TWI408358B - Defect correction device - Google Patents

Abstract

A defect correction device is provided to efficiently correct the defect by reducing a load of an operator. A photographing unit photographs a defect of a review target according to defect position information of detection data of a substrate detected during a detecting process before a correcting process. A display unit reduces each defect review detection image photographed by the photographing unit and displays the images in a list. A defect selecting unit selects the defect to be corrected from the list of the review detection images displayed by the display unit. A defect correcting unit corrects the defect selected by the defect selecting unit. A control unit controls the photographing unit, the display unit, and the defect correcting unit.

Description

Defect correction device Field of invention

The present invention relates to a defect correcting device for correcting defects on a substrate by correcting defects by irradiating laser light. The present invention is filed in Japan on July 3, 2006, and claims priority based on Japanese Patent Application No. 2006-183111, the disclosure of which is incorporated herein.

Background of the invention

In manufacturing an optical lithography manufacturing program for a flat panel display (FPD) such as a liquid crystal display device or a semiconductor wafer, a defect correction device for correcting a large glass substrate, a semiconductor substrate, or the like on a substrate by laser light is generally used (for example, : Refer to Japanese Laid-Open Patent Publication No. 2001-91919. In the conventional defect correction device, the substrate manufactured by the manufacturing process is inspected by the inspection device, and the image data of the defect portion is image-processed, and the defect on the substrate is automatically determined to be a simulation defect that does not affect the connection manufacturing process, Or the real defect that must be corrected, and then correct the defect based on the judgment result. However, the defect inspection device cannot be erroneously determined due to the determination criterion setting conditions such as the type, size, and position of the defect, and the accuracy of the determination of the defect classification is limited. Here, the operator uses a microscopic inspection apparatus such as a microscope to observe in detail the defects detected by the giant inspection, and then selects defects to be corrected from the defects detected by the giant inspection.

Conventionally, the operator checks all defects and judges whether or not the defect is corrected. In the case of correction, the defect correction device is operated, and the defect position is irradiated with laser light to correct the defect. When each defect is checked, the stage on which the substrate is placed moves in the XY direction, and all the defects of the judgment target which is the correction are moved to the observation position of the microscope for observation. Since the operator often performs the work before the defect correction device, it is necessary to pay great attention to the operation of the defect correction device and the observation of the defect, so that the operator is burdened. Further, the maintenance time of the defect correction device is related to the number of defects to be processed, and is checked in order, and it is inefficient to check whether or not there is correction necessity and correction of defects.

The present invention has been made in view of the above problems, and it is an object of the invention to provide a defect correction device capable of reducing the burden on an operator and efficiently correcting defects.

The present invention is directed to a defect correcting device for correcting a defect on a substrate, and includes: a photographing unit that checks an inspection material of the substrate according to an inspection program before a correction program. Defect location information, photography is a defect of the object to be checked; the display unit reduces and displays a list of the inspection images detected by the photographing unit; and the defect selection unit selects the inspection image from the list of the display units. The defect is corrected; the defect correcting unit corrects the defect selected by the defect selecting unit; and the control unit controls the image capturing unit, the display unit, and the defect correcting unit.

Moreover, the defect correction device of the present invention, wherein the control unit is based on In the defect position information of the inspection data, before the defect correction by the defect correction unit, all the defects of the inspection target are taken by the image capturing unit, and the image processing unit generates the reduced image by the image of the inspection image, and the reduced image and the The defect data is associated with and stored in the memory unit, and the image of the inspection image reduction image is read from the memory unit in accordance with the instruction to start the correction, and the display is displayed on the display unit.

Further, in the defect correction device of the present invention, the control unit corrects the image of the defect corrected by the defect correction unit to the image capturing unit, and reduces the correction of the image capturing unit to the display unit. After the image, the control related to the above-mentioned check defect image is displayed.

Further, in the defect correction device of the present invention, the control unit detects the image before and after the correction of the defect corrected by the defect correction unit, and corrects the corrected portion and the corrected portion of the display unit. The image is then subjected to control related to the above-mentioned check defect image and displayed.

Further, in the defect correction device of the present invention, the control unit acquires inspection data of the substrate inspected by the inspection program from the external device, and selects a defect to be checked as a correction based on the inspection data, and then according to the The defect position information of the selected object to be checked is selected as the defect of the object to be checked by the photographing of the photographing unit.

Further, in the defect correction device of the present invention, the control unit detects all defects of the object to be inspected by the imaging unit before the defect correction unit is corrected based on the defect position information of the check data. The nuclear inspection image and the reduced inspection image are stored in the memory unit, and the inspection image is reduced and displayed in the display portion by a specified enlargement, and the inspection image before the reduction processing is read from the memory portion. Zoom in to display.

According to the present invention, the burden on the operator can be reduced, and the effect of efficiently correcting the defect can be obtained.

Simple illustration

Fig. 1 is a flow chart showing the construction of a defect correcting device according to an embodiment of the present invention.

Fig. 2 is a flow chart showing the operation of the defect correcting device of the present invention.

Fig. 3 is a view showing a display example of a display example displayed on the screen of the defect correction device of the present invention.

Detailed description of the preferred embodiment

Hereinafter, the best mode for carrying out the invention will be described with reference to the drawings. Fig. 1 is a flow chart showing a defect correcting device of an embodiment of the present invention. The substrate 1 is a glass substrate for FPD and a semiconductor wafer substrate to be corrected. The stage 2 includes a secondary moving mechanism that can move the substrate 1 in the X direction and the Y direction orthogonal to each other while supporting the substrate 1. The illumination light source 3 is a light source for defect observation. Light from the illumination source 3 is transmitted through the lens 12, reflected by the beam splitter 13, and transmitted through the objective lens 14 to the substrate 1. At least the illumination source 3, the objective lens 12, the beam splitter 13, and the objective objective lens 14 are configured to check the inspection defects by the illumination source 3 and the objective lens 14. unit.

The laser light source 4 outputs laser light for correcting defects. The laser light from the laser source 4 is reflected by the mirror 8, passes through the objective lens 9 and the beamsplitters 11, 13 and is then transmitted through the objective lens 14 to the defects on the substrate 1. At least the laser light source 4, the mirror 8, the optical splitters 11, 13 and the objective objective lens 14 constitute a defect correcting portion by the laser light source 4 and the objective objective lens 14. The camera 5 includes an imaging device such as a photographic element such as a CCD (Charge Coupled Device), and generates a video signal according to an optical image of the subject (substrate 1). The light from the illumination light source 3 reflected on the surface of the substrate 1 passes through the objective lens 14, the spectroscopes 13, 11 and the lens 10, and enters the light receiving surface of the camera 5.

The control device 6 has a function of controlling the entire defect correction device, and includes a laser control unit 61, an image processing unit 62, a platform control unit 63, an operation unit 64, a main control unit 65, and a memory unit 66. Further, although not shown, the control device 6 includes an external device (for displaying, for example, an inspection result detected by an inspection program on the upstream side before the correction program) and a communication interface for communication.

The control device 6 is configured such that the laser control unit 61 controls the on‧off control of the laser light source 4 and the energy control of the laser light outputted at the time by controlling the voltage applied to the laser light source 4 or the like. The video processing unit 62 generates thumbnail image data that has been reduced by spacing the defective video signals output from the camera 5. The platform control section 63 can control the driving of the platform 2.

The operation unit 64 includes a keyboard or a mouse operated by an operator to generate a signal according to the operation result. The main control unit 65 performs calculation or data input/output control for controlling the entire control device 6 including the above configuration. Wait. The memory unit 66 is a semiconductor memory or a hard disk drive that stores inspection data or thumbnail image data of each defect. The display 7 is a display device such as a CRT (Cathode Ray Tube) display or a liquid crystal display for displaying thumbnail images, defect data, and the like.

Next, the operation of the defect correction device of this embodiment will be described. Fig. 2 is a flow chart for showing the operation of the defect correcting device. The control device 6 of the defect correction device acquires the inspection data (defect list, defect data) of the entire substrate detected by the upstream inspection program by the correction program from the inspection data server through a communication circuit (not shown). And stored in the memory unit 66 (step S201). The inspection data includes: coordinates (position information) for displaying the position of the defect, information on the size of the defect, and the type of the defect. When the operator operates the operation unit 64 to instruct the check check, the operation unit 64 outputs a signal in accordance with the operator's instruction to the main control unit 65. When the main control unit 65 detects the signal, it outputs an operation instruction to each unit of the control device 6.

The main control unit 65 reads the inspection data of the substrate 1 from the storage unit 66, and classifies the pseudo-defects and the real defects that must be corrected without correction according to the size and position of the defects, and displays them from the inspection materials. Among the defects, the defect is selected as the object to be corrected. The main control unit 65 can notify the platform control unit 63 of one of the selected defects and simultaneously instruct the movement of the platform 2. The platform control unit 63 that receives the instruction drives the platform 2, and controls the amount of movement based on the defective coordinates that have been notified. The platform 2 can move the substrate 1 to a position where the selected defect enters the field of view of the objective lens 14 (step S202).

Light from the illumination source 3 can be reflected by the substrate 1, and as described above, The light is incident on the light receiving surface of the camera 5. The camera 5 is configured to capture the defect of the objective lens 14 to a predetermined magnification, generate the check image signal, and output it to the control device 6. The check inspection image input to the control device 6 is input to the image processing unit 62. The video processing unit 62 generates thumbnail image data based on the check image signal, and outputs the thumbnail image data to the main control unit 65. The main control unit 65 correlates the thumbnail image data of the check inspection image with the defect data and stores it in the storage unit 66 (step S203).

Next, the main control unit 65 determines whether or not there is a check target defect in which the above-described video storage has not been performed (step S204). If the check object defect remains, the process returns to step S202 and the above process is repeated. On the other hand, when the thumbnail image data for selecting the full defect as the object to be checked has been stored in the storage unit 66, the verification operation is ended, and the process proceeds to the next step S205. As described above, all the defects are photographed based on the position information of the check object defect detected by the previous inspection program, and the check operation for storing the check object is automatically performed.

When the correction start instruction occurs, the main control unit 65 reads out the thumbnail image data of all the target defects (or a part of the thumbnail image data) from the storage unit 66, and outputs the thumbnail image data to the display 7. The display 7, based on the input thumbnail image data, for example, as shown in FIG. 3, displays (step S205) the check image 308 of each defect as a thumbnail image of the reduced image. The operator can visually confirm the thumbnail image of the check inspection image displayed in the list, and while the operation operation unit 64 is squeaking, display the check image movement as the correction target defect and select the cursor 300. At this point, the operator can check the image from the check and select the complex that must be corrected. Number of defects. The operation unit 64 outputs a signal according to the operator's operation to the main control unit 65. The main control unit 65 can select a defect to be corrected based on the signal (step S206).

Next, the main control unit 65 notifies the platform control unit 63 of one of the defective coordinates of the selected defect, and instructs the movement of the stage 2. The platform control unit 63 that receives the instruction drives the platform 2 and controls the amount of movement based on the defective coordinates that have been notified. The platform 2 moves the substrate 1 to a position where the selected defect enters the field of view of the objective lens 14 (step S207). Next, the main control unit 65 indicates the laser irradiation position and shape of the relative defect to the laser control unit 61. The laser control unit 61 that receives the instruction can control the laser output formed by the laser light source 4. The laser light from the laser light source 4 is irradiated onto the defect of the substrate 1 to perform predetermined defect correction (step S208).

Next, the main control unit 65 determines whether or not there is a defect to be corrected by the defect correction (step S209). In the case where the correction target defect remains, the process returns to step S207 and the above processing is repeated. On the other hand, when the laser light irradiation with respect to the full defect selected as the correction target is completed, a series of operations ends.

As described above, it is conventional to check each defect by one microscope, and since it is necessary to judge the necessity of defect correction every time, the operator often performs the operation before the defect correction device, and thus the burden on the operator increases. . On the other hand, according to the present embodiment, the check operation of each defect is automatically performed based on the respective defective coordinate data detected by the upstream inspection device, and the thumbnail image of the defect captured by the check operation is displayed on the display 7. Display, because the operator can select the defect of the correction object at one time according to the display, so Reduce the burden on the operator's operation.

Moreover, according to the defect coordinate data detected by the defect correction device in the pre-inspection program, when the defect is automatically checked and photographed, the operator can operate other devices during the checking operation because the operator does not need to stand in front of the defect correction device, and can be efficient. Work on the ground. Of course, since the operator can operate the plurality of defect correction devices, the defect correction can be performed efficiently.

Further, the operator can visually grasp the number of defects, the appearance of the defect, the tendency, and the like by the display of the display 7 in a list to check the thumbnail images of each of the defects. In the manufacturing process, it is desirable to shorten the time required for the defect correction (correction processing time). As described above, the operator can efficiently select the correction by considering the correction processing time by grasping the number of defects, the appearance of the defect, and the tendency. The defect of the object. For example, in the case where the correction processing time must be shortened to the shortest time, the operator can select only the necessary minimum limit, and the subsequent manufacturing process becomes an important defect of the problem point, and in the case of ample time, it is also possible to select Defects other than important defects.

Further, in step S208, a thumbnail image of the pre-corrected image and the corrected image which are irradiated with the laser light and corrected for the substrate 1 before and after the defect may be generated by the camera 5. In this case, the laser control unit 61 sets the laser output of the laser light source 4 to off. The camera 5 photographs the surface of the substrate 1 before and after the laser irradiation, generates a video signal, and outputs it to the control device 6. The video processing unit 62 of the control device 6 generates thumbnail image data before and after the defect based on the video signal, and outputs the thumbnail image data to the main control unit 65. The main control unit 65 stores the thumbnail image data in the storage unit 66 as the thumbnail image data after the laser irradiation related to the laser image data before the laser irradiation.

The main control unit 65, for example, irradiates the laser beam with the full-defect correction target, and then reads out the thumbnail image data irradiated with the laser light from the storage unit 66, and outputs the thumbnail image data. The display 7 displays the thumbnail image 310 after the corrected image according to the thumbnail image data, and as shown in FIG. 3, is displayed in a list with the thumbnail image 312 of the corrected image. Thereby, the operator can visually correct the corrected image and confirm whether it has been correctly corrected. In the case where there is a defect that must be corrected again, the defect may be re-registered as the correction target, and the above processing is repeated again.

Next, an example of a screen displayed on the display 7 will be described. Fig. 3 is a view showing an example of a display screen. The repair start button 301 is for inputting a button for starting the laser correction of the selected defect. The operator can, for example, operate the mouse, merge the cursor 300 with the repair start button 301, and click the mouse to start the processing from step S206 onward in FIG. The repair interrupt button 302 is a button for inputting a laser correction interrupt. As described above, when the operator aligns the cursor 300 with the repair interrupt button 302 and clicks the mouse, the illumination of the laser light is interrupted.

The additional button 303 is a button for registering (adding) a defect to be corrected to the defect correction device. When the delete button 304 is selected, the button for registering an arbitrary defect is released from the defect of the defect correction device from the defect to be corrected. The full delete button 305 has the same function as the selection delete button 304, and is a button for canceling the full defect registration of the defect correction device by the defect to be corrected. The end button 306 is a button for ending the full action.

The check image field 307 is used to check the field of the image of the defect that has been photographed by the camera 5 during the check operation. Third In the figure, a thumbnail image 308a to 308e in which the inspection image has been reduced is displayed in a list. The operator operates the mouse of the defect selection unit to align the cursor 300 with any of the thumbnail images 308a to 308e and clicks the mouse, and causes the cursor 300 to be aligned with the additional button 303, and then clicks the mouse to make the specified The defect of the correction target displayed by the inspection inspection image 308c is registered in the defect correction device, and the frame indicating the registered thumbnail image is highlighted with a color and a thick line. In Fig. 3, the registration frame is highlighted by thick lines, and thumbnail images 308a, 308c, and 308d are highlighted.

When the repair start button 301 is clicked, the defect correction is performed on the defect displayed as the thumbnail image selected by the check image field 307. When the check images 308a to 308e are selected, the operator can also select one check image by aligning the cursor 300 with the thumbnail image of the check image displayed on the display of the display 7 and click the mouse, and the operator You can also drag the mouse to select multiple check images.

The pre-correction image field 309 is a field in which the thumbnail image before the defect correction by the camera 5 is displayed in correspondence with the check image 308 before the laser light to be registered as the correction target is irradiated with the laser beam. In Fig. 3, thumbnails 310a, 310c, and 310d corresponding to thumbnail images 308a, 308c, and 308d are displayed. The corrected image field 311 is a field in which the thumbnail image registered as the correction target is displayed corresponding to the thumbnail image after the correction (after irradiating the laser light) and the image to be checked or corrected. In Fig. 3, corrected thumbnails 312a, 312c, and 312d corresponding to thumbnails 310a, 310c, and 310d are displayed.

The defect list column 313 displays fields of defect data (coordinates, sizes, etc.) corresponding to the respective thumbnails displayed in the check image field 307. Corresponding to The defect data of the thumbnail of the object registration is corrected, and the defect data corresponding to, for example, the unregistered thumbnail image can be expressed in different colors.

In addition, when the defect in the thumbnail image is reduced to be difficult to see, the operator can also align the cursor 300 with any thumbnail image on the check image field 307, and double-click or the like to specify the enlargement, and can read out from the memory unit 66. The thumbnail map corresponds to the check image before the reduction processing. Alternatively, the operator can also align the cursor 300 with the thumbnail image on the check image field 307, and double click, that is, the camera 5 can again display the defect of the thumbnail image to display the defect check image.

When the defective image is displayed again, the main control unit 65 detects the signal output from the operation unit 64, and based on the signal, determines which defect has been selected as the re-imaging target. The main control unit 65 identifies the coordinates of the defect based on the inspection data stored in the storage unit 66, and notifies the platform control unit 63 of the coordinates, and simultaneously instructs the movement of the platform 2. The platform control unit 63 that receives the instruction drives the platform 2 and controls the amount of movement based on the notified defective coordinates. The platform 2 moves the substrate 1 to a position where the selected defect enters the field of view of the objective lens 14.

The camera 5 is a surface of the photographic substrate 1 and generates an image signal, and is then output to the control device 6. The image processing unit 62 of the control device 6 outputs the image data based on the image signal to the main control unit 65. The main control unit 65 outputs the image data to the display 7. The display 7 displays the surface image of the substrate 1 based on the image data. Thereby, the operator can reconfirm the defects in the latest inspection image of the inspection.

Hereinabove, the embodiment of the present invention has been described in detail with reference to the drawings, but with The body structure is not limited to the embodiments, and design changes and the like are also included without departing from the scope of the invention. For example, in the above embodiment, although the stage 2 of the support substrate 1 is set to move, the optical system having the objective lens 14 may be moved in the XY direction on the substrate 1, or the stage 2 and the object may be provided. The inspection head of the objective lens 14 relatively moves in the uniaxial direction in the X direction and the Y direction, respectively. Further, the objective lens 14 may have the same magnification as that for the substrate 1 for observation and laser irradiation, or may have different magnifications. Moreover, the original image data and the thumbnail image data before the reduction by the camera 5 can also be recorded together.

1‧‧‧Substrate

2‧‧‧ platform

3‧‧‧Light source

4‧‧‧Laser light source

5‧‧‧ camera

6‧‧‧Control device

61‧‧‧Laser Control Department

62‧‧‧Image Processing Department

63‧‧‧ Platform Control Department

64‧‧‧Operation Department

65‧‧‧Main Control Department

66‧‧‧Memory Department

7‧‧‧ display

8‧‧ ‧ mirror

9‧‧‧ Objective lens

10,12‧‧ lens

11, 13‧‧ ‧ splitter

14‧‧‧object objective

300‧‧‧ cursor

301‧‧‧Repair begins

302‧‧‧ interrupt button

303‧‧‧Add button

304‧‧‧Select delete button

305‧‧‧Delete button

306‧‧‧End button

307‧‧Check the image field

308‧‧Check the inspection image

308a~308e‧‧‧ thumbnail image

309‧‧‧Revised image bar

310‧‧‧ thumbnail image

310a, 310c, 310d, 312a, 312c, 312d‧‧‧ thumbnail

311‧‧‧Fixed image bar

313‧‧‧Defect list column

Fig. 1 is a flow chart showing the construction of a defect correcting device according to an embodiment of the present invention.

Fig. 2 is a flow chart showing the operation of the defect correcting device of the present invention.

Fig. 3 is a view showing a display example of a display example displayed on the screen of the defect correction device of the present invention.

1‧‧‧Substrate

2‧‧‧ platform

3‧‧‧Light source

4‧‧‧Laser light source

5‧‧‧ camera

6‧‧‧Control device

7‧‧‧ display

8‧‧ ‧ mirror

9‧‧‧ Objective lens

10,12‧‧ lens

11, 13‧‧ ‧ splitter

14‧‧‧object objective

61‧‧‧Laser Control Department

62‧‧‧Image Processing Department

63‧‧‧ Platform Control Department

64‧‧‧Operation Department

65‧‧‧Main Control Department

66‧‧‧Memory Department

Claims (11)

A defect correction device for correcting defects on a substrate, comprising: a photographing unit, which is based on defect position information of the inspection data of the substrate which is inspected according to an inspection program before the correction procedure, and photographing is a defect of the object to be inspected The image processing unit reduces the image of the defect inspection image by the image capturing unit to generate a thumbnail image; and the memory unit stores the defect inspection image and the thumbnail image in association with the thumbnail image; And displaying the thumbnail image; the defect selection unit selects a defect to be corrected on the thumbnail image displayed on the display unit; and the defect correction unit corrects the defect selected by the defect selection unit; And a control unit for controlling the imaging unit, the display unit, and the defect correction unit. The defect correction device of claim 1, wherein the control unit selects the true defect that must be corrected as the object of inspection based on the defect position information of the inspection data, and uses the photography of the photography unit as the selected object to be checked. Defects, and save the check image in the memory. The defect correction device of claim 1, wherein the control unit is classified into no need to repair according to the defect size or position of the inspection data. It is a defect that is a defect and a real defect that must be corrected, and is selected as a defect that must be corrected. The defect correction device of claim 1, wherein the control unit stores the defect data in association with the thumbnail image data of the verification inspection image, and stores the thumbnail image data in the memory portion by the memory portion. The list is displayed on the display unit. The defect correction device according to claim 1, wherein the control unit specifies the thumbnail image displayed on the display unit by the cursor by the defect selection unit, and highlights a frame of the thumbnail image to be registered. The defect correction device according to the first aspect of the invention, wherein the control unit, based on the defect position information of the inspection data, corrects all defects of the object to be inspected by the photographing unit before the defect correction of the defect correcting unit, and then reduces the defect The verification check image of the check image is stored in the memory unit, and the check image displayed on the display unit is displayed in a list by zooming in and out, and displayed on the display unit in an enlarged manner. The defect correction device of claim 1, wherein the control unit stores the defect data in association with the thumbnail image data of the check image and stores the image in the memory portion, and reads the thumbnail image data from the memory portion. The thumbnail image is displayed on the display unit in a list, and the defect data corresponding to the thumbnail image is displayed on the display unit. The defect correction device of claim 6, wherein the control unit moves the cursor by the defect selection unit to cause the registration as a correction target The aforementioned defect data is changed to a color different from the aforementioned defect data that is not registered and displayed. The defect correction device according to claim 1, wherein the control unit causes the imaging unit to image the corrected image of the defect corrected by the defect correction unit, and corrects the corrected image captured by the imaging unit. The thumbnail image is displayed on the display unit in correspondence with the corrected thumbnail image. The defect correction device according to claim 1, wherein the control unit causes the imaging unit to image the corrected image of the defect corrected by the defect correction unit, and corrects the corrected thumbnail image that has been reduced for the display unit The defect check check screen is displayed on the display unit in correspondence. The defect correction device according to claim 9 or 10, wherein the control unit displays the corrected thumbnail image on the display unit, and moves the cursor by using the defect selection unit in the corrected thumbnail image The specified defect is logged in as a defect that must be corrected again.