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TWI406735B - An thermal error compensation system for a ball-screw feed drive system - Google Patents

An thermal error compensation system for a ball-screw feed drive system Download PDF

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Publication number
TWI406735B
TWI406735B TW99128218A TW99128218A TWI406735B TW I406735 B TWI406735 B TW I406735B TW 99128218 A TW99128218 A TW 99128218A TW 99128218 A TW99128218 A TW 99128218A TW I406735 B TWI406735 B TW I406735B
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Taiwan
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lead screw
thermal
displacement
measuring
thermal error
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TW99128218A
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Chinese (zh)
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TW201208804A (en
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Jenq Shyong Chen
Jian Hong Lai
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Nat Univ Chung Cheng
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Abstract

An thermal error compensation system for a ball-screw feed drive system includes a feed-drive system, a measurement module and a signal processing unit. The feed-drive system consists of a ball-screw, a driver and a nut. The ball-screw is supported by two bearings mounted on the two ends of the ball-screw. One end of the ball-screw is coupled to the driver. The nut is mounted and movable on the ballscrew shaft. The measurement module has two non-contact displacement sensors located nearly the bearings on both end. The measured signals of the displacement sensors are electrically connected to a signal processing unit in order to calculate the compensation data. The compensation date is then further sent to the control unit to compensate for the thermal error.

Description

導螺桿進給軸熱誤差補償裝置Lead screw feed shaft thermal error compensation device

本發明係關於一種誤差補償裝置,尤指一種用於導螺桿進給軸熱的誤差補償裝置。The present invention relates to an error compensating device, and more particularly to an error compensating device for guiding the screw feed shaft heat.

按,目前的精密工具機大都採用數控電腦進行高速控制而有效率的精密切削加工,因此,既有精密工具機的工作台主要係藉由導螺桿的傳動而進行工作台位置的高速精密定位,其中當工作台高速往復位移的頻率相當頻繁時,由於導螺桿進給軸在螺帽中係以旋轉的方式驅動該螺帽,彼此間所產生的磨擦阻力,使得長久使用下的導螺桿產生相當高的溫度,而此高溫將使導螺桿產生熱脹冷縮的效應,目前為了解決導螺桿進給軸於使用時所產生的高溫問題,其中一種方式係在導螺桿中或螺帽中形成一中空結構,並在該中空結構中灌入一冷卻油,藉以降低導螺桿與螺帽的溫度進而減少熱脹冷縮的影響,另一種方式則是在進給軸上安裝一受熱脹冷縮影響小的光學尺,使工作台的位移係依據該光學尺的量測,藉以獲得不受溫度影響的精確位移,然而,前述解決進給軸高溫影響的方式中,前者需考慮於進給軸中鑽孔的漏油問題與複雜的管路問題,而後者則因光學尺本身成本高且會增加機構配置的複雜性,相對會提高工具機的整體成本及製造複雜度;再則,目前也有透過在導螺桿的螺帽上裝設一溫度感應器的方式,藉由此螺帽的溫度變化來預測導螺桿進給軸本身的熱誤差數值再傳輸到機台的控制器中,由該控制器來進行進給軸的熱誤差補償,然而,此種方式的缺點是螺帽的溫度僅能顯現出局部位置的螺帽溫度變化,而導螺桿本身具有相當的長度,且導螺桿在整個長度上的實際溫度分佈在運作時是相當不均勻的,所以藉由螺帽所量測到的溫度變化與整個導螺桿的溫度變化不一定具有線性關係,因此不一定具有可靠的代表性,由此可知,藉由量測螺帽溫度作為導螺桿進給軸的熱誤差補償技術的補償精度與可靠度較差;另外,如我國專利號M358692「螺桿熱伸長補償裝置」,其主要係在導螺桿進給軸的浮動軸承端裝設有一非接觸式的位移感測器,透過該位移感測器對於導螺桿進給軸在浮動軸承端的熱伸長量進行量測,將該量測取得的數據傳至該控制器,此量測方式雖較前述使用螺帽溫度作為補償信號的技術較為準確,但仍存在一些問題,目前滾珠螺桿進給軸兩端軸承的安裝方式大致可分為雙固定式(fixed-to-fixed)、固定-浮動式(Fixed-to-floating)以及固定-預承載式(fixed-preloaded)等安裝方式,由於安裝的方式不同,因此所造成的導螺桿進給軸熱變形的特性也有所不同,且顯現在該導螺桿進給軸一端的熱伸長量也會不一樣,再則,在實際機台的運轉上,軸承安裝的預壓力與配合公差的變化也會影響導螺桿進給軸的熱伸長特性,因此,透過於導螺桿浮動軸承端設置一位移感測器的方式無法精確地對於各種安裝方式的導螺桿進給軸進行熱伸長量測,也無法精確的應付當螺桿預壓或配合公差因為長期運轉產生磨損後的改變,誠有加以改進之處。According to the current precision machine tools, CNC machines are used for high-speed control and efficient precision machining. Therefore, the workbench of the precision machine tool mainly performs high-speed precise positioning of the table position by the transmission of the lead screw. Wherein, when the frequency of the high-speed reciprocating displacement of the table is relatively frequent, since the lead screw feed shaft drives the nut in a rotating manner in the nut, the frictional resistance generated between the two causes the lead screw under long-term use to generate a considerable amount. High temperature, which will cause the lead screw to have the effect of thermal expansion and contraction. At present, in order to solve the high temperature problem caused by the use of the lead screw feed shaft, one way is to form a lead in the lead screw or in the nut. a hollow structure, and a cooling oil is poured into the hollow structure, thereby reducing the temperature of the lead screw and the nut to reduce the influence of thermal expansion and contraction, and the other way is to install a thermal expansion and contraction on the feed shaft. The small optical ruler makes the displacement of the table according to the measurement of the optical ruler, so as to obtain the precise displacement which is not affected by the temperature, however, the aforementioned solution In the way of high-temperature influence of the shaft, the former needs to consider the oil leakage problem of the drilling hole in the feed shaft and the complicated pipeline problem, while the latter is relatively high due to the high cost of the optical scale itself and the complexity of the mechanism configuration, and the tool is relatively improved. The overall cost and manufacturing complexity of the machine; in addition, the thermal error of the lead screw feed shaft itself is predicted by the temperature change of the nut by installing a temperature sensor on the nut of the lead screw. The value is transmitted to the controller of the machine, and the controller performs the thermal error compensation of the feed axis. However, the disadvantage of this method is that the temperature of the nut can only show the temperature change of the nut at the local position. The lead screw itself has a considerable length, and the actual temperature distribution of the lead screw over the entire length is quite uneven during operation, so the temperature change measured by the nut does not necessarily have the temperature change of the entire lead screw. The linear relationship, therefore, does not necessarily have a reliable representativeness. It can be seen that the compensation accuracy and reliability of the thermal error compensation technique by measuring the nut temperature as the lead screw feed axis In addition, as in our patent No. M358692 "screw thermal elongation compensation device", it is mainly equipped with a non-contact displacement sensor at the floating bearing end of the lead screw feed shaft, through which the displacement sensor is guided. The screw feed axis is measured at the floating bearing end, and the data obtained by the measurement is transmitted to the controller. Although the measurement method is more accurate than the aforementioned technique using the nut temperature as the compensation signal, it still exists. Some problems, the current installation of the bearings at both ends of the ball screw feed shaft can be roughly divided into fixed-to-fixed, fixed-to-floating and fixed-preloaded (fixed- Preloaded) and other installation methods, due to different installation methods, the resulting thermal deformation characteristics of the lead screw feed shaft are also different, and the thermal elongation at the end of the lead screw feed shaft will be different, and then In the operation of the actual machine, the change of the pre-pressure and the matching tolerance of the bearing installation will also affect the thermal elongation characteristics of the lead screw feed shaft. Therefore, a displacement feeling is set through the floating bearing end of the lead screw. 'S method can not exactly to the lead screw various installation feed shaft thermal elongation measurement, can not accurately cope when the screw preload or tolerances because of long-term operation to generate the changed wear, Cheng has to be improvements.

為了改善既有用以量測導螺桿進給軸熱誤差補償方式的缺失及不足,本發明之目的在於提供一種節省成本、方便安裝與準確量測的導螺桿進給軸熱誤差補償裝置者。In order to improve the lack and deficiency of the thermal error compensation method for measuring the feed axis of the lead screw, the object of the present invention is to provide a lead screw feed shaft thermal error compensation device which is cost-effective, convenient to install and accurately measure.

基於上述目的,本發明所運用的技術手段係在於提供一導螺桿進給軸熱誤差補償裝置,其係包含有一導螺桿組、一量測組及一訊號處理組,其中:該導螺桿組係設有一導螺桿、一驅動器及一螺帽,該導螺桿於兩端係分別設有一軸承,該驅動器係與該導螺桿相結合而位於其中一軸承的一側,藉以轉動該導螺桿,而該螺帽係可移動地套設於該導螺桿上而介於兩軸承之間;該量測組係設有兩非接觸式的位移感測器,兩位移感測器係分別設於該導螺桿靠近兩軸承處,其中一位移感測器係用以量測該導螺桿靠近一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一端的軸心熱伸長量;以及該訊號處理組係與該量測組相電性連接且設有一控制器,該控制器係與兩位移感測器相電性連接,用以將兩位移感測器所量測到的訊號傳送該控制器中進行運算,藉以監測該導螺桿因溫度變化所產生的變化量,進而提供一熱誤差補償值。Based on the above object, the technical means used in the present invention is to provide a lead screw feed shaft thermal error compensation device, which comprises a lead screw set, a measurement set and a signal processing group, wherein: the lead screw set a lead screw, a driver and a nut are disposed. The lead screw is respectively provided with a bearing at both ends, and the driver is combined with the lead screw to be located at one side of one of the bearings, thereby rotating the lead screw. The nut is movably sleeved on the lead screw and interposed between the two bearings; the measuring set is provided with two non-contact displacement sensors, and the two displacement sensors are respectively disposed on the lead screw Close to the two bearings, one displacement sensor is used to measure the thermal displacement of the lead screw near a fixed bearing end, and the other displacement sensor is used to measure the axial heat of the lead screw at the other end. The amount of elongation; and the signal processing group is electrically connected to the measuring group and is provided with a controller electrically connected to the two displacement sensors for measuring the two displacement sensors The signal sent to the controller is shipped , Thereby monitoring the amount of change of the screw due to temperature changes arising from the guide, thereby providing a thermal error compensation value.

進一步,該導螺桿組兩軸承的安裝方式係為一雙固定式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一軸承固定端的導螺桿軸心位置的熱誤差。Further, the two types of bearings of the lead screw set are installed in a double fixed type, and one of the displacement sensors of the measuring set is used for measuring the thermal displacement of the lead screw at one of the fixed bearing ends, and A displacement sensor is used to measure the thermal error of the lead screw at the axial position of the lead screw at the fixed end of the other bearing.

再進一步,該導螺桿組兩軸承的安裝方式係為一固定-浮動式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一浮動軸承端的導螺桿軸心位置的熱誤差。Further, the two types of bearings of the lead screw set are mounted in a fixed-floating manner, and one of the displacement sensors of the measuring set is used to measure the thermal displacement of the lead screw at one of the fixed bearing ends. The other displacement sensor is used to measure the thermal error of the lead screw at the position of the lead screw at the other floating bearing end.

較佳地,該導螺桿組兩軸承的安裝方式係為一固定-預承載式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一預承載式軸承端的導螺桿軸心位置的熱誤差。Preferably, the two sets of the lead screw assembly are mounted in a fixed-preload type, and one of the displacement sensors of the measuring set is used to measure the thermal change of the lead screw at one of the fixed bearing ends. The other displacement sensor is used to measure the thermal error of the lead screw at the axial position of the lead screw of the other pre-loaded bearing end.

藉由上述的技術手段,本發明導螺桿進給軸熱誤差補償裝置,於使用時僅需在該導螺桿靠近兩軸承處,分別裝設一位移感測器後,即可方便地透過兩位移感測器量測的方式,得到該導螺桿於運轉時的熱伸長量與熱變位,並透過該控制器運算出螺帽位於某一位置時的熱誤差補償值,再則,本發明導螺桿進給軸熱誤差補償裝置,可適用於不同軸承安裝方式的導螺桿上,進而提供一節省成本、方便安裝與準確量測之導螺桿進給軸熱誤差補償裝置者。According to the above technical means, the lead screw feed shaft thermal error compensating device of the present invention can be easily transmitted through two displacements only after the lead screw is adjacent to the two bearings and is respectively provided with a displacement sensor. The method of measuring the sensor, obtaining the thermal elongation and the thermal displacement of the lead screw during operation, and calculating the thermal error compensation value when the nut is located at a certain position through the controller, and then, the guide of the present invention The screw feed axis thermal error compensation device can be applied to the lead screw of different bearing installation methods, thereby providing a cost-saving, convenient installation and accurate measurement of the lead screw feed shaft thermal error compensation device.

為能詳細瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,玆進一步以如圖式所示(圖1至4所示)的較佳實施例,詳細說明如后:本發明所提供之導螺桿進給軸熱誤差補償裝置係包含有一導螺桿組10、一量測組20及一訊號處理組30,其中:該導螺桿組10係設有一導螺桿11、一驅動器12及一螺帽13,該導螺桿11於兩端係分別設有一軸承14,其中兩軸承14的安裝方式係可如圖2為一雙固定式或如圖3所示一固定-浮動式或如圖4一固定-預承載式,該驅動器12係與該導螺桿11相結合而位於其中一軸承14的一側,藉以轉動該導螺桿11,而該螺帽13係可移動地套設於該導螺桿11上而介於兩軸承14之間;該量測組20係設有兩非接觸式的位移感測器21,兩位移感測器21係分別設於該導螺桿11靠近兩軸承14處,其中一位移感測器21係用以量測該導螺桿11在固定端軸承14的熱變位,而另一位移感測器21係用以量測該導螺桿11另一端的軸心位置的熱伸長量;以及該訊號處理組30係與該量測組20相電性連接且設有一控制器31,該控制器31係與兩位移感測器21相電性連接,用以將兩位移感測器21所量測到的訊號傳送該控制器31中進行運算,藉以監測該導螺桿11因溫度變化所產生的變化量,進而提供一熱誤差補償值。In order to understand the technical features and practical effects of the present invention in detail, and in accordance with the contents of the specification, the following is a detailed description of the preferred embodiment shown in the drawings (shown in FIGS. 1 to 4). The lead screw feed shaft thermal error compensating device provided by the invention comprises a lead screw group 10, a measuring group 20 and a signal processing group 30, wherein the lead screw group 10 is provided with a lead screw 11 and a driver 12 And a nut 13, the lead screw 11 is respectively provided with a bearing 14 at both ends, wherein the two bearings 14 can be installed in a double fixed type as shown in FIG. 2 or a fixed-floating type as shown in FIG. 4 is a fixed-preloaded type, the driver 12 is coupled to the lead screw 11 on one side of one of the bearings 14, thereby rotating the lead screw 11, and the nut 13 is movably sleeved thereon. The lead screw 11 is disposed between the two bearings 14; the measuring group 20 is provided with two non-contact displacement sensors 21, and the two displacement sensors 21 are respectively disposed on the lead screw 11 near the two bearings 14 Wherein a displacement sensor 21 is used to measure the heat of the lead screw 11 at the fixed end bearing 14. And the other displacement sensor 21 is configured to measure the thermal elongation of the axial position of the other end of the lead screw 11; and the signal processing group 30 is electrically connected to the measurement group 20 and is provided with a The controller 31 is electrically connected to the two displacement sensors 21 for transmitting the signals measured by the two displacement sensors 21 to the controller 31 for operation, thereby monitoring the lead screw. 11 The amount of change due to temperature changes, which in turn provides a thermal error compensation value.

本發明於使用時,主要係透過於在該導螺桿11的一個端面上使用該非接觸式位移感測器21量測該導螺桿11的軸心熱伸長量(Δx1 ),並使用另一個非接觸式位移感測器21量測該導螺桿11在固定端軸承14的熱變位(Δx2 ),當該控制器31移動位於該螺帽13上的工作台到任一個位置(x)時的熱誤差補償值(Δx),此熱變位補償值可以由下列的公式(即設定之運算式)換算得到:When the present invention is used, the amount of axial elongation (Δx 1 ) of the lead screw 11 is measured by using the non-contact displacement sensor 21 on one end surface of the lead screw 11 and another non-use is used. The contact displacement sensor 21 measures the thermal displacement (Δx 2 ) of the lead screw 11 at the fixed end bearing 14 when the controller 31 moves the table located on the nut 13 to any position (x) The thermal error compensation value (Δx), which can be converted by the following formula (ie, the set expression):

Δxx 2 +kx 1x 2 )x Δ xx 2 + kx 1x 2 ) x

其中的k 是一個修正係數,此修正係數係針對導螺桿長度與工作台可移動行程有不同的設計比值時需要進行修正,該修正係數可由設計者依照理論計算或者利用實驗校正量測之。Where k is a correction factor that needs to be corrected for a different design ratio between the length of the lead screw and the movable stroke of the table. The correction factor can be measured by the designer according to the theoretical calculation or by using the experimental correction.

因此,藉由上述的技術手段,本發明導螺桿進給軸熱誤差補償裝置,於使用時僅需在該導螺桿11的靠近兩軸承14處,分別裝設一位移感測器21後,即可方便地透過兩位移感測器21量測的方式,得到該導螺桿11於運轉時的熱伸長量與熱變位,並透過該控制器31運算出螺帽13位於某一位置時的熱誤差補償值,再則,本發明導螺桿進給軸熱誤差補償裝置,可適用於不同軸承14安裝方式的導螺桿組10上,進而提供一節省成本、方便安裝與準確量測之導螺桿進給軸熱誤差補償裝置者。Therefore, according to the above technical means, the lead screw feed shaft thermal error compensating device of the present invention only needs to be installed with a displacement sensor 21 at the vicinity of the two bearings 14 of the lead screw 11 in use. The thermal elongation and thermal displacement of the lead screw 11 during operation can be conveniently obtained by measuring the two displacement sensors 21, and the heat of the nut 13 at a certain position is calculated by the controller 31. The error compensation value, in addition, the lead screw feed axis thermal error compensation device of the present invention can be applied to the lead screw set 10 of different bearing 14 installation manners, thereby providing a cost-saving, convenient installation and accurate measurement of the lead screw advancement. Axis thermal error compensation device.

以上所述,僅是本發明的較佳實施例,並非對本發明作任何形式上的限制,任何所屬技術領域中具有通常知識者,若在不脫離本發明所提技術方案的範圍內,利用本發明所揭示技術內容所作出局部更動或修飾的等效實施例,並且未脫離本發明的技術方案內容,均仍屬於本發明技術方案的範圍內。The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the invention may be made without departing from the technical scope of the present invention.

10...導螺桿組10. . . Lead screw set

11...導螺桿11. . . Lead screw

12...驅動器12. . . driver

13...螺帽13. . . Nut

14...軸承14. . . Bearing

20...量測組20. . . Measurement group

21...位移感測器twenty one. . . Displacement sensor

30...訊號處理組30. . . Signal processing group

31...控制器31. . . Controller

圖1係本發明導螺桿進給軸熱誤差補償裝置之方塊示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a block diagram showing the thermal error compensation device of the lead screw feed shaft of the present invention.

圖2係本發明雙固定式軸承之側視操作示意圖。Figure 2 is a side elevational view of the double fixed bearing of the present invention.

圖3係本發明固定-浮動式軸承之側視操作示意圖。Figure 3 is a side elevational view of the fixed-floating bearing of the present invention.

圖4係本發明固定-預承載式軸承之側視操作示意圖。Figure 4 is a side elevational view of the fixed-preload bearing of the present invention.

10...導螺桿組10. . . Lead screw set

20...量測組20. . . Measurement group

21...位移感測器twenty one. . . Displacement sensor

30...訊號處理組30. . . Signal processing group

31...控制器31. . . Controller

Claims (4)

一種導螺桿進給軸熱誤差補償裝置,其係包含有一導螺桿組、一量測組及一訊號處理組,其中:該導螺桿組係設有一導螺桿、一驅動器及一螺帽,該導螺桿於兩端係分別設有一軸承,該驅動器係與該導螺桿相結合而位於其中一軸承的一側,藉以轉動該導螺桿,而該螺帽係可移動地套設於該導螺桿上而介於兩軸承之間;該量測組係設有兩非接觸式的位移感測器,兩位移感測器係分別設於該導螺桿靠近兩軸承處,其中一位移感測器係用以量測該導螺桿靠近該驅動器的一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿另一端的軸心位置的熱伸長量;以及該訊號處理組係與該量測組相電性連接且設有一控制器,該控制器係與兩位移感測器相電性連接,用以將兩位移感測器所量測到的訊號傳送該控制器中並依照一預先設定的運算式計算出補償數值,藉以監測該導螺桿因溫度變化所產生的變化量,進而提供一熱誤差補償值,該運算式為:Δxx 2 +kx 1x 2 )x 其中Δx為熱誤差補償值,Δx2 為熱變位,Δx1 為熱伸長量,k 為一修正係數,x為該控制器移動該螺帽到任一個位置。A lead screw feed shaft thermal error compensating device comprises a lead screw set, a measuring set and a signal processing group, wherein: the lead screw set is provided with a lead screw, a driver and a nut, the guide The screw is respectively provided with a bearing at both ends, and the driver is combined with the lead screw to be located on one side of one of the bearings, thereby rotating the lead screw, and the nut is movably sleeved on the lead screw Between the two bearings; the measuring group is provided with two non-contact displacement sensors, two displacement sensors are respectively arranged at the lead screw near the two bearings, wherein a displacement sensor is used Measuring the thermal displacement of the lead screw near a fixed bearing end of the driver, and another displacement sensor for measuring the thermal elongation of the axial position of the other end of the lead screw; and the signal processing group and The measuring group is electrically connected and is provided with a controller electrically connected to the two displacement sensors for transmitting the signals measured by the two displacement sensors to the controller and according to Calculate the compensation number by a preset expression , Thereby monitoring the amount of change due to temperature changes of the lead screw produced, thereby providing a thermal error compensation value, the calculation formula is: Δ x = Δ x 2 + k (Δ x 1 -Δ x 2) x wherein heat Δx The error compensation value, Δx 2 is the thermal displacement, Δx 1 is the thermal elongation, k is a correction coefficient, and x is the controller moving the nut to any position. 如申請專利範圍第1項所述之導螺桿進給軸熱誤差補償裝置,其中該導螺桿組兩軸承的安裝方式係為一雙固定式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以 量測該導螺桿在另一軸承固定端的導螺桿軸心位置的熱誤差。 The lead screw feed shaft thermal error compensating device according to claim 1, wherein the two sets of the lead screw assembly are installed in a fixed type, and one of the displacement sensors of the measuring set is For measuring the thermal displacement of the lead screw at one of the fixed bearing ends, and another displacement sensor is used for The thermal error of the lead screw at the axial position of the lead screw at the fixed end of the other bearing is measured. 如申請專利範圍第1項所述之導螺桿進給軸熱誤差補償裝置,其中該導螺桿組兩軸承的安裝方式係為一固定-浮動式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一浮動軸承端的導螺桿軸心位置的熱誤差。 The lead screw feed shaft thermal error compensating device according to claim 1, wherein the two sets of the lead screw assembly are fixed-floating, and one of the displacement sensors of the measuring group It is used to measure the thermal displacement of the lead screw at one of the fixed bearing ends, and the other displacement sensor is used to measure the thermal error of the lead screw at the position of the lead screw at the other floating bearing end. 如申請專利範圍第1項所述之導螺桿進給軸熱誤差補償裝置,其中該導螺桿組兩軸承的安裝方式係為一固定-預承載式,而該量測組的其中一位移感測器係用以量測該導螺桿在其中一固定軸承端的熱變位,而另一位移感測器係用以量測該導螺桿在另一預承載式軸承端的導螺桿軸心位置的熱誤差。 The lead screw feed shaft thermal error compensating device according to claim 1, wherein the mounting method of the two sets of the lead screw set is a fixed-preload type, and one of the displacement groups of the measuring group is sensed. The device is used to measure the thermal displacement of the lead screw at one of the fixed bearing ends, and the other displacement sensor is used to measure the thermal error of the lead screw at the axial position of the lead screw of the other pre-loaded bearing end. .
TW99128218A 2010-08-24 2010-08-24 An thermal error compensation system for a ball-screw feed drive system TWI406735B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI701101B (en) * 2019-05-27 2020-08-11 上銀科技股份有限公司 Linear transmission device and its identification method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI504478B (en) * 2014-06-04 2015-10-21 Hiwin Tech Corp Monitoring System of Ball Screw Pre - pressure and Its Monitoring Method
TW201600222A (en) * 2014-06-25 2016-01-01 Hiwin Tech Corp Method for detecting residual preload
TWI600492B (en) * 2015-04-01 2017-10-01 Hiwin Tech Corp Compensation screw lead error method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299701A (en) * 1994-04-27 1995-11-14 Fanuc Ltd Heat displacement correction method of machine tool
TW499345B (en) * 2001-09-28 2002-08-21 Ind Tech Res Inst External active compensation method and device for axial deviation of rotary spindle tool
TWM290082U (en) * 2005-11-18 2006-05-01 Chen Jr Ping Thermal compensation device for machine center
TWI285254B (en) * 2006-07-05 2007-08-11 Univ Nat Formosa High precision rotation revolving thermal deformation measurement system
TW200838638A (en) * 2007-03-30 2008-10-01 Prec Machinery Res & Dev Ct Temperature measuring and compensating device of processing machine
TWM363352U (en) * 2009-02-17 2009-08-21 Buffalo Machinery Company Ltd Control module for compensating processing position
TW200940243A (en) * 2008-03-13 2009-10-01 Brother Ind Ltd Thermal displacement correction method for machine tool, thermal displacement correction device and computer readable medium storing thermal displacement correction program

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299701A (en) * 1994-04-27 1995-11-14 Fanuc Ltd Heat displacement correction method of machine tool
TW499345B (en) * 2001-09-28 2002-08-21 Ind Tech Res Inst External active compensation method and device for axial deviation of rotary spindle tool
TWM290082U (en) * 2005-11-18 2006-05-01 Chen Jr Ping Thermal compensation device for machine center
TWI285254B (en) * 2006-07-05 2007-08-11 Univ Nat Formosa High precision rotation revolving thermal deformation measurement system
TW200838638A (en) * 2007-03-30 2008-10-01 Prec Machinery Res & Dev Ct Temperature measuring and compensating device of processing machine
TW200940243A (en) * 2008-03-13 2009-10-01 Brother Ind Ltd Thermal displacement correction method for machine tool, thermal displacement correction device and computer readable medium storing thermal displacement correction program
TWM363352U (en) * 2009-02-17 2009-08-21 Buffalo Machinery Company Ltd Control module for compensating processing position

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI701101B (en) * 2019-05-27 2020-08-11 上銀科技股份有限公司 Linear transmission device and its identification method

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