TWI469838B - Metrics, wire saws, and methods of securing work pieces - Google Patents

Description

Metrics, wire saws, and methods of securing work pieces

The present invention relates to a wire saw for cutting a work piece made of a brittle material such as a semiconductor material or a ceramic by a steel wire, and more particularly to a measuring jig for measuring the position of a steel wire, a wire saw having a measuring jig, and Use the work piece fixing method of the measurement fixture.

The wire saw has a plurality of main rollers and a steel wire that is stretched between the two main rollers. The steel wire is wound into a spiral shape at a predetermined pitch for a plurality of main rollers. The steel wire runs along its axis. And a slurry containing abrasive grains is supplied to the steel wire. In the case where abrasive grains such as diamonds are held on the steel wire, it is not necessary to supply the slurry. According to the crystal orientation of the workpiece, the position of the workpiece is adjusted in such a manner that the position of the workpiece and the steel wire have a specified relationship. In this state, the workpiece is pushed toward the steel wire and cut into a sheet shape.

The wire saw disclosed in Patent Document 1 is provided with a workpiece azimuth adjusting device for adjusting the positional relationship between the crystal orientation of the workpiece and the running direction of the steel wire. The wire saw supports the work piece support table on the frame. The work piece support table is rotatable about the support shaft in the horizontal plane. A work piece support body supporting the work piece is disposed under the work piece support table. The frame is provided with an adjustment member for adjusting the crystal orientation of the workpiece to coincide with the running direction of the steel wire. A differential speed reduction mechanism is disposed between the adjustment member and the workpiece support table. The differential speed reduction mechanism decelerates and transmits the adjustment amount of the adjustment member to the workpiece support table.

When the workpiece is cut, the workpiece is fixed while being attached to the support plate. On the workpiece support. In this state, the crystal orientation of the workpiece is detected from the end face of the workpiece or the like. Then, the positional relationship between the crystal orientation of the workpiece and the running direction of the steel wire is adjusted by the workpiece orientation adjusting device.

Such a wire saw supports the work piece below the work piece support table by the work piece support structure shown in FIGS. 10 and 11. The workpiece support structure is fixed with a workpiece support 52 below the workpiece support table 51. In the workpiece support body 52, a first support groove 52a having a triangular cross section and a second support groove 52b having a quadrangular cross section are formed. A support block 54 having a fitting portion 54a that is coupled to the first support groove 52a is provided on the support plate 53 to which the work piece W is bonded. The lock member 55 attached to the engagement portion 54a is movably disposed in the second support groove 52b of the workpiece support 52. A pair of fixing bolts 56 for pushing the locking member 55 toward the engaging portion 54a are provided on the side surface of the workpiece supporting body 52.

In a state in which the engaging portion 54a is inserted into the first support groove 52a, the fixing member 55 is screwed to push the lock member 55 toward the engaging portion 54a. Thereby, the support block 54 is fixed to the work piece support body 52, and the work piece W is fixed to the lower part of the work piece support body 52.

According to the above-mentioned work piece supporting structure, the operator needs to inspect the upper body into the processing area of the wire saw, and confirm the positional relationship between the steel wire and the work piece to carry out the work. In other words, the operator needs to confirm the contact state of the engaging portion 54a with respect to the workpiece supporting body 52 by visual observation or the like to perform the work. Further, at this time, as shown by the arrow in Fig. 10, the fixed position of the workpiece W to the workpiece support 52 may also be tilted, or as indicated by the arrow in Fig. 11, the workpiece W may be tilted in the longitudinal direction. In other words, the above-mentioned work is troublesome and time consuming, and There is a problem that the fixed position of the working piece W is prone to error. Further, when the work piece W is fixed to the work piece support body 52, it is necessary to detect the crystal orientation of the work piece W in the state in which the work piece W is fixed, and to adjust the positional relationship between the crystal orientation of the work piece W and the running direction of the steel wire. Therefore, there is a problem that workability is poor and processing efficiency is lowered.

Patent Document 1: Japanese Patent Laid-Open No. Hei 9-141549

SUMMARY OF THE INVENTION An object of the present invention is to provide a measuring jig and a wire saw which are improved in workability and processing efficiency when the work piece is fixed to the work piece supporting portion without adjusting the posture of the work piece to the steel wire.

In order to solve the above problems, the first aspect of the present invention provides a measuring jig that is attached to the work piece supporting portion of the wire saw. The wire saw has a pair of main rollers and a steel wire that is stretched between the two main rollers. The position of the support portion of the workpiece can be adjusted centering on the axis extending in the up and down direction. The metrology fixture is attached to and detached from the workpiece support via a plurality of clamping fittings having a positioning function. A detecting means for detecting the position of the steel wire is provided in the measuring jig.

According to this configuration, when the main roller is replaced, when the steel wire is stretched between the main rollers, the measuring jig is passed through a plurality of clamping devices having a positioning function. And fixed to the workpiece support portion. Thereby, the position of the measuring fixture to the workpiece supporting portion is determined without error and with high precision. In this state, the detecting means detects the position of the steel wire, and adjusts the position of the workpiece supporting portion around the axis extending in the vertical direction in accordance with the detection result. As a result, the position of the clamp fitting on the workpiece support portion is set in such a manner that the position of the steel wire satisfies the specified relationship. When the work piece is fixed on the work piece supporting portion, the work piece is fixed to the work piece jig in a state in which the posture of the work piece is adjusted in advance. Then, the workpiece clamp is fixed to the workpiece support via a plurality of clamping fittings. In this way, the correct position of the workpiece clamp to the workpiece support can be reproduced repeatedly. Therefore, the position of the workpiece to the support portion of the workpiece is determined in a state in which the positional relationship between the workpiece and the running direction of the steel wire is adjusted. Therefore, when the work piece is fixed to the work piece support portion, it is not necessary to adjust the posture of the work piece to the steel wire. Therefore, the workability is good and the processing efficiency is improved.

In the above measuring fixture, the detecting means should optically detect the position of the steel wire.

In the above-described measuring fixture, the detecting means should preferably be movable along the axis of the steel wire.

In order to solve the above problems, a second aspect of the present invention provides a wire saw having a work piece support portion and a work piece jig. The position of the support portion of the workpiece can be adjusted centering on the axis extending in the up and down direction. The workpiece clamp is attached to the workpiece support portion. The wire saw has the above-described measuring fixture. The workpiece clamp is also detachably attached to the workpiece support portion via a plurality of clamping fittings having a positioning function.

In the wire saw described above, the clamping fitting should control the position of the upper and the lateral direction of the workpiece clamp and the measuring fixture.

In the wire saw described above, the clamping fitting should preferably clamp the workpiece clamp or the measurement fixture by air pressure and spring force.

In order to solve the above problems, a third aspect of the present invention provides a method of fixing a work piece by fixing a work piece to a work piece supporting portion of a wire saw. The method has the following steps: fixing a measuring fixture with a camera on the support portion of the workpiece; moving the camera in the direction of the axis of the steel wire to detect the position of the steel wire; and making the support portion of the working member up and down according to the detection position of the steel wire The direction extending axis is rotated to adjust the position of the workpiece supporting portion; and after the measuring fixture is taken out from the workpiece supporting portion, the workpiece clamping member to which the workpiece is fixed is fixed to the workpiece supporting portion.

In the above method of fixing the working piece, the working piece is preferably fixed to the workpiece holder in a state in which the crystal orientation of the working piece is adjusted.

Hereinafter, an embodiment of a wire saw and a measuring jig which embody the present invention will be described with reference to Figs. 1 to 9 .

As shown in FIG. 1, the wire saw has a machine table 22 and a pillar 23 in the casing 21. The pillar 23 is provided on the machine table 22. A pair of main rollers 24 are rotatably supported on the machine table 22. An annular groove extending along the outer peripheral surface of the main roller 24 is formed in the main roller 24. The steel wire 25 is spirally wound around the main roller 24 at a predetermined pitch. steel 25 lines are arranged between a pair of main rollers 24. The seat plate 26 is supported on the side of the pillar 23 so as to be movable up and down. The seat plate 26 is disposed above the steel wire 25. The workpiece supporting portion 27 is supported by the lower surface of the seat plate 26 via the rotating shaft 28 and the bearing 29. The position of the workpiece supporting portion 27 is adjusted centering on a vertical line extending in the vertical direction as an axis.

As shown in FIGS. 1 to 3, four clamp fittings 30 having a positioning function are provided under the workpiece supporting portion 27. The work piece jig 31 or the metric jig 42 is fixed under the work piece support portion 27 via the clamp fitting 30. As shown in FIG. 4, the workpiece jig 31 is made of a metal plate.

The clamp fitting 30 having a positioning function is a model SWT manufactured by KOSMEK Co., Ltd. Pallet clamp. As shown in FIG. 5, a plurality of recesses 32 corresponding to the respective clamp fittings 30 are formed on the workpiece holder 31. A clamped member 33 that engages or disengages from the clamp fitting 30 is fitted into each of the recesses 32. As shown in FIGS. 3 and 4, the workpiece W is bonded to the lower surface of the workpiece jig 31 via the insert material 34 made of synthetic resin. In this state, the crystal orientation of the workpiece W is adjusted in the circumferential direction, the horizontal direction, and the vertical direction.

The clamp fitting 30 includes a clamp box 35, a plurality of steel balls 36, a taper sleeve 37, a piston rod 38, and a spring 39. A plurality of steel balls 36 are mounted so as to be able to be present on the outer peripheral surface of the tip end of the clamp case 35. The taper sleeve 37 is fixed to the outer peripheral surface of the tip end of the clamp case 35. The piston rod 38 is disposed in the clamp case 35 so as to be movable in the up and down direction. The spring 39 is biased in such a manner that the piston rod 38 is caught from the top end of the clamp box 35. An air blowing passage 40 is formed in the clamp box 35 and the piston rod 38. The blast from the blast passage 40 is blown to the outer peripheral surface of the taper sleeve 37 and the top end of the piston rod 38. In the clamping box 35 A closed air passage 41 is formed in the middle. The enclosed air from the enclosed air passage 41 is supplied to the piston 38a of the piston rod 38.

An upper end reference surface 33a is formed at the upper end of the clamped member 33. The upper end reference surface 33a abuts against the support surface 35a of the clamp case 35. A tapered reference surface 33b is formed on the inner circumferential surface of the clamped member 33. The outer peripheral surface of the taper sleeve 37 is fitted to the tapered reference surface 33b. A convex portion 33c that is coupled to the steel ball 36 is provided on the inner circumferential surface of the clamped member 33.

In a state where the workpiece jig 31 is taken out from the workpiece supporting portion 27, the blast is blown from the blast passage 40 to the outer peripheral surface of the taper sleeve 37 and the tip end of the piston rod 38. Thereby, impurities such as cutting powder are suppressed from adhering to the taper sleeve 37, and impurities are intruded into the vicinity of the steel ball 36 from the tip end of the piston rod 38.

From the state shown in FIG. 5, as shown in FIG. 6, the workpiece jig 31 is fixed to the workpiece supporting portion 27. In this case, the tip end portion of the clamp case 35 and the taper sleeve 37 are inserted into the inside of the clamped member 33. Further, the tip end of the piston rod 38 abuts against the bottom surface of the recess 32 of the workpiece clamp 31. At this time, between the support surface 35a of the clamp case 35 and the upper end reference surface 33a of the clamped member 33, and the outer peripheral surface of the taper sleeve 37 and the tapered reference surface 33b of the clamped member 33, respectively. There is a gap. These gaps are formed by blasting from the blast passage 40. Impurities such as cutting powder and cutting oil are removed from the gap by the blast.

Thereafter, the blast from the blast passage 40 is stopped, and the closed air is supplied from the closed air passage 41 to the piston 38a of the piston rod 38. Therefore, as shown in FIG. 7, the piston rod 38 is topped by the air pressure of the enclosed air and the force applied by the spring 39. Start. Therefore, the steel ball 36 moves on the outer peripheral surface in the recess 38b of the piston rod 38, and the clamped member 33 is lifted up via the convex portion 33c. As a result, the upper end reference surface 33a of the clamped member 33 is crimped to the support surface 35a of the clamp case 35, and the workpiece clamp 31 is clamped to the work piece support portion 27. At this time, the upper end reference surface 33a of the clamped member 33 abuts against the support surface 35a of the clamp case 35, and the tapered reference surface 33b of the clamped member 33 abuts against the outer peripheral surface of the taper sleeve 37, respectively The workpiece clamp 31 is controlled at each of the up and down direction and the lateral direction.

As shown in FIG. 8, when the main roller 24 is replaced, when the steel wire 25 is stretched between the main rollers 24, the measuring jig 42 is fixed to the work piece supporting portion 27 via the clamp fitting 30. Similarly to the workpiece clamp 31, a plurality of clamped members 33 that are engaged or disengaged from the respective clamp fittings 30 are provided on the upper surface of the gauge clamp 42. A guide rail 43 is provided on one side of the measuring jig 42. The guide rail 43 extends substantially along the end surface width direction (the left-right direction of FIG. 8) of the workpiece W supported by the workpiece supporting portion 27. The camera 44 as a detecting means is supported by the guide rail 43 via the bracket 45. Camera 44 is movable along the axis of steel wire 25. The camera 44 optically detects the position of the steel wire 25.

Next, the action of the wire saw and the measuring jig will be described with reference to Figs. 1 to 4, 8 and 9.

As shown in FIG. 8, when the main roller 24 or the like is replaced and the steel wire 25 is stretched between the main rollers 24, the measuring jig 42 is fixed to the workpiece supporting portion 27 via the clamp fitting 30. Thereby, the position of the measuring fixture 42 to the workpiece supporting portion 27 is determined with high precision in units of μm. In this state, the operator moves the camera 44 along the guide rail 43 in the axial direction of the steel wire 25. Camera 44 as described above The position of the steel wire 25 is moved and optically detected. As shown in Fig. 9, the position of the workpiece supporting portion 27 around the vertical line is adjusted by the rotating shaft 28 in accordance with the detected position of the steel wire 25. As a result, the position of the clamp fitting 30 is set in such a manner that the position of the steel wire 25 satisfies the specified relationship.

Further, when the work piece W is processed by the wire saw, as shown in FIGS. 2 to 4, the work piece W is attached to the lower surface of the work piece jig 31 via the insert material 34. In this state, the crystal orientation of the workpiece W is adjusted in the circumferential direction, the horizontal direction, and the vertical direction. By fixing the workpiece clamp 31 to the workpiece support portion 27 via the clamp fitting 30, the correct position of the workpiece holder 31 against the workpiece support portion 27 is reproduced. Further, at this time, in a state where the crystal orientation of the workpiece W is adjusted, the workpiece W is correctly positioned to the workpiece supporting portion 27. Therefore, when the work piece W is fixed to the work piece support portion 27, it is not necessary to adjust the direction of the work piece W to the steel wire and the crystal orientation of the work piece W.

Thereafter, when the machining of the workpiece W is started, as shown in Fig. 1, the main roller 24 rotates, and the steel wire 25 runs in the axial direction. At the same time, a slurry containing abrasive grains is supplied from the slurry supply device (not shown) on the steel wire 25. In this state, when the seat plate 26 is lowered, the work piece W is pushed to the steel wire 25. Thus, the workpiece W has a specified positional relationship with the running direction of the steel wire 25, and is cut into a sheet shape.

Therefore, according to this embodiment, the following effects can be obtained.

(1) When the main roller 24 is replaced, when the steel wire 25 is stretched between the main rollers 24, the measuring jig 42 is fixed to the workpiece supporting portion via the clamping fitting 30. 27 on. At this time, the position of the measuring fixture 42 to the workpiece supporting portion 27 is determined without error and with high precision. In this state, the camera 44 detects the position of the steel wire 25, and adjusts the position of the workpiece supporting portion 27 around the vertical line in accordance with the detection result. As a result, the position of the clamp fitting 30 on the workpiece supporting portion 27 is set in such a manner that the position of the steel wire 25 satisfies the specified relationship. Further, when the work piece W is fixed to the work piece supporting portion 27, the work piece W is fixed to the work piece jig 31 with the crystal orientation of the work piece W adjusted in advance. Then, the workpiece clamp 31 is fixed to the workpiece support portion 27 via the clamp fitting 30 together with the workpiece W. Thereby, the correct position of the workpiece holder 31 to the workpiece supporting portion 27 is reproduced in reverse. Therefore, the position of the work piece W to the work piece support portion 27 is determined in a state where the positional relationship between the work piece W and the running direction of the steel wire 25 is adjusted. Thereby, whenever the work piece W is fixed on the work piece supporting portion 27, the operator does not need to inject the upper body into the wire saw to adjust the posture of the work piece W, and only the camera 44 can be moved during the measurement. Therefore, the workability is good and the processing efficiency is improved.

(2) The camera 44 optically detects the position of the steel wire 25 and is movable along the axis of the steel wire 25. According to this configuration, the position of the steel wire 25 can be correctly detected by the camera 44.

(3) The upper and lower positions of the workpiece jig 31 and the metric jig 42 are respectively regulated by the clamp fittings 30. According to this configuration, as long as the workpiece jig 31 or the metric jig 42 is fixed to the workpiece supporting portion 27 via the clamp fitting 30, the upper and lower positions of the workpiece jig 31 or the metric jig 42 can be controlled. In other words, the correct position of the workpiece clamp 31 or the metrology fixture 42 fixed to the workpiece support portion 27 can be reproduced repeatedly. In addition, at this time, the workpiece clamp 31 or the measurement fixture can be quickly and appropriately clamped by using the air pressure and the spring force. 42. Thereby, the workpiece clamp 31 or the measurement fixture 42 can be easily fixed to the workpiece support portion 27, and the operation time can be shortened.

This embodiment can also be changed as follows.

The means of detecting the metrology fixture 42 can also be a mirror. At this time, similarly to the camera 44, the position of the steel wire 25 can be confirmed from the outside of the jigsaw.

The configuration of the clamp fitting 30 and the clamped member 33 can also be arbitrarily changed. For example, the clamp member 30 and the clamped member 33 can also be clamped by magnetic attraction.

The workpiece W is not limited to a single crystal material having a crystal orientation, and may be a polycrystalline material. Further, the cross-sectional shape of the workpiece W may be square in addition to the cylinder.

21‧‧‧Chassis

22‧‧‧ machine

23‧‧‧ pillar

24‧‧‧Main Roller

25‧‧‧ steel wire

26‧‧‧ seat board

27‧‧‧Workpiece support

28‧‧‧Rotary axis

29‧‧‧ Bearing

30‧‧‧Clamping accessories

31‧‧‧Workpiece fixture

32‧‧‧ recess

33‧‧‧Clamped components

33a‧‧‧Upper datum

33b‧‧‧Conical datum

33c‧‧‧ convex

34‧‧‧Insert material

35‧‧‧Clamping box

35a‧‧‧ support surface

36‧‧‧ steel ball

37‧‧‧ cone sleeve

38‧‧‧ piston rod

38a‧‧‧Piston

38b‧‧‧ recess

39‧‧‧ Spring

40‧‧‧Blasting path

41‧‧‧Closed air path

42‧‧‧Measurement fixture

43‧‧‧rail

44‧‧‧ camera

45‧‧‧ bracket

51‧‧‧Working table support

52‧‧‧Workpiece support

52a‧‧‧1st support groove

52b‧‧‧2nd support groove

53‧‧‧Support board

54‧‧‧Support block

54a‧‧‧ Department

55‧‧‧Locking members

56‧‧‧ fixing bolts

W‧‧‧Workpieces

1 is a front view showing a wire saw according to an embodiment of the present invention, FIG. 2 is a partial front view showing the vicinity of a support member of the wire saw, and FIG. 3 is an enlarged view of the vicinity of the support portion of the wire saw. Partial side view, FIG. 4 is a perspective view showing a workpiece holder to which a workpiece is fixed, FIG. 5 is a partial cross-sectional view showing the vicinity of the clamp fitting of the wire saw, and FIG. 6 is a view showing the workpiece clamp fixed to the workpiece. a partial cross-sectional view of the state on the support portion, and FIG. 7 is a partial cross-sectional view for explaining the action of the clamp fitting, 8 is a partial front view showing a state in which the measuring jig is fixed to the work piece supporting portion, FIG. 9 is a partial side view showing a state in which the measuring jig is fixed to the work piece supporting portion, and FIG. 10 is a view showing the previous working piece. A partial front view of the support structure, and Figure 11 is a partial side view showing the prior work piece support configuration.

25‧‧‧ steel wire

26‧‧‧ seat board

27‧‧‧Workpiece support

28‧‧‧Rotary axis

29‧‧‧ Bearing

30‧‧‧Clamping accessories

33‧‧‧Clamped components

42‧‧‧Measurement fixture

43‧‧‧rail

44‧‧‧ camera

45‧‧‧ bracket

Claims (7)

A measuring fixture is selectively attached to the workpiece supporting portion of the wire saw, and the wire saw has a pair of main rollers and a steel wire stretched between the two main rollers, and the working piece supports The position of the portion is adjustable from the axis extending in the upper and lower directions, wherein the measuring fixture is attached to and detached from the workpiece supporting portion via a plurality of clamping fittings provided on the working member supporting portion and having a positioning function. A detecting means for optically detecting the position of the aforementioned steel wire is provided in the aforementioned measuring jig. The measuring jig of claim 1, wherein the detecting means is movable along an axis of the steel wire. A wire saw having a workpiece support portion and a workpiece clamp, wherein the position of the workpiece support portion is adjustable centering on an axis extending in the upper and lower directions, and the workpiece clamp is attached to and detached from the workpiece support portion, and is characterized by: The wire saw has the measuring fixture of the first application of the patent scope, and the workpiece clamp is also attached to and detached from the workpiece supporting portion by a plurality of clamping fittings having a positioning function. A wire saw according to claim 3, wherein the clamp fitting controls the position of the workpiece clamp and the upper and the lateral direction of the measuring fixture. A wire saw according to claim 4, wherein the aforementioned clamping fitting clamps the workpiece holder or the aforementioned measuring fixture by air pressure and spring force. A method for fixing a work piece, which is to fix a work piece to a work piece of a wire saw The support portion includes the steps of: fixing a measuring fixture having a camera on the supporting member of the working piece; moving the camera in the axial direction of the steel wire to detect the position of the steel wire; and determining the position of the steel wire according to the detection position of the steel wire The workpiece supporting portion rotates around an axis extending in the up-and-down direction to adjust the position of the workpiece supporting portion; and after the measuring fixture is taken out from the workpiece supporting portion, the workpiece holder fixed to the workpiece is fixed to the foregoing On the work piece support. The method of claim 6, wherein the workpiece is fixed to the workpiece holder in a state in which the crystal orientation of the workpiece is adjusted.