TWI402996B - A simple manufacture process to obtain near stoichiometric cuxzn snsy(czts) thin films used for solar cells - Google Patents
A simple manufacture process to obtain near stoichiometric cuxzn snsy(czts) thin films used for solar cells Download PDFInfo
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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本發明係關於一種以銅鋅錫(CuZnSn)合金製備太陽能電池的CuxZnSnSy(CZTS)薄膜之方法,尤指一種(Cu2ZnSnS4)薄膜之製程。 The invention relates to a method for preparing a Cu x ZnSnS y (CZTS) film of a solar cell by using a copper zinc tin (CuZnSn) alloy, in particular to a process of a (Cu 2 ZnSnS 4 ) film.
太陽能電池在目前能源有限之環境下,為許多產業逐漸重視,而大多數的太陽能電池目前為矽晶圓太陽能電池,主要係矽晶圓太陽能電池具有轉換效率較佳、設備較為低廉、生產效率較為快速以及良率容易達到等優勢。但是由於原料因素,即多晶矽材料相對缺乏以及所帶動之成本上揚,尤其是在製造大面積發電模組時,其相對之成本因素更為明顯。 In the current limited energy environment, solar cells are gradually paid more attention to many industries, and most of the solar cells are currently silicon wafer solar cells, mainly based on silicon wafers, which have better conversion efficiency, lower equipment, and higher production efficiency. Fast and easy to achieve yield advantages. However, due to the raw material factor, that is, the relative lack of polycrystalline silicon materials and the rising cost, especially when manufacturing large-area power generation modules, the relative cost factor is more obvious.
因此,市場上在不斷研發下,逐漸有所謂「薄膜太陽能電池」產生,可以在不同且多樣之基板上製造,例如軟韌之塑膠基板(或者玻璃、或其他板材),因此可以具有相當之撓性來因應多種環境。而且薄膜太陽能電池,其在塑膠、玻璃或是其他板材上形成光電效應所需要之厚度需求相當低,而可以在同一受光面積下,材料相對節省。 Therefore, under the continuous research and development in the market, there are gradually so-called "thin film solar cells", which can be fabricated on different and diverse substrates, such as soft and tough plastic substrates (or glass, or other plates), so they can be quite scratched. Sex comes in a variety of environments. Moreover, thin film solar cells require a relatively low thickness for forming a photoelectric effect on plastic, glass or other sheets, and can be relatively economically saved under the same light receiving area.
而各種薄膜太陽能電池之種類中,除了矽薄膜太陽能電池之外,銅銦鎵硒Cu(In,Ga)Se2(CIGS)薄膜太陽能電池的發展亦有相當不錯的成果,然而此薄膜太陽能電池面臨材料組成成分中銦和鎵(In,Ga)為稀有元素,材料價格高昂,且硒(Se)具有毒性等問題,因此以地球上蘊含量較多的鋅與錫 (Zn,Sn)及較無毒害的硫(S)分別取代銦和鎵(In,Ga)及硒(Se),便可製作出無毒害且低成本之銅鋅錫硫(CZTS)太陽能電池。 Among the various types of thin film solar cells, in addition to tantalum thin film solar cells, the development of copper indium gallium selenide Cu(In,Ga)Se 2 (CIGS) thin film solar cells has also achieved quite good results, but this thin film solar cell faces Among the constituents of the material, indium and gallium (In, Ga) are rare elements, the material price is high, and selenium (Se) has toxicity and other problems. Therefore, zinc and tin (Zn, Sn) with a large content on the earth and less The poisonous sulfur (S) replaces indium and gallium (In, Ga) and selenium (Se), respectively, to produce a non-toxic and low-cost copper-zinc-tin-sulfur (CZTS) solar cell.
銅鋅錫硫(Cu2ZnSnS4)薄膜為I2-II-IV-VI4族p型直接能隙半導體材料,晶體結構為鋅黃錫礦結構(kesterite structure),能隙值約為1.4-1.5電子伏特,其波長約為827~886nm),折射率2.07(refractive index),晶格常數:a=0.5426nm、c=1.0848nm,銅鋅錫硫(Cu2ZnSnS4)薄膜對光的吸收性良好,在可見光範圍吸收係數(absorption coefficient)大於104 cm-1,所以僅需薄薄的幾μm厚即可吸收大部份的入射光,加上良好的熱穩定性,因此相當適合作為高效率薄膜太陽電池吸收層的使用。 Sulfur copper zinc tin (Cu 2 ZnSnS 4) film is I 2 -II-IV-VI 4 group p-type direct bandgap semiconductor material, the crystal structure kesterite structure (kesterite structure), the energy gap is about 1.4 1.5 electron volts, its wavelength is about 827~886nm), refractive index 2.07 (refractive index), lattice constant: a=0.5426nm, c=1.0848nm, copper-zinc-tin-sulfur (Cu 2 ZnSnS 4 ) film absorbs light Good in properties, the absorption coefficient in the visible light range is greater than 10 4 cm -1 , so only a small thickness of a few μm can absorb most of the incident light, plus good thermal stability, so it is quite suitable as The use of high efficiency thin film solar cell absorber layers.
銅鋅錫硫(Cu2ZnSnS4)太陽能電池薄膜之各種製備技術中,物理性沉積被廣為使用,有以次序性的分三次分別進行銅、鋅、錫,三層金屬薄膜沉積物者,亦有同時一次使用三個鍍源(銅、鋅、錫)進行金屬薄膜沉積物者,所得的金屬薄膜沉積物再施以硫化製程,以得到銅鋅錫硫(CZTS)太陽能電池薄膜,以上所指金屬薄膜沉積物的製程複雜且難以控制比例,對於後續再施加硫化製程所得到銅鋅錫硫(CZTS)太陽能電池薄膜的品質將難以維護。 Among the various preparation techniques for copper-zinc-tin-sulfur (Cu 2 ZnSnS 4 ) solar cell films, physical deposition is widely used, and copper, zinc, tin, and three-layer metal film deposits are separately ordered in three steps. There are also three kinds of plating sources (copper, zinc, tin) for metal film deposition at the same time, and the obtained metal film deposits are subjected to a vulcanization process to obtain a copper zinc tin sulphur (CZTS) solar cell film. The process of metal film deposits is complicated and difficult to control, and the quality of the copper-zinc-tin-sulfur (CZTS) solar cell film obtained by subsequent vulcanization process will be difficult to maintain.
有鑑於先前技術之問題,本發明者認為應有一種改善之製程,本發明解決先前技術問題之技術手段,係設計一種以銅鋅錫(CuZnSn)合金製備太陽能電池的CuxZnSnSy(CZTS)薄膜之方法,其中0≦x≦2,0≦y≦4。其步驟至少包括:1.分別取銅、鋅、錫(Cu、Zn、Sn)材料製備成銅鋅錫合金CuxZnySnz(CZT);2.將此銅鋅錫合金以物理性的沉積方式在基板上進行薄膜沉積,經沉積後便可在基板上得到一層銅鋅錫沉積薄膜;3.將此銅鋅錫沉積薄膜施以硫化製程,形成可應用於太陽能電池的銅鋅錫 硫(CuxZnSnSy)薄膜。 In view of the problems of the prior art, the present inventors believe that there should be an improved process, and the technical means for solving the prior art problem of the present invention is to design a Cu x ZnSnS y (CZTS) for preparing a solar cell using a copper zinc tin (CuZnSn) alloy. A method of film, wherein 0 ≦ x ≦ 2, 0 ≦ y ≦ 4. The steps include at least: 1. preparing copper, zinc, tin (Cu, Zn, Sn) materials to form copper zinc tin alloy Cu x Zn y Sn z (CZT); 2. using the copper zinc tin alloy as physical The deposition method is performed on the substrate for film deposition, and a copper-zinc-tin deposition film can be obtained on the substrate after deposition; 3. The copper-zinc-tin deposition film is subjected to a vulcanization process to form a copper-zinc-tin-sulfur which can be applied to a solar cell. (Cu x ZnSnS y ) film.
該銅鋅錫CuxZnySnz(CZT)合金之具體實施例係藉由加熱達共金溫度,將銅、鋅、錫(Cu、Zn、Sn)材料形成均勻混合的銅鋅錫CuxZnySnz(CZT)合金。由於此法可以先將銅、鋅、錫材料按比例,予以混合形成均勻之合金,之後再將此合金以物理性的方式沉積到基板上以得到沉積薄膜,因所得到的沉積薄膜中的銅、鋅、錫比例已於之前形成合金時取得,因此沉積薄膜的比例易於控制,製程上相對較為簡易。 The copper zinc tin copper zinc tin Cu x Zn y Sn z (CZT ) based particular embodiment alloy by heating up to a temperature of gold were uniformly mixed to form a copper, zinc, tin (Cu, Zn, Sn) material Cu x Zn y Sn z (CZT) alloy. Since the method can firstly mix copper, zinc and tin materials in proportion to form a uniform alloy, and then deposit the alloy on the substrate in a physical manner to obtain a deposited film, because the copper in the deposited film is obtained. The ratio of zinc and tin has been obtained when the alloy was formed before, so the ratio of the deposited film is easy to control, and the process is relatively simple.
(1)‧‧‧銅 (1) ‧‧‧Copper
(2)‧‧‧鋅 (2) ‧ ‧ zinc
(3)‧‧‧錫 (3)‧‧‧ tin
(4)‧‧‧加熱器 (4) ‧‧‧heater
(5)‧‧‧銅鋅錫合金 (5) ‧‧‧ copper zinc tin alloy
(6)‧‧‧銅鋅錫沉積薄膜 (6) ‧‧‧ copper-zinc-tin deposition film
(7)‧‧‧基板 (7) ‧‧‧Substrate
(8)‧‧‧含硫成份物 (8)‧‧‧Sulphur-containing components
(9)‧‧‧銅鋅錫硫薄膜 (9) ‧‧‧ copper zinc tin sulphur film
第一圖係本發明之形成合金材料示意圖 The first figure is a schematic diagram of the alloy forming material of the present invention.
第二圖係本發明薄膜沉積示意圖 The second figure is a schematic diagram of the film deposition of the present invention.
第三圖係本發明之硫化製程示意圖 The third figure is a schematic diagram of the vulcanization process of the present invention.
以下藉由圖式之輔助,說明本發明之內容、特色以及實施例,請參閱第一圖至第三圖所示,本發明係關於一種太陽能電池的CuxZnSnSy(CZTS)薄膜製備方法,其步驟包括: The contents, features, and embodiments of the present invention are illustrated by the accompanying drawings. Referring to the first to third figures, the present invention relates to a method for preparing a Cu x ZnSnS y (CZTS) film for a solar cell. The steps include:
1.分別取銅(1)、鋅(2)、錫(3)(Cu、Zn、Sn)材料製備成銅鋅錫合金(5):該銅鋅錫合金(5)的形成,主要可以取銅(1)、鋅(2)、錫(3)(Cu、Zn、Sn)材料,按比例混合後,透過加熱器(4)予以加熱達合金熔解溫度後,形成銅鋅錫合金(5)。 1. Preparation of copper (1), zinc (2), tin (3) (Cu, Zn, Sn) materials to prepare copper zinc tin alloy (5): the formation of the copper zinc tin alloy (5), mainly can take Copper (1), zinc (2), tin (3) (Cu, Zn, Sn) materials, mixed in proportion, heated by the heater (4) to reach the melting temperature of the alloy, forming a copper-zinc-tin alloy (5) .
2.將此銅鋅錫合金(5)以物理性的沉積方式在基板(7)上進行薄膜沉積,經沉積後便可在基板(7)上得到一層銅鋅錫沉積薄膜(6):於此物理性沉積乃指非化學性的方式,例如熱蒸著法,電漿濺鍍法、電子束蒸鍍法、脈衝雷射沉積法等。該基板(7)可以為塑膠、金屬、玻璃中之其一或二種以上之複合或其他材質,使得本發明具有多元之基板得以適用。 2. The copper zinc-tin alloy (5) is deposited on the substrate (7) by physical deposition, and a copper-zinc-tin deposition film (6) can be obtained on the substrate (7) after deposition: This physical deposition refers to a non-chemical manner such as thermal evaporation, plasma sputtering, electron beam evaporation, pulsed laser deposition, and the like. The substrate (7) may be a composite or other material of one or more of plastic, metal, and glass, so that the substrate having the plurality of substrates of the present invention is applicable.
3.將此銅鋅錫沉積薄膜(6)施以硫化製程,形成可應用於太陽能電池的銅鋅 錫硫薄膜(9):於此硫化製程乃指將含銅鋅錫沉積薄膜(6)的基板(7),置入含有硫成份物(8)的環境中予以加熱,以形成銅鋅錫硫薄膜(9)。此處含有硫成份物(8)乃指硫元素、或各種硫化物,可以用來進行硫化反應者,且此硫成份物(8)可以是固態、液態或氣態存在者。 3. Applying the copper-zinc-tin deposition film (6) to a vulcanization process to form copper and zinc which can be applied to solar cells. Tin-sulfur film (9): This vulcanization process refers to heating a substrate (7) containing a copper-zinc-tin deposition film (6) in an environment containing a sulfur component (8) to form copper zinc tin sulfide. Film (9). The sulfur component (8) herein refers to sulfur element or various sulfides which can be used for the vulcanization reaction, and the sulfur component (8) may be in a solid state, a liquid state or a gaseous state.
本發明之具體製法說明如下:配合第一圖,按比例混合加入銅(1)、鋅(2)、錫(3)材料,然後經由加熱器(4)進行加溫達到合金溫度後,形成銅鋅錫合金(5)。 The specific manufacturing method of the present invention is as follows: in combination with the first figure, the copper (1), zinc (2), and tin (3) materials are mixed and mixed in proportion, and then heated by the heater (4) to reach the alloy temperature to form copper. Zinc-tin alloy (5).
然後經由第二圖所示,以物理性的沉積方式,將銅鋅錫合金(5)沉積在基板(7)上,形成銅鋅錫沉積薄膜(6)。 Then, as shown in the second figure, a copper-zinc-tin alloy (5) is deposited on the substrate (7) in a physical deposition manner to form a copper-zinc-tin deposition film (6).
之後再配合第三圖所示,將此銅鋅錫沉積薄膜(6)及基板(7)置入含有硫成份物(8)的環境中,予以加熱進行硫化製程,以得到銅鋅錫硫薄膜(9)。 Then, as shown in the third figure, the copper-zinc-tin deposition film (6) and the substrate (7) are placed in an environment containing the sulfur component (8), and heated to carry out a vulcanization process to obtain a copper-zinc-tin-sulfur film. (9).
藉由本發明可以較為簡易的製程,有效的掌控銅鋅錫沉積薄膜的比例,之後再施以硫化製程即可以得到所需的銅鋅錫硫太陽能電池薄膜。本發明之方法簡易可行且沒有尺寸的限制。 The invention can be used in a relatively simple process, effectively controlling the proportion of the copper-zinc-tin-deposited film, and then applying the vulcanization process to obtain the desired copper-zinc-tin-sulfur solar cell film. The method of the present invention is simple and feasible and has no size limitations.
綜上所述,由於認為本創作符合可專利之要件,爰依法提出專利申請。惟上述所陳,為本創作產業上一較佳實施例,舉凡依本創作申請專利範圍所作均等變化,皆屬本案訴求標的之範疇。 In summary, since the creation is considered to be in conformity with the patentable requirements, the patent application is filed according to law. However, the above-mentioned findings are a preferred embodiment of the creative industry. The equal changes in the scope of patent application for this creation are all within the scope of the claim.
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| TWI460869B (en) | 2011-12-30 | 2014-11-11 | 財團法人工業技術研究院 | Solar cell light absorbing layer manufacturing method |
| US20130217211A1 (en) * | 2012-02-21 | 2013-08-22 | Aqt Solar, Inc. | Controlled-Pressure Process for Production of CZTS Thin-Films |
| US9390917B2 (en) * | 2012-02-21 | 2016-07-12 | Zetta Research and Development LLC—AQT Series | Closed-space sublimation process for production of CZTS thin-films |
| KR102420408B1 (en) * | 2020-07-31 | 2022-07-13 | 전남대학교산학협력단 | P-type compound semiconductor layer manufacturing method for inorganic thin film solar cells and inorganic solar cells including fabricated by the same method |
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| EP2037006A2 (en) * | 2006-05-24 | 2009-03-18 | Atotech Deutschland Gmbh | Metal plating composition and method for the deposition of Copper-Zinc-Tin suitable for manufacturing thin film solar cell |
| US20090260678A1 (en) * | 2008-04-16 | 2009-10-22 | Agc Flat Glass Europe S.A. | Glass substrate bearing an electrode |
| US20090314342A1 (en) * | 2008-06-18 | 2009-12-24 | Bent Stacey F | Self-organizing nanostructured solar cells |
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| EP2037006A2 (en) * | 2006-05-24 | 2009-03-18 | Atotech Deutschland Gmbh | Metal plating composition and method for the deposition of Copper-Zinc-Tin suitable for manufacturing thin film solar cell |
| US20090260678A1 (en) * | 2008-04-16 | 2009-10-22 | Agc Flat Glass Europe S.A. | Glass substrate bearing an electrode |
| US20090314342A1 (en) * | 2008-06-18 | 2009-12-24 | Bent Stacey F | Self-organizing nanostructured solar cells |
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