TWI466442B - Interdigitated coupling resonator - Google Patents

Description

Interdigitated coupling resonator

The present invention relates to an interdigitated coupling resonator, and more particularly to an interdigitated coupling resonator that increases the sensible area of a capacitor, effectively reduces the impedance value, and improves output efficiency.

With advances in technology, MEMS oscillators have the potential to gradually replace existing oscillators. In general, MEMS oscillators are usually distinguished between low frequency and high frequency applications. The low frequency application is mainly to replace the traditional quartz oscillator, while the high frequency part is used to replace the surface acoustic wave (SAW) filter. And film bulk acoustic resonator (FILM BULK ACOUSTIC RESONATORS, FBAR).

However, in the current MEMS oscillator, in addition to the component quality factor (Q-factor, referred to as Q value), impedance is also one of the important indicators affecting its output. For example, in the field of low frequency applications, if the impedance of the component is too high, that is, it needs to increase the gain of the amplifier, thereby causing the current of the amplifier to increase, resulting in higher power consumption. In addition, in the field of high frequency applications, in the existing communication system, the higher the impedance of the component, the closer the reflection coefficient of the component is to 1, that is, the insertion loss is too high, and is not suitable. Communication system use. Accordingly, how to improve the current problems faced by micro-electromechanical oscillators is worthy of further consideration.

The purpose of the invention is to use a plurality of resonant beams to be connected with at least one coupling beam, so as to increase the capacitive sensing area and achieve the purpose of low impedance.

Still another object of the present invention is to solve the problem of excessive impedance of existing microelectromechanical resonators.

A further object of the present invention is to cause resonance in the width direction of the resonant structure when the 1/2 wavelength of the external electrostatic force signal frequency is the width of the resonant structure.

The interdigitated coupling resonator for achieving the above object comprises: a resonant structure comprising one or more resonant beams and a coupling beam, wherein one or more resonant beam systems are symmetrically connected to opposite sides of the coupling beam; Or a plurality of input electrodes and one or more output electrodes, the input electrodes and the output electrode are alternately disposed between the one or more resonant beams, the input electrodes and the output electrodes and the resonant beams are arranged in parallel with each other a substrate; and a support structure disposed on the substrate, the two ends of the coupling beam being coupled to the support structure to support the resonant structure above the substrate.

Preferably, the interdigital coupled resonator is an integral wave mode oscillator.

Preferably, the input electrode comprises a first member and a second member separated on both sides of the coupling beam, the first member and the second member are connected by a conductive structure, and the output electrode comprises two sides of the coupling beam The third member and the fourth member are separated, and the third member and the fourth member are connected by a conductive structure.

The present invention further includes a first axial direction and a second axial direction, the first axial direction and the second axial direction being perpendicular to each other, and the input electrode and the output electrode and the resonant beam extending along the first axial direction And alternately arranged along the second axis, wherein the first axis, the second axis, the input electrode, the output electrode, the resonant beam and the coupling beam are on the same plane. The input electrode and the output electrode are respectively connected to an integrated circuit (ASIC), so that the input electrode and the output electrode drive the resonant beam to vibrate in the second axial direction.

Preferably, the length of the coupling beam between the two resonant beams is equal to one-half of the resonant wavelength of the resonant beam in the resonant state; wherein the width of the resonant beam is W=(2n+1)×λ/2, Where n is 0, 1, 2, 3, 4... and the length of the coupling beam between the two resonant beams is A1 = (m + 1) × λ / 4, where m is 0, 1, 2, 3, 4 ..., and λ is the resonant wavelength of the resonant beam in the resonant state. Or the length of the coupling beam between the two resonant beams is equal to the width of the resonant beam.

Preferably, the support structure includes a first support member and a second support member, the first support member includes a first support member and a first mount, and the first support member is disposed at the first fix One end of the coupling beam is disposed on the first supporting member; and the second supporting member includes a second supporting member and a second fixing seat, wherein the second supporting member is disposed on the second fixing seat The other end of the coupling beam is disposed on the second support member. The first fixing base includes two first fixing seats respectively disposed at two ends of the first supporting component, so that the first supporting component is suspended and the second fixing seat includes two second fixing seats respectively The second support member is suspended across the two ends of the second support member.

Preferably, in another embodiment, the first supporting element and the second supporting element respectively have two extending cantilevers respectively, and the two cantilever arms are respectively connected to a first elastic supporting member and a second elastic supporting body respectively. And connecting the first elastic support member and the second elastic support member to the coupling beam, respectively, so that the first elastic support member and the second elastic support member support the coupling beam to vibrate.

Preferably, the input electrode or the output electrode is located on the same side of the coupling beam and the same polarity end is connected to each other to form a fork structure, so that the input electrode provides a signal input or the output electrode provides a signal output.

Preferably, the input electrode is integrally formed under the coupling beam, and the input electrode is disposed at a position below the coupling beam with a groove for the input electrode, and the output electrode is integrally formed. Below the coupling beam, a position of the output electrode below the coupling beam is provided with a recess for the output electrode to be disposed.

A fork-type coupling resonator according to still another embodiment of the present invention includes: a resonant structure including a plurality of resonant beams and a coupling beam, wherein the plurality of resonant beam beams are symmetrically connected to opposite sides of the coupling beam; a plurality of electrodes are disposed on adjacent sides of the resonant beam and separated from each other by one or more capacitive gaps; a substrate; and a supporting structure disposed on the substrate, the two ends of the coupling beam being coupled to the support Structurally, the resonant structure is supported above the substrate.

Preferably, the resonant beam width = (2 × n + 1) × λ / 2, where n is 0, 1, 2, 3, 4, ..., and λ is the resonant wavelength of the resonant beam in the resonant state.

Preferably, the resonant beam and the coupling beam are in the same plane, and the resonant beam and the coupling beam are arranged perpendicular to each other.

Preferably, the length of the coupling beam between the two resonant beams is = (n+1) × λ / 4, where n is 0, 1, 2, 3, 4, ..., and λ is the resonant beam in the resonance state Resonance wavelength at the time.

According to still another embodiment of the present invention, the interdigitated coupling resonator includes: a first resonant structure including: a plurality of resonant beams and a coupling beam, the plurality of resonant beam systems being symmetrically coupled to opposite sides of the coupling beam One or more electrodes are disposed on adjacent sides of the resonant beam and separated from each other by one or more capacitive gaps; a second resonant structure includes: a plurality of resonant beams and a coupling beam, and the plurality of resonant beam systems are respectively symmetric Connected to opposite sides of the coupling beam; one or more electrodes are disposed on adjacent sides of the resonant beam and separated from each other by one or more capacitive gaps; a substrate; a supporting structure is disposed on the substrate The two ends of the coupling beam are connected to the support structure to support the first and second resonant structures above the substrate.

Preferably, the resonant beam width = (2 × n + 1) × λ / 2, where n is 0, 1, 2, 3, 4, ..., and λ is the resonant wavelength of the resonant beam in the resonant state.

Preferably, the length of the coupling beam between the two resonant beams is = (n+1) × λ / 4, where n is 0, 1, 2, 3, 4, ..., and λ is the resonant beam in the resonance state Resonance wavelength at the time.

Preferably, the first resonant structure is connected in parallel with the second resonant structure and the coupling beam is connected.

Preferably, the first resonant structure is separated from the second resonant structure.

Based on the above, in the above embodiment of the present invention, a resonant structure composed of at least two resonant beams and a coupling beam connected thereto, and a plurality of electrodes are disposed between the resonant beams to drive the structural vibration, and wherein The length of the coupling beam is one of the two sides of the resonant wavelength. Accordingly, the interdigital coupling resonator formed by the above components can increase the capacitance sensing area thereof and reduce the impedance during operation, thereby improving the output performance of the interdigital coupled resonator.

The above described features and advantages of the present invention will be more apparent from the following description.

The elements of the following embodiments of the invention are identical but different in length or size, and the same elements are still labeled with the same reference numerals. For the same structural part, in order to save space, we will not repeat them.

The calculation of the length or the size or wavelength as close to the present invention are included in the spirit of the present invention.

1 is a top plan view of an interdigitated coupling resonator in accordance with an embodiment of the present invention. Referring to FIG. 1 , in the embodiment, the interdigital coupled resonator 10 is an integrated bulk mode oscillator including a resonant structure 100 , at least one input electrode 110A and at least one output electrode 110B and one The support structure 160 includes a plurality of resonant beams 120, 130 and a coupling beam 140. The plurality of resonant beams 120, 130 are symmetrically coupled to opposite sides of the coupling beam 140, respectively. The resonant beams 120 and 130 are located on the same plane as the coupling beam 140, and the resonant beams 120 and 130 and the coupling beam 140 are disposed perpendicular to each other. The resonant beam 120, 130 and the coupling beam 140 can be integrally formed. The input electrode 110A and the output electrode 110B are alternately disposed between the plurality of resonant beams 120 and 130, but are not in contact as shown. That is, one or more electrodes are disposed on adjacent sides of the resonant beams 120, 130 and separated from one another by one or more capacitive gaps.

For convenience of description, the present invention distinguishes the positional relationship between the input electrode and the output electrode, and the input electrode and the output electrode may be the same material. In order to electrically connect the input electrodes 110A disposed on different sides of the coupling beam 140, each input electrode 110A includes a first member B1 and a second member B2 separated on both sides of the coupling beam 140, and the first member B1 and the The second members B2 are connected by a conductive structure 111. In order to electrically connect the output electrodes 110B disposed on different sides of the coupling beam 140, each of the output electrodes 110B includes a third member C1 and a fourth member C2 separated on both sides of the coupling beam 140, and the third member C1 and The fourth members C2 are connected by a conductive structure 111. The input electrode 110A and the output electrode 110B and the resonant beam 120, 130 are arranged in parallel with each other, and the input electrode 110A and the output electrode 110B and the resonant beam 120, 130 both extend along a first axial direction L1. Arranged alternately along a second axis L2.

In an embodiment, the first axial direction L1 is perpendicular to the second axial direction L2 and is located on the same plane as the input electrode 110A, the output electrode 110B, and the resonant beam 120, 130. Accordingly, the input electrode 110A and the output electrode 110B are respectively connected to an Application Specific Integrated Circuit (ASIC), so that the input electrode 110A and the output electrode 110B can drive and sense the resonant beam 120, The 130 vibrates along the second axis L2.

In an embodiment, the input electrode 110A can be an input electrode, and the output electrode 110B can be an output electrode. In another embodiment, the input electrode 110A can be an output electrode, and the output electrode 110B can be an input electrode. The embodiment in which the at least one input electrode 110A includes a plurality of input electrodes, and the at least one output electrode 110B includes a plurality of output electrodes.

In one embodiment of the present invention, the input electrode 110A has a first end 111A and a second end 112A. The first end 111A or the second end 112A of the input electrode 110A can be a power input end, and the output electrode 110B has a first end 111B and a second end 112B, and the first end 111B or the second end 112B of the output electrode 110B can be a power output. Conversely, the output electrode 110B may be an input electrode, and the input electrode 110A may be an output electrode. The input signals of the input and output electrodes are supplied by the ASIC.

Furthermore, a plurality of resonant beams 120, 130 are connected in parallel to both sides of the coupling beam, wherein the width of the resonant beam 120, 130 is W = (2n + 1) × λ / 2, where n is 0, 1, 2,3,4... In addition, the coupling beam 140 is located between the two resonant beams 120, 130 with a length A1=(m+1)×λ/4, where m is 0, 1, 2, 3, 4.... When m=1 and n=0, that is, the coupling beam width is λ/2, and the resonant beam width is also λ/2, so that the interdigital coupling resonator 10 of the present invention has a better excitation mode. With output power.

In other words, at this time, the length A1 of the coupling beam 140 between the two resonant beams 120, 130 is equal to one-half of the resonant wavelength of the resonant beams 120, 130 in the resonant state. In a preferred embodiment, the coupling beam 140 is located at a length A1 between the two resonant beams 120, 130 and a width W of the resonant beam 120, 130, wherein the length A1 is equal to the width W. However, the structure of the present invention is not limited to the length A1 of the coupling beam 140 between the two resonant beams 120, 130 being equal to the width W of the resonant beam 120. Other embodiments are also included within the spirit of the invention.

As described above, an embodiment of the present invention connects adjacent two pairs of resonant beams 120 and 130 and the coupling beam 140 arranged in parallel, and the input electrodes 110A and the output electrodes are alternately disposed between the two resonant beams 120 and 130. 110B, forming a resonant structure 100 of a bulk wave mode in which the first axial direction L1 can be extended and vibrated along the second axial direction L2. The interdigital coupling resonator 10 can increase the capacitance sensible area except the resonant beams 120 and 130 extending to the first axial direction L1, and the coupling beam 140 can be connected to the plurality of resonant beams 120 and 130, thereby The resonant structure 100 can expand its capacitive sensing area in a two-dimensional space, thereby effectively reducing the impedance value of the interdigital coupled resonator 10 and improving its output efficiency.

Referring again to FIG. 1, in an embodiment, the resonant structure 100 has an overall shape that approximates a fence structure, and each of the two resonant beams 120, 130 is approximately a double-decimal structure. The input electrode 110A and the output electrode 110B are separated by the coupling beam 140 on opposite sides of the coupling beam 140, that is, at the gap between the resonant beam 120, 130 and the coupling beam 140 forming a fence structure. The input electrode 110A and the output electrode 110B are disposed. In other words, the arrangement of the input electrode 110A, the output electrode 110B, the input electrode 110A, the output electrode 110B, the input electrode 110A, and the like may be sequentially arranged at the gap between the resonant beams 120, 130 of the barrier structure. In an embodiment, the input electrode 110A can be an input electrode, and the output electrode 110B can be an output electrode, so as described above, that is, an input electrode, an output electrode, an input electrode, an output electrode, an input electrode... The interaction is alternately arranged between the fence structures, that is, between the plurality of resonant beams. The input electrode 110A and the output electrode 110B and the resonant beams 120 and 130 are arranged in parallel with each other in parallel. The input electrode 110A is divided by the coupling beam 140 into the first member B1 and the second member B2, and the output electrode 110B is divided by the coupling beam 140 into the third member C1 and the fourth member C2, by the first The member B1 and the second member B2 simultaneously drive the resonant beam 120 to oscillate, and the third member C1 and the fourth member C2 sense the resonant beam 120 to oscillate.

In one embodiment, the present invention electrically connects the first member B1 of the input electrode 110A and the second member B2 across the coupling beam 140 by the polysilicon conductive structure 111, and conducts electricity by the other metal wire, for example. The structure 111 electrically connects the third member C1 of the output electrode 110B and the fourth member C2 such that the input electrodes 111A and 112A located on the same side of the resonant beams 120 and 130 have the same driving potential or output electrodes 111B and 112B. The same driving potential is used, wherein the conductive structure 111 can be a polysilicon wire or a metal wire or the like.

On the other hand, the interdigitated coupling resonator 10 further includes a substrate 150 (tantalum substrate) and a support structure 160 disposed on the substrate 150. Both ends of the coupling beam 140 are coupled to the support structure 160 such that the support structure 160 supports the resonant beam 120, 130 and the coupling beam 140 above the substrate 150. In an embodiment, the support structure 160 is disposed on the coupling beam 140. The support structure 160 includes a first support member 161 and a second support member 162. The first supporting member 161 includes a first supporting member 1611 and a first fixing seat 1612. The first supporting member 1611 is disposed on the first fixing seat 1612. Therefore, one end of the coupling beam 140 can be disposed on the first supporting member 1612. On the first support element 1611. The second support member 162 includes a second support member 1621 and a second mount 1622. The second support member 1621 is disposed on the second mount 1622. Therefore, the other end of the coupling beam 140 can be disposed. On the second support element 1621.

In one embodiment, the first fixing base 1612 is two and disposed at two ends of the first supporting component 1611 to suspend the first supporting component 1611. The second fixing base 1622 is two and disposed at two ends of the second supporting member 1621, so that the second supporting member 1621 is suspended.

In another embodiment, the first fixing base 1612 and the second fixing base 1622 are one, and the first supporting element 1611 and the second supporting element 1621 respectively have two extending cantilevers, the two cantilever Separating the first elastic support member and the second elastic support member respectively, and connecting the first elastic support member and the second elastic support member to the coupling beam 140 respectively, so that the first elastic support member and the first elastic support member The two elastic supports support the coupling beam 140 to vibrate. This embodiment mode is as shown in Fig. 5.

However, the present invention does not limit the two adjacent surfaces of the resonant beams 120 and 130 to have the same electrical phase, that is, the configuration of the input electrode 110A and the output electrode 110B in the present invention is not limited.

2 is a top plan view of an interdigitated coupling resonator according to another embodiment of the present invention. Referring to FIG. 2, different from the above embodiment, one end side of the input electrode 110A or the output electrode 110B having the same polarity on the same side of the coupling beam 140 may be connected to each other on the same plane to form a fork structure F1. Or F2, and further, the electrodes 110A and 110B of the present embodiment are disposed between the resonant beams 170 to form two fork-shaped structures F1 and F2 opposed to each other.

Furthermore, the present invention also does not limit the number of the resonant beam 170 and the coupling beam 140. As shown in FIG. 2, the designer can perform the plurality of resonant beams 170 and the coupling beam 140 along the second axial direction L2 according to the use requirements of the designer. Parallel structure.

3 is a plan view of a third embodiment of the interdigitated coupling resonator of the present invention. The structure of the embodiment is similar to that of the previous embodiment, and the difference is that the lengths of the resonant beams 120 and 130 of the present embodiment are different. The foregoing embodiments are different. In the present embodiment, the width of the resonant beam 120, 130 is W = (2n + 1) × λ/2, where n is 0, 1, 2, 3, 4.... In addition, the coupling beam 140 is located between the two resonant beams 120, 130 with a length A1=(m+1)×λ/4, where m is 0, 1, 2, 3, 4.... When m=1 and n=1, the length of the coupling beam 140 between the two resonant beams 120, 130 is λ/2, and the width of the resonant beam 120, 130 is 3λ/2, the width of the resonant beam 120, 130 Widening. The length of the coupling beam 140 between the two resonant beams 120, 130 is λ/2, and λ is the resonant wavelength of the resonant beams 120, 130 in the resonant state. The structure of the present invention is not limited to the width W of the resonant beams 120, 130 being equal to half the wavelength of the resonant frequency.

One end side of the input electrode 110A or the output electrode 110B having the same polarity on the same side of the coupling beam 140 may be connected to each other on the same plane to form a fork structure F1 or F2, thereby further the electrode 110A of the present embodiment. 110B is disposed in the resonant beams 120, 130 to form two mutually opposite fork structures F1, F2.

4 is a plan view of a fourth embodiment of the interdigitated coupling resonator of the present invention. The structure of the embodiment is similar to that of the previous embodiment, and the difference is that the lengths of the resonant beams 120 and 130 of the present embodiment are different. The foregoing embodiments are different. In the present embodiment, the width of the resonant beam 120, 130 is W = (2n + 1) × λ/2, where n is 0, 1, 2, 3, 4.... In addition, the coupling beam 140 is located between the two resonant beams 120, 130 with a length A1=(m+1)×λ/4, where m is 0, 1, 2, 3, 4.... When m=0 and n=0, the length of the coupling beam 140 between the two resonant beams 120, 130 is λ/4, and the length of the coupling beam 140 between the two resonant beams 120, 130 is narrowed, and the resonant beam is The width of 120, 130 is λ/2. That is, the width of the resonant beams 120, 130 is W = λ/2, and λ is the resonant wavelength of the resonant beams 120, 130 in the resonant state. One end side of the input electrode 110A or the output electrode 110B having the same polarity on the same side of the coupling beam 140 may be connected to each other on the same plane to form a fork structure F1 or F2, thereby further the electrode 110A of the present embodiment. 110B is disposed on the resonant beams 120, 130 to form two forked structures F1, F2 that face each other.

Figure 5 is a schematic view showing a fifth embodiment of the interdigitated coupling resonator of the present invention. Fig. 6 is a partial plan view of the interdigitated coupling resonator of Fig. 5; Referring to FIG. 5 and FIG. 6 simultaneously, in the embodiment, the interdigital coupling resonator 200 includes a substrate 210, a resonant structure 211 includes a plurality of resonant beams 220 and a coupling beam 230, and a plurality of input electrodes 240A. A plurality of output electrodes 240B and a pair of support structures 250. The support structure 250 is disposed on the substrate 210. The support structure 250 includes a first support member 251 and a second support member 252. The first supporting member 251 includes a first supporting member 2511 and a first fixing seat 2512. The first supporting member 2511 is disposed on the first fixing seat 2512. Therefore, one end of the coupling beam 230 can be disposed at the first supporting member 2511. On the first support element 2511. The second supporting member 252 includes a second supporting member 2521 and a second fixing member 2522. The second supporting member 2521 is disposed on the second fixing seat 2522, so that the other end of the coupling beam 140 can be disposed. On the second support element 2521. In one embodiment, the first supporting member 2511 and the second supporting member 2521 each have two extending cantilevers 2513, 2523, respectively, and the two cantilevers 2513, 2523 are respectively connected to a first elastic supporting member 2514. And the second elastic support member 2524, the first elastic support member 2514 and the second elastic support member 2524 are respectively connected to the two ends of the coupling beam 230, so that the first elastic support member 2514 and the second elastic support The member 2524 supports the coupling beam 230 to vibrate.

A plurality of resonant beams 220 are symmetrically coupled to opposite sides of the coupling beam 230, respectively. The resonant beam 220 and the coupling beam 230 are located on the same plane, and the resonant beam 220 and the coupling beam 230 are perpendicular to each other. The resonant beam 220 and the coupling beam 230 can be integrally formed. The plurality of resonant beams 220 are symmetrically connected to opposite sides of the coupling beam 230 to form a grid structure, and the supporting structure 250 is coupled to opposite ends of the coupling beam 230 to allow the supporting structure 250 to The resonant beam 220 and the coupling beam 230 are supported above the substrate 210. The input electrode 240A and the output electrode 240B are alternately disposed at a gap of the grid structure of the resonant structure 211 to form an interaction with the resonant beam 220. The input electrode 240A, the output electrode 240B and the resonant beam 220 are alternately disposed. Parallel to each other, that is, the resonant beam 220 and the input electrode 240A and the output electrode 240B extend in the first axial direction L1 and are arranged along the second axial direction L2. It should be noted that the input electrode 240A and the output electrode 240B are above or below the coupling beam 230 along the first axial direction L1, so that the same resonant beam 220 can be driven by the input electrode 240A and sensed by the output electrode 240B. . In addition, as in the embodiment of FIG. 2, the electrodes of the present embodiment can also be connected to the input electrode 240A or the output electrode 240B having the same polarity on the same side of the coupling beam 230 to form a fork-like structure on the same plane. This will not be repeated.

As shown in FIG. 6 , the input electrode 240A or the output electrode 240B may be integrally formed under the coupling beam 230 , and the input electrode 240A or the output electrode 240B is disposed at a position below the coupling beam 230 . The grooves 241, 242 are provided for the input electrode 240A or the output electrode 240B.

This embodiment can be configured as shown in FIG. 2, and the difference is that the coupling beam 230 is disposed in the grooves 241 and 242 of the input electrode 240A or the output electrode 240B. Second, the design of the support structure 251, 252.

Please refer to FIG. 7 which is a plan view of a finger-type coupling resonator with a dual-frequency output function according to a sixth embodiment of the interdigital coupling resonator of the present invention. The present invention is a two-fork type coupling resonator 10A, 10B. Parallel, respectively output the resonant frequency and output the resonant frequency signal to the ASIC chip. For example, the input electrode 110A and the input electrode 110C are electrically connected to the ASIC chip, and the output electrode 110B and the output electrode 110D are electrically connected to the ASIC chip. The ASIC chip provides a signal to the input electrodes 110A, 110C. The input electrodes 110A, 110C drive the resonant beams 120A, 120B, 130A, 130B to oscillate, and the output electrodes 110B, 110D sense the resonant beams 120A, 120B, The oscillation frequency of 130A, 130B is output to the ASIC wafer.

The structure of the interdigitated coupling resonators 10A, 10B of the present embodiment can be constructed as described above, but is not limited to the embodiments, and all embodiments that are within the spirit of the present invention are the present invention. The scope of protection.

The interdigital coupling resonators 10A, 10B respectively include a first and second resonant structures 100A, 100B, the first and second resonant structures 100A, 100B including a coupling beam 140 for the first and second resonant structures 100A , 100B connection. The first and second resonant structures 100A, 100B respectively include one or more resonant beams 120A, 120B, 130A, 130B, and the first resonant structure 100A and the second resonant structure 100B can be as shown in FIG. 2, FIG. 3 or FIG. The embodiment forms, and therefore the same structure will not be repeated.

The width of the resonant beam 120A, 130A is W1, and the width of the resonant beam 120B, 130B is W2, according to the width of the resonant beam 120A, 130A described above W = (2n + 1) × λ / 2, where n is 0, 1, 2, 3, 4, ..., and the length of the coupling beam 140 between the two resonant beams 120A, 130A is A1 = (m + 1) × λ / 4, where m is 0, 1, 2, 3, 4..., the resonant frequency of the first resonant structure 100A is f ₁ . The width of the resonant beam 120B, 130B is W2 = (2n' + 1) × λ'/2, where n' is 0, 1, 2, 3, 4.... The coupling beam 140 is located between the two resonant beams 120B, 130B with a length A2=(m'+1)×λ'/4, where m' is 0, 1, 2, 3, 4..., the resonant structure 100B The resonance frequency is f ₂ .

Thus, when W1 is not equal to W2, the first and second resonant structures 100A, 100B, two frequencies f ₁ and f ₂ can be output, wherein the widths of the resonant beams 120A, 130A are half wavelengths of the resonant beam resonant frequency f ₁ , resonance The width of the beams 120B, 130B is a half wavelength of the resonant beam resonance frequency f ₂ .

8 is a top plan view of a finger-type coupling resonator with a frequency selective output function according to a seventh embodiment of the interdigitated coupling resonator of the present invention. The present invention is a two-fork type coupling resonator 10A, 10B. Separate settings, respectively output the resonant frequency, and the resonant frequency signal is sent to the ASIC chip. For example, the input electrode 110A and the input electrode 110C are electrically connected to the ASIC chip, and the output electrode 110B and the output electrode 110D are electrically connected to the ASIC chip.

The ASIC chip provides a signal to the input electrodes 110A, 110C. The input electrodes 110A, 110C drive the resonant beams 120A, 120B, 130A, 130B to oscillate, and the output electrodes 110B, 110D sense the resonant beams 120A, 120B, The oscillation frequency of 130A, 130B is output to the ASIC wafer. The first and second resonant structures 100A, 100B are respectively connected to the resonant structures 100A, 100B by a selection function circuit 20. The ASIC chip inputs a signal to the selection function circuit 20 to selectively drive the first resonant structure 100A or the second resonant structure 100B, thereby achieving the function of selecting a frequency of the output signal.

The structure of the interdigitated coupling resonators 10A, 10B of the present embodiment can be constructed as described above, but is not limited to the embodiments, and all embodiments that are within the spirit of the present invention are the present invention. The scope of protection.

The first and second resonant structures 100A, 100B respectively include one or more resonant beams 120A, 120B, 130A, 130B, and the first resonant structure 100A and the second resonant structure 100B can be as shown in FIG. 2, FIG. 3 or FIG. The embodiment forms, and therefore the same structure will not be repeated. The width of the resonant beam 120A, 130A is W1, and the width of the resonant beam 120B, 130B is W2, according to the width of the resonant beam 120A, 130A described above W = (2n + 1) × λ / 2, where n is 0,1,2,3,4..., and the length of the coupling beam 140 between the two resonant beams 120, 130 is A1=(m+1)×λ/4, where m is 0, 1, 2, 3, 4..., the resonant frequency of the first resonant structure 100A is f ₁ . The width W2 of 120B, 130B is (2n'+1) × λ'/2, where n' is 0, 1, 2, 3, 4.... The coupling beam 140 is located between the two resonant beams 120B, 130B with a length A2=(m'+1)×λ'/4, where m' is 0, 1, 2, 3, 4..., the resonant structure 100B The resonance frequency is f ₂ . Therefore, the first resonant structure 100A or the second resonant structure 100B can be selectively driven by the selection function circuit 20, thereby achieving the function of selecting a frequency of the output signal.

In summary, in the above embodiment of the present invention, an interdigital type coupled resonator that generates a bulk wave mode resonance is obtained by coupling a side-by-side resonant beam by a coupling beam, wherein the coupling beam is The length is one of the two sides of the resonant wavelength. This allows the resonant beam to be extended in the direction of its extension to increase the area. It is also possible to connect a plurality of side-by-side resonant beams by means of a coupling beam. In other words, the resonant structure composed of the above resonant beam and the coupling beam can be expanded in the two-dimensional space, thereby effectively increasing the capacitive sensing area to reduce its impedance, thereby improving its output efficiency.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

10, 200, 10A, 10B. . . Interdigitated coupling resonator

20. . . Select function circuit

100, 211. . . Resonance structure

100A. . . First resonance structure

100B. . . Second resonance structure

110A, 240A, 110C. . . Input electrode

111. . . Conductive structure

111A, 111B. . . First end

112A, 112B. . . Second end

110B, 240B, 110D. . . Output electrode

120, 130, 220, 120A, 120B, 130A, 130B. . . Resonant beam

140, 230. . . Coupling beam

150, 210. . . Substrate

160, 250. . . supporting structure

161, 251. . . First support member

1611, 2511. . . First support element

1612, 2512. . . First mount

162, 252. . . Second support member

1621, 2521. . . Second support element

1622, 2522. . . Second mount

2513, 2523. . . cantilever

2514. . . First elastic support

2524. . . Second elastic support

241, 242. . . Groove

B1. . . First member

B2. . . Second member

C1. . . Third member

C2. . . Fourth member

F1, F2. . . Fork structure

L1. . . First axial direction

L2. . . Second axial direction

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view showing a first embodiment of an interdigitated coupling resonator of the present invention.

Figure 2 is a plan view showing a second embodiment of the interdigitated coupling resonator of the present invention.

Figure 3 is a plan view showing a third embodiment of the interdigitated coupling resonator of the present invention.

Figure 4 is a plan view showing a fourth embodiment of the interdigitated coupling resonator of the present invention.

Figure 5 is a schematic view showing a fifth embodiment of the interdigitated coupling resonator of the present invention.

Fig. 6 is a partial plan view of the interdigitated coupling resonator of Fig. 5;

Fig. 7 is a plan view showing a finger-type coupling resonator having a dual-frequency output function in a sixth embodiment of the interdigital coupling resonator of the present invention.

Figure 8 is a plan view showing an interdigital type coupling resonator having a frequency selective output function of a seventh embodiment of the interdigital coupling resonator of the present invention.

10. . . Interdigitated coupling resonator

100. . . Resonance structure

110A. . . Input electrode

111. . . Polycrystalline germanium conductive structure

111A. . . First end

112A. . . Second end

110B. . . Output electrode

120, 130. . . Resonant beam

140. . . Coupling beam

150. . . Substrate

160. . . supporting structure

161. . . First support member

1611. . . First support element

1612. . . First mount

162. . . Second support member

1621. . . Second support element

1622. . . Second mount

B1. . . First member

B2. . . Second member

C1. . . Third member

C2. . . Fourth member

L1. . . First axial direction

L2. . . Second axial direction

Claims (20)

An interdigital coupling resonator comprising: a resonant structure comprising a plurality of resonant beams and a coupling beam, the plurality of resonant beam systems being respectively connected to opposite sides of the coupling beam, the resonant beam being perpendicularly connected to the coupling beam; At least one input electrode and at least one output electrode, the input electrode and the output electrode are alternately disposed between the plurality of resonant beams, and the input electrode is disposed on two sides of the coupling beam, and the output electrode is disposed on the coupling beam On both sides, the input electrode and the output electrode and the resonant beam are arranged in parallel with each other, and the input electrode or the output electrode and the adjacent two resonant beams respectively form a capacitance gap, so that the input electrode drives two adjacent resonant beams Vibration or the output electrode senses a change in capacitance caused by vibration of two adjacent resonant beams; a substrate; and a support structure disposed on the substrate, the two ends of the coupling beam being coupled to the support structure to support The resonant structure is above the substrate. The interdigitated coupling resonator according to claim 1, wherein the resonant beam is a bulk mode resonator, wherein the resonant beam width = (2 × n + 1) × λ / 2 Where n is 0, 1, 2, 3, 4..., and λ is the resonant wavelength of the resonant beams in the resonant state. The interdigitated coupling resonator of claim 1, wherein the input electrode comprises a first member and a second member that are separated on both sides of the coupling beam, and the first member and the second member are The conductive structure is connected, and the output electrode comprises a third member and a fourth member which are separated on both sides of the coupling beam, and the third member and the fourth member are connected by the conductive structure. The interdigitated coupling resonator of claim 1, further comprising a first axial direction and a second axial direction, the first axial phase and the second axial phase being perpendicular to each other, and the input An electrode and the output electrode and the resonant beam extend along the first axial direction and are alternately arranged along the second axial direction, wherein the first axial direction, the second axial direction and the input electrode, the output electrode, the The resonant beam and the coupling beam are on the same plane. The interdigitated coupling resonator of claim 1, wherein the input electrode and the output electrode are respectively connected to an integrated circuit (ASIC), and the input electrode and the output electrode are driven and sensed. The resonant beam vibrates along the second axis. The interdigitated coupling resonator of claim 1, wherein the coupling beam is located between the two resonant beams = (m + 1) × λ / 4, where m is 0, 1, 2, 3 , 4..., and λ is the resonant wavelength of the two resonant beams in the resonant state. The interdigitated coupling resonator of claim 1, wherein the length of the coupling beam between the two resonant beams is equal to the width of the coupling beam. The interdigitated coupling resonator according to claim 1, wherein the cross-sectional shape of the resonant beam is a rectangular shape. The interdigitated coupling resonator of claim 1, wherein the resonant structure is an anisotropic material. The interdigitated coupling resonator of claim 1, wherein the electrically conductive structure is a polycrystalline semiconductor material or a metal. The interdigitated coupling resonator of claim 1, wherein the supporting structure comprises a first supporting member and a second supporting member, the first supporting member comprising a first supporting member and a first fixing a first support member disposed on the first mount, such that one end of the coupling beam is disposed on the first support member; and the second support member includes a second support member and a second mount The second supporting member is disposed on the second fixing base such that the other end of the coupling beam is disposed on the second supporting member. The interdigitated coupling resonator according to claim 1, wherein the input electrode or the output electrode is located on the same side of the coupling beam and the same end side is connected to each other to form a fork structure. The interdigitated coupling resonator of claim 1, wherein the input electrode is integrally formed under the coupling beam, and the input electrode is provided with a groove at the position below the coupling beam for the input. The electrode is disposed, and the output electrode is integrally formed under the coupling beam, and the output electrode is disposed at a position below the coupling beam with a groove for the output electrode to be disposed. The interdigitated coupling resonator according to claim 1, wherein the arrangement of the input electrode, the output electrode, the input electrode, the output electrode, the input electrode, and the output electrode is alternately arranged in sequence between the resonant beams. An interdigitated coupling resonator includes: a first resonant structure comprising: a plurality of resonant beams and a coupling beam, the plurality of resonant beam systems being respectively connected to opposite sides of the coupling beam, the resonant beam and the coupling beam Vertical connection; one or more electrodes are disposed between two adjacent resonant beams and form a capacitance gap with the two resonant beams respectively, so that the electrode drives two adjacent resonant beams to vibrate or sense the capacitance change caused by the vibration of two adjacent resonant beams The second resonant structure includes: a plurality of resonant beams and a coupling beam, and the plurality of resonant beam beams are symmetrically connected to opposite sides of the coupling beam, the resonant beam and the resonant beam are respectively The coupling beams are vertically connected; one or more electrodes are disposed between the two adjacent resonant beams and form a capacitive gap with the two resonant beams respectively, so that the electrodes drive two adjacent resonant beams to vibrate or sense the vibration of two adjacent resonant beams. The capacitance changes, the electrode and the resonant beam are arranged parallel to each other; a substrate; a supporting structure is disposed on the substrate, and the two ends of the coupling beam are connected to the supporting structure to make a branch The first and second resonant structure in the upper substrate. The interdigitated coupling resonator according to claim 15, wherein the resonant beam width = (2 × n + 1) × λ / 2, wherein n is 0, 1, 2, 3, 4... And λ is the resonance wavelength of the resonant beam in the resonant state. The interdigitated coupling resonator of claim 15, wherein the length of the coupling beam between the two resonant beams is = (m + 1) × λ / 4, where m is 0, 1, 2, 3 , 4..., and λ is the resonant wavelength of the resonant beam in the resonant state. The interdigitated coupling resonator of claim 15, wherein the first resonant structure is connected in parallel with the second resonant structure and the coupling beam is connected. The interdigitated coupling resonator of claim 15, wherein the first resonant structure is separated from the second resonant structure. The interdigitated coupling resonator of claim 15, wherein the width of the resonant beam of the first resonant structure is not equal to the width of the resonant beam of the second resonant structure.