotated by driving the supply head driving portion 2g, and the solder ball supply head 3 is moved in the horizontal direction (arrow direction). When the solder ball supply head 3 moves, the solder ball supply portion 62 vibrates in the horizontal direction (the feed head moving direction) by the vibrator 65, and the cam 66 also drives the cam shaft drive motor 68 to rotate, thereby being horizontally oriented. The ball 24 is shaken out of the solder ball supply portion 62. Further, although the vibration of the solder ball is simultaneously driven to drive the vibrator and the cam, the solder ball may be swung out by either of the driving. At the same time as the solder ball is shaken, the solder ball filling member 63 is provided in the moving direction of the solder ball supply head 3 by sandwiching the solder ball supply portion 62, and the solder ball is filled in the opening portion provided in the mask 20. . Further, in the present apparatus, a cleaning mechanism 45 for cleaning the back surface of the mask is provided in the camera moving frame, and similarly to the camera 15, the mask cleaning is performed while moving in the horizontal direction.
第3圖表示焊球供給部及焊球填充構件之俯視圖。第3圖(a)係表示在裝置安裝焊球填充構件63之前的俯視圖,第3圖(b)係表示(a)之B部之放大圖。焊球填充構件63係如圖所示般,形成平行設置且具有特定間隔(在本實施形態中大約35mm)之兩個安裝部63P(安裝部之寬度大約5mm),和在上述安裝部63P之間以特定間隔63S(大約0.1mm)形成具有特定角度(大約5度~35度)之多數線材63L(粗度0.1mm)。本線材之形成係藉由蝕刻加工厚度0.1mm之鋼板。並且,本實施例之線材係在軸心偏移之狀態下設置在設置有間隔之兩個安裝部63P。線材之角度最佳為約10度左右。該安裝部63P係形成直角方向對焊球供給頭3之行進方向成為長邊方向。即是,成為焊球供給頭之寬度之長度。將該焊球填充構件63安裝於填充構件安裝框69和焊球供給部62之框體。即是,成為於安裝時在焊球供給頭之上下方向將螺旋形線圈之上半部份切割而安裝之形狀。因此,於藉由供給頭驅動手段使特定推壓力作用而使焊球供給頭3接觸於遮罩側之時,與遮罩之接觸部對供給頭行進方向具有特定角度的線材多數同時移動。Fig. 3 is a plan view showing the solder ball supply portion and the solder ball filling member. Fig. 3(a) is a plan view showing the device before the solder ball filling member 63 is mounted, and Fig. 3(b) is an enlarged view showing a portion B of (a). The solder ball filling member 63 is formed as two mounting portions 63P (the width of the mounting portion is about 5 mm) which are disposed in parallel and have a specific interval (about 35 mm in this embodiment) as shown in the drawing, and in the above-described mounting portion 63P A plurality of wires 63L (thickness 0.1 mm) having a specific angle (about 5 to 35 degrees) are formed at a specific interval 63S (about 0.1 mm). The wire is formed by etching a steel plate having a thickness of 0.1 mm. Further, the wire of the present embodiment is provided in the two mounting portions 63P provided with the gap in a state where the axis is shifted. The angle of the wire is preferably about 10 degrees. The mounting portion 63P is formed in a direction perpendicular to the direction in which the solder ball supply head 3 travels in the longitudinal direction. That is, it is the length of the width of the solder ball supply head. The solder ball filling member 63 is attached to the housing of the filling member mounting frame 69 and the solder ball supply portion 62. That is, it is a shape in which the upper half of the spiral coil is cut and mounted in the lower direction of the solder ball supply head during mounting. Therefore, when the welding ball supply head 3 is brought into contact with the mask side by the supply of the specific pressing force by the supply head driving means, most of the wires having a specific angle with respect to the traveling direction of the supply head with the contact portion of the mask are simultaneously moved.
第4圖表示焊球填充狀況之概略圖。在第4圖中,在基板21上之電極部印刷焊劑22。然後,在遮罩20之開口部附近之背面側,設置有微小突起20a,構成不接觸焊劑等。即使替代微小突起20a,設置薄膜等之微小階差亦可,再者,如第4圖所示般,設置在焊球供給頭3之焊球填充構件63係在上下方向存在以線材63L所形成之螺旋形(半圓形)之空間,藉由該空間如圖所示般,在焊球24因應供給頭之行進方向而產生旋轉力,藉此分散焊球24,對一個遮罩開口部供給一個焊球。並且,焊球供給部62也設置線材,該線材係藉由與焊球填充構件63相同之製法所形成,將線間隔設為較適用球直徑小大約5μm之構造。Fig. 4 is a schematic view showing the state of filling of the solder balls. In Fig. 4, the solder 22 is printed on the electrode portion on the substrate 21. Then, on the back side of the vicinity of the opening of the mask 20, minute projections 20a are provided to form a non-contact flux or the like. Even if the microprotrusions 20a are replaced, a slight step of the film or the like may be provided. Further, as shown in Fig. 4, the solder ball filling member 63 provided in the solder ball supply head 3 is formed by the wire 63L in the vertical direction. The spiral (semicircular) space, by which the solder ball 24 generates a rotational force in response to the traveling direction of the supply head, thereby dispersing the solder ball 24 and supplying a mask opening portion. A solder ball. Further, the solder ball supply portion 62 is also provided with a wire material which is formed by the same method as the solder ball filling member 63, and has a line spacing which is set to be smaller than the applicable ball diameter by about 5 μm.
第5圖表示於移動焊球供給頭之時焊球對移動方向之集合狀態。Fig. 5 shows the state in which the solder balls are in the moving direction when the solder ball supply head is moved.
藉由以該焊球填充構件63形成與焊球供給部62之遮罩面相向之面側,如第5圖所示般,當焊球供給頭3在遮罩面上移動時,因應移動方向焊球24集合,利用水平加振器65之動作使得線材之間隔變化而將適量之焊球供給至遮罩面,並且藉由位於行進方向後方之焊球填充構件,推入至遮罩開口面。並且,如第5圖所示般,就線材63L之傾斜方向而言,相對於焊球供給部62之線材,焊球填充構件63之線材63L設置成反方向之傾斜。By forming the solder ball filling member 63 on the surface side facing the mask surface of the solder ball supply portion 62, as shown in Fig. 5, when the solder ball supply head 3 moves on the mask surface, the moving direction is required. The solder balls 24 are assembled, and an appropriate amount of solder balls are supplied to the mask surface by the action of the horizontal vibration damper 65, and are pushed into the mask opening surface by the solder ball filling member located behind the traveling direction. . Further, as shown in Fig. 5, in the oblique direction of the wire 63L, the wire 63L of the solder ball filling member 63 is inclined in the opposite direction with respect to the wire of the solder ball supply portion 62.
並且,作為焊球填充構件或焊球供給部之線材之製作方法之一例,如先前所述般,將厚度0.05~0.1mm之鋼板機械加工成特定外形尺寸之後,使線材部分殘留而蝕刻加工線材間之間隙部。Further, as an example of a method of producing a wire for a solder ball filling member or a solder ball supply portion, as described above, a steel plate having a thickness of 0.05 to 0.1 mm is machined into a specific outer shape, and then the wire portion is left to be etched and the wire is etched. The gap between the parts.
第6圖係表示用以自焊球貯留部供給焊球至焊球供給部之構成。Fig. 6 is a view showing a configuration for supplying a solder ball from a solder ball storage portion to a solder ball supply portion.
在供給頭移動台2設置有焊球供給台61。該焊球供給台61係構成藉由連接於安裝在供給頭移動台2之步進馬達76之軸的滾珠螺桿77而移動。在焊球供給台61設置有藉由注入器等所構成之焊球貯留部60可旋轉。通常焊球貯留部 60係焊球排出口呈水平方向,於將焊球供給至焊球供給部62之時,藉由旋轉制動器78使焊球貯留部60旋轉,如圖所示般,排出口朝下。並且,構成可以藉由汽缸75以接近於設置在焊球供給部62上部之蓋的開口部之方式,使焊球貯留部60下降。如此一來,藉由構成可以自注入器供給焊球至焊球供給部62,可以因應焊球供給部62內之焊球之量使焊球貯留部60動作而補充焊球。A solder ball supply stage 61 is provided in the supply head moving table 2. The solder ball supply stage 61 is configured to move by a ball screw 77 connected to a shaft of the stepping motor 76 attached to the supply head moving table 2. The solder ball supply unit 61 is provided with a solder ball storage portion 60 formed by an injector or the like to be rotatable. Usually solder ball storage The 60-type solder ball discharge port is horizontal, and when the solder ball is supplied to the solder ball supply unit 62, the solder ball storage portion 60 is rotated by the rotary brake 78, and the discharge port faces downward as shown in the drawing. Further, the solder ball storage portion 60 can be lowered by the cylinder 75 so as to be close to the opening of the cover provided on the upper portion of the solder ball supply portion 62. In this way, by configuring the supply of the solder balls from the injector to the solder ball supply unit 62, the solder ball storage unit 60 can be operated in accordance with the amount of solder balls in the solder ball supply unit 62 to replenish the solder balls.
接著,說明焊球印刷之一連串之動作。Next, a series of actions of solder ball printing will be described.
首先,在電極部印刷焊劑之基板21被搬入至焊球印刷機,且載置於印刷台10上。在印刷台10多數設置供給負壓之吸附口,在此藉由供給負壓,保持基板21不在印刷台面上移動。First, the substrate 21 on which the flux is printed on the electrode portion is carried into the solder ball printer and placed on the printing table 10. In the printing table 10, a plurality of suction ports for supplying a negative pressure are provided, and by supplying a negative pressure, the substrate 21 is kept not moved on the printing table surface.
接著,使用定位用之攝影機攝影設置在基板21面之定位標記,和設置在標記20之定位標記。攝影之資料被送往無圖示之控制部,在此進行畫像處理,求出位置偏移量。根據其結果,藉由無圖示之水平方向移動機構,將印刷台移動至補正偏移之方向。Next, the positioning mark provided on the surface of the substrate 21 and the positioning mark provided on the mark 20 are photographed using a camera for positioning. The photographed data is sent to a control unit (not shown), where image processing is performed to obtain a positional shift amount. According to the result, the printing table is moved to the direction of the correction offset by the horizontal direction moving mechanism (not shown).
當結束定位時,使印刷台10上升而使基板21之印刷面接觸於遮罩20背面。When the positioning is completed, the printing table 10 is raised to bring the printing surface of the substrate 21 into contact with the back surface of the mask 20.
接著,將焊球供給頭3水平移動至印刷開始位置,並下降至遮罩面。接著,檢查焊球供給部62內之焊球之量,於不成為印刷所需之量之時,使焊球貯留部60動作,而將所需量之焊球供給至焊球供給部62。Next, the solder ball supply head 3 is horizontally moved to the printing start position and lowered to the mask surface. Next, the amount of the solder balls in the solder ball supply unit 62 is checked, and when the amount required for printing is not performed, the solder ball storage unit 60 is operated to supply the required amount of solder balls to the solder ball supply unit 62.
之後,驅動加振器65及凸輪軸驅動馬達68,而將收納於焊球供給部62之焊球供給至遮罩面。Thereafter, the vibrator 65 and the camshaft drive motor 68 are driven to supply the solder balls accommodated in the solder ball supply unit 62 to the mask surface.
一面將焊球供給頭3在水平方向移動,一面藉由焊球填充構件(線圈狀之線材之彈簧作用),將焊球推入至遮罩開口部,並使附著於基板上之焊劑。While the solder ball supply head 3 is moved in the horizontal direction, the solder ball is pushed into the opening of the mask by the solder ball filling member (the spring action of the coil-shaped wire), and the solder adhered to the substrate.
當焊球供給頭3結束在遮罩面上移動時,使焊球供給頭3上升成從遮罩20面間隔開,之後將焊球供給頭3返回至原點位置。When the solder ball supply head 3 finishes moving on the mask surface, the solder ball supply head 3 is raised to be spaced apart from the mask 20 surface, and then the solder ball supply head 3 is returned to the original position.
接著,使印刷台10下降,而使遮罩自印刷台間隔開。Next, the printing table 10 is lowered to separate the masks from the printing table.
利用攝影機攝影被印刷之基板之印刷狀態,調查有無缺陷。The state of printing of the printed substrate was photographed by a camera to investigate whether or not there was a defect.
若有缺陷時,則將基板搬運至修理部,在此修復缺陷部。If there is a defect, the substrate is transported to the repairing unit where the defective portion is repaired.
於缺陷部修復後搬運至回焊部,使焊球熔融固定。After the defect is repaired, it is transported to the reflow part to melt and fix the solder ball.
以上,概略敘述焊球之印刷工程,但是有關因修理部或回焊部因與上述裝置為不同裝置,故不詳細說明。Although the printing process of the solder ball is generally described above, the repair unit or the reflow unit is different from the above-described device, and therefore will not be described in detail.
在該工程中,藉由使用本發明之焊球供給頭,可以確實將微小徑之焊球從遮罩開口部供給至焊劑上。In this project, by using the solder ball supply head of the present invention, it is possible to reliably supply the solder balls having the small diameter from the mask opening to the flux.
1...焊球印刷機1. . . Solder ball printing machine
2...供給頭移動框2. . . Supply head moving frame
3...焊球供給頭3. . . Solder ball supply head
4...供給頭上下驅動機構4. . . Supply head up and down drive mechanism
10...印刷台10. . . Printing station
11...印刷台上升機構11. . . Printing table rising mechanism
15...攝影機15. . . camera
20...螢幕20. . . Screen
21...基板twenty one. . . Substrate
24...焊球twenty four. . . Solder ball
45...清掃機構45. . . Cleaning mechanism
60...焊球貯留部60. . . Solder ball storage
62...焊球供給部62. . . Solder ball supply
63...焊球填充構件63. . . Solder ball filling member
65...加振器65. . . Damper
66...凸輪66. . . Cam
第1圖表示本發明之焊球印刷機用焊球供給頭之一例的圖式。Fig. 1 is a view showing an example of a solder ball supply head for a solder ball printer of the present invention.
第2圖表示用以印刷焊球之焊球印刷機之概略構成圖。Fig. 2 is a view showing a schematic configuration of a solder ball printing machine for printing solder balls.
第3圖表示焊球供給部及焊球填充構件之俯視圖。Fig. 3 is a plan view showing the solder ball supply portion and the solder ball filling member.
第4圖為焊球填充狀況之概略圖。Figure 4 is a schematic view of the filling condition of the solder balls.
第5圖表示於移動焊球供給頭之時焊球供給部中焊球對移動方向之集合狀態的圖式。Fig. 5 is a view showing a state in which the welding balls are in the moving direction of the welding ball supply portion when the solder ball supply head is moved.
第6圖係表示用以自焊球貯留部供給焊球至焊球供給部之構成圖。Fig. 6 is a view showing a configuration for supplying a solder ball from a solder ball storage portion to a solder ball supply portion.
2...供給頭移動框2. . . Supply head moving frame
3...焊球供給頭3. . . Solder ball supply head
4...供給頭上下驅動機構4. . . Supply head up and down drive mechanism
24...焊球twenty four. . . Solder ball
60...焊球貯留部60. . . Solder ball storage
61...焊球供給台61. . . Solder ball supply station
62...焊球供給部62. . . Solder ball supply
63...焊球填充構件63. . . Solder ball filling member
64...蓋64. . . cover
65...加振器65. . . Damper
66...凸輪66. . . Cam
67...滑件67. . . Slider
67R...直線導軌67R. . . Linear Guides
68...凸輪軸驅動馬達68. . . Camshaft drive motor
69...安裝框69. . . Installation box
70...加振框70. . . Vibrating frame
71...供給頭安裝框71. . . Supply head mounting frame
Claims (5)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008308210A JP5141521B2 (en) | 2008-12-03 | 2008-12-03 | Solder ball printing machine |
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| Publication Number | Publication Date |
|---|---|
| TW201029080A TW201029080A (en) | 2010-08-01 |
| TWI412095B true TWI412095B (en) | 2013-10-11 |
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| TW098140374A TWI412095B (en) | 2008-12-03 | 2009-11-26 | Solder ball presses |
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| JP (1) | JP5141521B2 (en) |
| KR (1) | KR101102762B1 (en) |
| CN (1) | CN101777503B (en) |
| TW (1) | TWI412095B (en) |
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| JP5951425B2 (en) * | 2011-10-04 | 2016-07-13 | 株式会社日立製作所 | Solder ball printing device |
| KR20140026127A (en) * | 2012-08-24 | 2014-03-05 | 삼성전기주식회사 | Method of manufacturing printed circuit board |
| CN102881599B (en) * | 2012-09-18 | 2016-05-04 | 奈电软性科技电子(珠海)有限公司 | BGA plants ball technique |
| JP7072919B2 (en) * | 2020-11-26 | 2022-05-23 | Aiメカテック株式会社 | Board processing equipment |
| JP7279978B2 (en) * | 2020-11-26 | 2023-05-23 | Aiメカテック株式会社 | Inspection/repair equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005101502A (en) * | 2003-03-10 | 2005-04-14 | Hitachi Metals Ltd | Method and apparatus for mounting conductive ball |
| JP2006303341A (en) * | 2005-04-25 | 2006-11-02 | Shibuya Kogyo Co Ltd | Conductive ball arranging device |
| JP2008153319A (en) * | 2006-12-15 | 2008-07-03 | Hitachi Plant Technologies Ltd | Screen printing apparatus and bump forming method |
| JP2008288515A (en) * | 2007-05-21 | 2008-11-27 | Hitachi Plant Technologies Ltd | Solder ball printing device |
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|---|---|---|---|---|
| JP3177370B2 (en) * | 1993-12-31 | 2001-06-18 | 古河電気工業株式会社 | Solder ball supply leveling device |
| TWI273666B (en) * | 2004-06-30 | 2007-02-11 | Athlete Fa Corp | Method and device for mounting conductive ball |
| JP4933131B2 (en) * | 2006-04-17 | 2012-05-16 | アスリートFa株式会社 | Ball mounting apparatus and method |
| JP2008177264A (en) * | 2007-01-17 | 2008-07-31 | Hitachi Metals Ltd | Ball transfer mask and ball mounting apparatus using the same |
| JP4973633B2 (en) * | 2008-09-24 | 2012-07-11 | 株式会社日立プラントテクノロジー | Solder ball printing device |
-
2008
- 2008-12-03 JP JP2008308210A patent/JP5141521B2/en not_active Expired - Fee Related
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2009
- 2009-11-26 TW TW098140374A patent/TWI412095B/en not_active IP Right Cessation
- 2009-12-02 KR KR1020090118124A patent/KR101102762B1/en not_active Expired - Fee Related
- 2009-12-03 CN CN200910253621XA patent/CN101777503B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005101502A (en) * | 2003-03-10 | 2005-04-14 | Hitachi Metals Ltd | Method and apparatus for mounting conductive ball |
| JP2006303341A (en) * | 2005-04-25 | 2006-11-02 | Shibuya Kogyo Co Ltd | Conductive ball arranging device |
| JP2008153319A (en) * | 2006-12-15 | 2008-07-03 | Hitachi Plant Technologies Ltd | Screen printing apparatus and bump forming method |
| JP2008288515A (en) * | 2007-05-21 | 2008-11-27 | Hitachi Plant Technologies Ltd | Solder ball printing device |
Also Published As
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|---|---|
| TW201029080A (en) | 2010-08-01 |
| JP5141521B2 (en) | 2013-02-13 |
| CN101777503A (en) | 2010-07-14 |
| KR101102762B1 (en) | 2012-01-03 |
| JP2010135457A (en) | 2010-06-17 |
| CN101777503B (en) | 2012-04-18 |
| KR20100063661A (en) | 2010-06-11 |
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