TWI490741B - Transparent touch panel - Google Patents
Transparent touch panel Download PDFInfo
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- TWI490741B TWI490741B TW101134725A TW101134725A TWI490741B TW I490741 B TWI490741 B TW I490741B TW 101134725 A TW101134725 A TW 101134725A TW 101134725 A TW101134725 A TW 101134725A TW I490741 B TWI490741 B TW I490741B
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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Description
本發明,係關於在被化學強化的玻璃基板的平面,被配線把透明感測器電極拉出至外部的拉出線之透明觸控面板,進而詳言之,是關於藉由濺鍍形成薄膜後圖案化而形成拉出線的透明觸控面板。The present invention relates to a transparent touch panel in which a transparent sensor electrode is pulled out to a drawing line on a plane of a chemically strengthened glass substrate, and more specifically, a film is formed by sputtering. A transparent touch panel that is patterned to form a pull-out line.
把顯示裝置的顯示作為指標進行輸入操作的觸控面板,以使被配置於機器內部的顯示裝置之顯示可以通過輸入操作區域來目視的方式,在輸入操作區域形成透明感測器電極,同時作為在輸入操作區域形成透明感測器電極之絕緣基板使用玻璃基板。此外,此玻璃基板,其輸入操作區域沿著機器的表面露出,會有受到外力而破損之虞,所以將其表面與背面進行離子交換使其成為應力強化之化學強化玻璃基板。a touch panel that performs an input operation by using a display of the display device as an index, so that the display of the display device disposed inside the device can form a transparent sensor electrode in the input operation region by visually inputting the operation region, and simultaneously A glass substrate is used as the insulating substrate that forms the transparent sensor electrode in the input operation region. Further, in this glass substrate, since the input operation region is exposed along the surface of the machine and is damaged by an external force, the surface and the back surface are ion-exchanged to form a stress-strengthened chemically strengthened glass substrate.
圖7與圖8係圖示記載於專利文獻1的投影型靜電電容方式之從前的透明觸控面板100,在被設定於化學強化玻璃基板101的表面之輸入操作區域102a,複數之沿著X方向之X側透明感測器電極103x與複數之沿著Y方向之Y側透明感測器電極103y被形成為相互交叉。FIG. 7 and FIG. 8 are diagrams showing the conventional transparent touch panel 100 of the projection type capacitive method described in Patent Document 1, and the input operation region 102a set on the surface of the chemically strengthened glass substrate 101, the plural along the X The X-side transparent sensor electrode 103x in the direction and the Y-side transparent sensor electrode 103y in the Y direction are formed to cross each other.
各透明感測器電極103x、103y,係以透明導電性材料行成為菱形面連續之帶狀,在二者交叉的部位,中介著絕緣塗層104越過X側透明感測器電極103x的連結電極 105導電連結於在交叉部中斷的Y側透明感測器電極103y的菱形面間,藉此,各透明感測器電極103x、103y,於輸入操作區域102a,相互被絕緣而在正交方向上交叉地配線。Each of the transparent sensor electrodes 103x and 103y is formed in a continuous strip shape in which the transparent conductive material is formed as a rhombic surface, and the connecting electrode of the insulating coating 104 over the X-side transparent sensor electrode 103x is interposed at a portion where the two intersect. 105 is electrically connected between the rhombic faces of the Y-side transparent sensor electrodes 103y interrupted at the intersections, whereby the respective transparent sensor electrodes 103x, 103y are insulated from each other in the orthogonal direction in the input operation region 102a. Cross wiring.
各透明感測器電極103x、y之一側,或者兩側,分別連接於被配線在輸入操作區域102a的周圍的配線區域102b的拉出線106,被拉出直到設在配線區域102b的一部分之外部連接部107為止,被導電連接於透過外部連接部107檢測出輸入操作位置的檢測電路。One side of each of the transparent sensor electrodes 103x, y, or both sides, is respectively connected to the drawing line 106 of the wiring area 102b wired around the input operation area 102a, and is pulled out until it is provided in a part of the wiring area 102b. The external connection portion 107 is electrically connected to a detection circuit that detects an input operation position through the external connection portion 107.
如圖7所示,被形成透明感測器電極103x、103y、拉出線106等的化學強化玻璃基板101的表面側,以透明絕緣材料形成的透明的頂塗層108覆蓋其全面,此外,被形成配線區域102b的背面側,被印刷形成絕緣遮光層109。拉出線106,以透明導電材料形成,所以雖無法目視,但把絕緣遮光層109形成於進行輸入操作的表面側的拉出線106上,覆蓋拉出線106的透明觸控面板也被記載為前述專利文獻1之其他的實施例。As shown in FIG. 7, the surface side of the chemically strengthened glass substrate 101 on which the transparent sensor electrodes 103x, 103y, the pull-out wires 106 and the like are formed is covered with a transparent top coat layer 108 formed of a transparent insulating material, and further, An insulating light shielding layer 109 is printed on the back side of the wiring region 102b. Since the pull-out line 106 is formed of a transparent conductive material, the insulating light-shielding layer 109 is formed on the drawing line 106 on the surface side on which the input operation is performed, and the transparent touch panel covering the pull-out line 106 is also recorded. It is another embodiment of the aforementioned Patent Document 1.
手指等輸入操作體接近透明感測器電極103x、103y,浮游電容會增加,所以由檢測電路往各透明感測器電極103x、103y輸出矩形脈衝狀的位置檢測訊號,從隨著浮游電容的增加而輸出波形扭曲的位置檢測訊號之各透明感測器電極103x、103y的配置位置,來檢測出往輸入操作區域102a之輸入操作位置。When the input operation body such as a finger approaches the transparent sensor electrodes 103x and 103y, the floating capacitance increases, so that the detection circuit outputs a rectangular pulse-shaped position detection signal to each of the transparent sensor electrodes 103x and 103y, from the increase of the floating capacitance. The position of each of the transparent sensor electrodes 103x and 103y of the position detecting signal whose waveform is distorted is outputted to detect the input operation position to the input operation area 102a.
[專利文獻1]日本特開2011-192124號公報[Patent Document 1] Japanese Laid-Open Patent Publication No. 2011-192124
使用於透明觸控面板100的化學強化玻璃基板101,以不會由於來自外部的衝擊而破損的方式,把玻璃基板的表面層及背面層之鈉離子離子交換為離子半徑大的鉀離子,藉此在表面層與背面層產生壓縮應力層。玻璃的拉伸強度遠小於壓縮強度,所以化學強化玻璃,藉由預先在其表層產生壓縮應力層,而對於外力可以達到未進行化學強化的玻璃基板的5倍強度。The chemically strengthened glass substrate 101 used in the transparent touch panel 100 exchanges sodium ion ions of the surface layer and the back layer of the glass substrate into potassium ions having a large ionic radius so as not to be damaged by an external impact. This produces a compressive stress layer on the surface layer and the back layer. Since the tensile strength of the glass is much smaller than the compressive strength, the chemically strengthened glass can have a compressive stress layer on its surface layer in advance, and the external force can reach a five-fold strength of the glass substrate which is not chemically strengthened.
另一方面,為了以高分解能檢測出輸入操作位置,而必須於輸入操作區域102a配置多數的透明感測器電極103x、103y,有必要把連接於各透明感測器電極103x、103y的多數拉出線在輸入操作區域102a周圍的有限的配線區域102b高密度地進行配線。因此,根據從前的印刷方式的配線有其侷限,以濺鍍方式在化學強化玻璃基板101的表面成膜形成拉出線106的導電材料,藉由使用光蝕刻法除去不要的部分進行圖案化,形成各拉出線106。On the other hand, in order to detect the input operation position with high resolution, it is necessary to arrange a plurality of transparent sensor electrodes 103x and 103y in the input operation region 102a, and it is necessary to pull a plurality of pull electrodes connected to the respective transparent sensor electrodes 103x and 103y. The outgoing line is wired at a high density in the limited wiring area 102b around the input operation area 102a. Therefore, according to the limitation of the wiring of the prior printing method, the conductive material forming the drawing line 106 is formed on the surface of the chemically strengthened glass substrate 101 by sputtering, and the unnecessary portion is removed by photolithography for patterning. Each of the pull-out lines 106 is formed.
根據濺鍍法往化學強化玻璃101成膜時,拉出線106的導電材料之叢集(cluster)高速地打入玻璃基板101的表面之膜可以對膜的晶格壓入多餘的原子,即使考慮玻璃 基板與導電材料之熱膨脹係數之差,也可以產生沿著表面使膜膨脹的方向之內部應力,由成膜對化學強化玻璃基板101的表面作用以拉伸應力。結果,發生在化學強化玻璃基板101的表層的壓縮應力,會在其表面形成導電材料的濺鍍步驟相抵消,即使被化學強化也無法獲得充分的效果,會有成為對於外力容易破損的構造之問題。When a film is formed by the sputtering method to the chemically strengthened glass 101, a cluster of a conductive material of the drawing line 106 is driven into the surface of the glass substrate 101 at a high speed to inject excess atoms into the lattice of the film, even if it is considered. glass The difference in thermal expansion coefficient between the substrate and the conductive material may also generate an internal stress in a direction in which the film is expanded along the surface, and a tensile stress is applied to the surface of the chemically strengthened glass substrate 101 by film formation. As a result, the compressive stress occurring in the surface layer of the chemically strengthened glass substrate 101 is offset by the sputtering step of forming a conductive material on the surface thereof, and even if it is chemically strengthened, a sufficient effect cannot be obtained, and the external force is easily broken. problem.
本發明係考慮到這樣的從前的問題點而達成之發明,目的在於即使在化學強化玻璃基板的配線區域使用濺鍍法與光蝕刻法高密度地配線了多數之拉出線,也可以提供不使化學強化玻璃基板的強度劣化之透明觸控面板。The present invention has been made in view of such a conventional problem, and it is an object of the present invention to provide a high-density wiring of a plurality of pull-out wires in a wiring region of a chemically strengthened glass substrate by a sputtering method and a photo-etching method. A transparent touch panel that degrades the strength of a chemically strengthened glass substrate.
為了達成前述目的,申請專利範圍第1項之透明觸控面板,特徵係具備:平面側被化學強化之玻璃基板,於玻璃基板之前述平面的輸入操作區域相互絕緣而形成的複數透明感測器電極,以將複數之各透明感測器電極分別往外部連接部拉出的方式,被配線於玻璃基板的前述平面的輸入操作區域周圍的複數拉出線;由透過外部連接部從各透明感測器電極輸出的電氣訊號,檢測出往輸入操作區域的輸入操作之透明觸控面板;在複數拉出線被配線的玻璃基板的前述平面的配線區域,形成由合成樹脂構成的絕緣層,把在絕緣層上以濺鍍成膜的導電性薄膜使用光蝕刻法圖案化,形成前述複數拉出線。In order to achieve the above object, the transparent touch panel of claim 1 is characterized in that: a plurality of transparent sensors formed by chemically strengthening the glass substrate on the plane side and insulating the input operation regions on the plane of the glass substrate The electrode is connected to the plurality of pull-out wires around the input operation region of the flat surface of the glass substrate so that the plurality of transparent sensor electrodes are respectively pulled out to the external connection portion; and the transparent portions are transmitted through the external connection portion. The electrical signal output from the detector electrode detects a transparent touch panel that is input to the input operation area; and an insulating layer made of synthetic resin is formed on the wiring area of the flat surface of the glass substrate on which the plurality of pull-out wires are wired. A conductive film which is sputter-deposited on the insulating layer is patterned by photolithography to form the plurality of pull-out lines.
絕緣層,可以藉濺鍍法以外的方法形成於配線區域, 複數之拉出線,由在絕緣層上濺鍍而成膜的導電性薄膜來形成,所以進行濺鍍時於導電性薄膜產生的拉伸應力,作用於絕緣層的表面,不會傳達到在配線區域的化學強化玻璃基板的表面。The insulating layer can be formed in the wiring area by a method other than sputtering. The plurality of pull-out wires are formed of a conductive film which is sputter-deposited on the insulating layer. Therefore, the tensile stress generated in the conductive film during sputtering is applied to the surface of the insulating layer and is not transmitted to the surface. The surface of the chemically strengthened glass substrate in the wiring area.
玻璃基板,其周圍被固定於外殼等,所以在中央附近之輸入操作區域承受到外力時,會在固定端附近的配線區域產生大的彎曲應力。然而,配線區域的玻璃基板的平面,不會受到濺鍍導致的拉伸應力,維持在被化學強化的狀態,所以即使受到外力,玻璃基板也不容易破損。Since the glass substrate is fixed to the outer casing or the like, when the input operation region near the center receives an external force, a large bending stress is generated in the wiring region near the fixed end. However, since the plane of the glass substrate in the wiring region is not subjected to the tensile stress due to sputtering and is maintained in a chemically strengthened state, the glass substrate is not easily broken even if an external force is applied.
申請專利範圍第2項之透明觸控面板,特徵為以遮住輸入操作區域的周圍的絕緣遮光層形成絕緣層。A transparent touch panel of claim 2, characterized in that the insulating layer is formed by an insulating light shielding layer covering the periphery of the input operation region.
把遮住輸入操作區域以外的部分之絕緣遮光層,作為絕緣層,所以不需要加入形成絕緣層的步驟。Since the insulating light shielding layer covering the portion other than the input operation region is used as the insulating layer, the step of forming the insulating layer is not required.
申請專利範圍第3項之透明觸控面板,特徵為複數之透明感測器電極,係由在輸入操作區域相互正交的複數X側透明感測器電極,與複數Y側透明感測器電極所構成,在X側透明感測器電極與Y側透明感測器電極的各交叉部絕緣X側透明感測器電極與Y側透明感測器電極間的絕緣塗層與配線區域的絕緣層,是在使用絕緣油墨的同一印刷步驟形成。The transparent touch panel of claim 3, characterized in that the plurality of transparent sensor electrodes are composed of a plurality of X-side transparent sensor electrodes orthogonal to each other in the input operation region, and a plurality of Y-side transparent sensor electrodes The insulating layer between the X-side transparent sensor electrode and the Y-side transparent sensor electrode and the insulating layer of the wiring area are insulated at each intersection of the X-side transparent sensor electrode and the Y-side transparent sensor electrode. It is formed in the same printing step using insulating ink.
在交叉部絕緣X側透明感測器電極與Y側透明感測器電極間的絕緣塗層的印刷步驟,可以同時形成絕緣層。In the printing step of insulating the insulating coating between the X-side transparent sensor electrode and the Y-side transparent sensor electrode at the intersection portion, the insulating layer can be simultaneously formed.
申請專利範圍第4項之透明觸控面板,特徵為透明感測器電極以氧化銦形成,拉出線以含有鉬的導電材料形 成。Patent application No. 4 of the transparent touch panel, characterized in that the transparent sensor electrode is formed by indium oxide, and the pull-out wire is formed of a conductive material containing molybdenum. to make.
即使以濺鍍法形成硬金屬之鉬膜,拉伸應力也不會作用於玻璃基板的表面。Even if a molybdenum film of a hard metal is formed by sputtering, tensile stress does not act on the surface of the glass substrate.
根據申請專利範圍第1項的發明的話,即使使用濺鍍法高密度地配線出被配線於玻璃基板的平面上的配線區域之拉出線,化學強化玻璃基板的強度也不會劣化。According to the invention of claim 1, the strength of the chemically strengthened glass substrate does not deteriorate even if the drawing line of the wiring region wired on the plane of the glass substrate is densely wired by the sputtering method.
根據申請專利範圍第2項的發明的話,把絕緣遮光層作為絕緣層,可以在絕緣遮光層的形成步驟,形成中介於拉出線與玻璃基板間的絕緣層。According to the invention of claim 2, the insulating light-shielding layer is used as the insulating layer, and the insulating layer interposed between the drawing line and the glass substrate can be formed in the step of forming the insulating light-shielding layer.
根據申請專利範圍第3項的發明的話,可以藉絕緣X側透明感測器電極與Y側透明感測器電極間的絕緣塗層的印刷步驟,形成中介於拉出線與玻璃基板間的絕緣層。According to the invention of claim 3, the insulation between the pull-out line and the glass substrate can be formed by the printing step of the insulating coating between the insulated X-side transparent sensor electrode and the Y-side transparent sensor electrode. Floor.
根據申請專利範圍第4項的發明的話,即使以包含硬金屬的鉬之導電材料形成拉出線,玻璃基板的強度也不會劣化。可以用對構成透明感測器電極的氧化銦具有優異的電氣接觸特性的包含鉬的導電材料來形成拉出線。According to the invention of claim 4, even if the drawing wire is formed of a conductive material of molybdenum containing a hard metal, the strength of the glass substrate does not deteriorate. The pull-out line can be formed using a conductive material containing molybdenum having excellent electrical contact characteristics to indium oxide constituting the transparent sensor electrode.
以下,使用圖1至圖6說明相關於本發明之第1實施型態之透明觸控面板1。此透明觸控面板1,作為行動電話等之電子機器的輸入裝置,將圖1(b)的上方,朝向電子機器的內側安裝於外殼,使圖中的下方側臨於外殼的 外側進行輸出操作,以下,以該圖所示的玻璃基板的上面作為平面進行說明。Hereinafter, a transparent touch panel 1 according to a first embodiment of the present invention will be described with reference to Figs. 1 to 6 . The transparent touch panel 1 is an input device of an electronic device such as a mobile phone, and is attached to the casing toward the inside of the electronic device from the upper side of FIG. 1(b) so that the lower side of the figure is adjacent to the casing. The output operation is performed on the outside, and the upper surface of the glass substrate shown in the figure will be described below as a plane.
透明觸控面板1,為了要使被配置於機器內側的顯示裝置可以目視同時進行輸入操作,使用作為形成感測器電極的絕緣基板之透明的玻璃基板2。玻璃基板2,沿著外殼的表面配置,以使其即使受到外力也不會破損的方式,浸漬於380℃程度的硝酸鉀熔融液,替代其表背層的鈉離子(Na+ )而取入鉀離子(K+ )進行化學強化。鉀離子(K+ )的離子半徑比鈉離子(Na+ )更大,所以在化學強化的玻璃基板2的表背層產生壓縮應力。一般而言,玻璃基板2,拉身強度大幅度地小於壓縮強度,在表背面發生拉伸應力會破損,所以藉由預先於其表背層產生壓縮應力,可使其強度達到化學強化之前的強度的5倍程度。The transparent touch panel 1 uses a transparent glass substrate 2 as an insulating substrate forming a sensor electrode in order to allow a display device disposed inside the device to perform an input operation visually. The glass substrate 2 is disposed along the surface of the outer casing so as to be immersed in a potassium nitrate melt at a temperature of about 380 ° C in place of the sodium ion (Na + ) of the front and back layers, so as not to be damaged by an external force. Potassium ions (K + ) are chemically strengthened. Since the ionic radius of potassium ions (K + ) is larger than that of sodium ions (Na + ), compressive stress is generated in the front and back layers of the chemically strengthened glass substrate 2. In general, the glass substrate 2 has a tensile strength which is considerably smaller than the compressive strength, and the tensile stress is broken on the front and back surfaces. Therefore, the compressive stress is generated in advance in the front and back layers, and the strength can be made before the chemical strengthening. 5 times the intensity.
玻璃基板2的平面,如圖1所示,區分為多數的X側透明感測器電極3、3...與Y側透明感測器電極4、4...沿著正交的XY方向形成為矩陣狀的輸入區域2a,與其周圍之被配線多數拉出線5、5...的配線區域2b。The plane of the glass substrate 2, as shown in FIG. 1, is divided into a plurality of X-side transparent sensor electrodes 3, 3... and Y-side transparent sensor electrodes 4, 4... along an orthogonal XY direction. The input region 2a formed in a matrix shape is drawn around the wiring region 2b of the plurality of lines 5, 5, ....
被形成於輸入操作區域2a的複數各X側透明感測器電極3,在與Y側透明感測器電極4交叉的交叉區域被隔開的菱形的X圖案本體間,以細寬幅帶狀之連結電極6導電連接,沿著Y方向被配線為帶狀。此外,被形成於輸入操作區域2a的複數之各Y側透明感測器電極4,與X圖案本體幾乎相同的菱形的Y圖案本體,在與X側透明感測器電極3交叉的交叉區域透過成為細寬幅的連結圖 案沿著X方向連續被配線。Y側透明感測器電極4的連結圖案,透過被形成於連接電極6上的絕緣塗層7跨連接電極6,藉此在各交叉區域交叉的X側透明感測器電極3與Y側透明感測器電極4間相互絕緣而配線。The plurality of X-side transparent sensor electrodes 3 formed in the input operation region 2a are thinly banded between the diamond-shaped X-pattern bodies separated by the intersection region intersecting the Y-side transparent sensor electrodes 4. The connection electrode 6 is electrically connected and is wired in a strip shape along the Y direction. Further, each of the Y-side transparent sensor electrodes 4 formed in the input operation region 2a has a rhombic Y-pattern body which is almost identical to the X-pattern body, and passes through the intersection region intersecting the X-side transparent sensor electrode 3 Become a thin wide map The case is continuously wired along the X direction. The connection pattern of the Y-side transparent sensor electrode 4 is transmitted through the insulating coating 7 formed on the connection electrode 6 across the connection electrode 6, whereby the X-side transparent sensor electrode 3 and the Y side intersecting at each intersection area are transparent. The sensor electrodes 4 are insulated from each other and wired.
X側透明感測器電極3與Y側透明感測器電極4,能夠以由薄膜圖案化而可形成於玻璃基板2上的任意的透明導電材料來形成,但在此,與連接電極6同樣以銦錫氧化物(ITO,Indium Tin Oxide)來形成。此外,絕緣塗層7,使用二氧化矽(SiO2 )等絕緣材料。The X-side transparent sensor electrode 3 and the Y-side transparent sensor electrode 4 can be formed of any transparent conductive material that can be formed on the glass substrate 2 by patterning a thin film, but here, the same as the connection electrode 6 It is formed of indium tin oxide (ITO, Indium Tin Oxide). Further, as the insulating coating 7, an insulating material such as cerium oxide (SiO 2 ) is used.
在輸入操作區域2a的周圍的配線區域2b,由遮光性的絕緣樹脂所構成的絕緣遮光層8被印刷形成於區域全體。絕緣遮光層8,藉由遮住輸入操作區域2a的周圍,對操作者凸顯輸入操作區域2a,同時使其內側的顯示畫面以外的部分變成不醒目,所以只要是有遮光性者即可,可以任意著色,此處採用黑色。進而,在本發明,經過濺鍍步驟作為被形成於配線區域2b的拉出線5的下底,如稍後所述,發揮防止玻璃基板2的配線區域2b的強度劣化之用。In the wiring region 2b around the input operation region 2a, the insulating light-shielding layer 8 composed of a light-shielding insulating resin is printed and formed on the entire region. The insulating light-shielding layer 8 shields the input operation area 2a from the operator by shielding the periphery of the input operation area 2a, and makes the portion other than the display screen on the inner side inconspicuous. Therefore, as long as it is light-shielding, Any coloring, black here. Further, in the present invention, the sputtering step is used as the lower bottom of the drawing line 5 formed in the wiring region 2b, and the strength of the wiring region 2b of the glass substrate 2 is prevented from being deteriorated as will be described later.
在本實施型態,以在光硬化性的絕緣樹脂含有碳或鉻等之材料來形成絕緣遮光層8,所以在絕緣遮光層8上配線複數之拉出線5時,拉出線5間無法得到充分的絕緣性,在前述交叉區域以與印刷形成絕緣塗層7同樣的步驟,在配線區域2b的絕緣遮光層8上也形成絕緣塗層7。In the present embodiment, the insulating light-shielding layer 8 is formed of a material such as carbon or chromium in the photocurable insulating resin. Therefore, when the plurality of pull-out wires 5 are wired on the insulating light-shielding layer 8, the pull-out line 5 cannot be Insulating coating layer 7 is also formed on the insulating light-shielding layer 8 of the wiring region 2b in the same manner as the printing of the insulating coating layer 7 in the above-mentioned intersecting region.
被配線於配線區域2a的絕緣塗層7上的複數拉出線 5,分別連接於各X側透明感測器電極3與各Y側透明感測器電極4的兩側,相互絕緣而被拉出至配線區域2a的外部連接部9。a plurality of pull-out wires that are wired on the insulating coating 7 of the wiring region 2a 5. Each of the X-side transparent sensor electrodes 3 and each of the Y-side transparent sensor electrodes 4 are respectively insulated from each other and pulled out to the external connection portion 9 of the wiring region 2a.
所有的拉出線5,於外部連接部9被排列配線,透過向異性導電黏接劑等被連接於可撓配線基板之對應的電極,透過外部連接部9各X側透明感測器電極3與各Y側透明感測器電極4的兩側,往檢測出對輸入操作區域2a的輸入操作之未圖示的檢測電路連接。All of the pull-out wires 5 are arranged in the external connection portion 9 and are connected to the corresponding electrodes of the flexible wiring substrate through the opposite-polar conductive adhesive or the like, and are transmitted through the external connection portions 9 to the X-side transparent sensor electrodes 3 On both sides of each of the Y-side transparent sensor electrodes 4, a detection circuit (not shown) that detects an input operation to the input operation region 2a is connected.
亦即,拉出線5的總數目,為被形成於輸入操作區域2a的感測器電極3、4的2倍,有必要使所有的拉出線5在有限的配線區域2a相互絕緣而配線,所以藉濺鍍在絕緣塗層7上成膜後,以光蝕刻法圖案化而高密度地配線。That is, the total number of the pull-out wires 5 is twice that of the sensor electrodes 3, 4 formed in the input operation region 2a, and it is necessary to insulate all the pull-out wires 5 from each other in the limited wiring region 2a. Therefore, after the film is formed on the insulating coating 7 by sputtering, it is patterned by photolithography to be densely wired.
於拉出線5,使用構成連接的透明感測器電極3、4的ITO,以及因為在物理上、化學上、電氣接觸特性都很優異,而且電阻率低,而層積MAM(鉬、鋁、鉬)之三層構造之複合材料。亦即,根據濺鍍的成膜步驟,分為鉬.鋁.鉬之三層被形成薄膜,但在此濺鍍步驟,藉由使叢集(cluster)被高速打入覆膜,而在膜之晶格被壓入多餘的原子,使覆膜延著基材表面膨脹。結果,基材,由沿著表面形成的覆膜受到拉伸應力。For the pull-out line 5, ITO which constitutes the connected transparent sensor electrodes 3, 4, and because of physical, chemical, electrical contact characteristics are excellent, and the resistivity is low, and the laminated MAM (molybdenum, aluminum) , molybdenum) three-layer composite material. That is, according to the film forming step of sputtering, it is divided into molybdenum. aluminum. The three layers of molybdenum are formed into a film, but in this sputtering step, by causing the cluster to be driven into the film at a high speed, the crystal lattice of the film is pressed into excess atoms, and the film is extended on the surface of the substrate. Swell. As a result, the substrate is subjected to tensile stress by the film formed along the surface.
特別是直接形成於基材表面的鉬,是硬的金屬,所以在根據濺鍍之鉬的成膜步驟,於基材表面發生大的拉伸應力。此處,如從前那樣,在玻璃基板2的平面上直接形成拉出線5的場合,化學強化而發生壓縮應力的玻璃基板2 的平面受到拉伸應力而相互抵消,成為容易破損的基板。另一方面,在本實施型態,中介著以絕緣合成樹脂形成的絕緣遮光層8與絕緣塗層7在玻璃基板2的平面上形成MAM之薄膜,所以即使在濺鍍步驟玻璃基板2的平面也不會受到拉伸應力,維持了化學強化的強度。In particular, molybdenum which is directly formed on the surface of the substrate is a hard metal, so that a large tensile stress is generated on the surface of the substrate in accordance with the film formation step of the sputtered molybdenum. Here, as in the case where the drawing line 5 is directly formed on the plane of the glass substrate 2, the glass substrate 2 which is chemically strengthened to generate compressive stress is used. The planes are subjected to tensile stress and cancel each other out, and become a substrate that is easily broken. On the other hand, in the present embodiment, the insulating light-shielding layer 8 formed of an insulating synthetic resin and the insulating coating layer 7 form a film of MAM on the plane of the glass substrate 2, so even in the plane of the sputtering step glass substrate 2 It is also not subjected to tensile stress and maintains the strength of chemical strengthening.
(於此部分,直接於玻璃基板2上形成由MAM所構成的拉出線5的場合之沿著玻璃基板的平面之內部應力,與在絕緣塗層7上形成由MAM所構成的拉出線5的場合之應力若能獲得實測值的話,比較並顯示其實驗值)。(In this section, the internal stress along the plane of the glass substrate in the case where the pull-out line 5 composed of MAM is formed directly on the glass substrate 2, and the pull-out line formed of MAM on the insulating coating 7 are formed. If the measured stress of 5 occasions can obtain the measured value, compare and display the experimental value).
被形成透明感測器電極3、4與拉出線5的玻璃基板2的平面側全體,如圖1所示,以透明的絕緣樹脂所構成的頂塗層10覆蓋,使透明感測器電極3、4或拉出線5受到保護。The entire planar side of the glass substrate 2 on which the transparent sensor electrodes 3 and 4 and the pull-out line 5 are formed is covered with a top coat layer 10 made of a transparent insulating resin as shown in FIG. 1 to make the transparent sensor electrode 3, 4 or pull-out line 5 is protected.
如此構成的透明觸控面板1,在輸入操作區域2a手指等輸入操作體由圖1(b)的下方接近的話,中介著玻璃基板2而輸入操作體接近的透明感測器電極3、4之靜電電容增加,所以分別藉靜電電容改變的X側透明感測器電極3與Y側透明感測器電極4檢測出,由該檢測電極3、4的輸入操作區域2a上的配設位置在XY方向檢測出輸入操作位置。In the transparent touch panel 1 configured as described above, when the input operation body such as a finger in the input operation region 2a approaches the lower side of FIG. 1(b), the transparent sensor electrodes 3, 4 in which the operation body is approached are interposed by interposing the glass substrate 2. Since the electrostatic capacitance is increased, the X-side transparent sensor electrode 3 and the Y-side transparent sensor electrode 4, which are respectively changed by the electrostatic capacitance, are detected, and the arrangement position on the input operation region 2a of the detection electrodes 3 and 4 is in the XY. The direction detects the input operation position.
以下,說明前述之透明觸控面板1的製造步驟。首先,在化學強化的玻璃基板2的平面之配線區域2b全體,如圖2(a)所示,印刷形成絕緣遮光層8。此絕緣遮光層8的形成,不使用以濺鍍進行之成膜步驟,所以配線區域 2b的強度不會劣化。Hereinafter, the manufacturing steps of the transparent touch panel 1 described above will be described. First, as shown in FIG. 2(a), the insulating light-shielding layer 8 is printed on the entire wiring region 2b of the chemically strengthened glass substrate 2. The insulating light shielding layer 8 is formed without using a film forming step by sputtering, so the wiring area The strength of 2b does not deteriorate.
接著,對包含絕緣層光層8的玻璃基板2的平面全體藉由濺鍍形成ITO之薄膜。於此濺鍍步驟,在玻璃基板2的平面的輸入操作區域2a,直接被形成ITO之薄膜,但ITO與構成MAM的鉬相比更為柔軟,所以在其成膜過程不會受到大的拉伸張力。Next, a thin film of ITO is formed by sputtering on the entire flat surface of the glass substrate 2 including the insulating layer light layer 8. In this sputtering step, a thin film of ITO is directly formed on the input operation region 2a of the plane of the glass substrate 2, but the ITO is softer than the molybdenum constituting the MAM, so that it is not subjected to a large pull during the film formation process. Stretch the tension.
此外,玻璃基板2,其周圍被固定安裝於外殼,臨於外側的輸入操作區域2a受到意料外的外力時,藉由接近於固定端的配線區域2b產生大的彎曲力矩,所以在輸入操作區域2a的平面,不會有使玻璃基板2破斷的程度之大的拉伸應力作用。亦即,即使在輸入操作區域2a以濺鍍成膜,也不會損及玻璃基板2全體的強度。Further, the glass substrate 2 is fixedly attached to the outer casing, and when the outer input operation region 2a receives an unexpected external force, a large bending moment is generated by the wiring region 2b close to the fixed end, so that the input operation region 2a is input. The plane does not have a tensile stress that causes the glass substrate 2 to be broken. That is, even if the input operation region 2a is formed by sputtering, the strength of the entire glass substrate 2 is not impaired.
成膜於玻璃基板2的平面全體的ITO薄膜,使用光蝕刻法,藉由蝕刻除去僅保留成為各交叉區域的連接電極6的部位,如圖3(a)(b)所示,於輸入操作區域2a的各交叉區域沿著Y方向被形成細長的連接電極6。The ITO thin film formed on the entire surface of the glass substrate 2 is removed by etching, and the portion of the connection electrode 6 which is only the intersection region is removed by etching, as shown in Fig. 3 (a) and (b). Each of the intersecting regions of the region 2a is formed with an elongated connecting electrode 6 along the Y direction.
接著,如圖4(a)(b)所示,在輸入操作區域2a,交叉於各連接電極6上,而在配線區域2b,以覆蓋絕緣遮光層8全體的方式,藉由印刷形成由SiO2 所構成的絕緣塗層7。Next, as shown in FIGS. 4(a) and 4(b), the input operation region 2a is crossed over the respective connection electrodes 6, and the wiring region 2b is formed by printing to cover the entire insulating light-shielding layer 8 by SiO. 2 is composed of an insulating coating 7.
此後,將濺鍍材料分別採鉬、鋁、鉬反覆進行濺鍍,於圖4(a)(b)所示的玻璃基板2的平面全體,形成由MAM所構成的三層構造之薄膜,如圖5(a)(b)所示,使用光蝕刻法,殘留X側透明感測器電極3與Y側透 明感測器電極4之各兩側的部位至外部連接部9為止之拉出線5的圖案,而除去其餘。在配線區域2b形成MAM的薄膜之濺鍍步驟,中介著絕緣遮光層8與絕緣塗層7而被成膜於玻璃基板2的平面上,所以不會對玻璃基板2的平面產生拉伸應力的作用。此外,在同樣的濺鍍步驟輸入操作區域2a會暫時受到拉伸應力,但因為輸入操作區域2a上的MAM薄膜全部被取除,所以同樣不會有拉伸應力作用。Thereafter, the sputtering material is repeatedly sputtered with molybdenum, aluminum, and molybdenum, and a film of a three-layer structure composed of MAM is formed on the entire plane of the glass substrate 2 shown in FIGS. 4(a) and 4(b). As shown in Fig. 5 (a) and (b), the X-side transparent sensor electrode 3 and the Y side are exposed by photolithography. The pattern of the pull-out line 5 from the respective sides of the sensor electrode 4 to the external connection portion 9 is removed, and the rest is removed. The sputtering step of forming the film of the MAM in the wiring region 2b is formed by laminating the insulating light-shielding layer 8 and the insulating coating layer 7 on the plane of the glass substrate 2, so that tensile stress is not generated on the plane of the glass substrate 2. effect. Further, the input operation region 2a is temporarily subjected to tensile stress in the same sputtering step, but since the MAM film on the input operation region 2a is completely removed, there is no tensile stress.
接著,再度對玻璃基板2的平面全體,藉由濺鍍形成ITO薄膜,如圖6所示,使用光蝕刻法,殘留X側透明感測器電極3、Y側透明感測器電極4以及拉出線5的部位而除去ITO薄膜。藉由使用此光蝕刻法之圖案化,被形成於輸入操作區域2a的菱形的X圖案本體間藉由連接電極6導電連接,沿著Y方向被配線帶狀的X側透明感測器電極3。此外,Y側透明感測器電極4,細寬幅的連接圖案跨過連接電極6被形成於形成在交叉區域的絕緣塗層7上,在各交叉區域交叉的X側透明感測器電極3與Y側透明感測器電極4間相互絕緣而配線。形成各X側透明感測器電極3與各Y側透明感測器電極4的ITO薄膜,藉由在其兩側於拉出線5上也被殘留,而導電連接於拉出線5。Then, the ITO thin film is formed by sputtering on the entire flat surface of the glass substrate 2, and as shown in FIG. 6, the X-side transparent sensor electrode 3, the Y-side transparent sensor electrode 4, and the pull are left by photolithography. The portion of the line 5 is removed to remove the ITO film. By using the patterning of the photolithography method, the X-shaped transparent sensor electrodes 3 which are formed in the diamond-shaped X-pattern body formed in the input operation region 2a by the connection electrodes 6 and are strip-shaped along the Y direction are formed. . Further, the Y-side transparent sensor electrode 4, the thin wide connection pattern is formed over the connection electrode 6 on the insulating coating 7 formed on the intersection region, and the X-side transparent sensor electrode 3 intersecting at each intersection region The Y-side transparent sensor electrodes 4 are insulated from each other and wired. The ITO thin film forming each of the X-side transparent sensor electrodes 3 and the Y-side transparent sensor electrodes 4 is electrically connected to the pull-out line 5 by being left on both sides of the pull-out line 5 as well.
於前述步驟,藉由濺鍍將ITO直接成膜於玻璃基板2的輸入操作區域2a,所以雖會受到拉伸應力,但是因為形成連接電極6而以濺鍍進形成膜的步驟同樣的理由,不 會損及玻璃基板全體2之對外力的強度。In the above-described step, ITO is directly formed on the input operation region 2a of the glass substrate 2 by sputtering, so that tensile stress is applied, but the reason why the connection electrode 6 is formed and sputtered into the film is the same. Do not The strength of the external force of the entire glass substrate 2 is damaged.
接著,在外部連接部9連接可撓配線基板後,使用輥塗布器以頂塗層10覆蓋玻璃基板2的平面全體,而製造出透明觸控面板1。Next, after the flexible wiring board is connected to the external connection portion 9, the entire surface of the glass substrate 2 is covered with the top coat 10 using a roll coater to manufacture the transparent touch panel 1.
在前述之實施型態,說明了夾住形成X側透明感測器電極3、Y側透明感測器電極4或拉出線5的平面與玻璃基板2之逆側來進行輸入操作的透明觸控面板1,但由形成頂塗層的上方來進行輸入操作亦可。In the foregoing embodiment, the transparent contact for inserting the plane forming the X-side transparent sensor electrode 3, the Y-side transparent sensor electrode 4 or the pull-out line 5 and the reverse side of the glass substrate 2 for input operation is explained. The panel 1 is controlled, but the input operation may be performed by forming the top of the top coat.
此外,於玻璃基板2的配線區域2b,只要是中介著絕緣層而形成拉出線5的透明觸控面板的話即可,感測器電極3、4的形狀或者其形成步驟可為任意,進而,不限於靜電電容方式,也可以是使感測器電極每單位長度的電阻值成為均勻之電阻覆膜而以電阻方式來檢測輸入操作之透明觸控面板。Further, the wiring region 2b of the glass substrate 2 may be a transparent touch panel in which the drawing line 5 is formed by interposing an insulating layer, and the shape of the sensor electrodes 3 and 4 or the forming step thereof may be arbitrary. The transparent touch panel is not limited to the electrostatic capacitance method, and may be a resistive film in which the resistance value per unit length of the sensor electrode is uniform, and the input operation is detected by a resistance method.
此外,形成於配線區域2b的玻璃基板2的平面與拉出線5之間的絕緣層,若非以濺鍍法成膜者,不限於前述的絕緣塗層7或絕緣遮光層8,亦可為在其他的步驟形成者。Further, the insulating layer formed between the plane of the glass substrate 2 and the drawing line 5 formed in the wiring region 2b is not limited to the above-described insulating coating layer 7 or insulating light shielding layer 8 unless it is formed by sputtering. Formed in other steps.
本發明適合應用於在玻璃基板的輸入操作區域的周圍,高密度地配線拉出線之透明觸控面板。The present invention is suitably applied to a transparent touch panel in which a wire is drawn at a high density around a input operation region of a glass substrate.
1‧‧‧透明觸控面板1‧‧‧Transparent touch panel
2‧‧‧玻璃基板2‧‧‧ glass substrate
2a‧‧‧輸入操作區域2a‧‧‧Input operation area
2b‧‧‧配線區域2b‧‧‧Wiring area
3‧‧‧X側透明感測器電極(透明感測器電極)3‧‧‧X side transparent sensor electrode (transparent sensor electrode)
4‧‧‧Y側透明感測器電極(透明感測器電極)4‧‧‧Y side transparent sensor electrode (transparent sensor electrode)
5‧‧‧拉出線5‧‧‧ Pull out the line
7‧‧‧絕緣塗層(絕緣層)7‧‧‧Insulation coating (insulation layer)
8‧‧‧絕緣遮光層(絕緣層)8‧‧‧Insulating light shielding layer (insulation layer)
9‧‧‧外部連接部9‧‧‧External connection
圖1(a)係相關於本發明之一實施型態的透明觸控面板1之平面圖,(b)係沿著(a)的途中之A-A線之剖面圖。Fig. 1(a) is a plan view of a transparent touch panel 1 according to an embodiment of the present invention, and (b) is a cross-sectional view taken along line A-A of the middle of (a).
圖2係顯示形成了絕緣層光層8的第1步驟。(a)為平面圖,(b)為在沿著A-A線的位置切斷之剖面圖。Fig. 2 shows the first step of forming the insulating layer optical layer 8. (a) is a plan view, and (b) is a cross-sectional view taken at a position along the line A-A.
圖3係顯示在輸入操作區域2a形成了連接電極6的第2步驟。(a)為平面圖,(b)為在沿著A-A線的位置切斷之剖面圖。Fig. 3 shows a second step of forming the connection electrode 6 in the input operation region 2a. (a) is a plan view, and (b) is a cross-sectional view taken at a position along the line A-A.
圖4係以絕緣塗層7覆蓋連接電極6與絕緣遮光層8之第3步驟。(a)為平面圖,(b)為在沿著A-A線的位置切斷之剖面圖。4 is a third step of covering the connection electrode 6 and the insulating light shielding layer 8 with an insulating coating 7. (a) is a plan view, and (b) is a cross-sectional view taken at a position along the line A-A.
圖5係顯示於配線區域2b配線拉出線5的第4步驟。(a)為平面圖,(b)為在沿著圖1(a)的圖中A-A線的位置切斷之剖面圖。Fig. 5 shows a fourth step of the wiring pull-out line 5 shown in the wiring region 2b. (a) is a plan view, and (b) is a cross-sectional view cut at a position along the line A-A in the diagram of Fig. 1(a).
圖6係顯示於輸入操作區域2a形成透明感測器電極3、4之第5步驟之在沿著A-A線的位置切斷之剖面圖。Fig. 6 is a cross-sectional view showing the fifth step of forming the transparent sensor electrodes 3, 4 in the input operation region 2a, taken along the line A-A.
圖7係從前之透明觸控面板100之平面圖。FIG. 7 is a plan view of the prior transparent touch panel 100.
圖8係透明觸控面板100之縱剖圖。FIG. 8 is a longitudinal cross-sectional view of the transparent touch panel 100.
1‧‧‧透明觸控面板1‧‧‧Transparent touch panel
2‧‧‧玻璃基板2‧‧‧ glass substrate
2a‧‧‧輸入操作區域2a‧‧‧Input operation area
2b‧‧‧配線區域2b‧‧‧Wiring area
3‧‧‧X側透明感測器電極(透明感測器電極)3‧‧‧X side transparent sensor electrode (transparent sensor electrode)
4‧‧‧Y側透明感測器電極(透明感測器電極)4‧‧‧Y side transparent sensor electrode (transparent sensor electrode)
5‧‧‧拉出線5‧‧‧ Pull out the line
7‧‧‧絕緣塗層(絕緣層)7‧‧‧Insulation coating (insulation layer)
8‧‧‧絕緣遮光層(絕緣層)8‧‧‧Insulating light shielding layer (insulation layer)
9‧‧‧外部連接部9‧‧‧External connection
10‧‧‧頂塗層10‧‧‧ top coating
Claims (3)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011242810A JP5133449B1 (en) | 2011-11-04 | 2011-11-04 | Transparent touch panel |
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| TW201319890A TW201319890A (en) | 2013-05-16 |
| TWI490741B true TWI490741B (en) | 2015-07-01 |
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| TW101134725A TWI490741B (en) | 2011-11-04 | 2012-09-21 | Transparent touch panel |
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| JP (1) | JP5133449B1 (en) |
| KR (1) | KR101488678B1 (en) |
| CN (1) | CN103092404B (en) |
| TW (1) | TWI490741B (en) |
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| FR2701891B1 (en) | 1993-02-24 | 1995-05-19 | Sarda Jean | Method for transforming the principles and operating mode of conventional wetting groups of offset printing presses. |
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| JPWO2014030599A1 (en) * | 2012-08-23 | 2016-07-28 | 旭硝子株式会社 | Sensor integrated cover glass |
| JP6206637B2 (en) * | 2013-02-12 | 2017-10-04 | 大日本印刷株式会社 | Touch panel substrate and display device |
| JP6121204B2 (en) * | 2013-03-15 | 2017-04-26 | 富士フイルム株式会社 | Touch panel laminate and method for manufacturing touch panel laminate |
| CN103164100B (en) * | 2013-03-28 | 2014-08-06 | 南昌欧菲光科技有限公司 | Capacitive touch screen |
| WO2015016225A1 (en) | 2013-08-01 | 2015-02-05 | シャープ株式会社 | Touch panel |
| CN104423666B (en) * | 2013-08-30 | 2017-09-12 | 宸鸿科技(厦门)有限公司 | Contact panel |
| JP6238655B2 (en) * | 2013-09-12 | 2017-11-29 | デクセリアルズ株式会社 | Connection structure and anisotropic conductive adhesive |
| KR102162426B1 (en) | 2013-12-11 | 2020-10-07 | 삼성디스플레이 주식회사 | Touch panel and manufacturing method thereof |
| WO2016064402A1 (en) | 2014-10-23 | 2016-04-28 | Hewlett Packard Enterprise Development Lp | Optical fiber interface for optical device package |
| US10534148B2 (en) | 2014-10-24 | 2020-01-14 | Hewlett Packard Enterprise Development Lp | Optical interconnect device |
| CN104677399B (en) * | 2014-11-24 | 2017-12-05 | 麦克思智慧资本股份有限公司 | Ultrasonic sensor |
| KR102271113B1 (en) | 2014-12-09 | 2021-06-30 | 삼성디스플레이 주식회사 | Display device and touch sensor |
| US10261256B2 (en) | 2015-01-28 | 2019-04-16 | Hewlett Packard Enterprise Development Lp | Laser-written optical routing systems and method |
| JP2017062744A (en) * | 2015-09-25 | 2017-03-30 | 富士通コンポーネント株式会社 | Touch panel device |
| CN106211667B (en) * | 2016-08-03 | 2022-02-22 | 安徽精卓光显技术有限责任公司 | Glass shell and electronic product with same |
| JP6702067B2 (en) * | 2016-08-03 | 2020-05-27 | Agc株式会社 | Cover member and display device |
| CN109992163B (en) * | 2019-04-15 | 2023-01-03 | 业成科技(成都)有限公司 | Touch sensing module, manufacturing method thereof and electronic device applying touch sensing module |
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| TW201037406A (en) * | 2008-11-28 | 2010-10-16 | Semiconductor Energy Lab | Liquid crystal display device |
| JP2010177345A (en) * | 2009-01-28 | 2010-08-12 | Sony Corp | Circuit board and method of manufacturing the same, touch panel, and display device |
| JP2011192124A (en) * | 2010-03-16 | 2011-09-29 | Sony Corp | Touch panel and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
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| JP5133449B1 (en) | 2013-01-30 |
| CN103092404A (en) | 2013-05-08 |
| CN103092404B (en) | 2016-08-03 |
| KR101488678B1 (en) | 2015-02-02 |
| KR20130049692A (en) | 2013-05-14 |
| JP2013097739A (en) | 2013-05-20 |
| TW201319890A (en) | 2013-05-16 |
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