TWI498535B - An optical detection device with an on-line correction function - Google Patents

Description

Optical detecting device with online correction function

The present invention relates to an optical detecting device, and more particularly to an optical detecting device having an on-line correction function.

The conventional camera calibration system includes a camera, an image display, a clamping mechanism that can adjust a plurality of degrees of freedom, and a correction plate for correcting a dedicated pattern. The calibration plate shall be fixed on the surface of a test object, and then the calibration plate is photographed by the camera to generate a corrected image, and then the camera is corrected according to the corrected image, but the calibration plate of the conventional calibration system is not easily fixed on the surface. The object to be tested causes the accuracy of the camera calibration to be reduced; in addition, when the camera is to be tested, the calibration plate must be removed before the detection can be performed.

In view of the above problems, the present invention provides an optical detecting device having an on-line correction function, which does not need to provide a calibration plate on the object to be tested, and the surface of the object to be tested can be in any form without affecting the accuracy of the correction, and then When testing, the object can be directly tested.

The object of the present invention is to provide an optical detecting device with an on-line correction function, which is suitable for the object to be tested on any surface, and performs on-line alignment correction on the line, thereby effectively improving the accuracy, stability and consistency of the correction.

In order to achieve the above-mentioned various purposes and effects, the present invention discloses a line having The optical detection device of the upper correction function comprises: a light splitting module, when a light enters the light splitting module from the first side of the light splitting module, respectively, the third side and the fourth side of the light splitting module respectively When the light enters the light splitting module from the second side of the light splitting module, the light is emitted from the third side and the fourth side of the light splitting module respectively; a light source module is disposed in the light splitting module The light source module is configured to provide the light on the first side of the light splitting module, and the optical detecting module is disposed on the second side of the light splitting module, wherein the optical detecting module is configured to detect a sample to be tested The test object is disposed on the fourth side of the light splitting module; and a correction module is disposed on the third side of the light splitting module, the correction module is configured to provide a correction pattern to correct the optical Detection module.

1‧‧‧Optical inspection device

10‧‧‧Distribution Module

1011‧‧‧ first side

1012‧‧‧ second side

1013‧‧‧ third side

1014‧‧‧ fourth side

11‧‧‧Light source module

12‧‧‧ Optical Inspection Module

13‧‧‧ Calibration Module

131‧‧ ‧ calibration area

1311‧‧‧First Reflective Lens

13111‧‧‧correction pattern

1312‧‧‧second reflective lens

132‧‧‧Light absorption zone

1321‧‧‧Light-absorbing lenses

133‧‧‧Switch window

14‧‧‧Shadow module

141‧‧‧Light absorbing plate

2‧‧‧Test object

3‧‧‧Rollers

S‧‧‧Light

S1‧‧‧first light

S2‧‧‧second light

1 is a block diagram of an optical detecting device of the present invention; FIG. 2A and FIG. 2B are schematic views of an optical detecting device according to a first embodiment of the present invention; A schematic view of an optical detecting device of a second embodiment; and a fourth drawing: a schematic view of an optical detecting device of a third embodiment of the present invention.

In order to further understand and understand the features of the present invention and the effects achieved, the following examples and the detailed descriptions are provided to illustrate the following:

Please refer to the first figure, which is a block diagram of the optical detecting device of the present invention. As shown, the optical detecting device 1 of the present embodiment includes a beam splitting module 10, a light source module 11, and an optical detecting module 12. And a correction module 13, the optical path of the optical splitting module 10 is sequentially named as a first side 1011, a second side 1012, a third side 1013 and a fourth side 1014 in a counterclockwise direction, and the beam splitting module 10 can be a beam splitter Tilt at a 45 degree angle, or by two three The prism module is formed by a diagonally-bonded diagonal cube. The beam splitting module 10 generally allows half of the light to be reflected by the light. Although the use efficiency of the light source is lowered, the light-emitting efficiency of the light source module 11 is improved as compensation. When a light enters from the first side 1011 of the beam splitting module 10, the light is emitted from the third side 1013 and the fourth side 1014 of the beam splitting module 10; when the light enters from the second side 1012 of the beam splitting module 10, the light The third side 1013 and the fourth side 1014 of the beam splitting module 10 are emitted.

Please refer to FIG. 2A and FIG. 2B together, which are schematic diagrams of the optical detecting device according to the first embodiment of the present invention. The light source module 11 , the optical detection module 12 and the correction module 13 are disposed around the beam splitting module 10 , the light source module 11 is disposed on the first side 1011 of the beam splitting module 10 , and the optical detecting module 12 is disposed in the beam splitting module 10 . The second side 1012 is disposed on the third side 1013 of the beam splitting module 10 . The calibration module 13 includes a correction area 131, a light absorption area 132, and a switching window 133. The switching window 133 corresponds to the correction area 131 or the light absorption area 132. The correction area 131 of the embodiment has one of the correction patterns 13111. The reflective lens 1311 has a light absorbing lens 1321 or a light absorbing plate on the surface of the light absorbing region 132. The first reflective lens 1311 is stacked on the light absorbing lens 1321.

The optical detecting device 1 of the present embodiment is configured to detect a test object 2, and the object to be tested 2 of the present embodiment is a flexible material and is wound on the plurality of rollers 3, so that the surface of the object to be tested 2 is curved. And the object to be tested 2 is taken up by the rotation of the rollers 3, of course, the object to be tested 2 can also be swayed on a plane for detection. The object to be tested 2 is disposed on the fourth side 1014 of the beam splitting module 10, and the optical detecting module 12 is corrected before the object 2 is detected. At this time, the light source module 11 supplies a light S to the light splitting module 10, and the light S enters from the first side 1011 of the light splitting module 10, one of the light rays S partially penetrates, and another part of the light S is reflected, penetrates The light is the first light S1, and the reflected light is the second light S2.

The first light S1 penetrates the beam splitting module 10 and is emitted from the third side 1013 of the beam splitting module 10 to the correction module 13 . As shown in FIG. 2A, the user causes the switching window 133 to correspond to the correction area 131, the first light S1 is incident on the correction area 131, and the correction area 131 reflects the first light S1 to the beam splitting module 10, and the first light S1 is reflected. It enters from the third side 1013 of the beam splitting module 10 and is reflected by the beam splitting module 10 to the optical detecting module 12 . The optical detection module 12 can be a one-dimensional scanscan or a two-dimensional area scan, and the optical detection module 12 can be composed of a single probe or an array probe. The optical detecting module 12 receives the reflected first light S1 and generates a corrected image, and corrects the position of the optical inspection module 12 according to a correction pattern in the corrected image and the correction pattern 1311 of the correction area 131 to complete the optical The calibration of the inspection module 12 is performed. In addition, when the light S is changed from the second side 1012, the beam splitting module 10 allows a portion of the light S to penetrate and exit from the fourth side 1014, and reflects another portion of the light S and exits from the third side 1013.

In addition, the second light S2 is reflected by the beam splitting module 10 and is emitted from the fourth side 1014 of the beam splitting module 10 to the object to be tested 2 . In this embodiment, a shielding module 14 is further disposed between the object to be tested 2 and the fourth side 1014 of the beam splitting module 10, and the shielding module 14 includes a light absorbing plate 141. When the second light S2 is incident on the object to be tested 2, the light absorbing plate 141 of the shielding module 14 shields the object 2 and absorbs the second light S2, so as to prevent the object 2 from reflecting the second light S2 to the beam splitting module 10 and The optical detection module 12 interferes with the correction of the optical detection module 12.

After the optical detection module 12 completes the calibration, as shown in FIG. 2B, only the switching window 133 of the calibration module 13 corresponds to the light absorption area 132 and the shielding module between the object to be tested 2 and the light distribution module 10 is removed. 14, the test object 2 can be detected. When the switching window 133 of the calibration module 13 corresponds to the light absorption area 132 and the shielding module 14 between the object to be tested 2 and the light distribution module 10, the first light S1 penetrating the beam splitting module 10 is absorbed by the light absorption area 132. Second light The line S2 is reflected by the object to be tested 2 to the beam splitting module 10, and the reflected second light S2 enters from the fourth side 1014 of the beam splitting module 10 and penetrates the beam splitting module 10 from the second side of the beam splitting module 10 1012 is emitted, and then the optical detecting module 12 receives the reflected second light S2 to detect the object to be tested 2. As can be seen from the above, the optical path of the correction optical detection module 12 is different from the optical path of the optical detection module 12 for detecting the object 2 to be detected. However, the correction module 13 does not need to be disposed on the surface of the object to be tested 2, so as to avoid the problem that it is difficult to set and correct when the surface of the object to be tested 2 is curved.

Please refer to the third figure, which is a schematic diagram of an optical detecting device according to a second embodiment of the present invention. As shown in the figure, the correction area 131 of the calibration module 13 of the present embodiment further includes a second reflection that does not have a correction pattern. The lens 1312 and the second reflective lens 1312 are disposed between the first reflective lens 1311 and the light absorbing lens 1321. When the first light S1 penetrates the beam splitting module 10 and is emitted from the third side 1013 of the beam splitting module 10 to the correction module 13 . The user allows the switching window 133 to correspond to the second reflective lens 1312 of the calibration area 131. The second reflective lens 1312 reflects the first light S1 to the beam splitting module 10, and then is reflected by the beam splitting module 10 of the beam splitting module 10 to the optical detecting module. 12, the optical detection module 12 receives the first light S1 to generate another corrected image, and then performs flat field correction on the optical detection module 12 according to the corrected image. For example, when the center brightness of the corrected image is higher than the surrounding brightness, the optical detection module 12 can be adjusted by an adjustment program so that the surrounding brightness of the corrected image is the same as the center brightness.

Please refer to the fourth figure, which is a schematic diagram of an optical detecting device according to a third embodiment of the present invention. When the light source module 11 provides a light S, the light S enters from the first side 1011 of the light splitting module 10, and the light splitting module 10 allows part of the light S to pass through, and the other part of the light S is reflected by the light splitting module 10, penetrating The portion S of the light splitting module 10 is the first light S1, and the portion S of the light reflected by the beam splitting module 10 is the second light S2. First light The S1 passes through the beam splitting module 10 and is emitted from the fourth side 1014 of the beam splitting module 10 to the object to be tested 2 to detect the object to be tested 2; the second light S2 is reflected by the beam splitting module 10 and is separated from the beam splitting module 10 The third side 1013 is emitted to the correction module 13 to correct the optical detection module 12. Moreover, when the light S is redirected by the second side 1012, the beam splitting module 10 allows a portion of the light S to penetrate and exit from the third side 1013 and reflect another portion of the light S and exit from the fourth side 1014. The third embodiment is different from the first embodiment in that the light S enters the beam splitting module 10 and penetrates the object to be tested 2, and the others are the same as the first embodiment, and details are not described herein again.

In summary, the present invention provides an optical detecting device having an online correcting function. The correcting module of the optical detecting device is not disposed on the surface of the object to be tested, and thus is not affected by the surface morphology of the object to be tested. Precision. In addition, the calibration module is separately arranged from the object to be tested. After the optical detection module is corrected, the calibration module can be detected immediately, and the time for resetting and removing the calibration module can be reduced. The calibration module has different types of reflective lenses for alignment correction and flat field correction of the calibration optical detection module.

The above is only the embodiment of the present invention, and is not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the claims of the present invention are It should be included in the scope of the patent application of the present invention.

1‧‧‧Optical inspection device

10‧‧‧Distribution Module

1011‧‧‧ first side

1012‧‧‧ second side

1013‧‧‧ third side

1014‧‧‧ fourth side

11‧‧‧Light source module

12‧‧‧ Optical Inspection Module

13‧‧‧ Calibration Module

2‧‧‧Test object

Claims (9)

An optical detecting device having an on-line correction function, comprising: a light splitting module, when a light enters the light splitting module from a first side of the light splitting module, respectively, the third side and the third When the light enters the light splitting module from the second side of the light splitting module, the light is emitted from the third side and the fourth side of the light splitting module; a light source module is disposed in the light splitting On the first side of the module, the light source module is configured to provide the light; an optical detection module is disposed on the second side of the light splitting module, and the optical detecting module is configured to detect a sample to be tested. The measuring system is disposed on the fourth side of the beam splitting module; and a calibration module is disposed on the third side of the beam splitting module, the correcting module is configured to provide a correction pattern to correct the optical detecting module The calibration module includes: a correction area for providing the correction pattern; a light absorption area for absorbing the light; and a switching window for selecting the correction area or the light absorption area. The optical detecting device of claim 1, wherein the switching window selects the correction area when the optical detecting module performs correction. The optical detecting device of claim 1, wherein the switching window selects the light absorbing region when the optical detecting module performs the detecting. The optical detecting device of claim 1, wherein the correction area comprises A reflective lens for performing flat field correction on the optical detection module. The optical detecting device of claim 1, wherein the optical detecting module is a one-dimensional scanning scan or a two-dimensional area scan. The optical detecting device of claim 1, further comprising: a shielding module disposed between the fourth side of the beam splitting module and the object to be tested, wherein the shielding module is in the optical detecting mode The group is used to shield the object to be tested when performing calibration. The optical detecting device of claim 1, wherein the beam splitting module is a beam splitter or a cube formed by two triangular columns that are diagonally bonded. The optical detecting device of claim 1, wherein when the light enters the light splitting module from the first side of the light splitting module, one of the light passes through the light splitting module and is separated by the light splitting module. The third side of the light is emitted by the light splitting module and is emitted by the fourth side of the light splitting module. When the light enters the light splitting module from the second side of the light splitting module, A portion of the light passes through the beam splitting module and is emitted by the fourth side of the beam splitting module, and another portion of the light is reflected by the beam splitting module and is emitted by the third side of the beam splitting module. The optical detecting device of claim 1, wherein when the light enters the light splitting module from the first side of the light splitting module, one of the light passes through the light splitting module and is separated by the light splitting module. The fourth side of the light is emitted by the light splitting module and is emitted by the third side of the light splitting module. When the light enters the light splitting module from the second side of the light splitting module, A portion of the light passes through the beam splitting module and is emitted by the third side of the beam splitting module, and another portion of the light is reflected by the beam splitting module and emitted from the fourth side of the beam splitting module.