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TWI480685B - A photosensitive resin composition and a liquid crystal panel - Google Patents

A photosensitive resin composition and a liquid crystal panel Download PDF

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TWI480685B
TWI480685B TW099106158A TW99106158A TWI480685B TW I480685 B TWI480685 B TW I480685B TW 099106158 A TW099106158 A TW 099106158A TW 99106158 A TW99106158 A TW 99106158A TW I480685 B TWI480685 B TW I480685B
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constituent unit
photosensitive resin
resin composition
meth
mass
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TW099106158A
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TW201100954A (en
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Takashi Ono
Masaru Shida
Teruhiro Uematsu
Naoto Yamaguchi
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Tokyo Ohka Kogyo Co Ltd
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Description

感光性樹脂組成物及液晶面板Photosensitive resin composition and liquid crystal panel

本發明係有關一種感光性樹脂組成物及液晶面板,更詳言之,係有關適合於為形成在液晶面板之2張基板間所設置的間隔物時之感光性樹脂組成物、及具有由該感光性樹脂組成物所形成的間隔物之液晶面板。The present invention relates to a photosensitive resin composition and a liquid crystal panel, and more particularly to a photosensitive resin composition suitable for a spacer provided between two substrates of a liquid crystal panel, and A liquid crystal panel of a spacer formed of a photosensitive resin composition.

於液晶顯示裝置之液晶面板中,由於採用以2張玻璃基板等之透明基板夾住液晶材料之三明治構造,故必須在可填充液晶材料下、於2張基板之間形成間隔物。In the liquid crystal panel of the liquid crystal display device, since the sandwich structure in which the liquid crystal material is sandwiched by the transparent substrate such as two glass substrates is used, it is necessary to form a spacer between the two substrates under the liquid crystal material.

以往,為形成間隔物時,採用在基板之全面上分散形成間隔物之珠粒的方法,惟會有在畫素顯示部分上;亦附著珠粒,且影像之對比或顯示畫質降低的問題。因此,近年來提案各種藉由感光性樹脂組成物形成該間隔物的方法(參照專利文獻1,2等)。該方法係在基板上塗佈感光性樹脂組成物,經由所定的光罩予以曝光後,進行顯影,形成點狀等之間隔物,可僅在除畫素顯示部分外之所定部份形成間隔物。Conventionally, in order to form a spacer, a method of dispersing beads forming a spacer over the entire substrate is used, but only on the pixel display portion; beads are also attached, and the contrast of the image or the display image quality is lowered. . Therefore, in recent years, various methods for forming the spacer by a photosensitive resin composition have been proposed (see Patent Documents 1, 2, etc.). In this method, a photosensitive resin composition is applied onto a substrate, exposed to light through a predetermined mask, and developed to form spacers such as dots, and spacers can be formed only in a predetermined portion other than the pixel display portion. .

[習知技術文獻][Practical Technical Literature]

[專利文獻][Patent Literature]

[專利文獻1] 日本特開2006-184841號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-184841

[專利文獻2] 日本特開2006-308961號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-308961

此處,為防止因液晶面板之過剩荷重而導致間隔物之塑性變形或破壞情形時,必須使所形成的間隔物具有充分的破壞強度。因此,於感光性樹脂組成物中所含的樹脂,通常使用具有由甲基丙烯酸環氧丙酯等之含環氧基的不飽和化合物所衍生的構成單位之鹼可溶性樹脂。Here, in order to prevent plastic deformation or breakage of the spacer due to excessive load of the liquid crystal panel, it is necessary to have sufficient fracture strength of the formed spacer. Therefore, an alkali-soluble resin having a constituent unit derived from an epoxy group-containing unsaturated compound such as glycidyl methacrylate is usually used as the resin contained in the photosensitive resin composition.

然而,本發明人等再三深入檢討的結果,發現為提高破壞強度時,由甲基丙烯酸環氧丙酯等所衍生的構成單位之比例,例如為71質量%以上時,於顯影時之斷點(BP;未曝光部被完全溶解的時間)變得極短,不易適當地進行顯影。另外,可知同時有間隔物之形狀惡化,且對基板之密接性降低的情形。However, as a result of further intensive review, the inventors of the present invention found that the ratio of the constituent units derived from glycidyl methacrylate or the like in the case of improving the breaking strength is, for example, 71% by mass or more, the breakpoint at the time of development. (BP; the time when the unexposed portion is completely dissolved) becomes extremely short, and development is not easily performed properly. Further, it is understood that the shape of the spacer is deteriorated at the same time, and the adhesion to the substrate is lowered.

本發明係有鑑於該習知的情形者,以提供一種具有適當的顯影性,且可形成形狀或對基板之密接性良好的間隔物之感光性樹脂組成物,及具有由該感光性樹脂組成物所形成的間隔物之液晶面板為目的。The present invention is directed to a photosensitive resin composition having a suitable developability and capable of forming a spacer having a good shape or adhesion to a substrate, and having a photosensitive resin composition. The liquid crystal panel of the spacer formed by the object is for the purpose.

本發明人等為解決前述課題時,再三深入硏究檢討。結果,發現藉由使用具有由不飽和羧酸所衍生的構成單位及由含有不具脂環式基之環氧基不飽和化合物所衍生的構成單位、與由含有脂環式環氧基之不飽和化合物所衍生的構成單位或由含有脂環式基之不飽和化合物所衍生的構成單位之鹼可溶性樹脂,可解決前述課題,遂而完成本發明。具體而言,本發明係提供下述者。In order to solve the above problems, the inventors of the present invention have conducted in-depth review. As a result, it has been found that by using a constituent unit derived from an unsaturated carboxylic acid and a constituent unit derived from an epoxy group-containing unsaturated compound having no alicyclic group, and an unsaturated group containing an alicyclic epoxy group The above-mentioned problem can be solved by the constituent unit derived from the compound or the alkali-soluble resin derived from the constituent unit derived from the unsaturated compound containing an alicyclic group, and the present invention has been completed. Specifically, the present invention provides the following.

本發明之第一形態係有關一種感光性樹脂組成物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合引發劑(C)之感光性樹脂組成物,其特徵為前述鹼可溶性樹脂(A)為具有由不飽和羧酸所衍生的構成單位(a1)、由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位(a2)、及由含有脂環式環氧基之不飽和化合物所衍生的構成單位(a3),且前述構成單位(a2)之比例與前述構成單位(a3)之比例的合計量為71質量%以上。The first aspect of the present invention relates to a photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), which are characterized The alkali-soluble resin (A) is a constituent unit (a2) having a constituent unit (a1) derived from an unsaturated carboxylic acid, an unsaturated compound containing an epoxy group having no alicyclic group, and The constituent unit (a3) derived from the unsaturated compound containing an alicyclic epoxy group, and the total ratio of the ratio of the constituent unit (a2) to the constituent unit (a3) is 71% by mass or more.

本發明之第二形態係有關一種感光性樹脂組成物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合引發劑(C)之感光性樹脂組成物,其特徵為前述鹼可溶性樹脂(A)為具有由不飽和羧酸所衍生的構成單位(a1)、由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位(a2)、及由含有脂環式基之不飽和化合物所衍生的構成單位(a4),且前述構成單位(a2)之比例為71質量%以上。The second aspect of the present invention relates to a photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), which is characterized by The alkali-soluble resin (A) is a constituent unit (a2) having a constituent unit (a1) derived from an unsaturated carboxylic acid, an unsaturated compound containing an epoxy group having no alicyclic group, and The constituent unit (a4) derived from the unsaturated compound containing an alicyclic group, and the ratio of the above-mentioned constituent unit (a2) is 71% by mass or more.

本發明之第三形態係有關一種液晶面板,其特徵為具有由本發明之感光性樹脂組成物所形成的間隔物。A third aspect of the present invention relates to a liquid crystal panel characterized by comprising a spacer formed of the photosensitive resin composition of the present invention.

[發明效果][Effect of the invention]

藉由本發明,可提供一種具有適當的顯影性,且可形成形狀或對基板之密接性良好的間隔物之感光性樹脂組成物,及具有由該感光性樹脂組成物所形成的間隔物之液晶面板。According to the present invention, it is possible to provide a photosensitive resin composition having a suitable developability and capable of forming a spacer having a good shape or adhesion to a substrate, and a liquid crystal having a spacer formed of the photosensitive resin composition. panel.

[為實施發明之形態][In order to implement the invention] <<感光性樹脂組成物>><<Photosensitive Resin Composition>>

本發明之感光性樹脂組成物,係至少含有鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合引發劑(C)。於下述中,說明有關本發明之感光性樹脂組成物所含有的各成分。The photosensitive resin composition of the present invention contains at least an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C). Each component contained in the photosensitive resin composition of the present invention will be described below.

<鹼可溶性樹脂(A)><alkali soluble resin (A)>

鹼可溶性樹脂,係指藉由樹脂濃度20質量%之樹脂溶液(溶劑:丙二醇單甲醚乙酸酯)在基板上形成膜厚1μm之樹脂膜,在2.38質量%之氫氧化四甲銨(TMAH)水溶液中浸漬1分鐘時,溶解膜厚0.01μm以上者。The alkali-soluble resin refers to a resin film having a film thickness of 1 μm formed on a substrate by a resin solution having a resin concentration of 20% by mass (solvent: propylene glycol monomethyl ether acetate), and 2.38 mass% of tetramethylammonium hydroxide (TMAH). When immersed in an aqueous solution for 1 minute, the film thickness is 0.01 μm or more.

本發明之感光性樹脂組成物中所含有的鹼可溶性樹脂(A)(以下亦稱為「(A)成份」),為具有由不飽和羧酸所衍生的構成單位(a1)、由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位(a2)、及由含有脂環式環氧基之不飽和化合物所衍生的構成單位(a3)(以下該樹脂亦稱為「(A1)樹脂」),與具有前述構成單位(a1)、前述構成單位(a2)、由含有脂環式基之不飽和化合物所衍生的構成單位(a4)(以下該樹脂亦稱為「(A2)樹脂」)。於下述中,順序說明有關此等之各種情形。The alkali-soluble resin (A) (hereinafter also referred to as "(A) component)) contained in the photosensitive resin composition of the present invention has a constituent unit (a1) derived from an unsaturated carboxylic acid, and contains no a constituent unit (a2) derived from an alicyclic group-containing epoxy group-containing unsaturated compound, and a constituent unit (a3) derived from an alicyclic epoxy group-containing unsaturated compound (hereinafter the resin is also referred to as " (A1) Resin") is a constituent unit (a4) derived from the above-mentioned constituent unit (a1), the above-mentioned constituent unit (a2), and an unsaturated compound containing an alicyclic group (hereinafter, the resin is also referred to as "( A2) Resin"). In the following, the sequence describes various situations related to these.

((A1)樹脂)((A1) resin)

(A1)樹脂係至少具有前述構成單位(a1)、前述構成單位(a2)及前述構成單位(a3)。(A1) The resin has at least the above-mentioned constituent unit (a1), the above-mentioned constituent unit (a2), and the above-mentioned constituent unit (a3).

為使構成單位(a1)衍生時之不飽和羧酸,例如(甲基)丙烯酸、丁烯酸等之單羧酸;馬來酸、富馬酸、檸康酸、中康酸、衣康酸等之二羧酸;此等二羧酸之酸酐等。於此等之中,就共聚合反應性、所得的樹脂之鹼可溶性、容易取得性等而言,以(甲基)丙烯酸及馬來酸酐較佳。此等之不飽和羧酸可單獨或2種以上組合使用。An unsaturated carboxylic acid derived from the constituent unit (a1), for example, a monocarboxylic acid such as (meth)acrylic acid or crotonic acid; maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid Dicarboxylic acids; anhydrides of such dicarboxylic acids, and the like. Among these, (meth)acrylic acid and maleic anhydride are preferable in terms of copolymerization reactivity, alkali solubility of the obtained resin, and easy availability. These unsaturated carboxylic acids may be used singly or in combination of two or more kinds.

為使構成單位(a2)衍生時之含有不具脂環式基的環氧基不飽和化合物,例如(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸2-甲基環氧丙酯、(甲基)丙烯酸3,4-環氧基丁酯、(甲基)丙烯酸6,7-環氧基庚酯等之(甲基)丙烯酸環氧基烷酯類;α-乙基丙烯酸環氧丙酯、α-正丙基丙烯酸環氧丙酯、α-正丁基丙烯酸環氧丙酯、α-乙基丙烯酸6,7-環氧基庚酯等之α-烷基丙烯酸環氧基烷酯類等。於此等之中,就共聚合反應性、硬化後之樹脂強度等而言,以(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸2-甲基環氧丙酯、及(甲基)丙烯酸6,7-環氧基庚酯較佳。此等含有不具脂環式基之環氧基不飽和化合物,可單獨或2種以上組合使用。An epoxy group-unsaturated compound having no alicyclic group, such as glycidyl (meth)acrylate or 2-methylglycidyl (meth)acrylate, when the constituent unit (a2) is derivatized, (meth)acrylic acid epoxy alkyl esters such as 3,4-epoxybutyl methacrylate, 6,7-epoxyheptyl (meth)acrylate; α-ethyl acrylate propylene Alpha-alkyl acrylate alkyl acrylate such as ester, α-n-propyl propylene acrylate, α-n-butyl butyl acrylate, α-ethyl acrylate 6,7-epoxyheptyl ester Classes, etc. Among these, in terms of copolymerization reactivity, resin strength after curing, etc., glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, and (methyl) The 6,7-epoxyheptyl acrylate is preferred. These epoxy group-containing unsaturated compounds having no alicyclic group may be used singly or in combination of two or more kinds.

為使構成單位(a3)衍生時之含有脂環式環氧基不飽和化合物,只要是具有脂環式環氧基之不飽和化合物即可,沒有特別的限制。構成脂環式環氧基之脂環式基,可以為單環、亦可為多環。單環之脂環式基例如環戊基、環己基等。另外,多環之脂環式基例如降冰片基、異冰片基、三環壬基、三環癸基、四環十二烷基等。The alicyclic epoxy group-containing unsaturated compound in the case where the constituent unit (a3) is derivatized is not particularly limited as long as it is an unsaturated compound having an alicyclic epoxy group. The alicyclic group constituting the alicyclic epoxy group may be a single ring or a polycyclic ring. A monocyclic alicyclic group such as a cyclopentyl group, a cyclohexyl group or the like. Further, a polycyclic alicyclic group is, for example, a norbornyl group, an isobornyl group, a tricyclodecyl group, a tricyclodecyl group, a tetracyclododecyl group or the like.

具體而言,含脂環式環氧基之不飽和化合物,例如以下述式(a3-1)~(a3-15)所示之化合物。於此等之中,為使顯影性為適當者時,以下述式(a3-1)~(a3-5)所示之化合物較佳,以下述式(a3-1)~(a3-3)所示之化合物更佳。Specifically, the alicyclic epoxy group-containing unsaturated compound is, for example, a compound represented by the following formulas (a3-1) to (a3-15). In the above, when the developability is appropriate, the compounds represented by the following formulas (a3-1) to (a3-5) are preferable, and the following formulas (a3-1) to (a3-3) are used. The compounds shown are preferred.

【化1】【化1】

【化2】[Chemical 2]

【化3】[化3]

於前述式中,R11 係表示氫原子或甲基,R12 係表示碳數1~6之2價脂肪族飽和烴基,R13 係表示碳數1~10之2價烴基,n係表示0~10之整數。R12 為直鏈狀或支鏈狀伸烷基、例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基較佳。R13 例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、亞苯基、環伸己基、-CH2 -Ph-CH2 -(Ph係表示亞苯基)較佳。In the above formula, R 11 represents a hydrogen atom or a methyl group, R 12 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R 13 represents a divalent hydrocarbon group having 1 to 10 carbon atoms, and n represents 0. An integer of ~10. R 12 is a linear or branched alkyl group such as methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene or hexamethylene. R 13 such as methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene, hexamethylene, phenylene, cyclohexyl, -CH 2 -Ph-CH 2 - (Ph represents a phenylene group) is preferred.

此外,(A1)樹脂只要是前述構成單位(a2)之比例與前述構成單位(a3)之比例的合計量為71質量%以上即可,亦可具有下述之構成單位(a4)。藉由組合構成單位(a4),可提高本發明之效果。In addition, the (A1) resin may have a total amount of the ratio of the ratio of the constituent unit (a2) to the constituent unit (a3) of 71% by mass or more, and may have the following constituent unit (a4). The effect of the present invention can be improved by combining the constituent units (a4).

另外,(A1)樹脂亦可具有除前述構成單位(a1)、(a2)、(a3)、(a4)以外之其他構成單位。為使該其他構成單位衍生時之化合物,例如(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙基化合物、乙烯醚類、乙烯酯類、苯乙烯類等。此等之化合物可單獨或2種以上組合使用。Further, the (A1) resin may have other constituent units other than the above-described constituent units (a1), (a2), (a3), and (a4). The compound in the case where the other constituent unit is derived is, for example, a (meth) acrylate, a (meth) acrylamide, an allyl compound, a vinyl ether, a vinyl ester, or a styrene. These compounds may be used alone or in combination of two or more.

(甲基)丙烯酸酯類例如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸第3-辛酯等之直鏈狀或支鏈狀(甲基)丙烯酸烷酯;(甲基)丙烯酸氯化乙酯、(甲基)丙烯酸2,2-二甲基羥基丙酯、(甲基)丙烯酸2-羥基乙酯、單(甲基)丙烯酸三羥甲基丙烷酯、(甲基)丙烯酸苯甲酯、(甲基)丙烯酸糠酯等。(Meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, amyl (meth) acrylate, 3-octyl (meth) acrylate Linear or branched alkyl (meth)acrylate; ethyl (meth)acrylate, 2,2-dimethylhydroxypropyl (meth)acrylate, 2-(meth)acrylate Hydroxyethyl ester, trimethylolpropane mono(meth)acrylate, benzyl (meth)acrylate, decyl (meth)acrylate, and the like.

(甲基)丙烯醯胺類例如(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。(Meth) acrylamides such as (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dialkyl (A Acrylamide, N,N-aryl(meth)acrylamide, N-methyl-N-phenyl(meth)acrylamide, N-hydroxyethyl-N-methyl (methyl ) acrylamide and the like.

烯丙基化合物例如乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯基乙酸烯丙酯、乳酸烯丙酯等之烯丙酯類;烯丙氧基乙醇等。Allyl compound such as allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, acetaminoacetic acid Allyl esters such as allyl ester and allyl lactate; allyloxyethanol and the like.

乙烯醚類例如己基乙烯醚、辛基乙烯醚、癸基乙烯醚、乙基己基乙烯醚、甲氧基乙基乙烯醚、乙氧基乙基乙烯醚、氯化乙基乙烯醚、1-甲基-2,2-二甲基丙基乙烯醚、2-乙基丁基乙烯醚、羥基乙基乙烯醚、二乙二醇乙烯醚、二甲基胺基乙基乙烯醚、二乙基胺基乙基乙烯醚、丁基胺基乙基乙烯醚、苯甲基乙烯醚、四氫糠基乙烯醚等之烷基乙烯醚;乙烯基苯醚、乙烯基甲苯醚、乙烯基氯化苯醚、乙烯基-2,4-二氯化苯醚、乙烯基萘醚、乙烯基蒽醚等之乙烯基芳醚等。Vinyl ethers such as hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxy ethyl vinyl ether, ethoxyethyl vinyl ether, ethyl vinyl chloride, 1-methyl Base-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, diethylamine An alkyl vinyl ether such as ethyl ethyl vinyl ether, butyl amino ethyl vinyl ether, benzyl vinyl ether or tetrahydrofurfuryl vinyl ether; vinyl phenyl ether, vinyl toluene ether, vinyl phenyl chloride A vinyl aryl ether such as vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether or vinyl anthracene.

乙烯酯類例如丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯化乙酸乙烯酯、二氯化乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯基乙酸乙烯酯、月桂酸乙烯酯、β-苯基丁酸乙烯酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯化苯甲酸乙烯酯、四氯化苯甲酸乙烯酯、萘甲酸乙烯酯等。Vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl acetate, vinyl acetate Ester, methoxyvinyl acetate, butoxy vinyl acetate, vinyl phenyl acetate, vinyl acetate, vinyl laurate, vinyl β-phenylbutyrate, vinyl benzoate, water Vinyl acetate, vinyl benzoate, vinyl benzoate, vinyl naphthate, and the like.

苯乙烯類例如苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苯甲基苯乙烯、氯化甲基苯乙烯、三氟化甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等之烷氧基苯乙烯;氯化苯乙烯、二氯化苯乙烯、三氯化苯乙烯、四氯化苯乙烯、五氯化苯乙烯、溴化苯乙烯、二溴化苯乙烯、碘化苯乙烯、氟化苯乙烯、三氟化苯乙烯、2-溴-4-三氟化甲基苯乙烯、4-氟-3-三氟化甲基苯乙烯等之鹵化苯乙烯等。Styrenes such as styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene, An alkane such as cyclohexylstyrene, mercaptostyrene, benzyl styrene, methyl styrene chloride, methyl styrene trifluoride, ethoxymethyl styrene, ethoxymethyl methene styrene Alkoxystyrene, methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene, etc.; styrene chloride, styrene dichloride, trichloro Styrene, styrene tetrachloride, styrene pentachloride, styrene bromide, styrene dibromide, styrene iodide, styrene fluoride, styrene trifluoride, 2-bromo-4-tri Halogenated styrene such as fluorinated methyl styrene or 4-fluoro-3-trifluoromethyl styrene.

(A1)樹脂中之前述構成單位(a1)的比例,以5~29質量%較佳,以10~25質量%更佳。The ratio of the above-mentioned constituent unit (a1) in the resin (A1) is preferably 5 to 29% by mass, more preferably 10 to 25% by mass.

而且,(A1)樹脂中之前述構成單位(a2)之比例與前述構成單位(a3)之比例的合計量為71質量%以上,較佳者為71~95質量%,更佳者為75~90質量%。其中,前述構成單位(a2)之比例以10~70質量%較佳,以20~45質量%更佳。另外,前述構成單位(a3)之比例,以20~65質量%較佳,以30~50質量%更佳。藉由使構成單位(a3)之比例在前述範圍,可使顯影性為適當者,且可降低硬化物之比介電常數。Further, the total ratio of the ratio of the constituent unit (a2) in the resin (A1) to the ratio of the constituent unit (a3) is 71% by mass or more, preferably 71 to 95% by mass, and more preferably 75 to 5% by weight. 90% by mass. The ratio of the constituent unit (a2) is preferably from 10 to 70% by mass, more preferably from 20 to 45% by mass. Further, the ratio of the constituent unit (a3) is preferably 20 to 65 mass%, more preferably 30 to 50 mass%. By setting the ratio of the constituent unit (a3) within the above range, the developability can be made appropriate, and the specific dielectric constant of the cured product can be lowered.

此外,(A1)樹脂中之前述構成單位(a4)之比例,以1~15質量%較佳,以3~10質量%更佳。Further, the ratio of the above-mentioned constituent unit (a4) in the (A1) resin is preferably from 1 to 15% by mass, more preferably from 3 to 10% by mass.

而且,(A1)樹脂中之前述其他的構成單位之比例,以0~10質量%較佳,以0~5質量%更佳。Further, the ratio of the other constituent units in the (A1) resin is preferably from 0 to 10% by mass, more preferably from 0 to 5% by mass.

藉由使各構成單位之比例在前述範圍內,可使感光性樹脂組成物之顯影性為適當者,且可使硬化物之形狀或破壞強度、對基板之密接性良好者。When the ratio of each constituent unit is within the above range, the developability of the photosensitive resin composition can be made appropriate, and the shape or breaking strength of the cured product and the adhesion to the substrate can be improved.

(A1)樹脂之質量平均分子量(Mw:凝膠滲透色層分析法(GPC))、藉由苯乙烯換算之測定值。於本說明書中相同),以2000~50000較佳,以5000~30000更佳。藉由在前述範圍內,可容易得到感光性樹脂組成物之膜形成能力、曝光後之顯像性的平衡性的傾向。(A1) Mass average molecular weight of the resin (Mw: gel permeation chromatography (GPC)), measured value in terms of styrene. The same in the present specification) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. By the above range, the film forming ability of the photosensitive resin composition and the balance of the developability after exposure tend to be easily obtained.

(A1)樹脂為具有前述構成單位(a1)、(a2)、(a3)以外之構成單位時,(A1)樹脂可藉由習知的自由基聚合法製造。換言之,可藉由使各構成單位衍生的各化合物、以及習知的自由基聚合引發劑溶解於聚合溶劑後,進行加熱攪拌予以製造。(A1) When the resin has a constituent unit other than the above constituent units (a1), (a2), and (a3), the (A1) resin can be produced by a conventional radical polymerization method. In other words, each compound derived from each constituent unit and a conventional radical polymerization initiator can be dissolved in a polymerization solvent, and then heated and stirred to be produced.

另外,(A1)樹脂不具除前述構成單位(a1)、(a2)、(a3)以外之構成單位時,一般的自由基聚合法係使構成單位(a1)之羧基與構成單位(a2)、(a3)之環氧基進行反應,予以凝膠化。Further, when the (A1) resin does not have a constituent unit other than the above-mentioned constituent units (a1), (a2), and (a3), the general radical polymerization method is such that the carboxyl group and the constituent unit (a2) of the constituent unit (a1) are The epoxy group of (a3) is reacted and gelled.

所以在上述情形下,藉由先使不飽和羧酸與特定的反應性化合物進行反應,製得反應混合物(反應步驟),然後,使該反應混合物與含有不具脂環式基之環氧基不飽和化合物及含脂環式環氧基之不飽和化合物進行共聚合(聚合步驟),製造(A1)樹脂。視其所需,亦可於最後進行精製‧洗淨處理(精製步驟)。Therefore, in the above case, the reaction mixture is prepared by first reacting an unsaturated carboxylic acid with a specific reactive compound (reaction step), and then the reaction mixture is not reacted with an epoxy group having no alicyclic group. The saturated compound and the unsaturated compound containing an alicyclic epoxy group are subjected to copolymerization (polymerization step) to produce a resin (A1). Depending on the requirements, it is also possible to carry out the refining and rinsing treatment (refining step).

首先,反應步驟係藉由將不飽和羧酸、與至少1種選自以下述式(1)~(3)所示之化合物(反應性化合物)的化合物,加入燒瓶等之適當的反應容器中,進行加熱攪拌,製得反應混合物。First, the reaction step is carried out by adding an unsaturated carboxylic acid and at least one compound selected from the group consisting of the compounds (reactive compounds) represented by the following formulas (1) to (3) to a suitable reaction vessel such as a flask. The mixture was heated and stirred to prepare a reaction mixture.

【化4】【化4】

RR 11 -O-R-O-R 33 -O-R-O-R 22  (1) (1)

(式中,R1 及R2 係各表示獨立的碳數1~4之烷基,R3 係表示亦可含有氧原子之碳數1~4之直鏈狀或支鏈狀烴基)(wherein R 1 and R 2 each independently represent an alkyl group having 1 to 4 carbon atoms; and R 3 represents a linear or branched hydrocarbon group having 1 to 4 carbon atoms which may also contain an oxygen atom)

【化5】【化5】

(式中,R4 及R5 係各表示獨立的碳數1~4之烷基)(wherein R 4 and R 5 each represent an independent alkyl group having 1 to 4 carbon atoms)

【化6】【化6】

(式中,R6 及R7 係各表示獨立的碳數1~4之烷基,R8 係表示氫原子或碳數1~4之烷基)(wherein R 6 and R 7 each independently represent an alkyl group having 1 to 4 carbon atoms, and R 8 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms)

以前述式(1)所示之化合物,例如1,2-二甲氧基乙烷、1,2-二乙氧基乙烷、1,2-二丙氧基乙烷、1,2-二丁氧基乙烷、二乙氧基甲烷、二丙氧基甲烷、二丁氧基甲烷、1,1-二甲氧基丙烷、1,1-二乙氧基丙烷、1,1-二丙氧基丙烷、1,1-二丁氧基丙烷、2,2-二甲氧基丙烷、2,2-二乙氧基丙烷、2,2-二丙氧基丙烷、2,2-二丁氧基丙烷、二乙二醇二甲醚、二乙二醇乙基甲醚、二乙二醇二乙醚、二乙二醇二丙醚、二乙二醇二丁醚等。a compound represented by the above formula (1), for example, 1,2-dimethoxyethane, 1,2-diethoxyethane, 1,2-dipropoxyethane, 1,2-di Butoxyethane, diethoxymethane, dipropoxymethane, dibutoxymethane, 1,1-dimethoxypropane, 1,1-diethoxypropane, 1,1-dipropyl Oxypropane, 1,1-dibutoxypropane, 2,2-dimethoxypropane, 2,2-diethoxypropane, 2,2-dipropoxypropane, 2,2-dibutyl Oxypropane, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, and the like.

以前述式(2)所示之化合物,例如2,5-二甲氧基四氫呋喃、2,5-二乙氧基四氫呋喃、2,5-二丙氧基四氫呋喃、2,5-二丁氧基四氫呋喃等。a compound represented by the above formula (2), for example, 2,5-dimethoxytetrahydrofuran, 2,5-diethoxytetrahydrofuran, 2,5-dipropoxytetrahydrofuran, 2,5-dibutoxy Tetrahydrofuran and the like.

以前述式(3)所示之化合物,例如3,4-二甲氧基甲苯、3,4-二乙氧基甲苯、3,4-二丙氧基甲苯、3,4-二丁氧基甲苯、1,2-二甲氧基苯、1,2-二乙氧基苯、1,2-二丙氧基苯、1,2-二丁氧基苯等。a compound represented by the above formula (3), for example, 3,4-dimethoxytoluene, 3,4-diethoxytoluene, 3,4-dipropoxytoluene, 3,4-dibutoxy Toluene, 1,2-dimethoxybenzene, 1,2-diethoxybenzene, 1,2-dipropoxybenzene, 1,2-dibutoxybenzene, and the like.

於此等之反應性化合物中,就與不飽和羧酸之反應性而言,以二乙氧基甲烷、1,2-二甲氧基乙烷、1,2-二乙氧基乙烷、二乙二醇二甲醚、二乙二醇乙基甲醚、2,5-二甲氧基四氫呋喃、1,1-二乙氧基丙烷、及2,2-二乙氧基丙烷較佳。此等之反應性化合物可單獨或2種以上組合使用。Among these reactive compounds, in terms of reactivity with an unsaturated carboxylic acid, diethoxymethane, 1,2-dimethoxyethane, 1,2-diethoxyethane, Diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, 2,5-dimethoxytetrahydrofuran, 1,1-diethoxypropane, and 2,2-diethoxypropane are preferred. These reactive compounds may be used singly or in combination of two or more kinds.

不飽和羧酸與反應性化合物之莫耳比例,沒有特別的限制,以1:0.5~1:3較佳,以1:0.8~1:2更佳。而且,反應溫度以60~150℃較佳,以80~120℃更佳。反應時間以10分鐘~10小時較佳,以30分鐘~5小時更佳。The molar ratio of the unsaturated carboxylic acid to the reactive compound is not particularly limited, and is preferably from 1:0.5 to 1:3, more preferably from 1:0.8 to 1:2. Further, the reaction temperature is preferably 60 to 150 ° C, more preferably 80 to 120 ° C. The reaction time is preferably from 10 minutes to 10 hours, more preferably from 30 minutes to 5 hours.

其次,聚合步驟係藉由使在反應步驟中所得的反應混合物與含有不具脂環式基之環氧基不飽和化合物及含有脂環式環氧基之不飽和化合物溶解於習知的自由基聚合引發劑與聚合溶劑後,進行加熱攪拌,製得共聚物。Next, the polymerization step is carried out by dissolving the reaction mixture obtained in the reaction step with an epoxy group-containing unsaturated compound having no alicyclic group and an alicyclic epoxy group-containing unsaturated compound in a conventional radical polymerization. After the initiator and the polymerization solvent are heated and stirred, a copolymer is obtained.

最後,精製步驟例如藉由使用貧溶劑等進行洗淨處理,以除去殘留物。Finally, the purification step is performed by, for example, washing treatment using a poor solvent or the like to remove the residue.

(A1)樹脂之含有量,相對於下述光聚合性單體(B)之含有量而言,以40~230質量%較佳,以60~220質量%更佳,以70~215質量%最佳。The content of the resin (A1) is preferably 40 to 230% by mass, more preferably 60 to 220% by mass, and 70 to 215% by mass, based on the content of the photopolymerizable monomer (B). optimal.

((A2)樹脂)((A2) resin)

(A2)樹脂係至少具有前述構成單位(a1)、前述構成單位(a2)及前述構成單位(a4)。有關為使構成單位(a1)、(a2)衍生時之化合物,係與(A1)樹脂時相同,故省略說明。(A2)樹脂亦可具有除構成單位(a1)、(a2)、(a4)以外之其他構成單位。前述其他構成單位,例如與(A1)樹脂之其他構成單位相同的構成單位。The resin (A2) has at least the above-mentioned constituent unit (a1), the above-mentioned constituent unit (a2), and the above-mentioned constituent unit (a4). The compound in the case where the constituent units (a1) and (a2) are derivatized is the same as in the case of the (A1) resin, and thus the description thereof is omitted. The resin (A2) may have other constituent units other than the constituent units (a1), (a2), and (a4). The other constituent units described above are, for example, the same constituent units as the other constituent units of the resin (A1).

為使構成單位(a4)衍生時之含脂環式基不飽和化合物,只要是具有脂環式環氧基之不飽和化合物即可,沒有特別的限制。脂環式基,可以為單環、亦可為多環。單環之脂環式基例如環戊基、環己基等。另外,多環之脂環式基例如金剛烷基、降冰片基、異冰片基、三環壬基、三環癸基、四環十二烷基等。The alicyclic group-containing unsaturated compound in the case where the constituent unit (a4) is derivatized is not particularly limited as long as it is an unsaturated compound having an alicyclic epoxy group. The alicyclic group may be a single ring or a polycyclic ring. A monocyclic alicyclic group such as a cyclopentyl group, a cyclohexyl group or the like. Further, a polycyclic alicyclic group such as an adamantyl group, a norbornyl group, an isobornyl group, a tricyclodecyl group, a tricyclodecyl group, a tetracyclododecyl group or the like.

具體而言,含脂環式環氧基之不飽和化合物,例如以下述式(a4-1)~(a4-7)所示之化合物。於此等之中,為使顯影性為適當者時,以下述式(a4-3)~(a4-8)所示之化合物較佳,以下述式(a4-3)、(a4-4)所示之化合物更佳。Specifically, the alicyclic epoxy group-containing unsaturated compound is, for example, a compound represented by the following formulas (a4-1) to (a4-7). In the above, in order to make the developability suitable, the compounds represented by the following formulas (a4-3) to (a4-8) are preferred, and the following formulas (a4-3) and (a4-4) are used. The compounds shown are preferred.

【化7】【化7】

【化8】【化8】

於前述式中,R21 係表示氫原子或甲基,R22 係表示單鍵或碳數1~6之2價脂肪族飽和烴基,R23 係表示氫原子或碳數1~5之烷基。R22 為單鍵、直鏈狀或支鏈狀伸烷基、例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基較佳。R23 例如甲基、乙基較佳。In the above formula, R 21 represents a hydrogen atom or a methyl group, R 22 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R 23 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. . R 22 is a single bond, a linear or branched alkyl group, such as methylene, ethyl, propyl, tetramethylene, ethyl ethyl, pentamethylene, hexamethylene good. R 23 is preferably a methyl group or an ethyl group.

(A2)樹脂中之前述構成單位(a1)的比例,以3~25質量%較佳,以5~25質量%更佳。The ratio of the above-mentioned constituent unit (a1) in the resin (A2) is preferably 3 to 25% by mass, more preferably 5 to 25% by mass.

而且,(A2)樹脂中之前述構成單位(a2)的比例為71質量%以上,較佳者為71~95質量%,更佳者為75~90質量%。Further, the ratio of the above-mentioned constituent unit (a2) in the (A2) resin is 71% by mass or more, preferably 71 to 95% by mass, and more preferably 75 to 90% by mass.

此外,(A2)樹脂中之前述構成單位(a4)的比例以1~25質量%較佳,以3~20質量%更佳,以5~15質量%最佳。藉由使構成單位(a4)之比例在前述範圍內,可使顯影性為適當者,且可降低硬化物之比介電常數。Further, the ratio of the above-mentioned constituent unit (a4) in the (A2) resin is preferably 1 to 25% by mass, more preferably 3 to 20% by mass, and most preferably 5 to 15% by mass. By setting the ratio of the constituent unit (a4) within the above range, the developability can be made appropriate, and the specific dielectric constant of the cured product can be lowered.

此外,(A2)樹脂中之前述其他的構成單位之比例,以0~10質量%較佳,以0~5質量%更佳。Further, the ratio of the other constituent units in the (A2) resin is preferably from 0 to 10% by mass, more preferably from 0 to 5% by mass.

藉由使各構成單位之比例在前述範圍內,可使感光性樹脂組成物之顯影性為適當者,且可使硬化物之形狀或破壞強度、對基板之密接性良好者。When the ratio of each constituent unit is within the above range, the developability of the photosensitive resin composition can be made appropriate, and the shape or breaking strength of the cured product and the adhesion to the substrate can be improved.

(A2)樹脂之質量平均分子量,以2000~50000較佳,以5000~30000更佳。藉由在前述範圍內,會有容易得到感光性樹脂組成物之膜形成能力、曝光後之顯像性的平衡性之傾向。The mass average molecular weight of the resin (A2) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. In the above range, the film forming ability of the photosensitive resin composition and the balance of the developability after exposure tend to be easily obtained.

(A2)樹脂可藉由習知的自由基聚合法製造。換言之,可藉由使各構成單位衍生的各化合物、以及習知的自由基聚合引發劑溶解於聚合溶劑後,進行加熱攪拌予以製造。The (A2) resin can be produced by a conventional radical polymerization method. In other words, each compound derived from each constituent unit and a conventional radical polymerization initiator can be dissolved in a polymerization solvent, and then heated and stirred to be produced.

(A2)樹脂之含有量,相對於下述光聚合性單體(B)之含有量而言,以40~230質量%較佳,以60~220質量%更佳,以70~215質量%最佳。The content of the resin (A2) is preferably 40 to 230% by mass, more preferably 60 to 220% by mass, and 70 to 215% by mass, based on the content of the photopolymerizable monomer (B). optimal.

另外,(A)成份係除(A1)樹脂或(A2)樹脂外,亦可含有習知的其他鹼可溶性樹脂。惟此時於(A)成份之全部構成單位中,具有環氧基之構成單位的比例以50質量%以上較佳。Further, the component (A) may contain other conventional alkali-soluble resins in addition to the (A1) resin or the (A2) resin. In this case, in all the constituent units of the component (A), the proportion of the constituent unit having an epoxy group is preferably 50% by mass or more.

而且,(A)成份之含有量相對於感光性樹脂組成物之固成份而言,以40~85質量%較佳,以45~75質量%更佳。藉由在前述範圍內,會有可容易取得顯影性之平衡性的傾向。Further, the content of the component (A) is preferably from 40 to 85% by mass, more preferably from 45 to 75% by mass, based on the solid content of the photosensitive resin composition. Within the above range, there is a tendency that the balance of developability can be easily obtained.

<光聚合單體(B)><Photopolymerizable monomer (B)>

本發明之感光性樹脂組成物中所含的光聚合單體(B)(以下亦稱為「(B)成份」),以使用具有乙烯性不飽和基之單體較佳。該具有乙烯性不飽和基之單體,為單官能單體與多官能單體。The photopolymerizable monomer (B) (hereinafter also referred to as "(B) component)) contained in the photosensitive resin composition of the present invention is preferably a monomer having an ethylenically unsaturated group. The monomer having an ethylenically unsaturated group is a monofunctional monomer and a polyfunctional monomer.

單官能單體例如(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、衣康酸、衣康酸酐、檸康酸、檸康酸酐、丁烯酸、2-丙烯醯胺-2-甲基丙烷磺酸、第3-丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-(甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、單(甲基)丙烯酸丙三醇酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸二甲基胺酯、(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、苯二甲酸衍生物之半(甲基)丙烯酸酯等。此等之單官能單體可單獨或2種以上組合使用。Monofunctional monomers such as (meth) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) acrylamide, Propyloxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-methylol (meth) acrylamide, N-hydroxymethyl (methyl) Acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-propenylamine-2 -methylpropanesulfonic acid, 3-butylacrylamide, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethyl (meth)acrylate Hexyl hexyl ester, cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, (methyl) 2-phenoxy-2-hydroxypropyl acrylate, 2-(methyl)propenyloxy-2-hydroxypropyl phthalate, glycerol mono(meth)acrylate, (methyl) Tetrahydrofurfuryl acrylate, dimethyl (meth) acrylate, glycidyl (meth) acrylate, (meth) propylene 2,2,2-trifluoroethyl acrylate, (meth) acrylate, 2,2,3,3-tetrafluoro-propyl, semi-phthalic acid derivative of (meth) acrylate. These monofunctional monomers may be used singly or in combination of two or more kinds.

此外,多官能單體例如二(甲基)丙烯酸乙二醇酯、二(甲基)丙烯酸二乙二醇酯、二(甲基)丙烯酸四乙二醇酯、二(甲基)丙烯酸丙二醇酯、二(甲基)丙烯酸聚丙二醇酯、二(甲基)丙烯酸丁二醇酯、二(甲基)丙烯酸新戊醇酯、二(甲基)丙烯酸1,6-己二醇酯、三(甲基)丙烯酸三羥甲基丙烷酯、二(甲基)丙烯酸丙三醇酯、三丙烯酸季戊四醇酯、四丙烯酸季戊四醇酯、五丙烯酸二季戊四醇酯、六丙烯酸二季戊四醇酯、二(甲基)丙烯酸季戊四醇酯、三(甲基)丙烯酸季戊四醇酯、四(甲基)丙烯酸季戊四醇酯、五(甲基)丙烯酸二季戊四醇酯、六(甲基)丙烯酸二季戊四醇酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二環氧丙醚二(甲基)丙烯酸酯、二乙二醇二環氧丙醚二(甲基)丙烯酸酯、苯二甲酸二環氧丙酯二(甲基)丙烯酸酯、丙三醇三丙烯酸酯、丙三醇聚環氧丙醚聚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯(即二異氰酸甲次苯酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯等與2-羥基乙基(甲基)丙烯酸酯之反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等的多官能單體、或三丙烯基甲縮醛等。此等之多官能單體可使用單獨或2種以上組合使用。Further, polyfunctional monomers such as ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate Polypropylene glycol di(meth)acrylate, butylene glycol di(meth)acrylate, neopentyl bis(meth)acrylate, 1,6-hexanediol di(meth)acrylate, three ( Trimethylolpropane methyl methacrylate, glycerol di(meth) acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, di(meth)acrylic acid Pentaerythritol ester, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2,2-bis(4-( Methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2-hydroxy-3-(methyl) ) acryloxypropyl (meth) acrylate, ethylene glycol diglycidyl di(meth) acrylate, diethylene glycol diglycidyl di(methyl) propyl Ethyl ester, diglycidyl phthalate di(meth) acrylate, glycerol triacrylate, glycerol polyglycidyl ether poly(meth) acrylate, urethane (A Reaction of 2-hydroxyethyl (meth) acrylate, such as methacrylate (i.e., metriphenyl diisocyanate), trimethylhexamethylene diisocyanate, hexamethylene diisocyanate, etc. a polyfunctional monomer such as methyl bis(methyl) acrylamide, (meth) acrylamide methyl ether, a condensate of a polyol and N-methylol (meth) acrylamide, or tripropylene Alkyl acetal and the like. These polyfunctional monomers can be used singly or in combination of two or more kinds.

於此等具有乙烯性不飽和基之單體中,就提高感光性樹脂組成物對基板之密接性、感光性樹脂組成物於硬化後之破壞強度而言,以3官能以上之多官能單體較佳,以6官能以上之多官能單體更佳。In the monomer having an ethylenically unsaturated group, the adhesiveness of the photosensitive resin composition to the substrate and the breaking strength of the photosensitive resin composition after curing are three or more functional polyfunctional monomers. Preferably, a polyfunctional monomer having 6 or more functional groups is more preferable.

(B)成份之含有量相對於感光性樹脂組成物之固成份而言,以5~50質量%較佳,以10~40質量%更佳。藉由在前述範圍內,會有可容易取得感度。顯影性、解像性之平衡性的傾向。The content of the component (B) is preferably from 5 to 50% by mass, more preferably from 10 to 40% by mass, based on the solid content of the photosensitive resin composition. By being within the above range, sensitivity can be easily obtained. The tendency to balance the developability and resolution.

<光聚合引發劑(C)><Photopolymerization initiator (C)>

本發明之感光性樹脂組成物中所含有的光聚合引發劑(C)(以下亦稱為「(C)成份」),沒有特別的限制,可使用習知的光聚合引發劑。The photopolymerization initiator (C) (hereinafter also referred to as "(C) component)) contained in the photosensitive resin composition of the present invention is not particularly limited, and a conventional photopolymerization initiator can be used.

具體而言,光聚合引發劑例如1-羥基環己基苯酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲基胺基苯基)酮、2-甲基-1-[4-(甲基硫代)苯基]-2-嗎啉基丙烷-1-酮、2-苯甲基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、乙酮、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]、1-(o-乙醯基肟)、2,4,6-三甲基苯甲醯基二苯基氧化膦、4-苯甲醯基-4’-甲基二甲基硫醚、4-二甲基胺基苯甲酸、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸丁酯、4-二甲基胺基-2-乙基己基苯甲酸、4-二甲基胺基-2-異戊基苯甲酸、苯甲基-β-甲氧基乙基乙縮醛、苯甲基二甲基縮醛、1-苯基-1,2-丙烷二酮-2-(o-乙氧基羰基)肟、o-苯甲醯基苯甲酸甲酯、2,4-二乙基噻噸酮、2-氯化噻噸酮、2,4-二甲基噻噸酮、1-氯-4-丙氧基噻噸酮、噻噸、2-氯化噻噸、2,4-二乙基噻噸、2-甲基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、過氧化苯甲醯基、過氧化枯烯、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑、2-(o-氯化苯基)-4,5-二(m-甲氧基苯基)-咪唑基二聚物、二苯甲酮、2-氯化二苯甲酮、p,p’-雙二甲基胺基二苯甲酮、4,4’-雙二乙基胺基二苯甲酮、4,4’-二氯化二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苯甲基、苯偶因、苯偶因甲醚、苯偶因乙醚、苯偶因異丙醚、苯偶殷正丁醚、苯偶因異丁醚、苯偶因丁醚、苯乙酮、2,2-二乙氧基苯乙酮、p-二甲基苯乙酮、p-二甲基胺基苯丙酮、二氯化苯乙酮、三氯化苯乙酮、p-第3-丁基苯乙酮、p-二甲基胺基苯乙酮、p-第3-丁基三氯化苯乙酮、p-第3-丁基二氯化苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、二苯并環庚酮、戊基-4-二甲基胺基苯甲酸酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、p-甲氧基三嗪、2,4,6-參(三氯化甲基)-s-三嗪、2-甲基-4,6-雙(三氯化甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、2-[2-(呋喃-2-基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、2-[2-(4-二乙基胺基-2-甲基苯基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、2-(3,4-二甲氧基苯基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯化甲基)-s-三嗪、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯化甲基)-s-三嗪、2-(4-正丁氧基苯基)-4,6-雙(三氯化甲基)-s-三嗪、2,4-雙-三氯化甲基-6-(3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯化甲基-6-(2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯化甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、2,4-雙-三氯化甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三嗪等。於此等之中,使用肟系光聚合引發劑,就感度而言更佳。此等之光聚合引發劑可單獨或2種以上組合使用。Specifically, a photopolymerization initiator such as 1-hydroxycyclohexyl benzophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxyethoxy)benzene 2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1-(4 -dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethane-1-one, bis (4- Dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl-2-ene Methylamino-1-(4-morpholinylphenyl)-butan-1-one, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H- Oxazol-3-yl], 1-(o-ethylindenyl), 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, 4-benzylidene-4'-methyl Dimethyl sulfide, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid Ester, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino-2-isopentylbenzoic acid, benzyl-β-methoxyethyl acetal, benzene Methyl dimethyl acetal, 1-phenyl-1,2-propanedione-2-(o-ethoxy carbonyl肟, methyl o-benzylidene benzoate, 2,4-diethyl thioxanthone, 2-thioxanthone chloride, 2,4-dimethylthioxanthone, 1-chloro-4- Propoxy thioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylhydrazine, eight Methyl hydrazine, 1,2-benzopyrene, 2,3-diphenyl fluorene, azobisisobutyronitrile, benzoyl peroxide, cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)-imidazolyl dimer, diphenyl Ketone, 2-benzoic benzophenone, p,p'-bisdimethylaminobenzophenone, 4,4'-bisdiethylaminobenzophenone, 4,4'-dichloro Benzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ether, benzoin isopropyl ether, Benzophene n-butyl ether, benzoin isobutyl ether, benzoin butane, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylamino Phenylacetone, acetophenone dichloride, acetophenone trichloride, p-tert-butylacetophenone, p-dimethyl Amino acetophenone, p-tert 3-butyl acetophenone, p-tert 3-butyl acetophenone, α,α-dichloro-4-phenoxyacetophenone, Thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzocycloheptanone, pentyl-4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis-(9-acridinyl)heptane, 1,5-bis(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxy Triazine, 2,4,6-gin (methyl chloride)-s-triazine, 2-methyl-4,6-bis(methyl chloride)-s-triazine, 2-[ 2-(5-methylfuran-2-yl)ethylidene]-4,6-bis(methyl chloride)-s-triazine, 2-[2-(furan-2-yl)-second 4,6-bis(trimethylmethyl)-s-triazine, 2-[2-(4-diethylamino-2-methylphenyl)ethenyl]-4,6 - bis(methyl chloride)-s-triazine, 2-(3,4-dimethoxyphenyl)ethylidene]-4,6-bis(methyl chloride)-s-three Pyrazine, 2-(4-methoxyphenyl)-4,6-bis(methyl chloride)-s-triazine, 2-(4-ethoxystyryl)-4,6-double (methyl chloride)-s-triazine, 2-(4-n-butoxyphenyl)-4,6-bis(methyl chloride)-s-triazine, 2,4-bis- Methyl-6-(3-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis- Methyl-6-(2-bromo-4-methoxy)phenyl-s-triazine chloride, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy Styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl-s-triazine, and the like. Among these, the use of a fluorene-based photopolymerization initiator is more preferable in terms of sensitivity. These photopolymerization initiators may be used singly or in combination of two or more kinds.

(C)成份之含有量,相對於感光性樹脂組成物之固成份而言以0.5~30質量%較佳,以1~20質量%更佳。藉由在前述範圍內,可得充分的耐熱性、耐藥品性,且可提高塗膜形成能力,抑制硬化不良的情形。The content of the component (C) is preferably from 0.5 to 30% by mass, more preferably from 1 to 20% by mass, based on the solid content of the photosensitive resin composition. By the above range, sufficient heat resistance and chemical resistance can be obtained, and the coating film forming ability can be improved, and the hardening failure can be suppressed.

此外,在該(C)成分,亦可組合光引發助劑。光引發助劑例如三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基異戊酯、4-二甲基胺基苯甲酸2-乙基己酯、苯甲酸2-二甲基胺基乙酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯甲酮、9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽等。此等之光引發助劑可單獨或2種以上組合使用。Further, a photoinitiator may be combined in the component (C). Photoinitiating aids such as triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylamino Isoamyl ester, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine, 4,4'-double ( Dimethylamino)benzophenone, 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl -9,10-diethoxyanthracene, and the like. These photoinitiating aids may be used singly or in combination of two or more kinds.

<有機溶劑(S)><Organic Solvent(S)>

本發明之感光性樹脂組成物,為改善塗佈性、調整黏度時,以含有有機溶劑(S)(以下亦稱為「(S)成份」)較佳。In order to improve the applicability and adjust the viscosity, the photosensitive resin composition of the present invention preferably contains an organic solvent (S) (hereinafter also referred to as "(S) component").

具體而言,有機溶劑例如乙二醇單甲醚、乙二醇單乙醚、乙二醇單正丙醚、乙二醇單正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等之(聚)烷二醇單烷醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯(PGMEA)、丙二醇單乙醚乙酸酯等之(聚)烷二醇單烷醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲基乙醚、二乙二醇二乙醚、四氫呋喃等之其他醚類;甲基乙酮、環己酮、2-庚酮、3-庚酮等之酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯基乙酸甲酯、乙醯基乙酸乙酯、2-羰基丁酸乙酯等之其他酯類;甲苯、二甲苯等之芳香族烴類;N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等之醯胺類等。於此等之中,以烷二醇單烷醚類、烷二醇單烷醚乙酸酯類、前述其他的醚類、乳酸烷酯類、前述其他的酯類較佳,以烷二醇單烷醚乙酸酯類、前述其他的醚類、前述其他的酯類更佳。此等之溶劑可單獨或2種以上組合使用。Specifically, an organic solvent such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether , diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol (poly)alkylene glycol monoalkane such as mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether Ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate (PGMEA), (poly)alkylene glycol monoalkyl ether acetates such as propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol diethyl ether, tetrahydrofuran, etc. Other ethers; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone; milk of methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, etc. Acid alkyl esters; ethyl 2-hydroxy-2-methylpropanoate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3- Ethyl ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxybutyl acetate, 3-methyl-3 -methoxybutyl acetate, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, N-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, acetone Other esters such as n-propyl acrylate, methyl acetoxyacetate, ethyl acetoxyacetate, ethyl 2-carbonylbutyrate; aromatic hydrocarbons such as toluene and xylene; N-methylpyrrolidone, N An amide such as N-dimethylformamide or N,N-dimethylacetamide. Among these, an alkanediol monoalkyl ether, an alkylene glycol monoalkyl ether acetate, the above other ethers, an alkyl lactate, and the other esters are preferably an alkanediol monoalkane. The ether acetates, the other ethers described above, and the other esters described above are more preferred. These solvents may be used singly or in combination of two or more kinds.

(S)成分之含有量,沒有特別的限制,以可在基板等上塗佈的濃度,視塗佈厚度而定予以適當設定。感光性樹脂組成物之黏度,以5~500cp較佳,以10~50cp更佳,以20~30cp最佳。而且,固成份濃度以5~100質量%較佳,以20~50質量%更佳。The content of the component (S) is not particularly limited, and the concentration which can be applied to a substrate or the like is appropriately set depending on the thickness of the coating. The viscosity of the photosensitive resin composition is preferably 5 to 500 cp, more preferably 10 to 50 cp, and most preferably 20 to 30 cp. Further, the solid content concentration is preferably from 5 to 100% by mass, more preferably from 20 to 50% by mass.

<其他成份><Other ingredients>

於本發明之感光性樹脂組成物中,視其所需可含有界面活性劑、密接性提高劑、熱聚合禁止劑、消泡劑等之添加劑。任何一種添加劑皆可使用習知者。界面活性劑例如陰離子、陽離子、非離子系等之化合物,密接性提高劑例如習知的矽烷偶合劑,熱聚合禁止劑例如氫醌、氫醌單乙醚等,消泡劑例如矽系、氟系化合物等。The photosensitive resin composition of the present invention may contain an additive such as a surfactant, an adhesion improving agent, a thermal polymerization inhibiting agent, or an antifoaming agent as needed. Any one of the additives can be used by a person skilled in the art. The surfactant is a compound such as an anion, a cation or a nonionic system, a adhesion improving agent such as a conventional decane coupling agent, a thermal polymerization inhibiting agent such as hydroquinone or hydroquinone monoethyl ether, and an antifoaming agent such as an anthraquinone or a fluorine-based agent. Compounds, etc.

<感光性樹脂組成物之調製方法><Modulation Method of Photosensitive Resin Composition>

本發明之感光性樹脂組成物、可使前述各成份以3條輥磨、球磨、砂磨等之攪拌機混合(分散‧混練),且視其所需以5μm之薄膜過濾器等之過濾器進行過濾,予以調製。In the photosensitive resin composition of the present invention, the above-mentioned respective components may be mixed (dispersed, kneaded) by a three-roll mill, a ball mill, a sand mill or the like, and a filter such as a membrane filter of 5 μm is required. Filter and modulate.

<<液晶面板>><<LCD panel>>

本發明之液晶面板,係具有由感光性樹脂組成物所形成的間隔物者。除間隔物外之點,由於與一般的液晶面板相同,於下述中僅說明有關間隔物之形成方法。The liquid crystal panel of the present invention has a spacer formed of a photosensitive resin composition. The point other than the spacer is the same as that of a general liquid crystal panel, and only the method of forming the spacer will be described below.

首先,在形成有間隔物之基板上,使用輥塗佈器、可逆式塗佈器、棒塗佈器等之接觸複印型塗佈裝置或旋轉器(回轉式塗佈裝置)、簾幕流動塗佈器等之非接觸型塗佈裝置,塗佈本發明之感光性樹脂組成物且予以乾燥,藉由除去溶劑,形成感光性樹脂層。First, on a substrate on which a spacer is formed, a contact copy type coating device or a rotator (rotary coating device) using a roll coater, a reversible coater, a bar coater, or the like, a curtain flow coating In the non-contact type coating apparatus such as a cloth, the photosensitive resin composition of the present invention is applied and dried, and a solvent is removed to form a photosensitive resin layer.

其次,經由負型光罩,在感光性樹脂層上照射紫外線、準分子雷射光等之活性能量線,進行部份曝光處理。於曝光時,可使用高壓水銀燈、超高壓水銀燈、氙氣燈,碳弧燈等發出紫外線之光源。曝光量亦可視感光性樹脂組成物之組成而不同、例如以約50~600mJ/cm2 較佳。Next, the photosensitive resin layer is irradiated with an active energy ray such as ultraviolet rays or excimer laser light through a negative mask to perform partial exposure processing. When exposed, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, a carbon arc lamp, or the like can be used to emit ultraviolet light. The amount of exposure may vary depending on the composition of the photosensitive resin composition, and is preferably, for example, about 50 to 600 mJ/cm 2 .

然後,藉由使曝光後之感光性樹脂層以顯影液進行顯影,形成間隔物。顯影方法沒有特別的限制,可使用浸漬法、噴霧法等。顯影液之具體例,如單乙醇胺、二乙醇胺、三乙醇胺等之有機系者、或氫氧化鈉、氫氧化鉀、碳酸鈉、氨水、4級銨鹽等之水溶液。本發明之感光性樹脂組成物,由於具有適度的顯影性,故可適度地進行顯影。Then, the photosensitive resin layer after the exposure is developed with a developing solution to form a spacer. The developing method is not particularly limited, and a dipping method, a spraying method, or the like can be used. Specific examples of the developer include an organic system such as monoethanolamine, diethanolamine or triethanolamine, or an aqueous solution of sodium hydroxide, potassium hydroxide, sodium carbonate, aqueous ammonia or a quaternary ammonium salt. Since the photosensitive resin composition of the present invention has moderate developability, development can be appropriately performed.

其次,在顯影後之間隔物上實施後烘烤處理,予以加熱硬化。後烘烤處理之溫度以150~250℃較佳。Next, a post-baking treatment is performed on the spacer after development to heat-harden. The temperature of the post-baking treatment is preferably 150 to 250 °C.

該使用本發明之感光性樹脂組成物所形成的間隔物,破壞強度高、且形狀或對基板之密接性亦佳。而且,由於比介電常數低,在配列基板上形成間隔物時為有效。The spacer formed using the photosensitive resin composition of the present invention has high breaking strength and good shape or adhesion to the substrate. Further, since the specific dielectric constant is low, it is effective when a spacer is formed on the array substrate.

於下述中,藉由實施例更詳細地說明本發明,惟本發明不受此等實施例所限制。In the following, the invention is illustrated in more detail by the examples, but the invention is not limited by the examples.

[實施例][Examples] <實施例1~5、比較例1~3><Examples 1 to 5 and Comparative Examples 1 to 3>

使下述表1所示之各成份混合,溶解於溶劑中,調製感光性樹脂組成物。Each component shown in the following Table 1 was mixed and dissolved in a solvent to prepare a photosensitive resin composition.

於表1中,各簡稱各如下所示,刮號內之數值為配合量(質量份)。In Table 1, each abbreviation is as follows, and the numerical value in the scratch is the compounding amount (parts by mass).

(A)-1:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸3,4-環氧基環己基甲酯=60:20:20(質量比)之樹脂(質量平均分子量13000)(A)-1: glycidyl methacrylate: methacrylic acid: 3,4-epoxycyclohexylmethyl methacrylate = 60:20:20 (mass ratio) resin (mass average molecular weight 13000)

(A)-2:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸2,3-環氧基環戊基甲酯=60:20:20(質量比)之樹脂(質量平均分子量15000)(A)-2: glycidyl methacrylate: methacrylic acid: 2,3-epoxycyclopentyl methyl methacrylate = 60:20:20 (mass ratio) of resin (mass average molecular weight 15000) )

(A)-3:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸三環癸酯=72:18:10(質量比)之樹脂(質量平均分子量14000)(A)-3: Glycidyl methacrylate: methacrylic acid: tricyclodecyl methacrylate = 72:18:10 (mass ratio) of resin (mass average molecular weight 14000)

(A)-4:甲基丙烯酸環氧丙酯:甲基丙烯酸=80:20(質量比)之樹脂(質量平均分子量15000)(A)-4: Glycidyl methacrylate: methacrylic acid = 80:20 (mass ratio) resin (mass average molecular weight 15000)

(A)-5:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸異丁酯=72:18:10(質量比)之樹脂(質量平均分子量15000)(A)-5: Glycidyl methacrylate: methacrylic acid: isobutyl methacrylate = 72:18:10 (mass ratio) resin (mass average molecular weight 15000)

(A)-6:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸三環癸酯=71:20:9(質量比)之樹脂(質量平均分子量12800)(A)-6: Glycidyl methacrylate: methacrylic acid: tricyclodecyl methacrylate = 71:20:9 (mass ratio) of resin (mass average molecular weight 12,800)

(A)-7:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基丙烯酸3,4-環氧基環己基甲酯:甲基丙烯酸三環癸酯=35.5:20:35.5:9(質量比)之樹脂(質量平均分子量11000)(A)-7: glycidyl methacrylate: methacrylic acid: 3,4-epoxycyclohexylmethyl methacrylate: tricyclodecyl methacrylate = 35.5:20:35.5:9 (mass Resin (mass average molecular weight 11000)

(B)-1:六丙烯酸二季戊四醇酯(DPHA)(B)-1: Dipentaerythritol hexaacrylate (DPHA)

(C)-1:2-甲基-1-(4-甲基硫代苯基)-2-嗎啉基丙烷-1-酮(千葉特殊化學公司製「IRGACURE 907」)(C)-1: 2-methyl-1-(4-methylthiophenyl)-2-morpholinylpropan-1-one ("IRGACURE 907", manufactured by Chiba Specialty Chemical Co., Ltd.)

(C)-2:2-苯甲基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1(千葉特殊化學公司製「IRGACURE 369」)(C)-2: 2-Benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butanone-1 ("IRGACURE 369", manufactured by Chiba Specialty Chemical Co., Ltd.)

(C)-3:乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]、1-(o-乙醯基肟)(千葉特殊化學公司製「IRGACURE OXE02」)(C)-3: Ethylketone, 1-[9-ethyl-6-(2-methylbenzylidenyl)-9H-indazol-3-yl], 1-(o-ethylindenyl) ("IRGACURE OXE02" by Chiba Specialty Chemical Co., Ltd.)

(S)-1:PGMEA/二乙二醇甲基乙醚/3-甲氧基丙酸甲酯=22/22/56(質量比)之混合溶劑(S)-1: a mixed solvent of PGMEA/diethylene glycol methyl ether/3-methoxypropionate methyl ester=22/22/56 (mass ratio)

(S)-2:PGMEA/二乙二醇甲基乙醚=50/50(質量比)之混合溶劑(S)-2: PGMEA/diethylene glycol methyl ether = 50/50 (mass ratio) mixed solvent

<評估><evaluation> [顯影性評估][developability evaluation]

在6吋之玻璃基板(Dow Corning公司製、1737玻璃)上,塗佈以前述各實施例及比較例所調製的感光性樹脂組成物後,在100℃下進行乾燥2分鐘,製得具有膜厚為3.8μm之感光性樹脂層。其次,在該感光性樹脂層上經由負型光罩進行選擇性照射紫外線,使用0.5%之氫氧化四甲銨水溶液作為顯影液,藉由在23℃下進行攪拌顯影,形成點狀圖案。其次,藉由計測至未曝光部被完全溶解的時間(BP:斷點),評估顯影性。結果如表2所示。The photosensitive resin composition prepared in each of the above Examples and Comparative Examples was applied onto a 6-inch glass substrate (manufactured by Dow Corning Co., Ltd., 1737 glass), and then dried at 100 ° C for 2 minutes to obtain a film. A photosensitive resin layer having a thickness of 3.8 μm. Next, on the photosensitive resin layer, ultraviolet light was selectively irradiated through a negative mask, and a 0.5% aqueous solution of tetramethylammonium hydroxide was used as a developing solution, and a dot pattern was formed by stirring and developing at 23 °C. Next, the developability was evaluated by measuring the time (BP: breakpoint) at which the unexposed portion was completely dissolved. The results are shown in Table 2.

[密接性評估][Adhesion evaluation]

與前述「顯影性評估」相同地,形成點狀圖案。顯影時間係以前述之斷點(BP)為基準,為BP×1.5。然後,以純水洗淨,且對所形成的圖案而言,在100℃下實施後烘烤處理10分鐘,再於220℃下實施後烘烤處理40分鐘,形成點狀圖案。A dot pattern is formed in the same manner as the "developability evaluation" described above. The development time is BP × 1.5 based on the aforementioned break point (BP). Then, it was washed with pure water, and the formed pattern was subjected to post-baking treatment at 100 ° C for 10 minutes, and then post-baking treatment at 220 ° C for 40 minutes to form a dot pattern.

然後,以使光罩尺寸再現時必要的最適曝光量(EOP)、及曝光量50mJ/cm2 ,調查可顯影的點狀圖案尺寸,進行密接性之評估。結果如表2所示。而且,表2中之「無」係指顯影後、即使為20μm之圖案尺寸,仍沒有被密接而產生圖案被剝離的情形。Then, the optimum dot exposure (EOP) necessary for reproducing the mask size and the exposure amount of 50 mJ/cm 2 were examined, and the dot pattern size which can be developed was examined, and the adhesion was evaluated. The results are shown in Table 2. Further, "None" in Table 2 means a case where the pattern is peeled off even if it is 20 μm after development, and the pattern is peeled off.

[形狀評估][Shape evaluation]

曝光量為前述EOP,與前述「密接性評估」相同地形成直徑15μm之點狀圖案。然後,以SEM觀察圖案形狀,以下基準進行評估。結果如表2所示。The exposure amount was the above EOP, and a dot pattern having a diameter of 15 μm was formed in the same manner as the above-mentioned "adhesion evaluation". Then, the shape of the pattern was observed by SEM, and the following criteria were evaluated. The results are shown in Table 2.

○:表面沒有粗糙的良好形狀。○: The surface has no rough and good shape.

△:表面有粗糙情形。△: The surface has a rough condition.

×:表面及側面之凹凸大。可見溶出殘渣。×: The surface and the side surface have large irregularities. The dissolution residue can be seen.

[比介電常數評估][Specific dielectric constant evaluation]

曝光量為前述EOP,與前述「密接性評估」相同地形成直徑15μm之點狀圖案。然後,使用介電常數測定裝置SSM495(日本SSM股份有限公司製),測定點狀圖案之膜厚方向對真空之比介電常數。結果如表2所示。The exposure amount was the above EOP, and a dot pattern having a diameter of 15 μm was formed in the same manner as the above-mentioned "adhesion evaluation". Then, using a dielectric constant measuring device SSM495 (manufactured by Nippon SSM Co., Ltd.), the dielectric constant of the film thickness direction of the dot pattern to the vacuum was measured. The results are shown in Table 2.

由表2可知,使用具有由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位、及含有脂環式環氧基之不飽和化合物或含有脂環式基之不飽和化合物所衍生的構成單位之樹脂的各實施例,具有斷點為15~30秒之適度顯影性。而且,可以50mJ/cm2 之曝光量,使9~15μm之點狀圖案予以顯影等,密接性優異,圖案形狀亦佳。而且,有關實施例1~3,比介電常數較比較例1、2更低。而且,實施例4、5之比介電常數,與比較例3相比時,為同等以下之低值。As is clear from Table 2, a constituent unit derived from an unsaturated compound containing an epoxy group having no alicyclic group, and an unsaturated compound containing an alicyclic epoxy group or an unsaturated compound containing an alicyclic group are used. Each of the examples of the resin of the constituent unit derived has a moderate developability with a break point of 15 to 30 seconds. Further, the dot pattern of 9 to 15 μm can be developed by an exposure amount of 50 mJ/cm 2 , and the adhesion is excellent, and the pattern shape is also good. Further, in Examples 1 to 3, the specific dielectric constant was lower than Comparative Examples 1 and 2. Further, the specific dielectric constants of Examples 4 and 5 were lower than the equivalent values of Comparative Example 3.

對此而言,使用不具脂環式基之樹脂的各比較例,斷點未達10秒之短時間,顯影耐性惡化。而且,無法以50mJ/cm2 之曝光量形成圖案,且密接性低。此外,以EOP予以曝光時,圖案形狀不佳,且確認比較例3中因溶出殘渣而導致形狀不佳的情形。On the other hand, in each of the comparative examples using the resin having no alicyclic group, the breakage point was less than 10 seconds, and the development resistance was deteriorated. Further, the pattern cannot be formed with an exposure amount of 50 mJ/cm 2 and the adhesion is low. Further, when exposed by EOP, the pattern shape was not good, and the case where the shape was poor due to the elution residue in Comparative Example 3 was confirmed.

Claims (5)

一種感光性樹脂組成物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合引發劑(C)之感光性樹脂組成物,其特徵為前述鹼可溶性樹脂(A)為具有由不飽和羧酸所衍生的構成單位(a1)、由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位(a2)、及由含有脂環式環氧基之不飽和化合物所衍生的構成單位(a3),且前述構成單位(a2)之比例與前述構成單位(a3)之比例的合計量為71質量%以上,前述構成單位(a3)之比例為20~60質量%。 A photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), characterized in that the alkali-soluble resin (A) It is a constituent unit (a1) derived from an unsaturated carboxylic acid, a constituent unit (a2) derived from an unsaturated compound having an epoxy group having no alicyclic group, and an alicyclic epoxy group. The constituent unit (a3) derived from the unsaturated compound, and the total ratio of the ratio of the constituent unit (a2) to the constituent unit (a3) is 71% by mass or more, and the ratio of the constituent unit (a3) is 20%. 60% by mass. 一種感光性樹脂組成物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合引發劑(C)之感光性樹脂組成物,其特徵為前述鹼可溶性樹脂(A)為具有由不飽和羧酸所衍生的構成單位(a1)、由含有不具脂環式基之環氧基的不飽和化合物所衍生的構成單位(a2)、及由含有脂環式基之不飽和化合物所衍生的構成單位(a4),且前述構成單位(a2)之比例為71質量%以上。 A photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), characterized in that the alkali-soluble resin (A) It is a constituent unit (a1) derived from an unsaturated carboxylic acid, a constituent unit (a2) derived from an unsaturated compound containing an epoxy group having no alicyclic group, and an unsaturated group containing an alicyclic group. The constituent unit (a4) derived from the compound, and the ratio of the above-mentioned constituent unit (a2) is 71% by mass or more. 如申請專利範圍第2項之感光性樹脂組成物,其中前述構成單位(a4)之比例為1~25質量%。 The photosensitive resin composition of claim 2, wherein the ratio of the constituent unit (a4) is 1 to 25% by mass. 如申請專利範圍第1~3項中任一項之感光性樹脂組成物,其係使用於形成液晶面板之間隔物(spacer)。 The photosensitive resin composition according to any one of claims 1 to 3, which is used for forming a spacer for a liquid crystal panel. 一種液晶面板,其特徵為具有由如申請專利範圍 第1至4項中任一項之感光性樹脂組成物所形成的間隔物。A liquid crystal panel characterized by having a patent application scope A spacer formed of the photosensitive resin composition according to any one of items 1 to 4.
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