TWI411706B - Atomization nozzle plate and the manufacturing method thereof - Google Patents

Abstract

An atomization nozzle plate and the manufacturing method thereof comprise the steps of: a photoresist forming step, a photoresist manufacturing step, a thermal reflowing step, a metal layer forming step, a manufacturing mold step, a sticking step, a electroforming step and a separating step. Through the procedures of the above steps, an atomization nozzle plate can be manufactured. The atomization nozzle plate includes a cambered portion and a plurality of circular nozzles. The cambered portion has an inner surface and an outer surface opposite to the inner surface. Each circular nozzle is formed on the cambered portion and communicates with the inner and outer surfaces. Each circular nozzle has a large diameter end, a small diameter end and an expansion diameter end, with the large diameter end connected to the inner surface and communicated with the outer surface through the small diameter end and the expansion diameter end. Based on this, the volume of the atomization nozzle plate can be effectively reduced and miniaturization of the atomization nozzle plate can be achieved easily.

Description

Atomized orifice sheet and manufacturing method thereof

The invention relates to an atomizing orifice sheet and a manufacturing method thereof, in particular to an atomizing orifice sheet suitable for a micro atomizing orificer and a manufacturing method thereof.

Referring to Fig. 1, the invention patent of "Atomizer Structure" of the Republic of China Announcement No. I272128 discloses a conventional atomizing orifice sheet 8. The conventional atomizing orifice 8 has a projection 81 and a plurality of orifices 82. Each of the orifices 82 is disposed in the projection 81 and penetrates the opposite surfaces of the projection 81. Therefore, after the conventional atomizing orifice 8 is installed in an atomizer, the piezoelectric material can be used to vibrate the liquid to extrude the liquid into the nozzle holes 82 to form droplets, thereby generating fog. Effect.

The above-mentioned atomizing orifice sheet 8 is mainly formed by electroforming a sheet in advance, and then forming the protrusion portion 81 and each of the nozzle holes 82 by mechanical processing; however, due to the conventional atomizing orifice sheet 8 The thickness of the formed thin plate is rather thin, so that the protruding portion 81 is easy to generate cracks during processing, and even the partial spray holes 82 are distorted and blocked, thereby relatively affecting the overall atomization effect.

In view of the above, in order to overcome the above-mentioned shortcomings of the atomized orifice sheet 8, please refer to the invention patents of the Republic of China Publication No. 200940182 "Nozzle of spray device and its preparation method", and disclose another A conventional atomizing orifice sheet 9. The manufacturing method of the atomized orifice sheet 9 mainly comprises the steps of: providing a conductive layer in advance, and forming a plurality of insulating layers on the conductive layer, wherein the insulating layers are at a center point of the center of gravity offset pattern and Forming a bilaterally symmetrical geometric structure; forming a plating layer next to the conductive layer and keeping portions of each of the insulating layers exposed; finally removing the conductive layer and the insulating layer to form a body 91, and the body 91 is formed A plurality of nozzle holes 92, each of which has a triangular structure with a center of gravity offset pattern and a bilaterally symmetrical shape.

According to the above-mentioned conventional atomizing orifice sheet 9, although the orifices 92 are directly formed in the plating process, the disadvantages of the conventional atomizing orifice sheet 8 being mechanically processed are improved; however, When the atomizing orifice sheet 9 is used, the liquid is mainly atomized by the piezoelectric material to drive the body 91 to vibrate. In the geometrical structure of the nozzle hole 92, any two adjacent nozzle holes 92 are used. Appropriate spacing must be left between the sharp corners to prevent cracks between the adjacent nozzles 92 when the body 91 is vibrated. As a result, the volume of the conventional atomizing orifice sheet 9 is not easily reduced. It is impossible to develop the design in a direction that is lighter, thinner and shorter, so it is necessary to further improve it.

SUMMARY OF THE INVENTION The object of the present invention is to improve the above-mentioned disadvantages and to provide a method for producing an atomized orifice sheet, which can be obtained by reducing the overall volume to obtain a uniform micro-droplet so as to be easy to develop in the miniaturization direction.

Another object of the present invention is to provide an atomized orifice sheet which can be applied to a micro atomizer, which can effectively reduce the droplet size for generating a mist droplet to enhance the atomization effect.

In order to achieve the foregoing object, the technical content of the present invention includes: a method for fabricating an atomized orifice sheet, comprising: a photoresist forming step of forming a photoresist layer on a surface of a substrate; a photoresist a processing step of exposing and developing the photoresist layer to obtain a photoresist structure of a columnar structure; and a thermal reflow step of heating the photoresist layer of the columnar structure to a molten state until the columnar structure The photoresist layer is converted into a curved surface geometry and then cooled to obtain a convex photoresist layer; a metal forming step is to form a metal layer on the surface of the substrate and the convex photoresist layer; a step of preparing a mold having a plurality of recesses, and filling a cavity in each of the recesses; and attaching the glue to the surface of the metal layer to bond the colloids After the metal layer, the mold core is separated from the metal layer; an electroforming step is to electroform a metal material on the surface of the metal layer to form a surface having a thickness at least higher than the height of each of the colloids. Cast layer, and the electroformed layer is The plurality of recessed portions several colloid formation; and a dividing step, the lines with electroformed layer from the metal layer and the colloid.

According to the same technical concept, the atomized orifice sheet produced by the method for manufacturing the atomized orifice sheet of the invention has an arc-shaped portion and a plurality of circular orifices, the curved portion having a relative inner surface and a The outer surface, each of the circular injection holes is disposed in the curved portion and penetrates the inner surface and the outer surface, and each of the circular injection holes has a large diameter end, a small diameter end and an enlarged diameter end, The large diameter end is adjacent to the inner surface, and the large diameter end communicates with the outer surface via the small diameter end and the enlarged diameter end.

The above and other objects, features, and advantages of the present invention will become more apparent from the description of the appended claims. The method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention comprises at least a photoresist forming step S1, a photoresist processing step S2, a heat reflow step S3, a metal layer forming step S4, a molding step S5, A step S6, an electroforming step S7 and a dividing step S8 are attached.

Referring to FIGS. 4 and 5, the photoresist forming step S1 forms a photoresist layer 2 on the surface of a substrate 1 (for example, a germanium wafer substrate or a glass substrate). More specifically, the photoresist forming step S1 can be divided into two stages. The first stage is to treat the surface of the substrate 1 in advance to remove impurities on the surface of the substrate 1, thereby lifting the substrate 1 and Adhesion between the photoresist layers 2; in this embodiment, the substrate 1 is selected to be cleaned by RCA cleaning technology [RCA Clean], and the substrate 1 is dehydrated [Dehydration Bake] to The moisture on the surface of the substrate 1 evaporates. In the second stage, a photoresist material is uniformly spun on the upper surface of the substrate 1 [in terms of the surface] in a spin coating manner to form a photoresist layer 2 having a predetermined thickness, and The predetermined thickness of the photoresist layer 2 of the present embodiment is selected to be 200 μm. Moreover, in the embodiment, the photoresist material is selected as a commercial negative photoresist SU-8 series as an embodiment, but the invention is not limited thereby, and the photoresist material may also be selected as SP-341, JSR, BCB or AZ-4620.

Referring to FIGS. 4 and 6, the photoresist processing step S2 exposes and develops the photoresist layer 2 to obtain a columnar structure of the photoresist layer 2', and the columnar structure of the photoresist layer The 2' side view shape is roughly rectangular. More specifically, the photoresist processing step S2 selects an adjacent printer (Proximity Printer) which can provide ultraviolet light of a specific wavelength, and is matched with a mask M having a geometric pattern to be formed, so that the ultraviolet light is worn. After the mask M is projected on the photoresist layer 2; after the photoresist layer 2 is exposed to exposure [exposure time is understood by those skilled in the art, it will not be described here), and then through a developing solution [ For example, EPD1000 or EPD2000, etc. remove the unexposed photoresist layer 2 to obtain the photoresist layer 2' of the columnar structure.

Referring to FIGS. 4 and 7, the thermal reflow step S3 heats the photoresist layer 2' to a molten state until the photoresist layer 2' is converted into a geometrical structure having a curved surface, and then cooled to obtain a The convex photoresist layer 2". More specifically, the thermal reflow step S3 is mainly to heat the photoresist layer 2' to a glass transition temperature of the SU-8 photoresist material by a heater to make the photoresist layer 2' can be formed into various arcuate geometries by its own fluidity and then cooled and solidified; in addition, in this embodiment, the photoresist layer 2' is selected to be heated to 130 ° C for 20 minutes. Then, it is cooled and solidified to form the convex photoresist layer 2" which is aspherical.

Referring to Figures 4 and 8, the metal layer forming step S4 forms a metal layer 3 on the surface of the substrate 1 and the convex photoresist layer 2". More specifically, the metal layer forming step S4 is Selecting, by means of physical vapor deposition [PVD] or chemical vapor deposition [CVD], forming the metal layer 3 on the surface of the substrate 1 and the convex photoresist layer 2" (in terms of the surface), and The metal layer 3 is formed with an arc portion 31 corresponding to the convex photoresist layer 2"; in this embodiment, aluminum or silver is selectively formed on the substrate by sputtering [Sputter]. 1 and a surface of the convex photoresist layer 2" to form an aluminum layer or a silver layer having a thickness of about 0.3 μm as the metal layer 3.

Referring to FIGS. 4 and 9, the molding step S5 is to prepare a mold core 4 having a plurality of recesses 41, and a colloid 42 is filled in each of the recesses 41, respectively. More specifically, in the present embodiment, PDMS [polydimethyl methoxy oxane] is selected as the material of the mold core 4, and is opened on the upper surface of the mold core 4 [in terms of the surface] After the plurality of recesses 41 of the cylindrical crucible are formed, the colloids 42 are injected into the recesses 41 by UV glue; in particular, the recesses 41 of the embodiment can be alternately arranged, etc. Arranged in a pitch or parallel manner, and the aperture of each of the recesses 41 is selected to be 10 μm to 20 μm, so that the subsequently produced atomized orifice sheet can produce atomized droplets having a particle diameter of about 3 μm to 8 μm. Can effectively improve the overall atomization effect. In addition, the molding step S5 may further select to scrape the UV glue in each of the recesses 41 beyond the surface of the mold core 4 in a physical cutting manner [eg, laser cutting or cutter cutting, etc.) to facilitate subsequent Attachment step S6 is performed. Moreover, the implementation time of the molding step S5 of the present invention is not limited by the embodiment, and the molding step S5 may also be selected before the metal layer forming step S4.

Referring to FIGS. 4 and 10, the attaching step S6 attaches the colloid 42 of the mold core 4 to the surface of the metal layer 3, and after bonding the colloid 42 to the metal layer 3, the mold core is attached. 4 is detached from the metal layer 3. More specifically, the attaching step S6 attaches the colloids 42 of the mold core 4 to the upper surface of the curved portion 31 of the metal layer 3 in advance (in terms of the drawing), which is made by PDMS. The mold core 4 is soft and has good conformability, so that the colloids 42 can be attached to the curved portion 31 of the metal layer 3; then, in this embodiment, the ultraviolet light is selected to pass through the mold core 4 Irradiation of the metal layer 3 and each of the colloids 42 until the colloids 42 are cured and bonded to the curved portion 31 of the metal layer 3 [curing time is understood by those skilled in the art, and will not be described herein] The mold core 4 can be detached from the metal layer 3. The shape of each of the colloids 42 on the curved portion 31 of the present embodiment is a cylindrical 〞 corresponding to the shape of the concave chamber 41, and the height (H) of each of the colloids 42 is selected to be less than 30 μm.

Referring to FIGS. 4 and 11, the electroforming step S7 is to electroform a metal material on the surface of the metal layer 3 to form a thickness (T) on the surface of the metal layer 3 at least higher than the height of each of the colloids 42. The electroformed layer 5 of (H), and the electroformed layer 5 is formed with a plurality of depressed portions 51 corresponding to the plurality of colloids 42. More specifically, in the electroforming process, the electroformed layer 5 is gradually grown from the upper surface of the metal layer 3 [in terms of the surface], and fills the colloids on the curved portion 31. The gap between the 42; when the thickness (T) of the electroformed layer 5 exceeds the height (H) of the colloid 42, since the colloid 42 is not electrically conductive, the metal material cannot be directly from the top surface of each of the colloids 42. [on the surface of the drawing], the top surface of each of the colloids 42 is gradually covered inwardly along the outer periphery of the top surface of each of the colloids 42 so that the electroformed layer 5 forms the depressed portion on the top surface of each of the colloids 42 respectively. 51; wherein, each of the colloids 42 has a cylindrical geometry, each of the recesses 51 can form a circular region 421 having a diameter (G) on each of the top surfaces of the colloids 42, respectively. For each of the top surfaces of the colloid 42 that has not been covered by the metal material.

Moreover, as the thickness (T) of the electroformed layer 5 increases, the range of the metal material covering the top surface of each of the colloids 42 also increases, and the aperture of the circular region 421 of the top surface of each of the colloids 42 is relatively increased. (G) is gradually reduced, and the electroforming step S7 is completed when the aperture (G) of each of the circular regions 421 is reduced to a predetermined size; wherein the size of the aperture (G) of the circular region 421 is The size of the orifice of the atomized orifice sheet, so that the predetermined size of the aperture (G) can be selected according to different use requirements to produce spray sizes of different sizes; in this embodiment, each of the circular regions 421 The pore diameter (G) is selected to be less than 5 μm as an embodiment, whereby the particle size of the atomized droplets can be appropriately reduced to obtain a uniform atomization effect. In addition, the metal material used in the electroforming step S7 of the present embodiment is selected to be an alloy such as Ni-Fe, Ni-Co, Ni-Mn or Ni-N, and is electroformed in advance with a low-speed current having a current density of 0.1 ASD. After 10 minutes, the electroforming was continued at a high current of a current density of 1 ASD until the thickness (T) of the electroformed layer 5 reached 30 μm to 50 μm.

Referring to FIGS. 4 and 12, the dividing step S8 separates the electroformed layer 5 from the metal layer 3 and the colloid 42 to obtain an electroformed layer 5 having a plurality of circular through holes as the atomization. The finished orifice sheet.

The main technical feature of the method for fabricating the atomized orifice sheet of the present invention is that a plurality of insulating layers of a triangular structure are formed directly on the conductive layer compared to the conventional atomizing orifice sheet 9 as shown in FIGS. 2 and 3. A large spacing must be left between the sharp corners of each of the triangles, which makes it difficult to reduce the volume during manufacture. The present invention utilizes the molding step S5 to form the colloid 42 in the form of a cylinder, and the colloid 4 can be bonded to the metal layer 3 in the attaching step S6 by the mold 4 having good conformability. The curved portion 31, in turn, can control the aperture (G) of the circular region 421 of the top surface of the colloid 42 of each of the cylinders by the electroforming step S7. Thereby, since the colloids 42 have a cylindrical geometry, the spacing between the colloids 42 can be effectively reduced, and the electroforming step S7 is relatively made between the circular regions 421 of the orifices. The spacing can be reduced accordingly, so that the invention can maintain its atomization effect after reducing the overall volume, so as to achieve the effect of easy to design for miniaturization.

Referring to Figures 12 and 13, and referring to Figure 11, the atomized orifice sheet 6 of the preferred embodiment of the present invention is based on the same technical concept as the method for producing the atomized orifice sheet. The electroformed layer 5 of Fig. 11 has an arcuate portion 61 and a plurality of circular orifices 62, and each of the circular orifices 62 is formed in the curved portion 61. Further, in the present embodiment, the thickness of the atomizing orifice sheet 6 is selected to be 30 μm to 50 μm so as to be suitable for use in a micro atomizing orifice.

The curved portion 61 can be selected as various geometrical structures having a curved surface, and the curved portion 61 of the embodiment is selected as an aspherical geometrical structure as an embodiment; the curved portion 61 has an inner surface. 611 and an outer surface 612, the inner surface 611 and the outer surface 612 are the bottom surface and the top surface of the curved portion 61, respectively. Moreover, the curved portion 61 is formed on the inner surface 611 with a conversion space 613 for mainly converting liquid into atomized droplets [for details].

Each of the circular injection holes 62 extends through the inner and outer surfaces 611 and 612 of the curved portion 61, and each of the circular injection holes 62 defines a large diameter end 621, a small diameter end 622 and an enlarged diameter end 623. The large diameter end 621 can communicate with the enlarged diameter end 623 via the small diameter end 622 , and each of the large diameter ends 621 abuts the inner surface 611 , and each of the enlarged diameter ends 623 abuts the outer surface 612 . In particular, the apertures of the circular through holes formed by each of the small diameter ends 622 of the present invention are selected to be less than 5 μm. Thereby, the atomized droplets located in the conversion space 613 can be further reduced in size by the large diameter end 621 and the small diameter end 622, so that the atomization sprayed outward through the expanded diameter end 623 The droplets produce a uniform atomization effect.

Referring to Figure 14, the atomizing orifice sheet of the preferred embodiment of the present invention is mainly used for bonding to an opening 71 of a container 7, and the container 7 is provided with various types of liquid such as essential oil or medicine. The container 7 can be connected by an oscillator 72 [e.g., a piezoelectric actuator] to constitute an atomizer. The nebulizer can be applied to related applications such as drug spray and detection technology for biomedical engineering, as well as for home and personal applications [eg, cosmetic skin, burn wound administration sprayer, indoor humidifier, essential oil atomization). And product landscaping decoration, etc.]. On the other hand, the atomizer can be further electrically connected to a display unit [eg, a television] by a control unit, and the control unit can transmit a drive corresponding to the content broadcast by the display unit at a specific time. The signal is transmitted to the oscillator 72 for the oscillator 72 to synchronously drive the atomizer to generate an atomization effect when the content is broadcasted, thereby increasing the situation and effectively improving the effect of the presence.

In particular, please refer to FIG. 14 again, in the actual use, the vibrator 72 drives the container 7 to generate vibration, so that the liquid in the container 7 can be pre-produced with a slightly larger particle size. Atomizing the droplets and collecting them in the conversion space 613; when the atomized droplets in the conversion space 613 push each other to the large diameter end 621 of each of the circular orifices 62, and reducing the diameter through the small diameter end 622 The size of the atomized droplets is such that atomized droplets ejected from each of the expanded ends 623 form droplets having a size of about 3 to 8 μm. Thereby, the high permeability produced by the micro-mist droplets can effectively improve the absorption effect of the human body, avoid the unduly dry environment, and can also enhance the moisturizing effect.

The main technical feature of the atomized orifice sheet of the present invention is that the vibration of the container 7 is driven by the oscillator 72, and the atomized droplets can be initially obtained in the conversion space 613 and are in the conversion space 613. The atomized droplets are further reduced in size by the large diameter end 611 and the small diameter end 612, and the atomized droplets are uniformly sprayed by the design of the expanded diameter end 613. In other words, the gap between the circular orifices 62 of the present invention can be appropriately reduced, and the overall volume of the atomizing orifice sheet 6 can be greatly reduced, so that the atomized orifice sheet of the present invention can be applied to a micro atomizer. .

In summary, the atomized orifice sheet of the present invention and the manufacturing method thereof can maintain the atomization effect after reducing the overall volume, and thus can be easily developed in the direction of miniaturization, and can be applied to a micro atomizer. To produce a uniform micro-droplet to enhance the atomization effect.

While the invention has been described in connection with the preferred embodiments described above, it is not intended to limit the scope of the invention. The technical scope of the invention is protected, and therefore the scope of the invention is defined by the scope of the appended claims.

[this invention]

1. . . Substrate

2, 2’. . . Photoresist layer

2"...convex photoresist layer

3. . . Metal layer

31. . . Curved part

4. . . Mold

41. . . Alcove

42. . . colloid

421. . . Circular area

5. . . Electroformed layer

51. . . Depression

6. . . Atomized orifice sheet

61. . . Curved part

611. . . The inner surface

612. . . The outer surface

613. . . Conversion space

62. . . Round orifice

621. . . Large diameter end

622. . . Small diameter end

623. . . Expanding end

G. . . Aperture

H. . . height

M. . . Mask

T. . . thickness

[customary]

8. . . Conventional atomizing orifice

81. . . Protrusion

82. . . Spray hole

9. . . Conventional atomizing orifice

91. . . Ontology

92. . . Spray hole

Fig. 1 is a schematic view of an atomized orifice sheet of the "Atomizer Structure" of the Republic of China Announcement No. I272128.

Fig. 2 is a flow chart showing the steps of the method of producing the nozzle piece of the spray device and the method for producing the same.

Fig. 3 is a schematic view of an atomized orifice sheet of the Republic of China Publication No. 200940182 "Nozzle of a spray device and its preparation method".

Figure 4 is a block diagram showing the steps of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 5 is a cross-sectional view showing the photoresist forming step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 6 is a cross-sectional view showing the photoresist processing step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 7 is a cross-sectional view showing the heat reflow step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 8 is a cross-sectional view showing the metal layer forming step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 9 is a cross-sectional view showing the molding step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Fig. 10 is a cross-sectional view showing the attaching step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 11 is a cross-sectional view showing the electroforming step of the method for fabricating the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 12 is a cross-sectional view showing the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 13 is a perspective view showing the atomized orifice sheet of the preferred embodiment of the present invention.

Figure 14 is a schematic view showing the use of the atomized orifice sheet of the preferred embodiment of the present invention.

Claims (10)

A method for fabricating an atomized orifice sheet comprises: a photoresist forming step of forming a photoresist layer on a surface of a substrate; and a photoresist processing step of exposing and developing the photoresist layer to obtain a photoresist layer a photoresist layer of a columnar structure; a thermal reflow step of heating the photoresist layer of the columnar structure to a molten state until the photoresist layer of the columnar structure is converted into a geometrical structure having a curved surface, and then cooled Obtaining a convex photoresist layer; a metal forming step is to form a metal layer on the surface of the substrate and the convex photoresist layer; and a molding step is to prepare a mold having a plurality of recesses, and respectively Each of the concave chambers is filled with a colloid; an attaching step is to attach the colloid of the mold core to the surface of the metal layer, so that after the colloid is combined with the metal layer, the mold core is separated from the metal layer; a step of electroforming a metal material on the surface of the metal layer to form an electroformed layer having a thickness at least higher than a height of each of the colloids, and the electroformed layer is formed by a plurality of colloids a recessed portion; and a step of dividing the electricity Layer from the metal layer and the colloid. The method for fabricating an atomized orifice sheet according to claim 1, wherein the photoresist layer is formed on the surface of the substrate in the photoresist forming step, after the surface of the substrate is treated first, and then A photoresist material is uniformly spun on the surface of the substrate by spin coating. The method for fabricating an atomized orifice sheet according to claim 2, wherein in the heat reflow step, the photoresist layer of the columnar structure is heated to a molten state, and the columnar structure is lighted by a heater. The resist layer is heated to above the glass transition temperature of the photoresist material. The method for fabricating an atomized orifice sheet according to the first, second or third aspect of the patent application, wherein the metal forming step forms the metal layer on the surface of the substrate and the convex photoresist layer, which is aluminum or silver. It is formed on the surface of the substrate and the convex photoresist layer by sputtering. The method for manufacturing an atomized orifice sheet according to the first, second or third aspect of the patent application, wherein a mold having a plurality of alcoves is prepared in the molding step, and the mold core is processed by PDMS to make the mold core After each of the recesses has a cylindrical shape, a UV glue is filled in each of the recesses. According to the manufacturing method of the atomized orifice sheet of the fifth aspect of the patent application, wherein the molding step is filled with a UV glue in each of the concave chambers, and then further removed by physical cutting. The UV glue in each of the recesses is scraped off. The method for manufacturing an atomized orifice sheet according to the first, second or third aspect of the patent application, wherein in the attaching step, each of the colloids is combined with the metal layer, and the ultraviolet light is passed through the mold core and irradiated thereon. The metal layer and each of the colloids until the colloids are cured and bonded to the metal layer. The method for producing an atomized orifice sheet according to the first, second or third aspect of the patent application, wherein in the electroforming step, the metal material is electroformed on the surface of the metal layer, and Ni-Fe, Ni-Co, Ni-Mn or Ni-N was electroformed at a current density of 0.1 ASD for 10 minutes, and then electroformed at a current density of 1 ASD. An atomizing orifice sheet having an arc-shaped portion and a plurality of circular orifices having opposite inner surfaces and an outer surface, each of the circular orifices being disposed in the curved portion The inner surface and the outer surface are penetrated, and each of the circular injection holes has a large diameter end, a small diameter end and a diameter expansion end, the large diameter end is adjacent to the inner surface, and the large diameter end is small The radial end and the expanded end are connected to the outer surface. The atomized orifice sheet according to claim 9, wherein the small diameter end has a pore diameter of less than 0.5 μm, and the atomized orifice sheet has a thickness of 30 to 50 μm.