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TWI470208B - Vision illumination apparatus for semi-translucent device - Google Patents

Vision illumination apparatus for semi-translucent device Download PDF

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Publication number
TWI470208B
TWI470208B TW100127197A TW100127197A TWI470208B TW I470208 B TWI470208 B TW I470208B TW 100127197 A TW100127197 A TW 100127197A TW 100127197 A TW100127197 A TW 100127197A TW I470208 B TWI470208 B TW I470208B
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translucent
light source
annular
light
illumination
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TW100127197A
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Chinese (zh)
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TW201231956A (en
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Thian-Hui Lee
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Vitrox Corp Berhad
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Description

半透明裝置之視覺照明設備Visual lighting equipment for translucent devices

本發明提供一種半透明裝置之視覺照明設備,包括:至少二光源作為照明裝置以及至少一攝影裝置,該攝影裝置能夠照亮該半透明裝置的整個缺陷區(defect area),且無論該半透明裝置缺陷區的形狀或深度如何,以取得一精確且可靠的檢測結果。The present invention provides a visual illumination device for a translucent device, comprising: at least two light sources as illumination devices and at least one photographic device capable of illuminating the entire defect area of the translucent device, and regardless of the translucency What is the shape or depth of the defect area of the device to achieve an accurate and reliable test result.

為了確保電子元件或裝置不存在缺陷,以及為了正確放置在電子工業領域被認為是至關重要的電子元件,形成在生產線上檢測該些電子元件之需求,而檢測裝置則可根據使用者的需求分為自動或半自動裝置。In order to ensure that electronic components or devices are free of defects, and in order to properly place electronic components that are considered to be critical in the electronics industry, the need to detect such electronic components on the production line is formed, and the detection device can be adapted to the needs of the user. Divided into automatic or semi-automatic devices.

對於具有習知黑色化合物的電子元件,其封裝面的檢測通常是在裝置的淺表面上完成的,以檢測其不完全填充/切碎、雜質、污染物、封裝裂縫、封裝面刮痕、晶片樹脂和引線暴露等缺陷。對於使用可透光之透明材料製成的模塑複合物的電子元件,並非所有的缺陷區都出現在裝置的淺表面上。其缺陷有如在淺表面上是看不見的氣泡,且非所有的半透明裝置的封裝缺陷都可以經由習知適用於淺表面檢測的視覺照明設備的照明而顯現出來。另外,照明效果對於出現在半透明裝置中的同類型缺陷並不一致,且隨該缺陷的形狀和深度而產生變化。換句話說,習知照明設備用於檢測半透 明裝置時,其所使用的高角度環形光源、低角度環形光源和同軸光源係適用於照亮如切口缺陷之主要缺陷,因而造成有缺陷的半透明裝置被誤認為良品。基於電子工業之成本考量,該半透明裝置的製造商訂定嚴格要求,以增加使用該類習知照明設備檢驗時的正確度。For electronic components with conventional black compounds, the inspection of the package surface is usually done on the shallow surface of the device to detect incomplete filling/shredding, impurities, contaminants, package cracks, package surface scratches, wafers. Defects such as resin and lead exposure. For electronic components using molding compounds made of a transparent material that is transparent to light, not all defective regions appear on the shallow surface of the device. The defects are as invisible bubbles on a shallow surface, and the packaging defects of not all translucent devices can be visualized by the illumination of a conventional visual illumination device suitable for shallow surface detection. In addition, the illumination effect is inconsistent with the same type of defects that appear in the translucent device, and varies with the shape and depth of the defect. In other words, conventional lighting equipment is used to detect semi-transparent The high-angle annular light source, low-angle annular light source, and coaxial light source used in the device are suitable for illuminating major defects such as slit defects, thereby causing defective translucent devices to be mistaken for good products. Based on the cost considerations of the electronics industry, manufacturers of such translucent devices set stringent requirements to increase the accuracy of inspections using such conventional lighting devices.

因此,通過製造一種無論該半透明裝置缺陷區的形狀或深度如何,皆可照亮整個缺陷區的視覺檢測照明設備,以確保精確且可靠的檢測,並克服低檢測正確度(under-rejection)之問題。Thus, by fabricating a visual inspection illumination device that illuminates the entire defect area regardless of the shape or depth of the defect area of the translucent device, to ensure accurate and reliable detection, and to overcome under-rejection. The problem.

本發明的主要目的在於提供一種半透明裝置之視覺照明設備,其利用組合光源來檢測該半透明裝置的淺表面上的缺陷。It is a primary object of the present invention to provide a visual illumination device for a translucent device that utilizes a combined light source to detect defects on the shallow surface of the translucent device.

本發明的另一目的在於提供一種半透明裝置之視覺照明設備,其可照亮該半透明裝置的整個缺陷區(defect area),且無論該半透明裝置缺陷區的形狀或深度如何。Another object of the present invention is to provide a visual illumination device for a translucent device that illuminates the entire defect area of the translucent device, regardless of the shape or depth of the defect region of the translucent device.

本發明的又一目的在於提供一種半透明裝置之視覺照明設備,其可檢測大部分封裝缺陷,包括不完全填充/切碎、雜質、污染物、封裝裂縫、氣泡、封裝面刮痕、晶片樹脂(chip resin)、引線暴露及襯墊漏檢(missing pad inspection)。It is still another object of the present invention to provide a visual illumination device for a translucent device that can detect most package defects, including incomplete filling/shredding, impurities, contaminants, package cracks, air bubbles, package surface scratches, wafer resin (chip resin), lead exposure, and missing pad inspection.

本發明的又一目的在於提供一種半透明裝置之視覺照明設備,其可確保精確且可靠的檢測,以克服低檢測正確度 (under-rejection)之問題。It is still another object of the present invention to provide a visual illumination device for a translucent device that ensures accurate and reliable detection to overcome low detection accuracy (under-rejection) problem.

本發明的又一目的在於提供一種多功能的半透明裝置之視覺照明設備,其係具有多用途,而可如同複合視覺檢測標準以相同設備可靠且同時執行。It is a further object of the present invention to provide a versatile translucent device visual illumination device that is versatile and that can be reliably and simultaneously executed with the same device as a composite visual inspection standard.

透過下面的詳細說明以及本發明的實施例可清楚地瞭解本發明的其他目的。Other objects of the present invention will be apparent from the following detailed description and embodiments of the invention.

本發明其中一實施例提供一種半透明裝置之視覺檢測照明設備,包括至少一照明裝置以及至少一攝影裝置,其特徵在於:One embodiment of the present invention provides a visual inspection illumination device for a translucent device, comprising at least one illumination device and at least one imaging device, characterized in that:

該照明裝置設有至少二光源,至少其中一光源設有至少一分光裝置。The lighting device is provided with at least two light sources, at least one of which is provided with at least one light splitting device.

為使貴審查委員對本發明之目的、特徵及功效能夠有更進一步之瞭解與認識,以下茲請配合【圖式簡單說明】詳述如后:In order to enable your review committee to have a better understanding and understanding of the purpose, features and effects of the present invention, please refer to the following [simplified description of the drawings] for details:

請配合參閱第1圖所示,係為本發明半透明裝置之視覺照明設備較佳實施例之透視示意圖,其中,至少一光路來自該設備之光源及該光路之反射光。該較佳實施例包含至少一具有組合光源的視覺檢測照明裝置2、至少一攝影裝置4及至少一分光裝置6。該視覺檢測照明裝置2以具有至少二光源為佳,且較佳為一同軸光源2A(on-axis coaxial light source)及一環形光源2B(ring light source)。該環形光源2B包括複 數個設於一環形光罩8內之發光二極體22(以下簡稱LED),該環形光罩8較佳為圓柱形且朝向一待檢測之半透明裝置10。形成本發明環形光源2B之LED 22除了設於圓柱形之環形光罩8外,還可設於其他幾何形狀的環形光罩8內,以達到產生高檢測可靠度之擴散環形光之目的。為了達到最佳照明效果,LED 22與該環形光罩8之一基座8A之間具有30至60度之設置角度,但是其他範圍被認為也是可能的。該環形光罩8設有一環形光罩穿孔8C供鄰近該環形光罩8之該同軸光源2A的光線通過,以照亮一目標區便於進行檢測,並使反射光到達該攝影裝置4之一透鏡5,該攝影裝置4以一照相機為較佳。該環形光罩穿孔8C以具有10公釐乘以10公釐之截面積為較佳。來自該環形光源2B的光將通過至少一分光裝置6,以產生如第1圖光路所示之擴散環型光B,且該分光裝置6較佳為一擴散器(diffuser)。該擴散器6以具有類似於該環形光罩8之形狀者為較佳,以令該擴散器6設於該環形光罩8相對的該基座8A的邊緣8B上。該擴散器6並設有一中央穿孔61(central aperture),當該擴散器6與該環形光罩8相連接時,該環形光罩8之該環形光罩穿孔8C與該擴散器6之該中央穿孔61成一直線,以令來自該同軸光源2A的光與該反射光C通過並分別進入該待檢測之半透明裝置10及該攝影裝置4。於本實施例中,該擴散器6之形狀雖為圓形,然而應被理解的是,其他能與該環形 光罩8之該邊緣8B形狀相符的幾何形狀,即具有產生同樣用於檢測目的之擴散環形光之能力。Please refer to FIG. 1 , which is a schematic perspective view of a preferred embodiment of a visual illumination device for a translucent device of the present invention, wherein at least one optical path is derived from a light source of the device and reflected light from the optical path. The preferred embodiment comprises at least one visual inspection illumination device 2 having a combined light source, at least one imaging device 4 and at least one light splitting device 6. The visual inspection illumination device 2 preferably has at least two light sources, and is preferably an on-axis coaxial light source 2A and a ring light source 2B. The ring light source 2B includes a complex A plurality of light-emitting diodes 22 (hereinafter referred to as LEDs) disposed in an annular mask 8 are preferably cylindrical and oriented toward a translucent device 10 to be inspected. The LED 22 forming the annular light source 2B of the present invention can be disposed in the annular mask 8 of other geometric shapes in addition to the cylindrical annular mask 8 to achieve the purpose of generating high detection reliability and diffusing annular light. In order to achieve an optimum illumination effect, the LED 22 has an angle of arrangement of 30 to 60 degrees with one of the bases 8A of the annular reticle 8, but other ranges are considered to be possible. The annular reticle 8 is provided with an annular reticle perforation 8C for the light of the coaxial light source 2A adjacent to the annular reticle 8 to illuminate a target area for detection and to cause the reflected light to reach a lens of the photographic device 4. 5. The photographing device 4 is preferably a camera. Preferably, the annular reticle perforation 8C has a cross-sectional area of 10 mm by 10 mm. Light from the annular light source 2B will pass through at least one of the light splitting means 6 to produce a diffusing ring type light B as shown in the first optical path, and the light splitting means 6 is preferably a diffuser. Preferably, the diffuser 6 has a shape similar to that of the annular reticle 8 such that the diffuser 6 is disposed on the edge 8B of the base 8A opposite the annular reticle 8. The diffuser 6 is also provided with a central aperture 61. When the diffuser 6 is connected to the annular mask 8, the annular mask aperture 8C of the annular mask 8 and the center of the diffuser 6 The perforations 61 are in line so that the light from the coaxial light source 2A and the reflected light C pass through and enter the translucent device 10 and the photographing device 4 to be detected, respectively. In the present embodiment, the shape of the diffuser 6 is circular, but it should be understood that other can be combined with the ring. The geometry of the edge 8B of the reticle 8 conforms to the shape, i.e., the ability to produce diffused annular light that is also used for inspection purposes.

通過該擴散器6後形成之該擴散環形光B,係為一供作檢測封裝面裂紋用之均勻照明。使用該擴散環形光B照射該封裝面刮痕會使該封裝面刮痕明顯地被呈現出來。該擴散環形光B亦可用於檢測漏檢之襯墊,因為其可照亮位於該半透明裝置10底部的襯墊。The diffused annular light B formed by the diffuser 6 is a uniform illumination for detecting cracks in the package surface. Irradiation of the package surface scratches with the diffused annular light B causes the package surface scratches to be apparently exhibited. The diffused annular light B can also be used to detect a missed liner because it illuminates the liner at the bottom of the translucent device 10.

由於該複數LED 21設於同一軸上,且該複數LED與該攝影裝置4之軸係呈90度角設置,使來自該同軸光源2A之入射光A係與該同軸光源2A一樣為同軸光(on-axial coaxial light),且該LED 21發出的光通過一光束分離器12時,係沿該攝影裝置4之軸的方向反射。該LED 21、22為表面黏著式(surface mount type)之裝置。為了確保設於該同軸光源2A之該LED 21均勻發光,其較佳觀測角度(viewing angle)為40度以上。當以該同軸光源2A的入射光A進行照明檢測時,該LED 21的封裝表面缺陷,例如,不完全填充/切碎、雜質、污染物、封裝裂縫、氣泡、樹脂裂紋、樹脂碎片和引線暴露等缺陷將形成暗區(dark)。透過該同軸光源2A與該環形光罩8較佳地互相連接使該同軸光源2A位於該攝影裝置4之該透鏡5與該環形光源2B之間。藉以相同方式設置該同軸光源2A與該環形光源2B,令該光源朝向待檢測的半透明裝置10照射。Since the plurality of LEDs 21 are disposed on the same axis, and the plurality of LEDs are disposed at an angle of 90 degrees to the axis of the photographing device 4, the incident light A from the coaxial light source 2A is coaxially lighted as the coaxial light source 2A ( On-axis coaxial light, and the light emitted by the LED 21 passes through a beam splitter 12, and is reflected in the direction of the axis of the photographing device 4. The LEDs 21, 22 are surface mount type devices. In order to ensure that the LED 21 provided in the coaxial light source 2A emits light uniformly, the viewing angle is preferably 40 degrees or more. When the illumination detection is performed with the incident light A of the coaxial light source 2A, the package surface defects of the LED 21, for example, incomplete filling/shredding, impurities, contaminants, package cracks, bubbles, resin cracks, resin chips, and lead exposure The defects will form a dark area. The coaxial light source 2A is preferably interconnected with the annular light shield 8 such that the coaxial light source 2A is located between the lens 5 of the photographing device 4 and the annular light source 2B. The coaxial light source 2A and the annular light source 2B are disposed in the same manner, and the light source is irradiated toward the translucent device 10 to be detected.

本發明之視覺檢測照明裝置之該照明裝置2以使用紅色光波長照射目標區為較佳,然而,本發明亦得使用其他可照亮該半透明裝置10的整個缺陷區,且無論該缺陷區形狀或深度如何之光波波長。Preferably, the illumination device 2 of the visual inspection illumination device of the present invention preferably illuminates the target region with a red light wavelength. However, the present invention also uses other defect regions that illuminate the translucent device 10, regardless of the defect region. The wavelength of the light wave of shape or depth.

本發明可以一視覺檢測照明設備同時供至少二檢測作業進行使用,其係由於其中一光源之光線通過至少一分光裝置6產生之該擴散環形光B,使具有不同光質之至少兩種光源之光源組合,形成精確且可同時供至少兩種檢測標準進行檢測使用之照明。The invention can visually detect the illumination device for at least two detection operations, and the light source of one of the light sources passes through the diffusion ring light B generated by the at least one light splitting device 6, so that at least two light sources having different light qualities are used. The combination of light sources forms an illumination that is accurate and can be used for detection by at least two detection standards.

來自不同光源2A、2B之光線將直接射到該半透明裝置10的選定部件上。來自該同軸光源2A的入射光A穿過封裝面直到該半透明裝置10的封裝體的底部,接著,形成反射光C反射到該攝影裝置4之該透鏡5。由該攝影裝置4截取自明亮封裝面反射之反射光C的圖像顯示出一無缺陷封裝面。相反地,若該同軸光源2A的入射光A照射到一缺陷區,則該入射光A即偏離朝向該攝影裝置4透鏡5之方向,而導致截取圖像中的封裝缺陷區形成暗區(dark)。令不同類型之缺陷藉每次反射所截取到的圖像於該半透明裝置10中進行分析。Light from the different light sources 2A, 2B will be directed onto selected components of the translucent device 10. The incident light A from the coaxial light source 2A passes through the package surface up to the bottom of the package of the translucent device 10, and then, the reflected light C is reflected to the lens 5 of the photographing device 4. The image of the reflected light C reflected from the bright package surface by the photographing device 4 shows a defect-free package surface. Conversely, if the incident light A of the coaxial light source 2A is irradiated to a defective area, the incident light A is deviated toward the direction of the lens 5 of the photographing device 4, resulting in a dark area formed by the package defect region in the captured image (dark) ). The images intercepted by each reflection of the different types of defects are analyzed in the translucent device 10.

待檢測的該半透明裝置10可為捲帶式(in-tape)或其他形成。本發明之視覺檢測照明設備於該照明裝置2及該攝影裝置4之間,可設置亦可不設置一用於保護該半透明裝置10 之捲帶式玻璃窗(圖未示)。The translucent device 10 to be tested may be in-tape or other formation. The visual inspection illumination device of the present invention may or may not be provided between the illumination device 2 and the imaging device 4 for protecting the translucent device 10 Roll-up glazing (not shown).

如第1圖所示,最接近該半透明裝置10之該照明裝置2與該待檢測半透明裝置10之間具有一較佳的光工作距離(LWD)D,以形成該待檢測裝置之有效照明。該光工作距離(LWD)D的最佳範圍為5~15公釐,但是,其他範圍也是可以的。As shown in FIG. 1, the illumination device 2 closest to the translucent device 10 and the translucent device 10 to be inspected have a preferred optical working distance (LWD) D to form an effective device to be detected. illumination. The optimum range of the optical working distance (LWD) D is 5 to 15 mm, but other ranges are also possible.

本發明照明顯現半透明裝置10上各種不同特徵的包裝缺陷,以充分照射使缺陷區顯現,減少使用單一照明設備時的低檢測正確度(under-rejection)現象。由第2至5圖所示之使用本發明視覺照明設備所截取的圖像中可明顯看出,本發明具有足夠的照度以檢測其他習知模式無法檢測之缺陷。請參見第2圖,係為本發明半透明裝置10之氣泡缺陷檢測圖像,第2圖中具有足夠照度使明亮圖像中的圓形區域清楚地顯示了氣泡缺陷。第3圖為本發明半透明裝置10之切口缺陷(chip-off defect)及孔洞缺陷(void defect)檢測圖像,第3圖中具有足夠照度使明亮圖像中的圓形劃分區清楚地顯示該切口缺陷,且正方形劃分區清楚地顯示該包裝孔洞缺陷。第4A及4B圖為本發明半透明裝置10之凹面缺陷(dented defect)檢測圖像,如第4A圖中由矩形劃分的凹陷表面以圖像的亮區表示,第4B圖中由幾個矩形劃分的凹陷表面以圖像的暗區表示。第4A圖中的亮區與第4B圖中的暗區顯示本發明檢測半透明裝置10的主要凹陷表面缺陷。請參見第5圖, 係為本發明半透明裝置10之主要刮痕缺陷(major scratch defect)檢測圖像,第5圖中具有足夠照度之明亮圖像清楚地顯示檢測之半透明裝置10之主要刮痕缺陷。The illumination of the present invention reveals packaging defects of various features on the translucent device 10 to adequately illuminate the defective regions, reducing the under-rejection phenomenon when using a single illumination device. As is apparent from the images taken using the visual illumination device of the present invention shown in Figures 2 through 5, the present invention has sufficient illumination to detect defects that other conventional modes cannot detect. Referring to Fig. 2, the bubble defect detection image of the translucent device 10 of the present invention is shown in Fig. 2 with sufficient illumination so that the circular area in the bright image clearly shows the bubble defect. 3 is a chip-off defect and a void defect detection image of the translucent device 10 of the present invention, and FIG. 3 has sufficient illumination to clearly display a circular division in a bright image. The slit defect, and the square division area clearly shows the package hole defect. 4A and 4B are diagrams showing a concave defect detection image of the translucent device 10 of the present invention. The concave surface divided by a rectangle in FIG. 4A is represented by a bright area of an image, and FIG. 4B is composed of several rectangles. The divided concave surface is represented by a dark area of the image. The bright areas in Fig. 4A and the dark areas in Fig. 4B show the main concave surface defects of the translucent device 10 of the present invention. Please refer to Figure 5, It is the main scratch defect detection image of the translucent device 10 of the present invention, and the bright image with sufficient illumination in Fig. 5 clearly shows the main scratch defect of the detected translucent device 10.

2‧‧‧視覺檢測照明裝置2‧‧‧Visual inspection lighting device

2A‧‧‧同軸光源2A‧‧‧ coaxial light source

2B‧‧‧環形光源2B‧‧‧Circular light source

21、22‧‧‧LED21, 22‧‧‧LED

4‧‧‧攝影裝置4‧‧‧Photographing device

5‧‧‧透鏡5‧‧‧ lens

6‧‧‧分光裝置(擴散器)6‧‧‧Splitting device (diffuser)

61‧‧‧中央穿孔61‧‧‧Central Perforation

8‧‧‧環形光罩8‧‧‧ ring mask

8A‧‧‧基座8A‧‧‧Base

8B‧‧‧邊緣8B‧‧‧ edge

8C‧‧‧環形光罩穿孔8C‧‧‧ annular mask perforation

10‧‧‧半透明裝置10‧‧‧Translucent device

12‧‧‧光束分離器12‧‧‧beam splitter

A‧‧‧入射光A‧‧‧ incident light

B‧‧‧擴散環型光B‧‧‧Diffuse ring light

C‧‧‧反射光C‧‧‧ reflected light

D‧‧‧光工作距離D‧‧‧Light working distance

第1圖 本發明視覺檢測照明設備較佳實施例之透視示意圖,其中,至少一光路來自該設備之光源及該光路之反射光。1 is a schematic perspective view of a preferred embodiment of the visual inspection illumination device of the present invention, wherein at least one optical path is from a source of the device and reflected light from the optical path.

第2圖 本發明半透明裝置用於檢測氣泡缺陷之檢測試樣。Fig. 2 A translucent device of the present invention is used for detecting a test sample of a bubble defect.

第3圖 本發明半透明裝置用於檢測切口(chip-off)及孔洞缺陷(void defect)之檢測圖像。Figure 3 The translucent device of the present invention is used to detect detected images of chip-off and void defects.

第4A圖 本發明半透明裝置用於檢測凹面缺陷(dented defect)之檢測圖像。Figure 4A The translucent device of the present invention is used to detect a detected image of a concave defect.

第4B圖 本發明半透明裝置用於檢測凹面缺陷(dented defect)之另一檢測圖像。Figure 4B The translucent device of the present invention is used to detect another detected image of a concave defect.

第5圖 本發明半透明裝置用於檢測主要刮痕(scratch)之檢測試樣。Fig. 5 A translucent device of the present invention is used for detecting a test sample of a main scratch.

2‧‧‧視覺檢測照明裝置2‧‧‧Visual inspection lighting device

2A‧‧‧同軸光源2A‧‧‧ coaxial light source

2B‧‧‧環形光源2B‧‧‧Circular light source

21、22‧‧‧LED21, 22‧‧‧LED

4‧‧‧攝影裝置4‧‧‧Photographing device

5‧‧‧透鏡5‧‧‧ lens

6‧‧‧分光裝置(擴散器)6‧‧‧Splitting device (diffuser)

61‧‧‧中央穿孔61‧‧‧Central Perforation

8‧‧‧環形光罩8‧‧‧ ring mask

8A‧‧‧基座8A‧‧‧Base

8B‧‧‧邊緣8B‧‧‧ edge

8C‧‧‧環形光罩穿孔8C‧‧‧ annular mask perforation

10‧‧‧半透明裝置10‧‧‧Translucent device

12‧‧‧光束分離器12‧‧‧beam splitter

A‧‧‧入射光A‧‧‧ incident light

B‧‧‧擴散環型光B‧‧‧Diffuse ring light

C‧‧‧反射光C‧‧‧ reflected light

D‧‧‧光工作距離D‧‧‧Light working distance

Claims (8)

一種半透明裝置之視覺照明設備,包括至少一照明裝置以及至少一攝影裝置,其特徵在於:該照明裝置具有一同軸光源及一環形光源,該同軸光源係設於該攝影裝置與該環形光源之間,其中,該環形光源係設於一環形光罩之一基座,該環形光罩8具有一位於相對該基座位置之邊緣,令該同軸光源鄰設於該環形光罩,且該環形光罩基座設有一穿孔供該同軸光源穿透,該視覺照明設備具有至少一分光裝置,該分光裝置係與該環形光罩之該邊緣鄰接且位於該環形光源鄰近該半透明裝置之處。 A visual illumination device for a translucent device includes at least one illumination device and at least one photographic device, wherein the illumination device has a coaxial light source and an annular light source, and the coaxial light source is disposed between the photographic device and the annular light source The ring light source is disposed on a base of an annular reticle, and the annular reticle 8 has an edge located opposite to the base, so that the coaxial light source is adjacent to the annular reticle, and the ring The reticle base is provided with a perforation for penetration by the coaxial light source, the visual illumination device having at least one beam splitting device adjacent the edge of the annular reticle and located adjacent the translucent device. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,該分光裝置為設有一中央穿孔之擴散器。 The visual illumination device of the translucent device of claim 1, wherein the spectroscopic device is a diffuser provided with a central perforation. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,該環形光罩穿孔具有10公釐乘以10公釐之截面積。 The visual illumination device of the translucent device of claim 1, wherein the annular reticle perforation has a cross-sectional area of 10 mm by 10 mm. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,該環形光源內部設有複數發光二極體,該發光二極體具有30至60度之設置角度。 The visual illumination device of the translucent device of claim 1, wherein the annular light source is internally provided with a plurality of light emitting diodes having an angle of setting of 30 to 60 degrees. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,該同軸光源通過設於該環形光罩基座之該環形光罩穿孔,以提供照明至一目標區進行檢測。 The visual illumination device of the translucent device of claim 1, wherein the coaxial light source is perforated through the annular reticle disposed on the base of the annular reticle to provide illumination to a target area for detection. 如申請專利範圍第5項所述之半透明裝置之視覺照明設備,其中,該同軸光源內部設有複數發光二極體,該發光二極體具有30至60度以上之觀測角度。 The visual illumination device of the translucent device of claim 5, wherein the coaxial light source is internally provided with a plurality of light-emitting diodes having an observation angle of 30 to 60 degrees or more. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,由其中一光源之照射光線穿透該分光裝置產生一擴散環形光源,以令具有不同光質之至少兩種光源之光源組合,形成供至少二檢測作業同時進行使用之照明。 The visual illumination device of the translucent device of claim 1, wherein the illumination light of one of the light sources penetrates the light splitting device to generate a diffused annular light source to enable at least two light sources having different light qualities. The light sources are combined to form an illumination for simultaneous use of at least two inspection operations. 如申請專利範圍第1項所述之半透明裝置之視覺照明設備,其中,最靠近該半透明裝置的視覺檢測照明設備與該半透明裝置之間的光線穿射距離為5至15公釐。 The visual illumination device of the translucent device of claim 1, wherein the distance between the visual inspection illumination device closest to the translucent device and the translucent device is 5 to 15 mm.
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