TWI408088B - A wafer container with at least one oval latch - Google Patents

Abstract

A w afer container includes a container body that having an opening front on sidewall, at least a pair of socket holes are adjacently disposed in the edge of opening of the container body, a plurality of slots are disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, at least a pair of latch holes are adjacently disposed in the edge of door and corresponding to socket holes, the characteristic in that: each socket hole having an inner groove with an inclined surface to forming a structure with wide outer and narrow inner, at least one latch is disposed in the door and each latch includes a oval cam, a pair of moving bars, a first end of each moving bar connecting to two opposite side of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves are disposed between the first end and the second end of each moving bar, a pair of rollers are disposed on the door and each roller is embedded in each moving groove of moving bar, and a plurality of springs being a integral part of the moving bars.

Description

Open wafer cassette with elliptical latch structure

The present invention relates to a front opening wafer cassette, and more particularly to a door latch structure disposed inside a door body of a front opening wafer cassette.

Semiconductor wafers are transported to different workstations because they need to be processed through various processes and need to be matched with process equipment. In order to facilitate the handling of wafers and to avoid external pollution, a sealed container is often used for automated equipment transportation. Please refer to Figure 1 for a schematic view of a wafer cassette of the prior art. The wafer cassette is a front opening type pod (FOUP) having a box body 10 and a door body 20, and the box body 10 is internally provided with a plurality of slots 11 for horizontally accommodating a plurality of crystals. a circle (not shown), and having an opening 12 on one side of the casing 10 for loading and loading of the wafer, and the door body 20 has an outer surface 21 and an inner surface 22, the door body The 20 series is bonded to the opening 12 of the casing 10 by the inner surface 22 for protecting a plurality of wafers inside the casing 10. In addition, at least one latch opening 23 is disposed on the outer surface 21 of the door body 20 for opening or closing the front opening wafer cassette. In the above-mentioned front-opening wafer cassette, since the semiconductor wafer is horizontally placed inside the casing 10, a wafer restraint is required in the front opening wafer cassette handling process to avoid the wafer restraint. The vibration generates an eccentricity or moves toward the opening 12 of the casing 10.

Please refer to FIG. 2, which is a schematic diagram of a door of a front opening wafer cassette disclosed in U.S. Patent No. 6,736,268. As shown in FIG. 2, the inner surface 22 of the door body 20 is provided with a recessed area 24 extending from the top end 221 of the inner surface 22 to the bottom end 222 and attached to the left and right latch structures 230 (in the interior of the door body) Between the holes, and further, the wafer stopper mold is further disposed in the recessed region 24. The wafer constraining module is composed of two wafer restriction members 100, and a plurality of wafer contacts 110 are disposed on each wafer restriction member 100 to utilize the wafer contact head 110. Hold the opposite wafers to prevent the wafer from being eccentric due to vibration during the transfer or moving toward the opening of the case. However, the wafer constraining module is disposed in the recessed area 24 of the inner surface 22 of the door body 20, so that the wafer can only be flattened to the inner surface 22 of the door body 20 or can only fall slightly into the recessed area 24, It is not possible to effectively drop the wafer into the recessed area 24 to shorten the size of the front and rear diameter of the front open wafer cassette. In addition, the particulate dust generated by the friction between the wafer limiter module and the wafer is easily accumulated in the recessed area 24, and the wafer limiter module is separated from the recessed area 24 of the inner surface 22 of the door body 20 in cleaning. Such repeated separation and assembly are likely to cause loosening of the wafer limiter module.

In addition, a schematic diagram of the latch structure 230 in the door body 20 of the front open wafer cassette is disclosed in another U.S. Patent No. 5,711,427. As shown in Figure 3. The manner in which the door body 20 and the casing 10 are combined is mainly that a movable insertion piece 231 is respectively disposed on both sides of the door body 20 (ie, between the outer surface 21 and the inner surface 22), and is near the edge of the opening of the casing 10. The insertion hole 13 (refer to FIG. 1) is provided to correspond to the insertion end 231, and the rotation of the latch opening 23 (refer to FIG. 1) provided on the outer surface 21 of the door body 20 is used to make the insertion end 231. The purpose of fixing the door body 20 to the casing 10 is achieved by combining with the jacks, wherein the rotation of the latch opening 23 to control the reciprocating movement of the spigot 231 is achieved by a circular cam 232.

In the implementation operation of the semiconductor factory, the opening of the front opening wafer cassette is mainly by a wafer loading mechanism, and the wafer loading mechanism has at least one opening latch, and the wafer loading mechanism uses the opening latch to insert the front opening crystal. The latch opening 23 on the outer surface 21 of the door body 20 of the round box rotates the cam 232 to drive the movable plug 231 to open or close the front open wafer cassette.

In addition, the beauty of the latch structure in the door body of other exposed front open wafer cassettes U.S. Patent Nos. 5,915,562, 5,957,292, 6,622,883, 6,902,063, and the like. In order to achieve the purpose of airtightness when the door body is engaged with the box body, the movable insertion piece is displaced in the longitudinal direction to clamp an elastic airtight member by the movable insertion end, in order to simultaneously The purpose of closing the front open wafer cassette and airtightness is achieved. However, these conventional door latch patents are composed of complex mechanical structures. In addition to increasing the failure rate, excessive mechanical friction is generated during the operation, which causes wafer contamination; The displacement of the movable plug is used to clamp the elastic airtight member, and the airtight effect is not good, and the airtightness cannot be maintained for a long time.

Moreover, some restriction members are disposed on the inner surface of the door body 20 of the conventional front open type wafer cassette, so that when the door body 20 covers the case body 10, the restriction members contact the wafer, so that the wafer is It is completely fixed to reduce the eccentricity of the wafer in the front open wafer cassette due to transportation. In order to avoid the force of the spacer being in contact with the wafer, the force is too large to cause collision and friction of the wafer. Therefore, as shown in FIG. 4, there are some US patents that disclose the arrangement of the elastic member 86 in the latch structure 230. Between the cam 232 and the door body 20, during the rotation of the cam 232 and driving the movable spigot 231 to close the front opening wafer cassette, the elastic member 86 can exert a damping effect so as to be disposed on the inner surface of the door body 20. The restriction member can be brought into contact with the wafer in a gentle and smooth state, so that the problem of collision and friction can be solved. Further, the US patents related to the design include US 6,880,718, US 7,168,587, US 7,182,203 and the like. However, this manner of lateral traction is easy to generate an offset force in the direction in which the movable spigot 231 moves, which may cause it to be unable to be caught in the insertion hole of the casing 10, so that the casing 10 and the door body 20 cannot be Cover. At the same time, it will also increase the manufacturing cost of the front open wafer cassette.

According to the prior art, in the door structure of the open wafer cassette, the latches are composed of complicated mechanical structures, and in addition to increasing the failure rate, the latches are also operated. During the process, too much mechanical friction is generated, which may cause contamination of the wafer. To this end, one of the main objects of the present invention is to provide a latch structure in which an elliptical cam is disposed in a front open type wafer cassette, so that the sliding device can reciprocate only on a single plane, so that the structure of the latch can be simplified.

Another main object of the present invention is to provide a latch structure in which an elliptical cam is disposed in a front opening wafer cassette, and the pulley can be designed to reduce the round trip when the elliptical cam drives the sliding device to reciprocate on a single plane. Friction during exercise can reduce pollution.

A further main object of the present invention is to provide a latch structure in which an elliptical cam is disposed in a front open type wafer cassette, which can form a recessed area between the latch structures, so that the recessed area can effectively accommodate the wafer, so The size of the front and rear diameters of the front open wafer cassette is shortened, and the center of gravity of the entire wafer cassette is concentrated in the center of the wafer cassette to increase the stability of the wafer cassette.

In order to achieve the above-mentioned objects, the present invention discloses a front-opening wafer cassette, which mainly comprises a box body, and a plurality of slots are arranged inside the box body for accommodating a plurality of wafers, and are arranged on one side of the box body. Forming an opening for inputting and outputting a plurality of wafers, and arranging at least one pair of jacks at an edge of the opening of the box body, and a door body having an outer surface and an inner surface disposed at an edge of the door body At least one pair of latch holes corresponding to each pair of jacks, the door system is combined with the inner surface and the opening of the box body, and is used for protecting a plurality of wafers inside the box body, wherein the front open type wafer cassette is characterized by: a box body Each of the insertion holes on the edge has an inner groove, and each of the inner grooves is provided with a sloped surface to form an inner groove having a narrow outer width and a narrow inner surface, and the inner surface of the door body is provided with a concave area and the concave area is located at two Between the protruding platforms, each of the protruding platforms is internally provided with a latch structure, each of the latch structures includes an elliptical cam and a pair of sliding devices, and each sliding device has a first end and a point of the elliptical cam. Second end A guide structure and disposed between the first and second ends have a sliding slot, at least one of The pulleys are disposed inside the protruding platform and each of the pulleys is embedded in the sliding slot of each sliding device, and a positioning elastic piece is integrally connected with each sliding device, and each sliding device is controlled by rotating the elliptical cam. In each pair of jacks and latch holes.

The invention further discloses a front open type wafer cassette, which mainly comprises a box body, wherein the box body is provided with a plurality of slots for accommodating a plurality of wafers, and an opening is formed on one side of the box body for a plurality of The input and output of the wafer, and at least one pair of jacks disposed at an edge of the opening of the box body, and a door body having an outer surface and an inner surface, and at least one pair and each pair are disposed at an edge of the door body The corresponding latching hole of the jack, the door system is combined with the inner surface and the opening of the box body, and is used for protecting a plurality of wafers inside the box body, wherein the front opening type wafer cassette is characterized by: each jack on the edge of the box body Each of the inner grooves has a sloped surface, and a groove is formed in each of the inner grooves to form an outer width and a narrow inner structure. At least one latch structure is disposed between the outer surface of the door and the inner surface, and each of the latch structures includes An elliptical cam, a pair of sliding devices, each sliding device having a first end that is in contact with the elliptical cam circumference and a second end having a guiding structure and a chute disposed between the first end and the second end, At least one pair of pulleys Positioned between the outer surface of the door and the inner surface and each of the pulleys is embedded in the sliding slot of each sliding device, and a positioning elastic piece integrally connected with each sliding device, each sliding by controlling the rotation of the elliptical cam The device travels between each pair of jacks and latch holes.

The present invention discloses a front opening wafer cassette having a box body and a door body. The box body is internally provided with a plurality of slots for horizontally accommodating a plurality of wafers, and has a side on one side of the box body. The opening is for loading and loading of the wafer, and the door body is combined with the opening of the casing to protect a plurality of wafers inside the casing. In addition, at least one latch opening is arranged on the outer surface of the door body for opening or sealing Closed front open wafer cassette. Since the structure of some of the front-opening wafer cassettes used in the present invention is the same as described above, the detailed manufacturing or processing thereof is not fully described in the following description. Moreover, the drawings in the following texts are not completely drawn in accordance with actual relevant dimensions, and their function is only to show a schematic diagram relating to the features of the present invention. In addition, for a more complete and clear disclosure of the technical content, the object of the invention, and the effect of the invention, the invention will be described in detail below.

Please refer to FIG. 5, which is a top view of the latch structure 60 in the door body 20 of the open wafer cassette of the present invention. As shown in FIG. 5, a pair of latch structures 60 are included between the outer surface and the inner surface of the door body 20, wherein each of the latch structures 60 is formed by an elliptical cam 62 and a pair of sliding devices that are in contact with both ends of the elliptical cam 62. 64. At least one pulley 66 is disposed between the outer surface and the inner surface of the door body 20 and embedded in the sliding groove 642 of the sliding device 64 and at least one positioning elastic piece 68 integrally connected with the sliding device 64. Next, please refer to Fig. 6, which is an enlarged schematic view of the contact end of the elliptical cam 62 and the sliding device 64 in Fig. 5. As shown in Fig. 6, in a preferred embodiment of the present invention, the sliding device 64 can be further provided with a positioning pulley 644 at a point of contact with both ends of the elliptical cam 62, which can be lowered when the elliptical cam 62 is rotated. The friction between the sliding device 64 and the elliptical cam 62; in addition, by the design of the plurality of positioning grooves 622 on the elliptical cam 62, when the elliptical cam 62 rotates, the positioning pulley 644 can smoothly slide into the positioning groove 622. , as a limit point when the elliptical cam 62 rotates. In the embodiment of the present invention, the elliptical cam 62 may be made of a metal material, which may also be formed of a polymer plastic material, which is not limited by the present invention.

Next, please refer to FIGS. 7A to 7C, which are schematic views of the sliding device 64 of the latch structure 60 of the present invention. A positioning pulley 644 is disposed on one end of the sliding device 64, and a planar plane 646 is formed on the opposite end of the sliding device 64. A chute 642 is formed which is engageable with a pulley 66 (shown in Figure 7B) that is secured within the door body 20. Further, the sliding device 64 is coupled to one end of the positioning elastic piece 68 in the vicinity of the end of the positioning pulley 644, and the other end of the positioning elastic piece 68 is fixed to the door body 20. Therefore, when the door body 20 is to close the opening 12 of the casing 10, the door body 20 is first combined with the casing 10, and then the elliptical cam 62 is rotated; when the elliptical cam 62 is rotated, the sliding device 64 is turned to the door by the elliptical cam 62. The body 20 is advanced in the direction of the edge, and the solid plane 646 of the sliding device 64 is passed through the latch hole 27 in the door body 20 and into the socket 13 located near the edge of the opening of the casing 10 and corresponding to the latch hole 27, so that the box The body 10 is integrated with the door body 20 to complete the action of closing the casing 10. At this time, the positioning elastic piece 68 is compressed, so when the door body 20 is to be opened, as the elliptical cam 62 rotates, the positioning elastic piece 68 also drives the sliding device 64 to return to the open state according to the force provided by Hooke's law. position. In the embodiment of the present invention, the sliding device 64 and the positioning elastic piece 68 may be made of a metal material, which may also be formed of a polymer plastic material, which is not limited by the present invention. The material of the pulley 66 is also not limited.

Further, as shown in Fig. 7B, in a preferred embodiment, the pulleys 66 are disposed in pairs inside the door body 20 at an appropriate distance from each other. Therefore, when the pulley 662 and the pulley 664 are embedded in the sliding groove 642 of the sliding device 64, the pair of pulleys 66 can correctly and smoothly guide the plane 646 of the sliding device 64 to pass through the latch hole 27 in the door body 20.

It is emphasized herein that the present invention, in the foregoing process, is an elliptical cam 62 and a sliding device 64 to illustrate the operation of the latch structure 60, but in practice each elliptical cam 62 is associated with a pair of sliding devices 64. Contact, and each door body 20 is internally provided with a pair of latch structures 60 (as shown in Fig. 5: the door body 20 of the present invention is in an open state at this time). Since the cam in the latch structure 60 of the present invention is an elliptical cam 62, the elliptical cam 62 is formed on the outer surface 21 of the door body 20. A pair of latch openings (not shown). Since the elliptical cam 62 has a longer radius Y and a shorter radius X, the present invention is used as a starting element for controlling the reciprocating movement of the sliding device 64 by the difference between the different radii of the elliptical cam 62; For example, if it is desired to move the sliding device 64 up or down to the sides of the door body 20 by 10 mm to 30 mm so that the front end of the sliding device 64 can pass through the door body 20, the longer radius of the elliptical cam 62 at this time and The difference in length between the shorter radii must be at least 10mm~30mm. Since the elliptical cam 62 is open when the door body 20 is opened, the two ends of the shorter radius are in contact with a pair of sliding devices 64 at both ends. Obviously, when the door body 20 is closed with the casing 10, By rotating the elliptical cam 62, the sliding means 64 at both ends become brought into contact with the longer radius of the elliptical cam 62; since the difference in length between the longer radius and the shorter radius of the elliptical cam 62 is at least 10mm~30mm, when the elliptical cam 62 rotates to the positioning groove 622 at the long radius Y position, the front end plane 646 of the sliding device 64 can pass through the latch hole 27 on the door body 20, as shown in Fig. 8. It is emphasized here that since the sliding device 64 is adjacent to one end of the positioning pulley 644, it is coupled to one end of the positioning elastic piece 68, and the other end of the positioning elastic piece 68 is fixed to the door body 20. Therefore, when the elliptical cam 62 is rotated to the positioning groove 622 at the long radius Y position, the sliding device 64 is pushed by the elliptical cam 62 toward the latch hole 27 on the edge of the door body 20, at which time the positioning elastic piece 68 is compressed, so When the door body 20 is to be opened, as the elliptical cam 62 rotates to the positioning groove 622 at the short radius X position, the positioning elastic piece 68 also drives the sliding device 64 to return to the open state according to the force provided by Hooke's law. The position (i.e., the elliptical cam 62 stays in the positioning groove 622 at the short radius X position).

It will be apparent that the latch structure 60 of the present invention, with the movement of the elliptical cam 62, only performs a reciprocating motion of advancement and retraction without any displacement in any longitudinal (i.e., vertical) direction, and thus, the latch structure 60 of the present invention. A simpler design. When the door body 20 of the present invention is closed with the casing 10, it is fixed to the inner surface 22 of the door body 20. A plurality of wafer limiting members (not shown) are directly in contact with the wafer, and the cam 62 drives a pair of sliding devices 64 to move toward the edge of the door body 20, and then the front end plane 646 of the sliding device 64 is worn. The latch hole 27 (as in Fig. 8) on the door body 20 is fastened to the insertion hole 13 (as shown in Fig. 1) near the edge of the opening of the casing 10 and corresponding to the latch hole 27. Finally, the airtight member (not shown) disposed between the door body 20 and the casing 10 can be inflated via an inflator to isolate the interior of the casing 10 from the outside.

Next, please refer to FIG. 9 to FIG. 13A and FIG. 13B, which are top views of the latch structure in the door body of the open wafer cassette before the other preferred embodiment of the present invention. The basic structure of the front open wafer cassette includes a box body 10 and a door body 20 as shown in the above first embodiment. The box body 10 is internally provided with a plurality of slots 11 for horizontally accommodating a plurality of wafers, and in the box. One side of the body 10 has an opening 12 for carrying and loading the wafer, and the door body 20 has an outer surface 21 and an inner surface 22, and the door body 20 is connected to the casing 10 by the inner surface 22 and the casing 10. The openings 12 are combined to protect a plurality of wafers inside the casing 10. In addition, at least one latch opening 23 is disposed on the outer surface 21 of the door body 20 for opening or closing the front opening wafer cassette; wherein, in this embodiment, another configuration is mainly disclosed on the door body 20. The latch structure is as shown in Fig. 9 to Fig. 13A and Fig. 13B.

First, referring to FIG. 13A, the jacks 13 on the casing 10 each have an inner slot 131, and a chamfer 132 is disposed in each inner slot 131, so that the inner slot 131 forms an outer width and a narrow inner portion. structure.

Next, please refer to FIG. 9 , which is a schematic diagram of a door body of another front open type wafer cassette of the present invention. As shown in Fig. 9, each of the latch structures 70 is comprised of an elliptical cam 71, a pair of slides 72, each slide 72 having its first end 721 in contact with the elliptical cam 71 at one point and its second end 722 having a guiding structure 73 and a sliding slot 76 disposed between the first end 721 and the second end 722, at least one pair of pulleys 76 It is placed between the outer surface 21 and the inner surface 22 of the door body 20 and each of the pulleys 76 is embedded in the sliding groove 723 of each sliding device 72, and a positioning elastic piece 78 integrally connected with each sliding device 72. It is apparent that each of the above-described latch structures 70 is disposed between the outer surface 21 and the inner surface 22 of the door body 20.

Next, please refer to FIG. 10, which is an enlarged schematic view of the contact end of the elliptical cam and the sliding device in FIG. As shown in Fig. 10, in the present embodiment, the first end 721 of the pair of sliders 72 is in contact with the circumference of the elliptical cam 71, and the first end 721 of each of the sliders 72 is in contact with the elliptical cam 71. The positioning structure 74 is integrally connected with the sliding device 72 and is formed by injection molding. The positioning structure 74 is a hollowed-up elastic structure 741, which is hollowed out. The elastic structure 741 has a hollow portion 741a, and the positioning structure 74 has a positioning portion 742 protruding from the elastic structure 741 and located at the hollow portion 741a. In addition, a plurality of positioning grooves 712 are disposed on the elliptical cam 71. The shape of the positioning groove 712 may be U-shaped or V-shaped. When the elliptical cam 71 rotates, the positioning portion 742 of the positioning structure 74 is engaged with the positioning groove 712 of the elliptical cam 71 to provide a function of automatically aligning and stopping, and thereby serving as a limitation when the elliptical cam 71 rotates. point. In the present embodiment, the elliptical cam 71 may be made of a metal material, which may also be formed of a polymer plastic material. The material of the elliptical cam 71 is not limited in the present invention.

Referring to FIG. 10, since the first end 721 of the sliding device 72 is provided with a positioning structure 74, a guiding structure 73 is disposed on the second end 722 of the sliding device 72, and the sliding device 72 is disposed. A sliding slot 723 is formed between the one end 721 and the second end 722. The sliding slot 723 can be embedded with the pulley 76 fixed in the door body 20. In addition, one end of the positioning elastic piece 78 is fixed to the door body 20, and the other end of the positioning elastic piece 78 is connected to the sliding device 72 in the vicinity of the end of the positioning structure 74.

Next, please refer to Fig. 11, which is a schematic view of the guiding structure of the latch structure of the present invention. As shown in FIG. 11, the guiding structure 73 is disposed on the second end 722 of the sliding device 72. The guiding structure 73 is a roller structure 731, such as an elongated roller. Referring to FIG. 12A, a pressing member 75 is further disposed between the outer surface 21 and the inner surface 22 of the door body 20. The pressing member 75 is a single body and has a substantially rectangular shape in a rectangular shape. One of the longer sides has a pivoting portion 751, and the pressing member 75 is fixed to the inside of the door body 20 by the pivoting portion 751, and the pivoting member 75 is pivoted, and the relative position of the pressing member 75 is opposite to the roller structure 731. The pressing members 75 are substantially corresponding and perpendicular to each other, wherein the pressing member 75 is formed of a polymer plastic material. Therefore, by controlling the rotation of the elliptical cam 71, each of the sliding devices 72 can be made to and from each pair of the insertion holes 13 and the latch holes 27, so that when the door body 20 is to close the opening 12 of the casing 10, The door body 20 is combined with the casing 10, as shown in Figures 12A and 13A. At this time, the sliding device 72 has not yet started to operate, so the relative positions of the roller structure 731 and the pressing member 75 are substantially corresponding and perpendicular to each other; When the cam 71 rotates, the sliding device 72 is driven by the elliptical cam 71 to advance toward the edge of the door body 20, so that the roller structure 76 of the sliding device 72 can pass through the latch hole 27 on the door body 20 (as shown in Fig. 8). Extending into the insertion hole 13 (as shown in FIG. 1) at the edge of the opening of the casing 10, the casing 10 and the door body 20 are integrated to complete the action of closing the casing 10, wherein when the roller structure 731 protrudes into the socket In the middle of the 13th, the roller structure 731 slides along the inclined surface 132 of the inner groove 131. Since the inner groove 131 is a structure having an outer width and a narrow inner width, when the roller structure 731 slides, the sliding device 72 is caused to shift the casing. Acting, thereby causing the door body 20 to generate a force for pressing the casing 10 The door body 20 and the casing 10 are tightly coupled, and the roller structure 731 and the pressing member 75 are in contact with each other due to the influence of the sliding device 72. Therefore, when the roller structure 731 slides, the pressing member is driven. 75 is rotated, and the rotation of the pressing member 75 is restricted by the opening of the inner groove 131, so that the roller structure 731 stops sliding. The sliding, the angle between the roller structure 731 and the pressing member 75 is changed from the original perpendicular to an acute angle; for example, when the roller structure 731 slides about 10 to 15 mm on the inclined surface 132, the acute angle is about 40. ~60 degrees, as shown in Figure 12B and Figure 13B. However, when the roller structure 731 slides to the bottom of the inner groove 131, the roller structure 731 will slide in the opposite direction of the movement of the sliding device 72 due to the influence of the inclined surface 132 of the inner groove 131 and the gravity of the earth. The device 72 still has the force of pressing the casing 10 and is in contact with the pressing member 75, whereby the pressing member 75 can provide a supporting force, so that the sliding device 72 stops sliding and the roller structure 731 is fixed. In the inner slot 131. Also, since the casing 10 and the door body 20 are integrated into one body, the positioning elastic piece 78 is compressed, as shown in FIG. 10, so when the door body 20 is to be opened, as the elliptical cam 71 rotates, the positioning elastic piece 78 is also based on The force provided by Hooke's law drives the sliding device 72 back to the open position. In the embodiment of the present invention, the sliding device 72 and the positioning elastic piece 78 may be made of a metal material, which may also be formed of a polymer plastic material, which is not limited in the present invention. The material of the pulley 76 is also not limited.

Please refer to FIG. 14 for a further schematic view of another embodiment of the guiding structure of the latch structure of the present invention. The guiding structure 73 is disposed on the second end 722 of the sliding device 72. The guiding structure has a polished circular arc surface 732, and the inclined surface 132 in the slot 13 has a curvature, which will make each other The contact area has low wear and low resistance, as shown in Figure 15A. By controlling the rotation of the elliptical cam 71, each of the sliding devices 72 can be made to and from each pair of the insertion holes 13 and the latch holes 27, so that when the door body 20 is to close the opening 12 of the casing 10, the door body will be first 20 is combined with the casing 10, as shown in Fig. 15A, at which time the sliding device 72 has not yet started to move; when the elliptical cam 71 is rotated, the polished circular arc surface 732 is driven by the elliptical cam 71 toward the edge of the door body 20. The direction is advanced such that the polished arcuate surface 732 of the sliding device 72 can pass through the latch hole 27 in the door body 20 and into the box. In the opening 13 of the opening edge, the casing 10 and the door body 20 are integrated into one body to complete the action of closing the casing 10, wherein the polishing arc is formed when the polished circular arc surface 732 protrudes into the insertion hole 13. The surface 732 slides along the inclined surface 132 of the inner groove 131. Since the inner groove 131 is a structure having an outer width and a narrow inner circumference and the inclined surface 132 has a curvature, when the polished circular surface 732 slides, the sliding device 72 is generated. The action of the displacement of the box body further causes the door body 20 to generate a force for pressing the casing 10, so that the door body 20 and the casing 10 are tightly coupled, and the sliding device 72 still exists due to the influence of the sliding device 72. The force of the casing 10 is pressed together, so that the polished circular arc surface 732 is fixed in the inner groove 131 as shown in Fig. 15B. In the embodiment of the present invention, the sliding device 72 and the guiding portion 76 are made of different materials, wherein the guiding portion 76 can be formed of a polymer plastic material, such as PEEK or Teflon, which has wear resistance and lubrication. And other characteristics.

Since the invention of the latch structure 70 of the present invention is substantially the same as the foregoing, the elliptical cam 71 and the sliding device 72 are used to cooperate with each other, so that the sliding device 72 can be reciprocated into the jack 13 and the latch hole 27, which is implemented in more detail. The manner is the same as the foregoing, and therefore no further description is repeated here.

According to the above, in addition to the arrangement of the latch structure 70 between the outer surface 21 and the inner surface 22 of the door body 20, the latch structure 70 can be disposed inside the two protruding platforms 25 on the inner surface of the door body 20. The related structure is also the same as described above, so the description will not be repeated. In addition, the latch structure 70 disclosed in the present invention is also the same as the foregoing, and thus the detailed description thereof will not be repeated. However, in this embodiment, the position where the pressing member 75 is pivoted is the inside of each of the protruding platforms 25 of the door body 20, and the related operation manner is also the same as the foregoing, and thus the detailed description is not repeated here.

While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The scope of patent protection of the invention shall be The scope of the patent application attached to this specification shall prevail.

10‧‧‧Box

100‧‧‧ Wafer Restrictions

110‧‧‧ wafer contact head

11‧‧‧Slot

12‧‧‧ openings

13‧‧‧ jack

131‧‧‧ Inside slot

132‧‧‧Bevel

20‧‧‧

21‧‧‧ outer surface

22‧‧‧ inner surface

221‧‧‧Top

222‧‧‧ bottom

23‧‧‧Latch opening

230‧‧‧Latch structure

231‧‧‧ 插插

232‧‧‧ cam

24‧‧‧ recessed area

25‧‧‧ protruding platform

27‧‧‧Latch hole

60‧‧‧Latch structure

62‧‧‧Elliptical cam

622‧‧‧ positioning slot

64‧‧‧Sliding device

642‧‧‧Chute

644‧‧‧ Positioning pulley

646‧‧‧The plane of the entity

66‧‧‧ pulley

662‧‧‧ pulley

664‧‧‧ pulley

68‧‧‧ Positioning shrapnel

70‧‧‧Latch structure

71‧‧‧Elliptical cam

712‧‧‧ positioning slot

72‧‧‧Sliding device

721‧‧‧The first end of the sliding device

722‧‧‧Sliding device second end

723‧‧ ‧ chute

73‧‧‧Guide structure

731‧‧‧Roller structure

732‧‧‧ Polished arc surface

74‧‧‧ Positioning structure

741‧‧‧Folding shrapnel structure

741a‧‧‧ hollow part

742‧‧‧ Positioning Department

75‧‧‧Top press

751‧‧‧Pivot Department

76‧‧‧ pulley

78‧‧‧ Positioning shrapnel

86‧‧‧Flexible components

Figure 1 is a schematic diagram of a conventional open wafer cassette.

Figure 2 is a schematic view of the door of the open wafer cassette.

Figure 3 is a schematic view of another door of the prior open wafer cassette.

Figure 4 is a schematic view of another door of the prior open wafer cassette.

Figure 5 is a schematic view of a door body of a front opening wafer cassette of the present invention.

Fig. 6 is a partially enlarged plan view showing the structure of the latch of Fig. 5 of the present invention.

7A to 7C are enlarged views of the sliding device of the latch structure of the present invention.

Figure 8 is a schematic illustration of the closure of the latch structure of the present invention.

Figure 9 is a schematic view of a door body of another front opening wafer cassette of the present invention.

Figure 10 is a schematic view of a door latch structure of the present invention.

Figure 11 is a schematic view of a guiding structure of the present invention.

Figure 12A is a cross-sectional view showing the opening of the latch structure of the present invention.

Figure 12B is a schematic illustration of the closure of the latch structure of the present invention.

Figures 13A and 13B are side views of the guiding structure of the present invention.

Fig. 14 to Fig. 15B are schematic views showing the opening and closing of another door latch structure of the present invention.

10‧‧‧Box

20‧‧‧

70‧‧‧Latch structure

71‧‧‧Elliptical cam

712‧‧‧ positioning slot

72‧‧‧Sliding device

723‧‧ ‧ chute

73‧‧‧Guide structure

74‧‧‧ Positioning structure

76‧‧‧ pulley

78‧‧‧ Positioning shrapnel

Claims (10)

A front open type wafer cassette mainly comprises a box body, wherein the box body is provided with a plurality of slots for accommodating a plurality of wafers, and an opening is formed on one side of the box body for the plurality of crystals a circular input and output, wherein the edge of the opening of the box is disposed with at least one pair of jacks, and a door body having an outer surface and an inner surface, and at least one pair and each of the edges of the door body are disposed For the corresponding latch hole of the jack, the door system is combined with the opening of the box body to protect the plurality of wafers inside the box body, wherein the front open type wafer cassette is characterized by: Each of the insertion holes on the edge of the casing has an inner groove, and each of the inner grooves is provided with a slope so that the inner groove is formed into an outer width and a narrow inner structure, and the inner surface of the door body is disposed a recessed area and the recessed area is located between the two protruding platforms, each of the protruding platforms is internally provided with a latch structure, each of the latch structures comprises an elliptical cam, a pair of sliding devices, and each of the sliding devices is The first end is in contact with the circumference of the elliptical cam and a second end has a guiding structure, and a sliding slot is disposed between the first end and the second end, and at least one pair of pulleys are disposed inside each of the protruding platforms of the door body and each of the pulleys is embedded In the sliding slot of each sliding device, and a positioning elastic piece integrally connected with each sliding device, each sliding device is controlled to and from each pair of jacks by controlling the rotation of the elliptical cam In the latch hole. The open wafer cassette of claim 1, wherein the guiding structure is a roller structure. The front open wafer cassette according to claim 2, further comprising a pressing member pivoted inside each of the protruding platforms of the door body and perpendicular to the roller structure. An open wafer cassette as described in claim 3, wherein the pressure is applied The pieces are one piece. The open wafer cassette of claim 1, wherein the guiding structure has a polished arc surface, and the oblique mask of the slot has a curvature. The open wafer cassette of claim 1, wherein the guiding structure and the sliding device are made of different materials. The open-type wafer cassette according to the first aspect of the patent application, further configured to configure a positioning structure at a first end of each of the sliding devices, and the positioning structure is in contact with the elliptical cam, the positioning structure is formed by a hollow The shrapnel structure is combined with a positioning portion. The open wafer cassette according to the first aspect of the patent application, further comprising a plurality of positioning grooves on the elliptical cam. For example, in the prior open wafer cassette described in claim 1, the at least one restriction module is further disposed on each of the two protruding platforms. A front open type wafer cassette mainly comprises a box body, wherein the box body is provided with a plurality of slots for accommodating a plurality of wafers, and an opening is formed on one side of the box body for the plurality of crystals a circular input and output, wherein the edge of the opening of the box is disposed with at least one pair of jacks, and a door body having an outer surface and an inner surface, and at least one pair and each of the edges of the door body are disposed For the corresponding latch hole of the jack, the door system is combined with the opening of the box body to protect the plurality of wafers inside the box body, wherein the front open type wafer cassette is characterized by: Each of the insertion holes on the edge of the casing has an inner groove, and each of the inner grooves is provided with a slope so that the inner groove forms an outer width and a narrow inner structure, and the inner surface of the door body Between the outer surfaces, at least one latch structure is disposed, each of the latch structures including an elliptical cam and a pair of sliding devices, each of the sliding devices having a first end that is in contact with the elliptical cam circumference and a second end having a guiding structure and a sliding slot disposed between the first end and the second end, at least one pair of pulleys disposed between the inner surface of the door body and the outer surface and each of the pulleys embedded in each The sliding slot of the sliding device and a positioning elastic piece integrally connected with each sliding device, each of the sliding device is controlled to and from each of the pair of jacks and the latching hole by controlling the rotation of the elliptical cam in.