TWI491582B - Method of fabricating a porous device with dual restrictive layers and structure thereof - Google Patents

Description

Method for manufacturing porous element with double micro-throttle layer and structure thereof

The present invention relates to a method for fabricating a porous element, and more particularly to a method for producing a porous element having a double micro-throttle layer, wherein the double micro-throttle layer is formed of a porous carrier plate and a sealing layer.

The conventional porous member 200, as shown in Fig. 3, has a microporous structure 210 which is mainly used in the field of air bearing, which has pore size variation, permeability variation and porosity. The problem of uneven arrangement is that when the working fluid passes through the microporous structure 210, the permeability, rigidity and stability of the porous element 200 are greatly limited due to the uncontrollable permeability and surface flow field of the microporous structure 210. It cannot effectively carry a carrier.

SUMMARY OF THE INVENTION A primary object of the present invention is to provide a method of fabricating a porous element having a double micro-throttle layer.

A method for fabricating a porous element having a double micro-throttle layer, comprising: providing a porous carrier plate having a plurality of microporous channels and a cavity to be sealed, wherein an opening of each of the microchannels is exposed a sealing process is performed, and a hole layer is disposed on the surface of the porous carrier to be sealed, and the sealing layer seals the opening of each of the microporous channels, and the sealing layer comprises a plurality of openings Forming a through hole region, and performing a through hole process, forming a plurality of through holes in the through hole region of the sealing layer, each through hole penetrating through the sealing layer and communicating in the through holes to be formed The microvia channels below the area. The present invention forms a double micro-throttle layer by the porous carrier plate having the microporous channels and the sealing layer having the through holes, when the working fluid flows through the microporous channels and the through holes The throttling effect and high damping effect produced by the double micro-throttle layer can effectively improve the rigidity and stability of the porous element itself, and the porous element has the best bearing performance. Moreover, the present invention can be adjusted by The aperture size and arrangement of the through holes change the surface flow field characteristics of the sealing layer, and can be applied to various ultra-precision positioning platforms or precision instruments such as ultra-precision spindles.

Referring to FIG. 1 , a method for fabricating a porous element having a double micro-throttle layer according to an embodiment of the present invention includes a step A of providing a porous carrier, a step B of performing a sealing process, and performing Step C of through hole processing and step D of performing the test.

First, referring to step A and FIG. 2A of FIG. 1, a porous carrier plate 110 having a plurality of microporous channels 111 and a to-be-sealed surface 112, each of the micro-channels 111 having an opening 113 is provided. Each of the openings 113 is respectively exposed on the surface to be sealed 112. In the embodiment, the surface to be sealed 112 is also the surface of the porous carrier 110, and the air permeability of the porous carrier 110 is not more than 10 ^-11 , in order to obtain better rigidity and stability, in addition, the porous carrier plate 110 may be pre-processed in a flattening process to planarize the surface of the porous carrier plate 110 to form the to-be-sealed surface 112. The flat process is to level the surface of the porous carrier 110 by means of diamond precision turning. Other processes such as grinding, flying milling, free grinding, etc. can also be used for the leveling process. In this embodiment, the porous carrier 110 can be used. It is selected from porous materials such as metal, graphite or ceramics.

Next, referring to step B and FIG. 2B of FIG. 1 , a sealing process is performed, and a hole layer 120 is disposed on the to-be-sealed surface 112 of the porous carrier 110. The material of the sealing layer 120 is one. a colloid to seal the opening 113 of each of the microporous channels 111. The sealing layer 120 includes a plurality of through-hole regions 120a to be formed. In this embodiment, the colloid used in the sealing process may be selected from high. A molecular epoxy resin having a first thickness T1, the sealing layer 120 having a second thickness T2 for achieving an air permeability of no more than 10 ^-11 , the first thickness T1 It can be between 2 mm and 30 mm and the second thickness T2 is between 0.005 mm and 0.2 mm.

Referring to FIG. 2B, in the embodiment, the sealing layer 120 has a permeation layer 121, a sealing layer 122 and an upper surface 123. The permeation layer 121 penetrates the porous carrier through the to-be-sealed surface 112. 110, and filled in the opening 113 of each of the microporous passages 111, and the sealing layer 122 is located above the to-be-sealed surface 112 to seal the to-be-sealed surface 112. In the embodiment, the thickness of the permeation layer 121 The thickness ratio of the sealing layer 122 is between 0.2 and 2, so as to control the subsequent formation of each of the through holes 124 (see FIG. 2C) to have an aspect ratio of not more than 5.

Preferably, after the sealing process is completed, the porous carrier 110 provided with the sealing layer 120 may be subjected to an inflation test for detecting whether the sealing layer 120 can surely seal the porous carrier 110. The surface to be sealed 112 is formed to prevent the sealing layer 120 from completely sealing the to-be-sealed surface 112 of the porous carrier 110.

Preferably, after the inflation test is completed, the upper surface 123 of the sealing layer 120 may be leveled. In this embodiment, the upper surface 123 is flattened by diamond turning to make the upper surface 123 leveling to facilitate subsequent processing.

Preferably, after the flattening process of the sealing layer 120 is completed, the porous carrier 110 may be subjected to an inflation test, because the processing precision or the human error in the leveling process of the sealing layer 120 will be insufficient. The sealing layer 122 of the sealing layer 120 is partially or completely removed, so that the sealing layer 122 can be removed by an inflation test.

Referring to step C and FIG. 2C of FIG. 1 , after the sealing process is completed, through hole processing is performed, and a plurality of through holes 124 are formed in the through hole regions 120 a of the sealing layer 120 to be formed. The hole 124 extends through the sealing layer 120 and communicates with the microporous channels 111 under the through-hole regions 120a to form a porous element 100 having a double micro-throttle layer. In this embodiment, each The aspect ratio of the through hole is between 0.5 and 5. In addition, the ratio of the opening area of each of the through holes 124 to the upper surface 123 of the sealing layer 120 is between 0.004 and 0.16. The ratio can be adjusted according to the bearing capacity, rigidity and stability requirements of the porous element, and the area ratio can be determined by matching the geometric shape, size, aspect ratio, distribution pattern, etc. of each of the through holes 124. The air flotation characteristics of the component.

Referring to FIGS. 2B and 2C , in the present example, the permeation layer 121 of the sealing layer 120 penetrates into the porous carrier 110 , and the sealing layer 122 of the sealing layer 120 is located above the to-be-sealed surface 112 . Therefore, in the through hole processing process, each of the through holes 124 sequentially penetrates the sealing layer 122 and the permeation layer 121, and communicates with the microporous channels 111 located under the permeation layer 121, and the through hole processing process is optional. For laser processing or micro-milling, the present invention can change the aperture size of the through holes 124 and the arrangement positions of the through holes 124 to change the surface flow field of the porous element 100 having the double micro-throttle layer.

The present invention forms a double micro-throttle layer by the porous carrier plate 110 having the microporous channels 111 and the sealing layer 120 having the through holes 124 to improve the permeability and surface flow field in the prior art. Control causes problems that cannot be effectively carried.

Referring to step D of FIG. 1 , preferably, after performing the through hole processing to form a plurality of through holes 124 , functional testing of the porous element 100 having the double micro throttle layer is further included. a step of testing a flow rate of the fluid through the through holes 124 and the microporous passages 111, a change in inlet and outlet pressure, a bearing capacity of the loadable member of the porous member 100, a static/dynamic rigidity test, a fluid film thickness, and Vibration resistance, etc.

Referring to FIG. 2C, a porous element 100 having a double micro-throttle layer comprises a porous carrier plate 110 and a hole layer 120 having a plurality of micro-hole channels 111 and a surface. The surface to be sealed is the surface to be sealed 112 defined in the manufacturing method of the present invention. The sealing layer 120 is disposed on the surface of the porous carrier 110, and the through holes 124 penetrate through the sealing layer 120 and communicate with each other. In the present embodiment, the sealing layer 120 has a permeation layer 121, a sealing layer 122 and a plurality of through holes 124. The permeation layer 121 penetrates into the porous layer. In the carrier 110, the sealing layer 122 is located above the surface of the porous carrier 110, and each of the through holes 124 penetrates the sealing layer 122 of the sealing layer 120 and the permeation layer 121 and communicates with the permeation layer 121. The microporous channels 111 below.

The throttling effect and high damping effect energy generated by the double micro-throttle layer formed by the porous carrier plate 110 having the microporous channels 111 and the sealing layer 120 having the through holes 124 The vibration resistance of the porous component 100 itself is effectively improved, and the porous component 100 has an optimum bearing capacity and stability. Further, the present invention can change the aperture size and arrangement of the through holes 124. The surface flow field distribution of the sealing layer 120, so the invention can be applied to various ultra-precision positioning platforms or precision instruments such as ultra-precision spindles.

The scope of the present invention is defined by the scope of the appended claims, and any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention are within the scope of the present invention. .

100. . . Porous element with double micro-throttle layer

110. . . Porous carrier

111. . . Microporous channel

112. . . Hole to be sealed

113. . . Opening

120. . . Sealing layer

120a. . . Through hole area to be formed

121. . . Permeation layer

122. . . Sealing layer

123. . . Upper surface

124. . . Through hole

T1. . . First thickness

T2. . . Second thickness

200. . . Porous component

210. . . Microporous structure

A. . . Provide porous carrier

B. . . Sealing process

C. . . Through hole processing

D. . . Perform functional testing

Figure 1 is a flow chart showing the fabrication of a porous element having a double micro-throttle layer in accordance with an embodiment of the present invention. 2A-2C is a process diagram of a porous element having a double micro-throttle layer in accordance with an embodiment of the present invention. Figure 3: Schematic representation of a conventional porous element.

100. . . Porous element with double micro-throttle layer

110. . . Porous carrier

111. . . Microporous channel

120. . . Sealing layer

121. . . Permeation layer

122. . . Sealing layer

123. . . Upper surface

124. . . Through hole

Claims (10)

A method for fabricating a porous element having a double micro-throttle layer, comprising: providing a porous carrier plate having a plurality of microporous channels and a cavity to be sealed, wherein an opening of each of the microchannels is exposed The hole to be sealed; a sealing process is performed, and a hole layer is disposed on the surface of the porous carrier to be sealed, and the material of the sealing layer is a gel to seal the opening of each microchannel The sealing layer includes a plurality of through-hole regions to be formed, and a through-hole processing is performed, and a plurality of through holes are formed in the through-hole regions of the sealing layer, and the through holes penetrate the sealing layer. And each of the through holes communicates with the microporous channels below the area of the through holes to be formed. The method for fabricating a porous element having a double micro-throttle layer according to claim 1, wherein the sealing layer has a permeation layer and a sealing layer, and the permeation layer penetrates the porous layer through the surface to be sealed. In the quality carrier, the sealing layer is located above the surface to be sealed, and each of the through holes sequentially penetrates the sealing layer and the permeation layer, and communicates with the microporous channels located below the permeation layer. The method for fabricating a porous element having a double micro-throttle layer according to claim 2, wherein a ratio of a thickness of the permeation layer to a thickness of the sealing layer is between 0.2 and 2. The method for fabricating a porous element having a double micro-throttle layer according to claim 1, wherein the porous carrier has a first thickness, and the sealing layer has a second thickness, the first thickness The system is between 2 mm and 30 mm and the second thickness is between 0.005 mm and 0.2 mm. The method for fabricating a porous element having a double micro-throttle layer according to claim 1, wherein a step of performing the sealing process and the step of performing the through hole further comprises providing a sealing layer The porous carrier plate is subjected to an inflation test step. The method for fabricating a porous element having a double micro-throttle layer according to claim 1, wherein the sealing layer has an upper surface, and the sealing layer is further included before the processing of the through hole The upper surface is subjected to a leveling step. The method for fabricating a porous element having a double micro-throttle layer according to claim 6, wherein between the step of flattening the upper surface of the sealing layer and the step of performing the through hole, There is a step of performing an inflation test on the porous carrier. A porous element having a double micro-throttle layer, comprising: a porous carrier plate having a plurality of microporous channels and a surface, an opening of each of the microporous channels being exposed on the surface; and a hole a layer disposed on the surface of the porous carrier, the material of the sealing layer being a gel, the sealing layer having a plurality of through holes, each of the through holes penetrating the sealing layer and communicating with the porous carrier The microporous channels. The porous element having a double micro-throttle layer according to claim 8, wherein the sealing layer further has a permeation layer and a sealing layer, and the permeation layer penetrates into the porous carrier plate, the sealing layer Located above the surface of the porous carrier, each of the through holes penetrates the sealing layer of the sealing layer and the permeation layer and communicates with the microporous channels located below the permeation layer. A porous element having a double micro-throttle layer according to claim 8 of the patent application, wherein the glue system is a polymer epoxy resin.