TWI491921B - Multi-spots beam apparatus - Google Patents

Description

Multi-spot optical path device

The present disclosure relates to a multi-spot optical path device, and more particularly to an adjustable multi-spot optical path device.

In recent years, the application of linear slides has become more diversified, so the new performance of linear slides is imperative. From the elements that roll inside, it can be divided into two types: roller type and ball type.

In the case of a ball-type linear slide, the ball is used as a transmission interface between the slide rail and the slider, and the movement of the rolling cycle without stroke limitation is performed, and at the same time, by the proper size matching of the balls between the slider and the slide rail, The slider is restrained on the slide rail, so that the load platform can move linearly along the slide rail with high speed and high precision.

As for the miniaturized track, due to the rise of the micro-electromechanical industry, some world-class machine tool manufacturers are actively developing micro-machining machines. However, existing linear slides can be applied to them, and the starting friction must be effectively reduced. In order to reduce the vibration and resistance variation during operation, the machining accuracy can be improved without affecting the rigidity of the micromachining machine. Such linear slides typically require high smoothness, high speed, small size, and good walking accuracy. For example, the micro-track must have a higher hardness in the area where the ball slides. The durability is increased, the contact area is approximately semi-circular, and the hardened area is approximately two inclined surfaces with an angle of 45 degrees.

Traditionally, the vacuum furnace and high-frequency heat treatment are used to process the micro-track. This technology has the disadvantages of easy expansion and contraction, which will affect the drilling accuracy, and the temperature quenching and tempering time.

Therefore, how to propose a device for processing micro-track processing, which can perform high-precision processing and processing, is one of the directions of current research and development.

The present disclosure provides a multi-spot optical path device comprising: a beam splitter having at least two reflective surfaces, the at least two reflective masks having a specific angle for the spectroscope to split a beam incident on the beam splitter into at least two beams And at least two mirrors symmetrically disposed on both sides of the beam splitter to respectively reflect the at least two beams from the beam splitter to the workpiece to form at least two spots on the workpiece.

In an embodiment, a focusing mirror is further disposed between the beam splitter and the workpiece for collecting the at least two beams into the workpiece.

The at least two mirrors of the present disclosure have a first distance, the beam splitter and the focusing mirror have a second distance, at least two light spots are separated by a third distance, at least two of the light beams intersect with an angle, and at least two mirrors respectively have one rotation. The angle and the amount of light and the offset of the light are all adjustable. Therefore, micro-tracks of different specifications can be applied.

1‧‧‧beam

11‧‧‧ sub-beam

2, 2'‧‧‧ beamsplitter

21‧‧‧reflecting surface

3, 3'‧‧‧ mirror

4, 4', 4" ‧ ‧ workpieces

41, 41'‧‧‧ concave corner

42‧‧‧ lobes

5‧‧‧ Focusing mirror

‧‧‧‧ angle

‧‧‧‧Specific angle

D1‧‧‧first distance

D2‧‧‧Second distance

L‧‧‧fourth distance

P‧‧‧third distance

θ‧‧‧Rotation angle

1 is a diagram showing a first embodiment of a multi-spot optical path device according to the present disclosure 2 is a schematic view of a second embodiment of the multi-spot optical path device of the present disclosure; FIG. 3 is a view showing a specific angle of the two reflecting surfaces of the multi-spot optical path device of the present disclosure; 4A and 4B FIG. 5 is a schematic view showing a fourth embodiment of a multi-spot optical path device according to the present disclosure; FIG. 6A to FIG. 6C are diagrams showing a multi-spot optical path of the present disclosure; A simulation diagram of the relationship between the first distance, the second distance, the third distance, the included angle, and the rotation angle of the device; FIG. 6D is a schematic diagram of the beam incident on the workpiece of the multi-spot optical path device of the disclosure; FIGS. 7A to 7C are A schematic diagram of a preferred example of the angle between the angle of the optical path device and the third distance is disclosed; and FIGS. 8A to 8D are schematic diagrams showing the offset of the beam of the multi-spot optical path device of the present disclosure.

Other embodiments of the present disclosure will be readily understood by those skilled in the art from this disclosure.

Referring to FIG. 1 , in the first embodiment, the multi-spot optical path device of the present disclosure mainly includes a beam splitter 2 and a second mirror 3 .

The beam splitter 2 has a specific angle β. As shown, the beam splitter 2 has two reflecting surfaces 21, the two reflecting surfaces 21 are inclined outwardly, have a specific angle β, and the beam splitter 2 is used to inject one into two The light beam 1 of the reflecting surface 21 is divided into two partial beams 11. It should be noted that in the present embodiment, the beam splitter 2 is a mirror having a specific angle β. Next, two mirrors 3 are symmetrically disposed on both sides of the beam splitter 2 for respectively reflecting the two-beams 11 to the workpiece 4 to form at least two spots on the workpiece 4. In the present embodiment, the mirror 3 is a curved mirror. Further, the two partial beams 11 are crossed before being incident on the workpiece 4, and thus the two partial beams 11 can be incident on the surface of the concave corner 41 of the workpiece 4 for processing.

Referring to FIG. 2, in the second embodiment, the multi-spot optical path device of the present disclosure further includes a focusing mirror 5 disposed between the beam splitter 2 and the workpiece 4 for concentrating the bipartite beam 11 to the workpiece 4. on. In the present embodiment, the mirror 3' is a plane mirror.

In the first and second figures, the two reflection surfaces 21 have a specific angle β of about 90°, but not limited thereto, and the specific angle β ranges from 0 to 180 degrees, or In Fig. 3, the two reflecting surfaces 21 are inclined inward to form a concave angle, and the specific angle β can range from 180 to 360 degrees, and the specific angle β shown in Fig. 3 is about 240°.

Referring to Figures 4A and 4B, in the third embodiment, the multi-spot optical path device of the present disclosure mainly comprises a beam splitter 2', four mirrors 3' and a focusing mirror 5. The dichroic mirror 2' has four reflecting surfaces 21, which can divide one beam 1 into quarter beams 11, so that the two concave corners 41' of the workpiece 4' can be simultaneously heat-treated. A perspective view of the beam splitter 2' is shown in Fig. 4B. As can be seen from the figures 4A and 4B, the spectroscope of the present disclosure may have at least two reflecting surfaces, for example, two, four, six, etc., and an even number of reflecting surfaces, and the adjacent two reflecting surfaces have a specific angle β. And the number of reflecting surfaces of the beam splitter is the same as the number of mirrors, then one beam can be divided into two, four, six, etc. even sub-beams, and two, four, six are formed on the workpiece. An even number of light spots. Moreover, in this embodiment, it is not necessary to provide the focusing mirror 5, and thus the plane mirror must be replaced with a curved mirror.

Referring to FIG. 5, in the fourth embodiment, the bipartite beam 11 of the multi-spot optical path device of the present disclosure does not cross before being incident on the workpiece 4", and the bipartite beam 11 can be incident on the lobes 42 of the workpiece 4. The surface is processed.

Furthermore, returning to Figures 1 and 2, the two mirrors 3 (3') are separated from each other by a first distance d1, and the beam splitter 2 and the focusing mirror 5 are separated by a second distance d2 and incident on the workpiece 4. The two spots are separated by a third distance p, the two beams 11 intersect at an angle α, and the intersection of the two beams 11 and the line connecting the two spots are separated by a fourth distance L, and the two mirrors 3 (3' There is a rotation angle θ, and these factors have a correlation with each other, for example, p = 2 × L × tan (α / 2), and the following is explained by the simulation diagrams shown in Figs. 6A to 6C.

As can be seen from FIG. 6A, the first distance d1 becomes larger, the third distance p(Pitch) becomes smaller, and the angle α becomes larger. Therefore, the first distance d1 is substantially inversely proportional to the third distance p, and the first distance d1 and the angle α are It is roughly proportional. As can be seen from Fig. 6B, the rotation angle θ is small, the third distance p is increased, and the angle α is increased. Therefore, the rotation angle θ is substantially inversely proportional to the third distance p and the angle α. It can be seen from Fig. 6C that the second distance d2 becomes larger, the third distance p becomes larger, and the angle is larger. Since α becomes small, the second distance d2 is substantially proportional to the third distance p, and the second distance d2 is substantially inversely proportional to the angle α. It is shown from Fig. 6A to 6B that the first distance d1 and the rotation angle θ are simultaneously adjusted, and the third distance p is fixed, and the angle α is changed to reach the surface of the concave corner 41 of the workpiece 4 which is perpendicularly incident to the sub-beam 11, as shown in Fig. 6D. Show. From the 6th to 6Cth diagrams, the second distance d2 and the rotation angle θ are simultaneously adjusted, and the angle α is changed to change the third distance p.

In addition, referring to FIGS. 7A-7C, a simulation example of a preferred example of the angle between the angle and the third distance of the multi-spot optical path device of the present disclosure is shown, and the third distance p can be adjusted between 0.5 mm and 150 mm. The angle α can be adjusted between 14.5° and 130°.

Furthermore, referring to Figures 8A to 8D, the light pattern of the light beam 1 is controllable, and the offset of the light beam 1 incident on the beam splitter 2 is controllable, and the offset is controlled to control the energy ratio of the two light spots. For example, in Fig. 8A, the light beam 1 has a circular shape, and the energy ratio of the two light spots is 50% and 50%; in Fig. 8B, the light beam 1 has a circular shape and the energy of the two light spots. The ratio is 20% and 80%; in Fig. 8C, the light beam 1 has a square shape, and in Fig. 8D, the light beam 1 has a trapezoidal shape. Therefore, the energy ratio of the two spots can be between 0.01 and 99.

In summary, the beam splitter of the multi-spot optical path device of the present disclosure has an adjustable specific angle, and by adjusting the first distance between the two mirrors disposed on both sides of the beam splitter, the beam splitter and The second distance between the focusing mirrors and the rotation angle of the mirror can adjust the angle at which the partial beams intersect, thereby adjusting the distance between the light spots incident on the workpiece, and also adjusting the light. The beam type and light offset are used to adjust the energy distribution of the spot. Therefore, it can be applied to the processing of micro-tracks, or to the processing of workpieces having concave or convex angles such as a material pipe, a rack, a gear, a screw plate, a pipe inner wall, and a saw blade (slitting knife).

The above embodiments are merely illustrative of the effects of the present disclosure, and are not intended to limit the disclosure, and those skilled in the art can implement the above embodiments without departing from the spirit and scope of the disclosure. Make modifications and changes. In addition, the number of components in the above-described embodiments is merely illustrative and is not intended to limit the disclosure. Therefore, the scope of protection of the present disclosure should be as set forth in the scope of the patent application described later.

1‧‧‧beam

11‧‧‧ sub-beam

2‧‧‧beam splitter

21‧‧‧reflecting surface

3‧‧‧Mirror

4‧‧‧Workpiece

41‧‧‧ concave corner

‧‧‧‧ angle

‧‧‧‧Specific angle

D1‧‧‧first distance

L‧‧‧fourth distance

P‧‧‧third distance

θ‧‧‧Rotation angle

Claims (17)

A multi-spot optical path device comprising: a beam splitter having at least two reflective surfaces, the at least two reflective masks having a specific angle for the spectroscope to split a beam incident on the beam splitter into at least two beams; at least two Mirrors are symmetrically disposed on both sides of the beam splitter to respectively reflect the at least two beams from the beam splitter to the workpiece to form at least two spots on the workpiece; and a focusing mirror is disposed on the mirror Between the beam splitter and the workpiece, the at least two beams are concentrated to the workpiece. The multi-spot optical path device of claim 1, wherein the mirror is a plane mirror. The multi-spot optical path device of claim 1, wherein the mirror is a curved mirror. The multi-spot optical path device of claim 1, wherein the specific included angle ranges between 0 degrees and 180 degrees. The multi-spot optical path device of claim 1, wherein the specific included angle ranges between 180 degrees and 360 degrees. The multi-spot optical path device of claim 1, wherein the at least two mirrors are apart from the first distance, the at least two light spots are apart from the third distance, and the at least two partial beams intersect at an angle, and wherein the The first distance is inversely proportional to the third distance, the first distance being proportional to the included angle. The multi-spot optical path device according to claim 1, wherein The at least two mirrors respectively have a rotation angle, and the at least two light spots are separated from the third distance, and the at least two partial beams intersect an angle, and the rotation angle is inversely proportional to the third distance and the angle. The multi-spot optical path device of claim 2, wherein the spectroscope is at a second distance from the focusing mirror, the at least two spots are separated by a third distance, and the at least two beams intersect at an angle, and wherein The second distance is proportional to the third distance, the second distance being inversely proportional to the included angle. The multi-spot optical path device of claim 1, wherein the at least two spots are separated by a third distance, and the third distance is adjustable between 0.5 mm and 150 mm. The multi-spot optical path device of claim 1, wherein the at least two-beams intersect at an angle, the angle being adjustable between 14.5° and 130°. The multi-spot optical path device of claim 1, wherein an offset of the light beam incident on the beam splitter is controllable, and the offset is used to control an energy ratio of the at least two light spots. . The multi-spot optical path device of claim 11, wherein the energy ratio of the at least two spots is between 0.01 and 99. The multi-spot optical path device of claim 1, wherein the light pattern of the light beam is controllable. The multi-spot optical path device of claim 1, wherein the workpiece has a concave angle, and the at least two-beam is crossed before being incident on the workpiece, the at least two-beam being incident on the concave corner of the workpiece surface. The multi-spot optical path device of claim 1, wherein the workpiece has a lobe, the at least bipartite beam does not intersect before being incident on the workpiece, and the at least bipartite beam is incident on the lobe of the workpiece. surface. The multi-spot optical path device of claim 1, wherein the at least two-beam beam is incident perpendicularly on a surface of the workpiece. The multi-spot optical path device of claim 1, wherein the number of reflective surfaces of the beam splitter is the same as the number of the mirrors.