TWI472695B - Vacuum system and throttle therefor - Google Patents

Description

Vacuum pumping system and its throttle valve

This case relates to a vacuum pumping system, especially a throttle valve used in a vacuum pumping system.

Please refer to Figure 1, which is a schematic diagram of a conventional throttle valve. Shown is a butterfly type throttle valve having a body 1 generally having a tubular shape for fluid to pass therethrough, and a butterfly plate 2 is pivotally disposed within the body 1, the butterfly plate 2 being generally A circular plate-like object having a diameter substantially equal to the inner diameter of the body 1 to achieve a completely closed effect. The purpose of throttling is achieved by controlling the rotation angle of the butterfly plate 2 in the body 1. Please refer to FIG. 1 , in which the butterfly plate 2 is rotated by an angle, so that a channel 3 is formed between the butterfly plate 2 and the body 1 . Since the direction of fluid movement is generally perpendicular to the plane of the drawing, the cross-sectional area of the channel 3 is only Consider the projected area. It can be seen from Fig. 1 that the calculation of the area of the channel 3 is relatively complicated, and the relationship between the change of the area of the channel 3 and the angle of rotation of the butterfly plate 2 is a non-linear relationship, and the butterfly throttle valve is practically The reproducibility of throttling control is poor.

Please refer to FIG. 2, which is another schematic diagram of a conventional throttle valve. The utility model comprises a fixing plate 10, which has a channel 3, wherein the channel 3 generally has a sector shape of a quarter circle, and the fixing plate 10 is covered with a rotating plate 11 and has a quarter circle thereon. The fan-shaped hollow, when the hollow is completely coincident with the passage 3, is 100% flow, and the state disclosed in Fig. 2 is that the rotating plate 11 partially covers the passage 3. The structure of the conventional throttle valve has a higher regenerative control than that of FIG. 1, and the cross-sectional area of the channel 3 is also excellent. However, since the passage 3 is not circular, it is actually a vacuum pumping system. In the pipe fitting, the conversion still needs to be converted to calculate the effective area through which the real fluid passes, and the channel 3 of FIG. 2 is closer to the elongated shape when the rotating plate 11 covers more channels 3, which increases The complexity and uncertainty of the cross-section transformation.

It can be seen that the relationship between the action of the throttle control mechanism of the prior art of FIG. 1 and FIG. 2 and the size of the opening area of the throttle valve exhibits a nonlinear change, and further, since the opening area is not circular, The estimation of the traffic is less accurate.

For this reason, the applicant invented the "throttle valve for vacuum devices" in view of the lack of the prior art to improve the lack of the above-mentioned conventional means.

The object of the present invention is to control the opening area of the throttle valve in the vacuum pumping system more effectively, more simply and more intuitively, that is, to make the shape of the opening of the throttle valve as close as possible to the circular shape, thus The opening area can be calculated relatively simply, and the relationship between the opening area and the mechanism can be relatively gentle, even if the relationship is nonlinear, it will not be too severe as the above-mentioned several conventional techniques. Variety.

In order to achieve the above object, the present invention provides a throttle valve including: a housing having an inlet portion and an outlet portion; and a plurality of shielding sheets each having a first end and a second end, The first end is pivotally disposed at the inlet portion, and the second end is a free end. Further, each of the shielding sheets further has a first side and a second side, wherein the adjacent shielding piece is partial overlapping.

a throttle valve as described above, wherein a first side of one of the plurality of shielding sheets covers another shielding sheet on the first side, and a second side of the shielding sheet of one of the shielding sheets is A further shielding sheet on the second side is covered.

The throttle valve as described above, wherein the plurality of shielding pieces further comprise a first shielding piece, a second shielding piece, and a third shielding piece, wherein the second side of the first shielding piece is the second shielding piece The first side of the shielding sheet is covered, and the second side of the second shielding sheet is covered by the first side of the third shielding sheet.

The throttle valve as described above, wherein each of the shielding sheets is annularly arranged at the inlet portion of the housing.

The throttle valve as described above, wherein an axial direction of a pivot of each of the shielding sheets at the inlet portion is a tangential direction of the inlet portion.

The throttle valve as described above, wherein the second end of each of the shielding sheets encloses a polygon.

In order to achieve the above object, the present invention further provides a throttle valve having a flower-like shape with a plurality of lobes pivotally connected to the ridge of the flower bud, and the cusps of each lobes are surrounded by a polygon, wherein The apex of the lobes forms an entrance and the pedicle is an outlet.

Preferably, wherein two adjacent ones of the plurality of lobes are partial overlaps.

Preferably, each of the plurality of petals has a right side and a left side, and the right side of either of the petals is covered by the left side of the right adjacent flap, and the left side of the one of the petals covers the right side of the left adjacent flap.

In order to achieve the above object, the present invention provides a vacuum pumping system comprising: a vacuum chamber; a first pumping pump, being electrically connected to the vacuum chamber for evacuating air in the vacuum chamber; and a high Pumping the pump, conducting with the vacuum chamber and the priming pump, for extracting air from the vacuum chamber from the pumping chamber and sending the pump to the priming pump, wherein the high pumping pump and the vacuum A vacuum throttle valve is further disposed between the chambers, and has an inlet portion and an outlet portion, and the vacuum throttle valve further includes a plurality of shielding plates pivotally connected to the outlet portion around the outlet portion.

In the above system, the pivoting direction of the plurality of shielding sheets is along a tangential direction of the outlet portion.

The system as described above, further comprising a preliminary pumping valve between the vacuum chamber and the priming pump; a back pressure valve electrically connected between the high pumping pump and the priming pump; a high vacuum valve is connected between the vacuum throttle valve and the high pumping pump; and a vacuum interrupting valve controls the conduction of the vacuum chamber to the outside atmosphere.

The following describes the various embodiments of the vacuum pumping system of the present invention and the throttle valve for the vacuum pumping system, please refer to the drawings, but the actual configuration and the method adopted do not have to completely conform to the described content. Those skilled in the art can make various changes and modifications without departing from the actual spirit and scope of the case.

Please refer to Figure 3 and Figure 4. 3 is a front view of the throttle valve not including the casing of the present invention; and FIG. 4 is a perspective view of the embodiment of FIG. 3. The base 4 is substantially an annular object, and the central portion of the base 4 is a base passage 41. The plurality of shielding pieces 5 are annularly arranged along the shape of the base 4, and the shielding piece 5 is pivotally connected to the base 4, and the axial direction of the pivoting is tangent to the circle presented by the base 4. The directions are parallel, so that each of the shielding pieces 5 can be rotated, so that the shielding piece 5 falls down toward the center of the base 4 to block the base passage 41, so that the throttling effect can be achieved. The first end 51 of each shielding piece 5 is pivotally connected to the base 4, and the second end 52 is a free end. The throttle valve shown in FIG. 3 and FIG. 4 is in a fully open state, but the second end 52 is faintly visible. The upper part is formed into a regular polygon. When the number of the shielding pieces 5 is larger, the regular polygon becomes closer to a circle, so the sectional area is better calculated, and the angle between the falling piece and the sectional area of the shielding piece 5 is between The relationship of change is better estimated, and the reproducibility is better than any conventional technique.

Referring to FIG. 3 and FIG. 4, the connection relationship between the shielding sheets 5 disclosed therein is in a state of being pressed one by one, that is, in the case of any one of the shielding sheets 5, the right side portion is the right side. The shielding piece 5 is covered, and the left part is a partial area covering the shielding piece 5 on the left side. Through this sequential overlapping and overlapping arrangement, the shielding piece 5 can be pulled together to enhance the shielding piece 5 The degree of control, in other words, reduces the control difficulty of the shutter 5. That is, it is theoretically possible to control all of the shielding sheets 5 by controlling only the inclination angle of the shielding piece 5 of a single piece. A more detailed description is to select three consecutive adjacent shutters 5 in all of the shutters 5 to provide a more direct explanation. The first shielding piece 5-1, the second shielding piece 5-2, and the third shielding piece 5-3, wherein the second side 5b of the first shielding piece 5-1 is visible by the second shielding piece 5-2 The first side 5a of the second shielding piece 5-2 is covered by the first side 5a of the third shielding piece 5-3.

Referring to FIG. 3 and FIG. 4 , it is also disclosed that a control rod 53 is connected to a shielding piece 5 . When the control rod 53 pushes or pulls the shielding piece 5 in the radial direction of the base channel 41 , the shielding piece 5 can be controlled. The action of the shielding piece 5 is a piece of pressing one piece, so that it has the effect of launching the whole body. As shown in Fig. 4, when the control rod 53 is pushed inward, the third shielding piece 5-3 will be squeezed. The second shielding piece 5-2 and the second shielding piece 5-2 are pressed to press the first shielding piece 5-1, and so on, and the respective shielding pieces 5 arranged in a ring shape are finally returned to the third shielding piece 5-3, that is, The shielding piece on the right side of the third shielding piece 5-3 in Fig. 4 will decompress the third shielding piece 5-3. Of course, in order to avoid the movement of the shielding sheets 5 due to manufacturing tolerances and assembly tolerances, the present invention may be provided with more than one control lever 53 and usually adopts an equal division setting, that is, if two controls are provided. For the rod 53, the angle between the two is one hundred and eighty degrees, and if three are set, the angle is one hundred and twenty degrees, and the rest is analogous.

Please refer to Figure 5 and Figure 6. 5 is a front view of the throttle valve not including the casing of the present invention; and FIG. 6 is a side view of the embodiment of FIG. 5. Different from the foregoing FIGS. 3 and 4, the throttle valve disclosed in FIG. 5 and FIG. 6 is in a fully closed state. It can be seen in Fig. 5 that all of the shielding sheets 5 have been collapsed with the first end 52 as the center of the pivoting axial throttle valve, and the second ends 52 of the respective shielding sheets 5 have been completely closed and abutted, thus presenting a full closure. status. From the side view shown in Fig. 6, it can be seen that the entire throttle valve substantially assumes a dome-shaped shape constructed by the respective shielding pieces 5 and the base 4. Please refer to FIG. 5 and FIG. 6 together, and please refer to FIG. 3 and FIG. 4, and it can be seen that when the control rod 53 has pushed the shielding piece 5 to the bottom in the radial direction of the base 4 toward the base channel 41, all the shielding can be controlled. The sheet 5 is gathered in the center of the throttle valve. In contrast, referring to FIG. 3, if the control rod 53 has pulled the shielding piece 5 in the radial direction of the base 4 in the direction away from the base passage 41, all the shielding pieces 5 can be controlled from the throttle valve. Originally in the state of being gathered in the center, it becomes expanded, so that the entire base passage 41 is completely unobstructed without being blocked by the shielding piece 5.

As can be seen from the above-mentioned Figs. 3 to 6, the throttle valve of the present invention can maintain the shape of the valve opening to maintain a substantially perfect circular shape, especially in the case where the number of the shielding sheets 5 is large, even if the number of the shielding sheets 5 is small. For example, in the case of six to ten sheets, the second end 52 of each of the shielding sheets 5 can still be a regular polygon, and the calculation of the area is very simple with respect to various conventional techniques, regardless of the inclination of the shielding sheet 5. What is the angle, all the second ends 52 will still form a regular polygon, that is, the side length of the polygon will change, but the angle between the sides is constant, and the length of each polygon is changed together, so the occlusion piece 5 The change in the tilt angle only changes the area of the regular polygon but does not change the shape.

Please refer to FIG. 7, which is a cross-sectional view of the throttle valve of the present invention, showing an embodiment of full opening or full closing. It can be seen that the throttle valve 6 mainly has a casing 60, which is mainly used for supporting the pipeline connection with the vacuum pumping system. The base 4 is fixed to the outlet portion 62, and the opposite side is an inlet portion 61. When the shielding sheet 5 is in the fully open position P1, the diameter of the space surrounded by the second ends 52 is greater than or equal to the inlet. The diameter of the portion 61. When the shielding piece 5 is in the fully closed position P2, the two opposing shielding pieces 5 abut against the central portion of the throttle valve 6. Of course, in reality, due to the problem of tolerance and precision, and the thickness of the shielding piece 5 itself, the area of the polygon surrounded by the second end 52 of each shielding piece 5 in the fully closed state of the throttle valve 6 is sometimes Not zero, but because this throttle valve 6 is used in the vacuum pumping system, it is actually in the category of molecular dynamics under the state of near vacuum, and it is quite different from the hydrodynamics of giant view, so even in A small space is left in the area surrounded by the second ends 52, which is closed for the vacuum pumping system, that is, the vacuum throttle shielding function is still provided at this time, in other words, the gas molecules cannot pass.

In addition, as can be seen from FIG. 3 to FIG. 7, the throttle valve of the present invention can be said to have a shape similar to a flower bud, and is particularly similar to the flower bud of the lotus family, and each of the visor 5 is very similar to the lobes, and looks like a lobes. Each of the shielding pieces 5 is pivotally connected to the ridge of the flower raft, that is, the base 4 of FIG. 3 to FIG. 6, and each of the shielding pieces 5, that is, the cusps similar to the respective lobes, can be enclosed into a regular polygon as the airflow during evacuation. The inlet portion 61 of the throttle valve is inserted, and the base portion 4 corresponding to the function of the pedicle is formed with an outlet portion 62. Like a flower bud, adjacent lobes have overlapping portions, and this application in the throttle valve has the effect of blocking the passage of gas molecules.

Please refer to FIG. 8 , which is a schematic diagram of a vacuum pumping system of the present invention. A vacuum pumping system 7 is disclosed, the main purpose of which is to evacuate a vacuum chamber 70. When the system is in a completely stopped state, the vacuum throttle valve 6 is fully open. In fact, each valve is normally closed. Type valve. The vacuuming process first starts the priming pump 71, and the priming pump 71 is used to perform preliminary pumping of the vacuum chamber 70, usually to cope with higher density air, and to save time and blast volume. Then, after the pump 71 is started, the priming valve 710 disposed between the vacuum chamber 70 and the priming pump 71 is opened, and the gas in the vacuum chamber 70 is initially The suction of the pump 71 is withdrawn from the vacuum chamber 70, and the gas is discharged into the atmosphere after it reaches the priming pump 71. Due to the structural design limitation of the priming pump 71, when the pressure of the vacuum chamber 70 drops to about 5x10 ^-2 torr, the pumping efficiency of the priming pump 71 is greatly reduced, so that the priming valve 710 is closed at this time. And open the back pressure valve 73 between the high pumping pump 72 and the priming pump 71, and start the high pumping pump 72 warming machine, after the warming up is completed, it will be located in the high pumping pump 72 and vacuum section The high vacuum valve 720 between the flow valves 6 is opened, at which time the vacuum throttle valve 6 is fully open. Due to the pumping of the high pumping pump 72, the pressure of the vacuum chamber 70 is further reduced to about 5 x 10 ^-5 torr, and various processes can be performed in the vacuum chamber 70 at this time. For example, a specific gas or atmosphere is introduced into the vacuum chamber 70. At this time, the pressure of the vacuum chamber 70 is controlled by the vacuum throttle valve 6, and the pressure is usually maintained at about 5 x 10 ^-3 torr. When the process ends to stop the vacuum pumping system, the process is reversed, and finally the vacuum valve 74 is opened to allow air to enter the vacuum chamber 70 from the atmosphere.

In summary, the throttle valve of the present invention can accurately control the area size of the valve opening, and the shape of the opening can be maintained from full open to fully closed without deformation or skew. The idea of the present invention is how to maintain the shape of the regular polygonal shape in which the valve opening is always kept circular or nearly circular, so that the valve opening area can be calculated very simply, so that the mechanism for operating the valve opening is operated and the opening area is The relationship between the two can be changed more simply, so that the area of the valve opening can be accurately reproduced every time, and the advantages of the vacuum pumping system are simpler, more intuitive and more accurate. The present invention has a significant contribution to the vacuum pumping system technology.

The above-described embodiments are merely examples for the convenience of the description, and those skilled in the art will be modified as described above, and are not intended to be protected as claimed.

1. . . Ontology

10. . . Fixed plate

11. . . Rotating plate

2. . . Butterfly board

3. . . aisle

4. . . Base

41. . . Base opening

5. . . Occlusion piece

51. . . First end

52. . . Second end

53. . . Controller

5a. . . First side

5b. . . Second side

5-1. . . First occlusion piece

5-2. . . Second occlusion piece

5-3. . . Third occlusion piece

6. . . case

61. . . Entrance

62. . . Export Department

7. . . Vacuum pumping system

70. . . Vacuum chamber

71. . . Priming pump

710. . . Initial pump

72. . . High pump

720. . . High vacuum valve

73. . . Back pressure valve

74. . . Broken vacuum valve

P1. . . Fully open position

P2. . . Fully closed position

Figure 1 is a schematic view of a conventional throttle valve;

Figure 2 is a schematic view of another conventional throttle valve;

Figure 3 is a front elevational view of the throttle valve of the present invention without a housing;

Figure 4 is a perspective view of the embodiment of Figure 3;

Figure 5 is a front elevational view of the throttle valve of the present invention without a housing;

Figure 6 is a side elevational view of the embodiment of Figure 5;

Figure 7 is a side cross-sectional view showing an embodiment of the throttle valve of the present invention;

Figure 8 is a schematic view of a vacuum pumping system of the present invention.

4. . . Base

5. . . Occlusion piece

51. . . First end

52. . . Second end

53. . . Controller

5a. . . First side

5b. . . Second side

5-1. . . First occlusion piece

5-2. . . Second occlusion piece

5-3. . . Third occlusion piece

Claims (9)

A throttle valve includes: a housing having an inlet portion and an outlet portion; and a plurality of three-dimensional shielding sheets, each shielding sheet having a first end and a second end, the first end being pivoted The entrance portion, and the second end is a free end, and each of the shielding sheets further has a first side and a second side, wherein the adjacent shielding pieces are partially overlapped, and each of the shielding pieces The axial direction of the pivot at the inlet portion is the tangential direction of the inlet portion. The throttle valve of claim 1, wherein the first side of one of the plurality of shielding sheets covers another shielding piece on the first side, and the shielding piece of the one of the shielding pieces The second side is covered by a further shielding sheet on the second side. The throttle valve of claim 1, wherein at least one of each of the shielding sheets is connected to a control rod. The throttle valve of claim 1, wherein each of the shielding sheets is annularly arranged at the inlet portion of the housing. The throttle valve of claim 1, wherein the second end of each of the shielding sheets encloses a regular polygon. A throttle valve is in the shape of a lotus flower, having a plurality of three-dimensional flaps pivotally connected to the pedicle of the flower bud, and the cusps of each lobes enclose a regular polygon, wherein the cusps of each flap enclose the cusp The polygon forms an inlet portion, and the pedicle is an outlet portion. The adjacent two lobes of the plurality of lobes are partially overlapped, and the axial direction of each of the lobes of the lobes at the outlet portion is The tangential direction of the exit portion. The throttle valve of claim 6, wherein each of the plurality of petals has a right side and a left side, and the right side of either of the petals is covered by the left side of the right adjacent flap, and the one of the petals The left side covers the right side of the left adjacent flap. The throttle valve of claim 6, wherein at least one of the flaps is coupled to a lever. A vacuum pumping system comprising: a vacuum chamber; a first pumping pump, electrically connected to the vacuum chamber to evacuate air in the vacuum chamber; and a high pumping pump, and the vacuum chamber And the priming pump is turned on to evacuate the air of the vacuum chamber from the middle pump to the priming pump, wherein a vacuum is further disposed between the high pumping pump and the vacuum chamber The throttle valve includes a casing having an inlet portion and an outlet portion, and the vacuum throttle valve further includes a plurality of three-dimensional shielding plates pivotally connected to the outlet portion around the outlet portion, and the adjacent shielding piece is a portion The overlapping of the pivot axes of the shielding sheets at the outlet portion is the tangential direction of the outlet portion.