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TWI401798B - Layout structure of power mos transistor - Google Patents

Layout structure of power mos transistor Download PDF

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Publication number
TWI401798B
TWI401798B TW98133092A TW98133092A TWI401798B TW I401798 B TWI401798 B TW I401798B TW 98133092 A TW98133092 A TW 98133092A TW 98133092 A TW98133092 A TW 98133092A TW I401798 B TWI401798 B TW I401798B
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transistor
regions
region
power mos
source regions
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TW98133092A
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Chinese (zh)
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TW201112416A (en
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Ming Tang
Shih Ping Chiao
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Ptek Technology Co Ltd
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Description

功率金氧半電晶體之佈局結構 Power metal oxide semi-transistor layout structure

本發明係關於金氧半電晶體之佈局結構,特別係關於功率金氧半電晶體(power MOS transistor)之佈局結構。 The invention relates to the layout structure of a gold-oxygen semi-transistor, in particular to a layout structure of a power MOS transistor.

功率金氧半電晶體係一種特殊的金氧半電晶體,專門用以提供及切換電源給積體電路。據此,功率金氧半電晶體需具有在高電壓下工作之能力。一般功率金氧半電晶體係以互補金氧半電晶體(CMOS)製程製作以達到大尺寸之目的,使其能在高電壓下操作。另一方面,功率金氧半電晶體又需能提供大輸出電流。因此,一般製作上多將數千至數十萬個電晶體單元聚集成一功率金氧半電晶體,其中每一電晶體單元可輸出一小電流,而該聚集成之功率金氧半電晶體則可輸出一大電流。 Power Golden Oxygen Semi-Crystal System A special metal oxide semi-transistor designed to provide and switch power to an integrated circuit. Accordingly, power MOS transistors need to have the ability to operate at high voltages. The general power MOS semi-electro-crystal system is fabricated in a complementary metal oxide semi-transistor (CMOS) process to achieve a large size, enabling operation at high voltages. On the other hand, the power MOS transistor needs to provide a large output current. Therefore, in general, thousands to hundreds of thousands of transistor units are aggregated into one power MOS semi-transistor, wherein each transistor unit can output a small current, and the integrated power MOS semi-transistor is Can output a large current.

圖1顯示一傳統之功率金氧半電晶體之佈局結構示意圖。如圖1所示,該功率金氧半電晶體100包含一電晶體單元110。該電晶體單元110包含一源極區120、一閘極區130、一汲極區140和一本體區150。該汲極區140和該本體區150皆具有矩形之佈局形狀。該源極區120係環繞該本體區150以形成一擴大之矩形。該閘極區130係隔離開該汲極區140和該源極區120。 Figure 1 shows a schematic layout of a conventional power MOS transistor. As shown in FIG. 1, the power MOS transistor 100 includes a transistor unit 110. The transistor unit 110 includes a source region 120, a gate region 130, a drain region 140, and a body region 150. Both the drain region 140 and the body region 150 have a rectangular layout shape. The source region 120 surrounds the body region 150 to form an enlarged rectangle. The gate region 130 isolates the drain region 140 and the source region 120.

如前所述,一功率金氧半電晶體係由數千至數十萬個電晶體單元聚集而成。因此,該功率金氧半電晶體100於佈局結構上係包含複數個電晶體單元彼此緊密貼合排列,其 中該等電晶體單元之佈局結構皆等同於該電晶體單元110。由於該電晶體單元110受其佈局結構限制而僅能提供有限之電流輸出,為達到業界所需之大電流需求,傳統之功率金氧半電晶體需包含大量的電晶體單元,因而導致製作成本升高。 As previously mentioned, a power MOS semi-electron system consists of thousands to hundreds of thousands of transistor units. Therefore, the power MOS transistor 100 includes a plurality of transistor units closely aligned with each other in a layout structure, and The layout structure of the transistors is equivalent to the transistor unit 110. Since the transistor unit 110 is limited by its layout structure and can only provide a limited current output, in order to meet the high current demand required by the industry, the conventional power MOS transistor needs to contain a large number of transistor units, thereby resulting in manufacturing costs. Raise.

據此,有必要設計一種功率金氧半電晶體之佈局結構,其能使單一之電晶體單元具有較高之電流輸出能力,使該功率金氧半電晶體可在相同面積下具有比傳統之功率金氧半電晶體較高之電流輸出能力,進而達成節省成本之目的。 Accordingly, it is necessary to design a layout structure of a power MOS transistor, which enables a single transistor unit to have a higher current output capability, so that the power MOS transistor can have a larger ratio than the conventional one under the same area. The high current output capability of the power MOS semi-transistor achieves the goal of cost saving.

本發明揭示一種功率金氧半電晶體之佈局結構,其能具體增加源極區之周長,而藉以達到提高輸出電流之目的。 The invention discloses a layout structure of a power MOS semi-transistor, which can specifically increase the circumference of the source region, thereby achieving the purpose of increasing the output current.

本發明之一實施例之功率金氧半電晶體,具有複數個電晶體單元,該電晶體單元之佈局結構包含一汲極區、複數個本體區、複數個源極區及一閘極區。該等本體區係環繞該汲極區。該等源極區係自各本體區之周圍以非均向性向外延伸而成。該閘極區係位於該汲極區和該等源極區之間,具有至少三個導線,連接相鄰電晶體單元之閘極區。該汲極區、該等本體區和該等源極區之接點皆位於該佈局結構之同一面,且相對該電晶體單元之中心,該電晶體單元之佈局結構對稱。 A power MOS transistor according to an embodiment of the present invention has a plurality of transistor units, and the layout structure of the transistor unit includes a drain region, a plurality of body regions, a plurality of source regions, and a gate region. The body regions surround the bungee region. The source regions are formed by extending non-uniformly outward from the periphery of each body region. The gate region is located between the drain region and the source regions and has at least three wires connecting the gate regions of adjacent transistor units. The contact regions of the drain regions, the body regions and the source regions are all located on the same side of the layout structure, and the layout structure of the transistor units is symmetrical with respect to the center of the transistor unit.

本發明之另一實施例之功率金氧半電晶體,具有複數 個電晶體單元,該電晶體單元之佈局結構包含一汲極區、複數個本體區、複數個源極區及一閘極區。該等本體區係環繞該汲極區。該等源極區係自各本體區之各邊向外延伸而成。該閘極區係位於該汲極區和該等源極區之間,具有至少三個導線,連接相鄰電晶體單元之閘極區。該汲極區、該等本體區和該等源極區之接點皆位於該佈局結構之同一面,且相對該電晶體單元之中心,該電晶體單元之佈局結構對稱。 Another embodiment of the present invention is a power MOS transistor having a plurality of A transistor unit, the layout structure of the transistor unit comprises a drain region, a plurality of body regions, a plurality of source regions and a gate region. The body regions surround the bungee region. The source regions extend outward from each side of each body region. The gate region is located between the drain region and the source regions and has at least three wires connecting the gate regions of adjacent transistor units. The contact regions of the drain regions, the body regions and the source regions are all located on the same side of the layout structure, and the layout structure of the transistor units is symmetrical with respect to the center of the transistor unit.

圖2顯示本發明之一實施例之功率金氧半電晶體之佈局結構之示意圖。如圖2所示,該功率金氧半電晶體200包含複數個電晶體單元210。該電晶體單元210包含一汲極區220、複數個本體區230、複數個源極區240和一閘極區250。該等源極區240係環繞該汲極區220,而該等源極區240係自各本體區230之周圍以非均向性向外延伸而成。該閘極區250係位於該汲極區220和該等源極區240之間,具有四個導線251,連接相鄰電晶體單元之閘極區250。相對該電晶體單元210之中心,該電晶體單元210之佈局結構對稱。 Fig. 2 is a view showing the layout structure of a power oxy-oxygen semiconductor according to an embodiment of the present invention. As shown in FIG. 2, the power MOS transistor 200 includes a plurality of transistor units 210. The transistor unit 210 includes a drain region 220, a plurality of body regions 230, a plurality of source regions 240, and a gate region 250. The source regions 240 surround the drain regions 220, and the source regions 240 extend outwardly from the periphery of each body region 230 in a non-uniform manner. The gate region 250 is located between the drain region 220 and the source regions 240 and has four wires 251 connecting the gate regions 250 of adjacent transistor units. The layout of the transistor unit 210 is symmetrical with respect to the center of the transistor unit 210.

如圖2所示,各本體區230和自各本體區230之周圍以非均向性向外延伸而成之源極區240係具有一十字形狀之佈局結構。因此,相較於圖1之傳統之功率金氧半電晶體之佈局結構,於相同面積之電晶體單元下,該電晶體單元210之源極區240具有比該電晶體單元110之源極區120更長之周長。 As shown in FIG. 2, each of the body regions 230 and the source regions 240 extending outward from each of the body regions 230 in a non-uniform manner have a cross-shaped layout structure. Therefore, the source region 240 of the transistor unit 210 has a source region of the transistor unit 110 under the same area of the transistor unit as compared with the conventional power MOS transistor of FIG. 120 longer perimeter.

根據習知元件公式:,其中W為源極之周長,Ids為電晶體單元所提供之電流。由以上公式可知,電流量Ids正比於源極周長W。因此,該電晶體單元210因具有較大的源極周長,即可提供比該電晶體單元110更高之電流。 According to the conventional component formula: Where W is the perimeter of the source and I ds is the current supplied by the transistor unit. It can be seen from the above formula that the current amount I ds is proportional to the source circumference W. Therefore, the transistor unit 210 can provide a higher current than the transistor unit 110 because of its larger source perimeter.

本發明之功率金氧半電晶體之佈局結構不限於圖2所示之十字結構,而應及於任何包含自本體區之周圍以非均向性向外延伸而成之源極區之佈局結構。圖3顯示本發明之另一實施例之功率金氧半電晶體之佈局結構之示意圖。如圖3所示,該功率金氧半電晶體300包含複數個電晶體單元310。該電晶體單元310包含一汲極區320、複數個本體區330、複數個源極區340和一閘極區350。該等源極區340係環繞該汲極區320,而該等源極區340係自各本體區330之周圍以非均向性向外延伸而成。該閘極區350係位於該汲極區320和該等源極區340之間,具有四個導線351,連接相鄰電晶體單元之閘極區350。相對該電晶體單元310之中心,該電晶體單元310之佈局結構對稱。 The layout structure of the power MOS semi-transistor of the present invention is not limited to the cross structure shown in FIG. 2, but should be any layout structure including a source region extending outward from the body region in a non-uniform manner. Fig. 3 is a view showing the layout structure of a power MOS transistor according to another embodiment of the present invention. As shown in FIG. 3, the power MOS transistor 300 includes a plurality of transistor units 310. The transistor unit 310 includes a drain region 320, a plurality of body regions 330, a plurality of source regions 340, and a gate region 350. The source regions 340 surround the drain regions 320, and the source regions 340 extend outward from each of the body regions 330 in a non-uniform manner. The gate region 350 is located between the drain region 320 and the source regions 340 and has four wires 351 connected to the gate regions 350 of adjacent transistor units. The layout of the transistor unit 310 is symmetrical with respect to the center of the transistor unit 310.

該電晶體單元310和圖2之該電晶體單元210雖具有不同之佈局結構,然均可達到類似的功效。如圖3所示,該等本體區330之佈局形狀為圓形,而該等源極區340並未完全包覆該等本體區330之周圍。 The transistor unit 310 and the transistor unit 210 of FIG. 2 have different layout structures, and similar effects can be achieved. As shown in FIG. 3, the layout of the body regions 330 is circular, and the source regions 340 do not completely cover the periphery of the body regions 330.

圖4顯示本發明之另一實施例之功率金氧半電晶體之佈局結構之示意圖。如圖4所示,該功率金氧半電晶體400包含複數個電晶體單元410。該電晶體單元410包含一汲極 區420、複數個本體區430、複數個源極區440和一閘極區450。該等源極區440係環繞該汲極區420,而該等源極區440係自各本體區430之周圍以非均向性向外延伸而成。該閘極區450係位於該汲極區420和該等源極區440之間,具有三個導線351,連接相鄰電晶體單元之閘極區。相對該電晶體單元410之中心,該電晶體單元410之佈局結構對稱。 Fig. 4 is a view showing the layout structure of a power oxy-oxide semiconductor according to another embodiment of the present invention. As shown in FIG. 4, the power MOS transistor 400 includes a plurality of transistor units 410. The transistor unit 410 includes a bungee A region 420, a plurality of body regions 430, a plurality of source regions 440, and a gate region 450. The source regions 440 surround the drain regions 420, and the source regions 440 extend outwardly from the periphery of each body region 430 with a non-uniformity. The gate region 450 is located between the drain region 420 and the source regions 440, and has three wires 351 connected to the gate regions of adjacent transistor units. The layout of the transistor unit 410 is symmetrical with respect to the center of the transistor unit 410.

該電晶體單元410和圖2之該電晶體單元210及圖3之該電晶體單元310雖具有不同之佈局結構,然亦可達到類似的功效。如圖4所示,該電晶體單元410為六角形,而該等源極區440之數量為三個,且從相同本體區430延伸之相鄰源極區440的夾角為120度。 The transistor unit 410 and the transistor unit 210 of FIG. 2 and the transistor unit 310 of FIG. 3 have different layout structures, but similar effects can be achieved. As shown in FIG. 4, the transistor unit 410 is hexagonal, and the number of the source regions 440 is three, and the angle between adjacent source regions 440 extending from the same body region 430 is 120 degrees.

本發明之「非均向性」乙詞係指向外延伸的程度不等,包含該等源極區自該本體區向外延伸的長度不需相等的情形,亦包含該等源極區不需全部包覆該本體區之周圍的情形。 The term "non-uniformity" of the present invention is not limited to the extent of the outward extension, and includes the fact that the lengths of the source regions extending outward from the body region need not be equal, and the source regions are not required to be included. All of the conditions surrounding the body region.

綜上所述,本發明之功率金氧半電晶體之佈局結構係藉由佈局技巧而巧妙增加源極區之周長,故得以提高其輸出電流。相較於傳統之功率金氧半電晶體,本發明之功率金氧半電晶體得以在相同面積下提供較高之輸出電壓,故得以較小之電路面積達到相同之效果,而達到節省成本之目的。 In summary, the layout structure of the power MOS semi-transistor of the present invention is skillfully increasing the circumference of the source region by layout techniques, thereby improving the output current. Compared with the conventional power MOS semi-transistor, the power MOS semi-transistor of the present invention can provide a higher output voltage under the same area, so that the same effect can be achieved with a smaller circuit area, thereby achieving cost saving. purpose.

本發明之技術內容及技術特點已揭示如上,然而熟悉本項技術之人士仍可能基於本發明之教示及揭示而作種種不背離本發明精神之替換及修飾。因此,本發明之保護範 圍應不限於實施例所揭示者,而應包括各種不背離本發明之替換及修飾,並為以下之申請專利範圍所涵蓋。 The technical and technical features of the present invention have been disclosed as above, and those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the invention. Therefore, the protection model of the present invention The invention is not limited to the embodiments disclosed, but includes various alternatives and modifications without departing from the scope of the invention.

100‧‧‧功率金氧半電晶體 100‧‧‧Power MOS semi-transistor

110‧‧‧電晶體單元 110‧‧‧Optocell unit

120‧‧‧源極區 120‧‧‧ source area

130‧‧‧閘極區 130‧‧ ‧ gate area

140‧‧‧汲極區 140‧‧‧Bungee Area

150‧‧‧本體區 150‧‧‧ body area

200‧‧‧功率金氧半電晶體 200‧‧‧Power MOS semi-transistor

210‧‧‧電晶體單元 210‧‧‧Optocell unit

220‧‧‧汲極區 220‧‧‧Bungee Area

230‧‧‧本體區 230‧‧‧ body area

240‧‧‧源極區 240‧‧‧ source area

250‧‧‧閘極區 250‧‧ ‧ gate area

300‧‧‧功率金氧半電晶體 300‧‧‧Power MOS semi-transistor

310‧‧‧電晶體單元 310‧‧‧Optocell unit

320‧‧‧汲極區 320‧‧‧Bungee Area

330‧‧‧本體區 330‧‧‧ Body area

340‧‧‧源極區 340‧‧‧ source area

350‧‧‧閘極區 350‧‧ ‧ gate area

400‧‧‧功率金氧半電晶體 400‧‧‧Power MOS semi-transistor

410‧‧‧電晶體單元 410‧‧‧Optocell unit

420‧‧‧汲極區 420‧‧‧Bungee Area

430‧‧‧本體區 430‧‧‧ body area

440‧‧‧源極區 440‧‧‧ source area

450‧‧‧閘極區 450‧‧‧The gate area

圖1顯示一傳統之功率金氧半電晶體之佈局結構之示意圖;圖2顯示本發明之一實施例之功率金氧半電晶體之佈局結構之示意圖;圖3顯示本發明之另一實施例之功率金氧半電晶體之佈局結構之示意圖;以及圖4顯示本發明之另一實施例之功率金氧半電晶體之佈局結構之示意圖。 1 is a schematic view showing a layout structure of a conventional power MOS transistor; FIG. 2 is a schematic view showing a layout structure of a power MOS transistor according to an embodiment of the present invention; and FIG. 3 is a view showing another embodiment of the present invention. A schematic diagram of a layout structure of a power MOS transistor; and FIG. 4 is a schematic view showing a layout structure of a power MOS transistor according to another embodiment of the present invention.

200‧‧‧功率金氧半電晶體 200‧‧‧Power MOS semi-transistor

210‧‧‧電晶體單元 210‧‧‧Optocell unit

220‧‧‧汲極區 220‧‧‧Bungee Area

230‧‧‧本體區 230‧‧‧ body area

240‧‧‧源極區 240‧‧‧ source area

250‧‧‧閘極區 250‧‧ ‧ gate area

Claims (16)

一種功率金氧半電晶體,具有複數個電晶體單元,該電晶體單元之佈局結構包含:一汲極區;複數個本體區,環繞該汲極區;複數個源極區,係自各本體區之周圍以非均向性向外延伸而成;一閘極區,係位於該汲極區和該等源極區之間;以及至少三個導線,連接相鄰電晶體單元之閘極區;其中該汲極區、該等本體區和該等源極區之接點皆位於該佈局結構之同一面,且相對該電晶體單元之中心,該電晶體單元之佈局結構對稱。 A power oxy-oxide semi-transistor having a plurality of transistor units, the layout structure of the transistor unit comprising: a drain region; a plurality of body regions surrounding the drain region; and a plurality of source regions from each body region Surrounding outwardly with a non-uniformity; a gate region is located between the drain region and the source regions; and at least three wires connecting the gate regions of adjacent transistor units; The contact regions of the drain regions, the body regions and the source regions are all located on the same side of the layout structure, and the layout structure of the transistor units is symmetrical with respect to the center of the transistor unit. 根據請求項1所述之功率金氧半電晶體,其中自各本體區之周圍以非均向性向外延伸之該等源極區之數量為四個。 The power MOS semi-transistor according to claim 1, wherein the number of the source regions extending outward from each of the body regions in a non-uniform manner is four. 根據請求項1所述之功率金氧半電晶體,其中自各本體區之周圍以非均向性向外延伸之該等源極區之數量為三個,且從相同本體區延伸之相鄰源極區的夾角為120度。 The power MOS semi-transistor according to claim 1, wherein the number of the source regions extending outward from each of the body regions by a non-uniformity is three, and adjacent sources extending from the same body region The angle of the zone is 120 degrees. 根據請求項1所述之功率金氧半電晶體,其中該電晶體單元之形狀為矩形。 A power MOS transistor according to claim 1, wherein the transistor unit has a rectangular shape. 根據請求項1所述之功率金氧半電晶體,其中該電晶體單元之形狀為六角形。 A power oxynitride semiconductor according to claim 1, wherein the transistor unit has a hexagonal shape. 根據請求項1所述之功率金氧半電晶體,其中該等源極區完全包覆該等本體區。 The power MOS semi-transistor of claim 1, wherein the source regions completely encapsulate the body regions. 根據請求項1所述之功率金氧半電晶體,其中該等源極區 非完全包覆該等本體區。 A power MOS semi-transistor according to claim 1, wherein the source regions The body regions are not completely covered. 根據請求項1之功率金氧半電晶體,其中各本體區和自其周圍以非均向性向外延伸而成之源極區形成一十字結構。 According to claim 1, the power metal oxide semi-transistor has a cross structure formed by each body region and a source region extending outward from the periphery thereof in a non-uniform manner. 一種功率金氧半電晶體,具有複數個電晶體單元,該電晶體單元之佈局結構包含:一汲極區;複數個本體區,環繞該汲極區;複數個源極區,係自各本體區之各邊向外延伸而成;一閘極區,係位於該汲極區和該等源極區之間;以及至少三個導線,連接相鄰電晶體單元之閘極區;其中該汲極區、該等本體區和該等源極區之接點皆位於該佈局結構之同一面,且相對該電晶體單元之中心,該電晶體單元之佈局結構對稱。 A power oxy-oxide semi-transistor having a plurality of transistor units, the layout structure of the transistor unit comprising: a drain region; a plurality of body regions surrounding the drain region; and a plurality of source regions from each body region Each of the sides extends outwardly; a gate region is located between the drain region and the source regions; and at least three wires are connected to the gate region of the adjacent transistor unit; wherein the gate region The junctions of the regions, the body regions and the source regions are all located on the same side of the layout structure, and the layout structure of the transistor units is symmetrical with respect to the center of the transistor unit. 根據請求項9所述之功率金氧半電晶體,其中自各本體區之各邊向外延伸之該等源極區之數量為四個。 The power MOS semi-transistor according to claim 9, wherein the number of the source regions extending outward from each side of each body region is four. 根據請求項9所述之功率金氧半電晶體,其中自各本體區之各邊向外延伸之該等源極區之數量為三個,且從相同本體區延伸之相鄰源極區的夾角為120度。 The power MOS transistor according to claim 9, wherein the number of the source regions extending outward from each side of each body region is three, and the angle between adjacent source regions extending from the same body region It is 120 degrees. 根據請求項9所述之功率金氧半電晶體,其中該電晶體單元之形狀為矩形。 A power MOS transistor according to claim 9, wherein the transistor unit has a rectangular shape. 根據請求項9所述之功率金氧半電晶體,其中該電晶體單元之形狀為六角形。 A power oxy-halide transistor according to claim 9, wherein the transistor unit has a hexagonal shape. 根據請求項9所述之功率金氧半電晶體,其中該等源極區完全包覆該等本體區。 The power MOS semi-transistor of claim 9, wherein the source regions completely encapsulate the body regions. 根據請求項9所述之功率金氧半電晶體,其中該等源極區非完全包覆該等本體區。 The power MOS semi-transistor according to claim 9, wherein the source regions do not completely cover the body regions. 根據請求項9所述之功率金氧半電晶體,其中各本體區和自其各邊向外延伸而成之源極區形成一十字結構。 A power MOS transistor according to claim 9, wherein each body region and the source region extending outward from each of the sides form a cross structure.
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009079561A1 (en) * 2007-12-17 2009-06-25 Marvell World Trade Ltd. Mos device with low on-resistance

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009079561A1 (en) * 2007-12-17 2009-06-25 Marvell World Trade Ltd. Mos device with low on-resistance

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