TWI469939B - Scribe head and scribe device - Google Patents

Description

Dash head and scribing device

The present invention relates to a scribing head and a scribing apparatus using the scribing head.

Heretofore, a scribing head in which a dicing line is formed on a surface of a substrate (for example, a glass substrate) by a scribing wheel and a scribing device using the scribing head are known (for example, Patent Document 1).

Further, it has been known in the prior art that the first axis of the scribing wheel is swung, and the second axis (which is substantially parallel to the first axis) for swinging the scribing wheel and the first axis ensures the translation of the scribing wheel. (for example, Patent Document 1).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2005/063459

As described above, the technique of Patent Document 1 adjusts the posture of the scribing wheel by two axes (the first and second axes). That is, when the cutting line is formed on the substrate, the axes of the scribing head are not fixed.

Thereby, the direction of the cutting line and the direction of the first and second axes are different, and the cutting line is in the traveling direction of the scribing wheel and the direction substantially perpendicular to the first and second axes (hereinafter, also referred to as "wave direction". ") undulating changes. As a result, in the case where the semiconductor substrate is required to have a higher precision cutting line than the glass substrate, the swing of the cutting line in the direction of the wave (hereinafter, also referred to as "the formation width of the cutting line") is allowed to reach the allowable value. The above questions.

Accordingly, it is an object of the present invention to provide a scribing head and a scribing apparatus which can form a good cutting line.

In order to solve the above problems, the invention of claim 1 is a scribing head characterized in that a cutting line along a traveling direction of the scribing wheel is formed on the brittle material substrate by advancing and retracting with respect to the brittle material substrate. And including: a wheel carrier rotatably supporting the scribing wheel centering on a first rotating shaft substantially perpendicular to the traveling direction; a wheel carrier mounting block disposed above the wheel frame; and a wheel frame a joint that is mounted on the lower portion and that is rotatable about the second rotating shaft that is substantially perpendicular to the traveling direction and the first rotating shaft, and is swingably supported by the wheel mounting block; The first rotating shaft is disposed so as to be displaced from the front side of the second rotating shaft along the traveling direction of the scribing wheel; and the fixing force of the wheel mounting block in a direction substantially parallel to the second rotating shaft is generated The above-described wheel frame joint is fixed to the above-described wheel frame mounting block.

The invention of claim 2 is the scribing head of claim 1, wherein the wheel carrier joint includes a swivel portion rotatably supported for the bobbin mounting block; the bobbin mounting block includes: a collet having a hollow cylindrical body extending along the second rotating shaft; a collet ring having an annular wall portion concentric with the cylindrical body and extending from above the collet toward the collet; and a press-in portion Provided above the above-mentioned collet ring, and generating a pressing force for pressing the collet ring substantially parallel to the second rotating shaft as the fixing force; the rotating portion of the wheel frame joint is inserted into the barrel In a state in which the cylindrical body is clamped, the carriage mounting block is rotatable; and the press-fitting force from the press-fitting portion is applied to the collet ring, and in the enclosed space surrounded by the wall portion, The cylindrical body is brought into contact with the wall portion and the rotating portion, whereby the rotating portion of the wheel carrier joint is fixed to the collet.

The invention of claim 3 is the scribe head according to claim 1, wherein the scribe head includes: a fixing portion that performs a fixing operation for fixing the wheel frame joint to the wheel frame mounting block, and the fixing portion The above fixing force is generated.

Further, the invention of claim 4 is the scribing head according to claim 3, wherein the wheel carrier joint includes: a revolving portion rotatably supported to the bobbin mounting block; and the bobbin mounting block includes: a collet a hollow cylindrical body extending along the second rotating shaft; a collet ring having an annular wall portion concentric with the cylindrical body and extending from above the collet toward the collet; and a press-fitting portion Provided above the collet ring, and pressing the collet ring substantially parallel to the second rotating shaft; the rotating portion of the carrier joint is inserted into the tubular body of the collet Rotating with respect to the wheel carrier mounting block; and the fixing portion presses the press-fitting portion to press the collet ring into the press-fitting portion substantially parallel to the second rotating shaft The pressing force is the fixing force; the pressing force from the press-fitting portion is applied to the collet ring, and the cylindrical body abuts against the wall portion and the upper portion of the surrounding space surrounded by the wall portion Turns, whereby the revolving portion of the wheel carrier of the joint is fixed to the collet.

The invention of claim 4 is the scribe head according to claim 4, wherein an external thread is formed on the outer circumference of the press-fit portion; and a screw hole corresponding to the external thread is provided on the upper portion of the wheel mount block; The fixing portion is configured to rotate the press-fitting portion to screw the front end of the press-fitting portion into the carrier mounting block to apply the pressing force to the collet ring.

Further, the invention of claim 6 is the scribing head according to claim 5, wherein the scribing head further includes a lifting portion that is supported by the wheel carrier by moving the wheel mounting block up and down The scribing wheel applies a pressing force to the brittle material substrate; the elevating portion includes a driving force supply source disposed above the bobbin mounting block and supplying the driving force in the vertical direction; and the transmitting portion is disposed along the edge The driving force is applied to the carrier mounting block between the carrier mounting block disposed in the vertical direction and the driving force supply source, and the guiding mechanism is guided to move in the vertical direction. Introducing the wheel carrier mounting block; the fixing portion includes: a first rotating element disposed above the press-fitting portion and rotating the press-fitting portion; and a second rotating element disposed on a side of the first rotating member And a rotation force supply source that rotates the second rotation element to rotate the rotation force from the second rotation element To the first rotating element; the transmitting portion is provided in a line across the manner of the press fitting portion arranged along the vertical direction and the rotation of the first element.

Further, the invention of claim 7 is the scribing head according to any one of claims 1 to 6, wherein the collet further includes an annular plate which is disposed at a lower portion of the cylindrical body and is formed in the vicinity of the center a through hole communicating with the hollow space in the cylinder; the wheel mounting block further includes a bearing disposed under the annular plate and pivotally supporting the rotating portion; the bearing is clamped to the bottom of the wheel mounting block Between the above ring plates.

Further, the invention of claim 8 is a scribing device, characterized in that it is in a scribing head according to any one of claims 1 to 6, comprising: a holding unit that holds the brittle material substrate on one side, The above-mentioned brittle material substrate is relatively moved with respect to the scribing head.

According to the invention of any one of claims 1 to 8, the first rotating shaft of the scribing wheel is offset from the traveling direction of the scribing wheel directly below the second rotating shaft of the wheel carrier joint. Thereby, a backward tilting effect is generated in the scribing wheel.

Further, according to the invention of any one of claims 1 to 8, the wheel carrier joint swingable with respect to the carrier mounting block is fixed to the carrier mounting block by the fixing force substantially parallel to the second rotating shaft. In this case, the wheel frame joint does not receive a force in substantially the same direction as the traveling direction of the scribing wheel, and a force in substantially the same direction as the direction of the axis of the scribing wheel, as a fixing force. Moreover, by this fixing, the tilting steering effect is invalidated when the cutting line is formed.

Thereby, when it is necessary to swing the wheel frame joint relative to the wheel frame mounting block to adjust the posture of the scribing wheel to the brittle material substrate, a backward tilting effect can be generated in the scribing wheel.

On the other hand, in the case where the wheel frame joint is fixed relative to the wheel frame mounting block to disable the backward tilting effect, the forming width of the cutting line can be made smaller than the case where the wheel frame joint is not fixed. Further, since the pressing force substantially parallel to the second rotating shaft is provided as the fixing force, for example, after the posture adjustment is performed, when the wheel carrier joint is fixed, the fixing position of the wheel carrier joint due to the fixing force can be suppressed from being shifted. That is, posture adjustment can be performed well.

Thereby, when the posture of the scribing wheel is adjusted, the rotational position of the wheel frame joint with respect to the wheel frame mounting block can be easily changed, so that the formation width of the cutting line can be effectively suppressed when the cutting line is formed.

In particular, according to the invention of claim 2, the press-fitting force substantially parallel to the second rotating shaft is imparted to the collet ring, and the bobbin joint is inserted into the surrounding space of the collet ring. The turning portion is fixed in the collet. That is, the swivel portion of the bobbin joint can be satisfactorily fixed by the collet ring and the collet.

In particular, according to the invention of any one of claims 3 to 6, by using the action of the fixing portion, a fixing force substantially parallel to the second rotating shaft is provided, and the wheel frame joint that can be swung relative to the wheel frame mounting block is opposed to the wheel carrier. The mounting block is fixed.

In particular, according to the invention of any one of claims 4 to 6, the press-fitting force is imparted to the collet ring from the press-fitting portion by the action of the fixing portion. Thereby, the rotating portion of the wheel carrier joint is fixed to the collet in a state in which the tubular body of the collet is inserted into the surrounding space of the collet ring. That is, the swivel portion of the bobbin joint is well fixed by the collet ring and the collet.

In particular, according to the inventions of claims 5 and 6, when the press-fitting portion is rotated and the front end of the press-fitting portion is screwed into the carrier mounting block, the press-fitting portion continuously imparts a pressing force to the collet ring. Therefore, the state in which the press-fitting force is imparted to the collet ring can be favorably maintained, and as a result, the state in which the revolving portion of the carrier joint is fixed to the collet can be favorably maintained.

In particular, according to the invention of claim 6, the transmission portion is provided to extend across the first rotating element of the fixed portion and the press-fit portion of the carrier mounting block. Thereby, the first rotating element and the press-fitted portion can be disposed such that the pressing force applied to the brittle material substrate from the scribing wheel and the pressing force that presses the press-fitting portion downward are applied to substantially the same straight line. Thereby, it is possible to more effectively suppress the increase in the formation width of the dicing line while maintaining the state in which the backward tilting effect is disabled while forming the dicing line.

In particular, according to the invention of claim 7, when the press-in force is applied to the collet ring, the annular portion of the collet is pressed downward. Thereby, the compressive force is imparted to the bearing disposed between the bottom of the wheel mount block and the annular plate, thereby hindering the rotation of the bearing. Therefore, the wheel carrier joint can be better fixed relative to the wheel carrier mounting block.

<First embodiment>

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Composition of the scribing device>

1 and 2 are a front view and a side view, respectively, showing an overall configuration example of one of the scribing devices 1. Fig. 3 is a front elevational view showing a configuration example of the vicinity of the scribing wheel 60.

The scribing device 1 is a device in which a dicing line (cutting line: longitudinal crack) is formed on a surface of a substrate (hereinafter, also simply referred to as a "brittle material substrate") 4 made of a brittle material, for example, a glass substrate or a ceramic substrate.

As shown in FIGS. 1 and 2, the scribing device 1 mainly includes a holding unit 10, a scribing unit 20, an imaging unit 70, and a control unit 90. In addition, in each of FIG. 1 and FIG. 1 and subsequent figures, in order to clarify the directional relationship, etc., if necessary, the XYZ of the Z-axis direction is set to the vertical direction and the XY plane is set to the horizontal plane. Coordination system.

Here, as shown in FIG. 3, when the dicing line SL is formed on the surface of the brittle material substrate 4 by the scribing device 1, the brittle material substrate 4 is extended in the vertical direction (Z-axis direction). Vertical crack K (scouring step).

The following method is referred to as "fracture", that is, by applying stress (breaking step) to the brittle material substrate 4 on which the vertical crack K is generated, the vertical crack K is grown from the main surface on which the cutting line SL is formed to The brittle material substrate 4 is cut off from the main surface on the opposite side.

On the other hand, the following method is referred to as "split", that is, the vertical crack K is extended from the main surface on the side where the cutting line SL is formed to the opposite side only by the scribing step (that is, the breaking step is not performed). The brittle material substrate 4 is cut off from the main surface.

The fractures and splits are cut as follows, that is, the essential elements for cutting are the extension of vertical cracks, and in terms of no chip generation, it is superior to the generation of chips as essential elements for cutting and Grinding with a diamond cutter (or grinding wheel) or a diamond dicing machine.

Examples of the material of the brittle material substrate 4 which can be broken or split by the scribing method of the present embodiment include glass, ceramics, enamel, or sapphire. In particular, in recent years, as a substrate for a high-frequency module related to a communication device, LTCC (High Temperature Co-fired Ceramics) is moving toward a relatively easy-to-process LTCC (Low Temperature Co-fired Ceramic). Burning ceramics) accelerates the transfer. Therefore, the scribing method of the present embodiment will be more and more effectively utilized.

The holding unit 10 holds the brittle material substrate 4 and relatively moves the held brittle material substrate 4 to the scribing unit 20. As shown in FIG. 1, the holding unit 10 is provided on the base 10a, and mainly includes a mounting table 11, a ball screw mechanism 12, and an electric motor 13.

Here, the base portion 10a is formed of, for example, a substantially cubic stone plate, and its upper surface (the surface facing the holding unit 10) is flattened. Thereby, the thermal expansion of the base portion 10a can be reduced, and the brittle material substrate 4 held by the holding unit 10 can be moved well.

The mounting table 11 sucks and holds the brittle material substrate 4 placed thereon. Further, the mounting table 11 moves the held brittle material substrate 4 forward and backward in the direction of the arrow AR1 (X-axis positive or negative direction: hereinafter, also referred to as "advance direction"), and in the direction of the arrow R1 (around the Z-axis) Direction) rotation. As shown in FIGS. 1 and 2, the mounting table 11 mainly includes an adsorption unit 11a, a rotary table 11b, and a moving table 11c.

The adsorption unit 11a is provided on the upper side of the rotary table 11b. As shown in FIGS. 1 and 2, the brittle material substrate 4 can be placed on the upper surface of the adsorption portion 11a. Further, a plurality of adsorption grooves (not shown) are arranged in a grid shape on the upper surface of the adsorption portion 11a. Therefore, in a state in which the brittle material substrate 4 is placed, the ambient gas in each adsorption tank is exhausted (sucked), and the brittle material substrate 4 is adsorbed to the adsorption portion 11a.

The turntable 11b is provided on the lower side of the adsorption portion 11a, and rotates the adsorption portion 11a around the rotation shaft 11d substantially parallel to the Z-axis. Further, the mobile station 11c is provided on the lower side of the turntable 11b, and moves the adsorption unit 11a and the rotary table 11b in the advancing and retracting direction.

Therefore, the brittle material substrate 4 adsorbed and held by the mounting table 11 moves forward and backward in the direction of the arrow AR1, and rotates around the rotating shaft 11d that moves in accordance with the advancing and retracting operation of the adsorption portion 11a.

The ball screw mechanism 12 is disposed on the lower side of the mounting table 11, and moves the mounting table 11 forward and backward in the direction of the arrow AR1. As shown in FIGS. 1 and 2, the ball screw mechanism 12 mainly includes a feed screw 12a and a nut 12b.

The feed screw 12a is a rod that extends in the advancing and retracting direction of the mounting table 11. A spiral groove (not shown) is provided on the outer peripheral surface of the feed screw 12a. Further, one end of the feed screw 12a is rotatably supported by the support portion 14a, and the other end of the feed screw 12a is rotatably supported by the support portion 14b. Further, the feed screw 12a is coupled to the motor 13 in a linked manner, and when the motor 13 rotates, it rotates in the rotation direction of the motor 13.

The nut 12b moves forward and backward in the direction of the arrow AR1 by the rolling of the ball (not shown) by the rotation of the feed screw 12a. As shown in FIGS. 1 and 2, the nut 12b is fixed to the lower portion of the moving table 11c.

Therefore, when the motor 13 is driven and the rotational force of the motor 13 is transmitted to the feed screw 12a, the nut 12b moves forward and backward in the direction of the arrow AR1. As a result, the mounting table 11 to which the nut 12b is fixed is moved forward and backward in the direction of the arrow AR1 similarly to the nut 12b.

The pair of guide rails 15 and 16 restrain the movement of the mounting table 11 in the traveling direction. As shown in Fig. 2, a pair of guide rails 15, 16 are attached to the base portion 10a and are fixed in the direction of the arrow AR2 by a certain distance.

A plurality of (two in the present embodiment) sliding portions 17 (17a, 17b) are slidable along the guide rail 15 in the direction of the arrow AR1. As shown in FIGS. 1 and 2, the sliding portion 17 (17a, 17b) is attached to the lower portion of the moving table 11c, and is fixed in the direction of the arrow AR1 with a predetermined distance.

A plurality of (two in the present embodiment) sliding portions 18 are slidable along the guide rail 16 in the direction of the arrow AR1. However, the illustration is for convenience, and only one sliding portion 18a is shown in FIG. Similarly to the sliding portion 17, the sliding portion 18 is fixed to the lower portion of the moving table 11c at a predetermined distance in the advancing and retracting direction.

In the holding unit 10 having the above configuration, when the rotational force of the motor 13 is applied to the ball screw mechanism 12, the mounting table 11 moves along the pair of guide rails 15, 16. Thereby, the translation of the mounting table 11 in the advancing and retracting direction is ensured.

The scribing unit 20 forms a cutting line SL on the surface of the brittle material substrate 4 by crimping and rolling the brittle material substrate 4 held by the holding unit 10 by the scribing wheel 60 (see FIG. 3). As shown in FIGS. 1 and 2, the scribing unit 20 mainly includes a scribing head 30 and a driving unit 50 that hold the scribing wheel 60.

The scribing head 30 holds the scribing wheel 60. Further, in the scribing head 30, the pressing force when the scribing wheel 60 is pressed against the surface of the brittle material substrate 4 is adjusted by the action of the lifting/lowering mechanism (not shown) (hereinafter, Also referred to as "line load"). Further, the detailed configuration of the scribing head 30 will be described below.

The drive unit 50 reciprocates the scribing head 30 provided with the scribing wheel 60 in the direction of the arrow AR2 (the Y-axis positive or negative direction: hereinafter, also simply referred to as "reciprocating direction"). As shown in FIG. 2, the drive unit 50 mainly includes a plurality of (two in the present embodiment) pillars 51 (51a, 51b), a plurality of (two in the present embodiment) guide rails 52, and an electric motor 53.

The pillars 51 (51a, 51b) extend in the vertical direction (Z-axis direction) from the base portion 10a. As shown in Fig. 2, the guide rails 52 are fixed to the pillars 51a and 51b in a state of being sandwiched between the pillars 51a and 51b.

The guide rail 52 restrains the movement of the scribing head 30 in the reciprocating direction. As shown in Fig. 2, the guide rails 52 are fixed in the up and down direction by a certain distance.

The motor 53 is coupled to a feed mechanism (for example, a ball screw mechanism) (not shown). Thereby, when the motor 53 rotates, the scribing head 30 reciprocates along the guide rail 52 in the direction of the arrow AR2.

The scribing wheel 60 is a product obtained by molding a diamond-containing material. Here, examples of the diamond-containing material include sintered diamond (Polycrystalline diamond: also referred to as "PCD"), polycrystalline diamond, natural single crystal diamond, and synthetic single crystal diamond.

The imaging unit unit 70 captures the brittle material substrate 4 held by the holding unit 10 . As shown in FIG. 2, the imaging unit unit 70 includes a plurality of (two in the present embodiment) cameras 75 (75a, 75b).

The camera 75 (75a, 75b) is disposed above the holding unit 10 as shown in FIGS. 1 and 2 . The camera 75 (75a, 75b) captures an image of a characteristic portion (for example, an alignment mark (not shown)) formed on the brittle material substrate 4. Then, based on the image captured by the camera 75 (75a, 75b), the position and posture of the brittle material substrate 4 are obtained.

Here, the "position" of the brittle material substrate 4 means an arbitrary position on the brittle material substrate 4 in the absolute coordinate system. In addition, the "posture" of the brittle material substrate 4 means the inclination of the reference line of the brittle material substrate 4 (for example, one of the four sides when the brittle material substrate 4 is square) with respect to the reciprocating direction of the scribing head 30.

When the square brittle material substrate 4 is broken or split, alignment marks are formed in two adjacent corners of the four corners of the brittle material substrate 4. Each alignment mark is captured by the corresponding cameras 75a, 75b, and the position of each alignment mark in the absolute coordinate system is obtained based on the captured images. Then, the position and posture of the brittle material substrate 4 are calculated based on the positions of the alignment marks.

The control unit 90 realizes the operation control of each element of the scribing device 1, and the data operation. As shown in FIG. 1 and FIG. 2, the control unit 90 mainly includes a ROM (Read-Only Memory) 91, a RAM (Random Access Memory) 92, and a CPU (Central Processing Unit). Processing unit) 93.

The ROM (Read Only Memory) 91 is a variety of non-volatile memory units, and stores, for example, a program 91a. Further, as the ROM 91, a non-volatile memory which is freely readable and writable, that is, a flash memory can be used. The RAM (Random Access Memory) 92 is a volatile memory unit and stores, for example, data used in the calculation of the CPU 93.

The CPU (Central Processing Unit) 93 executes the control of the program 91a following the ROM 91 (the advancement and retreat of the holding unit 10, the rotation operation, and the control of the reciprocating operation of the scribing head 30 by the drive unit 50), and the brittle material substrate 4 Data processing such as position calculation.

<2. Composition of the scribing head>

Fig. 4 is a side view showing a configuration example of a vicinity of the wheel carrier mounting block 40. Fig. 5 is a bottom view showing a configuration example of the vicinity of the scribing wheel 60. Figure 6 is a bottom view for explaining the backward tilting effect. Fig. 7 is a side view showing the state after the carrier connector 35 is fixed to the carrier mounting block 40. Figure 8 is a cross-sectional view of the vicinity of the wheel carrier mounting block 40 as viewed from line V-V of Figure 7.

The scribing head 30 moves forward and backward relative to the brittle material substrate 4, and forms a cutting line SL along the traveling direction of the scribing wheel 60 (arrow AR2 direction: see FIG. 2) on the brittle material substrate 4 (refer to FIG. 3). . As shown in FIG. 4, the scribing head 30 mainly includes a wheel carrier 31, a wheel carrier joint 35, and a wheel carrier mounting block 40.

As shown in FIG. 4, the wheel carrier 31 rotatably supports the scribing wheel 60 around the first rotating shaft 32a which is substantially perpendicular to the traveling direction of the scribing wheel 60. As shown in FIG. 4, the wheel carrier 31 is attached to the lower portion of the wheel carrier joint 35, and as shown in FIGS. 3 to 8, mainly includes a pin 32 and a support frame 33.

The pin 32 is a rod that extends through the scribing wheel 60. The pin 32 is fixed to the scribing wheel 60 by inserting the pin 32 into the through hole 60a (see FIG. 3) of the scribing wheel 60. As shown in FIGS. 3 and 5, the through hole 60a extends along the first rotating shaft 32a that is substantially parallel to the X axis.

As shown in FIG. 3, the support frame 33 is a structure which is disposed so as to cover both openings (both ends) of the through hole 60a. A pin 32 protruding from both ends of the through hole 60a is rotatably provided to the support frame 33. Therefore, the scribing wheel 60 can freely rotate relative to the support frame 33.

The wheel carrier joint 35 is rotatable about the second rotating shaft 38a that is substantially perpendicular to the traveling direction of the scribing wheel 60 and the first rotating shaft 32a, and is swingably supported by the carrier mounting block 40. . As shown in FIG. 4, the wheel carrier joint 35 mainly includes a mounting piece 36 and a turning portion 38.

The mounting piece 36 is a mounting member for mounting the wheel carrier 31 to the lower portion of the wheel carrier joint 35. As shown in Fig. 4, the attachment piece 36 is provided at the lower end of the wheel carrier joint 35, and the shape of the attachment piece 36 is substantially L-shaped toward the traveling direction of the scribing wheel 60 (refer to Fig. 8).

As shown in Fig. 4, the turning portion 38 is inserted into the inner diameter faces of the bearings 46, 47, and is inserted into the hollow space 44d formed by the cylindrical body 44b of the collet 44. Thereby, the turning portion 38 can be pivotally supported by the wheel mounting block 40 centering on the second rotating shaft 38a in addition to the following fixing.

Further, as shown in FIG. 5, the position of the rotating shaft 38a of the turning portion 38 as viewed from the bottom and the contact position 60c with the scribing wheel 60 in the brittle material substrate 4 are shifted in the XY plane. That is, as shown in FIG. 5, the first rotating shaft 32a of the scribing wheel 60 is shifted from the straight line directly below the rotating shaft 38a along the traveling direction (Y-axis direction) of the scribing wheel 60.

Therefore, if the traveling direction of the scribing wheel 60 is changed from the arrow AR3 (2-point chain line) direction to the arrow AR4 (solid line) direction as shown in FIG. 6, the back tilting effect is The torque around the shaft 38a is applied to the scribing wheel 60. Thereby, the scribing wheel 60 is rotated in the direction of the arrow R2, and the position of the scribing wheel 60 is changed from the 2-point chain line position to the solid line position.

That is, when the wheel frame joint 35 is not fixed to the wheel frame mounting block 40, even if the traveling direction of the scribing wheel 60 changes from the state in which the posture of the scribing wheel 60 is substantially parallel to the traveling direction, the scribing wheel 60 is changed. The posture is shifted by the angle θ1 with respect to the traveling direction, but the scribing wheel 60 is rotated by the torque action in the direction of the arrow R2, so that the posture of the scribing wheel 60 is again substantially parallel to the traveling direction of the scribing wheel 60.

As shown in FIG. 4 , FIG. 7 and FIG. 8 , the wheel carrier mounting block 40 is disposed above the mounting piece 36 of the wheel carrier joint 35 and above the wheel frame 31 , and mainly includes a collet ring 42 and a collet 44 . Bearings 46, 47, and press-in bolts 48. The press-in bolt 48, the collet ring 42, the collet 44, and the bearings 46, 47 are arranged in this order from the positive side of the Z-axis. The wheel carrier mounting block 40 may also be configured to swingably support the wheel carrier joint 35 as described above, and on the other hand, by pressing the bolt 48, the collet ring 42, the collet 44, etc., as shown below. The action is to fix the wheel carrier joint 35, and the rearward steering effect can be disabled.

The press-in bolt 48 (press-in portion) is provided above the collet ring 42 as shown in FIGS. 4, 7, and 8. The press-in bolt 48 is screwed to the upper portion of the mounting block body 40a by a nut 49, and the front end 48a of the press-in bolt 48 can be adjusted up and down by making the screw fastening position different. When the press-fitting bolt 48 is adjusted such that the front end 48a abuts against the upper surface of the collet ring 42, the press-fitting bolt 48 imparts a pressing force for pressing the collet ring 42 downward, which is substantially the same as the second rotating shaft 38a. Parallel fixed force. The screwing of the press-fitting bolts 48 can be realized by the operator directly or by using a jig or the like when scribing.

Further, as shown in FIGS. 4, 7, and 8, the front end 48a of the press-fitting bolt 48 is substantially spherical, and therefore, the press-fitting bolt 48 can impart a press-fitting force to the collet ring 42 in a point contact state. Thereby, the wheel frame joint 35 can be better fixed to the wheel frame mounting block 40.

The collet ring 42 and the collet 44 are fixing members for fixing the carrier joint 35 to the carrier mounting block 40.

As shown in FIGS. 4, 7, and 8, the collet 44 mainly includes an annular plate 44a and a cylindrical body 44b.

The cylindrical body 44b is a hollow member that extends along the second rotating shaft 38a. As shown in FIGS. 4, 7, and 8, the tubular body 44b is formed concentrically with the annular plate 44a. As described above, the swivel portion 38 of the wheel carrier joint 35 is inserted into the hollow space 44d formed by the tubular body 44b. The cylindrical body 44b is configured such that its inner diameter D11 (refer to FIG. 8) maintains the same value in the Z-axis direction and can be adjusted. On the other hand, the outer diameter D12 (see FIG. 8) of the tubular body 44b gradually widens from the upper side (the side of the collet ring 42) toward the lower side (the side of the bearing 46), and thereafter becomes a fixed width.

The annular plate 44a is a plate body provided at a lower portion of the cylindrical body 44b. A through hole 44c that communicates with the hollow space 44d in the cylindrical body 44b is formed in the vicinity of the center of the annular plate 44a (viewed from the positive side of the Z axis) in plan view.

Further, as shown in FIGS. 4, 7, and 8, the collet ring 42 mainly includes a disk body 42a, an outer wall 42b, and an inner wall 42c.

The disk body 42a is a plate body provided on the upper portion of the collet ring 42. The outer wall 42b is an annular wall portion formed along the outer circumference of the disk body 42a. The inner wall 42c is provided on the inner side of the outer wall 42b and has an annular wall portion concentric with the cylindrical body 44b of the collet 44. As shown in FIGS. 4, 7, and 8, the outer wall 42b and the inner wall 42c extend from the upper side of the collet 44 toward the collet 44. Here, the inner diameter D21 of the inner wall 42c is gradually narrowed from the lower side (the side of the collet 44) toward the upper side (pressing the side of the bolt 48), and thereafter becomes a fixed width.

The compression spring 45 is a biasing member formed of an elastic member. As shown in FIG. 8, the upper end of the compression spring 45 is fixed to the collet ring 42, and the lower end of the compression spring 45 is fixed to the collet 44. Thereby, the collet ring 42 is pressed downward by the press-fitting bolt 48. At this time, the collet ring 42 is biased upward by the compression spring 45.

If the turning portion 38 shown in FIG. 4 is swingable relative to the carrier mounting block 40, the pressing force from the press-in bolt 48 is imparted to the collet ring 42, and the collet ring 42 is pressed, the collet 44 The cylinder 44b abuts against the inner wall 42c in the enclosed space surrounded by the inner wall 42c. Further, due to the pressing force, the inner diameter D11 of the cylindrical body 44b gradually decreases in accordance with the shape of the inner wall 42c. Finally, as shown in FIGS. 7 and 8, the turning portion 38 of the wheel carrier joint 35 abuts against the cylindrical body 44b of the collet 44. Thereby, the state in which the turning portion 38 of the carrier joint 35 is fixed by the collet ring 42 and the collet 44 is achieved. That is, the wheel carrier joint 35 is fixed to the carrier mounting block 40 by the pressing force.

When the pressing force from the press-in bolt 48 is released, the collet ring 42 is returned to the initial position above the collet 44 by the biasing force applied from the compression spring 45. Furthermore, since the inner wall 42c of the collet ring 42 and the tubular body 44b of the collet 44 are both tapered and of different materials, sometimes the collet ring 42 is not subjected to the force from the compression spring 45. It also returns to the initial position above the collet 44. In such a case, the compression spring 45 is not required.

The bearing 46 is disposed below the collet 44 and pivotally supports the swivel portion 38 of the carrier joint 35. On the other hand, the bearing 47 is disposed below the bearing 46 and pivotally supports the turning portion 38 like the bearing 46. As shown in FIGS. 4, 7, and 8, the bearings 46, 47 are interposed between the bottom plate 40b provided at the bottom of the wheel frame mounting block 40 and the annular plate 44a of the collet 44.

When the pressing force from the press-in bolt 48 is given to the collet ring 42, the bearings 46, 47 disposed between the bottom plate 40b of the carrier mounting block 40 and the annular plate 44a of the collet 44 are subjected to a compressive force, thereby obstructing The rotation of the bearings 46, 47. Thereby, the wheel frame joint 35 can be better fixed to the wheel frame mounting block 40.

In the present embodiment, the two bearings 46 and 47 are used for the description. However, the number of the bearings is not limited thereto. For example, the number of bearings may be one or three or more.

<3. Advantages of the scribing head and the scribing device of the first embodiment>

As described above, in the scribing head 30 of the present embodiment and the scribing device 1 including the scribing head 30, the first rotating shaft 32a of the scribing wheel 60 is provided on the second rotating shaft 38a of the bobbin joint 35. The position directly below is offset from the direction in which the scribing wheel 60 travels. Thereby, in the scribing device 1, the scribing wheel 60 can be provided with a backward tilting effect.

On the other hand, in the scribing device 1, when the presser force (fixing force) substantially parallel to the second rotating shaft 38a is applied to the collet ring 42, the frame joint 35 that can be swung relative to the carrier mounting block 40 is opposed to The wheel carrier mounting block 40 is fixed. In this case, the tilting steering effect is disabled when the cutting line SL is formed.

In such a scribing apparatus 1, for example, when it is necessary to swing the wheel frame joint 35 relative to the wheel frame mounting block 40 to perform posture adjustment of the scribing wheel 60 with respect to the brittle material substrate 4, the scribing wheel 60 can be generated. Backward steering effect. Further, when the wheel carrier 35 is fixed in order to complete the posture adjustment, only the pressing force (fixing force) substantially parallel to the second rotating shaft 38a is given. Therefore, the fixing position of the carrier joint 35 is displaced due to the pressing force. inhibition. That is, posture adjustment can be performed well.

Further, when the wheel frame joint 35 is fixed relative to the wheel frame mounting block 40, the backward tilting effect is disabled, and the forming width of the cutting line can be made smaller than when the wheel frame joint 35 is not fixed. In this case, the wheel carrier joint 35 does not receive a force substantially in the same direction as the traveling direction of the scribing wheel 60 and a force substantially the same as the direction of the first rotating shaft 32a of the scribing wheel 60, and serves as a pressing force (fixing force). ).

Therefore, according to the scribing device 1 of the present embodiment, when the posture of the scribing wheel 60 is adjusted, the rotational position of the wheel carrier 35 relative to the carrier mounting block 40 can be easily changed, so that when the cutting line SL is formed, Preferably, the increase in the formation width of the cutting line is suppressed.

<Second embodiment>

The configuration of the scribing device 1 for invalidating the tilting steering effect of the scribing grinding wheel 60 is not limited to the case shown in the first embodiment. In the present embodiment, a description will be given of a case where the tilting steering effect of the scribing grinding wheel 60 is disabled by the configuration different from that of the first embodiment. The constituent elements of the scribing device 1 common to the first embodiment are denoted by the same reference numerals and the description thereof will not be repeated.

Specifically, in the present embodiment, the configuration of the scribing head 30 is different from that of the first embodiment.

<4. Composition of the scribing head>

Fig. 9 is a side view showing a configuration example of the vicinity of the wheel carrier mounting block 140. FIG. 10 is a side view showing a state after the carrier connector 35 is fixed to the carrier mounting block 140. Figure 11 is a cross-sectional view of the vicinity of the wheel carrier mounting block 140 as viewed from line V-V of Figure 10. 12 and 13 are a side view and a front view showing a configuration example of the vicinity of the scribing head 30.

In the present embodiment, the scribing head 30 mainly includes a wheel frame 31, a wheel carrier joint 35, a wheel frame mounting block 140, a lifting portion 150, and a fixing portion 155. In FIG. 12, a part of the fixing portion 155 (the rotary actuator 155a, the rotating shaft 156a, and the driving side gear 156a) is omitted for convenience of illustration.

The configuration of the carrier 31 and the carrier 35 is the same as that of the first embodiment. In the present embodiment, the wheel carrier joint 35 is swingably supported by the wheel carrier mounting block 140. Specifically, the turning portion 38 is rotatably supported by the carrier mounting block 140 around the second rotating shaft 38a in addition to the following fixing.

Also in the present embodiment, when the wheel carrier joint 35 is not fixed to the wheel carrier mounting block 140, as shown in FIG. 6, even if the posture of the scribing wheel 60 is substantially parallel to the traveling direction, the scribing wheel 60 is The traveling direction changes, the posture of the scribing wheel 60 is shifted by the angle θ1 with respect to the traveling direction, and the scribing wheel 60 is rotated by the torque in the direction of the arrow R2, so that the posture of the scribing wheel 60 becomes the scribing wheel 60 again. The direction of travel is approximately parallel.

As shown in FIG. 9 to FIG. 11 , the wheel carrier mounting block 140 is disposed above the mounting piece 36 of the wheel carrier joint 35 and above the wheel frame 31 , and mainly includes a collet ring 42 , a collet 44 , a bearing 46 , and 47. Press the bolt 148. The press-in bolt 148, the collet ring 42, the collet 44, and the bearings 46, 47 are arranged in this order from the positive side of the Z-axis. The wheel carrier mounting block 140 may also be configured to swingably support the wheel carrier joint 35 as described above, and on the other hand, by pressing the bolt 148, the collet ring 42, the collet 44, and The action of the fixing portion 155 or the like fixes the wheel carrier joint 35, and the rearward steering effect can be disabled.

The press-in bolt 148 (press-in portion) is provided above the collet ring 42 as shown in FIGS. 9 to 11 . The press-in bolt 148 has a disk-shaped rotating plate 148a and a cylindrical body 148b extending from the vicinity of the center of the rotating plate 148a to the lower side.

An external thread is formed on the outer circumference of the cylindrical body 148b, and a screw hole 140b corresponding to the external thread is formed on the upper portion of the mounting block body 140a. Further, if the rotating plate 148a is rotated in a state where the cylindrical body 148b is inserted into the screw hole 140b, the cylindrical body 148b is screwed into the screw hole 140b. That is, the press-fitting bolt 148 is screwed and fastened to the upper portion of the mounting block main body 140a, and the front end 148c of the press-fitting bolt 148 can be moved in the up-and-down direction by varying the degree of the screwing.

If the cylindrical body 148b of the press-in bolt 148 is screwed into the wheel frame mounting block body 140a such that the front end 148c of the press-in bolt 148 abuts against the upper surface of the collet ring 42, the press-in bolt 148 is applied to the collet ring 42. The pressing force that is pressed downward is a fixing force that is substantially parallel to the second rotating shaft 38a. The screwing of the press-in bolt 148 is achieved by the fixing portion 155 rotating the press-in bolt 148. The details of the fixing portion 155 are described below.

Further, as shown in FIGS. 9 to 11, since the front end 148c of the press-fitting bolt 148 is substantially spherical, the front end 148c of the press-fitting bolt 148 can be brought into point contact with the collet ring 42. Thereby, the wheel carrier joint 35 can be more securely fixed to the wheel carrier mounting block 140.

In the present embodiment, the collet ring 42 and the collet 44 are fixing members for fixing the carrier joint 35 to the carrier mounting block 140.

If the turning portion 38 shown in FIG. 9 can swing the wheel carrier mounting block 140, the pressing force from the press-in bolt 148 is imparted to the collet ring 42 so that the collet ring 42 is pressed down, and the collet is clamped. The cylinder 44b of 44 will abut against the inner wall 42c in the enclosed space surrounded by the inner wall 42c. Further, by the application of the press-fitting force, the inner diameter D11 of the cylindrical body 44b gradually becomes smaller as the shape of the inner wall 42c. Finally, as shown in FIGS. 10 and 11, the turning portion 38 of the wheel carrier joint 35 abuts against the cylindrical body 44b of the collet 44. Thereby, the state in which the turning portion 38 of the carrier joint 35 is fixed by the collet ring 42 and the collet 44 is achieved. That is, the wheel carrier joint 35 is fixed to the carrier mounting block 140 by the application of the pressing force.

When the press-fitting force from the press-fitting bolt 148 is released, the collet ring 42 is returned to the initial position above the collet 44 by the urging force from the compression spring 45.

Further, as shown in Figs. 9 to 11, in the present embodiment, the bearings 46 and 47 are sandwiched between the bottom plate 140c provided at the bottom of the wheel frame mounting block 140 and the annular plate 44a of the collet 44.

When the pressing force from the press-in bolt 148 is imparted to the collet ring 42, the bearings 46, 47 disposed between the bottom plate 140c of the carrier mounting block 140 and the annular plate 44a of the collet 44 are given a compressive force, thereby The bearings 46, 47 are prevented from rotating. Thereby, the wheel frame joint 35 can be more securely fixed to the wheel frame mounting block 140.

The lifting unit 150 is configured to press the scribing wheel 60 supported by the free wheel frame 31 by moving the wheel frame mounting block 140 in the vertical direction to press the brittle material substrate 4 (see FIGS. 1 and 2) held by the holding unit 10 force. As shown in FIGS. 12 and 13, the lifting portion 150 mainly includes a cylinder 151, a transmission portion 152, a guiding mechanism 153, and a mounting plate 154.

The cylinder 151 is a driving force supply source for moving the carrier mounting block 140 in the vertical direction (Z-axis positive or negative direction). As shown in FIGS. 12 and 13, the air cylinder 151 is disposed above the wheel mounting block 140, and mainly includes a body portion 151a and a rod 151b.

The rod 151b is movable forward and backward with respect to the body portion 151a. As shown in FIGS. 12 and 13, the lower end of the rod 151b is opposed to the transmission portion 152. Therefore, the air cylinder 151 can be driven to allow the rod 151b to enter and exit from the main body portion 151a, and the transmission portion 152 is pressed downward by the lower end of the rod 151b.

The transmission portion 152 is disposed between the cylinder 151 and the carrier mounting block 140 and transmits the driving force from the cylinder 151 to the carrier mounting block 140. As shown in FIGS. 12 and 13, the transmission portion 152 mainly includes a base member 152a and a gate bracket 152b.

The base member 152a is disposed at a position opposed to the rod 151b of the air cylinder 151. The base member 152a includes a disk body 152a1 disposed at an upper portion and a rod body 152a2 extending downward from the disk body 152a1. As shown in Figs. 12 and 13, the disk body 152a1 is disposed to face the lower end of the rod 151b, and if the rod 151b enters and exits in the lower direction, the lower end of the rod 151b abuts against the disk body 152a1. Upper surface. Further, the rod body 152a2 is fitted to the upper portion of the door bracket 152b (beam member 152d).

The gantry bracket 152b is a bridge structure provided on the upper portion of the wheel frame mounting block 140. As shown in FIGS. 12 and 13, the gate bracket 152b includes two pillar members 152c extending in the vertical direction and a beam member 152d spanned above the two pillar members 152c.

As shown in FIG. 13, the guide mechanism 153 mainly includes a guide rail 153a and a guide block 153b that slides freely in the vertical direction along the guide rail 153a. Further, the mounting plate 154 is a plate member interposed between the guiding mechanism 153 and the carrier mounting block 140. The wheel carrier mounting block 140 is fixed to the guide block 153b via a mounting plate 154.

With the above configuration, the carriage mounting block 140 that receives the driving force from the cylinder 151 via the transmission portion 152 in the elevating portion 150 is guided by the guiding mechanism 153 to move in the vertical direction. The scribing load of the scribing wheel 60 provided below the carrier mounting block 140 can be preferably set by adjusting the driving force of the cylinder 151.

The fixing portion 155 is configured to cause a press-fitting force to press the collet ring 42 downward into the press-in bolt 148 when the carrier joint 35 is fixed to the carrier mounting block 140.

As shown in FIG. 13, the fixing portion 155 mainly includes a rotary actuator 155a and a plurality of (two in the present embodiment) gears 156 (drive side gear 156a, passive side gear 156b).

The rotary actuator 155a is a rotational force supply source that rotates the shaft 157a in accordance with the supply state of the compressed air. As shown in FIG. 13, a drive side gear 156a (second rotation element) is provided at the lower end of the shaft 157a, and the drive side gear 156a is rotated in accordance with the rotation state of the rotary actuator 155a.

The driven side gear 156b (first rotating element) is disposed above the press-fitting bolt 148. As shown in FIGS. 12 and 13, the driven side gear 156b is fixed to the shaft 157b. Further, as shown in Fig. 12, the upper end and the lower end of the shaft 157b are pivotally supported by the bearings 158a, 158b, respectively. Further, the bearings 158a and 158b are fixed to the substrate 150c via the corresponding upper and lower bearing housings 159a and 159b, respectively.

The driven side gear 156b is coupled to the drive side gear 156a in linkage. Therefore, the drive side gear 156a is rotated by the rotary actuator 155a, and the rotational force is given to the driven side gear 156b from the drive side gear 156a.

Further, as shown in FIGS. 12 and 13, a pin 157c for rotating the both of the driven side gear 156b and the press-fitting bolt 148 is provided. The pins 157c are inserted into the holes respectively provided in the passive side gear 156b and the press-in bolt 148 (more specifically, the rotating plate 148a). Thereby, the rotational force received by the driven side gear 156b is transmitted to the press-in bolt 148 via the pin 157c, thereby rotating the press-in bolt 148.

With the above configuration, in the fixing portion 155, the press-fitting bolt 148 can be rotated by rotating the air cylinder 151, and the front end 148c can be moved in the vertical direction. The cylinder 151 is rotated by screwing the press-in bolt 148 into the mounting block body 140a, and as described above, the front end 148c of the press-in bolt 148 abuts against the upper surface of the collet ring 42, and further, The pressing force for pressing the collet ring 42 downward can be given as a fixing force substantially parallel to the second rotating shaft 38a. As a result, the wheel carrier joint 35 is fixed to the wheel frame mounting block 140. Needless to say, the pressing force from the press-in bolt 148 acting on the collet ring 42 can be released by providing the cylinder 151 with reverse rotation.

Further, in the scribing device 1 of the present embodiment, the transmission portion 152 is provided so as to straddle the passive side gear 156b of the fixed portion 155 and the press-in bolt 148 of the carrier mounting block 140. Further, the passive side gear 156b and the press-in bolt 148 are disposed such that the pressing force applied from the scribing wheel 60 to the brittle material substrate 4 and the pressing force that presses the pressing bolt 148 downward are applied to substantially the same straight line. . Thereby, it is possible to more effectively suppress the increase in the formation width of the dicing line while maintaining the state in which the backward tilting effect is disabled while the dicing line SL (see FIG. 3) is formed.

<5. Advantages of the scribing head and the scribing device of the second embodiment>

In the scribing device 1 of the present embodiment, by applying the pressing force (fixing force) substantially parallel to the second rotating shaft 38a to the collet ring 42 by the action of the fixing portion 155, the bracket can be mounted relative to the carrier. The 140-swing wheel carrier joint 35 is fixed relative to the wheel frame mounting block 140. In this case, the post-tilt turning effect is invalidated when the cutting line SL is formed.

In such a scribing apparatus 1, for example, when it is necessary to swing the wheel carrier joint 35 relative to the wheel frame mounting block 140 to perform posture adjustment of the scribing wheel 60 on the brittle material substrate 4, the fixing portion 155 can be released. The fixing is such that a back tilting effect is produced in the scribing wheel 60. Further, when the wheel carrier 35 is fixed in order to complete the posture adjustment, only the pressing force (fixing force) substantially parallel to the second rotating shaft 38a is given. Therefore, the fixing position of the carrier joint 35 is displaced due to the pressing force. inhibition.

Moreover, when the wheel frame joint 35 is fixed relative to the wheel frame mounting block 140 by the action of the fixing portion 155, the formation width of the cutting line can be made smaller than that without the wheel frame joint. 35 fixed situation. In this case, the wheel carrier joint 35 does not receive a force substantially in the same direction as the traveling direction of the scribing wheel 60 and a force substantially the same as the direction of the first rotating shaft 32a of the scribing wheel 60, and is used as a pressing force (fixed). force).

Therefore, according to the scribing device 1 of the present embodiment, when the posture of the scribing wheel 60 is adjusted, the rotational position of the wheel carrier 35 to the carrier mounting block 140 can be easily changed, so that when the cutting line SL is formed, It is preferable to suppress the formation width of the cutting line from increasing.

1. . . Scribing device

4. . . Brittle material substrate

10. . . Holding unit

20. . . Line unit

30. . . Dash head

31. . . Wheel carrier

32a. . . 1st shaft

35. . . Wheel connector

38. . . Turning part

38a. . . 2nd shaft

40. . . Wheel mount block

42. . . Set of claw rings

42c. . . Inner wall

44. . . Collet

44a. . . Ring plate

44b. . . Cylinder

44c. . . Through hole

45. . . compressed spring

46, 47. . . Bearing

48, 148. . . Press-in bolt (press-in part)

50. . . Drive department

60. . . Scribing wheel

150. . . Lifting department

151. . . Cylinder (driving force supply source)

152. . . Transmission department

153. . . Guiding mechanism

155. . . Fixed part

155a. . . Rotary actuator (rotational force supply source)

156a. . . Drive side gear (second rotating element)

156b. . . Passive side gear (first rotating element)

Fig. 1 is a front elevational view showing an overall configuration example of a scribing apparatus according to an embodiment of the present invention.

Fig. 2 is a side view showing an overall configuration example of one of the scribing devices in the embodiment of the present invention.

Fig. 3 is a front elevational view showing a configuration example of a vicinity of a scribing wheel.

Fig. 4 is a side view showing a configuration example of a vicinity of a wheel carrier mounting block.

Fig. 5 is a bottom view showing a configuration example of the vicinity of the scribing wheel.

Figure 6 is a bottom view for explaining the backward tilting effect.

Fig. 7 is a side view showing the state after the carrier connector 35 is fixed to the carrier mounting block 40.

Figure 8 is a cross-sectional view of the vicinity of the wheel mounting block viewed from line V-V of Figure 7.

Fig. 9 is a side view showing a configuration example of a vicinity of a wheel carrier mounting block.

Fig. 10 is a side view showing the state after the carrier connector 35 is fixed to the carrier mounting block 140.

Figure 11 is a cross-sectional view of the vicinity of the wheel mounting block as viewed from line V-V of Figure 10.

Fig. 12 is a side view showing a configuration example of a vicinity of a scribing head.

Fig. 13 is a front elevational view showing a configuration example of a vicinity of a scribing head.

30. . . Dash head

31. . . Wheel carrier

32. . . pin

32a. . . 1st shaft

33. . . Support frame

35. . . Wheel connector

36. . . Mounting piece

38. . . Turning part

38a. . . 2nd shaft

40. . . Wheel mount block

40a. . . Installation block body

40b. . . Bottom plate

42. . . Set of claw rings

42a. . . Disk body

42b. . . Outer wall

42c. . . Inner wall

44. . . Collet

44a. . . Ring plate

44b. . . Cylinder

44c. . . Through hole

45. . . compressed spring

46, 47. . . Bearing

48. . . Press-in bolt (press-in part)

48a. . . Front end of bolt

49. . . Nut

60. . . Scribing wheel

D11. . . Inner diameter of the cylinder

D12. . . Outer diameter of the cylinder

D21. . . Inner diameter of the inner wall

Claims (7)

A scribing head characterized in that a cutting line along a traveling direction of a scribing wheel is formed on the brittle material substrate by advancing and retreating with respect to the brittle material substrate, and includes: (a) a wheel carrier, a swash wheel that rotatably supports the first rotating shaft that is substantially perpendicular to the traveling direction; (b) a wheel carrier mounting block that is disposed above the wheel carrier; and (c) a wheel carrier joint The wheel carrier is attached to the lower portion, and is rotatable about the second mounting shaft that is substantially perpendicular to the traveling direction and the first rotating shaft, and is swingably supported by the carrier mounting block; the first rotating shaft Arranging from the right side of the second rotating shaft along the traveling direction of the scribing wheel, and in the wheel mounting block, the wheel is fixed by a fixing force in a direction substantially parallel to the second rotating shaft The frame joint is fixed with respect to the above-mentioned wheel frame mounting block; wherein the wheel frame joint includes: (c-1) a turning portion rotatably supported relative to the wheel frame mounting block; the wheel frame mounting block includes: (b- 1) Collet, with a hollow cylindrical body extending along the second rotating shaft; and (b-2) a collet ring having an annular wall portion concentric with the cylindrical body and extending from above the collet toward the collet ;and (b-3) a press-fitting portion provided above the collet ring and generating a pressing force for pressing the collet ring substantially parallel to the second rotating shaft, wherein the pressing force is the fixing force; the wheel frame joint The turning portion is rotatable with respect to the carriage mounting block in a state of being inserted into the tubular body of the collet; and the press-fitting force from the press-fitting portion is imparted to the collet ring. In the enclosed space surrounded by the wall portion, the cylindrical body is brought into contact with the wall portion and the rotating portion, whereby the rotating portion of the carrier joint is fixed to the collet. The scribe head of claim 1, wherein the scribe head comprises: (d) a fixing portion configured to fix a fixed position of the wheel carrier joint with respect to the wheel frame mounting block; and the fixing portion generates the fixing force . A scribing head according to claim 2, wherein said wheel carrier joint comprises: (c-1) a revolving portion rotatably supported relative to said wheel frame mounting block; said wheel carrier mounting block comprising: (b-1) a collet having a hollow cylindrical body extending along the second rotating shaft; and (b-2) a collet ring having a ring concentric with the cylindrical body and extending from above the collet toward the collet And the (b-3) press-fitting portion is disposed above the collet ring and presses the collet ring substantially parallel to the second rotating shaft; the revolving portion of the carrier joint is attached to Inserted onto the above collet In the state of the cylindrical body, the frame mounting block is rotatable; and the fixing portion is configured to press the press-fitting portion to cause the press-fitting portion to be substantially parallel to the second rotating shaft. The press-fitting force press-fitted by the collar is used as the fixing force; the press-fitting force from the press-fitting portion is applied to the collet ring, and the cylinder is abutted in the surrounding space surrounded by the wall portion The wall portion and the turning portion thereby fix the rotating portion of the wheel carrier joint to the collet. The scribe head of claim 3, wherein an outer thread is formed on an outer circumference of the press-fitting portion; and a screw hole corresponding to the outer thread is provided on an upper portion of the wheel frame mounting block; and the fixing portion is formed by the pressure The insertion portion is rotated, and the front end of the press-fitting portion is screwed into the wheel carrier mounting block to apply the pressing force to the collet ring. The scribe head of claim 4, further comprising: (e) a lifting portion that imparts the above-mentioned scribing wheel supported by the wheel frame to the brittle material substrate by moving the wheel frame mounting block in the vertical direction The pressing force includes: (e-1) a driving force supply source disposed above the wheel mounting block and supplying the driving force in the vertical direction; (e-2) a transmitting portion provided in the driving force Arranged along the above-mentioned up and down direction The driving force is applied to the carrier mounting block between the wheel carrier mounting block and the driving force supply source; and (e-3) a guiding mechanism that guides the movement in the vertical direction a fixing unit including: (c-1) a first rotating element disposed above the press-fitting portion and rotating the press-fitting portion; (c-2) a second rotating element disposed at the a side of the first rotating element and connected to the first rotating element; and (c-3) a rotational force supply source that rotates the second rotating element to generate a rotational force from the second rotating element The transmission unit is provided to the first rotating element, and the transmission unit is provided to extend across the press-fitting unit and the first rotating element disposed along the vertical direction. The scribing head according to any one of claims 1 to 5, wherein the collet further comprises: an annular plate disposed at a lower portion of the cylindrical body and formed in a vicinity of the center to communicate with the hollow space in the cylinder body a through hole; the wheel carrier mounting block further includes: (b-4) a bearing disposed under the annular plate and pivotally supporting the rotating portion; the bearing is clamped to the bottom of the wheel mounting block and the above Between the ring plates. A scribing device characterized in that it is as claimed in claims 1 to 5 One of the scribing heads includes a holding unit that relatively moves the above-described brittle material substrate to the scribing head while holding the brittle material substrate.